CN116124110A - In-plane torsion type four-mass MEMS gyroscope - Google Patents
In-plane torsion type four-mass MEMS gyroscope Download PDFInfo
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- CN116124110A CN116124110A CN202310157440.7A CN202310157440A CN116124110A CN 116124110 A CN116124110 A CN 116124110A CN 202310157440 A CN202310157440 A CN 202310157440A CN 116124110 A CN116124110 A CN 116124110A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
Abstract
The invention discloses an in-plane torsion pendulum type four-mass MEMS gyroscope, which comprises: the device layer structure comprises a driving double-end supporting beam, a driving frame, a Goldrake mass block, a driving coupling supporting beam, a driving coupling folding beam, a detecting double-end supporting beam, a detecting frame, a detecting truss, a detecting coupling beam and a detecting frame pivot; the device layer structure further comprises a push-pull driving force system, a driving end differential detection output signal system, a differential detection output signal system and a detection output closed-loop control signal system. According to the invention, through the in-plane four-mass-block torsion type full-differential framework, full-differential quasi-three-dimensional motion of the whole structure of the MEMS gyroscope is formed, the total moment of inertia of motion in any in-plane proportional superposition direction at any moment is always zero, the full-directional vibration isolation decoupling of the MEMS gyroscope to the surrounding environment is realized, and the effects of typical interferences such as temperature, environmental impact, vibration and the like on the accuracy of the gyroscope are comprehensively and effectively restrained.
Description
Technical Field
The invention relates to the field of gyroscopes, in particular to an in-plane torsion pendulum type four-mass MEMS gyroscope.
Background
The MEMS gyroscope is an instrument device for precisely testing angular velocity or angle signals through a vibration phenomenon, and the improvement of the accuracy of the gyroscope instrument mainly depends on whether a harmonic oscillator structure can separate an external interference quantity from the vibration characteristic of a resonance sensitive structure as far as possible.
In the prior art, structures capable of achieving such vibration separation are divided into two types:
a butterfly wing type double-torsion pendulum mode is an out-of-plane angle vibration working mode, but the processing technology is difficult, and the technology is not mature, so that stable mass production and manufacturing cannot be realized, and the butterfly wing type double-torsion pendulum mode becomes a pain point for product application.
Another way is to use a four-mass architecture, which is an in-plane linear vibration mode of operation, and MEMS fabrication processes for such structures are now mature and mass production can be achieved.
However, the current linear vibration structure of the four mass blocks in the plane has larger volume, the linear vibration distance spans the side length of the chip, the vibration reliability performance is poor, and the linear vibration structure is not suitable for the application of a plurality of industrial occasions.
Disclosure of Invention
Aiming at the defects existing in the prior art, the invention aims to provide an in-plane torsion type four-mass MEMS gyroscope which has the effect of high reliability.
The technical aim of the invention is realized by the following technical scheme: an in-plane torsion pendulum four-mass MEMS gyroscope comprising:
a substrate layer;
the device layer structure is fixed on the substrate layer through corresponding anchor points;
the device layer structure comprises:
the device comprises a driving double-end supporting beam, a driving frame, a Goldwire mass block, a driving coupling supporting beam, a driving coupling folding beam, a detecting double-end supporting beam, a detecting frame, a detecting truss, a detecting coupling beam and a detecting frame pivot;
one end of the driving double-end clamped beam is connected with an anchor point and fixed on the substrate layer, the other end of the driving double-end clamped beam is connected with the driving frame, one end of the detecting double-end clamped beam is connected with the driving frame, the other end of the detecting double-end clamped beam is connected with the God's mass block, one end of the driving coupling clamped beam is connected with the God's mass block, the other end of the driving coupling clamped beam is connected with the detecting truss, and the other end of the detecting truss is connected with the detecting frame;
the two ends of the detection coupling beam are respectively connected with the left and right detection frames and used for enabling the detection frames to be in modal separation, one end of a detection frame fulcrum is connected with the detection frames, the other end of the detection frame fulcrum is connected with an anchor point structure, and the two ends of the driving coupling folding beam are respectively connected with the left and right driving frames so as to ensure that the two connected driving frames move in the same direction during operation;
the driving frame and the Gong's mass block together form a driving loop mass, the structure is symmetrical about a Y axis, the detecting frame and the Gong's mass block together form a detecting loop mass, the structure is symmetrical about an X axis, and meanwhile, the whole MEMS gyroscope structure is designed in a full decoupling way;
the device layer structure further includes:
the system comprises a push-pull driving force system, a driving end differential detection output signal system, a differential detection output signal system and a detection output closed-loop control signal system;
the push-pull driving force system provides push-pull driving force for the MEMS gyroscope, the driving end differential detection output signal system provides differential detection output signals for the driving end of the MEMS gyroscope, the differential detection output signal system provides differential detection output signals for the MEMS gyroscope, and the detection output closed-loop control signal system provides detection output closed-loop control signals for the MEMS gyroscope.
