CN103411595B - A kind of gyroscope of single-shaft micro electro mechanical - Google Patents
A kind of gyroscope of single-shaft micro electro mechanical Download PDFInfo
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- CN103411595B CN103411595B CN201310242552.9A CN201310242552A CN103411595B CN 103411595 B CN103411595 B CN 103411595B CN 201310242552 A CN201310242552 A CN 201310242552A CN 103411595 B CN103411595 B CN 103411595B
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Abstract
The invention discloses a kind of gyroscope of single-shaft micro electro mechanical, including twisting mass, each anchor point and each capacitance group being arranged between each anchor point and twisting mass, the fixing and movable comb of each capacitance group has difference of height along the z-axis direction；Drive capacitance group fixed fingers by being fixed in substrate as the anchor point of drive electrode, movable comb respectively with twist mass connection；The fixed fingers of detection capacitance group is fixed in substrate by detection anchor point, and movable comb is connected with twisting mass, and capacitance change signal is fed back to a pair drive electrode by a pair detecting electrode being made up of detection anchor point；The fixed fingers of sensitization capacitance group is fixed in substrate by sensitive anchor point, and movable comb is connected with twisting mass by periphery spring beam, and the center anchor point being positioned at twisting mass center position is connected with twisting mass by middle part spring beam.The gyroscope of the present invention has simple in construction, for the feature that the angular velocity measurement resultant error of individual sport is less.
Description
Technical field
The present invention relates to a kind of MEMS gyroscope, particularly a kind of gyroscope of single-shaft micro electro mechanical.
Background technology
MEMS(Micro Electro Mechanical System, MEMS) gyroscope volume is little, low cost, integration are good, the most increasingly it is widely applied, as in the products such as mobile terminal, camera stabilization, game paddle, toy airplane, navigation.But, MEMS gyroscope structure the most on the market is complex, and its measurement result exists bigger error, poor to antivibration Performance comparision.
Summary of the invention
It is an object of the invention to solve existing gyroscope apply in the product that the direction of motion is single, there is the problem that measuring result error is bigger than normal, it is provided that a kind of gyroscope of single-shaft micro electro mechanical.
The technical solution used in the present invention is: a kind of gyroscope of single-shaft micro electro mechanical, each capacitance group in each anchor point including twisting mass, being distributed in twisting mass surrounding and the capacitance group setting area being arranged between each anchor point and twisting mass, on the right side of the forward of the x-axis defining the cartesian coordinate system with the center of twisting mass as initial point points to, on the upside of the forward of y-axis points to, the fixed fingers of each capacitance group and movable comb have difference of height along the z-axis direction；
Described capacitance group includes that at least one pair of drives capacitance group, at least one pair of detection capacitance group and at least one pair of sensitization capacitance group, two every pair drive the left and right side that capacitance group is divided into twisting mass, the fixed fingers of the driving capacitance group being positioned at left and right side is fixed in substrate by left and right driving anchor point respectively, the movable comb of the driving capacitance group being positioned at left and right side is connected with the left and right sidewall twisting mass respectively, and described left and right driving anchor point is used for receiving the driving signal that peripheral circuit provides as a pair drive electrode；
Two every pair detection capacitance group are divided into a left side for twisting mass, right side, it is positioned at a left side, the fixed fingers of the detection capacitance group on right side is by fixing on the substrate with each self-corresponding detection anchor point, it is positioned at a left side, right side detection capacitance group movable comb respectively with twist mass a left side, right side wall connects, each detection anchor point divides two groups to link together to constitute a pair for the detecting electrode that the capacitance change signal of detection capacitance group feeds back to drive electrode described in a pair, two the detection capacitance group making every pair of detection capacitance group connect from different detecting electrodes, the Oscillation Amplitude of capacitance group is driven with regulation；
Every pair of two sensitization capacitance components are located at the upper and lower side of twisting mass, be positioned at upper and lower side sensitization capacitance group fixed fingers by fixing with the most corresponding sensitive anchor point on the substrate, the movable comb of the sensitization capacitance group being positioned at upper and lower side is connected with twisting mass by periphery spring beam；Each sensitive anchor point divides two groups of a pair offers of composition that link together for measuring the sensitive electrode of the sensitive signal of additional magnitude of angular velocity, two the sensitization capacitance groups making every pair of sensitization capacitance group connect from different sensitive electrodes, and the movable comb of all sensitization capacitance groups is connected with each fixed anchor point by fixing spring beam；And,
The center anchor point being positioned at twisting mass center position is connected with twisting mass by middle part spring beam.
