CN1844931A - Resonance type micromechanical accelerometer - Google Patents
Resonance type micromechanical accelerometer Download PDFInfo
- Publication number
- CN1844931A CN1844931A CN 200610011956 CN200610011956A CN1844931A CN 1844931 A CN1844931 A CN 1844931A CN 200610011956 CN200610011956 CN 200610011956 CN 200610011956 A CN200610011956 A CN 200610011956A CN 1844931 A CN1844931 A CN 1844931A
- Authority
- CN
- China
- Prior art keywords
- mass
- resonance
- tuning fork
- girder
- resonance type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Landscapes
- Pressure Sensors (AREA)
Abstract
The invention discloses a resonance micro chemical accelerometer, which comprises a basic plate, a weigh block, a suspend beam, a lever amplifying device, a sound fork, a driving electrode, a detecting electrode, a tooth axle and a backstop. Wherein, said structure is axial symmetry; the weight block is circle whose middle part is mounted with a suspend beam, a lever amplifying device, a sound fork, a driving electrode, a detecting electrode, a tooth axle and a backstop; the backstop is outside the weight block; the circle shape of weight block can make the element own larger weight block in limited volume; the resonance beam has two ends to be fixed with sound forks, while two ends are connected to the outer element with narrow necks, to effectively reduce the energy couple between the resonance beam and outer structure; two symmetry sound forks can realize differential output of resonance frequency. The invention can improve the sensitivity, resolution and detecting accuracy of accelerometer.
Description
Technical field
The present invention relates to a kind of resonance type micromechanical accelerometer, belong to the micro mechanical sensor field in the micro-electromechanical system (MEMS), it is widely used in fields such as automotive electronics, Aero-Space, weaponry as little inertia device.
Background technology
MEMS is in developing period, and its technology and market is prematurity still all, but its wide development prospect that breeds and huge social, economic benefit are that common people know altogether, and micro-mechanical accelerometer is wherein the most successful representative.The research of micro-mechanical accelerometer starts from early 1970s, various ways such as existing pressure resistance type, condenser type, piezoelectric type, force balance type, thermal convection formula, resonant mode and tunnel current formula.With all multi-form comparing, what resonance type micromechanical accelerometer was exported is frequency signal, and this accurate digital signal has very high antijamming capability and stability, is not prone to distortion in the transmission, and signal does not need the conversion through A/D, directly links to each other with digital processing unit.Resonance type micromechanical accelerometer is a kind of high-precision accelerometer, and bright development prospect is arranged.The resonance type micromechanical accelerometer product of existing short run abroad occurs, and also in continuing development, also is in the laboratory model machine stage at home, also has certain distance apart from industrialization.Existing resonance type micromechanical accelerometer is made up of resonance beam and responsive mass, acceleration is converted into inertial force through responsive mass, inertial force acts on the axial of resonance beam, and the resonance frequency of resonance beam is changed, and extrapolates by measuring acceleration by measuring resonance frequency.Present resonance type micromechanical accelerometer product mostly is middle precision, sensitivity, resolution can't reach the requirement of inert stage, seriously restrict its range of application, improving the accelerometer performance is exactly to realize high sensitivity, low noise, low drift and big dynamic range.The micro-mechanical accelerometer performance mainly is subjected to the influence of factors such as processing technology, signal deteching circuit, structure, and the present invention proposes a kind of resonance type micromechanical accelerometer of novel structure, and it is easy to realize high-precision acceleration analysis.
Summary of the invention
Technology of the present invention is dealt with problems: overcome the deficiencies in the prior art, a kind of highly sensitive resonance type micromechanical accelerometer is provided, to solve existing micro-mechanical accelerometer sensitivity, the not high enough problem of resolution.
