CN103234535B - A kind of quartz tuning-fork-type biaxial micro-gyroscope - Google Patents
A kind of quartz tuning-fork-type biaxial micro-gyroscope Download PDFInfo
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Abstract
The present invention relates to a kind of MEMS angular-rate sensor, particularly a kind of quartz tuning-fork-type biaxial micro-gyroscope, belong to inertia measurement device technical field.Twin shaft gyroscope of the present invention processes through wet-etching technology to cutting quartz wafer by having certain thickness z.Specifically comprise: four drivings are interdigital, four sensitivities are interdigital, hexagonal-shaped frame, left crossbeam, right crossbeam, center fixed support structure, multiple drive electrode, y-axis sensitive electrode and z-axis sensitive electrode.Can detect simultaneously y-axis to z-axis to angular velocity, drive the interdigital cross-couplings reducing between centers with interdigital being separated of sensitivity, ensure the measuring accuracy of gyro.Y-axis sensitive electrode and z-axis sensitive electrode be arranged in different interdigital on, reduce the manufacture difficulty of electrode, ensure that the realizability of technique.Hexagonal-shaped frame reduces the error of gyro.Center fixed support structure ensure that the stability of gyro work.
Description
Technical field
The present invention relates to a kind of MEMS angular-rate sensor, particularly a kind of quartz tuning-fork-type biaxial micro-gyroscope, belong to inertia measurement device technical field.
Background technology
Quartz gyroscope is a kind of MEMS angular rate sensor, is the core devices of gesture stability and inertial guidance, has that volume is little, lightweight, high reliability.Along with the development of Micrometer-Nanometer Processing Technology in recent years, quartzy gyroscope performance promotes steadily, features such as presenting structure diversification, volume miniaturization, multiaxis are measured, be circuitry digitizing.
Quartzy gyroscope manufactured by CST company of the U.S. is the most ripe, and the typical structure of its gyroscope chip is H type structure, is a kind of gyroscope of y-axis sensitivity, as shown in Figure 1.Drive the interdigital upper and lower that be respectively distributed in central frame interdigital with sensitivity, two kinds interdigital between coupling little and highly sensitive.The quartzy microthrust test of this structure is produced in batches, has the advantage of high precision, high stability, low noise.Simultaneously, the said firm also produces the gyroscope that multiaxis is measured, it is low in energy consumption, cost is low, have good temperature characterisitic and impact property, be mainly used in military aspect, but this gyroscope is by the measuring unit of multiple single axis gyroscope assembled package, not use single GYROCHIP to carry out multiaxis measurement, which has limited the further miniaturization of device.
Multi-fork syconoid single shaft manufactured by the EPSON company quartz gyroscope of Japan has been applied to the field such as stable and robot controlling of automobile brake system, image.The typical structure of its product is double-T shaped, is a kind of single axis gyroscope of z-axis sensitivity, as shown in Figure 2.It is interdigital interdigital with two sensitivities that this structure has four drivings, and four drive the interdigital both sides being distributed in middle square frame, and two sensitivities are interdigital to be connected to above and below square frame.Its advantage is reduction of the difficulty of manufacture craft, and volume can do very little, is of a size of 5 × 3.2 × 1.3mm after encapsulation
3, expand the application of this gyro.The multiaxis gyro product that the said firm produces also is formed by multiple single shaft Gyro, still there is the problem being not easy to further miniaturization.
In the making of electrode, domesticly can successfully produce side and divide cube electrode.Chinese patent " a kind of metallization processing method of three-dimensional quartz-sensitive structure " (application publication number: CN102110771A), propose a kind of in the method for the side electrode of same side processing and fabricating opposed polarity, can be used in the batch production of quartzy micro element.The method is that the technologic realizability of single-chip quartz gyroscope provides foundation.
