CN100449316C - Arrangement structure of sensing elements of six-axle acceleration transducer - Google Patents

Abstract

The required layout structure for the sensing element of 6-axis accelerometer comprises: a base with main body as a cube with opposite two corners parallel cut and one cutting plane as the assembly plane for the sensor, and sensing element included 6 same single-axis accelerometers all arranged on the base with assembly axis paralleled to the cube edges, wherein the 6 edges are connected in turns while any three of them are not on one plane. This invention has compact structure and small volume to obtain the 6D acceleration information and convenient to process.

Description

A kind of layout method of sensitive element of six-axle acceleration sensor

Technical field

The present invention relates to a kind of acceleration transducer, particularly a kind of layout method of sensitive element of the six-axle acceleration sensor that can be used for obtaining the six degree of freedom acceleration.

Background technology

Along with people improve constantly and scientific and technical continuous development the requirement of understanding objective world, survey more and more important to the multidimensional feature in the physical environment.The development of multidimensional acceleration signature Detection Techniques will not only help the development of Robotics, aeronautical and space technology, weapon technology, and this technology will also be with a wide range of applications in fields such as industry automatic control, Vehicle Engineering, earthquake prediction.Acceleration transducer is a kind of as inertia device, is a kind of important mechanical quantity sensor.In fields such as industry automatic control, Vehicle Engineering, robot, earthquake prediction, military affairs and Aero-Space, have widely and use.The theory and the technology of tradition acceleration transducer become better and approaching perfection day by day, but basically to realize that single shaft (one dimension) is measured as the master.In recent years, (Micro Electronic Mechanical Systems, the MEMS) appearance of the rise of technology and silicon micromachining technique has expedited the emergence of the silicon micro mechanical acceleration transducer owing to Micro Electro Mechanical System.Because the distinct advantages of silicon micromachining technique makes acceleration sensing carry out the transition to multidimensional (only limiting to two and three dimensions at present) from one dimension.Although the silicon micro mechanical acceleration transducer has the advantage of many uniquenesses, still can't match in excellence or beauty aspect precision of measuring and the resolution with traditional acceleration transducer.Simultaneously, the research and development of silicon micro mechanical acceleration transducer only limit to three-dimensional following multi-axis accelerometer.

Because most accelerometer can only detect one or two axial acceleration, and in a lot of the application, need the sense acceleration vector, therefore multidimensional acceleration sensing theory and technology are research focuses in recent years, develop into multidimensional acceleration sensing (only limiting to two and three dimensions) from the one dimension acceleration sensing, have benefited from the development of silicon micromachining technique to a great extent.The method that realizes the multidimensional acceleration sensing mainly contains three major types:

First kind multiaxis accelerometer is that a plurality of single-axis accelerometers are fitted together formation (classic method), and this method has reduced the mechanical precision and the microminiaturization degree of accelerometer.

The second class multi-axis accelerometer is based on the silicon micro mechanical acceleration transducer of the principle exploitation of condenser type, piezoelectric type, pressure resistance type and resonant mode.Tabata and Yamamoto propose and have studied a kind of principle that causes two resonant acceleration meters of frequency change based on the harmonic oscillator stiffness variation.People such as Kunz have developed three piezoelectric accelerometers of shared same inertial mass, adopt the piezoelectric membrane detector of deep reaction ion etching technology integrated high-sensitivity on soi wafer to constitute.People such as Takao have developed the pressure resistance type three axis accelerometer based on said structure, and purpose is to improve the temperature range of use.People such as Matsumoto adopt direct key of silicon and soi wafer to develop three capacitive accelerometers of three shared same substrates of inertial mass, people such as Qu have utilized the UV-LIGA technological development three condenser type differential accelerometers of three shared same substrates of inertial mass, the method that Cao Xin equality people utilizes silicon/glass anode linkage technology to combine with deep reaction ion etching technology processes three condenser type differential accelerometers of three shared same substrates of inertial mass.Three kinds of three capacitance silicon micro-acceleration sensors studying in the above-mentioned document, except the process difference, principle and indistinction.Because as if the restriction of structure and principle aspect from the current situation of present silicon micromachining technique, want at the silicon micro-acceleration sensor of recent development more than three unrealistic.

