CN109164272A - Push and pull whole differential single shaft silicon micro-resonance type accelerometer - Google Patents
Push and pull whole differential single shaft silicon micro-resonance type accelerometer Download PDFInfo
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- CN109164272A CN109164272A CN201811249318.8A CN201811249318A CN109164272A CN 109164272 A CN109164272 A CN 109164272A CN 201811249318 A CN201811249318 A CN 201811249318A CN 109164272 A CN109164272 A CN 109164272A
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- attachment beam
- fixed anchor
- outer rim
- anchor point
- lever
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
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Abstract
The present invention relates to MEMS resonant formula acceleration transducers, specially push and pull whole differential single shaft silicon micro-resonance type accelerometer, solve the problems, such as the structural redundancy of existing MEMS resonant formula acceleration transducer, scheme: including outer rim, mass block is equipped in outer rim, hollow out has attachment beam, DETF resonator, fixed anchor point and lever mechanism on mass block, and attachment beam is vertical with symmetry axis, and DETF resonator, fixed anchor point, lever mechanism are symmetrical along symmetrical centre.Advantage: smart structural design is kept the power of effect on the resonator equal, the not of uniform size of the power of lever mechanism output will not be caused due to structure mismachining tolerance by lever；This structure not only realizes the difference output in frequency, and realize the difference output on lever mechanism amplification inertia force, acting on attachment beam simultaneously with the primary lever of two groups of separation makes one side by tensile stress, and the other side is effectively realized the amplification of driving force on attachment beam by compression.
Description
Technical field
The present invention relates to MEMS(MEMS) resonant mode acceleration transducer, specially push-and-pull whole differential single shaft silicon
Micro-resonance type accelerometer.
Background technique
Micromachine resonant acceleration transducer (MMRA) is a kind of typical Micromachined Inertial Devices based on resonator,
Acceleration can be converted into rate-adaptive pacemaker by it, effectively prevent the error of amplitude measurement, to reduce ambient noise bring
Interference can simplify interface circuit due to its quasi- numeral output, reduce the error of transmission and processing.Certainly micromechanics has been had both
Accelerometer it is small in size, it is light-weight, it is low in energy consumption, it is at low cost, the characteristics of being easily integrated and can be mass.Resonant mode acceleration
Sensor can be widely applied to aerospace, weapon guidance, and the fields such as medical medicine are a kind of with wide application prospect
High-precision acceleration transducer.The concrete operating principle of MMRA is that mass block generates inertia force under acceleration effect, the inertia
Power realizes the amplification of certain multiple through steel microtube structure, is then communicated on double-ended tuning fork (DETF) resonator, so that
The frequency of DETF resonance beam changes, and acceleration value can be obtained by detecting resonance frequency variable quantity.Add in certain input
In velocity interval, frequency values and input acceleration value are proportional.By the variable quantity for detecting DETF resonator intrinsic frequency
The acceleration value of input can be calculated.The lever mechanism of existing differential resonance formula acceleration transducer is independently
Two DETF resonators are acted on, due in process it is difficult to ensure that the ruler of the corresponding lever mechanism of each DETF resonator
It is very little identical, therefore cause inertia force suffered by two DETF resonators not of uniform size, to cause difference output
Error limits measurement accuracy, linearity of sensor etc..Therefore, a kind of push-and-pull whole differential single shaft silicon micro-resonance type is designed
Accelerometer realizes the difference output of frequency resultant and inertia force, to solve the stress of differential resonance formula acceleration transducer not
Consistent problem is necessary.
Summary of the invention
The present invention solves the problems, such as that existing differential type resonant mode acceleration transducer stress is inconsistent, and it is complete to provide a kind of push-and-pull
Differential type single shaft silicon micro-resonance type accelerometer.
