CN109164272B - Push-pull full-differential uniaxial silicon micro-resonant accelerometer - Google Patents
Push-pull full-differential uniaxial silicon micro-resonant accelerometer Download PDFInfo
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- CN109164272B CN109164272B CN201811249318.8A CN201811249318A CN109164272B CN 109164272 B CN109164272 B CN 109164272B CN 201811249318 A CN201811249318 A CN 201811249318A CN 109164272 B CN109164272 B CN 109164272B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
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Abstract
The invention relates to an MEMS resonant acceleration sensor, in particular to a push-pull full-differential uniaxial silicon micro-resonant acceleration sensor, which solves the problem of structural redundancy of the existing MEMS resonant acceleration sensor and adopts the following scheme: the mass block is provided with a connecting beam, a DETF resonator, a fixed anchor point and a lever mechanism in a hollow mode, the connecting beam is perpendicular to a symmetry axis, and the DETF resonator, the fixed anchor point and the lever mechanism are symmetrical along a symmetry center. The advantages are that: the structure design is ingenious, the forces acting on the resonator are equal through the lever, and the force output by the lever mechanism is not inconsistent due to the structure processing error; the structure not only realizes the differential output on frequency, but also realizes the differential output on the amplification inertia force of the lever mechanism, and one side of the connecting beam is subjected to tensile stress and the other side is subjected to compressive stress by simultaneously acting two groups of separated first-level levers, so that the amplification of the driving force on the connecting beam is effectively realized.
Description
Technical Field
The invention relates to an MEMS (micro electro mechanical system) resonant acceleration sensor, in particular to a push-pull full-differential uniaxial silicon micro-resonant accelerometer.
Background
A micromechanical resonance type acceleration sensor (MMRA) is a typical micromechanical inertia device based on a resonator, acceleration can be converted into frequency output, the error of amplitude measurement is effectively avoided, interference caused by environmental noise is reduced, and due to quasi-digital output, an interface circuit can be simplified, and transmission and processing errors are reduced. The micro-mechanical accelerometer has the characteristics of small volume, light weight, low power consumption, low cost, easy integration and batch production. The resonant acceleration sensor can be widely applied to the fields of aerospace, weapon guidance, medical science and the like, and is a high-precision acceleration sensor with wide application prospect. The specific working principle of the MMRA is that the mass block generates an inertia force under the action of acceleration, the inertia force is amplified by a certain multiple through a micro-lever structure and then transmitted to a double-end fixed tuning fork (DETF) resonator, so that the frequency of the DETF resonant beam is changed, and the acceleration value can be obtained by detecting the variation of the resonant frequency. Within a certain input acceleration range, the frequency value is in direct proportion to the input acceleration value. The input acceleration value can be calculated by detecting the variation of the natural frequency of the DETF resonator. The lever mechanisms of the existing differential resonant acceleration sensor respectively and independently act on the two DETF resonators, and because the fact that the sizes of the lever mechanisms corresponding to each DETF resonator are completely the same is difficult to guarantee in the machining process, the inertia forces borne by the two DETF resonators are inconsistent, so that errors of differential output are caused, and the measuring accuracy, the linearity and the like of the sensor are limited. Therefore, it is necessary to design a push-pull fully differential uniaxial silicon micro-resonant accelerometer to achieve differential output of frequency result and inertial force, so as to solve the problem of inconsistent stress of the differential resonant accelerometer.
Disclosure of Invention
The invention solves the problem of inconsistent stress of the existing differential resonant acceleration sensor, and provides a push-pull full-differential uniaxial silicon micro-resonant accelerometer.
