CN102221361B - Capacitive micro machinery gyroscope - Google Patents
Capacitive micro machinery gyroscope Download PDFInfo
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- CN102221361B CN102221361B CN 201110133079 CN201110133079A CN102221361B CN 102221361 B CN102221361 B CN 102221361B CN 201110133079 CN201110133079 CN 201110133079 CN 201110133079 A CN201110133079 A CN 201110133079A CN 102221361 B CN102221361 B CN 102221361B
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Abstract
The invention discloses a capacitive micro machinery gyroscope, belonging to the technical field of a micro electrical mechanical system. A gyroscope mass block 15 is connected with the center of a lever 12; two pivot points are symmetrically distributed between the center and two end points of the lever 12, and the distance h0 from the pivot points to the center of the lever is less than the distance h1 from the pivot point to the end points of the lever; simultaneously two end points of the lever 12 are respectively and sequentially connected with a sensitive transmission beam 8 in Y direction and two sensitive bent beams 9 in X direction; the other end of each sensitive bent beam 9 of two is respectively connected with two end points of a non-deformed beam 16; a moving comb tooth and a static comb tooth fixed on the non-deformed beam 16 form a sensitive detection comb tooth pair 10 to complete the capacitance detection at the sensitive direction. According to the invention, the displacement detection and the lever amplification technology in the traditional micro machinery gyroscope are combined, the displacement amplification effect of the mass block at the Y direction by the lever is h1/h0, thus the variation of the detection capacitance is increased, and the flexibility of the micro machinery gyroscope is improved.
Description
One, affiliated field
The present invention relates to a kind of capacitive micro mechinery gyroscope, belong to micro-electromechanical system field.
Two, background technology
Micromechanical gyro has wide practical use in military fields such as inertial navigation, attitude references with characteristics such as its volume are little, low in energy consumption, cost is low.Micromechanical gyro can be divided into condenser type gyro, resonant mode gyro, pressure resistance type gyro, piezoelectric type gyro, optical gyroscope etc. by detection mode.The tradition micromechanical gyro all is based on the Coriolis force measurements is obtained the input angular velocity amount.
The capacitance detecting mode has simple in structure, the precision advantages of higher is widely used in various micro mechanical sensors, a lot of micromechanical gyros all be by measurement and driving direction and turning rate input direction all the caused capacitance change of displacement of vertical sensitive direction obtain coriolis force.But general micromechanical gyro is very little at the capacitance change of sensitive direction, and the size that this has reduced detection signal has limited the raising of micromechanical gyro sensitivity.
Application number has proposed " a kind of resonant-type micro-mechanical optic fiber gyroscope " for the patent of " 200610012216.5 ", and it comprises the interdigital driver of pectination, plate mass, lever amplifying mechanism and double-ended tuning fork resonator.When the interdigital driver of pectination adds driving voltage, plate mass is done the vibratory movement along X-direction, and externally under the turning effort of Z axis, produce coriolis force along Y-direction, by being delivered to behind the lever amplification on two symmetrical double-ended tuning fork resonators, make its harmonic moving be subject to periodic modulation, the differential output of two double-ended tuning fork resonators of measurement can be realized the measurement to the input angle frequency.This patent is to amplify by the coriolis force of lever with sensitive direction, thereby amplifies the resonance frequency variable quantity of resonator.But the coriolis force that micromechanical gyro produces is minimum, and is also minimum by the resonance frequency variable quantity of its resonator that causes, is difficult to the sensitivity that reaches higher in actual applications.The capacitive micro mechinery gyroscope that the present invention proposes adopts lever that the sensitive direction displacement variable that coriolis force causes is amplified, thereby the variable quantity of increasing detection capacitance improves sensitivity.
Three, summary of the invention
The present invention proposes a kind of capacitive micro mechinery gyroscope, the lever amplification technology of carrying in displacement detecting in traditional micromechanical gyro and the background technology is combined, utilize leverage that the displacement variable of sensitive direction is amplified, thereby the variable quantity of increasing detection capacitance, the sensitivity that improves micromechanical gyro.
