CN104865406A - Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer - Google Patents
Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer Download PDFInfo
- Publication number
- CN104865406A CN104865406A CN201510142656.1A CN201510142656A CN104865406A CN 104865406 A CN104865406 A CN 104865406A CN 201510142656 A CN201510142656 A CN 201510142656A CN 104865406 A CN104865406 A CN 104865406A
- Authority
- CN
- China
- Prior art keywords
- comb
- lever
- resonator
- decoupling
- anchor point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Pressure Sensors (AREA)
Abstract
The invention discloses a lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer comprising an upper layer and a lower layer. A mechanical structure of a silicone micro accelerometer is arranged at the upper layer and a glass substrate laid with a signal lead is arranged at the lower layer. The mechanical structure is formed by a sensing mass, a common anchor point, lever amplifier mechanisms, decoupling beams, and resonators; one end of one decoupling beam is connected with the sensing mass and the other end is connected with the common anchor point by the lever amplifier mechanisms; and the inertia force applied to the sensing mass is magnified by the lever amplifier mechanisms and then is transmitted to the resonators. The resonators consist of resonance beams, comb racks, movable combs, fixed drive combs, fixed drive feedback combs, and fixed anchor points. According to the silicone micro-resonator type accelerometer, accelerated speed detection at two directions in a plane can be realized; and the frequency is used as an output. The accelerometer has advantages of small size, high integration degree, small coupling error, high sensitivity, and excellent anti-interference capability and the like.
Description
Technical field
The invention belongs to microelectromechanical systems and micro-inertia measuring technology, particularly a kind of twin shaft full decoupling silicon micro-resonance type accelerometer based on lever amplification principle.
Background technology
Have benefited from developing rapidly of integrated circuit technology, microelectric technique and miromaching, MEMS (micro electro mechanical system) is arisen at the historic moment, MEMS (Micro Electro-Mechanical Systems, MEMS) combine with inertial technology, make the research of micro inertial instrument and correlation technique become possibility.Silicon micro accerometer is microminiaturized and integrated with it, high reliability, low-power consumption, be easy to the excellent properties such as digitizing and intellectuality, dynamic property be good, determine it to have broad application prospects and military value, thus cause the great attention of various countries, and the numerous and confused huge fund that drops into is studied.Along with improving constantly of performance, silicon micro accerometer instead of the accelerometer of parts of traditional, achieves apply widely in fields such as consumer electronics, auto industry, biological medicines.
The domestic research for silicon micro accerometer comes from the nineties in last century, compared with external research level, the silicon micro-acceleration of major part mechanism report can only measure the acceleration of single direction, inertial navigation etc. is needed to measure the applications such as three dimension directional accelerations simultaneously, need three single-axis accelerometers, this adds increased take up room, calibration error and engineering cost; Meanwhile, the silicon micro accerometer of part report adopts not decoupling zero frame mode, and without lever amplifying mechanism, coupling error is comparatively large, and sensitivity is lower; In addition, most silicon micro accerometer adopts capacity plate antenna to drive and detection mode, adhesive effect and the non-linear performance limiting this type of silicon micro accerometer.
Summary of the invention
The object of the present invention is to provide a kind of can simultaneously both direction in detection plane, full decoupling, detection sensitivity is high, antijamming capability is strong, error the is little twin shaft full decoupling silicon micro-resonance type accelerometer based on lever amplification principle.