The present invention is achieved by the following technical scheme: push-and-pull whole differential single shaft silicon micro-resonance type accelerometer, packet
The outer rim of axially symmetric structure is included, the symmetrical axisymmetric mass block along outer rim, the mass block are equipped in the outer rim
It is connect between outer rim by the symmetrical multipair folded beam of the symmetry axis along outer rim；Hollow out has one on the mass block
A attachment beam, two DETF resonators, four lever mechanisms, eight fixed anchor points, 12 linking arms, the length of the attachment beam
The vertical direction for spending direction along the symmetry axis of outer rim is arranged, and about the symmetrical axial symmetry；The DETF resonator is along outside
The symmetrical axis direction of frame divides the width direction two sides of column attachment beam, and an end passes through the midpoint of linking arm and attachment beam length direction
Connection, another end are connect by linking arm with fixed anchor point；The two ends of the attachment beam are respectively arranged with fixed anchor point, institute
The quadrangle for stating attachment beam is respectively arranged with lever mechanism, and the lever mechanism includes that the vertical direction of the symmetry axis along outer rim is set
The lever arm set, is provided with fulcrum beam between the lever arm and the fixed anchor point of attachment beam end, described lever arm one end with
It is provided with output beam between attachment beam, is provided with input beam between the lever arm other end and mass block；Relative to attachment beam
The fixed anchor point of two ends is additionally provided with fixed anchor point on the outside of the lever arm width direction, the both ends point of the fixed anchor point
Linking arm is not provided between mass block；Four lever mechanisms, eight fixed anchor points, 12 linking arms
It is symmetrical along the symmetry axis of outer rim.The outer rim and mass block of axially symmetric structure ensure each institute of mechanism of symmetry axis two sides
It is equal by inertia force, when the inertia force that attachment beam is zoomed in or out by certain proportion acts on, only the DETF resonator of two sides is applied
Add tensile stress or compression, and attachment beam does not twist, i.e. the inertia force of the suffered input beam in attachment beam both ends is equal.Outer rim
It is used to be bonded with external substrate with fixed anchor point, mass block and DETF resonator is served and supported and fixed, while attachment beam
The fixed anchor point of two ends also provides fixed supporting point for the fulcrum beam of lever mechanism.Lever mechanism by the inertia force of mass block into
It is applied on attachment beam after a certain proportion of amplification of row.The inertia force being subject to is applied to the DETF resonator of two sides by attachment beam
On, and then make DETF resonator deformation occurs, change its intrinsic frequency.The resonance frequency of the DETF resonator of side increases, separately
The resonance frequency of side reduces, and exports through signal differential, they available differential frequency, in certain acceleration range,
Differential frequency value and input acceleration are proportional, and this makes it possible to obtain adding for the symmetrical axis direction of sensitive direction and outer rim
Speed.
The outer rim and mass block are center axially symmetric structure, the attachment beam, DETF resonator, fixed anchor point and thick stick
Linkage is symmetrical along symmetrical centre.Structure substantially symmetrical about its central axis guarantees four lever mechanisms to the magnification ratio phase of inertia force
Together, while eliminating as much as that attachment beam two sides mass block structures is asymmetric and the non-sensitive direction of bring sensor (left and right directions)
Stressing influence, reduce measurement error.
The input beam is located at the outside of lever arm width direction.Input beam, which is located on the outside of lever arm, ensures to input beam by used
Property power is more balanced.
The invention has the following advantages that being answered by the tensile stress or pressure that dexterously design makes to act on two DETF resonators
Power is as caused by the same connection Liang Sicheng, therefore it is essentially equal to make to act on power on the resonator, again can not be due to structure
Mismachining tolerance leads to the property not of uniform size for the power for causing lever mechanism to export；Secondly such structure not only realizes in frequency
Difference output, and the difference output on lever mechanism amplification inertia force is realized, made simultaneously with the primary lever of two groups of separation
Make one side by tensile stress with attachment beam, the other side is effectively realized the amplification of driving force on attachment beam by compression.
Detailed description of the invention
Fig. 1 is schematic structural view of the invention；
Fig. 2 is a partial enlarged view of Figure 1；
In figure: 1- outer rim, 2- mass block, 3- folded beam, 4- attachment beam, 5-DETF resonator, 6- fixed anchor point, 7- connection
Arm, 8- lever arm, 9- fulcrum beam, 10- export beam, and 11- inputs beam.