Preferably, two every pair drive capacitance group symmetrical about y-axis, and two every pair drive electric capacity symmetrical about y-axis with the link position of twisting mass.
Preferably, described capacitance group include two to drive capacitance group, two to drive capacitance group be symmetrical arranged about x-axis.
Preferably, described left and right driving anchor point is symmetrical arranged about y-axis in x-axis.
Preferably, described capacitance group includes two to detection capacitance group, each to detection capacitance group be symmetrical arranged about y-axis, two pairs of detection capacitance group are symmetrical arranged about x-axis, are joined together to form a pair detecting electrode with the two detection anchor points being connected the fixed fingers of the detection capacitance group laying respectively at left and right side in detection capacitance group.
Preferably, described capacitance group includes two pairs of sensitization capacitance groups, each pair of sensitization capacitance group is symmetrical arranged about x-axis, two pairs of sensitization capacitance groups are symmetrical arranged about y, and the sensitive anchor point being connected with the fixed fingers of the sensitization capacitance group laying respectively at upper and lower side in two pairs of sensitization capacitance groups is joined together to form a pair sensitive electrode.
Preferably, described fixed anchor point is arranged at four edges of gyroscope of single-shaft micro electro mechanical.
The invention have the benefit that simple in construction, the angular velocity measurement resultant error for individual sport is less, and resistance to shock is good.
Accompanying drawing explanation
Fig. 1 is gyroscope of single-shaft micro electro mechanical overall structure schematic diagram of the present invention.
Fig. 2 is the sectional view that gyroscope of single-shaft micro electro mechanical of the present invention drives capacitance group movable comb and fixed fingers.
Fig. 3 is twisting mass motion state diagram in gyroscope of single-shaft micro electro mechanical of the present invention.
Fig. 4 is the schematic diagram of drive circuit in gyroscope of single-shaft micro electro mechanical of the present invention.
Detailed description of the invention
The present invention will be further described in detail with detailed description of the invention below in conjunction with the accompanying drawings:
Now to arrange two to driving capacitance group C1, two concrete structures of gyroscope of single-shaft micro electro mechanical that detection capacitance group C2 and two pairs of sensitization capacitance groups C3 illustrated the present invention for embodiment.The x-axis direction defining the cartesian coordinate system with the center twisting mass m1 as initial point is left and right direction, y-axis direction be upper and lower to, the fixed fingers of each capacitance group and movable comb have difference of height along the z-axis direction, as shown in Figure 1, the surrounding of twisting mass m1 is distributed anchor point, region between anchor point and twisting mass m1 is the capacitance group setting area for arranging all kinds of capacitance group, and capacitance group setting area includes laying respectively at that twisting mass is left and right, the capacitance group setting area left and right, upper and lower of upper and lower side.Every pair of two driving capacitance group C1 driving capacitance group are separately positioned in left and right capacitance group setting area, the fixed fingers of two driving capacitance group C1 being positioned at left capacitance group setting area is fixed in the substrate of gyroscope by left driving anchor point 1a, and movable comb is connected with the left side wall of twisting mass m1；The fixed fingers of two driving capacitance group C2 being positioned at right capacitance group setting area is fixing on the substrate by right driving anchor point 1b, and movable comb is connected with the right side wall of twisting mass m1；Left and right driving anchor point 1a, 1b are used for receiving the driving signal that peripheral circuit provides as a pair drive electrode.
Two sensitization capacitance components of every pair of sensitization capacitance group are located in left and right capacitance group setting area, be positioned at first, second detection capacitance group C21 of left capacitance group setting area, the fixed fingers of C22 is fixed on the substrate by first, second detection anchor point 2a1,2b1 respectively, and movable comb is connected with the left side wall of twisting mass m1；nullIt is positioned at the 3rd of right capacitance group setting area the、4th detection capacitance group C23、The fixed fingers of C24 is respectively by the 3rd、4th detection anchor point 2a2、2b2 is fixing on the substrate，Movable comb is connected with the right side wall of twisting mass m1，Wherein，First、3rd detection anchor point 2a1、2a2 links together，Constitute a detecting electrode，Second、4th detection anchor point 2b1、2b2 links together and constitutes another detecting electrode，Four detection capacitance group C2 are made to form differential connection，As shown in Figure 4，Two detecting electrodes are for feeding back to a pair drive electrode by the capacitance change signal of detection capacitance group C2，I.e. feed back to driving capacitance group C1，With by changing applied voltage size，Regulation drives the Oscillation Amplitude of capacitance group C1，At this，Capacitance change signal can feed back to a pair drive electrode again through charge amplifying circuit.The above movable comb being connected with twisting mass m1 will be with twisting mass m1 motion, the capacitance group being connected on same anchor point is equivalent to be connected in parallel, the capacitance group being connected in parallel has identical capacitance variations trend, such as, in structure motion, the capacitance of the capacitance group being connected in parallel can be increased or decreased simultaneously.