The invention provides a kind of twin shaft full decoupling silicon micro-resonance type accelerometer based on lever amplification principle, comprise two-layer up and down, upper strata is the physical construction of silicon micro accerometer, lower floor is the glass substrate being covered with signal lead, it is characterized in that: the physical construction of accelerometer is made up of sensitive-mass, four identical resonators, four identical lever amplifying mechanisms, four identical decoupling zero beams and public anchor points; First decoupling zero beam one end is connected with sensitive-mass, and the other end is connected with public anchor point by the first lever amplifying mechanism, and four lever amplifying mechanisms are that cross is placed; Four resonators are divided into two groups by sensitive acceleration direction difference, and first group of resonator line centered by first group of regulations and parameters enlarger is that skew symmetry is placed, and second group of resonator line centered by second group of regulations and parameters enlarger is that skew symmetry is placed; First resonator is made up of stiff end, resonance beam, comb frame and movable comb, fixed drive comb, fixed drive feedback comb and fixed anchor point; The resonance beam end of the first resonator is connected with the first lever amplifying mechanism and near public anchor point, passes to the first resonator after the inertial force acting on sensitive-mass is amplified by the first lever amplifying mechanism; On the affixed public anchor point bonding point on a glass substrate of the fixed anchor point of public anchor point and the first resonator and the first resonator bonding point, make the physical construction of silicon micro accerometer unsettled.
Further, four lever amplifying mechanisms are provided with four special decoupling zero beams; The end of the first lever amplifying mechanism that horizontal direction is placed and the 3rd lever amplifying mechanism is limited in the motion of y direction, the end of the second lever amplifying mechanism that vertical direction is placed and the 4th lever amplifying mechanism is limited in the motion of x direction, thus realizes the full decoupling of both direction.
Further, first group of resonator and second group of resonator are all based on Differential Detection principle, and the inertial force size that two resonators often in group are subject to is identical, and direction is contrary, and same of the change of resonance frequency is anti-phase, thus realizes the Differential Detection of input acceleration.
Further, resonance beam, under fixed drive comb and fixed drive feed back the effect of comb, is moved in same frequency and reversed-phase.
Further, fixed drive comb, based on comb electric capacity electrostatic drive principle, adopts variable area version, and is connected with the first drive electrode; Fixed drive feedback comb, based on comb capacitance detecting principle, adopts variable area version, and is connected with the first drive feedback electrode; Comb frame and movable comb are connected with the first public electrode.
Compared with prior art, its beneficial effect is in the present invention: (1) single piece of silicon micro-acceleration gauge can realize the acceleration detection of both direction in plane simultaneously, has saved chip area, has reduced processing cost, inhibit calibration error; (2) inertial force of mass sensitivity can amplify by lever amplifying mechanism, improves the sensitivity of accelerometer; (3) decoupling zero beam realize two detection sides to inertial force decoupling zero, make both direction detect export coupling error reduce; (4) driving comb electric capacity and drive feedback comb electric capacity all adopt variable area form, and slide-film damping is little, and driving amplitude is large, and the linearity is good, and quality factor are high; (5) resonator realizes the rate-adaptive pacemaker of accurate digital signal, reduces metrical error, simplifies telemetry circuit, improves antijamming capability and output accuracy.The design that design in this invention is also not relevant, similar at home.
Accompanying drawing explanation
Fig. 1 is the physical construction schematic diagram of the twin shaft full decoupling silicon micro-resonance type accelerometer that the present invention is based on lever amplification principle;
