CN101759136A - Fully-decoupled vibrating micromechanical gyroscope - Google Patents
Fully-decoupled vibrating micromechanical gyroscope Download PDFInfo
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- CN101759136A CN101759136A CN200910243960A CN200910243960A CN101759136A CN 101759136 A CN101759136 A CN 101759136A CN 200910243960 A CN200910243960 A CN 200910243960A CN 200910243960 A CN200910243960 A CN 200910243960A CN 101759136 A CN101759136 A CN 101759136A
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Abstract
The invention relates to a fully-decoupled vibrating micromechanical gyroscope, which belongs to the technical field of inertial sensors in micro-electromechanical systems. Elastic supporting beams of a driving mass block are fixed on a substrate through upright posts; the driving mass block has a pane shape of which four corners are connected with the upright posts through the elastic beams; a detection mass block is arranged in the driving mass block and is connected with the driving mass block through the elastic supporting beams; fixed electrodes of driving capacitors are fixed on the substrate, while movable electrodes are fixed relative to the driving mass block and are opposite to the fixed electrodes of the driving mass block; and the fixed electrodes of detection capacitors are fixed on the substrate of the micromechanical gyroscope, while the movable electrodes are fixed on an insulating layer on the lower surface of the detection mass block and are conducted with the detection mass block through conductive posts. The micromechanical gyroscope of the invention completely eliminates the inference of vibration in a driving direction on the detection capacitors in terms of structural design, so the sensitivity of the micromechanical gyroscope is improved; and process difficulty and production cost are not increased and the micromechanical gyroscope is easy to produce in batches.
Description
Technical field
The present invention relates to a kind of fully-decoupled vibrating micromechanical gyroscope, belong to the inertial sensor technical field in the MEMS (MEMS).
Background technology
The coriolis force that gyro mainly utilizes Coriolis effect to produce is measured the angular movement parameter in moving object relative inertness space, can be widely used in measurement and control to object moving state in the product for civilian use and defence product field.Traditional gyro is subjected to the restriction of factors such as volume, weight, power consumption and cost, is difficult to apply at civil area.With integrated circuit (IC) technology and precision optical machinery processing technology serves as that micromechanical gyro that the basis makes has that volume is little, in light weight, cost is low, the high outstanding advantage of reliability, thereby can be used for civil applications field widely such as motion state of automobile control system, camera stabilization system, movable machinery control, robot observing and controlling, geodesic survey, medical apparatus.
The vibrating micromechanical gyro basic structure of acquisition extensive use at present as shown in Figure 1.The driving mass 3 of whole micromechanical gyro, drive electric capacity movable electrode 5, drive spring beam 1, detect mass 8, detect spring beam 2, detect electric capacity movable electrode 6 and all be formed on the same silicon chip, be fixed on the anchor point 9 on the glass substrate by driving spring beam 1.Driving the fixed electrode 4 of electric capacity and the fixed electrode 7 of detection electric capacity also is fixed on the glass substrate.The x direction is the transverse drive shaft of micromechanical gyro, and the y direction is vertical sensitive axes.On the fixed electrode 4 that drives electric capacity, apply periodically variable voltage, can make micromechanical gyro drive mass 3 and on driving direction, produce periodically variable static driving force, make to drive mass 3 and detect the vibration that mass 8 produces the x direction.Fail man-hour when the z direction has sensitive angular, because the effect of coriolis force detects mass 8 and produces vibration along the y direction, the size of amplitude and static driving force and z deflection velocity magnitude are linear.Along with the vibration that detects mass 8, detecting the movable electrode of electric capacity and the spacing between the fixed electrode changes immediately, output differential capacitor amount is changed, can realize the detection of Oscillation Amplitude size can obtaining the z axis angular rate by post processing electric circuit by the variation that detects the differential capacitor amount.
Above-mentioned vibrating micromechanical gyro exists the mechanical couplings problem between serious driving mode and the detection mode when working, restricting the further raising of micromechanical gyro performance.Micromechanical gyro shown in Figure 1 is when being subjected to x direction electrostatic force, driving mass 3 drive detection masses 8 vibrates along the x direction of principal axis simultaneously, the relative area that detects electric capacity movable electrode and fixed electrode is changed, the differential capacitor amount that causes detecting electric capacity also changes thereupon, thereby bring serious disturbance for the detection of y direction vibration signal, reduce the performance of vibrating micromechanical gyro, be difficult for realizing high-precision angular velocity measurement.
Summary of the invention
The objective of the invention is mechanical couplings (vibration of driving direction can cause the detection changes in capacitance) problem in order to overcome existing vibrating micromechanical gyro, a kind of electric capacity and irrelevant vibrating micromechanical gyro of driving direction vibration of detecting is provided, can eliminate the mechanical couplings problem that drives between mode and the detection mode, the parasitic disturbances that effective vibration that suppresses driving direction brings to detection signal, the performance of raising vibrating micromechanical gyro.
