CN105300368A - Holosymmetric decoupling vibrating gyroscope capable of directly outputting frequency - Google Patents
Holosymmetric decoupling vibrating gyroscope capable of directly outputting frequency Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
- G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
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Abstract
The invention relates to a holosymmetric decoupling vibrating gyroscope capable of directly outputting frequency. The gyroscope is characterized in that the mode of directly outputting frequency is adopted, signal loss is greatly reduced, and weak Coriolis effect frequency modulation is achieved; a holosymmetric structure is adopted, so that the resonant frequency of a driving mode and the resonant frequency of a detection mode are easy to match, meanwhile, damping matching of the two modes can be achieved, and drifting caused by process errors and changes of environment temperature can be reduced; a double-frame decoupling structure is adopted, quadrature errors can be reduced, and the signal-to-noise ratio of the gyroscope is increased; by the adoption of a differential motion resonance structure, sensitivity can be improved, and most types of common-mode interference can be restrained; by means of the planar scheme design, the vibrating gyroscope can adapt to wire cut electrical discharge machining or MEMS related processes easily and be miniaturized easily.
Description
Technical field
The present invention relates to a kind of direct output frequency oscillation gyro structure of directly output frequency oscillation gyro, particularly a kind of complete symmetry decoupling zero, belong to the general structure design direction in resonant mode Gyroscope Design field.
Background technology
In recent years, along with the development of micro mechanical technology, the little and micromechanical gyro of good performance of the cheap volume of manufacturing price is just becoming the focus of research.Researchist, for improving the performance of micromechanical gyro, have employed serial of methods, as designed a kind of new structure, drives the optimal control with testing circuit, driven-mode and sensed-mode resonance frequency matches, the methods such as Vacuum Package.Although these methods to a certain degree can improve sensitivity, but also can with serving new problem while improving, as driven-mode and sensed-mode resonance frequency close to time, mechanical couplings can cause the decline of gyro performance, when particularly craft precision is not high, process deviation makes mechanical couplings more serious; Although Vacuum Package can improve the quality factor of gyrosystem, while increasing technology difficulty and cost of manufacture, also reduce long term device job stability.It is crucial that they have a common feature to be exactly be the capacitance change that utilizes capacitance detecting small thus demodulate measured signal, capacitance signal is a kind of typical faint simulating signal, is not only not easy accurately to detect but also very large by environmental interference.Therefore, how can realize the coupling of driven-mode and sensed-mode resonance frequency, can reduce again the coupling between mode, measured signal is disturbed the technological difficulties that degree little Yi detection is micromechanical gyro.Therefore, development one can realize signal and easily detects, highly sensitive, the micro mechanical vibration formula gyro of steady operation at ambient pressure, is current micromechanical gyro sensitive structure problem urgently to be resolved hurrily.
Summary of the invention
Technology of the present invention is dealt with problems and is: overcome the deficiencies in the prior art, provides a kind of oscillation gyro of direct output frequency, to improve the output signal antijamming capability of oscillation gyro; A kind of complete symmetry frame type decoupling structure is proposed, to improve the sensitivity of oscillation gyro.
Technical solution of the present invention: a kind of direct output frequency oscillation gyro of complete symmetry decoupling zero, described gyroscope structure is the overall distribution in complete symmetry, comprise mass, first drives elastic beam, second to drive elastic beam, the 3rd to drive, and elastic beam, four-wheel drive elastic beam, first detect elastic beam, the second detection elastic beam, the 3rd detects elastic beam, the 4th and detects elastic beam, inner frame, outside framework, the first resonant tuning fork and the second resonant tuning fork, mass and first drives elastic beam, second to drive elastic beam, the 3rd to drive elastic beam, four-wheel drive elastic beam, inner frame to form and drives resonator system, first drives elastic beam, second to drive, and elastic beam, the 3rd drives elastic beam, four-wheel drive elastic beam is all horizontal positioned as four resiliency supported, first drives elastic beam, second to drive elastic beam, be connected to mass top center, and the 3rd drives elastic beam and four-wheel drive elastic beam to be connected to mass bottom centre, outside framework and first detects elastic beam, second detects elastic beam, 3rd detects elastic beam, 4th detects elastic beam, first resonant tuning fork and the second resonant tuning fork composition detect resonator system, first detects elastic beam, second detects elastic beam, 3rd detects elastic beam, 4th detects elastic beam is all horizontal positioned as four resiliency supported, first detects elastic beam, second detects elastic beam, be connected to inner frame top, 3rd detection elastic beam and the 4th detects elastic beam and is connected to bottom inner frame, first resonant tuning fork and the second resonant tuning fork are placed horizontally at the center of outside framework and inner frame in the y-direction, the Coriolis force that first resonant tuning fork and the second resonant tuning fork are transmitted from frame mechanism by the change impression of resonance frequency.