Fig. 2 is the resonator structure schematic diagram of the twin shaft full decoupling silicon micro-resonance type accelerometer that the present invention is based on lever amplification principle;
Fig. 3 is the glass substrate schematic diagram of the twin shaft full decoupling silicon micro-resonance type accelerometer that the present invention is based on lever amplification principle.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
Embodiment 1:
Composition graphs 1, the present invention is based on the twin shaft full decoupling silicon micro-resonance type accelerometer of lever amplification principle, realizes the measurement to the input acceleration of two vertical direction in plane.One-piece construction comprises two-layer up and down, and upper strata is the physical construction of silicon micro accerometer, and lower floor is the glass substrate being covered with signal lead.The physical construction of accelerometer is made up of sensitive-mass 1, four identical resonator 2a, 2b, 2c, 2d, four identical lever amplifying mechanism 3a, 3b, 3c, 3d, four identical decoupling zero beam 4a, 4b, 4c, 4d and public anchor points 6, first decoupling zero beam 4a adopts folded beam form, be rigidity along beam axial direction, along beam radial direction in flexible, first decoupling zero beam 4a is connected with sensitive-mass 1 by the first short straight beam 5a1, first decoupling zero beam 4a is connected with public anchor point 6 by the first lever amplifying mechanism 3a, first decoupling zero beam 4a and the 3rd decoupling zero beam 4c alleviates the stressed of the first lever amplifying mechanism 3a and the 3rd x direction, lever amplifying mechanism 3c end, second decoupling zero beam 4b and the 4th decoupling zero beam 4d alleviates the stressed of the second lever amplifying mechanism 3b and the 4th y direction, lever amplifying mechanism 3d end, first lever amplifying mechanism 3a and the 3rd lever amplifying mechanism 3c can only along the flexural deformation in y direction, second lever amplifying mechanism 3b and the 4th lever amplifying mechanism 3d can only along the flexural deformation in x direction, thus achieve the decoupling zero of x-axis and y-axis both direction.Four lever amplifying mechanisms 3a, 3b, 3c, 3d are that cross is placed, four resonators 2a, 2b, 2c, 2d are divided into two groups by sensitive acceleration direction difference, and first group of resonator 2a, 2c line centered by the first lever amplifying mechanism 3a and the 3rd lever amplifying mechanism 3c is that skew symmetry is placed; Second group of resonator 2b, 2d line centered by the second lever amplifying mechanism 3b and the 4th lever amplifying mechanism 3d is that skew symmetry is placed.Resonance beam 8a2, the 8a3 end of the first resonator 2a are connected with the first lever amplifying mechanism 3a; Resonance beam 8b2, the 8b3 end of the second resonator 2b are connected with the second lever amplifying mechanism 3b; Resonance beam 8c2, the 8c3 end of the 3rd resonator 2c are connected with the 3rd lever amplifying mechanism 3c; Resonance beam 8d2, the 8d3 end of the 4th resonator 2d are connected with the 4th lever amplifying mechanism 3d.The end of 4 resonators 2a, 2b, 2c, 2d, all near public anchor point 6, passes to second group of resonator 2b, 2d after the inertial force in the x direction acting on sensitive-mass 1 is amplified by the second lever amplifying mechanism 3b and the 4th lever amplifying mechanism 3d; Act on the inertial force in the y direction of sensitive-mass 1 by passing to first group of resonator 2a, 2c after the first lever amplifying mechanism 3a and the 3rd lever amplifying mechanism 3c amplification.Sensitive-mass 1 is connected with public anchor point 6 by four decoupling zero beam 4a, 4b, 4c, 4d, four lever amplifying mechanisms 3a, 3b, 3c, 3d; Four resonators 2a, 2b, 2c, 2d are connected with fixed anchor point 7a1,7b1,7c1,7d1 respectively.On the affixed public anchor point bonding point 11 on a glass substrate of fixed anchor point 7a1,7a2,7a3,7a4,7a5,7a6,7a7 of public anchor point 6 and the first resonator 2a and first resonator bonding point 12a1,12a2,12a3,12a4,12a5,12a6,12a7, make the physical construction of silicon micro accerometer unsettled.
