CN110307833B - High-precision Z-axis gyroscope - Google Patents

High-precision Z-axis gyroscope Download PDF

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Publication number
CN110307833B
CN110307833B CN201910565812.3A CN201910565812A CN110307833B CN 110307833 B CN110307833 B CN 110307833B CN 201910565812 A CN201910565812 A CN 201910565812A CN 110307833 B CN110307833 B CN 110307833B
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mass
elastic
rigid
coriolis
mass block
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CN110307833A (en
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邹波
刘爽
郑青龙
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Shendi semiconductor (Shaoxing) Co.,Ltd.
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Senodia Technologies Shanghai Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Abstract

The invention provides a high-precision Z-axis gyroscope, which comprises a driving mass block, a coupling structure and a Coriolis force mass block, wherein a first direction, a second direction and a third direction which are perpendicular to each other are defined; the driving mass is arranged to be movable in the first direction; the driving mass block and the Coriolis mass block are connected through an elastic structure, so that the Coriolis mass block can be driven by the driving mass block to move along the first direction and can move along the second direction under the action of Coriolis force along the second direction; the Coriolis force mass blocks are symmetrically connected to two sides of the coupling structure, so that the Coriolis force mass blocks on the two sides move in opposite directions and equal in amplitude when moving along the first direction; the coupling structure comprises a plurality of elastic members extending in the first direction and/or the second direction.

Description

High-precision Z-axis gyroscope
Technical Field
The invention relates to the field of MEMS, in particular to a high-precision Z-axis gyroscope.
Background
Micro-gyroscopes manufactured based on Micro-Electro-Mechanical-systems (MEMS) have been increasingly used in very wide fields such as consumer electronics, industry, medical treatment, military and the like due to their advantages such as small size, low cost, good integration, and excellent performance, and are now in standard configurations to some extent in applications of products such as various mobile terminals, cameras, game pads, and navigators. With the trend of portable and portable consumer electronic products, the demand of the market for gyroscope chips is increasingly urgent. The Z-axis single-axis gyroscope is widely applied in a plane, for example, in the aspects of floor sweeping machines, intelligent robots, industrial automation and the like, the Z-axis single-axis gyroscope is high in required precision and small in zero deviation, and is suitable for high-precision application without calibration for a long time.
The MEMS gyroscope facing the market is mainly a capacitance resonance type gyroscope and structurally comprises a driving mass block, a Coriolis force (Coriolis force) mass block and a detection mass block; the circuit comprises a driving capacitor and a detection capacitor. The driving capacitor enables the driving mass block to vibrate in the driving direction and drives the Coriolis force mass block to simultaneously vibrate, when angular velocity input perpendicular to the movement direction of the Coriolis force mass block exists, due to the action of Coriolis force, the Coriolis force mass block can generate force perpendicular to a plane formed by the movement direction and the angular velocity direction, so that the Coriolis force mass block is driven to move in the detection direction, the Coriolis force mass block simultaneously drives the detection mass block to move, and the size of the angular velocity input can be calculated through the change of the detection capacitor between the detection mass block and the electrode.
In the prior art, the inclined spring beams are generally coupled, so that process deviation is easy to generate, and the motion of the Coriolis mass block is not completely symmetrical; the driving mass block is fixed through the spring beam by the fixed anchor point, the gravity center of the mass block is asymmetric in the plane direction, and due to the gravity of the driving mass block, in-plane or out-of-plane disturbance is easily generated in the driving mode under the condition of process deviation or external stress change, so that the driving motion direction has deviation; the detection mass block is easy to generate out-of-plane displacement under the action of gravity of the mass block, so that the deviation of a gyroscope zero point and sensitivity is generated, and the detection mass block is easily influenced by process deviation and external factors.
Disclosure of Invention
In view of the problems in the prior art, the present invention provides a MEMS gyroscope comprising a driving mass, a coupling structure, a coriolis mass, and defining a first direction, a second direction, and a third direction that are perpendicular to each other; the driving mass is arranged to be movable in the first direction; the driving mass block and the Coriolis mass block are connected through an elastic structure, so that the Coriolis mass block can be driven by the driving mass block to move along the first direction and can move along the second direction under the action of Coriolis force along the second direction; the Coriolis force mass blocks are symmetrically connected to two sides of the coupling structure, so that the Coriolis force mass blocks on the two sides move in opposite directions and equal in amplitude when moving along the first direction; the coupling structure comprises a plurality of elastic members extending in the first direction and/or the second direction.