The structural design of described gyro is for surface manufacturing process, and be for the photoetching of Linear cut mechanical processing technique or MEMS structure, etching process, bulk starting material processing is one-body molded, is an entirety, is connected directly between together, without detachable part between parts.
Described entirety is that complete symmetry distribution refers in x and y direction complete symmetry.
Described inner frame and outside framework are inside and outside pair of framework decoupling-structures.
Described mass block structure is in " work " type, and the structure of inner frame is folded form is " Lv " type.
Described first resonant tuning fork and the second resonant tuning fork form pair of differential resonant body, and when the resonance frequency of a synchronization resonant tuning fork increases, another resonance frequency reduces.
The axial force that the present invention utilizes frame mechanism to be resonant tuning fork by Coriolis force transmission.First resonant tuning fork and the second resonant tuning fork are for detecting resonator system, and the Coriolis force alternation ground of alternation changes the natural angular frequency of resonance beam, and by the self oscillatory system of resonant tuning fork, resonant tuning fork can follow the tracks of the change of own nature angular frequency point.The frequency quantity of output signal is exactly the natural angular frequency size of resonant tuning fork self.Because resonant tuning fork natural angular frequency is linear with Coriolis force size, the frequency detecting output signal just can calculate the size of angular speed external applied load.
Principle of work of the present invention: the speed producing an alternation when driving resonator system (elastic beam mass) to be in resonant condition in y direction.When total is subject to an angular velocity load in the z-direction, x direction will produce the Corioli's acceleration of an alternation accordingly, makes to detect resonator system produces alternation vibration in x direction.This vibration changes the axial stress of two resonant tuning forks periodically by detecting tuning fork, then the change of the corresponding generating period of the resonance frequency of two resonant tuning forks.Two resonant tuning forks adopt differential versions, the size of the resonant tuning fork axial stress that the difference representation quality block displacement in the x direction of both resonance frequencies causes.The change peak-to-peak value detecting two resonant tuning fork resonant frequency difference value just detects mass oscillation intensity in the x direction, thus can calculate the rotational angular velocity magnitude of load in z direction according to Corioli's acceleration theorem.
The present invention's advantage compared with prior art:
(1) oscillation gyro in the past all belongs to amplitude amount detection scheme.The direct output frequency oscillation gyro of the complete symmetry decoupling-structure that the present invention proposes, because its detection means thoroughly achieves direct output frequency, can be described as a kind of novelty, digitizing gyro truly, achieve once full rate amount that is responsive and final sensing unit to export, faint coriolis effect is achieved frequency modulation modulation in the mode of resonance, and FM signal exports.Due to stability and the antijamming capability of FM signal, the stability of sensor, sensitivity and measuring accuracy are improved, and output signal also can realize the interface of same computing machine easily and not need extra modulation demodulator circuit.
(2) mass is designed to " work " font, and inner frame is designed to folded form i.e. " Lv " type, both ensures complete symmetry, and can reduce again the overall dimensions of gyro.
(3) full symmetrical configuration is adopted, the resonance frequency of driving and sensed-mode is made to be very easy to coupling, also can realize the damping coupling of two mode simultaneously, and reduce the drift because fabrication error and variation of ambient temperature cause, improve the sensitivity of gyro.
(4) two frame type decoupling structure, can reduce quadrature error, improves the signal to noise ratio (S/N ratio) of gyro.
(5) two resonant tuning forks are stretched synchronization one, and another is compressed, and the poor representative sensor of output frequency exports.Differential rate-adaptive pacemaker mode makes the antijamming capability of sensor be further strengthened, and has the ability to get rid of most acceleration noise and disturbs with the angular speed load in other directions, can increase sensitivity.
Accompanying drawing explanation
Fig. 1 is the direct output frequency oscillation gyro structural plan schematic diagram of a kind of complete symmetry decoupling zero of the present invention;
Fig. 2 is the direct output frequency oscillation gyro structural upright schematic diagram of a kind of complete symmetry decoupling zero of the present invention.