The present invention may be further configured in a preferred example to: the push-pull driving force system comprises a driving positive electrode comb tooth pair and a driving negative electrode comb tooth pair, wherein the driving positive electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, the driving negative electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, the driving positive electrode comb tooth pair and the driving negative electrode comb tooth pair respectively form a group of differential capacitance electrodes with electrodes correspondingly connected, and the differential capacitance electrodes are symmetrically distributed on the left side and the right side respectively and are symmetrical about a Y axis.
The present invention may be further configured in a preferred example to: the driving positive electrode comb teeth are provided with N pairs which are designed for variable area comb teeth, and the driving negative electrode comb teeth are provided with N pairs which are designed for variable area comb teeth.
The present invention may be further configured in a preferred example to: the driving end differential detection output signal system comprises a driving detection positive electrode comb tooth pair and a driving detection negative electrode comb tooth pair, wherein the driving detection positive electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, the driving detection negative electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, and the driving detection positive electrode comb tooth pair and the driving detection negative electrode comb tooth pair respectively form a group of differential capacitance electrodes with electrodes which are correspondingly connected, are respectively symmetrically distributed on the left side and the right side and are symmetrical about a Y axis.
The present invention may be further configured in a preferred example to: the driving detection positive electrode comb teeth are provided with N pairs, and are designed for variable area comb teeth, and the driving detection negative electrode comb teeth are provided with N pairs, and are designed for variable area comb teeth.
The present invention may be further configured in a preferred example to: the differential detection output signal system comprises a detection positive electrode comb tooth pair and a detection negative electrode comb tooth pair, wherein the detection positive electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, the detection negative electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, and the detection positive electrode comb tooth pair and the detection negative electrode comb tooth pair respectively form a group of differential capacitance electrodes with electrodes which are correspondingly connected, are respectively symmetrically distributed on the left side and the right side and are symmetrical about an X axis.
The present invention may be further configured in a preferred example to: the detection positive electrode comb teeth are provided with N pairs which are designed for the variable-gap comb teeth, and the detection negative electrode comb teeth are provided with N pairs which are designed for the variable-gap comb teeth.
The present invention may be further configured in a preferred example to: the detection output closed-loop control signal system comprises a detection feedback positive electrode comb tooth pair and a detection feedback negative electrode comb tooth pair, wherein the detection feedback positive electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, the detection feedback negative electrode comb tooth pair is fixed on the substrate layer through a corresponding anchor point, and the detection feedback positive electrode comb tooth pair and the detection feedback negative electrode comb tooth pair respectively form a group of differential capacitance electrodes with electrodes which are correspondingly connected, are respectively symmetrically distributed on the left side and the right side and are symmetrical about an X axis.
The present invention may be further configured in a preferred example to: the detection feedback positive electrode comb teeth are provided with N pairs which are designed for the variable-gap comb teeth, and the detection feedback negative electrode comb teeth are provided with N pairs which are designed for the variable-gap comb teeth.
The present invention may be further configured in a preferred example to: the substrate layer and the device layer structure are both made of silicon.
In summary, the invention has the following beneficial effects:
1. through the torsion type full-differential framework of the four mass blocks in the plane, the full-differential quasi-three-dimensional motion of the whole structure of the MEMS gyroscope is formed, the total motion inertia of the in-plane random proportion superposition direction at any moment is always zero, the full-directional vibration isolation decoupling of the MEMS gyroscope to the surrounding environment is realized, and the influence of typical interferences such as temperature, environmental impact, vibration and the like on the accuracy of the gyroscope is comprehensively and effectively restrained;
2. the problems of difficult processing technology and low yield of the current external angle vibration gyro structure are solved, the high performance characteristic of the vibration gyro with the specific shoulder angle is obtained, meanwhile, the problems of large structure volume, poor vibration reliability and the like of the internal line vibration gyro are avoided, and the performance of the gyro is further improved;
3. each working module adopts a differential capacitor design, so that most common-mode interference noise is eliminated, the signal to noise ratio of the device is improved to a great extent, and the linearity of the device is better through a closed-loop control working mode.