The invention is realized by adopting the following technical scheme: the push-pull full-differential uniaxial silicon micro-resonant accelerometer comprises an outer frame with an axisymmetric structure, wherein mass blocks which are symmetric along the symmetry axis of the outer frame are arranged in the outer frame, and the mass blocks are connected with the outer frame through a plurality of pairs of folding beams which are symmetrically distributed along the symmetry axis of the outer frame; the mass block is hollowed with a connecting beam, two DETF resonators, four lever mechanisms, eight fixed anchor points and twelve connecting arms, and the length direction of the connecting beam is arranged along the vertical direction of the symmetry axis of the outer frame and is symmetrical about the symmetry axis; the DETF resonators are connected with two sides of the width direction of the connecting beam in a row mode along the direction of the symmetry axis of the outer frame, one end of each DETF resonator is connected with the middle point of the length direction of the connecting beam through a connecting arm, and the other end of each DETF resonator is connected with the fixed anchor point through the connecting arm; the two ends of the connecting beam are respectively provided with a fixed anchor point, four corners of the connecting beam are respectively provided with a lever mechanism, the lever mechanism comprises a lever arm arranged along the vertical direction of the symmetrical axis of the outer frame, a fulcrum beam is arranged between the lever arm and the fixed anchor point at the end of the connecting beam, an output beam is arranged between one end of the lever arm and the connecting beam, and an input beam is arranged between the other end of the lever arm and the mass block; relative to the fixed anchor points at the two ends of the connecting beam, the outer side of the lever arm in the width direction is also provided with the fixed anchor points, and connecting arms are respectively arranged between the two ends of each fixed anchor point and the mass block; the four lever mechanisms, the eight fixed anchor points and the twelve connecting arms are symmetrically distributed along the symmetrical axis of the outer frame. The outer frame and the mass block of the axisymmetric structure ensure that the inertia force borne by each mechanism at two sides of the symmetric axis is equal, when the connecting beam is subjected to the inertia force amplified or reduced in a certain proportion, only tensile stress or compressive stress is applied to the DETF resonators at two sides, and the connecting beam does not twist, namely, the inertia force borne by the input beams at two ends of the connecting beam is equal. The outer frame and the fixed anchor points are used for being bonded with an external substrate, supporting and fixing the mass block and the DETF resonator, and meanwhile, the fixed anchor points at two ends of the connecting beam also provide fixed supporting points for a fulcrum beam of the lever mechanism. The lever mechanism amplifies the inertia force of the mass block in a certain proportion and then applies the amplified inertia force to the connecting beam. The connecting beam applies the received inertia force to the DETF resonators on two sides, so that the DETF resonators deform and the natural frequency of the DETF resonators is changed. The resonance frequency of the DETF resonator on one side is increased, the resonance frequency of the DETF resonator on the other side is reduced, the differential frequency of the DETF resonator and the signal is output differentially, and the differential frequency value and the input acceleration are in a direct proportion relation within a certain acceleration range, so that the acceleration in the sensitive direction and the direction of the symmetry axis of the outer frame can be obtained.
The outer frame and the mass block are of a central axis symmetric structure, and the connecting beam, the DETF resonator, the fixed anchor point and the lever mechanism are symmetrically distributed along a symmetric center. The central shaft symmetric structure ensures that the amplification ratios of the four lever mechanisms to the inertia force are the same, and simultaneously eliminates the stress influence of the non-sensitive direction (left and right direction) of the sensor caused by the asymmetric structure of the mass blocks at the two sides of the connecting beam as far as possible, thereby reducing the measurement error.
The input beam is located outside the lever arm in the width direction. The input beam is located outside the lever arm to ensure that the input beam is subjected to more uniform inertial forces.
The invention has the following advantages: the tensile stress or the compressive stress acting on the two DETF resonators is caused by the displacement of the same connecting beam through skillful design, so that the forces acting on the resonators are completely equal, and the inconsistency of the force output by the lever mechanism caused by the structural machining error is avoided; secondly, the structure not only realizes the differential output on the frequency, but also realizes the differential output on the amplifying inertia force of the lever mechanism, and the two groups of separated first-level levers simultaneously act on the connecting beam to ensure that one side of the connecting beam is subjected to tensile stress and the other side of the connecting beam is subjected to compressive stress, thereby effectively realizing the amplification of the driving force on the connecting beam.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1;
in the figure: 1-outer frame, 2-mass block, 3-folding beam, 4-connecting beam, 5-DETF resonator, 6-fixed anchor point, 7-connecting arm, 8-lever arm, 9-fulcrum beam, 10-output beam and 11-input beam.