Embodiment
The design feature of gyro of the present invention is: (1) adopts direct output frequency, considerably reduces the loss of signal, realizes faint coriolis effect frequency modulation modulation.(2) adopt full symmetrical configuration, make the resonance frequency of driving and sensed-mode be very easy to coupling, also can realize the damping coupling of two mode simultaneously, the drift because fabrication error and variation of ambient temperature cause can be reduced.(3) adopt two frame type decoupling structure, can quadrature error be reduced, improve the signal to noise ratio (S/N ratio) of gyro.(4) adopt differential resonance structure, can sensitivity be increased, suppress the common mode interference of most of type.(5) plane conceptual design, is easy to adapt to linear cutter or MEMS related process, is easy to miniaturization.
Be described in detail below in conjunction with accompanying drawing.
As shown in Figure 1, the oscillation gyro structure of direct output frequency of the present invention, comprise mass 1, first drives elastic beam 2, second to drive elastic beam 3, the 3rd to drive elastic beam 4, four-wheel drive elastic beam 5, first detection elastic beam 6, second detection elastic beam 7, the 3rd to detect elastic beam 8, the 4th detects elastic beam 9, inner frame 10, outside framework 11, the first resonant tuning fork 12 and the second resonant tuning fork 13; Mass 1 and first drives elastic beam 2, second to drive elastic beam 3, the 3rd to drive elastic beam 4, four-wheel drive elastic beam 5, inner frame 10 to form and drives resonator system, four resiliency supported are all horizontal positioned, first drives elastic beam 2, second to drive elastic beam 3, be connected to mass 1 top center, and the 3rd drives elastic beam 4 and four-wheel drive elastic beam 5 to be connected to mass 1 bottom centre; Outside framework 11 and first detects elastic beam 6, second and detects elastic beam 7, the 3rd and detect elastic beam 8, the 4th and detect elastic beam 9, first resonant tuning fork 12 and the second resonant tuning fork 13 and form and detect resonator system, four resiliency supported are all horizontal positioned, first detects elastic beam 6, second detects elastic beam 7, is connected to inner frame 10 top, 3rd detection elastic beam 8 and the 4th detects elastic beam 9 and is connected to bottom inner frame 10, and the first resonant tuning fork 12 and the second resonant tuning fork 13 are placed horizontally at the center of outside framework 11 and inner frame 10 in the y-direction; One-piece construction is complete symmetry distribution; The Coriolis force that first resonant tuning fork 12 and the second resonant tuning fork 13 are transmitted from frame mechanism by the change impression of resonance frequency.
Described structural design is for surface manufacturing process, and be for the photoetching of Linear cut mechanical processing technique or MEMS structure, etching process, bulk starting material processing is integrally formed, is an entirety, is connected directly between together, without detachable part between parts.
Of the present invention first drives elastic beam 2 and second to drive elastic beam 3 symmetrical and in the x-direction, the 3rd drive elastic beam 4 and four-wheel drive elastic beam 5 symmetrical and in the x-direction; Four are detected elastic beam in the y-direction; First resonant tuning fork 12 and symmetrical 13 symmetries of the second resonant tuning fork, be positioned at the center of inner frame and outside framework, and in the x-direction; Both sides drive with testing agency symmetrical, and principle of work is identical.
Its size design of detection resonator system of first resonant tuning fork 12 and the second resonant tuning fork 13 makes the resonance frequency under load-less condition be more than 10 times that drive resonator system resonance frequency.For with ensure resonant tuning fork resonance frequency to drive resonator system produce alternation axial stress realize good tracking, first resonant tuning fork 12 and the second resonant tuning fork 13 form pair of differential resonant body, when the resonance frequency of a synchronization resonant tuning fork increases, another resonance frequency reduces, and substantially increases the antijamming capability of sensor to common mode interference while the sensitivity of sensor being doubled.
In a word, the present invention adopts frequency modulation (PFM) means, considerably reduces the loss of signal, realizes faint coriolis effect frequency modulation, improves antijamming capability; Mass adopts the design of " work " font, and inner frame adopts folded form design, both ensures complete symmetry, and can reduce again the overall dimensions of gyro; Adopt full symmetrical configuration, make the resonance frequency of driving and sensed-mode be very easy to coupling, also can realize the damping coupling of two mode simultaneously, and the drift that reduction causes due to fabrication error and variation of ambient temperature, improve the sensitivity of gyro; Adopt two frame type decoupling structural design, can quadrature error be reduced, improve the signal to noise ratio (S/N ratio) of gyro; Two resonant tuning forks adopt differential resonance structure, can suppress the common mode interference of most of type; Adopt plane conceptual design, be easy to adapt to linear cutter or MEMS related process, and be easy to miniaturization.