Further, the driving mass is connected to at least four anchor points through a structure having elasticity, so that it can be maintained parallel to a plane defined by the first direction and the second direction.
Further, the coupling structure comprises two groups of connecting parts symmetrically arranged along the second direction, and two first elastic parts symmetrically arranged along the first direction; the two groups of connecting parts are respectively connected with the Coriolis force mass blocks arranged on two sides of the coupling structure; and two ends of each connecting part are respectively connected to corresponding fixed anchor points through the two first elastic parts.
Further, the first elastic piece comprises a first sub-elastic piece and a second sub-elastic piece, the first sub-elastic piece is connected with the corresponding fixing anchor point, and the connecting component is connected with the first sub-elastic piece through the corresponding second sub-elastic piece; the second sub-elastic member is adapted to move in the first direction and the first sub-elastic member is adapted to move in the second direction.
Further, the connecting component comprises a first rigid part and two second rigid parts symmetrically arranged along the first direction, and the first rigid part is connected with the Coriolis force mass block on the corresponding side of the first rigid part; one end of each second rigid part is connected with the corresponding first rigid part through an elastic part, and the other end of each second rigid part is connected with the corresponding second sub-elastic part, so that the first rigid part and the second rigid part are suitable for moving along the first direction.
Further, the coupling structure and the coriolis force mass are connected through a second elastic element, and the second elastic element enables the coriolis force mass to drive the coupling structure along the first direction when moving along the first direction, and has decoupling effect when the coriolis force mass moves along the second direction.
Further, the MEMS gyroscope further includes a proof mass, the proof mass is connected to the coriolis force mass through a third elastic element, and the third elastic element enables the coriolis force mass to drive the proof mass to move when moving in the second direction, and has a decoupling effect when the coriolis force mass moves in the first direction.
Furthermore, a first fixed anchor point and a second fixed anchor point are arranged on two sides of the detection mass block, and the detection mass block is respectively connected with the first fixed anchor point and the second fixed anchor point through an elastic structure.
Furthermore, the MEMS gyroscope further includes a third rigid member and a fourth rigid member, the third rigid member and the fourth rigid member are respectively disposed on two sides of the proof mass, the third rigid member is respectively connected to the first fixed anchor point and the proof mass through an elastic member, and the fourth rigid member is respectively connected to the second fixed anchor point and the proof mass through an elastic member.
Furthermore, the third rigid part is connected with the first fixed anchor point through an elastic part along the second direction, and is respectively connected with the detection mass block and the first fixed anchor point through the elastic part along the first direction; the fourth rigid part is connected with the second fixed anchor point through an elastic part along the second direction, and is respectively connected with the detection mass block and the second fixed anchor point through the elastic part along the first direction.
Compared with the prior art, the high-precision Z-axis gyroscope has the following technical effects:
1. changing coupling beam structure
The coupling beam is formed by a spring and a rigid beam which are perpendicular in an XY plane instead of an oblique spring, and in the MEMS process, the oblique spring can generate large process deviation due to the limitation of a processing mode, so that the asymmetry of the coupling beam is caused. The vertical beam and the rigid structure are beneficial to saving area and reducing deviation caused by the process.
2. Reducing out-of-plane displacement of the drive mass due to its own weight
The driving mass block in the prior art is supported by a unilateral anchor point, and can generate the inclination towards the outside of the surface of the unsupported side under the action of gravity; the driving mass block is supported by the polygonal anchor points, so that a motion plane is fixed, the balance in the plane of the driving mass block is ensured, and the stability of the motion mode of the driving mass block is ensured.
3. Stability of motion model of proof mass block is ensured
The detection mass block in the prior art is supported by a single-sided spring in the plane, and can incline out of the plane to the side without support under the action of self gravity, and can generate out-of-plane movement in the detection process, so that the stability of detection is poor. The detection mass blocks are fixed on two sides, so that the detection mass blocks are fixed in the plane to move; the coupling rigid beam structure is added on two sides with opposite movement directions, so that the two differential parts of the detection mass block are ensured to have equal movement sizes and opposite movement directions, the stability of a detection system is ensured, and possible interference caused by other factors is reduced.