The 3rd class multi-axis accelerometer adopts the principle of electrostatic suspension to realize acceleration sensing.People such as Josselin realize having done aspect the acceleration sensing in the principle that adopts electrostatic suspension has ground-breaking work, and Tang Furong and Xue Datong also adopt the electrostatic suspension principle to design three and six-axle acceleration sensor respectively.But have feasibility to realizing six-axle acceleration sensing problem, just mentioning in the present document, do not provide theoretical analysis conclusion and experimental studies results.Electrostatic suspension formula acceleration transducer is also measured acceleration by measuring changes in capacitance, although the high advantage of measuring accuracy is arranged, but high-voltage breakdown takes place easily, can not bear bigger acceleration input, therefore the range of measuring is little, frequency band is narrow, only is applicable to the acceleration analysis (as space microgravity environment etc.) in the particular surroundings.

In sum, only limit to the principle research and development of three-dimensional and following multi-axis accelerometer thereof at present, main cause may be to be subjected to the restriction of the principle and the configuration aspects of multidimensional acceleration sensing.

Summary of the invention

The object of the present invention is to provide a kind of based on cube structure, adopt the layout method of six single-axis acceleration sensors as the six-axle acceleration sensor of sensitive element, to obtain six degree of freedom acceleration sensing information, comprise three translatory accelerations and three angular acceleration correspondingly.

Technical scheme of the present invention is as follows:

The layout method of the sensitive element of six-axle acceleration sensor described in the present invention, comprise by pedestal and sensitive element, described pedestal is realized based on cube structure, two angles by the parallel cube diagonal angle of pruning, and the mounting plane that processes sensitive element obtains, and one of them cutting plane is as the mounting plane of six-axle acceleration sensor; Sensitive element is six single-axis acceleration sensors that characteristic is identical, be installed on the pedestal, it is installed axis and is parallel to pairing cubical six seamed edges of pedestal respectively, and these six seamed edges satisfy following feature, join end to end successively, and any three seamed edges are not at grade.

The present invention has following advantage:

1. structure of the present invention adopts six single-axis acceleration sensors integrated by a kind of special pedestal, compact conformation, and volume is little, can obtain the six-dimension acceleration information that comprises three translatory accelerations and angular acceleration correspondingly.

2. when adopting the single-axis acceleration sensors of six characteristics identical (comprising sensitivity, resolution, frequency response range, weight etc.), can make that the data processing of obtaining six-dimension acceleration is simple.

3. adopted cube structure, data result is handled simple.

Description of drawings

Fig. 1 (a), Fig. 1 (b), Fig. 1 (c) are respectively structural representation, vertical view, the sectional view of the citation form of Base body among the present invention.

Fig. 2 (a), Fig. 2 (b) are respectively structural representation, the skeleton view of the citation form of the Base body of being out of shape among the present invention.

Fig. 3 is the layout structure figure of six single-axis acceleration sensors on the six-axle acceleration sensor of integrated footings among the present invention.

Fig. 4 is the shape assumption diagram of integrated footings among the present invention.

Fig. 5 (a), Fig. 5 (b) are respectively the vertical view and the sterogram of the six-axle acceleration sensor of split type pedestal among the present invention.

Fig. 6 (a), Fig. 6 (b), Fig. 6 (c) are respectively the view of the pedestal of the six-axle acceleration sensor of split type pedestal among the present invention along vertical three side support side.

Fig. 7 (a), Fig. 7 (b), Fig. 7 (c), Fig. 7 (d) are respectively the three kinds of lateral plans and the vertical view of the central supported of split type pedestal among the present invention.

Fig. 8 (a), Fig. 8 (b) are respectively the upward view and the front view of the central supported of split type pedestal among the present invention.

Fig. 9 (a), Fig. 9 (b) are the front elevation and the side view of the side support of split type pedestal among the present invention.

Embodiment

Specify structure of the present invention below in conjunction with embodiment and accompanying drawing:

As shown in Figure 1, the pedestal of six-axle acceleration sensor is to obtain through structural change on a cubical basis, and structure shown in Figure 1 is the most basic a kind of version of Base body, i.e. the main part of integrated footings.Shown in Fig. 1 (a), cone angle H-ACE prunes along the plane that three summit ACE of cube ABCDEFGH (its seamed edge length is L) constitute, the cone angle G-BDF that prunes along the plane that three summit BDF of cube ABCDEFGH constitute can obtain the integrated footings main body.The integrated footings main body be six join end to end, any three seamed edges at grade seamed edge L not ₁-L ₆Connecting the structure that plane triangle ACE and BDF constitute, is the mounting plane (being the mounting plane of six-axle acceleration sensor) of pedestal with cutting plane BDF, shown in Fig. 1 (b).Fig. 1 (c) is a kind of sectional view of this structure, and the height Z of pedestal (being the distance of face ACE to face BDF) can be provided by following formula

$Z=\frac{\sqrt{3}}{3}L---\left(1\right)$

When constituting six-axle acceleration sensor with Base body shown in Figure 1, the axis of six single-axis acceleration sensors must be respectively and six seamed edge L ₁-L ₆Parallel, and preferably point to same triangle projective planum ACE or BDF.