In a word, the Micrometer-Nanometer Processing Technology relevant to quartzy gyroscope is more and more ripe, has possessed the quartzy gyroscope that enough conditions produce multiaxis measurement on one chip at present, has made the further miniaturization of device, expand its range of application, to meet the demand in market.But still there is following technical weak point in single-chip quartz gyroscope structure known at present: arrangement of electrodes is comparatively complicated, technique is not easy to realize; There is larger cross-couplings in two between centers, have impact on the measuring accuracy of gyro.
Summary of the invention
The object of the invention is, in order to realize single-chip twin shaft gyroscope, to reduce the manufacture difficulty of its electrode simultaneously, reduce the cross-couplings of two between centers, propose a kind of quartz tuning-fork-type biaxial micro-gyroscope.This gyroscope set feature of the double-T shaped tuning fork structure of U.S. H type tuning fork structure and Japan, achieves the function that utilization one piece of quartz chip can detect two axial angle speed simultaneously.
A kind of quartz tuning-fork-type biaxial micro-gyroscope, processes through wet-etching technology to cutting quartz wafer by having certain thickness z.Specifically comprise: four drivings are interdigital, four sensitivities are interdigital, hexagonal-shaped frame, left crossbeam, right crossbeam, center fixed support structure, multiple drive electrode, y-axis sensitive electrode and z-axis sensitive electrode.The determination principle of described y-axis and z-axis is: by with the center of hexagonal-shaped frame for initial point, right crossbeam is x forward, according to right hand principle set up coordinate system determine.
Described center fixed support structure comprises tie-beam, lower tie-beam and fixed blocks.Fixed blocks is positioned at hexagonal-shaped frame center, and upper tie-beam, lower tie-beam are drawn from the y-axis positive dirction of fixed blocks, negative direction respectively, are connected to the mid point on the hexagonal-shaped frame up and down both sides parallel with x-axis.
In the positive dirction that two symmetrical summits of described hexagonal-shaped frame are distributed in x-axis respectively and negative direction, left crossbeam is along x-axis negative direction, be connected with the summit of hexagonal-shaped frame; Right crossbeam is along x-axis positive dirction, be connected with the summit of hexagonal-shaped frame.
Described four drive interdigital structures identical, be respectively the first driving interdigital, second drive interdigital, the 3rd drive interdigital and four-wheel drive is interdigital.First drives interdigital, that the interdigital symmetry of the second driving is positioned at x-axis both sides, perpendicular to left crossbeam; 3rd drives the both sides interdigital, the interdigital symmetry of four-wheel drive is positioned at x-axis, perpendicular to right crossbeam.First driving is interdigital, the second driving is interdigital drives interdigital, the interdigital relative hexagonal-shaped frame Central Symmetry of four-wheel drive with the 3rd.
Four described responsive interdigital structures are identical, are respectively first responsive interdigital, second responsive interdigital, the 3rd responsive interdigital and the 4th responsive interdigital.First is responsive interdigital, second responsive interdigital, the 3rd responsive interdigital responsive interdigital parallel with y-axis respectively with the 4th, first drive interdigital, second drive interdigital, the 3rd drive interdigital, four-wheel drive is interdigital and between hexagonal-shaped frame; And first responsive interdigital, the second responsive interdigital, four responsive interdigital relative hexagonal-shaped frame Central Symmetry responsive interdigital with the 3rd.
Described drive electrode is divided into driving positive electrode and drives negative electrode.Positive electrode is driven to be arranged in first, second left and right side driving interdigital upper and lower surface and the 3rd, four-wheel drive interdigital; The upper and lower surface driving negative electrode electrodes to be arranged in first, second to drive interdigital left and right side and the 3rd, four-wheel drive interdigital.Wherein upper surface electrode is connected by interdigital top with lower surface electrode, and left surface electrode is connected by lead-in wire with right flank electrode.
