CN103278660A - Difference resonant micro accelerometer and driving method thereof - Google Patents
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Abstract
本发明涉及一种差分谐振式微加速度计及其驱动方法，属于微机械传感器的技术领域。加速度计机械结构层包括两个单元。每个单元都包括第一音叉结构，两个质量块系统，质量块系统包括质量块，两根垂直梁。两个质量块系统都有一根与第一音叉结构连接的垂直梁，两根垂直梁构成第二音叉结构，第一音叉结构在X轴方向的刚度小于第二音叉结构在X轴方向的刚度，增加了结构振动稳定性，降低了灵敏度对制造误差的依赖度，抑制对称性误差。驱动方法通过控制加载在驱动电极上的电压来调节两个单元工作在不同模态，取两个单元中相同运动方向的质量块系统谐振频率实现差频输出，避免了传统驱动方式难以兼顾测量响应时间和测量带宽的缺陷。
The invention relates to a differential resonant micro accelerometer and a driving method thereof, belonging to the technical field of micromechanical sensors. The accelerometer mechanical layer consists of two units. Each unit includes a first tuning fork structure, two mass block systems, the mass block system includes mass blocks, and two vertical beams. Both mass block systems have a vertical beam connected to the first tuning fork structure, the two vertical beams form the second tuning fork structure, the stiffness of the first tuning fork structure in the X-axis direction is smaller than the stiffness of the second tuning fork structure in the X-axis direction, Increased structural vibration stability, reduced dependence of sensitivity on manufacturing errors, and suppressed symmetry errors. The driving method adjusts the two units to work in different modes by controlling the voltage loaded on the driving electrodes, and takes the resonance frequency of the mass block system in the same moving direction in the two units to realize the difference frequency output, avoiding the difficulty of taking into account the measurement response in the traditional driving method Time and measurement bandwidth imperfections.
Description
Technical field
The present invention relates to a kind of difference resonance type micro accelerometer and driving method thereof, belong to the technical field of micro mechanical sensor.
Background technology
Micro-mechanical accelerometer is one of device the most successful in the MEMS (micro electro mechanical system), has wide practical use with civil area military, is breeding huge social benefit and economic benefit, and improving performance index is the research emphasis in present micro-mechanical accelerometer field.Resonance type micromechanical accelerometer is by detecting the measurement that the mechanical resonator change of resonance frequency realizes acceleration, be characterized in good stability, precision height, its outstanding advantage is direct output frequency signal, and transmission course is difficult for distortion, easy and digital circuit interface.
At present, silicon micro-resonance type accelerometer mainly contains based on two kinds of axial stress and static negative stiffnesses, wherein generally formed by resonance beam and responsive mass based on the resonance type micro accelerometer of axial stress, acceleration is converted to inertial force through responsive mass, inertial force directly or through the frequency that axially makes resonance beam that force amplificatory structures such as lever act on resonance beam changes, and extrapolates by measuring acceleration by the test resonance frequency.As the brave silicon micro-resonance type accelerometer that waited at former research of the Chen De of IEAS in 2005, propose a kind of micro-mechanical silicon resonance beam accelerometer, two kinds of coupling coefficient of proposition such as the Qiu An of Institutes Of Technology Of Nanjing duckweed in 2010 are little, strong shock resistance, the silicon micro-resonance type accelerometer that is easy to realize.In order to improve sensitivity, little lever that above-mentioned 3 kinds of micromachine resonant accelerometers have all adopted inertial force to amplify, but because the singularity of micro fabrication, the power amplification efficient of little lever is low, and its repeatability and impact resistance are all poor, and sensitivity changes in time and descends soon, accelerometer response is bigger to the dependence of fabrication error, once flow, performance is difficult to adjust, and the accelerometer of design is difficult to guarantee to reach estimated performance.
