CN103454449A - Three-axis micro-mechanical accelerometer - Google Patents
Three-axis micro-mechanical accelerometer Download PDFInfo
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- CN103454449A CN103454449A CN2013104179571A CN201310417957A CN103454449A CN 103454449 A CN103454449 A CN 103454449A CN 2013104179571 A CN2013104179571 A CN 2013104179571A CN 201310417957 A CN201310417957 A CN 201310417957A CN 103454449 A CN103454449 A CN 103454449A
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Abstract
The invention relates to a three-axis micro-mechanical accelerometer which comprises a substrate and an accelerometer body fixedly arranged on the substrate. The accelerometer body comprises a mass block, a Z-axis detection electrode plate and a plane detection unit. The plane detection unit is composed of four detection modules which are distributed around the mass block in the z-axis and the y-axis, the plane detection unit comprises a resonator, a lever beam and a traction beam, and the z-axis detection electrode plate is fixedly arranged on the position, corresponding to the mass block, of the substrate. The three-axis micro-mechanical accelerometer achieves quick acceleration measuring by means of a variable frequency method and a variable capacitance method, is strong in interference signal resistance, simple in wiring mode and little in signal coupling, and has relatively high signal-noise ratio. The three-axis micro-mechanical accelerometer has the advantages of being small in size, high in integrity, little in power consumption, suitable for large-scale production, low in cost and the like, and has good measuring precision and sensitivity.
Description
Technical field
The present invention relates to a kind of micro-mechanical accelerometer, relate in particular to a kind of single structure three axle micro-mechanical accelerometers.Belong to micro mechanical system (MEMS) field.
Background technology
As a kind of inertia device, accelerometer is widely used in the fields such as Aero-Space, automatic control and vibration-testing, development along with the MEMS technology, adopt the micro-mechanical accelerometer of MEMS technical design and making to have advantages of that volume is little, integrated level is high, reliability is high and cost is low, in the military and civilian field, have broad application prospects, as automobile, navigation, biology and medical instruments field.
The tradition three axis accelerometer is that three discrete single-axis accelerometer three axle quadratures are fitted together to the combination unit that forms three-axis measurement, and this array mode is unfavorable for the microminiaturization degree of three axis accelerometer.The Chinese patent that the patent No. is 200710061738 discloses a kind of three-axis piezoresistance micro-accelerometer, and this accelerometer supports mass by elastic supporting beams, and the variation of the voltage dependent resistor (VDR) caused by the vibration of measurement quality piece carrys out the size of sense acceleration.The Chinese patent that the patent No. is 201110319018.4 has been announced the integrated eight beam three axis accelerometers of a kind of monolithic on above-mentioned three-axis piezoresistance micro-accelerometer basis, by making test benchmark resistance, is arranged symmetrically with, and reduces between centers and is coupled and improves sensitivity.
Three axis accelerometer that above-mentioned patent is announced all adopts the power transformation resistance to carry out acceleration analysis, when processing, signal at first needs the resistance variations signal is converted to voltage or current signal, when the accelerometer size further diminishes, the effect of signal coupling and interference can aggravate, thereby is unfavorable for improving the measuring accuracy of accelerometer.
The present invention adopts Frequency varying method and becomes capacitance method and realizes acceleration analysis, by directional acceleration in the sensitive plane of resonant frequency, acceleration by the responsive vertical plane direction of plate condenser capacitance variations, the anti-jamming signal ability is strong, has that volume is little, integrated level is high, power consumption is little simultaneously, is applicable to producing in enormous quantities and low cost and other advantages; Can realize good measuring accuracy and sensitivity.
Summary of the invention
The invention provides a kind of single structure three axle micro-mechanical accelerometers, change accelerometer by Frequency varying method and become capacitance method and realize acceleration analysis, the anti-jamming signal ability is strong, have that volume is little, integrated level is high, power consumption is little simultaneously, be applicable to producing in enormous quantities and low cost and other advantages, can realize good measuring accuracy and sensitivity.