Specific embodiment
Push and pull whole differential single shaft silicon micro-resonance type accelerometer, the outer rim 1 including axially symmetric structure, the outer rim
The symmetrical axisymmetric mass block 2 along outer rim 1 is equipped in 1, by along outer rim 1 between the mass block 2 and outer rim 1
The symmetrical multipair folded beam 3 of symmetry axis connects；Hollow out has an attachment beam 4, two DETF resonators on the mass block 2
5, four lever mechanisms, eight fixed anchor points, 6,12 linking arms 7, pair of the length direction of the attachment beam 4 along outer rim 1
Claim the vertical direction setting of axis, and about the symmetrical axial symmetry；Symmetrical axis direction point of the DETF resonator 5 along outer rim 1
The width direction two sides of column attachment beam 4, an end are connect by linking arm 7 with the midpoint of 4 length direction of attachment beam, another end
It is connect by linking arm 7 with fixed anchor point 6；The two ends of the attachment beam 4 are respectively arranged with fixed anchor point 6, the attachment beam 4
Quadrangle be respectively arranged with lever mechanism, the lever mechanism includes the thick stick being arranged along the vertical direction of the symmetry axis of outer rim 1
Lever arm 8, is provided with fulcrum beam 9 between the fixed anchor point 6 of 4 end of the lever arm 8 and attachment beam, described 8 one end of lever arm with
It is provided with output beam 10 between attachment beam 4, input beam 11 is provided between 8 other end of lever arm and mass block 2；Relative to
The fixed anchor point 6 of 4 two ends of attachment beam is additionally provided with fixed anchor point 6 on the outside of 8 width direction of lever arm, the fixation anchor
The both ends of point 6 are provided with linking arm 7 between mass block 2 respectively；Four lever mechanisms, eight fixed anchor points 6, ten
Symmetry axis of two linking arms 7 along outer rim 1 is symmetrical.
When it is implemented, the outer rim 1 and mass block 2 are center axially symmetric structure, the attachment beam 4, DETF resonance
Device 5, fixed anchor point 6 and lever mechanism are symmetrical along symmetrical centre.The input beam 11 is located at 8 width direction of lever arm
Outside.
When installing and using, the lower surface of 1, eight fixed anchor point 6 of outer rim is bonded with external substrate.When there is no acceleration
When input, comb resonator 5 works under the mode of itself intrinsic frequency.When in sensitive direction of the invention, i.e. outer rim 1
Symmetry axis parallel direction when having acceleration input, mass block 2 is subjected to displacement under the action of inertia force, and inertia force passes through input
Beam 11 is applied on lever arm 8, and the fulcrum beam 9 supported by fixed anchor point 6 provides point action, and inertia force is passed through lever arm 8
After equal proportion amplification, inertia force is applied on attachment beam 4 by output beam 10, attachment beam 4 is by four lever mechanisms at this time
It exports beam 10 to act on, their inertia force is equal in magnitude, direction is identical.Inertia force is passed to two of two sides by attachment beam 4
DETF resonator 5, so that one of tension stress, the size of another compression chord, power is identical, and direction is identical.DETF is humorous
Shaking, deformation occurs under stress for device 5, and intrinsic frequency changes.Their resonance frequency increases and reduces respectively, warp
Signal differential output, both available differential frequency, wherein in certain acceleration range, differential frequency value and input
Acceleration is proportional.It is hereby achieved that the acceleration of sensitive direction.Those skilled in the art can according to actual needs,
It adjusts the input arm of force of lever mechanism and exports the ratio of the arm of force, and then adjust the ratio of inertia force amplification.
Claims (3)
1. a kind of push-and-pull whole differential single shaft silicon micro-resonance type accelerometer, it is characterised in that: the outside including axially symmetric structure
Frame (1), is equipped with the symmetrical axisymmetric mass block (2) along outer rim (1) in the outer rim (1), the mass block (2) and outer
It is connected between frame (1) by the symmetrical multipair folded beam (3) of the symmetry axis along outer rim (1)；On the mass block (2)
Hollow out has an attachment beam (4), two DETF resonators (5), four lever mechanisms, eight fixed anchor points (6), 12 connections
Arm (7), the vertical direction setting of symmetry axis of the length direction of the attachment beam (4) along outer rim (1), and about the symmetry axis
Symmetrically；The DETF resonator (5) divides the width direction two sides of column attachment beam (4), one end along the symmetrical axis direction of outer rim (1)
Head is connect by linking arm (7) with the midpoint of attachment beam (4) length direction, and another end passes through linking arm (7) and fixed anchor point
(6) it connects；The two ends of the attachment beam (4) are respectively arranged with fixed anchor point (6), and the quadrangle of the attachment beam (4) is set respectively
It is equipped with lever mechanism, the lever mechanism includes the lever arm (8) being arranged along the vertical direction of the symmetry axis of outer rim (1), institute
It states and is provided with fulcrum beam (9) between lever arm (8) and the fixed anchor point (6) of attachment beam (4) end, described lever arm (8) one end
It is provided with output beam (10) between attachment beam (4), is provided with input between lever arm (8) other end and mass block (2)
Beam (11)；Relative to the fixed anchor point (6) of attachment beam (4) two ends, it is additionally provided on the outside of lever arm (8) width direction
Fixed anchor point (6), the both ends of the fixed anchor point (6) are provided with linking arm (7) between mass block (2) respectively；Four thick sticks
The symmetry axis of linkage, eight fixed anchor points (6), 12 linking arms (7) along outer rim (1) is symmetrical.