The fully-decoupled vibrating micromechanical gyroscope that the present invention proposes comprises driving mass, driving mass elastic supporting beams, detection mass, detection mass elastic supporting beams, drives electric capacity movable electrode, driving capacitor fixing electrode, detection electric capacity movable electrode, detection capacitor fixing electrode, column and substrate; Described driving mass elastic supporting beams is fixed on the substrate of micromechanical gyro by column; Described driving mass is a square frame shape, and four jiaos of the driving mass are passed through to drive the mass elastic supporting beams and link to each other with column; Described detection mass places the driving mass of square frame shape, and links to each other with the driving mass by detecting the mass elastic supporting beams; Described driving capacitor fixing electrode is fixed on the substrate of micromechanical gyro, described driving electric capacity movable electrode and driving mass relative fixed, and it is relative with driving capacitor fixing electrode position to drive the electric capacity movable electrode; Described detection capacitor fixing electrode is fixed on the substrate of micromechanical gyro, and is positioned at the below of detecting mass; The lower surface of described detection mass is provided with insulating barrier, and detect the electric capacity movable electrode and be fixed on the insulating barrier, and by conductive pole and the conducting of detection mass; It is relative with detection capacitor fixing electrode position to detect the electric capacity movable electrode.
The fully-decoupled vibrating micromechanical gyroscope that the present invention proposes, its advantage is:
1, just there is the mechanical couplings problem in existing vibrating micromechanical gyro on structural design, the differential capacitor amount that the driving oscillating movement can cause detecting electric capacity also changes thereupon, thereby producing serious detection disturbs, reduce the performance of vibrating micromechanical gyro, be difficult for realizing high-precision angular velocity measurement.It is only relevant in the motion of x axle (detection) direction with the detection mass that micromechanical gyro of the present invention detects electric capacity, and it is irrelevant with the detection mass in the motion of y axle (driving) direction, therefore the vibration of having eliminated driving direction on structural design fully is to detecting the interference of electric capacity, the sensitivity that can improve micromechanical gyro.
2, the processing technology with traditional micromechanical gyro is identical, does not increase technology difficulty and processing cost, is easy to produce in batches.
Description of drawings
Fig. 1 is existing conventional vibrating micromechanical gyro planar structure schematic diagram.
Fig. 2 is the planar structure schematic diagram of fully-decoupled vibrating micromechanical gyroscope of the present invention.
Fig. 3 is the A-A cutaway view of Fig. 2.
Among Fig. 1-Fig. 3, the 1st, drive the mass elastic supporting beams, the 2nd, detect the mass elastic supporting beams, the 3rd, drive mass, the 4th, drive the capacitor fixing electrode, the 5th, drive the electric capacity movable electrode, the 6th, detect the electric capacity movable electrode, the 7th, detect the capacitor fixing electrode, the 8th, detect mass, the 9th, anchor point, the 10th, column, the 11st, substrate, the 12nd, insulating barrier, the 13rd, conductive pole.
The specific embodiment
The fully-decoupled vibrating micromechanical gyroscope that the present invention proposes, its structure comprises driving mass 3, driving mass elastic supporting beams 1, detection mass 8, detects mass elastic supporting beams 2, driving electric capacity movable electrode 5, driving capacitor fixing electrode 4, detection electric capacity movable electrode 6, detection capacitor fixing electrode 7, column 10 and substrate 11 as shown in Figures 2 and 3.Driving mass elastic supporting beams 1 is fixed on the substrate 11 of micromechanical gyro by column 10.Driving mass 3 is square frame shape, and four jiaos of driving mass 3 are passed through to drive mass elastic supporting beams 1 and link to each other with column 11.Detect the driving mass 3 that mass 8 places square frame shape, and link to each other with driving mass 3 by detecting mass elastic supporting beams 2.Driving capacitor fixing electrode 4 is fixed on the substrate 11 of micromechanical gyro, drives electric capacity movable electrode 5 and drives mass 3 relative fixed, and it is relative with driving capacitor fixing electrode 4 positions to drive electric capacity movable electrode 5.Detect capacitor fixing electrode 7 and be fixed on the substrate 11 of micromechanical gyro, and be positioned at the below of detecting mass 8.The lower surface that detects mass 8 is provided with insulating barrier 12, and detection electric capacity movable electrode 6 is fixed on the insulating barrier 12, and by conductive pole 13 and 8 conductings of detection mass, it is relative with detection capacitor fixing electrode 7 positions to detect electric capacity movable electrode 6.