Resonator as shown in Figure 2, four resonators 2a, 2b, 2c, 2d are identical, and the first resonator 2a comprises resonance beam 8a2,8a3, resonance beam stiff end 8a1, comb frame and movable comb 8a4,8a5, fixed drive comb 9a1,9a2, fixed drive feedback comb 10a1,10a2,10a3,10a4 and fixed anchor point 7a1,7a2,7a3,7a4,7a5,7a6,7a7.The first lever amplifying mechanism 3a is fixed in resonance beam 8a2,8a3 one end, and the other end is fixed on fixed pedestal 7a1 by resonance beam stiff end 8a1.Comb frame and movable comb 8a4 are connected on resonance beam 8a2, and comb frame and movable comb 8a5 are connected on resonance beam 8a3, and symmetrical distribution.The both sides of comb frame and movable comb 8a4 are furnished with fixed drive comb 9a1 and fixed drive feedback comb 10a1,10a2 respectively; The both sides of comb frame and movable comb 8a5 are furnished with fixed drive comb 9a2 and fixed drive feedback comb 10a3,10a4 respectively.Fixed drive comb 9a1,9a2 are connected on fixed anchor point 7a2,7a3; Fixed drive feedback comb 10a1,10a2,10a3,10a4 are connected on fixed anchor point 7a4,7a5,7a6,7a7.For left side comb structure, when applying alternating voltage U on fixed drive comb 9a1
dsin ω
dt, and superpose DC offset voltage U
p, and during by comb frame and movable comb 8a4 ground connection, ignore constant term and high fdrequency component, the driving force that comb frame and movable comb 8a4 are subject to is:
In formula, n
0for the comb number of fixed drive comb 9a1, h is the thickness of comb, and ε is specific inductive capacity, and d is comb gap.At driving force F
deffect under, promotion resonance beam 8a2 is done simple harmonic oscillation by comb frame and movable comb 8a4.Utilize comb capacitance detecting principle, when resonance beam 8a2 vibrates along driving direction under comb frame and movable comb 8a4 promote, the capacitance change of fixed drive feedback comb 10a1,10a2 is:
In formula, n
1for the total number of comb of fixed drive feedback comb 10a1,10a2, h is the thickness of comb, and ε is specific inductive capacity, and d is comb gap, and Δ x is drive displacement.Fixed drive feedback comb 10a1,10a2 drives vibration for detecting, and feeds back to fixed drive comb 9a1 its driving voltage is adjusted, thus realizes close-loop driven.When stabilized driving, the vibration frequency of the first resonator 2a and the 3rd resonator 2c is all:
In formula, E and ρ is respectively elastic modulus and the density of silicon materials, and I, L and A are respectively the moment of inertia of resonance beam 8a2, length and sectional area.
When quality be m sensitive-mass 1 be subject to the acceleration a in y direction time, be then equivalent to and be subject to inertial force F
0=ma, if the enlargement factor of the first lever amplifying mechanism 3a is K, then the tensile force f that is subject to of resonance beam 8a2,8a3
1=KF
0, because the 3rd resonator 2c and the first resonator 2a skew symmetry are arranged, the pressure of the equal size that resonance beam is subject to, now, the vibration frequency f of two resonators
1become:
In formula, h and w is respectively resonance beam 8a2, the thickness of 8a3 and width.Owing to adopting Differential Detection principle, ignore high-order term by Taylor series expansion, the first resonator 2a and the 3rd resonator 2c frequency total variation are:
In formula,
for the constant multiplier of accelerometer.Therefore, the size of y direction input acceleration can be known by inference according to frequency total variation; In like manner, the size of x direction input acceleration can be known by inference according to the second resonator 2b and the 4th resonator 2d frequency total variation.
The glass substrate of silicon micro accerometer as shown in Figure 3, comprises contact conductor and bonding point two parts, and the contact conductor that four resonators 2a, 2b, 2c, 2d are corresponding is identical with bonding point.For electrode lead portion: the public electrode 13a that the first resonator 2a is corresponding is connected with comb frame and movable comb 8a4,8a5; Drive electrode 14a1,14a2 are connected with fixed drive comb 9a1 with 9a2; Drive feedback electrode 15a1,15a2 and fixed drive are fed back comb 10a1,10a2,10a3,10a4 and are connected.For bonding point part: public anchor point 6 is affixed with public anchor point bonding point, four resonator 2a, 2b, 2c, the fixed anchor point 7a1 of 2d, 7a2, 7a3, 7a4, 7a5, 7a6, 7b7, 7b1, 7b2, 7b3, 7b4, 7b5, 7b6, 7b7, 7c1, 7c2, 7c3, 7c4, 7c5, 7c6, 7c7, 7d1, 7d2, 7d3, 7d4, 7d5, 7d6 and 7d7 respectively with bonding point 12a1, 12a2, 12a3, 12a4, 12a5, 12a6, 12a7, 12b1, 12b2, 12b3, 12b4, 12b5, 12b6, 12b7, 12c1, 12c2, 12c3, 12c4, 12c5, 12c6, 12c7, 12d1, 12d2, 12d3, 12d4, 12d5, 12d6 and 12d7 is affixed.