As shown in Figure 1, the technical solution adopted in the present invention is: a kind of capacitive micro mechinery gyroscope comprises mass 15; Definition mass 15 centers are initial point, and the direction parallel with mass one side is X-direction, and the direction parallel with another side is Y-direction, and capacitive micro mechinery gyroscope is on directions X, and is symmetrical about Y-axis, symmetrical about X-axis on Y direction;
Described mass 15 is connected with driver framework beam 5 by the folded beam II 13 that is connected in its Y-direction side, and driver framework beam 5 is connected on the anchor point by folded beam I 7; The moving broach of part driving that is fixed on the driver framework beam 5 consists of driving comb to 4 with the quiet broach of driving that is fixed on the drive electrode 3, so that driver framework beam 5 drives the to-and-fro movement of masses 15 generation X-directions; Being fixed on the driver framework beam 5 other drives moving broach and is fixed on the driving that drives detecting electrode 1 and detects quiet broach and consist of and drive detection comb and detect to finish to drive 2;
On the X-direction side, mass 15 is connected by the center of folded beam I 7 with the lever 12 that is parallel to mass X-direction side; Between the center of lever 12 and two end points, symmetry is furnished with two fulcrums, and less than the distance of fulcrum from the lever end points, the balance pivot beam 14 of two Y-directions is connected described two fulcrums respectively fulcrum with anchor point from the distance at lever center; Simultaneously, two end points of lever 12 connect respectively the responsive bent beam 9 of responsive transfer beams 8 and the X-direction of Y-direction successively, the other end of two responsive bent beams 9 then is connected with two end points without variable shaped beam 16 respectively, and the width of responsive bent beam 9 is less than the width without variable shaped beam 16; Be fixed on without the moving broach of the sensitivity on the variable shaped beam 16 and the quiet broach that is fixed on the responsive detecting electrode 11 and consist of responsive detection comb to 10, to finish the capacitance detecting of sensitive direction.Wherein, balance pivot is h0 apart from centre distance, and lever is h1 apart from the distance of end points.
A kind of capacitive micro mechinery gyroscope principle of work that the present invention proposes: when when drive electrode 3 adds the periodic voltage signal, driving comb to 4 electrostatic forcing under, mass 15 is along periodically to-and-fro movement of directions X.If gyro is when having the angular velocity omega input around Z-direction, can produce coriolis force in Y direction, make mass 15 produce displacement d0 along Y direction, this displacement produces acting force by the center of 13 pairs of levers 12 of folded beam II, under the effect of lever 12, the displacement d1 that the two ends generation of lever 12 is larger (d1＞d0), this displacement is delivered to without on the variable shaped beam 16 by responsive transfer beams 8 and 9 effects of responsive bent beam, make without variable shaped beam and produce displacement d1 in Y-direction, thereby obtain larger capacitance change at responsive detection comb to 10, obtain the information of input angular velocity ω.Wherein, in the ideal case, lever is h1/h0, i.e. d1/d0=h1/h0 to mass at the displacement amplification of Y-direction.
Therefore, the capacitive micro mechinery gyroscope that the present invention proposes can amplify mass in the displacement of Y-direction, increase the responsive capacitance change that detects, thus the sensitivity that increases capacitive micro mechinery gyroscope.
Four, description of drawings
The structural representation of the capacitive micro mechinery gyroscope that Fig. 1 the present invention proposes
Among the figure: 1-drives detecting electrode, and 2-drives detection comb pair, 3-drive electrode, 4-driving comb pair, 5-driver framework beam, 6-anchor point, 7-folded beam I, the responsive transfer beams of 8-, the responsive bent beam of 9-, the responsive detection comb of 10-pair, the responsive detecting electrode of 11-, 12-lever, 13-folded beam II, 14-balance pivot beam, the 15-mass, 16-is without variable shaped beam.
Five, embodiment
The specific embodiment of the present invention: as shown in Figure 1, the technical solution adopted in the present invention is: a kind of capacitive micro mechinery gyroscope comprises mass 15; Definition mass 15 centers are initial point, and the direction parallel with mass one side is X-direction, and the direction parallel with another side is Y-direction, and capacitive micro mechinery gyroscope is on directions X, and is symmetrical about Y-axis, symmetrical about X-axis on Y direction;
Described mass 15 is connected with driver framework beam 5 by the folded beam II 13 that is connected in its Y-direction side, and driver framework beam 5 is connected on the anchor point by folded beam I 7; The moving broach of part driving that is fixed on the driver framework beam 5 consists of driving comb to 4 with the quiet broach of driving that is fixed on the drive electrode 3, so that driver framework beam 5 drives the to-and-fro movement of masses 15 generation X-directions; Being fixed on the driver framework beam 5 other drives moving broach and is fixed on the driving that drives detecting electrode 1 and detects quiet broach and consist of and drive detection comb and detect to finish to drive 2.