In the fully-decoupled vibrating micromechanical gyroscope of the present invention, substrate 11 is made of glass substrate, except that driving electric capacity and detecting the fixed electrode of electric capacity, the all etched processing of remainder is on same silicon chip, driving mass elastic supporting beams 1 is fixed on the substrate by column 10, make the silicon chip plane unsettled parallel with respect to substrate plane, the fixed electrode that drives electric capacity also is fixed on respectively on the substrate with the fixed electrode that detects electric capacity, detects electric capacity movable electrode 6 and detect capacitor fixing electrode 7 structurally to form differential detection electric capacity.
In the fully-decoupled vibrating micromechanical gyroscope of the present invention, the body silicon process technology of all employing routines such as column 10 of driving mass 3, driving mass elastic supporting beams 1, detection mass 8, detection mass elastic supporting beams 2, driving electric capacity movable electrode 5, fixed drive mass elastic supporting beams, by technologies such as mask, photoetching and etchings, remove unwanted part on the silicon chip, obtain complete micro-structural at last.
In one embodiment of the present of invention, detect electric capacity movable electrode 6 and be formed on the bottom surface of detecting mass 8 by the integrated circuit processing technology.At first adopt oxidation technology to prepare insulating barrier in the bottom surface of detecting mass 8, silicon chip and oxidant are at high temperature reacted, grow the layer of silicon dioxide film at silicon chip surface, promptly insulating barrier 12.Sputter covers chromium, gold, platinum layer on silicon dioxide film, adopts photoetching process to form and detects electric capacity movable electrode 6.Sputter covers chromium, gold, platinum layer on glass substrate, adopts stripping technology to form and detects capacitor fixing electrode 7.It is bonding to use bonding technology will drive the column 10 and the substrate 11 of mass elastic supporting beams, the fixed electrode 7 that drives capacitor fixing electrode 4 and detection electric capacity also by bonding technology respectively line be bonded on the substrate 11.
The operation principle of fully-decoupled vibrating micromechanical gyroscope of the present invention is:
Drive mass 3 under the constraint that drives mass elastic supporting beams 1, can only carry out the motion of y direction, detect mass 8 under the constraint that detects mass elastic supporting beams 2, can only carry out the motion of x direction.Drive mass 3 when the y direction vibration of the static driving force effect lower edge of driving capacitor fixing electrode 4 and driving electric capacity movable electrode 5, drive detection mass 8 and do identical motion.The y that detects mass 8 can not cause that to vibration the capacitance that detects electric capacity changes.
When the angular speed input is arranged at the z direction of principal axis, detect mass 8 and be subjected to axial coriolis force effect along x, force and detect mass 8 along the side-to-side vibrations of x direction of principal axis.By detecting the differential capacitor quantitative changeization of movable electrode 6 and fixed electrode 7, can realize the detection of z axis angular rate.
When structural design, the elastic supporting beams 1 that drives mass 3 is very low along the axial equivalent stiffness of y, and the axial equivalent stiffness of x is very big, drives mass 3 and can only do the axial motion of y under the effect that drives electric capacity; The elastic supporting beams 2 that detects mass 8 is very low along the axial equivalent stiffness of x, the axial equivalent stiffness of y is very big, detect mass 8 and under the drive that drives mass 3, can do the y axially-movable identical, also can drive mass 3 relatively and do the axial motion of x with driving mass 3.
When driving mass 3 when the y direction of principal axis vibrate, drive detection mass 8 and vibrate simultaneously along the y axle.When the angular speed input is arranged at the z direction of principal axis, detect mass 8 and be subjected to axial coriolis force effect along x, force and detect mass 8 along the side-to-side vibrations of x direction of principal axis, its amplitude is directly proportional with the input angular velocity size.
Detection capacitor fixing electrode 7 of the present invention along y to length bigger, when detecting mass 8 along the y shaft vibration, movable electrode 6 below the detection mass 8 does not change with the relative area of fixed electrode 7, that is to say, it is irrelevant with the y direction vibration that detects quality to detect electric capacity, and the vibration of therefore having eliminated driving direction on structural design fully is to detecting the interference of electric capacity.Detecting mass 8 is subjected to the coriolis force effect when the x direction of principal axis vibrates, movable electrode 6 below the detection mass 8 changes with the relative area of fixed electrode 7, by detecting the differential capacitor quantitative changeization of movable electrode 6 and fixed electrode 7, can realize the detection of z axis angular rate.