Below by reference to the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood to limit scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change on the claims in the present invention basis is all protection scope of the present invention.
Claims (5)
1. the twin shaft full decoupling silicon micro-resonance type accelerometer based on lever amplification principle, comprise two-layer up and down, upper strata is the physical construction of silicon micro accerometer, lower floor is the glass substrate being covered with signal lead, it is characterized in that: the physical construction of accelerometer is made up of sensitive-mass (1), four identical resonators (2a, 2b, 2c, 2d), four identical lever amplifying mechanisms (3a, 3b, 3c, 3d), four identical decoupling zero beams (4a, 4b, 4c, 4d) and public anchor points (6); First decoupling zero beam (4a) one end is connected with sensitive-mass (1), and the other end is connected with public anchor point (6) by the first lever amplifying mechanism (3a), and four lever amplifying mechanisms (3a, 3b, 3c, 3d) are placed in cross; Four resonators (2a, 2b, 2c, 2d) are divided into two groups by sensitive acceleration direction difference, first group of resonator (2a, 2c) line centered by first group of regulations and parameters enlarger (3a, 3c) is that skew symmetry is placed, and second group of resonator (2b, 2d) line centered by second group of regulations and parameters enlarger (3b, 3d) is that skew symmetry is placed; First resonator (2a) is made up of stiff end (8a1), resonance beam (8a2,8a3), comb frame and movable comb (8a4,8a5), fixed drive comb (9a1,9a2), fixed drive feedback comb (10a1,10a2,10a3,10a4) and fixed anchor point (7a1,7a2,7a3,7a4,7a5,7a6,7a7); Resonance beam (8a2,8a3) end of the first resonator (2a) is connected with the first lever amplifying mechanism (3a) and near public anchor point (6), passes to the first resonator (2a) after the inertial force acting on sensitive-mass (1) is amplified by the first lever amplifying mechanism (3a); On the affixed public anchor point bonding point (11) on a glass substrate of the fixed anchor point (7a1,7a2,7a3,7a4,7a5,7a6,7a7) of public anchor point (6) and the first resonator (2a) and the first resonator bonding point (12a1,12a2,12a3,12a4,12a5,12a6,12a7), make the physical construction of silicon micro accerometer unsettled.
2. the twin shaft full decoupling silicon micro-resonance type accelerometer based on lever amplification principle according to claim 1, is characterized in that: four lever amplifying mechanisms (3a, 3b, 3c, 3d) are provided with four special decoupling zero beams (4a, 4b, 4c, 4d); The end of the first lever amplifying mechanism (3a) that horizontal direction is placed and the 3rd lever amplifying mechanism (3c) is limited in the motion of y direction, the end of the second lever amplifying mechanism (3b) that vertical direction is placed and the 4th lever amplifying mechanism (3d) is limited in the motion of x direction, thus realizes the full decoupling of both direction.
3. the twin shaft full decoupling silicon micro-resonance type accelerometer based on lever amplification principle according to claim 1, it is characterized in that: first group of resonator (2a, 2c) and second group of resonator (2b, 2d) are all based on Differential Detection principle, the inertial force size that two resonators often in group are subject to is identical, direction is contrary, same of the change of resonance frequency is anti-phase, thus realizes the Differential Detection of input acceleration.
4. the twin shaft full decoupling silicon micro-resonance type accelerometer based on lever amplification principle according to claim 1, it is characterized in that: resonance beam (8a2,8a3), under fixed drive comb (9a1,9a2) and fixed drive feed back the effect of comb (10a1,10a2,10a3,10a4), is moved in same frequency and reversed-phase.