The center anchor point 3 being positioned at twisting mass m1 center position is connected with twisting mass m1 by middle part spring beam b1.
Two sensitization capacitance components of every pair of sensitization capacitance group are located in upper and lower capacitance group setting area, be positioned at first, second sensitization capacitance group C31 of capacitance group setting area, the fixed fingers of C32 is fixed on the substrate by first, second sensitive anchor point 4a1,4b1 respectively, and movable comb is connected with twisting mass m1 by periphery spring beam b2；Be positioned at the three, the 4th sensitization capacitance groups C33 of lower capacitance group setting area, the fixed fingers of C34 is fixed on the substrate by the three, the 4th sensitive anchor point 4a2,4b2 respectively, and movable comb is connected with twisting mass m1 by periphery spring beam b2；The first, the 3rd sensitive anchor point 4a1,4a2 links together and constitutes a sensitive electrode, and the second, the 4th sensitive anchor point 4b1,4b2 links together and constitute another sensitive electrode, provides the sensitive signal for measuring additional magnitude of angular velocity by a pair sensitive electrode.Here, the movable comb of all sensitization capacitance groups C3 can be connected with each fixed anchor point 5 by fixing spring beam b3, to play support and balanced action.
The harmony overall in order to ensure gyroscope, left, right driving anchor point 1a, 1b is arranged about origin symmetry in x-axis, first detection anchor point 2a1 and the 4th detection anchor point 2b2 is positioned at the top of x-axis, and it is symmetrical about y-axis, second detection anchor point 2b1 and the first detection anchor point 2a1 is symmetrical arranged about x-axis, 3rd detection anchor point 2a2 and the 4th detection anchor point 2b2 is symmetrical arranged about x-axis, first, second sensitive anchor point 4a1, 4b1 is positioned at the top of twisting mass m1, and be symmetrical arranged about y-axis, the first sensitive anchor point 4b2 of sensitive anchor point 4a1 and the 4th is symmetrical arranged about x-axis, the second sensitive anchor point 4a2 of sensitive anchor point 4b1 and the 3rd is symmetrical arranged about x-axis；It addition, the present embodiment arranges four fixed anchor points 5, four fixed anchor points 5 set up four edges at gyroscope separately.For above-mentioned configuration, a pair driving capacitance group being positioned at left and right capacitance group setting area is symmetrical arranged about y-axis, and driving capacitance group is symmetrical arranged by two about x-axis.First detection capacitance group C21 and the 4th detection capacitance group C24 are symmetrical arranged about y-axis above driving capacitance group C1 as a pair detection capacitance group, and detection capacitance group is symmetrical arranged about x-axis with upper a pair detection capacitance group by the second detection capacitance group C22 and the 3rd detection capacitance group C23 as another.First sensitization capacitance group C31 and the 4th sensitization capacitance group C34 are symmetrical arranged about x-axis as a pair sensitization capacitance group, and sensitization capacitance group is symmetrical arranged about y-axis with upper a pair sensitization capacitance group by the second sensitization capacitance group C32 and the 3rd sensitization capacitance group C33 as another.
Here, it will be apparent to those skilled in the art that driving capacitance group C1, detection capacitance group C2 and the number of sensitization capacitance group C3 and connected mode are not intended to be limited to example given above.Driving capacitance group is set, the purpose of detection capacitance group and sensitization capacitance group is to provide to drive respectively, detection and sensitive signal, the number of capacitance group and the difference of connection provide only driving, detection and sensitive signal size and symmetric difference, and do not change corresponding driving, detection and sensitive function.