2. push-and-pull whole differential single shaft silicon micro-resonance type accelerometer according to claim 1, it is characterised in that: described outer
Frame (1) and mass block (2) are center axially symmetric structure, the attachment beam (4), DETF resonator (5), fixed anchor point (6) and
Lever mechanism is symmetrical along symmetrical centre.
3. push-and-pull whole differential single shaft silicon micro-resonance type accelerometer according to claim 1 or 2, it is characterised in that: institute
State the outside that input beam (11) is located at lever arm (8) width direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811249318.8A CN109164272B (en) | 2018-10-25 | 2018-10-25 | Push-pull full-differential uniaxial silicon micro-resonant accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811249318.8A CN109164272B (en) | 2018-10-25 | 2018-10-25 | Push-pull full-differential uniaxial silicon micro-resonant accelerometer |
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| CN109164272A true CN109164272A (en) | 2019-01-08 |
| CN109164272B CN109164272B (en) | 2020-10-27 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111289156A (en) * | 2020-02-26 | 2020-06-16 | 西安交通大学 | Differential silicon micro-resonance type pressure sensor based on electrostatic excitation piezoresistive detection |
| CN111830281A (en) * | 2020-07-20 | 2020-10-27 | 华中科技大学 | Arched resonator and MEMS accelerometer for resonant MEMS sensor |
| CN112131768A (en) * | 2020-09-09 | 2020-12-25 | 中国矿业大学(北京) | Resonant accelerometer optimization method based on mode and frequency |
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| US5969249A (en) * | 1997-05-07 | 1999-10-19 | The Regents Of The University Of California | Resonant accelerometer with flexural lever leverage system |
| CN1844931A (en) * | 2006-05-23 | 2006-10-11 | 北京航空航天大学 | Resonance type micromechanical accelerometer |
| CN101963624A (en) * | 2010-09-27 | 2011-02-02 | 南京理工大学 | Silicon micro-resonant accelerometer |
| CN104865406A (en) * | 2015-03-27 | 2015-08-26 | 东南大学 | Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer |
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2018
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US5969249A (en) * | 1997-05-07 | 1999-10-19 | The Regents Of The University Of California | Resonant accelerometer with flexural lever leverage system |
| CN1844931A (en) * | 2006-05-23 | 2006-10-11 | 北京航空航天大学 | Resonance type micromechanical accelerometer |
| CN101963624A (en) * | 2010-09-27 | 2011-02-02 | 南京理工大学 | Silicon micro-resonant accelerometer |
| CN104865406A (en) * | 2015-03-27 | 2015-08-26 | 东南大学 | Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer |
Non-Patent Citations (1)
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111289156A (en) * | 2020-02-26 | 2020-06-16 | 西安交通大学 | Differential silicon micro-resonance type pressure sensor based on electrostatic excitation piezoresistive detection |
| CN111830281A (en) * | 2020-07-20 | 2020-10-27 | 华中科技大学 | Arched resonator and MEMS accelerometer for resonant MEMS sensor |
| CN111830281B (en) * | 2020-07-20 | 2021-10-01 | 华中科技大学 | Arched resonator and MEMS accelerometer for resonant MEMS sensor |
| CN112131768A (en) * | 2020-09-09 | 2020-12-25 | 中国矿业大学(北京) | Resonant accelerometer optimization method based on mode and frequency |
| CN112131768B (en) * | 2020-09-09 | 2023-09-05 | 中国矿业大学(北京) | Resonant accelerometer optimization method based on modes and frequencies |
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| CN109164272B (en) | 2020-10-27 |
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