The conception, the specific structure and the technical effects of the present invention will be further described with reference to the accompanying drawings to fully understand the objects, the features and the effects of the present invention.
Drawings
FIG. 1 is a schematic diagram of a prior art MEMS gyroscope;
FIG. 2 is a schematic diagram of the MEMS gyroscope of FIG. 1 in an actuated state;
FIG. 3 is a schematic diagram of the MEMS gyroscope of FIG. 1 when there is an input of angular velocity about the Z-axis;
FIG. 4 is a schematic structural diagram of a preferred embodiment of the present invention;
FIG. 5 is a schematic diagram of the MEMS gyroscope of FIG. 4 in an actuated state;
FIG. 6 is a schematic diagram of the MEMS gyroscope of FIG. 4 when there is an input of angular velocity about the Z-axis;
fig. 7 is a force diagram of the coupling beam structure of fig. 1.
Detailed Description
In the description of the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the invention. The drawings are schematic diagrams or conceptual diagrams, and the relationship between the thickness and the width of each part, the proportional relationship between the parts and the like are not completely consistent with actual values.
Fig. 1 to 3 show a conventional Z-axis gyroscope, which includes fixed anchor points a1 to a18, spring beams S1 to S28, rigid beams F10, rigid beams F20, masses M1 to M10, and electrodes E1 to E12. The anchor points A1-A18 are connected to a substrate (not shown) and fixed to the substrate. The masses M1-M10 are connected to the fixed anchors A1-A6 through spring beams S1-S24, constitute the movable part of the gyroscope, and the potential connected with the movable part is defined as PM.
In particular, the mass M1 is connected to the fixed anchors a1, a2 by means of the spring beams S1, S2, respectively, and to the mass M3 by means of the spring beams S7, S8; the mass M2 is respectively connected with the fixed anchor points A3 and A4 through the spring beams S3 and S4, and is connected with the mass M4 through the spring beams S9 and S10; the mass M3 is connected with the masses M5, M6 through spring beams S11, S12, respectively, and with the mass M9 through spring beams S15, S16; the mass M4 is connected with the masses M7, M8 through spring beams S13, S14, respectively, and with the mass M10 through spring beams S17, S18; the mass M9 is connected to the spring beams S19, S20 by spring beams S21, S22, respectively; the mass M10 is connected to the spring beams S19, S20 by spring beams S23, S24, respectively; spring beams S19, S20 are connected to rigid beams F10, F20, respectively; the rigid beam F10 is respectively connected with a fixed anchor point A5, a mass block M5 and a mass block M7 through spring beams S5, S25 and S27; the rigid beam F20 is respectively connected with the fixed anchor points A6 and the masses M6 and M8 through spring beams S6, S26 and S28. The spring beams S5, S6, S21-S28 have strip-shaped structures, wherein the spring beams S21-S24 are obliquely arranged in an XY plane (not parallel to an X axis and a Y axis), and the spring beams S1-S4, S7-20 have or comprise U-shaped structures.
The masses M1, M2 constitute driving masses, the massesM3, M4, M9 and M10 form a Coriolis mass, and masses M5 to M8 form a detection mass. The fixed anchor points A7-A18 are fixed on the substrate, electrodes E1-E12 are respectively arranged on the fixed anchor points A7-A18, a comb tooth structure matched with the electrodes E1 and E2 is arranged on the mass block M1, a comb tooth structure matched with the electrodes E3 and E4 is arranged on the mass block M2, a comb tooth structure matched with the electrodes E5 and E6 is arranged on the mass block M5, a comb tooth structure matched with the electrodes E7 and E8 is arranged on the mass block M6, a comb tooth structure matched with the electrodes E9 and E10 is arranged on the mass block M7, a comb tooth structure matched with the electrodes E11 and E12 is arranged on the mass block M8, so that the electrodes E1-E12 and the PM form 12 groups of capacitors, wherein the electrodes E1-E4 are driving electrodes, the electrodes E1, E4 and the PM form driving capacitors CDR+The electrodes E2, E3 and PM form a driving capacitor CDR-(ii) a Electrodes E5-E12 are detection electrodes, and electrodes E5, E7, E10, E12 and PM form detection capacitor CSS+The electrodes E6, E8, E9, E11 and PM form a detection capacitor CSS-。
The operation principle of the Z-axis gyroscope can be divided into two parts, namely driving and Z-axis angular velocity detection, which are described below.