The present invention is achieved through the following technical solutions:
A kind of three axle micro-mechanical accelerometers, comprise substrate and be fixedly mounted on the accelerometer main body on substrate.Described accelerometer main body comprises that mass, z repacking survey battery lead plate and plane detecting unit, and its midplane detecting unit is comprised of four detection modules, and four modules are distributed in respectively the periphery of mass along x axle and y axle.Described plane detection module comprises resonator, lever beam and draw beam, and wherein resonator one end is fixed on substrate, and the other end is connected with the lever beam; Lever beam one end is fixed on substrate, and the other end is connected with draw beam; Draw beam one end is connected with the lever beam, and the other end is connected with mass.Described z repacking is surveyed battery lead plate and is installed with on substrate the position corresponding to mass.
In above-mentioned three axle micro-mechanical accelerometers, resonator comprises resonator body and fixed electorde, and wherein resonator body is single-spar construction or twin beams tuning fork structure, and fixed electorde is installed with on substrate.
A kind of three axle micro-mechanical accelerometers, comprise substrate and be fixedly mounted on the accelerometer main body on substrate.Described accelerometer main body comprises mass, z repacking survey battery lead plate and plane detecting unit, and its midplane detecting unit is comprised of four detection modules, and four modules are uniformly distributed with substrate center's point symmetry along x axle and y axle respectively.Described plane detection module comprises resonator, lever beam A, lever beam B, draw beam A and lever brace summer, and wherein the resonator two ends are connected with lever beam B with lever beam A respectively; Lever beam A mono-end is fixed on substrate, and the other end is connected with draw beam A; Lever beam B mono-end is connected with resonator, and the other end is connected with mass, and the lever beam is installed with on substrate by the lever brace summer; Draw beam A mono-end is connected with lever beam A, and the other end is connected with mass.Described z repacking is surveyed battery lead plate and is installed with on substrate the position corresponding to mass.
In above-mentioned three axle micro-mechanical accelerometers, resonator comprises resonator body and fixed electorde, and wherein resonator body is single-spar construction or twin beams tuning fork structure, and fixed electorde is installed with on substrate.
In above-mentioned three axle micro-mechanical accelerometers, mass comprises interior mass, outer mass and outer mass brace summer, the centre of interior mass counterpart substrate wherein, outer mass and outer mass brace summer are four, wherein two distribute with substrate center's point symmetry along the x axle, and two other distributes with substrate center's point symmetry along the y axle.Outer mass brace summer one end is fixed on substrate, and the other end is connected with outer mass.
The present invention compared with prior art has following beneficial effect:
(1) three-axis gyroscope of the present invention adopts Frequency varying method and becomes capacitance method and realizes acceleration analysis, measures highly sensitively, and antijamming capability is strong; Wire laying mode is simple simultaneously, and signal coupling is little, has improved signal to noise ratio (S/N ratio), can realize higher measuring accuracy;
(2) three axis accelerometer compact conformation of the present invention, volume is little, integrated level is high, can significantly reduce the accelerometer volume and weight, is with a wide range of applications;
(3) gyroscope manufacture craft of the present invention simple, with low cost, there is superior performance, be applicable to producing in enormous quantities.
The accompanying drawing explanation
The perspective view that Fig. 1 and Fig. 5 are single structure micromechanics three axis accelerometer of the present invention.
The schematic diagram that Fig. 2 and Fig. 6 are single structure micromechanics three axis accelerometer structural sheet of the present invention.
Fig. 3 and Fig. 7 are that single structure micromechanics three axis accelerometer structural sheet of the present invention is along the A-A sectional view.
The front view that Fig. 4 and Fig. 8 are single structure micromechanics three axis accelerometer substrate of the present invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention is described in further detail:
Be the perspective view of single structure micromechanics three axis accelerometer of the present invention as shown in Figure 1 and Figure 5, three axle micro-mechanical accelerometers comprise substrate 1 and are fixedly mounted on the accelerometer main body 2 on substrate 1.Accelerometer main body 2 comprises that mass 3, z repacking survey battery lead plate 7(are as shown in Fig. 4 and 8) and the plane detecting unit, its midplane detecting unit is comprised of four detection modules, four modules are distributed in the periphery of mass 3 along x axle and y axle respectively, and along x axle and y axle, with substrate 1 central point, are uniformly distributed respectively.