Described y-axis sensitive electrode is divided into the responsive positive electrode of y-axis and the responsive negative electrode of y-axis.The responsive positive electrode of y-axis is arranged in the 3rd responsive Lower Half of interdigital left surface and the first half of right flank and the 4th responsive first half of interdigital left surface and the Lower Half of right flank; The responsive negative electrode of y-axis is arranged in the 3rd responsive first half of interdigital left surface and the Lower Half of right flank and the 4th responsive Lower Half of interdigital left surface and the first half of right flank.
Described z-axis sensitive electrode is divided into the responsive positive electrode of z-axis and the responsive negative electrode of z-axis.The responsive positive electrode of z-axis is arranged in first responsive interdigital and the second responsive interdigital upper and lower surface; The responsive negative electrode of z-axis is arranged in first responsive interdigital and the second responsive interdigital left and right side.
The lead-in wire of above-mentioned multiple drive electrode and sensitive electrode comes together in the fixed blocks of center fixed support structure, and from then on draws.The above-mentioned electrode being positioned at side covers whole side; The electrode being positioned at upper and lower surface, in the whole covering of interdigital length direction, leaves certain distance at Width and side electrode, and preventing contacts with side electrode causes short circuit.
The workflow of quartz tuning-fork-type biaxial micro-gyroscope of the present invention is: when applying the contrary electric signal of phase place to each positive and negative drive electrode respectively, makes four to drive interdigitally do simple harmonic oscillation in x-axis direction by inverse piezoelectric effect; When y-axis has turning rate input, four drive the interdigital coriolis force producing z direction, and by left and right crossbeam vibration coupling is interdigital to four sensitivities on, make that four sensitivities are interdigital to be vibrated along the z-axis direction, the electric charge collected by y-axis sensitive electrode carry out amplifying, filtering, demodulation can record y-axis to angular velocity; When z-axis has turning rate input, four drive the interdigital coriolis force producing y direction, and by left and right crossbeam vibration coupling is interdigital to four sensitivities on, make that four sensitivities are interdigital to be vibrated along the x-axis direction, the electric charge collected by z-axis sensitive electrode carry out amplifying, filtering, demodulation can record z-axis to angular velocity.
Beneficial effect
1, use one piece of quartz chip, can detect simultaneously y-axis to z-axis to angular velocity.
2, drive the interdigital cross-couplings reducing between centers with interdigital being separated of sensitivity, ensure the measuring accuracy of gyro.
3, y-axis sensitive electrode and z-axis sensitive electrode be arranged in different interdigital on, reduce the manufacture difficulty of electrode, ensure that the realizability of technique.
4, hexagonal-shaped frame effectively inhibit drive interdigital and sensitivity interdigital between mechanical couplings, reduce the error of gyro.
5, center fixed support structure has effectively isolated the impact of other mode of oscillations on operation mode, ensure that the stability of gyro work.
Accompanying drawing explanation
Fig. 1 is the structure of H type quartz tuning-fork in background technology;
Fig. 2 is the structure of double-T shaped quartz tuning-fork in background technology;
Fig. 3 is the layout of quartz tuning-fork structure of the present invention and drive electrode and sensitive electrode; Wherein (a) is quartz tuning-fork overall construction drawing, and (b) is the structural drawing of A-A section in figure (a), and (c) is the structural drawing of B-B section in figure (a), and (d) is the structural drawing of C-C section in figure (a);