Technical scheme of the present invention: a kind of highly sensitive resonance type micromechanical accelerometer is characterized in that: the tuning fork, drive electrode, detecting electrode, the tooth pivot that comprise the lever enlarger of substrate, mass, semi-girder, two symmetries, two symmetries; Mass be in structure around, be " returning " font, the centre of mass is a semi-girder, the two ends and the mass of semi-girder are connected, the centre of semi-girder is connected by anchor point and substrate; Be furnished with two resonance beam with rotational symmetry, each resonance beam adopts the fixedly form of tuning fork of both-end, the two ends of tuning fork all are connected with leverage with anchor point respectively by thin neck structure, in the middle both sides of each tuning fork the tooth pivot are arranged, and the broach of tooth pivot both sides constitutes drive electrode and detecting electrode.
In addition, the peripheral symmetric design of mass has two backstops, can realize overload protection effectively, prevents elastic support structure fracture under stronger impact.
The present invention's advantage compared with prior art is: mass of the present invention adopts the design of " returning " font, and this makes element can realize making acceleration efficiently be converted into inertial force by bigger mass under limited bulk; Resonance beam adopts the fixedly form of tuning fork of both-end, and the tuning fork two ends are connected by thin neck structure and anchor point and leverage, and the energy that reduces tuning fork and peripheral structure effectively is coupled; The structural parameters high conformity of two tuning forks of symmetric arrangement is realized the differential output of resonance frequency effectively; The static driven of broach offset, capacitive detecting structure can be realized higher drive strength and detection sensitivity, have good manufacturability simultaneously.
In a word, version of the present invention has improved sensitivity, the resolution of accelerometer, is easy to realize high-precision measurement.
Description of drawings
Fig. 1 is a planar structure synoptic diagram of the present invention.
Embodiment
As shown in Figure 1, the present invention includes tuning fork 17,27, drive electrode, detecting electrode, the tooth pivot 18,28 of 13,23, two symmetries of lever enlarger of substrate 1, mass 2, semi-girder 21, two symmetries, total is a zhou duicheng tuxing.Mass 2 is " returning " font, is semi-girder 21, two 13,23, two tuning forks 17,27 of lever enlarger and tooth pivot 18,28, drive electrode, detecting electrode in the middle of the mass 2.Mass 2 peripheries are two backstops 12,22.Mass 2 designs of " returning " font make at element and can realize bigger mass under the limited bulk, make acceleration efficiently be converted into inertial force.Leverage 13 amplifies rod members by three grades to be formed, and anchor point on the leverage 13 11,14,15,20 is connected with substrate by bonding, and leverage 13 1 ends are connected with mass 2, and the other end is connected with neck structure 16 carefully, and leverage 23 and leverage 13 are in like manner.Resonance beam adopts the fixedly form of tuning fork 17,27 of both-end, the two ends of tuning fork 17 are that the thin neck structure 16,19 of 4 μ m and leverage 13 and anchor point 24 are connected by width, tuning fork 27 and tuning fork 17 in like manner, the energy that the structure of this resonance beam effectively reduces tuning fork 17,27 and peripheral structure is coupled.The structural parameters high conformity of two tuning forks 17,27 of symmetric arrangement can be realized the differential output of resonance frequency effectively.Be connected with substrate 1 by anchor point 24 in the middle of the semi-girder 21, the two ends of semi-girder 21 and mass 2 are connected.The comb-tooth-type drive electrode of tuning fork 17,27 both sides, detecting electrode are realized static driven and capacitance detecting. Backstop 12,22 in the peripheral symmetric arrangement of mass can realize overload protection effectively, prevents elastic support structure fracture under stronger impact.
The course of work of the present invention: the present invention is converted into inertial force by responsive quality degree of will speed up, and it is axial that inertial force acts on resonance beam, causes that the resonance frequency of resonance beam changes, and is extrapolated by measuring acceleration by the resonance frequency that records.As Fig. 1, when the vertical direction acceleration is imported, the inertial force that mass 2 produces makes semi-girder 21 that the vertical direction distortion take place, inertial force amplifies through leverage 13 and 23, be applied to tuning fork 17,27 axially, make tuning fork 17,27 1 are born tension, one is born compressive stress, increased by the resonance frequency of the tuning fork of tension, the resonance frequency of the tuning fork of compression chord effect reduces, the difference that detects two resonance frequencies is as output, utilize tuning fork 17, the comb structure electrode of both sides is realized differential static driving and capacitor vibration pick-up in the middle of 27, is calculated by measuring acceleration by the resonance frequency that records.