As shown in fig. 2, in the driving capacitor CDR+、CDR-When alternating voltages in opposite directions are applied to the two ends of the capacitor, alternating electrostatic forces are generated at the two ends of the capacitor respectively, so that the mass blocks M1 and M2 are driven to reciprocate in the Y direction, the mass block M1 drives the mass block M3 to reciprocate in the Y direction through the spring beams S7 and S8, the mass block M2 drives the mass block M4 to reciprocate in the Y direction through the spring beams S9 and S10, the mass block M3 drives the mass block M9 to reciprocate in the Y direction through the spring beams S15 and S16, and the mass block M4 drives the mass block M10 to reciprocate in the Y direction through the spring beams S17 and S18. The spring beams S21-S24 are coupling springs, and when the masses M9 and M10 respectively move upward and downward, the coupling structure formed by the spring beams S19-S24 and the rigid beams F1 and F2 can ensure that the coriolis mass M9 and M10 move in opposite directions and equal magnitudes (amplitudes), as shown in fig. 7, so as to ensure that the driving directions of the driving mass and the coriolis mass are along the Y direction.
Due to the decoupling effect of the spring beams S11-S14 and S25-S28, when the driving mass block and the Coriolis mass block move along the Y axis, displacement caused by movement of the driving mass block and the Coriolis mass block cannot be transmitted to the detection mass block, so that the stability of the detection mass block is improved, and quadrature errors caused by driving are reduced.
As shown in fig. 3, when an angular velocity is input about the Z axis, the coriolis mass M3, M4, M9, M10 receives a coriolis force in the X direction because it moves in the Y direction. Since the motion directions of the masses M3 and M9 and the masses M4 and M10 in the Y direction are opposite, the directions of the coriolis forces in the X direction, which are generated by the Z-axis angular velocity output, are also opposite, so that the masses M3 and M9 and the masses M4 and M10 reciprocate in the X direction in opposite directions.
Due to the decoupling effect of the spring beams S7-S10, when the Coriolis mass moves along the X direction, the displacement generated by the movement of the Coriolis mass is not transmitted to the driving mass.
When the Coriolis mass M3 generates X-direction motion under the condition of Z-axis angular velocity input, the detection masses M5 and M6 can be driven to move through the spring beams S11 and S12 respectively; similarly, when the coriolis mass M4 generates the X-direction motion under the condition of Z-axis angular velocity input, the proof masses M7 and M8 are respectively driven to move by the spring beams S13 and S14. Due to the fact that the moving directions of the masses M3 and M4 are opposite and the sizes (amplitudes) of the masses M3 and M4 are equal, under the action of the spring beams S5, S19, S25 and S27 and the rigid beam F10, the masses M5 and M7 move around the intersection point of the spring beam S5 and the rigid beam F10, and under the action of the spring beams S6, S20, S26 and S28 and the rigid beam F20, the masses M6 and M8 move around the intersection point of the spring beam S6 and the rigid beam F20.
Under the motion state, the distances between the comb structures on the detection masses M5-M8 and the electrodes E5-E8 are changed, so that the detection capacitor CSS+、CSS-Correspondingly, the change in the same magnitude and opposite direction will occur, for example, when the capacitance C is detectedSS+When the capacitance value of (C) is increased, the capacitance C is detectedSS-The capacitance value of (d) is decreased, and the detection capacitance Δ C calculated by a differential method is Δ CSS+-ΔCSS-And the magnitude of the input angular velocity is calculated accordingly.
The above-described Z-axis gyroscope has the following disadvantages:
1. in the prior art, the inclined spring beams S21-S24 are coupled, so that process deviation is easy to generate, and the motion of the Coriolis mass block is not completely symmetrical.
2. The driving mass block is fixed through the spring beams S1-S4 by only using A1-A4 anchor points, the gravity center of the mass block is asymmetric in the Y direction, and due to the self gravity, under the condition of process deviation or external stress change, the driving mode is easy to generate in-plane or out-of-plane disturbance, so that the driving motion direction has deviation.
3. The detection mass blocks M5-M8 are connected and fixed with other mass blocks only through S11-S14 and S25-S28, and can generate out-of-plane displacement under the action of gravity of the mass blocks, so that the deviation of a gyroscope zero point and sensitivity is generated, and the detection mode of the detection mass blocks is that a single end rotates around a fulcrum, and is easily influenced by process deviation and external factors.