Detailed Description
The push-pull full-differential uniaxial silicon micro-resonant accelerometer comprises an outer frame 1 with an axisymmetric structure, wherein mass blocks 2 symmetrical along the symmetry axis of the outer frame 1 are arranged in the outer frame 1, and the mass blocks 2 are connected with the outer frame 1 through a plurality of pairs of folding beams 3 symmetrically distributed along the symmetry axis of the outer frame 1; the mass block 2 is hollowed with a connecting beam 4, two DETF resonators 5, four lever mechanisms, eight fixed anchor points 6 and twelve connecting arms 7, and the length direction of the connecting beam 4 is arranged along the vertical direction of the symmetry axis of the outer frame 1 and is symmetrical about the symmetry axis; the DETF resonators 5 are connected to two sides of the width direction of the connecting beam 4 in a row along the direction of the symmetry axis of the outer frame 1, one end of each DETF resonator is connected with the middle point of the connecting beam 4 in the length direction through a connecting arm 7, and the other end of each DETF resonator is connected with a fixed anchor point 6 through the connecting arm 7; fixing anchor points 6 are respectively arranged at two ends of the connecting beam 4, lever mechanisms are respectively arranged at four corners of the connecting beam 4, each lever mechanism comprises a lever arm 8 arranged in the vertical direction of the symmetrical axis of the outer frame 1, a fulcrum beam 9 is arranged between each lever arm 8 and the fixing anchor point 6 at the end of the connecting beam 4, an output beam 10 is arranged between one end of each lever arm 8 and the connecting beam 4, and an input beam 11 is arranged between the other end of each lever arm 8 and the mass block 2; relative to the fixed anchor points 6 at the two ends of the connecting beam 4, the outer side of the lever arm 8 in the width direction is also provided with the fixed anchor points 6, and connecting arms 7 are arranged between the two ends of each fixed anchor point 6 and the mass block 2; the four lever mechanisms, the eight fixed anchor points 6 and the twelve connecting arms 7 are symmetrically distributed along the symmetrical axis of the outer frame 1.
In specific implementation, the outer frame 1 and the mass block 2 are of a central axis symmetric structure, and the connecting beam 4, the DETF resonator 5, the fixed anchor point 6 and the lever mechanism are symmetrically distributed along a symmetric center. The input beam 11 is located outside the lever arm 8 in the width direction.
When the fixing device is installed and used, the lower surfaces of the outer frame 1 and the eight fixing anchor points 6 are bonded with an external substrate. When there is no acceleration input, the comb resonator 5 operates in a mode of its own natural frequency. When acceleration is input in the sensitive direction of the invention, namely the direction parallel to the symmetry axis of the outer frame 1, the mass block 2 displaces under the action of inertia force, the inertia force is exerted on the lever arm 8 through the input beam 11, the fulcrum beam 9 supported by the fixed anchor point 6 provides fulcrum action, after the inertia force is amplified in equal proportion through the lever arm 8, the inertia force is exerted on the connecting beam 4 through the output beam 10, at the moment, the connecting beam 4 is acted by the output beams 10 of the four lever mechanisms, and the inertia forces are equal in magnitude and same in direction. The connecting beam 4 transmits inertia force to the two DETF resonators 5 on both sides, so that one of the two DETF resonators is in tension stress, the other DETF resonator is in compression stress, the force is the same in magnitude and the direction is the same. The DETF resonator 5 is deformed under a stress state, and its natural frequency changes. The resonant frequencies of the two signals are respectively increased and decreased, and the differential frequency of the two signals can be obtained through signal differential output, wherein the differential frequency value is in a direct proportion relation with the input acceleration within a certain acceleration range. Acceleration in the sensitive direction can thus be obtained. The ratio of the input force arm to the output force arm of the lever mechanism can be adjusted by a person skilled in the art according to actual needs, so that the proportion of the amplification of the inertia force can be adjusted.