As Fig. 2 is single structure micromechanics three axis accelerometer structural sheet schematic diagram of the present invention, the plane detection module comprises resonator, lever beam 5 and draw beam 6 as seen from the figure, and wherein resonator is fixed on substrate 1, and is connected with lever beam 5; Lever beam 5 one ends are fixed on substrate, and the other end is connected with draw beam 6; Draw beam 6 one ends are connected with lever beam 5, and the other end is connected with mass 3.
As Fig. 6 is single structure micromechanics three axis accelerometer structural sheet schematic diagram of the present invention, the plane detection module comprises resonator, lever beam (A) 5, lever beam (B) 10, draw beam (A) 6 and lever brace summer 11 as seen from the figure, and wherein the resonator two ends are connected with lever beam (B) 10 with lever beam (A) 5 respectively; Lever beam (A) 5 one ends are fixed on substrate, and the other end is connected with draw beam (A) 6; Lever beam (B) 10 1 ends are connected with resonator 4, and the other end is connected with mass 3, and the lever beam is installed with on substrate 1 by lever brace summer 11; Draw beam (A) 6 one ends are connected with lever beam (A) 5, and the other end is connected with mass 3.Mass 3 comprises interior mass 3a, outer mass 3b and outer mass brace summer 3c, the centre of interior mass 3a counterpart substrate 1 wherein, outer mass 3b and outer mass brace summer 3c are four, wherein two distribute with substrate 1 central point along the x axle, and two other distributes with substrate 1 central point along the y axle.Outer mass brace summer 3c mono-end is fixed on substrate, and the other end is connected with outer mass 3b.
Resonator comprises resonator body 8 and fixed electorde 9, and resonator body 8 is single-spar construction or twin beams tuning fork structure, and described fixed electorde 9 is installed with on substrate 1.
As shown in Figure 4 and Figure 8, the position corresponding to mass 3 on substrate 1 makes metal level, forms z repacking and surveys battery lead plate 7.
The above; only be the embodiment of the best of the present invention, but protection scope of the present invention is not limited to this, anyly is familiar with in technical scope that those skilled in the art disclose in the present invention; the variation that can expect easily or replacement, within all should being encompassed in protection scope of the present invention.
The content be not described in detail in instructions of the present invention belongs to professional and technical personnel in the field's known technology.
Claims (5)
1. an axle micro-mechanical accelerometer, is characterized in that: comprise substrate (1) and be fixedly mounted on the accelerometer main body (2) on substrate (1); Described accelerometer main body (2) comprises mass (3), z repacking survey battery lead plate (7) and plane detecting unit, its midplane detecting unit is comprised of four detection modules, four modules are distributed in the periphery of mass (3) along x axle and y axle respectively, and along x axle and y axle, with substrate (1) central point, are uniformly distributed respectively; Described plane detection module comprises resonator, lever beam (5) and draw beam (6), wherein resonator is fixed on substrate (1), and be connected with lever beam (5), lever beam (5) one ends are fixed on substrate, the other end is connected with draw beam (6), draw beam (6) one ends are connected with lever beam (5), and the other end is connected with mass (3); Described z repacking is surveyed battery lead plate (7) and is installed with in the upper position corresponding to mass (3) of substrate (1).
2. a kind of three axle micro-mechanical accelerometers according to claim 1, it is characterized in that: described resonator comprises resonator body (8) and fixed electorde (9), described resonator body (8) is single-spar construction or twin beams tuning fork structure, and described fixed electorde (9) is installed with on substrate (1).
3. an axle micro-mechanical accelerometer, is characterized in that: comprise substrate (1) and be fixedly mounted on the accelerometer main body (2) on substrate (1), described accelerometer main body (2) comprises mass (3), z repacking survey battery lead plate (7) and plane detecting unit, its midplane detecting unit is comprised of four detection modules, four modules are distributed in respectively the periphery of mass (3) along x axle and y axle, and four modules are uniformly distributed with substrate (1) central point along x axle and y axle respectively, described plane detection module comprises resonator, lever beam A(5), lever beam B(10), draw beam A(6) and lever brace summer (11), wherein the resonator two ends respectively with lever beam A(5) with lever beam B(11) be connected, lever beam A(5) end is fixed on substrate, the other end and draw beam A(6) be connected, draw beam A(6) end and lever beam A(5) be connected, the other end is connected with mass (3), lever beam B(10) end is connected with resonator, the other end is connected with mass (3), lever brace summer (11) one ends and lever beam B(10) be connected, the other end is installed with on substrate (1), described z repacking is surveyed battery lead plate (7) and is installed with in the upper position corresponding to mass (3) of substrate (1).