Base body also can have various deformation, along the arbitrary plane parallel with triangle projective planum ACE or BDF two diagonal angles of pruning, obtains the Base body structure of distortion as respectively, is depicted as a kind of split type Base body as Fig. 2 (a) and Fig. 2 (b).This moment, the plane of intercepting was plane hexagon IJKLMN and triangle OPQ.Intercepting cubical two plane-parallel positions is determined by the physical dimension of selected single-axis acceleration sensors.

Figure 3 shows that the layout structure of six single-axis acceleration sensors on the six-axle acceleration sensor of integrated footings, 1,4,6,7,9 and 12 is six single-axis acceleration sensors among the figure, they are installed on the mounting plane of integrated footings 5 sides by attachment screw (for having the single-axis acceleration sensors that connects screw), perhaps adopt special bonding agent (for not having the single-axis acceleration sensors that connects screw and adopt bonding agent to connect) to be connected with mounting plane, as shown in Figure 4,13 for being used to connect the connection screw of single-axis acceleration sensors.Pedestal 5 is obtained by the mounting plane that the described integrated footings main body of Fig. 1 processes six single-axis acceleration sensors.Six single- axis acceleration sensors 1,4,6,7,9 are parallel with former cubical six ribs that obtain pedestal 5 respectively with 12 axis, and these six seamed edges satisfy following feature: join end to end successively, and any three seamed edges are not on a plane.And the installation axis of six single-axis acceleration sensors is vertical mutually successively, single-axis acceleration sensors is between two intersection points of its installation axis and adjacent acceleration transducer installation axis (between Fig. 4 mid point A` and B`), each line segment length is identical in the loop wire (as dot-and-dash line among Fig. 4) that six intersection points (some A`, B`, C`, D`, E` and F`) are connected in turn, and the geometric center of loop wire is identical with the barycenter of pedestal, the mounting plane of six-axle acceleration sensor and any mutually non-conterminous three intersection points (as Fig. 4 mid point A`, C` and E`) the formation plane parallel.The connection screw that (being one of them cutting plane behind the former cube cutting diagonal angle) is processed with standard on the mounting plane of pedestal 5 is connected with measurand.8 is the mounting plane (the corresponding installation surface of each single-axis acceleration sensors) of single-axis acceleration sensors, and the axis normal of mounting plane and single-axis acceleration sensors.The center of the upper surface 11 of pedestal 5 is processed with counterbore 10 to alleviate the weight of six-axle acceleration sensor.

Fig. 5 (a) and Fig. 5 (b) are depicted as the embodiment of another kind of six-axle acceleration sensor, and its pedestal is for dividing body structure, are supported by central supported and side to constitute, and its objective is simple and alleviate sensor mass for structure processing.Wherein central supported is the another kind distortion of Base body structure shown in Figure 1, shown in Fig. 2 (b).By Fig. 2 (a) as can be known, the central supported of split type pedestal is respectively along parallel with plane triangle ACE (BDF) and obtain near two plane top rakes of a drift angle, therefore the last plane 27 (as Fig. 7) of gained is a hexagon, and lower plane 21 (as Fig. 6,7) still is an equilateral triangle.

Among Fig. 6 and Fig. 7, on mutual rectangular three faces 23,25,26 of central supported 18, all be processed with and connect screw 24 and pin hole 22, be used to install three sides and support 15,17,20, central supported 18 and side are connected by socket head cap screw 16 between supporting 15,17,20, and it is spacing to pass through tommy.The center of the triangle lower plane 21 under central supported is processed with installs screw 19, be used to install six-axle acceleration sensor in measurand, the center on sexangle plane 27 thereon is processed with counterbore 28 and screw 29 is installed, counterbore 28 is used to alleviate the total quality of sensor, screw 29 is installed is used for the installation calibrating sensor.The face 23,25,26 of central supported 18 supports 15,17,20 installation base surface for side, triangle lower plane 21 is the installation base surface of six-axle acceleration sensor on measurand, add and have flatness and surfaceness requirement man-hour, and between the installation base surface 23,25,26 mutual verticality requirement is arranged.Plane 27 is the inoperative basal plane on the sexangle, and adding does not have specific (special) requirements man-hour.

