CN101038299A - Uniaxle integrated inertia measurement device based on single mass-block - Google Patents

Uniaxle integrated inertia measurement device based on single mass-block Download PDF

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Publication number
CN101038299A
CN101038299A CN 200710061740 CN200710061740A CN101038299A CN 101038299 A CN101038299 A CN 101038299A CN 200710061740 CN200710061740 CN 200710061740 CN 200710061740 A CN200710061740 A CN 200710061740A CN 101038299 A CN101038299 A CN 101038299A
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CN
China
Prior art keywords
fixed
mass
glass cover
quality
inertia measurement
Prior art date
Application number
CN 200710061740
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Chinese (zh)
Inventor
刘俊
石云波
张文栋
马宗敏
崔永俊
薛晨阳
杨玉华
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中北大学
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Application filed by 中北大学 filed Critical 中北大学
Priority to CN 200710061740 priority Critical patent/CN101038299A/en
Publication of CN101038299A publication Critical patent/CN101038299A/en

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Abstract

The present invention which relates to the micro-mechanism electric technology provides a single-shaft and integrated device for measuring the inertia based on the single quality block. And the present solves the problems of the prior single-shaft and integrated assembly for measuring the inertia that the structure is complex, the volume and quality are big, etc. The single-shaft and integrated device for measuring the inertia includes a quality block and a glass cover bottom. The quality block which is hang on the upper of the glass cover bottom through a supporting beam includes a quality chip and four supporting bodies that are fixed with the four sides of the quality chip through the elastic beam. A moveable comb for detecting is fixed on the external of the supporting body relative to the Y direction and a moveable comb for driving is fixed on the external of the supporting body relative to the X direction. A fixed comb for detecting and a fixed comb for driving are fixed on the glass cover bottom, and electrodes for forming the capacitance are fixed on the lower end surface and the glass cover bottom of the quality chip. The device in the present invention has advantages of a reasonable structure, an easy processing, a high reliability, a small volume, a strong ability of resisting the interference, a high precision, a high precision of measuring the paralleling and orthogonality of the vectors, etc.

Description

Single shaft integrated inertia measurement device based on single mass

Technical field

The present invention relates to the micromechanics electronic technology, specifically is a kind of single shaft integrated inertia measurement device based on single mass.

Background technology

At present, the silicon Micro Inertial Measurement Unit has two kinds of array modes usually: a kind of is by the machinery assembling 6 single shaft inertial sensors (i.e. 3 accelerometers and 3 gyroscopes) to be installed in respectively on the cubical several orthogonal face on demand, and it is integrated to can be described as multi-disc.Wherein each inertial sensor is more independent, can select for use flexibly as required; But this mode is unsuitable for volume production and can causes each sensor sensing axle quadrature fully because of installation, and then influences attitude algorithm; Another kind of then be required a plurality of silicon micro-inertia sensors to be processed on silicon chip simultaneously by a kind of fine process, even interface circuit also may be integrated on the silicon chip, it is integrated to be referred to as monolithic.Single chip integrated mode has been avoided the complicated mechanical assembling, can also produce in batches, the fine process that is adopted simultaneously can fully ensure the quadrature degree between each inertial sensor. but this integration mode is still not mature enough, and research mainly concentrates in the scientific research institution that university is the master.

When a certain directional ray acceleration of traditional measurement and angular acceleration, usually accelerometer, the gyroscope with two single shafts fits together the inertia measurement combination that constitutes single shaft, the mechanical precision and the microminiaturization degree of the single mass single shaft integrated inertia measurement device measurement combination that constitutes so all decrease, simultaneously, an accelerometer and a gyroscope are produced on together, the structure relative complex, volume is relative with quality big.

Summary of the invention

There are problems such as structure relative complex, volume and quality be relatively large in the present invention in order to solve the existing Micro Inertial Measurement Unit (being the single shaft Micro Inertial Measurement Unit) that is assembled into by an accelerometer and gyroscope, and a kind of single shaft integrated inertia measurement device based on single mass is provided.And be purpose with the gauge outfit hardware configuration that this device is provided only, do not relate to the subsequent treatment and the mutually deserved treatment circuit of (known) output signal.

The present invention adopts following technical scheme to realize: based on the single shaft integrated inertia measurement device of single mass, comprise mass, at the bottom of the glass cover, mass props up by brace summer and is suspended from top at the bottom of the glass cover, mass is by the quality pellet, constitute with four supporters that fix with quality pellet four limits respectively by elastic beam, Y is fixed with the detected activity broach to the relative supporter outside, X is fixed with driving activity broach to the relative supporter outside, with the detected activity broach, the detection fixed fingers that driving activity broach cooperates and driving on fixed fingers is fixed at the bottom of the glass cover is fixed with the electrode of formation capacity plate antenna at the bottom of the lower surface of quality pellet and the glass cover accordingly.

