CN104459203B - Z axis structure and three axis accelerometer in a kind of accelerometer - Google Patents
Z axis structure and three axis accelerometer in a kind of accelerometer Download PDFInfo
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- CN104459203B CN104459203B CN201410826551.3A CN201410826551A CN104459203B CN 104459203 B CN104459203 B CN 104459203B CN 201410826551 A CN201410826551 A CN 201410826551A CN 104459203 B CN104459203 B CN 104459203B
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Abstract
The invention provides the Z axis structure in a kind of accelerometer and three axis accelerometer, including the first spring beam in X-direction and the second spring beam in Y direction, wherein, the two ends of second spring beam are connected on the anchor point of substrate, the two ends quality of connection block of first spring beam, first spring beam deviates the center line of mass X-direction；Also include crossbeam, the longeron for connecting mass；The buttress brace of two crossbeams of connection is additionally provided with, wherein, the second spring beam in two inertia measuring modules is symmetrical relative to buttress brace.The motion of a certain axle (X-axis, Y-axis) in the three axis accelerometer of the present invention, plane will not be influenceed by structure eccentric nature so that X-axis, the motion of Y-axis are line motions, so as to will not aggravate the coupling of between centers；On the other hand the displacement in mass in X-axis, Y-axis will not be also reduced, so as to improve the precision of capacitance detecting.
Description
Technical field
The invention belongs to micro electronmechanical (MEMS) field, more precisely, it is related to the Z axis structure in a kind of accelerometer；This
Invention further relates to a kind of three axis accelerometer.
Background technology
Micro-electro-mechanaccelerometer accelerometer is the inertia device based on MEMS technology, is accelerated for measuring the line of object of which movement and moving
Degree.It has the features such as high, with low cost small volume, reliability, suitable production in enormous quantities, therefore with before wide market
Scape, its application field includes consumer electronics, Aero-Space, automobile, Medical Devices and weapon etc..
Current three axis accelerometer generally has two kinds of implementations, and a kind of is the method pieced together, by three single-shaft configurations or
Two structures of one twin shaft of person and a single shaft combine the measurement for realizing three axial accelerations.Second is using single
Structure realizes the measurement of 3-axis acceleration.It is general in single structure implementation that z-axis acceleration is measured by eccentric structure, herein
Except z-axis detects that motion make use of the detection of the eccentric nature, planar a certain axle (such as x-axis or y-axis) of structure in the scheme of kind
Motion can also be influenceed by structure eccentric nature, thus it is to swing rather than line motion that its motion is actual, this motion mode
On the one hand inter-axis coupling can be aggravated, on the other hand can reduces capacitance change, so as to greatly reduce the precision of detection.
The content of the invention
There is provided the Z axis structure in a kind of accelerometer in order to solve problems of the prior art by the present invention.
In order to realize above-mentioned purpose, the technical scheme is that：A kind of Z axis structure in accelerometer, its feature
It is, include the inertia measuring module of two symmetrical configurations, each inertia measuring module includes：
Substrate, and the first pole piece on substrate as bottom electrode,
The hanging mass in surface；The mass is provided with constitutes the upper of Z axis detection electric capacity with the first pole piece
Electrode；
For connecting substrate and the elastic rood beam of mass, the elastic rood beam includes being located at the in X-direction
One spring beam and the second spring beam in Y direction, wherein, the two ends of the second spring beam are connected to the anchor point of substrate
On, the two ends quality of connection block of the first spring beam, or the two ends of the first spring beam are connected on the anchor point of substrate, the second bullet
The two ends quality of connection block of property beam；First spring beam deviates the center line of mass X-direction；
Also include the tie-beam for connecting the both sides of mass in two inertia measuring modules respectively；The tie-beam
Including the crossbeam in X-direction, in addition in Y direction, one end and crossbeam connect one end and mass side wall connects
The longeron connect；The buttress brace of two crossbeams of connection is additionally provided with, wherein, the second spring beam in two inertia measuring modules is relative
It is symmetrical in buttress brace.
Preferably, the longeron is spring beam.
Preferably, the mass is provided with through hole, and first spring beam is connected on the side wall of through hole.
Preferably, second spring beam is located on the center line of mass Y direction.
Preferably, the quantity of first pole piece has two, is symmetrically distributed in the both sides of the first spring beam.
Preferably, the buttress brace is provided with two, and two buttress braces are be arranged in parallel, and a rectangle frame is surrounded with crossbeam.