The content be not described in detail in instructions of the present invention belongs to the known prior art of professional and technical personnel in the field.
The above is only the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.
Claims (6)
1. a direct output frequency oscillation gyro for complete symmetry decoupling zero, is characterized in that: described gyroscope structure is the overall distribution in complete symmetry, comprise mass (1), first drives elastic beam (2), second to drive elastic beam (3), the 3rd to drive, and elastic beam (4), four-wheel drive elastic beam (5), first detect elastic beam (6), the second detection elastic beam (7), the 3rd detects elastic beam (8), the 4th and detects elastic beam (9), inner frame (10), outside framework (11), the first resonant tuning fork (12) and the second resonant tuning fork (13), mass (1) and first drives elastic beam (2), second drives elastic beam (3), 3rd drives elastic beam (4), four-wheel drive elastic beam (5), inner frame (10) composition drives resonator system, first drives elastic beam (2), second drives elastic beam (3), 3rd drives elastic beam (4) and four-wheel drive elastic beam (5) to be all horizontal positioned as four resiliency supported, first drives elastic beam (2), second drives elastic beam (3) to be connected to mass (1) top center, 3rd drives elastic beam (4) and four-wheel drive elastic beam (5) to be connected to mass (1) bottom centre, outside framework (11) and first detects elastic beam (6), second detects elastic beam (7), 3rd detects elastic beam (8), 4th detects elastic beam (9), first resonant tuning fork (12) and the second resonant tuning fork (13) composition detect resonator system, first detects elastic beam (6), second detects elastic beam (7), 3rd detects elastic beam (8), 4th detects elastic beam (9) is all horizontal positioned as four resiliency supported, first detects elastic beam (6), second detects elastic beam (7) is connected to inner frame (10) top, 3rd detection elastic beam (8) and the 4th detects elastic beam (9) and is connected to inner frame (10) bottom, first resonant tuning fork (12) and the second resonant tuning fork (13) are placed horizontally at the center of outside framework (11) and inner frame (10) in the y-direction, the Coriolis force that first resonant tuning fork (10) and the second resonant tuning fork (11) are transmitted from frame mechanism by the change impression of resonance frequency.
2. the direct output frequency oscillation gyro of complete symmetry decoupling zero according to claim 1, it is characterized in that: the structural design of described gyro is for surface manufacturing process, be for the photoetching of Linear cut mechanical processing technique or MEMS structure, etching process, bulk starting material processing is one-body molded, an entirety between parts, be connected directly between together, without detachable part.
3. the direct output frequency oscillation gyro of complete symmetry decoupling zero according to claim 1, is characterized in that: described entirety is that complete symmetry distribution refers in x and y direction complete symmetry.
4. the direct output frequency oscillation gyro of complete symmetry decoupling zero according to claim 1, is characterized in that: described inner frame (10) and outside framework (11) are inside and outside pair of framework decoupling-structures.
5. the direct output frequency oscillation gyro of complete symmetry decoupling zero according to claim 1, is characterized in that: described mass (1) structure is in " work " type, and the structure of inner frame (10) is folded form.
6. the direct output frequency oscillation gyro of complete symmetry decoupling zero according to claim 1, it is characterized in that: described first resonant tuning fork (12) and the second resonant tuning fork (13) form pair of differential resonant body, when the resonance frequency of a synchronization resonant tuning fork increases, another resonance frequency reduces.
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| CN109374927A (en) * | 2018-11-29 | 2019-02-22 | 中国矿业大学(北京) | A kind of direct output frequency accelerometer of holohedral symmetry decoupling |
| CN110514188A (en) * | 2019-09-03 | 2019-11-29 | 深迪半导体(上海)有限公司 | The method of gyroscope and process corrections gyroscope quadrature error |
| US20200412325A1 (en) * | 2019-06-27 | 2020-12-31 | Aac Acoustic Technologies (Shenzhen) Co., Ltd. | Differential resonator and mems sensor |
| CN112284368A (en) * | 2020-09-21 | 2021-01-29 | 北京航天控制仪器研究所 | Fully-differential high-precision X-axis silicon micro-gyroscope |
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