Described brace summer is the rugosity elastic beam, and its end is provided with the anchor block that is used for anchoring at the bottom of itself and the glass cover.

During use, this measuring element is fixed on the carrier, when carrier is subjected to linear acceleration along the Z direction, measuring element is along with carrier moves linearly in the Z direction, make mass produce the displacement on the Z direction, thereby the capacitance of the capacity plate antenna that counter electrode constituted on causing at the bottom of the lower surface of quality pellet and the glass cover change; Simultaneously, driving the driving voltage (promptly loading static driven power) that loads alternation on the fixed fingers along directions X, under the driving voltage effect, mass is done simple harmonic oscillation along directions X, when carrier is subjected to along Z deflection speed, because Coriolis effect, just can produce a coriolis force along the Y direction, at this moment, mass just can be along the vibration of Y direction, produces displacement, thereby makes and changed by detected activity broach and the capacitance that detects the broach electric capacity that fixed fingers constitutes, the variation of the capacitance by broach electric capacity and capacity plate antenna, by follow-up signal handle draw Z to accekeration and magnitude of angular velocity.

Compared with prior art, the present invention adopts by quality pellet and four mass block structures that supporter constitutes fixing with quality pellet four limits respectively by elastic beam, and, not only improved measurement sensitivity with driving comb and symmetrical respectively being distributed on four supporters of detection comb; Simultaneously, also x, y, three motions separately of z can be dropped to minimum to the influence that other direction produces, when structure was moved in the Y direction, X can ignore to the distortion of brace summer, they can be regarded as fixing anchor point, and only consider the distortion of Y to two brace summers; In like manner, when structure when directions X moves, Y can ignore to the distortion of two brace summers.Can derive to analyze by emulation experiment and principle by those skilled in the art and confirm; Once more, adopt the rugosity elastic beam, make that the mechanical cross-couplings of all directions is less relatively, and have certain stress relief effect that very high combination property is arranged, improved the range and the linearity as brace summer.Separately output, sense acceleration and two kinds of signals of angular velocity have reduced the separating difficulty of two kinds of signals, have simplified the follow-up signal processing circuits.

The present invention is rational in infrastructure, be easy to processing, acceleration and magnitude of angular velocity on energy is responsive equidirectional simultaneously, have the reliability height, volume is little, antijamming capability is strong, precision is high, detect distinguishing feature such as the parallel and quadrature precision height of vector, has avoided the various unnecessary error of being brought because of the discrete component combination.Practical value is higher.

Description of drawings

Fig. 1 is a structural representation of the present invention;

Fig. 2 is the A-A sectional view of Fig. 1;

Fig. 3 is a structural upright synoptic diagram of the present invention;

Among the figure: at the bottom of the 1-glass cover; The 2-brace summer; 3-quality pellet; The 4-supporter; The 5-elastic beam; 6-detected activity broach; 7-detects fixed fingers; 8-driving activity broach; 9-drives fixed fingers; The 10-electrode; The 11-anchor block.

Specific implementation method

Single shaft integrated inertia measurement device based on single mass, comprise mass, at the bottom of the glass cover 1, mass is suspended from 1 top at the bottom of the glass cover by 2 of brace summers, mass is by quality pellet 3, constitute with four supporters 4 that fix with quality pellet 3 four limits respectively by elastic beam 5, Y is fixed with detected activity broach 6 to relative supporter 4 outsides, X is fixed with driving activity broach 8 to the relative supporter outside, with detected activity broach 6, the detection fixed fingers 7 that driving activity broach 8 cooperates and drive fixed fingers 9 and be fixed at the bottom of the glass cover on 1 is fixed with the electrode 10 of formation capacity plate antenna on 1 accordingly at the bottom of the lower surface of quality pellet 3 and the glass cover.Described brace summer 2 is the rugosity elastic beam, and its end is provided with the anchor block 11 that is used for 1 anchoring at the bottom of itself and the glass cover.

During concrete enforcement, quality pellet 3 every limits are fixed by two parallel elastic beams 5 with supporter 4; The single supporter 4 of mass is by four brace summer 2 support fixation of symmetry.