Drawings
FIG. 1 is a schematic structural view of an embodiment;
FIG. 2 is a schematic view of a drive frame structure of an embodiment;
FIG. 3 is a schematic diagram of a detection frame structure of an embodiment;
fig. 4 is a schematic diagram of the working principle of the detection frame of the embodiment.
Reference numerals: 1. a substrate layer; 2. an anchor point; 3. driving the double-end clamped beam; 4. a driving frame; 5. driving the coupling clamped beam; 6. detecting a double-end clamped beam; 7. an anchor point; 8. driving the negative electrode comb teeth pair; 9. an anchor point; 10. driving the positive electrode comb teeth pair; 11. an anchor point; 12. driving and detecting the positive electrode comb tooth pair; 13. an anchor point; 14. driving and detecting a negative electrode comb tooth pair; 15. a coriolis mass; 16. a detection frame; 17. detecting a coupling beam; 18. detecting a frame pivot; 19. detecting a truss; 20. driving the coupling folding beam; 21. an anchor point; 22. detecting a negative electrode comb tooth pair; 23. an anchor point; 24. detecting a feedback negative electrode comb tooth pair; 25. an anchor point; 26. detecting a positive electrode comb tooth pair; 27. an anchor point; 28. and detecting and feeding back the positive electrode comb teeth.
Detailed Description
The invention is described in further detail below with reference to fig. 1-4.
As shown in fig. 1, fig. 2, fig. 3 and fig. 4, an in-plane torsion type four-mass MEMS gyroscope comprises a substrate layer 1 and a device layer structure, wherein the device layer structure is fixed on the substrate layer 1 through corresponding anchor points, and the substrate layer 1 and the device layer structure are both made of silicon.
As shown in fig. 1, 2, 3 and 4, the device layer structure includes a driving double-end supporting beam 3, a driving frame 4, a coriolis mass 15, a driving coupling supporting beam 5, a driving coupling folding beam 20, a detecting double-end supporting beam 6, a detecting frame 16, a detecting truss 19, a detecting coupling beam 17 and a detecting frame supporting point 18.
As shown in fig. 1, 2, 3 and 4, the driving coupling clamped beam 5 coincides with the X axis, the driving coupling folded beam 20 coincides with the Y axis, one end of the driving double-end clamped beam 3 is connected with the anchor point 2 and fixed on the substrate layer 1, the other end is connected with the driving frame 4, one end of the detecting double-end clamped beam 6 is connected with the driving frame 4, the other end is connected with the coriolis mass 15, one end of the driving coupling clamped beam 5 is connected with the coriolis mass 15, the other end is connected with the detecting truss 19, and the other end of the detecting truss 19 is connected with the detecting frame 16.
As shown in fig. 1, 2, 3 and 4, the driving frame 4 and the coriolis mass 15 together form a driving loop mass and are symmetrical about a Y-axis, the detecting frame 16 and the coriolis mass 15 together form a detecting loop mass and are symmetrical about an X-axis, and the whole MEMS gyroscope structure is designed for full decoupling.
As shown in fig. 1, 2, 3 and 4, two ends of the detection coupling beam 17 are respectively connected with the left and right detection frames 16, so as to separate the detection frames 16 in a modal manner, one end of the detection frame pivot 18 is connected with the detection frames 16, the other end is connected with an anchor structure, and two ends of the driving coupling folding beam 20 are respectively connected with the left and right driving frames 4, so as to ensure that the two connected driving frames 4 move in the same direction during operation.
As shown in fig. 1, 2, 3 and 4, the device layer structure further includes a push-pull driving force system, a driving end differential detection output signal system, a differential detection output signal system and a detection output closed-loop control signal system.
As shown in fig. 1, 2, 3 and 4, the push-pull driving force system includes a driving positive electrode comb pair 10 and a driving negative electrode comb pair 8, the driving positive electrode comb pair 10 is fixed on the substrate layer 1 through a corresponding anchor point 9, and the driving negative electrode comb pair 8 is fixed on the substrate layer 1 through a corresponding anchor point 7.
As shown in fig. 1, 2, 3 and 4, the driving positive electrode comb teeth pair 10 has N pairs, which are designed as variable area comb teeth, and the driving negative electrode comb teeth pair 8 has N pairs, which are designed as variable area comb teeth.