Preferably, in addition to respectively two diagonal cant beams of rectangle frame are connected.
Present invention also offers a kind of three axis accelerometer, including above-mentioned Z axis structure；Wherein, the mass is in Y
The first movable electrode, the second movable electrode are additionally provided with axle, X-direction；Be provided with the substrate for it is first movable
Electrode, the second movable electrode separately constitute the first fixed electrode, the second fixed electrode that Y-axis detection electric capacity, X-axis detect electric capacity.
Preferably, first movable electrode and/or the second movable electrode are respectively arranged with two, respectively positioned at quality
The relative both sides of block.
Preferably, between the first movable electrode and the first fixed electrode and/or the second movable electrode and second fix electricity
Broach capacitance structure is constituted between pole.
The motion of a certain axle (X-axis, Y-axis) in the accelerometer of the present invention, plane will not be by structure eccentric nature
Influence so that X-axis, the motion of Y-axis are line motions, so as to will not aggravate the coupling of between centers；On the other hand it will not also reduce
Displacement of the mass in X-axis, Y-axis, so as to improve the precision of capacitance detecting.
Brief description of the drawings
Fig. 1 shows the structural representation of three axis accelerometer of the present invention.
Fig. 2 shows the structural representation of tie-beam in Fig. 1.
Fig. 3 shows the structural representation of another embodiment of three axis accelerometer of the present invention.
Embodiment
In order that present invention solves the technical problem that, use technical scheme, obtain technique effect it can be readily appreciated that below
With reference to specific accompanying drawing, the embodiment to the present invention is described further.
With reference to Fig. 1, the invention provides the Z axis structure in a kind of accelerometer, it includes the inertia of two symmetrical configurations
Measurement module, each inertia measuring module includes substrate (view is not provided), on the substrate can be with Butut inertia measuring module
The part such as circuit.The first pole piece 4 (being represented by dotted lines in view) as bottom electrode is provided with the substrate.
Also include the mass 1 positioned at surface, and the mass 1 is supported on to the support system 5 of surface.
The support system 5 is an elastic rood beam, and it includes the first spring beam 12 and the second spring beam 11, the He of the first spring beam 12
The right-angled intersection of second spring beam 11 is fixed together, it is preferred that fixed connection point is located at the middle part of two spring beams, wherein,
First spring beam 12 is located in X-direction, and second spring beam 11 is located in Y direction.Wherein, the second spring beam 11
Two ends be connected on the anchor point 6 of substrate, and the two ends quality of connection block 1 of the first spring beam 12.Pass through the first spring beam 12,
Mass 1 is supported on the top of substrate by two spring beams 11, anchor point 6 so that mass 1 is in hanging state.In the present invention
In one specific embodiment, through hole is provided with the mass 1, the two ends of first spring beam 12 are connected to through hole
On inwall.In another embodiment of the invention, the two ends of the first spring beam 12 are connected on the anchor point 6 of substrate, the second elasticity
The two ends quality of connection block 1 of beam 11, with reference to Fig. 3.
Need to point out herein when, the present invention is only to facilitate the first spring beam 12 of description and the second spring beam 11
Between relation, the first spring beam 12 is set to X-direction, the second spring beam 11 is set to Y direction, it is of course also possible to will
First spring beam 12 is set to Y direction, and the second spring beam 11 is set to X-direction, is relative therebetween.
The Z axis structure of the present invention, first spring beam 12 deviates the center line of mass X-direction；So that the inertia is surveyed
Module is measured in the external force by Z-direction, can be deflected relative to the first spring beam 12.Using Fig. 1 view direction as
It is unequal with reference to, that is to say, that the distance of first spring beam 12 to the upper end of mass 1 and its distance to the lower end of mass 1.
For example, the first spring beam 12 deviates to the top of mass X-direction center line, when mass 1 runs into the external force of Z-direction,
Due to the eccentric setting between the spring beam 12 of mass 1 and first so that mass 1 can occur relative to the first spring beam 12
Rotate.
It is additionally provided with the mass 1 and constitutes the Top electrode (view is not provided) that Z axis detects electric capacity with the first pole piece 4,
In a preferred embodiment of the invention, the mass 1 inherently Z axis detects the Top electrode of electric capacity, and now, mass 1 can
Used as the ground connection pole piece of electric capacity.