As shown in Figure 2, there is difference of height in the height in the z-axis direction driving capacitance group C1 adjacent fingers (movable and fixed fingers interval is arranged), when the current potential of fixed fingers and movable comb is unequal, drive the fixed fingers of capacitance group C1 will produce interaction force along the z-axis direction with movable comb.As shown in Figure 1, a pair drive electrode 1a, 1b are upper will apply amplitude, and frequency is equal, the driving voltage of opposite in phase, make to produce between two driving capacitance group of left and right side and twisting mass m1 anti-phase driving force, thus drive twisting mass m1 to do simple harmonic oscillation along y-axis.Detection capacitance group C2 is owing to twisting the vibration of mass M1, and its capacitance also changes, and regulates the change of additional driving voltage, the Oscillation Amplitude of final regulation twisting mass m1 according to the change of detection capacitance group C2 numerical value.
As shown in Figure 3, twisting mass swings around y-axis, when additional angular velocity acts on x direction, its coriolis force produced will make twisting mass rotate around z-axis, and drive the movable comb of sensitization capacitance group C3 to move by periphery spring beam b2, the capacitance making sensitization capacitance group C3 changes, thus measures the size of additional angular velocity.
The operation principle of gyroscope from the description above understands, at least there are two mode in it: driven-mode and sensed-mode, driven-mode twists around y-axis for twisting mass m1, now, one end that periphery spring beam b2 and twisting mass m1 is connected can twist with twisting mass m1, and the other end is motionless, therefore under fixing spring beam b3 and connected fixed anchor point 5 act on, under driven-mode, periphery spring beam b2 can twist；Under sense mode, total, in addition to the fixed fingers and each anchor point of capacitance group, will rotate relative to initial point about the z axis, and now spring beam b2 in periphery only can deform in the case of not considering mismachining tolerance in X/Y plane.
It is only preferred embodiment of the present invention in sum, is not used for limiting the practical range of the present invention.The most all equivalence changes made according to the content of scope of the present invention patent and modification, all should belong to the technology category of the present invention.
Claims (6)
1. a gyroscope of single-shaft micro electro mechanical, it is characterised in that: include twisting mass, being distributed in twisting mass surrounding
Each anchor point and be arranged in each anchor point and twisting mass between capacitance group setting area in each capacitance group, define with turn round
The center of kinoplaszm gauge block is on the right side of the forward sensing of the x-axis of the cartesian coordinate system of initial point, on the upside of the forward sensing of y-axis, respectively
The fixed fingers of capacitance group and movable comb have difference of height along the z-axis direction；
Described capacitance group includes that at least one pair of drives capacitance group, at least one pair of detection capacitance group and at least one pair of sensitization capacitance group,
Two every pair drive the left and right side that capacitance group is divided into twisting mass, are positioned at the fixing comb of the driving capacitance group of left and right side
Tooth is fixed in substrate by left and right driving anchor point respectively, be positioned at left and right side driving capacitance group movable comb respectively with
The left and right sidewall of twisting mass connects, and described left and right driving anchor point is used for receiving peripheral circuit as a pair drive electrode
The driving signal provided；
Two every pair detection capacitance group are divided into the left and right side of twisting mass, are positioned at the consolidating of detection capacitance group of left and right side
Determine comb by fixing with each self-corresponding detection anchor point on the substrate, be positioned at detection capacitance group movable of left and right side
Comb left and right sidewall with twisting mass respectively is connected, each detection anchor point divide two groups link together composition a pair for by
The capacitance change signal of detection capacitance group feeds back to the detecting electrode of drive electrode described in a pair, makes the two of every pair of detection capacitance group
Individual detection capacitance group connects from different detecting electrodes, drives the Oscillation Amplitude of capacitance group with regulation；Described capacitance group includes two
To detection capacitance group, each to detection capacitance group be symmetrical arranged about y-axis, two to detection capacitance group be symmetrical arranged about x-axis,
It is connected with the two detection anchor points that the fixed fingers of the detection capacitance group laying respectively at left and right side in detection capacitance group is connected
Form a pair detecting electrode together；The first, the 3rd detection anchor point 2a1,2a2 links together, and constitutes a detection electricity
Pole, the second, the 4th detection anchor point 2b1,2b2 links together and constitutes another detecting electrode, makes four detection capacitance group
C2 forms differential connection；
Every pair of two the sensitization capacitance component are located at the upper and lower side of twisting mass, are positioned at the consolidating of sensitization capacitance group of upper and lower side
Determine comb by fixing with the most corresponding sensitive anchor point on the substrate, be positioned at upper and lower side sensitization capacitance group can
Dynamic comb is connected with twisting mass by periphery spring beam；Each sensitive anchor point divides two groups of a pair offers of composition that link together to use
In the sensitive electrode of the sensitive signal measuring additional magnitude of angular velocity, make two sensitization capacitance groups of every pair of sensitization capacitance group from different
Sensitive electrode connect, the movable comb of all sensitization capacitance groups is connected with each fixed anchor point by fixing spring beam；And,
The center anchor point being positioned at twisting mass center position is connected with twisting mass by middle part spring beam.