As shown in fig. 1, 2, 3 and 4, the driving positive electrode comb teeth pair 10 and the driving negative electrode comb teeth pair 8 are respectively connected with the corresponding electrodes to form a group of differential capacitance electrodes, and are respectively and symmetrically distributed on the left side and the right side, and are symmetrical about the Y axis to provide push-pull driving force for the MEMS gyroscope.
As shown in fig. 1, 2, 3 and 4, the driving end differential detection output signal system includes a driving detection positive electrode comb tooth pair 12 and a driving detection negative electrode comb tooth pair 14, where the driving detection positive electrode comb tooth pair 12 is fixed on the substrate layer 1 through a corresponding anchor point 11, and the driving detection negative electrode comb tooth pair 14 is fixed on the substrate layer 1 through a corresponding anchor point 13.
As shown in fig. 1, 2, 3 and 4, the driving detection positive electrode comb teeth pair 12 has N pairs, which are designed as variable area comb teeth, and the driving detection negative electrode comb teeth pair 14 has N pairs, which are designed as variable area comb teeth.
As shown in fig. 1, 2, 3 and 4, the driving detection positive electrode comb pair 12 and the driving detection negative electrode comb pair 14 respectively form a group of differential capacitive electrodes with electrodes correspondingly connected, and are respectively and symmetrically distributed on the left side and the right side, and are symmetrical about a Y axis, so as to provide differential detection output signals for the driving end of the MEMS gyroscope.
As shown in fig. 1, 2, 3 and 4, the differential detection output signal system includes a detection positive electrode comb pair 26 and a detection negative electrode comb pair 22, where the detection positive electrode comb pair 26 is fixed on the substrate layer 1 through a corresponding anchor point 25, and the detection negative electrode comb pair 22 is fixed on the substrate layer 1 through a corresponding anchor point 21.
As shown in fig. 1, 2, 3 and 4, the pair of detecting positive electrode teeth 26 has N pairs, which are designed for variable-gap teeth, and the pair of detecting negative electrode teeth 22 has N pairs, which are designed for variable-gap teeth.
As shown in fig. 1, 2, 3 and 4, the detecting positive electrode comb teeth pair 26 and the detecting negative electrode comb teeth pair 22 respectively form a group of differential capacitance electrodes with the electrodes correspondingly connected, and are respectively and symmetrically distributed on the left side and the right side, and are symmetrical about the X axis, so as to provide differential detection output signals for the MEMS gyroscope.
As shown in fig. 1, 2, 3 and 4, the detection output closed-loop control signal system includes a detection feedback positive electrode comb pair 28 and a detection feedback negative electrode comb pair 24, where the detection feedback positive electrode comb pair 28 is fixed on the substrate layer 1 through a corresponding anchor point 27, and the detection feedback negative electrode comb pair 24 is fixed on the substrate layer 1 through a corresponding anchor point 23.
As shown in fig. 1, 2, 3 and 4, the pair of detection feedback positive electrode comb teeth 28 has N pairs, which are designed for variable-gap comb teeth, and the pair of detection feedback negative electrode comb teeth 24 has N pairs, which are designed for variable-gap comb teeth.
As shown in fig. 1, 2, 3 and 4, the pair of detection feedback positive electrode comb teeth 28 and the pair of detection feedback negative electrode comb teeth 24 respectively form a group of differential capacitance electrodes with electrodes correspondingly connected, and are respectively and symmetrically distributed on the left side and the right side, and are symmetrical about an X axis, so as to provide a detection output closed-loop control signal for the MEMS gyroscope.
The invention relates to an in-plane torsion pendulum type working principle of an MEMS gyroscope, which comprises the following steps:
when the MEMS gyroscope works normally, the driving structure is kept to be constantly oscillating under the action of driving force through the gyroscope driving loop, when external angular velocity acts, the Ge-type mass block 15 generates a Golgi force under the effect, so that the detection comb tooth structure of the MEMS gyroscope detection loop is subjected to micro-displacement, further the detection comb tooth of the detection loop is caused to generate capacitance change, corresponding capacitance detection is carried out through an external interface circuit, closed-loop regulation and control of the comb tooth are fed back through the detection loop, and finally angular velocity measurement is realized.