As shown in fig. 4 to 6, the Z-axis gyroscope of this embodiment includes fixed anchors a1.1 to a1.4, a2.1 to a2.4, a3.1, a3.2, a4.1, a4.2, a5.1 to a5.4, a6.1 to a6.8, spring beams S1.1 to S1.4, S2.1 to S2.8, S3.1 to S3.4, S4.1 to S4.4, S5.1 to S5.4, S6.1, S6.2, S7.1 to S7.8, S8.1 to S8.8, S9.1 to S9.4, rigid beams F1 to F4, F5.1 to F5.4, F6.1, F6.2, mass M1 to M8, electrodes E1 to E1.4, E1.2.1 to E2, and the remaining anchors A1 to E2.4, which are referred to the same as fixed anchors A1 to A2, and the remaining anchors A1 to A1 are referred to A1. Each anchor point is connected to a substrate (not shown) and is fixed to the substrate. The masses M1-M18 are connected to the fixed anchor point groups A1-A4 through the spring beam groups S1-S9, constitute the movable part of the gyroscope, and the potential connected with the movable part is defined as PM. The overall layout of the Z-axis gyroscope in this embodiment is axisymmetric in both the X direction and the Y direction, for example, the masses M1 and M2, the masses M3 and M4, the masses M5 and M7, and the masses M6 and M8 are symmetric along the X axis, the masses M5 and M6, and the masses M7 and M8 are symmetric along the Y axis, and any assembly has a component or part symmetric to it along the X axis or the Y axis (for example, the X axis or the Y axis passes through the assembly, i.e., the assembly is divided equally).
Specifically, the mass M1 is respectively connected with the fixed anchor points A1.1-A1.4 through the spring beams S2.1-S2.4 and connected with the mass M3 through the spring beams S3.1 and S3.2; the mass block M2 is respectively connected with the fixed anchor points A2.1-A2.4 through the spring beams S2.5-S2.8 and is connected with the mass block M4 through the spring beams S3.3 and S3.4; the mass M3 is respectively connected with the masses M5 and M6 through the spring beams S1.1 and S1.2, and is connected with the rigid beam F6.1 through the spring beams S4.1 and S4.2; the mass M4 is connected with the masses M7, M8 through spring beams S1.3, S1.4 respectively, and is connected with the rigid beam F6.2 through spring beams S4.3, S4.4; the rigid beam F6.1 is connected with the rigid beams F5.1 and F5.2 through spring beams S5.1 and S5.2 respectively; the rigid beam F6.2 is connected with the rigid beams F5.1 and F5.2 through spring beams S5.3 and S5.4 respectively; the rigid beams F5.1 and F5.3 are connected with the fixed anchor points A3.2 through spring beams S6.1; the rigid beams F5.2 and F5.4 are connected with the fixed anchor point A4.1 through a spring beam S6.2; the rigid beams F1 and F2 are arranged on two sides of the mass M5 (and the mass M7), the rigid beam F1 is respectively connected with the mass M5 and the fixed anchor point A3.1 through the spring beams S7.1 and S8.1, is respectively connected with the mass M7 and the fixed anchor point A3.1 through the spring beams S7.5 and S8.5, and is connected with the fixed anchor point A3.1 through the spring beam S9.1 at the middle part of the rigid beam; the rigid beam F2 is respectively connected with the mass block M5 and the fixed anchor point A3.2 through the spring beams S7.2 and S8.2, is respectively connected with the mass block M7 and the fixed anchor point A3.2 through the spring beams S7.6 and S8.6, and is connected with the fixed anchor point A3.2 through the spring beam S9.2 at the middle part of the rigid beam; the rigid beams F3 and F4 are arranged on two sides of the mass M6 (and the mass M8), the rigid beam F3 is respectively connected with the mass M6 and the fixed anchor point A4.1 through the spring beams S7.3 and S8.3, is respectively connected with the mass M8 and the fixed anchor point A4.1 through the spring beams S7.7 and S8.7, and is connected with the fixed anchor point A4.1 through the spring beam S9.3 at the middle part of the rigid beam; the rigid beam F4 is connected to the mass M6 and to the anchor point a4.2 by means of spring beams S7.4, S8.4, respectively, and to the mass M8 and to the anchor point a4.2 by means of spring beams S7.8, S8.8, respectively, and to the anchor point a4.2 by means of a spring beam S9.4 at its central position.