5. the twin shaft full decoupling silicon micro-resonance type accelerometer based on lever amplification principle according to claim 1, it is characterized in that: fixed drive comb (9a1,9a2) is based on comb electric capacity electrostatic drive principle, adopt variable area version, and be connected with the first drive electrode (14a1,14a2); Fixed drive feedback comb (10a1,10a2,10a3,10a4), based on comb capacitance detecting principle, adopts variable area version, and is connected with the first drive feedback electrode (15a1,15a2); Comb frame and movable comb (8a4,8a5) are connected with the first public electrode (13a).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510142656.1A CN104865406A (en) | 2015-03-27 | 2015-03-27 | Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510142656.1A CN104865406A (en) | 2015-03-27 | 2015-03-27 | Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104865406A true CN104865406A (en) | 2015-08-26 |
Family
ID=53911383
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510142656.1A Pending CN104865406A (en) | 2015-03-27 | 2015-03-27 | Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104865406A (en) |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105547531A (en) * | 2016-01-19 | 2016-05-04 | 东南大学 | High-sensitivity capacitive-type pressure sensor and manufacturing method therefor |
| CN105911309A (en) * | 2016-06-24 | 2016-08-31 | 东南大学 | Single anchor supporting-type double axis silicon micro resonant accelerometer |
| CN106199070A (en) * | 2016-06-24 | 2016-12-07 | 东南大学 | Single anchor points support formula silicon micro-resonance type accelerometer |
| CN108008149A (en) * | 2016-10-27 | 2018-05-08 | 南京理工大学 | The self calibration silicon micro-resonance type accelerometer insensitive to stress |
| CN109164272A (en) * | 2018-10-25 | 2019-01-08 | 中北大学 | Push and pull whole differential single shaft silicon micro-resonance type accelerometer |
| CN110068705A (en) * | 2019-05-16 | 2019-07-30 | 西华大学 | A kind of micro- Micromachined Accelerometer Based on Resonant Principle of silicon with high power inertia force amplification characteristic |
| CN110803675A (en) * | 2019-11-14 | 2020-02-18 | 无锡莱斯能特科技有限公司 | Resonant MEMS pressure sensor |
| CN110865205A (en) * | 2018-08-27 | 2020-03-06 | 霍尼韦尔国际公司 | Vibrating beam accelerometer |
| CN111046578A (en) * | 2019-12-24 | 2020-04-21 | 北京航天控制仪器研究所 | Method for establishing output model by quartz vibrating beam accelerometer |
| CN111766405A (en) * | 2020-05-14 | 2020-10-13 | 东南大学 | Double-shaft silicon micro-accelerometer based on resonator energy localization effect |
| CN112710865A (en) * | 2020-12-11 | 2021-04-27 | 大连理工大学 | Adjustable acceleration sensor based on modal localization effect |
| CN112881753A (en) * | 2021-01-14 | 2021-06-01 | 南京理工大学 | Damping-adjustable silicon tuning fork resonant accelerometer structure |
| CN114577370A (en) * | 2022-05-07 | 2022-06-03 | 成都凯天电子股份有限公司 | High-precision flange plate type silicon resonance pressure sensor and manufacturing process thereof |
| CN114740224A (en) * | 2022-05-18 | 2022-07-12 | 南京工程学院 | Force balance type silicon micro-resonance accelerometer |
| CN116735911A (en) * | 2023-08-15 | 2023-09-12 | 浙江大学 | Quasi-zero stiffness MEMS accelerometer based on lever type electrostatic comb tooth design |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1844932A (en) * | 2006-05-23 | 2006-10-11 | 北京航空航天大学 | Dual-axis resonance type micromechanical accelerometer |
| CN102147423A (en) * | 2011-02-25 | 2011-08-10 | 东南大学 | Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| CN102495236A (en) * | 2011-11-24 | 2012-06-13 | 北京航空航天大学 | High-sensitivity dual-axis silicon-micro resonance accelerometer |