Driven-mode when Fig. 4 is quartz tuning-fork of the present invention work;
Y-axis sense mode when Fig. 5 is quartz tuning-fork of the present invention work;
Z-axis sense mode when Fig. 6 is quartz tuning-fork of the present invention work;
Fig. 7 is the interdigital Electric Field Distribution under different direction of vibration of quartz tuning-fork in embodiment; Wherein (a) for interdigital vibrate in the z-direction time distribution map of the electric field, (b) for interdigital vibrate in the x-direction time distribution map of the electric field;
Label declaration: 110-first drives interdigital, 120-second drives interdigital, 130-the 3rd drives interdigital, 140-four-wheel drive is interdigital, the left crossbeam of 201-, the right crossbeam of 202-, 310-first is responsive interdigital, 320-second is responsive interdigital, 410-the 3rd is responsive interdigital, 420-the 4th is responsive interdigital, 501-hexagonal-shaped frame, the upper tie-beam of 502-, tie-beam under 503-, 504-fixed blocks, 111-first drives interdigital surface electrode, 112-first drives interdigital left surface electrode, 113-first drives interdigital right flank electrode, 121-second drives interdigital surface electrode, 122-second drives interdigital left surface electrode, 123-second drives interdigital right flank electrode, 131-the 3rd drives interdigital surface electrode, 132-the 3rd drives interdigital right flank electrode, 133-the 3rd drives interdigital left surface electrode, 141-four-wheel drive interdigital surface electrode, the interdigital right flank electrode of 142-four-wheel drive, the interdigital left surface electrode of 143-four-wheel drive, the responsive interdigital surface electrode of 311-first, the responsive interdigital right flank electrode of 312-first, the responsive interdigital left surface electrode of 313-first, the responsive interdigital surface electrode of 321-second, the responsive interdigital left surface electrode of 322-second, the responsive interdigital right flank electrode of 323-second, the responsive interdigital right flank first half electrode of 411-the 3rd, the responsive interdigital left surface first half electrode of 412-the 3rd, the responsive interdigital right flank Lower Half electrode of 413-the 3rd, the responsive interdigital left surface Lower Half electrode of 414-the 3rd, the responsive interdigital right flank first half electrode of 421-the 4th, the responsive interdigital left surface first half electrode of 422-the 4th, the responsive interdigital right flank Lower Half electrode of 423-the 4th, the responsive interdigital left surface Lower Half electrode of 424-the 4th.
Embodiment
In order to better objects and advantages of the present invention are described, below in conjunction with drawings and Examples, the present invention will be further described.
Tuning fork structure of the present invention processes through wet-etching technology to cutting quartz wafer by having certain thickness z.Fig. 3 is concrete structure of the present invention, comprising: four drivings are interdigital, four sensitivities are interdigital, two crossbeams, hexagonal-shaped frame and center fixed support structures.First drives interdigital 110, second to drive the interdigital 120, the 3rd to drive interdigital 130, four-wheel drive interdigital 140, and four sensitivities interdigital 310,320,410,420 are evenly distributed in the both sides of hexagonal-shaped frame 501, wherein the first sensitivity interdigital 310 and second responsive interdigital 320 is interdigital for the sensitivity of z-axis detection, and the the the 3rd responsive interdigital 410 and the 4th responsive interdigital 420 is interdigital for the sensitivity of y-axis detection; Left crossbeam 201 and right crossbeam 202 are be connected to drive interdigital and that sensitivity is interdigital two crossbeams, are connected to two summits, left and right place of hexagonal-shaped frame 501; Upper tie-beam 502, lower tie-beam 503 and fixed blocks 504 organization center fixed support structure.