Claims (3)
1. A push-pull full-differential single-axis silicon micro-resonant accelerometer comprises an outer frame (1) with an axisymmetric structure, wherein mass blocks (2) which are symmetric along the symmetry axis of the outer frame (1) are arranged in the outer frame (1), and the mass blocks (2) are connected with the outer frame (1) through a plurality of pairs of folding beams (3) which are symmetrically distributed along the symmetry axis of the outer frame (1); the method is characterized in that: the mass block (2) is hollowed with a connecting beam (4), two DETF resonators (5), four lever mechanisms, eight fixed anchor points (6) and twelve connecting arms (7), and the length direction of the connecting beam (4) is arranged along the vertical direction of the symmetry axis of the outer frame (1) and is symmetrical about the symmetry axis; the DETF resonators (5) are arranged on two sides of the width direction of the connecting beam (4) in a row along the direction of the symmetry axis of the outer frame (1), one end of each DETF resonator is connected with the middle point of the connecting beam (4) in the length direction through a connecting arm (7), and the other end of each DETF resonator is connected with a fixed anchor point (6) through the connecting arm (7); fixing anchor points (6) are respectively arranged at two ends of the connecting beam (4), lever mechanisms are respectively arranged at four corners of the connecting beam (4), each lever mechanism comprises a lever arm (8) arranged in the vertical direction of the symmetry axis of the outer frame (1), a fulcrum beam (9) is arranged between each lever arm (8) and the fixing anchor point (6) at the end of the connecting beam (4), an output beam (10) is arranged between one end of each lever arm (8) and the connecting beam (4), and an input beam (11) is arranged between the other end of each lever arm (8) and the mass block (2); relative to the fixed anchor points (6) at the two ends of the connecting beam (4), the outer side of the lever arm (8) in the width direction is also provided with the fixed anchor points (6), and connecting arms (7) are arranged between the two ends of the fixed anchor points (6) and the mass block (2) respectively; the four lever mechanisms, the eight fixed anchor points (6) and the twelve connecting arms (7) are symmetrically distributed along the symmetry axis of the outer frame (1).
2. The push-pull fully differential uniaxial silicon micro-resonant accelerometer of claim 1, wherein: the outer frame (1) and the mass block (2) are of a central axis symmetric structure, and the connecting beam (4), the DETF resonator (5), the fixed anchor point (6) and the lever mechanism are symmetrically distributed along a symmetric center.
3. The push-pull fully differential uniaxial silicon micro-resonant accelerometer according to claim 1 or 2, wherein: the input beam (11) is positioned outside the lever arm (8) in the width direction.
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| CN111289156B (en) * | 2020-02-26 | 2021-05-28 | 西安交通大学 | Differential silicon micro-resonance type pressure sensor based on electrostatic excitation piezoresistive detection |
| CN111830281B (en) * | 2020-07-20 | 2021-10-01 | 华中科技大学 | Arched resonator and MEMS accelerometer for resonant MEMS sensor |
| CN112131768B (en) * | 2020-09-09 | 2023-09-05 | 中国矿业大学(北京) | Resonant accelerometer optimization method based on modes and frequencies |
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| US5969249A (en) * | 1997-05-07 | 1999-10-19 | The Regents Of The University Of California | Resonant accelerometer with flexural lever leverage system |
| CN1844931A (en) * | 2006-05-23 | 2006-10-11 | 北京航空航天大学 | Resonance type micromechanical accelerometer |
| CN101963624A (en) * | 2010-09-27 | 2011-02-02 | 南京理工大学 | Silicon micro-resonant accelerometer |
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| US5969249A (en) * | 1997-05-07 | 1999-10-19 | The Regents Of The University Of California | Resonant accelerometer with flexural lever leverage system |
| CN1844931A (en) * | 2006-05-23 | 2006-10-11 | 北京航空航天大学 | Resonance type micromechanical accelerometer |
| CN101963624A (en) * | 2010-09-27 | 2011-02-02 | 南京理工大学 | Silicon micro-resonant accelerometer |
| CN104865406A (en) * | 2015-03-27 | 2015-08-26 | 东南大学 | Lever-amplification-principle-based dual-shaft full-decoupling silicone micro-resonator type accelerometer |
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