4. a kind of three axle micro-mechanical accelerometers according to claim 3, it is characterized in that: described resonator comprises resonator body (8) and fixed electorde (9), described resonator body (8) is single-spar construction or twin beams tuning fork structure, and described fixed electorde (9) is installed with on substrate (1).
5. a kind of three axle micro-mechanical accelerometers according to claim 4, it is characterized in that: described mass (3) comprises interior mass (3a), outer mass (3b) and outer mass brace summer (3c), the centre of interior mass (3a) counterpart substrate (1) wherein, outer mass (3b) and outer mass brace summer (3c) are four, wherein two distribute with substrate (1) central point along the x axle, and two other distributes with substrate (1) central point along the y axle; Described outer mass brace summer (3c) end is fixed on substrate, and the other end is connected with outer mass (3b).
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| CN2013104179571A CN103454449A (en) | 2013-09-15 | 2013-09-15 | Three-axis micro-mechanical accelerometer |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104865406A (en) * | 2015-03-27 | 2015-08-26 | 东南大学 | Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer |
| CN105445496A (en) * | 2014-09-18 | 2016-03-30 | 硕英股份有限公司 | Three-axis accelerometer |
| CN106645999A (en) * | 2016-09-20 | 2017-05-10 | 西北工业大学 | Micro-mechanical resonant electrometer with ultra-high sensitivity |
| CN107015016A (en) * | 2017-05-25 | 2017-08-04 | 东南大学 | A kind of six axle Mierotubule-associated proteins and its processing method based on SOI encapsulation |
| CN108732382A (en) * | 2018-06-22 | 2018-11-02 | 西安交通大学 | With flexible amplification mechanism based on SOQ quartz vibration beam accelerometer chips |
| CN112014597A (en) * | 2020-09-10 | 2020-12-01 | 苏州感测通信息科技有限公司 | Triaxial resonance capacitance type micro-electromechanical accelerometer |
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| CN102539832A (en) * | 2012-01-13 | 2012-07-04 | 北京航空航天大学 | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' |
| CN102590555A (en) * | 2011-11-23 | 2012-07-18 | 中国计量学院 | Resonance-force balance capacitance type three-axis acceleration transducer and manufacture method |
| CN102735780A (en) * | 2012-06-27 | 2012-10-17 | 常州方圆制药有限公司 | Method for monitoring 3,2',6'-tri-N-acetyl gentamicin Cla content |
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| CN103250057A (en) * | 2010-11-26 | 2013-08-14 | 意法半导体股份有限公司 | Resonant biaxial accelerometer structure of the microelectromechanical type |
| CN102147424A (en) * | 2011-03-01 | 2011-08-10 | 东南大学 | Triaxial integration silicon micro-resonance type accelerometer |
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| CN102495236A (en) * | 2011-11-24 | 2012-06-13 | 北京航空航天大学 | High-sensitivity dual-axis silicon-micro resonance accelerometer |
| CN102539832A (en) * | 2012-01-13 | 2012-07-04 | 北京航空航天大学 | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105445496A (en) * | 2014-09-18 | 2016-03-30 | 硕英股份有限公司 | Three-axis accelerometer |
| CN104865406A (en) * | 2015-03-27 | 2015-08-26 | 东南大学 | Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer |
| CN106645999A (en) * | 2016-09-20 | 2017-05-10 | 西北工业大学 | Micro-mechanical resonant electrometer with ultra-high sensitivity |
| CN107015016A (en) * | 2017-05-25 | 2017-08-04 | 东南大学 | A kind of six axle Mierotubule-associated proteins and its processing method based on SOI encapsulation |
| CN108732382A (en) * | 2018-06-22 | 2018-11-02 | 西安交通大学 | With flexible amplification mechanism based on SOQ quartz vibration beam accelerometer chips |
| CN112014597A (en) * | 2020-09-10 | 2020-12-01 | 苏州感测通信息科技有限公司 | Triaxial resonance capacitance type micro-electromechanical accelerometer |
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Application publication date: 20131218 |