The distribution of each drive electrode of the present invention is as shown in Fig. 3 (a): first drives interdigital surface electrode 111, second drives interdigital surface electrode 121, 3rd drives interdigital right flank electrode 132, 3rd drives interdigital left surface electrode 133, four-wheel drive interdigital right flank electrode 142 and the interdigital left surface electrode 143 of four-wheel drive drive positive electrode, and first drives interdigital left surface electrode 112, first drives interdigital right flank electrode 113, second drives interdigital left surface electrode 122, second drives interdigital right flank electrode 123, 3rd drives interdigital surface electrode 131 and four-wheel drive interdigital surface electrode 141 to be drive negative electrode, wherein first drives interdigital surface electrode 111, second drives interdigital surface electrode 121, 3rd drives interdigital surface electrode 131 and four-wheel drive interdigital surface electrode 141 to be arranged in interdigital upper and lower surface, and first drives interdigital left surface electrode 112, first drives interdigital right flank electrode 113, second drives interdigital left surface electrode 122, second drives interdigital right flank electrode 123, 3rd drives interdigital right flank electrode 132, 3rd drives interdigital left surface electrode 133, the interdigital right flank electrode 142 of four-wheel drive and four-wheel drive interdigital left surface electrode 143 are arranged in interdigital left and right side, and the sectional view in yz plane is as shown in Fig. 3 (b), first responsive interdigital surface electrode 311 and the second responsive interdigital surface electrode 321 are the responsive positive electrodes of z-axis, be arranged in interdigital upper and lower surface, first responsive interdigital right flank electrode 312, the first responsive interdigital left surface electrode 322 of responsive interdigital left surface electrode 313, second and the second responsive interdigital right flank electrode 323 are the responsive negative electrodes of z-axis, be arranged in interdigital left and right side, the layout of this group electrode is arranged identical with drive electrode, 3rd responsive interdigital left surface first half electrode the 412, the 3rd responsive interdigital right flank first half electrode 421 of responsive interdigital right flank Lower Half electrode the 413, the 4th and the 4th responsive interdigital left surface Lower Half electrode 424 are the responsive positive electrodes of y-axis, 3rd responsive interdigital right flank first half electrode the 411, the 3rd responsive interdigital left surface first half electrode 422 of responsive interdigital left surface Lower Half electrode the 414, the 4th and the 4th responsive interdigital right flank Lower Half electrode 423 are the responsive negative electrodes of y-axis, in the layout of yz plane electrodes as shown in Fig. 3 (c) He (d).
As shown in Figure 4, time respectively to the periodic voltage signal that driving positive electrode is contrary with driving negative electrode applying phase place, the Cyclic flexion making the first driving interdigital 110, second drive interdigital 120, the 3rd driving interdigital 130 and four-wheel drive interdigital 140 to produce x directions by the inverse piezoelectric effect of quartz crystal vibrates.When the frequency of the periodic voltage signal inputted is identical with driving interdigital eigenfrequency, drive the reference vibration in interdigital generation x direction.
As shown in Figure 5, when first drives interdigital 110, second to drive interdigital 120, the 3rd driving interdigital 130 and four-wheel drive interdigital 140 to produce the reference vibration in x directions, if y-axis has turning rate input, then drive the coriolis force in interdigital generation z direction, and the simple harmonic oscillation produced in the z-direction, left crossbeam 201 and right crossbeam 202 do the contrary simple harmonic oscillation in direction along the z-axis direction simultaneously, this vibration coupling on first responsive interdigital 310, second the responsive interdigital 320, the 3rd responsive interdigital 410 and the 4th responsive interdigital 420, and produces simple harmonic oscillation in the z-direction.Due to the piezoelectric effect of quartz crystal, first responsive interdigital 310, second the responsive interdigital 320, the 3rd responsive interdigital 410 and the 4th responsive interdigital 420 produce the electric field as shown in Fig. 7 (a), the responsive positive electrode of z-axis and the responsive positive and negative charge collected by negative electrode of z-axis neutralize mutually, and output is zero; The responsive positive electrode of y-axis and the responsive negative electrode of y-axis form differential charge simultaneously, can obtain the angular velocity of y-axis input through amplification, filtering and demodulation.
As shown in Figure 6, when first drives interdigital 110, second to drive interdigital 120, the 3rd driving interdigital 130 and four-wheel drive interdigital 140 to produce the reference vibration in x directions, if z-axis has turning rate input, then drive the coriolis force in interdigital generation y direction, and the simple harmonic oscillation produced in the y-direction, left crossbeam 201 and right crossbeam 202 do the contrary simple harmonic oscillation in direction along the y-axis direction simultaneously, this vibration coupling on first responsive interdigital 310, second the responsive interdigital 320, the 3rd responsive interdigital 410 and the 4th responsive interdigital 420, and produces vibration in the x-direction.Due to the piezoelectric effect of quartz crystal, first responsive interdigital 310, second the responsive interdigital 320, the 3rd responsive interdigital 410 and the 4th responsive interdigital 420 produce the electric field as shown in Fig. 7 (b), the responsive positive electrode of y-axis and the responsive positive and negative charge collected by negative electrode of y-axis neutralize mutually, and output is zero; The responsive positive electrode of z-axis and the responsive negative electrode of z-axis form differential charge simultaneously, can obtain the angular velocity of z-axis input through amplification, filtering and demodulation.