In sum, the present invention proposes a kind of resonance type micromechanical accelerometer of novel structure form, its volume is little, in light weight, can realize high sensitivity, high-resolution acceleration analysis, has opened up the application of this class accelerometer in the high precision field.
Claims (4)
1, a kind of resonance type micromechanical accelerometer, it is characterized in that: the lever enlarger, the tuning fork of two symmetries, drive electrode, the detecting electrode that comprise substrate, mass, semi-girder, two symmetries, mass be in structure around, be " returning " font, the centre of mass is a semi-girder, the two ends and the mass of semi-girder are connected, and the centre of semi-girder is connected by anchor point and substrate; Be furnished with two resonance beam with rotational symmetry, each resonance beam adopts the fixedly form of tuning fork of both-end, the two ends of tuning fork are connected with anchor point and leverage respectively by thin neck structure, in the both sides of each tuning fork the tooth pivot are arranged, and the broach of tooth pivot both sides constitutes drive electrode and detecting electrode.
2, a kind of resonance type micromechanical accelerometer according to claim 1, it is characterized in that: described leverage amplifies rod member by three grades and forms, leverage is connected with the substrate bonding by four anchor points, one end of leverage is connected with mass, and the other end is connected with the thin neck structure of tuning fork.
3, a kind of resonance type micromechanical accelerometer according to claim 1 is characterized in that: the peripheral symmetric design of described mass has backstop.
4, a kind of resonance type micromechanical accelerometer according to claim 1 is characterized in that: the tuning fork structure parameter of described two symmetries is identical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610011956 CN1844931A (en) | 2006-05-23 | 2006-05-23 | Resonance type micromechanical accelerometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200610011956 CN1844931A (en) | 2006-05-23 | 2006-05-23 | Resonance type micromechanical accelerometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1844931A true CN1844931A (en) | 2006-10-11 |
Family
ID=37063874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200610011956 Pending CN1844931A (en) | 2006-05-23 | 2006-05-23 | Resonance type micromechanical accelerometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1844931A (en) |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101294824B (en) * | 2007-04-25 | 2010-08-18 | 中国科学院电子学研究所 | Electromagnetic micro-torsional pendulum resonant vibration type sensor based on micro-electronic mechanical skill |
| CN102147423A (en) * | 2011-02-25 | 2011-08-10 | 东南大学 | Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| CN102156194A (en) * | 2011-03-07 | 2011-08-17 | 东南大学 | Stop structure of accelerometer |
| CN102243251A (en) * | 2011-04-25 | 2011-11-16 | 东南大学 | Micromechanical silicon resonant accelerometer with different resonant frequencies |
| CN102435777A (en) * | 2011-11-02 | 2012-05-02 | 重庆理工大学 | Silicon microcapacitor type two-dimensional integrated acceleration sensor |
| CN102435779A (en) * | 2011-11-02 | 2012-05-02 | 重庆理工大学 | Silicon micro-capacitive two-dimensional acceleration sensor |
| CN102539832A (en) * | 2012-01-13 | 2012-07-04 | 北京航空航天大学 | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' |
| CN103256927A (en) * | 2012-02-21 | 2013-08-21 | 北京自动化控制设备研究所 | Quartz tuning fork stopper structure manufacturing method |