Gyroscope of single-shaft micro electro mechanical the most according to claim 1, it is characterised in that: two every pair drive capacitance group to close
Symmetrical in y-axis, and two the every pair link positions driving electric capacity and twist mass are symmetrical about y-axis.
Gyroscope of single-shaft micro electro mechanical the most according to claim 2, it is characterised in that: described capacitance group includes two to driving
Dynamic condenser group, two to drive capacitance group be symmetrical arranged about x-axis, drive capacitance group C1 adjacent fingers in z-axis direction
On height there is difference of height.
4. according to the gyroscope of single-shaft micro electro mechanical described in claim 1,2 or 3, it is characterised in that: described left and right drive
Dynamic anchor point is symmetrical arranged about y-axis in x-axis.
5. according to the gyroscope of single-shaft micro electro mechanical described in claim 1,2 or 3, it is characterised in that: described capacitance group bag
Including two pairs of sensitization capacitance groups, each pair of sensitization capacitance group is symmetrical arranged about x-axis, and two pairs of sensitization capacitance groups are symmetrical arranged about y,
The sensitive anchor point being connected with the fixed fingers of the sensitization capacitance group laying respectively at upper and lower side in two pairs of sensitization capacitance groups is connected
Form a pair sensitive electrode together.
6. according to the gyroscope of single-shaft micro electro mechanical described in claim 1,2 or 3, it is characterised in that: described fixed anchor point
It is arranged at four edges of gyroscope of single-shaft micro electro mechanical.
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| CN104089613B (en) * | 2014-07-18 | 2017-07-07 | 深迪半导体(上海)有限公司 | Capacitive gyroscope sensitivity end electric capacity configuration device and its collocation method |
| CN105584984B (en) * | 2014-10-20 | 2018-02-02 | 立锜科技股份有限公司 | Microelectromechanicdevices devices |
| CN104457726B (en) * | 2014-11-27 | 2017-07-04 | 歌尔股份有限公司 | A kind of three axis microelectromechanicdevice gyroscopes |
| KR101927647B1 (en) | 2014-11-27 | 2018-12-10 | 고어텍 인크 | Tri-axial micro-electro-mechanical gyroscope |
| TWI632345B (en) * | 2016-05-27 | 2018-08-11 | 日商村田製作所股份有限公司 | Continuous monitoring of drive amplitude in vibrating microelectromechanical gyroscopes and associated method |
| CN110342453B (en) * | 2019-06-20 | 2022-02-11 | 东南大学 | Micro-electromechanical gyroscope based on double-grating detection and processing and packaging method thereof |
| CN110307833B (en) * | 2019-06-27 | 2020-12-01 | 深迪半导体(上海)有限公司 | High-precision Z-axis gyroscope |
| CN110319822B (en) * | 2019-06-27 | 2020-12-01 | 深迪半导体(上海)有限公司 | High-sensitivity single-axis MEMS gyroscope |
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| KR100231715B1 (en) * | 1997-11-25 | 1999-11-15 | 정선종 | Planer vibratory microgyroscope |
| CN1948906B (en) * | 2006-11-10 | 2011-03-23 | 北京大学 | Capacitive type complete decoupling horizontal axis miniature mechanical gyro |
| CN103003704B (en) * | 2011-05-23 | 2016-05-04 | 深迪半导体(上海)有限公司 | Both MEMS devices of sensing rotation and acceleration |
| CN202511800U (en) * | 2012-02-01 | 2012-10-31 | 苏州敏芯微电子技术有限公司 | Triaxial gyroscope for single chip |
| CN203364833U (en) * | 2013-06-18 | 2013-12-25 | 深迪半导体(上海)有限公司 | Single-axis MEMS (micro electro mechanical system) gyroscope |
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