The spring beam groups S5 and S7-S9 have strip-shaped structures, the spring beams S1-S4 have U-shaped structures, the spring beam S6.1 is combined by two parts, and the U-shaped structures are arranged in the Y direction, specifically, the two parts are oppositely arranged and connected to the fixed anchor point A3.2; the spring beam S6.1 also comprises two sections of strip structures which extend along the X direction and are connected with the U-shaped structure, and the two sections of strip structures are also respectively connected with the rigid beams F5.1 and F5.3; the structure of the spring beam S6.2 is completely the same as that of the spring beam S6.1, the spring beam S6.2 and the spring beam S6.1 are symmetrically arranged along the Y direction, and the spring beam S6.2 is connected with the rigid beams F5.1 and F5.3 and the fixed anchor point A4.1 in the same way. The strip-shaped structure in the elastic beam group S6 is suitable for the rigid beam group F5 to move in the Y direction, and the U-shaped structure in the elastic beam group S6 is suitable for the rigid beam group F5 to move in the X direction, so that the coupling structure composed of the elastic beam groups S5 and S6, the rigid beam groups F5 and F6, and the fixed anchor points a3.2 and a4.1 can obtain the same coupling effect as the existing structure in fig. 7, that is, it can be ensured that the masses M3 and M4 keep the same magnitude and opposite directions of movement during the movement in the Y direction. The spring beam groups S7 and S8, the rigid beams F1-F4 and the anchor point groups A3 and A4 form a coupling structure of the detection part, so that the motion amplitudes of the masses M5 and M7 in the X direction are equal in size and opposite in direction, and the motion amplitudes of the masses M6 and M8 in the X direction are equal in size and opposite in direction.
The extension of each spring beam in this embodiment is parallel to the X-direction and/or the Y-direction, and for the U-shaped spring beam, it is also composed of several segments of strip-like structures extending in the X-direction and the Y-direction, so that the coupling structure in this embodiment does not have obliquely arranged spring beams.
The masses M1 and M2 form a driving mass, the masses M3 and M4 form a Coriolis mass, and the masses M5 to M8 form a detection mass. The fixed anchor point groups A5 and A6 are fixed on the substrate, electrodes E1.1-E1.4 are respectively arranged on the fixed anchor points A5.1-A5.4, electrodes E2.1, E2.5, E2.2, E2.6, E2.7, E2.3, E2.8 and E2.4 are respectively arranged on the fixed anchor points A6.1-A6.8, a comb tooth structure matched with the electrodes E5.1 and E5.2 is arranged on the mass block M1, and a mass block M2 is provided with a comb tooth structure matched with the electrodes E5.1 and E5.2Comb tooth structures matched with the electrodes E5.3 and E5.4, a mass block M5 is provided with a comb tooth structure matched with the electrodes E2.1 and E2.5, a mass block M,6 is provided with a comb tooth structure matched with the electrodes E2.2 and E2.6, a mass block M7 is provided with a comb tooth structure matched with the electrodes E2.7 and E2.3, a mass block M8 is provided with a comb tooth structure matched with the electrodes E2.8 and E2.4, so that 12 capacitors are formed by the electrode groups E1, E2 and PM, wherein the electrode group E1 is a driving electrode, and the electrodes E1.1, E1.4 and PM form a driving capacitor CDR+The electrodes E1.2, E1.3 and PM form a driving capacitor CDR-(ii) a Electrodes E2.1-E2.8 are detection electrodes, and electrodes E2.1-E2.4 and PM form detection capacitor CSS+Electrodes E2.5-E2.8 and PM form a detection capacitor CSS-。
Similarly, the operation principle of the Z-axis gyroscope of the present embodiment is divided into two parts, i.e., a driving part and a Z-axis angular velocity detection part, which will be described below.
As shown in fig. 5, in the driving capacitor CDR+、CDR-When alternating voltages in opposite directions are applied to the two ends of the capacitor, alternating electrostatic forces are generated at the two ends of the capacitor, so that the mass blocks M1 and M2 are driven to reciprocate in the Y direction, the mass block M1 drives the mass block M3 to reciprocate in the Y direction through the spring beams S3.1 and S3.2, and the mass block M2 drives the mass block M4 to reciprocate in the Y direction through the spring beams S3.3 and S3.4.