Claims (3)

1, a kind of single shaft integrated inertia measurement device based on single mass, comprise mass, at the bottom of the glass cover (1), mass is suspended from (1) top at the bottom of the glass cover by brace summer (2), it is characterized in that mass is by quality pellet (3), constitute with four supporters (4) that fix with quality pellet (3) four limits respectively by elastic beam (5), Y is fixed with detected activity broach (6) to relative supporter (4) outside, X is fixed with driving activity broach (8) to the relative supporter outside, with detected activity broach (6), the detection fixed fingers (7) that driving activity broach (8) cooperates and drive fixed fingers (9) and be fixed at the bottom of the glass cover on (1) is fixed with the electrode (10) of formation capacity plate antenna accordingly on (1) at the bottom of the lower surface and glass cover of quality pellet (3).
2, the single shaft integrated inertia measurement device based on single mass according to claim 1 is characterized in that described brace summer (2) is the rugosity elastic beam, and its end is provided with the anchor block (11) that is used for (1) anchoring at the bottom of itself and the glass cover.
3, the single shaft integrated inertia measurement device based on single mass according to claim 1 and 2 is characterized in that the every limit of quality pellet (3) is fixing by two parallel elastic beams (5) with supporter (4); The single supporter (4) of mass is by four brace summers (2) support fixation of symmetry.
CN 200710061740 2007-04-21 2007-04-21 Uniaxle integrated inertia measurement device based on single mass-block CN101038299A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200710061740 CN101038299A (en) 2007-04-21 2007-04-21 Uniaxle integrated inertia measurement device based on single mass-block

Publications (1)

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CN101038299A true CN101038299A (en) 2007-09-19

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CN101270990B (en) * 2008-05-06 2010-11-03 中北大学 Testing apparatus of multi-layer nano-film tunneling micro-gyroscope
CN102095893A (en) * 2009-11-18 2011-06-15 罗伯特.博世有限公司 Method for determining the sensitivity of an acceleration sensor or magnetic field sensor
CN102435191A (en) * 2011-09-28 2012-05-02 湖北航天技术研究院总体设计所 Disassembly-free single-shaft self-calibration strapdown inertial measurement unit device
CN102597699A (en) * 2009-08-04 2012-07-18 飞兆半导体公司 Micromachined inertial sensor devices
CN101981457B (en) * 2008-04-03 2013-06-19 大陆-特韦斯贸易合伙股份公司及两合公司 Micromechanical acceleration sensor
US8739626B2 (en) 2009-08-04 2014-06-03 Fairchild Semiconductor Corporation Micromachined inertial sensor devices
US8813564B2 (en) 2010-09-18 2014-08-26 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope with central suspension and gimbal structure
CN104297521A (en) * 2013-07-19 2015-01-21 中国科学院地质与地球物理研究所 MEMS high sensitivity transverse acceleration meter and manufacturing technology thereof
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
US9006846B2 (en) 2010-09-20 2015-04-14 Fairchild Semiconductor Corporation Through silicon via with reduced shunt capacitance
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US9069006B2 (en) 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
US9095072B2 (en) 2010-09-18 2015-07-28 Fairchild Semiconductor Corporation Multi-die MEMS package
US9094027B2 (en) 2012-04-12 2015-07-28 Fairchild Semiconductor Corporation Micro-electro-mechanical-system (MEMS) driver
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US9246018B2 (en) 2010-09-18 2016-01-26 Fairchild Semiconductor Corporation Micromachined monolithic 3-axis gyroscope with single drive
US9278846B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
US9352961B2 (en) 2010-09-18 2016-05-31 Fairchild Semiconductor Corporation Flexure bearing to reduce quadrature for resonating micromachined devices
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US9444404B2 (en) 2012-04-05 2016-09-13 Fairchild Semiconductor Corporation MEMS device front-end charge amplifier
US9488693B2 (en) 2012-04-04 2016-11-08 Fairchild Semiconductor Corporation Self test of MEMS accelerometer with ASICS integrated capacitors
US9618361B2 (en) 2012-04-05 2017-04-11 Fairchild Semiconductor Corporation MEMS device automatic-gain control loop for mechanical amplitude drive
US9625272B2 (en) 2012-04-12 2017-04-18 Fairchild Semiconductor Corporation MEMS quadrature cancellation and signal demodulation
CN107271720A (en) * 2017-05-18 2017-10-20 中北大学 Eight beam 3-axis acceleration sensors of low inter-axis coupling degree
US10060757B2 (en) 2012-04-05 2018-08-28 Fairchild Semiconductor Corporation MEMS device quadrature shift cancellation
US10065851B2 (en) 2010-09-20 2018-09-04 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
CN109613301A (en) * 2018-12-19 2019-04-12 东南大学 A kind of microsensor that can measure horizontal direction acceleration and angular speed simultaneously
CN109613300A (en) * 2018-12-19 2019-04-12 东南大学 A kind of microsensor that can measure vertical direction acceleration and angular speed simultaneously
US10697994B2 (en) 2017-02-22 2020-06-30 Semiconductor Components Industries, Llc Accelerometer techniques to compensate package stress