| CN103278660A (en) * | 2013-05-22 | 2013-09-04 | 南京信息工程大学 | Difference resonant micro accelerometer and driving method thereof |
| CN103901227A (en) * | 2014-04-02 | 2014-07-02 | 清华大学 | Silicon micro-resonant type accelerometer |
| CN105259371A (en) * | 2015-10-19 | 2016-01-20 | 北京航天控制仪器研究所 | Novel inertia force amplification mechanism of silicon-micro resonant accelerometer |
| CN105606845A (en) * | 2015-12-23 | 2016-05-25 | 北京航空航天大学 | Dual-mass-block high sensitivity silicon micro resonant accelerometer structure based on two-level micro-levers |
| CN106405153A (en) * | 2015-05-29 | 2017-02-15 | 罗伯特·博世有限公司 | Micromechanical acceleration sensor |
| CN108732382A (en) * | 2018-06-22 | 2018-11-02 | 西安交通大学 | With flexible amplification mechanism based on SOQ quartz vibration beam accelerometer chips |
| CN108801247A (en) * | 2018-06-04 | 2018-11-13 | 中北大学 | A kind of resonance type micro accelerometer isosceles right triangle array structure of Low Drift Temperature |
| CN109164272A (en) * | 2018-10-25 | 2019-01-08 | 中北大学 | Push and pull whole differential single shaft silicon micro-resonance type accelerometer |
| CN111960374A (en) * | 2020-06-05 | 2020-11-20 | 东南大学 | PT symmetrical vertical movement micro-electro-mechanical system |
-
2006
- 2006-05-23 CN CN 200610011956 patent/CN1844931A/en active Pending
Cited By (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101294824B (en) * | 2007-04-25 | 2010-08-18 | 中国科学院电子学研究所 | Electromagnetic micro-torsional pendulum resonant vibration type sensor based on micro-electronic mechanical skill |
| CN102147423A (en) * | 2011-02-25 | 2011-08-10 | 东南大学 | Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| CN102147423B (en) * | 2011-02-25 | 2012-06-13 | 东南大学 | Dual-axle integrated fully-coupled silicon micro-resonance type accelerometer |
| CN102156194A (en) * | 2011-03-07 | 2011-08-17 | 东南大学 | Stop structure of accelerometer |
| CN102156194B (en) * | 2011-03-07 | 2012-04-11 | 东南大学 | Stop structure of accelerometer |
| CN102243251A (en) * | 2011-04-25 | 2011-11-16 | 东南大学 | Micromechanical silicon resonant accelerometer with different resonant frequencies |
| CN102435777A (en) * | 2011-11-02 | 2012-05-02 | 重庆理工大学 | Silicon microcapacitor type two-dimensional integrated acceleration sensor |
| CN102435779A (en) * | 2011-11-02 | 2012-05-02 | 重庆理工大学 | Silicon micro-capacitive two-dimensional acceleration sensor |
| CN102435779B (en) * | 2011-11-02 | 2012-10-03 | 重庆理工大学 | Silicon micro-capacitive two-dimensional acceleration sensor |
| CN102435777B (en) * | 2011-11-02 | 2012-10-31 | 重庆理工大学 | Silicon microcapacitor type two-dimensional integrated acceleration sensor |
| CN102539832A (en) * | 2012-01-13 | 2012-07-04 | 北京航空航天大学 | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' |
| CN102539832B (en) * | 2012-01-13 | 2013-04-24 | 北京航空航天大学 | Biaxially-resonant silicon-micromachined accelerometer structure in shape of Chinese character 'tian' |
| CN103256927A (en) * | 2012-02-21 | 2013-08-21 | 北京自动化控制设备研究所 | Quartz tuning fork stopper structure manufacturing method |
| CN103256927B (en) * | 2012-02-21 | 2015-12-09 | 北京自动化控制设备研究所 | A kind of manufacture method of quartz tuning-fork stop configurations |
| CN103278660A (en) * | 2013-05-22 | 2013-09-04 | 南京信息工程大学 | Difference resonant micro accelerometer and driving method thereof |
| CN103901227A (en) * | 2014-04-02 | 2014-07-02 | 清华大学 | Silicon micro-resonant type accelerometer |
| CN106405153A (en) * | 2015-05-29 | 2017-02-15 | 罗伯特·博世有限公司 | Micromechanical acceleration sensor |
| CN105259371A (en) * | 2015-10-19 | 2016-01-20 | 北京航天控制仪器研究所 | Novel inertia force amplification mechanism of silicon-micro resonant accelerometer |