Due to the decoupling effect of the spring beam set S1, when the driving mass block and the Coriolis mass block move along the Y direction, the displacement generated by the movement of the driving mass block and the Coriolis mass block cannot be transmitted to the detection mass block, so that the orthogonal error generated by driving is reduced, and the stability of a detection part is ensured. The masses M3 and M4 drive the rigid beam group F6 to move in the Y direction through the spring beam group S4, and as described above, the coupling structure composed of the elastic beam groups S5 and S6, the rigid beam groups F5 and F6, and the fixed anchor points a3.2 and a4.1 can ensure that the masses M3 and M4 keep equal amplitudes and opposite directions of movement in the Y direction when the coriolis force masses M3 and M4 move.
As shown in fig. 6, when an angular velocity is input about the Z axis, the coriolis mass M3, M4 receives coriolis force in the X direction because it moves in the Y direction. Since the motion directions of the masses M3 and M4 in the Y direction are opposite, the directions of the X direction coriolis forces applied to them by the Z axis angular velocity output are also opposite, so that the masses M3 and M4 reciprocate in the X direction in opposite directions.
Due to the decoupling effect of the spring beam set S3, when the Coriolis force mass moves along the X direction, displacement generated by the movement of the Coriolis force mass cannot be transmitted to the driving mass, and therefore the stability of the driving portion is guaranteed.
When the Coriolis mass M3 generates X-direction motion under the condition of Z-axis angular velocity input, the detection masses M5 and M6 can be driven to move by the spring beams S1.1 and S1.2 respectively; similarly, when the coriolis mass M4 generates the X-direction motion under the input of the Z-axis angular velocity, the proof masses M7 and M8 are respectively driven by the spring beams S1.3 and S1.4 to move. Because the moving directions and the magnitudes (amplitudes) of the masses M3 and M4 are opposite and equal, under the action of the spring beam groups S7 and S8, the rigid beam F1 moves around the intersection point of the spring beam S9.1 and the rigid beam F1, and the rigid beam F2 moves around the intersection point of the spring beam S9.2 and the rigid beam F2; the rigid beam F3 is caused to move around the intersection point of the spring beam S9.3 and the rigid beam F3; the rigid beam F4 is caused to move about the point of intersection of the spring beam S9.4 and the rigid beam F4. Due to the rigidity of the rigid beams F1 and F2, the equal and opposite displacement directions of the masses M5 and M7 can be ensured, and due to the rigidity of the rigid beams F3 and F4, the equal and opposite displacement directions of the masses M6 and M8 can be ensured. Due to the action of the spring beams S7.1 and S7.2 at the two sides, the motion mode of the mass block M5 in the X direction can be kept to be translational; due to the action of the spring beams S7.3 and S7.4 at the two sides, the motion mode of the mass block M6 in the X direction can be kept to be translational; due to the action of the spring beams S7.5 and S7.6 at the two sides, the motion mode of the mass block M7 in the X direction can be kept to be translational; due to the action of the double-sided spring beams S7.7 and S7.8, the motion mode of the mass M8 in the X direction can be kept to be translational.
Under the above motion state, the distance between the comb structures on the proof masses M5-M8 and the corresponding electrodes in the electrode group E2 is changed, so that the detection capacitance C is changedSS+、CSS-Correspondingly, the same size and direction will be generatedThe opposite change, e.g. when detecting the capacitance CSS+When the capacitance value of (C) is increased, the capacitance C is detectedSS-The capacitance value of (d) is decreased, and the detection capacitance Δ C calculated by a differential method is Δ CSS+-ΔCSS-And the magnitude of the input angular velocity is calculated accordingly.
Compared with the existing Z-axis gyroscope, the Z-axis gyroscope of the embodiment has the following advantages:
the coupling beam structure is changed, the coupling beam is formed by a spring and a rigid beam which are perpendicular in an XY plane instead of an inclined spring, and in the MEMS process, the inclined spring can generate large process deviation due to the limitation of a processing mode, so that the asymmetry of the coupling beam is caused. The vertical beam and the rigid structure are beneficial to saving area and reducing deviation caused by the process.