| CN102539832A (en) * | 2012-01-13 | 2012-07-04 | 北京航空航天大学 | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' |
| CN103250057A (en) * | 2010-11-26 | 2013-08-14 | 意法半导体股份有限公司 | Resonant biaxial accelerometer structure of the microelectromechanical type |
| CN103454449A (en) * | 2013-09-15 | 2013-12-18 | 滕金燕 | Three-axis micro-mechanical accelerometer |
-
2015
- 2015-03-27 CN CN201510142656.1A patent/CN104865406A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1844932A (en) * | 2006-05-23 | 2006-10-11 | 北京航空航天大学 | Dual-axis resonance type micromechanical accelerometer |
| CN103250057A (en) * | 2010-11-26 | 2013-08-14 | 意法半导体股份有限公司 | Resonant biaxial accelerometer structure of the microelectromechanical type |
| CN102147423A (en) * | 2011-02-25 | 2011-08-10 | 东南大学 | Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| CN102495236A (en) * | 2011-11-24 | 2012-06-13 | 北京航空航天大学 | High-sensitivity dual-axis silicon-micro resonance accelerometer |
| CN102539832A (en) * | 2012-01-13 | 2012-07-04 | 北京航空航天大学 | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' |
| CN103454449A (en) * | 2013-09-15 | 2013-12-18 | 滕金燕 | Three-axis micro-mechanical accelerometer |
Cited By (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105547531B (en) * | 2016-01-19 | 2018-07-06 | 东南大学 | A kind of highly sensitive capacitance pressure transducer, and preparation method thereof |
| CN105547531A (en) * | 2016-01-19 | 2016-05-04 | 东南大学 | High-sensitivity capacitive-type pressure sensor and manufacturing method therefor |
| CN105911309A (en) * | 2016-06-24 | 2016-08-31 | 东南大学 | Single anchor supporting-type double axis silicon micro resonant accelerometer |
| CN106199070A (en) * | 2016-06-24 | 2016-12-07 | 东南大学 | Single anchor points support formula silicon micro-resonance type accelerometer |
| CN105911309B (en) * | 2016-06-24 | 2019-01-29 | 东南大学 | Single anchor points support formula dual-axis silicon-micro resonance accelerometer |
| CN108008149A (en) * | 2016-10-27 | 2018-05-08 | 南京理工大学 | The self calibration silicon micro-resonance type accelerometer insensitive to stress |
| CN110865205A (en) * | 2018-08-27 | 2020-03-06 | 霍尼韦尔国际公司 | Vibrating beam accelerometer |
| CN109164272B (en) * | 2018-10-25 | 2020-10-27 | 中北大学 | Push-pull full-differential uniaxial silicon micro-resonant accelerometer |
| CN109164272A (en) * | 2018-10-25 | 2019-01-08 | 中北大学 | Push and pull whole differential single shaft silicon micro-resonance type accelerometer |
| CN110068705A (en) * | 2019-05-16 | 2019-07-30 | 西华大学 | A kind of micro- Micromachined Accelerometer Based on Resonant Principle of silicon with high power inertia force amplification characteristic |
| CN110803675A (en) * | 2019-11-14 | 2020-02-18 | 无锡莱斯能特科技有限公司 | Resonant MEMS pressure sensor |
| CN111046578B (en) * | 2019-12-24 | 2023-07-14 | 北京航天控制仪器研究所 | Method for building output model of quartz vibrating beam accelerometer |
| CN111046578A (en) * | 2019-12-24 | 2020-04-21 | 北京航天控制仪器研究所 | Method for establishing output model by quartz vibrating beam accelerometer |
| CN111766405A (en) * | 2020-05-14 | 2020-10-13 | 东南大学 | Double-shaft silicon micro-accelerometer based on resonator energy localization effect |
| CN111766405B (en) * | 2020-05-14 | 2022-03-11 | 东南大学 | Double-shaft silicon micro-accelerometer based on resonator energy localization effect |
| CN112710865A (en) * | 2020-12-11 | 2021-04-27 | 大连理工大学 | Adjustable acceleration sensor based on modal localization effect |
| CN112881753A (en) * | 2021-01-14 | 2021-06-01 | 南京理工大学 | Damping-adjustable silicon tuning fork resonant accelerometer structure |