| CN105606845A (en) * | 2015-12-23 | 2016-05-25 | 北京航空航天大学 | Dual-mass-block high sensitivity silicon micro resonant accelerometer structure based on two-level micro-levers |
| CN108801247B (en) * | 2018-06-04 | 2020-08-14 | 中北大学 | Low-temperature-drift resonant micro-accelerometer isosceles right-angle triangular array structure |
| CN108801247A (en) * | 2018-06-04 | 2018-11-13 | 中北大学 | A kind of resonance type micro accelerometer isosceles right triangle array structure of Low Drift Temperature |
| CN108732382A (en) * | 2018-06-22 | 2018-11-02 | 西安交通大学 | With flexible amplification mechanism based on SOQ quartz vibration beam accelerometer chips |
| CN109164272A (en) * | 2018-10-25 | 2019-01-08 | 中北大学 | Push and pull whole differential single shaft silicon micro-resonance type accelerometer |
| CN109164272B (en) * | 2018-10-25 | 2020-10-27 | 中北大学 | Push-pull full-differential uniaxial silicon micro-resonant accelerometer |
| CN111960374A (en) * | 2020-06-05 | 2020-11-20 | 东南大学 | PT symmetrical vertical movement micro-electro-mechanical system |
| CN111960374B (en) * | 2020-06-05 | 2023-10-03 | 东南大学 | PT symmetrical vertical micro electro mechanical system |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1844931A (en) | Resonance type micromechanical accelerometer | |
| CN100567993C (en) | A kind of dual-axis resonance type micromechanical accelerometer | |
| CN101303365B (en) | Resonance type micro accelerometer | |
| CN100483136C (en) | Dual-axis capacitance type micromechanical accelerometer | |
| CN100483137C (en) | Capacitance type micromechanical accelerometer | |
| CN101303234A (en) | Self-decoupling high-sensitivity resonance silicon micro mechanical gyroscope | |
| CN102495236A (en) | High-sensitivity dual-axis silicon-micro resonance accelerometer | |
| CN101067555B (en) | Force balancing resonance micro-mechanical gyro | |
| CN102243251B (en) | Micromechanical silicon resonant accelerometer with different resonant frequencies | |
| CN102109534B (en) | Two-axis resonant silicon micro-accelerometer | |
| CN102778583B (en) | Silicon substrate-based quartz resonance acceleration sensor chip with four-beam structure | |
| CN101504426B (en) | Comb condenser type dual-spindle accelerometer | |
| CN101324434A (en) | High performance micro-mechanical gyroscope of resonance silicon | |
| CN106771358A (en) | A kind of full quartz resonance accelerometer of miniature differential formula | |
| CN102749479B (en) | Vertical axis silicon micro resonant mode accelerometer based on negative stiffness effect | |
| CN201796049U (en) | Silicon micro resonant accelerometer | |
| CN109164272B (en) | Push-pull full-differential uniaxial silicon micro-resonant accelerometer | |
| CN103439529A (en) | Silicon-vibrating-beam accelerometer based on chip-type integrated high-precision temperature measurement structure | |
| CN100465088C (en) | Phi-shaped resonant micromechanical silicon pressure sensor | |
| CN106443068B (en) | Torsional differential quartz resonance acceleration sensor chip | |
| CN106771359A (en) | A kind of quartzy integral type Micromachined Accelerometer Based on Resonant Principle | |
| CN101839923A (en) | Two-axis accelerometer based on SOI technology | |
| CN201984082U (en) | Biaxial resonant silicon micro- accelerometer | |
| CN110017921A (en) | A kind of probe-type high-precision force sensor based on quartz resonator | |
| CN201605163U (en) | High-capacitance micro inertial sensor with comb-shaped damping holes |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C12 | Rejection of a patent application after its publication | ||
| RJ01 | Rejection of invention patent application after publication |
Open date: 20061011 |