The out-of-plane displacement of the driving mass block caused by the self gravity is reduced, the driving mass block of the existing Z-axis gyroscope is supported by a unilateral anchor point, and the driving mass block can incline out of the plane of the unsupported side under the action of the gravity; the driving mass block of the embodiment is supported by the polygonal anchor points, so that a motion plane is fixed, the balance in the plane of the driving mass block is ensured, and the stability of the motion mode of the driving mass block is ensured.
The stability of guarantee proof mass motion model, the proof mass of current Z axle gyroscope is supported by the unilateral spring in the face, under the effect of self gravity, can produce to the off-plane slope of unsupported one side, can produce the motion of off-plane in the testing process, leads to the stability variation that detects. In the embodiment, the detection mass blocks are fixed on two sides, so that the detection mass blocks are fixed and move in the plane; in the embodiment, the coupling rigid beam structures are added on two sides with opposite movement directions, so that the two differential parts of the detection mass block are ensured to have the same movement size and opposite movement directions, the stability of the detection system is ensured, and the interference possibly caused by other factors is reduced.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.

Claims (7)

1. A MEMS gyroscope comprising a driving mass, a coupling structure, a coriolis mass, and defining a first direction, a second direction, and a third direction that are perpendicular to each other; the driving mass is arranged to be movable in the first direction; the driving mass block and the Coriolis mass block are connected through an elastic structure, so that the Coriolis mass block can be driven by the driving mass block to move along the first direction and can move along the second direction under the action of Coriolis force along the second direction; the Coriolis force mass blocks are symmetrically connected to two sides of the coupling structure, so that the Coriolis force mass blocks on the two sides move in opposite directions and equal in amplitude when moving along the first direction; the coupling structure comprises a plurality of elastic pieces, and the plurality of elastic pieces extend along the first direction and/or the second direction; the coupling structure comprises two groups of connecting parts symmetrically arranged along the second direction and two first elastic parts symmetrically arranged along the first direction; the two groups of connecting parts are respectively connected with the Coriolis force mass blocks arranged on two sides of the coupling structure; two ends of each connecting part are respectively connected to corresponding fixed anchor points through the two first elastic parts; the first elastic piece comprises a first sub-elastic piece and a second sub-elastic piece, the first sub-elastic piece is connected with the corresponding fixing anchor point, and the connecting component is connected with the first sub-elastic piece through the corresponding second sub-elastic piece; the second sub-elastic part is suitable for the connecting part to move along the first direction, and the first sub-elastic part is suitable for the connecting part to move along the second direction; the connecting component comprises a first rigid part and two second rigid parts symmetrically arranged along the first direction, and the first rigid part is connected with the Coriolis force mass block on one corresponding side of the first rigid part; one end of each second rigid part is connected with the corresponding first rigid part through an elastic part, and the other end of each second rigid part is connected with the corresponding second sub-elastic part, so that the first rigid part and the second rigid part are suitable for moving along the first direction.
2. The MEMS gyroscope of claim 1, wherein the drive mass is connected to at least four anchor points by a structure having elasticity such that it can remain parallel to a plane defined by the first direction and the second direction.
3. The MEMS gyroscope of claim 1, wherein the coupling structure and the coriolis proof mass are connected by a second spring that causes the coriolis proof mass to drive the coupling structure in the first direction when moving in the first direction and to decouple when moving in the second direction.
4. The MEMS gyroscope of claim 1, further comprising a proof mass connected to the coriolis proof mass by a third spring, the third spring moving the coriolis proof mass in the second direction and decoupling the coriolis proof mass in the first direction.
5. The MEMS gyroscope of claim 4, wherein a first fixed anchor point and a second fixed anchor point are arranged on two sides of the detection mass, and the detection mass is connected with the first fixed anchor point and the second fixed anchor point through a structure with elasticity.
6. The MEMS gyroscope of claim 5, further comprising a third rigid member and a fourth rigid member, the third rigid member and the fourth rigid member being disposed on opposite sides of the proof mass, the third rigid member being connected to the first fixed anchor and the proof mass via elastic members, respectively, and the fourth rigid member being connected to the second fixed anchor and the proof mass via elastic members, respectively.
7. The MEMS gyroscope of claim 6, wherein the third rigid element is connected to the first anchor point by an elastic element in the second direction and to the proof mass and the first anchor point by an elastic element in the first direction, respectively; the fourth rigid part is connected with the second fixed anchor point through an elastic part along the second direction, and is respectively connected with the detection mass block and the second fixed anchor point through the elastic part along the first direction.
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