First pole piece 4 is preferably provided with two, is distributed in the both sides of the termination of the second spring beam 11.When Z-direction has acceleration
When, mass 1 is deflected relative to the first spring beam 12, that is to say, that mass 1 is rotated around the first spring beam 12, from
And change the distance between pole piece 4 of mass 1 and first, realize that Z axis detects the change of electric capacity.Mass 1 with one of them the
The distance between one pole piece 4 becomes big, diminishes with the distance between another the first pole piece 4 so that two the first pole pieces 4 and quality
Differential capacitance structure is may be constructed between block, to improve the precision of Z axis acceleration detection.
The Z axis structure of the present invention, in addition to the both sides of mass 1 in two inertia measuring modules are connected respectively
Tie-beam；The tie-beam include be located at X-direction on crossbeam 7, and in Y direction, one end and crossbeam 7 connection one
Hold the longeron 8 being connected with the side wall of mass 1；In order to reduce the influence that longeron 8 is overturn to mass along Z-direction, the longeron 8
Spring beam can be used.
With reference to Fig. 1, crossbeam 7 above, longeron 8 link together the upper end side wall of two masses 1；Under being located at
Crossbeam 7, the longeron 8 of side link together the bottom side of the wall of two masses 1；Reinforcement is additionally provided between two crossbeams 7
Beam 130, is linked together two crossbeams 7 by the buttress brace 130, position of the buttress brace on two crossbeams 7 so that two
The second spring beam 11 in inertia measuring module is symmetrical relative to the buttress brace 130.Now, the second spring beam 11 can be selected
Select and be arranged on the center line of mass 1Y direction of principal axis, its center line can also be deviateed.
The Z axis structure of the present invention, when the acceleration by Z-direction, due between the spring beam 12 of mass 1 and first
Eccentric setting so that mass 1 deflects relative to the first spring beam 12, is detected by two the first pole pieces 4.And
When the acceleration by X-direction, due to the effect of crossbeam 7, longeron 8 and buttress brace 130, can prevent mass 1 by
In the torsion caused by eccentric setting so that translational motion can only occur in the X-axis direction for mass 1, so as to improve X-axis side
To the precision of detection.When mass receives the acceleration of Y direction, because the second spring beam 11 is relative to 130 pairs of buttress brace
Claim distribution so that the center of gravity and geometric center of gravity of the Z axis structure are overlapping, so as to ensure that mass can only be carried out in the Y-axis direction
Translation, without the phenomenon twisted.
In order to further improve the anti-torsion ability of tie-beam, the buttress brace 130 is provided with two, two buttress braces
130 are be arranged in parallel, and a rectangle frame is surrounded with crossbeam 7.Further, in addition to respectively two diagonal cant beams of rectangle frame are connected
131, with reference to Fig. 2.
In another embodiment of the invention there is provided a kind of three axis accelerometer, it includes above-mentioned Z axis structure, its
In, the mass 1 is also respectively provided with the first movable electrode 9, the second movable electrode 10 in Y-axis, X-direction；This two
Movable electrode is fixed on mass 1, for example, can be arranged on the edge of mass 1, and can be same with the motion of mass
Step motion.Accordingly, it is provided for separately constituting Y-axis detection with the first movable electrode 9, the second movable electrode 10 on the substrate
Electric capacity, X-axis detect the first fixed electrode 2, the second fixed electrode 3 of electric capacity.Two fixed electrodes are fixedly mounted on substrate,
When two movable electrodes are moved with mass 1, change the area or distance between fixed electrode and movable electrode, from
And change the capacitance of corresponding capacitance, to realize the measurement of acceleration in this direction.
Wherein, first movable electrode 9 is provided with two, respectively positioned at the relative both sides of mass 1.With reference to Fig. 1's
View direction, two the first movable electrodes 9 are separately positioned on the top and bottom of mass 1, accordingly, on substrate be provided with
Two the first fixed electrodes 2 that two the first movable electrodes 9 coordinate, when there is Y direction acceleration, mass is along Y-axis side
To motion so that the area or big apart from becoming between one of them first movable electrode 9 and the first fixed electrode 2, and another
Area or distance between first movable electrode 9 and the first fixed electrode 2 diminish, and two Y-axis detection electric capacity constitute difference
Capacitance structure, improves the precision of Y-axis acceleration detection.