On the X-direction side, mass 15 is connected by the center of folded beam I 7 with the lever 12 that is parallel to mass X-direction side; Between the center of lever 12 and two end points, symmetry is furnished with two fulcrums, and less than the distance of fulcrum from the lever end points, the balance pivot beam 14 of two Y-directions is connected described two fulcrums respectively fulcrum with anchor point from the distance at lever center; Simultaneously, two end points of lever 12 connect respectively the responsive bent beam 9 of responsive transfer beams 8 and the X-direction of Y-direction successively, the other end of two responsive bent beams 9 then is connected with two end points without variable shaped beam 16 respectively, and the width of responsive bent beam 9 is less than the width without variable shaped beam 16; Be fixed on without the moving broach of the sensitivity on the variable shaped beam 16 and the quiet broach that is fixed on responsive detecting electrode 11 and consist of responsive detection comb to 10, to finish the capacitance detecting of sensitive direction.
In this embodiment, the width of lever 12 is 10 microns, and balance pivot is 50 microns from the distance h 0 at lever center, and fulcrum is 450 microns from the distance h 1 of lever end points, the width of balance pivot beam 14 is 2 microns, length is 20 microns, and the length of responsive transfer beams 8 is 50 microns, and width is 10 microns, the length and width of responsive bent beam 9 are 20 microns, width is 2 microns, is 30 microns without the width of variable shaped beam 16, and length is 960 microns; The single beam length that forms folded beam I 7 is 100 microns, and width is 2 microns; The thickness of all structures is 30 microns.
Capacitive micro mechinery gyroscope principle of work among this embodiment: when when drive electrode 3 adds the periodic voltage signal, driving comb to 4 electrostatic forcing under, mass 15 is along periodically to-and-fro movement of directions X.If gyro is when having the angular velocity omega input around Z-direction, can produce coriolis force in Y direction, make mass 15 produce displacement d0 along Y direction, this displacement produces acting force by the center of 13 pairs of levers 12 of folded beam II, under the effect of lever 12, the displacement d1 that the two ends generation of lever 12 is larger (d1＞d0), this displacement is delivered to without on the variable shaped beam 16 by responsive transfer beams 8 and 9 effects of responsive bent beam, make without variable shaped beam 16 and produce displacement d1 in Y-direction, thereby obtain larger capacitance change at responsive detection comb to 10, obtain the information of input angular velocity ω.Lever should be h1/h0 to the enlargement factor d1/d0 of displacement in theory, and namely enlargement factor is 9.For example, when the displacement d0 that produces along Y direction when mass 15 is 1 micron, it is 9 microns without the theoretical displacement d1 of variable shaped beam 16.Owing to have slippages in the structure, it is 4 microns without the actual displacement of variable shaped beam 16.Leverage has amplified 4 times to the actual displacement of mass, thereby the variable quantity of Detection capacitance has been amplified 4 times.