Above, be described in detail an example of the present invention, the present invention also has following advantage in addition: drive and interdigitally reduce two between centers cross-couplings with interdigital being separated of sensitivity, ensure that the measuring accuracy of gyro; Two summits place that left crossbeam 201 and right crossbeam 202 are connected to hexagonal-shaped frame 501 can effectively suppress to drive the interdigital mechanical couplings interdigital to sensitivity, reduces the error of gyro; Center fixed support structure effectively can isolate the impact of other mode of oscillations, ensures the stability of gyro work; Y-axis sensitive electrode and z-axis sensitive electrode be arranged in different interdigital on, reduce technology difficulty, ensure that this structure is in technologic realizability.But the present invention goes back Shortcomings part, due to the anisotropy of quartz crystal, after wet-etching technology, still can there is coupling error to a certain degree in y-axis sense mode and z-axis sense mode, difference by optimizing arrangement of electrodes or increase by two kinds of model frequencies reduces the impact that coupling error brings, and improves the measuring accuracy of gyro further.
The above is preferred embodiment of the present invention, and protection scope of the present invention is not only confined to this example.Many interdigital structures are utilized to be combined by the operation mode of H type tuning fork and double-T shaped tuning fork, be separated interdigital for driving with sensitivity is interdigital, and to realize twin shaft angular velocity detection on one chip be basic thought of the present invention, all technical schemes belonged under thinking of the present invention all belong to category of the present invention.
Claims (5)
1. a quartz tuning-fork-type biaxial micro-gyroscope, is characterized in that: specifically comprise that four drivings are interdigital, four sensitivities are interdigital, hexagonal-shaped frame, left crossbeam, right crossbeam, center fixed support structure, multiple drive electrode, y-axis sensitive electrode and z-axis sensitive electrode;
Described center fixed support structure comprises tie-beam, lower tie-beam and fixed blocks; Fixed blocks is positioned at hexagonal-shaped frame center, and upper tie-beam, lower tie-beam are drawn from the y-axis positive dirction of fixed blocks, negative direction respectively, are connected to the mid point on the hexagonal-shaped frame up and down both sides parallel with x-axis;
In the positive dirction that two symmetrical summits of described hexagonal-shaped frame are distributed in x-axis respectively and negative direction, left crossbeam is along x-axis negative direction, be connected with the summit of hexagonal-shaped frame; Right crossbeam is along x-axis positive dirction, be connected with the summit of hexagonal-shaped frame;
Described four drive interdigital structures identical, be respectively the first driving interdigital, second drive interdigital, the 3rd drive interdigital and four-wheel drive is interdigital; First drives interdigital, that the interdigital symmetry of the second driving is positioned at x-axis both sides, perpendicular to left crossbeam; 3rd drives the both sides interdigital, the interdigital symmetry of four-wheel drive is positioned at x-axis, perpendicular to right crossbeam; First driving is interdigital, the second driving is interdigital drives interdigital, the interdigital relative hexagonal-shaped frame Central Symmetry of four-wheel drive with the 3rd;
Four described responsive interdigital structures are identical, are respectively first responsive interdigital, second responsive interdigital, the 3rd responsive interdigital and the 4th responsive interdigital; First is responsive interdigital, second responsive interdigital, the 3rd responsive interdigital responsive interdigital parallel with y-axis respectively with the 4th, first drive interdigital, second drive interdigital, the 3rd drive interdigital, four-wheel drive is interdigital and between hexagonal-shaped frame; And first responsive interdigital, the second responsive interdigital, four responsive interdigital relative hexagonal-shaped frame Central Symmetry responsive interdigital with the 3rd;