Based on same reason, second movable electrode 10 may also set up two, respectively positioned at mass 1 in X-axis
Both sides on direction.With reference to Fig. 1 view direction, two the second movable electrodes 10 are separately positioned on left end and the right side of mass 1
End, accordingly, on substrate is provided with two the second fixed electrodes 3 coordinated with two the second movable electrodes 10, when there is X-direction
Acceleration when, mass 1 is moved along X-direction so that one of them second movable electrode 10 and the second fixed electrode 3 it
Between area or big apart from becoming, and the area or distance between another fixed electrode 3 of the second movable electrode 10 and second diminish,
Two X-axis detection electric capacity constitute differential capacitance structure, improve the precision of X-axis acceleration detection.
Between first movable electrode 9 and the first fixed electrode 2 and/or the second movable electrode 10 and the second fixed electrode 3 it
Between can use the capacitance structure of comb teeth-shaped, the structure of broach electric capacity belongs to existing technology, no longer illustrates herein.
When Y direction has acceleration, mass 1 is subjected to displacement by the deformation of the first spring beam 12 in Y direction, from
And the acceleration of Y direction is measured by the first movable electrode 9 and the first fixed electrode 2.When X-direction has acceleration,
Mass 1 is subjected to displacement in the X-axis direction by the deformation of the second spring beam 11, so as to pass through the second movable electrode 10 and second
Fixed electrode 3 measures the acceleration of X-direction.
The motion of a certain axle (X-axis, Y-axis) in the three axis accelerometer of the present invention, plane will not be eccentric special by structure
Property influence so that X-axis, the motion of Y-axis be line motion, so that the coupling of between centers will not be aggravated；On the other hand it will not also drop
Displacement of the low-quality gauge block in X-axis, Y-axis, so as to improve the precision of capacitance detecting.
The present invention is by preferred embodiment having carried out detailed explanation.However, by studying carefully above, to each
The change and increase of embodiment are obvious for those of ordinary skill in the art.It is intended that institute
These changes and increase having all fall in the scope that the claims in the present invention are protected.
Claims (10)
1. the Z axis structure in a kind of accelerometer, it is characterised in that include the inertia measuring module of two symmetrical configurations, each
Inertia measuring module includes：
Substrate, and the first pole piece (4) on substrate as bottom electrode,
The hanging mass (1) in surface；The mass (1) is provided with and the first pole piece (4) composition Z axis detection electric capacity
Top electrode；
For connecting substrate and the elastic rood beam of mass (1), the elastic rood beam includes first be located in X-direction
Spring beam (12) and the second spring beam (11) in Y direction, wherein, the two ends of the second spring beam (11) are connected to base
On the anchor point (6) of plate, the two ends quality of connection block (1) of the first spring beam (12), or the two ends of the first spring beam (12) connect
It is connected on the anchor point of substrate (6), the two ends quality of connection block (1) of the second spring beam (11)；First spring beam (12) is deviateed
The center line of mass (1) X-direction；
Also include the tie-beam for connecting the both sides of mass (1) in two inertia measuring modules respectively；The tie-beam
Including the crossbeam (7) in X-direction, in addition in Y direction, one end and crossbeam (7) connection one end and mass
(1) longeron (8) of side wall connection；The buttress brace (130) of two crossbeams (7) of connection is additionally provided with, wherein, two inertia measurement moulds
The second spring beam (11) in block is symmetrical relative to buttress brace (130).
2. Z axis structure according to claim 1, it is characterised in that：The longeron (8) is spring beam.
3. Z axis structure according to claim 1, it is characterised in that：The mass (1) is provided with through hole, described first
Spring beam (12) is connected on the side wall of through hole.
4. Z axis structure according to claim 1, it is characterised in that：Second spring beam (11) is located at mass (1) Y
On the center line of direction of principal axis.
5. Z axis structure according to claim 1, it is characterised in that：The quantity of first pole piece (4) has two, symmetrically
It is distributed in the both sides of the first spring beam (12).
6. Z axis structure according to claim 1, it is characterised in that：The buttress brace (130) is provided with two, and two add
Brutal (130) is be arranged in parallel, and a rectangle frame is surrounded with crossbeam (7).
7. Z axis structure according to claim 6, it is characterised in that：Two also including connection rectangle frame respectively diagonally are oblique
Beam (131).
8. a kind of three axis accelerometer, it is characterised in that：Including the Z axis structure described in any one of claim 1 to 7；Wherein, institute
State mass (1) and be provided with the first movable electrode (9) in the Y-axis direction, the second movable electrode is provided with the X-axis direction
(10)；It is provided with the substrate for separately constituting Y-axis detection electricity with the first movable electrode (9), the second movable electrode (10)
Appearance, X-axis detect the first fixed electrode (2), the second fixed electrode (3) of electric capacity.