Claims (1)
1. fully-decoupled vibrating micromechanical gyroscope, it is characterized in that this micromechanical gyro comprises driving mass, driving mass elastic supporting beams, detection mass, detects mass elastic supporting beams, driving electric capacity movable electrode, driving capacitor fixing electrode, detection electric capacity movable electrode, detection capacitor fixing electrode, column and substrate; Described driving mass elastic supporting beams is fixed on the substrate of micromechanical gyro by column; Described driving mass is a square frame shape, and four jiaos of the driving mass are passed through to drive the mass elastic supporting beams and link to each other with column; Described detection mass places the driving mass of square frame shape, and links to each other with the driving mass by detecting the mass elastic supporting beams; Described driving capacitor fixing electrode is fixed on the substrate of micromechanical gyro, described driving electric capacity movable electrode and driving mass relative fixed, and it is relative with driving capacitor fixing electrode position to drive the electric capacity movable electrode; Described detection capacitor fixing electrode is fixed on the substrate of micromechanical gyro, and is positioned at the below of detecting mass; The lower surface of described detection mass is provided with insulating barrier, and detect the electric capacity movable electrode and be fixed on the insulating barrier, and by conductive pole and the conducting of detection mass; It is relative with detection capacitor fixing electrode position to detect the electric capacity movable electrode.
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Cited By (7)
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| CN103363980A (en) * | 2012-04-03 | 2013-10-23 | 精工爱普生株式会社 | Gyro sensor and electronic device employing the same |
| CN103557853A (en) * | 2013-10-24 | 2014-02-05 | 华东光电集成器件研究所 | High-overload-resistant micro electro mechanical system (MEMS) gyroscope |
| CN104459200A (en) * | 2013-09-18 | 2015-03-25 | 上海矽睿科技有限公司 | Three-axis accelerometer |
| CN107356240A (en) * | 2017-07-21 | 2017-11-17 | 安徽北方芯动联科微系统技术有限公司 | MEMS gyroscope with driving frequency adjustment structure |
| CN108204807A (en) * | 2016-12-19 | 2018-06-26 | 美国亚德诺半导体公司 | For the bending connector of MEMS (MEMS) device |
| CN108592900A (en) * | 2018-04-27 | 2018-09-28 | 东南大学 | A kind of four vertical bar shape mass block silicon micromechanical gyroscopes |
| CN109682364A (en) * | 2018-12-13 | 2019-04-26 | 中国科学院半导体研究所 | Piezoelectric mems decoupling-structure and MEMS gyroscope |
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| US7814794B2 (en) * | 2007-09-07 | 2010-10-19 | Pixart Imaging Inc. | Micromachined sensors |
| CN101319899B (en) * | 2008-07-24 | 2010-11-10 | 北京大学 | Capacitor type horizontal shaft micro-mechanical tuning fork gyroscope |
| CN201352121Y (en) * | 2008-12-12 | 2009-11-25 | 紫光股份有限公司 | Vibratory micromachined gyroscope |
| CN101441081B (en) * | 2008-12-12 | 2011-05-04 | 紫光股份有限公司 | Vibration type micro-mechanical gyroscope |
| CN201561758U (en) * | 2009-12-25 | 2010-08-25 | 紫光股份有限公司 | Full decoupling vibration type micromechanical gyroscope for measuring angular speed |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103363980A (en) * | 2012-04-03 | 2013-10-23 | 精工爱普生株式会社 | Gyro sensor and electronic device employing the same |
| CN103363980B (en) * | 2012-04-03 | 2017-05-31 | 精工爱普生株式会社 | Gyrosensor and the electronic equipment of the gyrosensor is used |
| CN104459200A (en) * | 2013-09-18 | 2015-03-25 | 上海矽睿科技有限公司 | Three-axis accelerometer |
| CN104459200B (en) * | 2013-09-18 | 2018-03-06 | 上海矽睿科技有限公司 | Three axis accelerometer |
| CN103557853A (en) * | 2013-10-24 | 2014-02-05 | 华东光电集成器件研究所 | High-overload-resistant micro electro mechanical system (MEMS) gyroscope |
| CN103557853B (en) * | 2013-10-24 | 2017-03-01 | 华东光电集成器件研究所 | A kind of MEMS gyro of anti high overload |
| CN108204807A (en) * | 2016-12-19 | 2018-06-26 | 美国亚德诺半导体公司 | For the bending connector of MEMS (MEMS) device |
| CN107356240A (en) * | 2017-07-21 | 2017-11-17 | 安徽北方芯动联科微系统技术有限公司 | MEMS gyroscope with driving frequency adjustment structure |
| CN107356240B (en) * | 2017-07-21 | 2023-04-07 | 安徽芯动联科微系统股份有限公司 | MEMS gyroscope with driving frequency adjusting structure |
| CN108592900A (en) * | 2018-04-27 | 2018-09-28 | 东南大学 | A kind of four vertical bar shape mass block silicon micromechanical gyroscopes |
| CN108592900B (en) * | 2018-04-27 | 2021-05-18 | 东南大学 | Silicon micromechanical gyroscope with four vertical column-shaped mass blocks |
| CN109682364A (en) * | 2018-12-13 | 2019-04-26 | 中国科学院半导体研究所 | Piezoelectric mems decoupling-structure and MEMS gyroscope |
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