Cited By (39)

* Cited by examiner, † Cited by third party
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CN101981457B (en) * 2008-04-03 2013-06-19 大陆-特韦斯贸易合伙股份公司及两合公司 Micromechanical acceleration sensor
CN101270990B (en) * 2008-05-06 2010-11-03 中北大学 Testing apparatus of multi-layer nano-film tunneling micro-gyroscope
US8739626B2 (en) 2009-08-04 2014-06-03 Fairchild Semiconductor Corporation Micromachined inertial sensor devices
CN102597699B (en) * 2009-08-04 2015-07-08 飞兆半导体公司 Micromachined inertial sensor devices
CN102597699A (en) * 2009-08-04 2012-07-18 飞兆半导体公司 Micromachined inertial sensor devices
CN102095893A (en) * 2009-11-18 2011-06-15 罗伯特.博世有限公司 Method for determining the sensitivity of an acceleration sensor or magnetic field sensor
US9156673B2 (en) 2010-09-18 2015-10-13 Fairchild Semiconductor Corporation Packaging to reduce stress on microelectromechanical systems
US8813564B2 (en) 2010-09-18 2014-08-26 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope with central suspension and gimbal structure
US9586813B2 (en) 2010-09-18 2017-03-07 Fairchild Semiconductor Corporation Multi-die MEMS package
US9455354B2 (en) 2010-09-18 2016-09-27 Fairchild Semiconductor Corporation Micromachined 3-axis accelerometer with a single proof-mass
US9352961B2 (en) 2010-09-18 2016-05-31 Fairchild Semiconductor Corporation Flexure bearing to reduce quadrature for resonating micromachined devices
US9856132B2 (en) 2010-09-18 2018-01-02 Fairchild Semiconductor Corporation Sealed packaging for microelectromechanical systems
US9278845B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation MEMS multi-axis gyroscope Z-axis electrode structure
US10050155B2 (en) 2010-09-18 2018-08-14 Fairchild Semiconductor Corporation Micromachined monolithic 3-axis gyroscope with single drive
US9095072B2 (en) 2010-09-18 2015-07-28 Fairchild Semiconductor Corporation Multi-die MEMS package
US9246018B2 (en) 2010-09-18 2016-01-26 Fairchild Semiconductor Corporation Micromachined monolithic 3-axis gyroscope with single drive
US9278846B2 (en) 2010-09-18 2016-03-08 Fairchild Semiconductor Corporation Micromachined monolithic 6-axis inertial sensor
US9006846B2 (en) 2010-09-20 2015-04-14 Fairchild Semiconductor Corporation Through silicon via with reduced shunt capacitance
US10065851B2 (en) 2010-09-20 2018-09-04 Fairchild Semiconductor Corporation Microelectromechanical pressure sensor including reference capacitor
CN102435191B (en) * 2011-09-28 2014-01-01 湖北航天技术研究院总体设计所 Disassembly-free single-shaft self-calibration strapdown inertial measurement unit device
CN102435191A (en) * 2011-09-28 2012-05-02 湖北航天技术研究院总体设计所 Disassembly-free single-shaft self-calibration strapdown inertial measurement unit device
US9062972B2 (en) 2012-01-31 2015-06-23 Fairchild Semiconductor Corporation MEMS multi-axis accelerometer electrode structure
US8978475B2 (en) 2012-02-01 2015-03-17 Fairchild Semiconductor Corporation MEMS proof mass with split z-axis portions
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US9802814B2 (en) 2012-09-12 2017-10-31 Fairchild Semiconductor Corporation Through silicon via including multi-material fill
US9425328B2 (en) 2012-09-12 2016-08-23 Fairchild Semiconductor Corporation Through silicon via including multi-material fill
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US10697994B2 (en) 2017-02-22 2020-06-30 Semiconductor Components Industries, Llc Accelerometer techniques to compensate package stress
CN107271720B (en) * 2017-05-18 2019-04-19 中北大学 Eight beam 3-axis acceleration sensors of low inter-axis coupling degree
CN107271720A (en) * 2017-05-18 2017-10-20 中北大学 Eight beam 3-axis acceleration sensors of low inter-axis coupling degree
CN109613301A (en) * 2018-12-19 2019-04-12 东南大学 A kind of microsensor that can measure horizontal direction acceleration and angular speed simultaneously
CN109613300A (en) * 2018-12-19 2019-04-12 东南大学 A kind of microsensor that can measure vertical direction acceleration and angular speed simultaneously

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