9. three axis accelerometer according to claim 8, it is characterised in that：First movable electrode (9) and/or second
Movable electrode (10) is respectively arranged with two, respectively positioned at the relative both sides of mass (1).
10. three axis accelerometer according to claim 8, it is characterised in that：First movable electrode (9) fixes electricity with first
Broach capacitance structure is constituted between pole (2) and/or between the second movable electrode (10) and the second fixed electrode (3).
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410826551.3A CN104459203B (en) | 2014-12-25 | 2014-12-25 | Z axis structure and three axis accelerometer in a kind of accelerometer |
| EP15871685.2A EP3239723B1 (en) | 2014-12-25 | 2015-07-23 | Inertia measurement module and three-axis accelerometer |
| KR1020177019099A KR101929149B1 (en) | 2014-12-25 | 2015-07-23 | Inertia measurement module and three-axis accelerometer |
| JP2017533906A JP6303074B2 (en) | 2014-12-25 | 2015-07-23 | Inertial measurement module and 3-axis accelerometer |
| PCT/CN2015/084970 WO2016101611A1 (en) | 2014-12-25 | 2015-07-23 | Inertia measurement module and three-axis accelerometer |
| US15/538,230 US10473686B2 (en) | 2014-12-25 | 2015-07-23 | Inertia measurement module and triaxial accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410826551.3A CN104459203B (en) | 2014-12-25 | 2014-12-25 | Z axis structure and three axis accelerometer in a kind of accelerometer |
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| CN104459203A CN104459203A (en) | 2015-03-25 |
| CN104459203B true CN104459203B (en) | 2017-08-25 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10473686B2 (en) | 2014-12-25 | 2019-11-12 | Goertek Inc. | Inertia measurement module and triaxial accelerometer |
| CN112255432A (en) * | 2020-11-04 | 2021-01-22 | 安徽芯动联科微系统股份有限公司 | Micro-electro-mechanical system triaxial acceleration sensor chip and manufacturing method thereof |
| CN113624994A (en) * | 2021-08-17 | 2021-11-09 | 美新半导体（无锡）有限公司 | Three-axis accelerometer |
| CN113970655B (en) * | 2021-12-23 | 2022-04-12 | 杭州麦新敏微科技有限责任公司 | MEMS accelerometer and forming method thereof |
| CN116593737B (en) * | 2023-07-17 | 2023-09-08 | 南京元感微电子有限公司 | MEMS full-bridge differential triaxial acceleration sensor and processing method thereof |
| CN117537794B (en) * | 2024-01-09 | 2024-04-23 | 南京理工大学 | Four-mass micromechanical gyroscope with driving and amplifying coupling structure |
| CN117647662B (en) * | 2024-01-30 | 2024-04-05 | 苏州敏芯微电子技术股份有限公司 | Acceleration sensor structure and acceleration sensor |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5125327B2 (en) * | 2006-11-09 | 2013-01-23 | 三菱電機株式会社 | Acceleration sensor |
| TW201020548A (en) * | 2008-11-18 | 2010-06-01 | Ind Tech Res Inst | Multi-axis capacitive accelerometer |
| US8850889B2 (en) * | 2008-11-25 | 2014-10-07 | Panasonic Corporation | Acceleration sensor |
| JP5884603B2 (en) * | 2012-03-30 | 2016-03-15 | 株式会社デンソー | Rollover gyro sensor |
| CN103472260B (en) * | 2013-08-15 | 2015-09-02 | 北京时代民芯科技有限公司 | A kind of MEMS pitches beam capacitive accelerometer and manufacture method thereof |
| CN204314330U (en) * | 2014-12-25 | 2015-05-06 | 歌尔声学股份有限公司 | Z axis structure in a kind of accelerometer and three axis accelerometer |
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Address after: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Applicant after: Goertek Inc. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Applicant before: Goertek Inc. |
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Effective date of registration: 20200608 Address after: 266104 room 103, 396 Songling Road, Laoshan District, Qingdao, Shandong Province Patentee after: Goer Microelectronics Co.,Ltd. Address before: 261031 Dongfang Road, Weifang high tech Development Zone, Shandong, China, No. 268 Patentee before: GOERTEK Inc. |