Claims (1)
1. a capacitive micro mechinery gyroscope comprises mass (15); Definition mass (15) center is initial point, and the direction parallel with mass (15) one side is X-direction, and the direction parallel with another side is Y-direction, and capacitive micro mechinery gyroscope is on directions X, and is symmetrical about Y-axis, symmetrical about X-axis on Y direction; It is characterized in that: described mass (15) is connected with driver framework beam (5) by the folded beam II (13) that is connected in its Y-direction side, and driver framework beam (5) is connected on the anchor point by folded beam I (7); The moving broach of part driving that is fixed on the driver framework beam (5) consists of driving comb to (4) with the quiet broach of driving that is fixed on the drive electrode (3), so that driver framework beam (5) drives the to-and-fro movement of mass (15) generation X-direction; Being fixed on the driver framework beam (5) other drives moving broach and is fixed on the driving that drives detecting electrode (1) and detects quiet broach and consist of and drive detection comb (2) are detected to finish to drive; On the X-direction side, mass (15) is connected with the center of the lever that is parallel to mass X-direction side (12) by folded beam I (7); Between the center of lever (12) and two end points, symmetry is furnished with two fulcrums, and less than the distance of fulcrum from the lever end points, the balance pivot beam (14) of two Y-directions is connected described two fulcrums respectively fulcrum with anchor point from the distance at lever center; Simultaneously, two end points of lever (12) connect respectively the responsive bent beam (9) of responsive transfer beams (8) and the X-direction of Y-direction successively, the other end of two responsive bent beams (9) then is connected with two end points without variable shaped beam (16) respectively, and the width of responsive bent beam (9) is less than the width without variable shaped beam (16); Be fixed on without the moving broach of the sensitivity on the variable shaped beam (16) and the quiet broach that is fixed on the responsive detecting electrode (11) and consist of responsive detection comb to (10), to finish the capacitance detecting of sensitive direction;
Described capacitive micro mechinery gyroscope principle of work: when when drive electrode 3 adds the periodic voltage signal, driving comb to 4 electrostatic forcing under, mass 15 is along periodically to-and-fro movement of directions X; If gyro is when having the angular velocity omega input around Z-direction, can produce coriolis force in Y direction, make mass 15 produce displacement d0 along Y direction, this displacement is by the center generation acting force of folded beam II13 to lever 12, under the effect of lever 12, the displacement d1 that the two ends generation of lever 12 is larger (d1＞d0), this displacement is delivered to without on the variable shaped beam 16 by responsive transfer beams 8 and 9 effects of responsive bent beam, make without variable shaped beam and produce displacement d1 in Y-direction, thereby obtain larger capacitance change at responsive detection comb to 10, obtain the information of input angular velocity ω; Wherein, in the ideal case, lever is h1/h0, i.e. d1/d0=h1/h0 to mass at the displacement amplification of Y-direction.
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| CN 201110133079 CN102221361B (en) | 2011-05-20 | 2011-05-20 | Capacitive micro machinery gyroscope |
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| CN 201110133079 CN102221361B (en) | 2011-05-20 | 2011-05-20 | Capacitive micro machinery gyroscope |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103528577B (en) * | 2013-10-12 | 2016-06-01 | 深迪半导体(上海)有限公司 | A kind of Z axle MEMS capacitive gyroscope |
| CN105698781B (en) * | 2014-11-26 | 2019-01-04 | 安徽康力节能电器科技有限公司 | Radial support bulk acoustic wave silicon micro-gyroscope |
| EP3217146B1 (en) | 2014-11-27 | 2019-09-25 | Goertek Inc. | Tri-axial micro-electro-mechanical gyroscope |
| CN105737810B (en) * | 2014-12-10 | 2018-09-14 | 安徽康力节能电器科技有限公司 | Highly sensitive plate-like bulk acoustic wave silicon micro-gyroscope |
| CN110307833B (en) * | 2019-06-27 | 2020-12-01 | 深迪半导体(上海)有限公司 | High-precision Z-axis gyroscope |
| CN110307832B (en) * | 2019-06-28 | 2021-04-09 | 北京理工大学 | Tuning fork type micromechanical gyroscope based on lever effect displacement amplification |
| CN110926445B (en) | 2019-12-06 | 2022-03-08 | 深迪半导体(绍兴)有限公司 | Three-axis MEMS gyroscope |
| CN112113553B (en) * | 2020-09-15 | 2022-06-21 | 浙江大学 | Gyro full-matching tuning electrode |
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| CN1749693A (en) * | 2005-10-24 | 2006-03-22 | 西北工业大学 | Capacitive micro mechinery gyroscope |
| CN101746708A (en) * | 2009-12-25 | 2010-06-23 | 紫光股份有限公司 | Complete coupling capacitance type micromachined gyroscope |
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|---|---|---|---|---|
| CN1749693A (en) * | 2005-10-24 | 2006-03-22 | 西北工业大学 | Capacitive micro mechinery gyroscope |
| CN101746708A (en) * | 2009-12-25 | 2010-06-23 | 紫光股份有限公司 | Complete coupling capacitance type micromachined gyroscope |
Non-Patent Citations (2)
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| 常洪龙，苑伟政.《音叉电容式微机械陀螺的误差源分析与消除》.《西北工业大学学报》.2004,第22卷(第6期),第679-683页. * |
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