Described drive electrode is divided into driving positive electrode and drives negative electrode; Positive electrode is driven to be arranged in first, second left and right side driving interdigital upper and lower surface and the 3rd, four-wheel drive interdigital; The upper and lower surface driving negative electrode electrodes to be arranged in first, second to drive interdigital left and right side and the 3rd, four-wheel drive interdigital; Wherein upper surface electrode is connected by interdigital top with lower surface electrode, and left surface electrode is connected by lead-in wire with right flank electrode;
Described y-axis sensitive electrode is divided into the responsive positive electrode of y-axis and the responsive negative electrode of y-axis; The responsive positive electrode of y-axis is arranged in the 3rd responsive Lower Half of interdigital left surface and the first half of right flank and the 4th responsive first half of interdigital left surface and the Lower Half of right flank; The responsive negative electrode of y-axis is arranged in the 3rd responsive first half of interdigital left surface and the Lower Half of right flank and the 4th responsive Lower Half of interdigital left surface and the first half of right flank;
Described z-axis sensitive electrode is divided into the responsive positive electrode of z-axis and the responsive negative electrode of z-axis; The responsive positive electrode of z-axis is arranged in first responsive interdigital and the second responsive interdigital upper and lower surface; The responsive negative electrode of z-axis is arranged in first responsive interdigital and the second responsive interdigital left and right side.
2. a kind of quartz tuning-fork-type biaxial micro-gyroscope according to claim 1, is characterized in that: with the center of hexagonal-shaped frame for initial point, right crossbeam is x forward, and the coordinate system set up according to right hand principle determines y-axis and z-axis.
3. a kind of quartz tuning-fork-type biaxial micro-gyroscope according to claim 1, is characterized in that: the lead-in wire of multiple drive electrode and sensitive electrode comes together in the fixed blocks of center fixed support structure, and from then on draws.
4. a kind of quartz tuning-fork-type biaxial micro-gyroscope according to claim 1, is characterized in that: the electrode being positioned at side covers whole side; The electrode being positioned at upper and lower surface, in the whole covering of interdigital length direction, leaves certain distance at Width and side electrode, and preventing contacts with side electrode causes short circuit.
5. a kind of quartz tuning-fork-type biaxial micro-gyroscope according to claim 1, is characterized in that: process through wet-etching technology to cutting quartz wafer by having certain thickness z.
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| CN103954305B (en) * | 2014-05-09 | 2016-01-27 | 浙江大学 | A kind of MEMS resonant formula charge sensor with flexible lever and method thereof |
| CN104132657B (en) * | 2014-07-14 | 2017-02-15 | 中国电子科技集团公司第二十六研究所 | Bisaxial quartz angular velocity sensor chip |
| CN105424021B (en) * | 2015-12-08 | 2017-12-05 | 中国电子科技集团公司第二十六研究所 | A kind of double-ended tuning fork angular-rate sensor chip |
| CN110207685A (en) * | 2019-06-13 | 2019-09-06 | 华中科技大学 | A kind of MEMS gyroscope |
| CN117146791B (en) * | 2023-10-30 | 2024-02-23 | 北京晨晶电子有限公司 | Micromechanical quartz tuning fork gyroscope and electronic equipment |
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| CN103017747A (en) * | 2011-09-26 | 2013-04-03 | 精工爱普生株式会社 | Sensor element, manufacturing method of sensor element, sensor device, and electronic apparatus |
| CN103033176A (en) * | 2011-09-29 | 2013-04-10 | 精工爱普生株式会社 | Sensor element, method for manufacturing sensor element, sensor device, and electronic apparatus |
| CN102889887A (en) * | 2012-09-29 | 2013-01-23 | 北京晨晶电子有限公司 | Quartz micromechanical tuning fork gyroscope |
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