| CN112881753B (en) * | 2021-01-14 | 2023-02-24 | 南京理工大学 | Damping-adjustable silicon tuning fork resonant accelerometer structure |
| CN114577370A (en) * | 2022-05-07 | 2022-06-03 | 成都凯天电子股份有限公司 | High-precision flange plate type silicon resonance pressure sensor and manufacturing process thereof |
| CN114577370B (en) * | 2022-05-07 | 2022-09-09 | 成都凯天电子股份有限公司 | High-precision flange plate type silicon resonance pressure sensor and manufacturing process thereof |
| CN114740224A (en) * | 2022-05-18 | 2022-07-12 | 南京工程学院 | Force balance type silicon micro-resonance accelerometer |
| CN114740224B (en) * | 2022-05-18 | 2024-05-07 | 南京工程学院 | Force balance type silicon micro-resonance accelerometer |
| CN116735911A (en) * | 2023-08-15 | 2023-09-12 | 浙江大学 | Quasi-zero stiffness MEMS accelerometer based on lever type electrostatic comb tooth design |
| CN116735911B (en) * | 2023-08-15 | 2023-11-28 | 浙江大学 | Quasi-zero stiffness MEMS accelerometer based on lever type electrostatic comb tooth design |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104865406A (en) | Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer | |
| CN107643423B (en) | Three-degree-of-freedom weak coupling resonant accelerometer based on modal localization effect | |
| US9310391B2 (en) | Dual and triple axis inertial sensors and methods of inertial sensing | |
| Zeimpekis et al. | Characterization of a mechanical motion amplifier applied to a MEMS accelerometer | |
| CN108375371B (en) | Four-degree-of-freedom weak coupling resonant accelerometer based on modal localization effect | |
| US10884020B2 (en) | Accelerometer | |
| Zhong et al. | The temperature drift suppression of mode-localized resonant sensors | |
| US9366687B2 (en) | Angular velocity detecting device | |
| US10330471B2 (en) | Triaxial micro-electromechanical gyroscope | |
| CN104569494A (en) | Systems and methods to determine stiction failures in MEMS devices | |
| EP0797758A1 (en) | Integrated resonant microbeam sensor and transistor oscillator | |
| FI127229B (en) | Microelectromechanical structure and device | |
| CN106030314A (en) | Accelerometers | |
| US20090139342A1 (en) | Device with detection by suspended piezoresistive strain gauge comprising a strain amplifier cell | |
| US11125632B2 (en) | Piezoresistive detection resonant device in particular with large vibration amplitude | |
| Han et al. | A low cross-axis sensitivity piezoresistive accelerometer fabricated by masked-maskless wet etching | |
| Zhao et al. | Electrostatic charge sensor based on a micromachined resonator with dual micro-levers | |
| CN103439529B (en) | Based on the silicon vibrating beam accelerometer of the integrated high precision measuring temperature structure of chip | |
| Xiao et al. | A double differential torsional micro-accelerometer based on V-shape beam | |
| Wang et al. | A universal high-sensitivity area-variation capacitive displacement transducer (CDT) based on fringe effect | |
| Hao et al. | A micromechanical mode-localized voltmeter | |
| Solai et al. | SOI structure employed area dependant capacitive MEMS accelerometer with novel C–V converter | |
| CN111812355B (en) | Low stress sensitivity silicon micro resonant accelerometer structure | |
| EP2342572B1 (en) | Current sensor and current sensing method | |
| Kinnell et al. | Physical characterisation of selective stress coupling for resonant pressure sensors |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| EXSB | Decision made by sipo to initiate substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150826 |
|
| RJ01 | Rejection of invention patent application after publication |