Fig. 7 and Fig. 8 (a) and 8 (b) are the concrete structure of central supported 18.In Fig. 8 (a) and 8 (b), do not draw and be connected screw and pin hole.30 are the vertex of a cone pruned, central supported 18 height can provide by following formula:

H＝h3-(h1-h2) (2)

H1 is the standoff height of the cubical drift angle H-OPQ under cutting in the formula, and h2 is the standoff height of the cubical drift angle under cutting, and h3 is provided by following formula respectively for the standoff height of the cubical drift angle H-ACE under cutting along ACE

$\mathrm{<figure-callout\; id="1"\; label="h"\; filenames="C20061009502800101.png"\; state="\{\{state\}\}">h</figure-callout>}1=\frac{\sqrt{3}}{3}{\mathrm{\&rho;}}_{1}L---\left(3\right)$

ρ in the formula ₁Be the seamed edge length of the vertex of a cone 30 pruned and the scale-up factor of cubical seamed edge length.

$h2=\frac{\sqrt{3}}{3}{\mathrm{\&rho;}}_{2}L---\left(4\right)$

ρ in the formula ₂Be the seamed edge length of the frustum pruned and the scale-up factor of cubical seamed edge length.

$h3=\frac{\sqrt{3}}{3}L---\left(5\right)$

The projected length of cube seamed edge L is provided by following formula

$M=\frac{\sqrt{30}}{6}L---\left(6\right)$

The projected length of the seamed edge of the cubical vertex of a cone of pruning 30 is provided by following formula

$\mathrm{<figure-callout\; id="1"\; label="M"\; filenames="C20061009502800101.png"\; state="\{\{state\}\}">M</figure-callout>}1=\frac{\sqrt{30}}{6}{\mathrm{\&rho;}}_{1}L---\left(7\right)$

Fig. 9 is that the side of split type pedestal supports, and is processed with on it to connect screw 33 and pin hole 34, is used to connect side and supports and pedestal.35 is the technology via hole.On sensor installed surface 32 and 36, be processed with and be connected screw 31, be used to connect single-axis acceleration sensors.It should be noted that connecting screw 31 is not to be in symmetric position on sensor installed surface 32 and 36, mainly is in order to alleviate quality.Size Rmax has determined the maximum radius of the single-axis acceleration sensors that can install among Fig. 9.Promptly the maximum radius of the single-axis acceleration sensors that can install is less than Rmax.The installed surface 32 and 36 of single-axis acceleration sensors has flatness and surfaceness requirement, and mutual verticality requirement is arranged between installed surface 32 and 36.Face 38 on side supports is a non-working surface, and adding does not have specific (special) requirements man-hour, and the face 37 on side supports is the installation base surface on the central supported 18, and flatness and surfaceness requirement are arranged.

Claims (3)

1, a kind of layout method of sensitive element of six-axle acceleration sensor, include pedestal and sensitive element, it is characterized in that: described pedestal is to be pruned two diagonal angles and obtain along the arbitrary plane parallel with cubical triangle projective planum ACE or BDF by cube, and one of them cutting plane is as the mounting plane of six-axle acceleration sensor; Sensitive element is six single-axis acceleration sensors that characteristic is identical, be installed on the pedestal, it is installed axis and is parallel to pairing cubical six seamed edges of pedestal respectively, and these six seamed edges satisfy following feature: join end to end successively, and any three seamed edges are not at grade.

2, the layout method of the sensitive element of six-axle acceleration sensor according to claim 1, it is characterized in that: the installation axis of six sensitive elements is vertical mutually successively, sensitive element is installed between two intersection points of axis and adjacent sensitive element installation axis at it, six intersection points each line segment length that is connected in turn in the loop wire is identical, and the geometric center of loop wire is identical with the barycenter of pedestal, the mounting plane of six-axle acceleration sensor and arbitrarily mutual non-conterminous three plane parallel that intersection point constitutes.

3, the layout method of the sensitive element of six-axle acceleration sensor according to claim 1 and 2 is characterized in that: the height unanimity of the mounting plane of the distance of centre of gravity six-axle acceleration sensor of described each sensitive element.

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