Through the innovative design of the detection truss 19 in the detection loop, the combination of the detection frame pivot 18 and the detection coupling beam 17, the detection frame 16 generates butterfly wing type movement under the action of the Golgi force, and further the detection positive electrode comb tooth pairs 26 and the detection negative electrode comb tooth pairs 22 distributed on the detection frame 16 are driven to generate in-plane torsion, so that the full-differential detection mode of the four-mass block-plane internal angle vibration is successfully realized.
Through the four-mass-block torsion type full-differential framework in the plane, full-differential quasi-three-dimensional motion of the whole structure of the MEMS gyroscope is formed, the total moment of inertia of motion of any proportion superposition direction in the plane at any moment is always zero, the full-directional vibration isolation decoupling of the MEMS gyroscope to the surrounding environment is realized, and the influence of typical interferences such as temperature, environmental impact, vibration and the like on the accuracy of the gyroscope is comprehensively and effectively restrained.
In addition, the problems of difficult processing technology and low yield of the traditional external angle vibration gyro structure are successfully solved, the high performance characteristic of the vibration gyro with the specific shoulder angle is obtained, meanwhile, the problems of large structure volume, poor vibration reliability and the like of the internal line vibration gyro are also avoided, and the performance of the gyro is further improved.
Each working module adopts a differential capacitor design, so that most common-mode interference noise is eliminated, the signal to noise ratio of the device is improved to a great extent, and the linearity of the device is better through a closed-loop control working mode.
The present invention is not limited by the specific embodiments, and modifications can be made to the embodiments without creative contribution by those skilled in the art after reading the present specification, but are protected by patent laws within the scope of claims of the present invention.
Claims (10)
1. An in-plane torsion type four-mass MEMS gyroscope is characterized in that: comprising the following steps:
a substrate layer (1);
the device layer structure is fixed on the substrate layer (1) through corresponding anchor points;
the device layer structure comprises:
the device comprises a driving double-end supporting beam (3), a driving frame (4), a Goldwire mass block (15), a driving coupling clamped beam (5), a driving coupling folded beam (20), a detecting double-end supporting beam (6), a detecting frame (16), a detecting truss (19), a detecting coupling beam (17) and a detecting frame pivot (18);
one end of the driving double-end supporting beam (3) is connected with the anchor point (2) and fixed on the substrate layer (1), the other end of the driving double-end supporting beam is connected with the driving frame (4), one end of the detecting double-end supporting beam (6) is connected with the driving frame (4), the other end of the detecting double-end supporting beam is connected with the God's mass block (15), one end of the driving coupling supporting beam (5) is connected with the God's mass block (15), the other end of the driving coupling supporting beam is connected with the detecting truss (19), and the other end of the detecting truss (19) is connected with the detecting frame (16);
the two ends of the detection coupling beam (17) are respectively connected with the left and right detection frames (16) for modal separation of the detection frames (16), one end of the detection frame fulcrum (18) is connected with the detection frames (16), the other end of the detection frame fulcrum is connected with an anchor point structure, and the two ends of the driving coupling folding beam (20) are respectively connected with the left and right driving frames (4) so as to ensure that the two connected driving frames (4) move in the same direction during operation;
the driving frame (4) and the Golgi mass block (15) together form a driving loop mass, the structure is symmetrical about a Y axis, the detecting frame (16) and the Golgi mass block (15) together form a detecting loop mass, the structure is symmetrical about an X axis, and meanwhile, the whole MEMS gyroscope structure is of a full decoupling design;
the device layer structure further includes:
the system comprises a push-pull driving force system, a driving end differential detection output signal system, a differential detection output signal system and a detection output closed-loop control signal system;
the push-pull driving force system provides push-pull driving force for the MEMS gyroscope, the driving end differential detection output signal system provides differential detection output signals for the driving end of the MEMS gyroscope, the differential detection output signal system provides differential detection output signals for the MEMS gyroscope, and the detection output closed-loop control signal system provides detection output closed-loop control signals for the MEMS gyroscope.
2. An in-plane torsion pendulum type four-mass MEMS gyroscope according to claim 1, wherein: the push-pull driving force system comprises a driving positive electrode comb tooth pair (10) and a driving negative electrode comb tooth pair (8), wherein the driving positive electrode comb tooth pair (10) is fixed on the substrate layer (1) through a corresponding anchor point (9), the driving negative electrode comb tooth pair (8) is fixed on the substrate layer (1) through a corresponding anchor point (7), and the driving positive electrode comb tooth pair (10) and the driving negative electrode comb tooth pair (8) respectively form a group of differential capacitance electrodes with electrodes which are correspondingly connected, are respectively symmetrically distributed on the left side and the right side and are symmetrical about a Y axis.
3. An in-plane torsion pendulum type four-mass MEMS gyroscope according to claim 2, wherein: the driving positive electrode comb teeth pair (10) is provided with N pairs, and is designed for variable area comb teeth, and the driving negative electrode comb teeth pair (8) is provided with N pairs, and is designed for variable area comb teeth.
4. An in-plane torsion pendulum type four-mass MEMS gyroscope according to claim 1, wherein: the driving end differential detection output signal system comprises a driving detection positive electrode comb tooth pair (12) and a driving detection negative electrode comb tooth pair (14), wherein the driving detection positive electrode comb tooth pair (12) is fixed on the substrate layer (1) through a corresponding anchor point (11), the driving detection negative electrode comb tooth pair (14) is fixed on the substrate layer (1) through a corresponding anchor point (13), and the driving detection positive electrode comb tooth pair (12) and the driving detection negative electrode comb tooth pair (14) respectively form a group of differential capacitance electrodes with electrodes which are correspondingly connected, are respectively symmetrically distributed on the left side and the right side and are symmetrical about a Y axis.
5. An in-plane torsion pendulum type four-mass MEMS gyroscope according to claim 4, wherein: the driving detection positive electrode comb teeth pair (12) is provided with N pairs, and is designed for variable area comb teeth, and the driving detection negative electrode comb teeth pair (14) is provided with N pairs, and is designed for variable area comb teeth.
6. An in-plane torsion pendulum type four-mass MEMS gyroscope according to claim 1, wherein: the differential detection output signal system comprises a detection positive electrode comb tooth pair (26) and a detection negative electrode comb tooth pair (22), wherein the detection positive electrode comb tooth pair (26) is fixed on the substrate layer (1) through a corresponding anchor point (25), the detection negative electrode comb tooth pair (22) is fixed on the substrate layer (1) through a corresponding anchor point (21), and the detection positive electrode comb tooth pair (26) and the detection negative electrode comb tooth pair (22) respectively form a group of differential capacitance electrodes with electrodes which are correspondingly connected, are respectively symmetrically distributed on the left side and the right side and are symmetrical about an X axis.
7. An in-plane torsion pendulum type four-mass MEMS gyroscope according to claim 6, wherein: the detection positive electrode comb teeth pair (26) is provided with N pairs, and is designed for variable-gap comb teeth, and the detection negative electrode comb teeth pair (22) is provided with N pairs, and is designed for variable-gap comb teeth.
8. An in-plane torsion pendulum type four-mass MEMS gyroscope according to claim 1, wherein: the detection output closed-loop control signal system comprises a detection feedback positive electrode comb tooth pair (28) and a detection feedback negative electrode comb tooth pair (24), wherein the detection feedback positive electrode comb tooth pair (28) is fixed on the substrate layer (1) through a corresponding anchor point (27), the detection feedback negative electrode comb tooth pair (24) is fixed on the substrate layer (1) through a corresponding anchor point (23), and the detection feedback positive electrode comb tooth pair (28) and the detection feedback negative electrode comb tooth pair (24) respectively form a group of differential capacitance electrodes with electrodes which are correspondingly connected, are respectively symmetrically distributed on the left side and the right side and are symmetrical about an X axis.
9. An in-plane torsion pendulum type four-mass MEMS gyroscope according to claim 8, wherein: the detection feedback positive electrode comb teeth pair (28) is provided with N pairs, and is designed for variable-gap comb teeth, and the detection feedback negative electrode comb teeth pair (24) is provided with N pairs, and is designed for variable-gap comb teeth.
10. An in-plane torsion pendulum type four-mass MEMS gyroscope according to claim 1, wherein: the substrate layer (1) and the device layer structure are made of silicon.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116907463A (en) * | 2023-09-08 | 2023-10-20 | 华芯拓远(天津)科技有限公司 | High-precision full-decoupling triaxial MEMS gyroscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN116907463A (en) * | 2023-09-08 | 2023-10-20 | 华芯拓远(天津)科技有限公司 | High-precision full-decoupling triaxial MEMS gyroscope |
| CN116907463B (en) * | 2023-09-08 | 2023-12-15 | 华芯拓远(天津)科技有限公司 | High-precision full-decoupling triaxial MEMS gyroscope |
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