Electrostatic stiffness resonance type accelerometer principle is that acceleration is converted to inertial force through responsive mass, inertial force will bring the motion that detects quality and adhere to broach, detecting under the voltage effect, detect electric capacity and will produce the static driving force to the beam that shakes, thereby produce equivalent electrostatic stiffness, influenced the global stiffness of the beam that shakes.Can regulate the sensitivity of accelerometer by changing the detection voltage that loads,, have the adjustable dirigibility of sensitivity than the resonance type micro accelerometer based on the axial stress sensitivity.Southwest Jiaotong University and the Zhou Wu (Zhou Wu of Electronic Engineering Inst., China Engineering Physics Inst, He Xiaoping, Su Wei, Li Bailin, the design " sensor and micro-system " of the beautiful dead point rigidity of Chen Li formula resonance micro-acceleration gauge, 2009, Vol.28, No.6), Liu Heng (the Liu Heng of Nanjing Information engineering Univ, Liu Qing Earnest, Zhang Jiahong, a kind of CN:202562949U of resonance type micro accelerometer Nanjing Information engineering Univ based on electrostatic stiffness of Li Min) all designed a kind of resonance type micro accelerometer based on electrostatic stiffness, accelerometer include in the plane both-end fixedly tuning fork and folded beam support two detect masses, one group of folded beam supports one and detects mass, a tuning fork beam supports the resonant mass gauge block, and acceleration is horizontal vibration in face.The displacement size of the resonant mass gauge block that detection capacity plate antenna size and the acceleration that folded beam connects causes is relevant, and the displacement size of resonant mass gauge block is relevant with the rigidity of tuning fork beam again.The calculating of the static driving force of resonant mass gauge block need be considered the variation of the driving capacitance size that acceleration change causes.So, in when design, the tuning fork beam that needs restraint in the rigidity of direction of vibration much larger than the equidirectional rigidity of folded beam.
The Yang Bo of Southeast China University, Huang Libin, Wang Shourong etc. have invented a kind of three integrated silicon micro-resonance type accelerometers (Yang Bo, Huang Libin, Wang Shourong, Li Hongsheng, the bright three integrated silicon micro-resonance type accelerometer CN:102147424A of Southeast China University of Chen Weiwei, Li Xiu), single-axis accelerometer in this invention is measured acceleration by the torsional resonances formula, comprise inside and outside two frameworks, internal and external frame respectively supports by one group of brace summer.In the design, require two groups of brace summer coupling stiffness little, just need two groups of beams vertical like this on layout, accelerometer can only adopt capacity plate antenna to drive, and has increased the non-linear of static driving force.
Above-mentioned two kinds of electrostatic stiffness resonance type micro accelerometers all do not consider to measure corresponding time and the bandwidth of acceleration, and under Vacuum Package, translation vibration acceleration meter has the fast corresponding time, but measure the limited bandwidth of acceleration.The torsional resonances accelerometer damping that declines is big, and it is good to measure the accelerometer bandwidth, but the response time is slow, and resonance frequency is drifted about greatly with variation of temperature.
Analyze as can be known, all there is different shortcomings in existing electrostatic stiffness resonance type micro accelerometer, under current silicon micro mechanical fabrication process condition, is difficult to realize the acceleration analysis of quick, big bandwidth.
Static drives and is widely used in the micro-mechanical capacitance type sensor, the static of micromachine resonant accelerometer drives in conjunction with concrete micro-acceleration gauge structure to be carried out, do not have the micromachine resonant accelerometer to take into account simultaneously at present and measure the response time and measure bandwidth, just do not have type of drive to take into account the measurement response time simultaneously yet and measure bandwidth to be fit to difference frequency output again.
Summary of the invention
Technical matters to be solved by this invention is the deficiency at the above-mentioned background technology, and a kind of difference resonance type micro accelerometer and corresponding driving method thereof are provided.
The present invention adopts following technical scheme for solving the problems of the technologies described above:
A kind of difference resonance type micro accelerometer, comprise glass pedestal, be bonded in the physical construction layer on the glass pedestal, with the gold electrode layer that sputters on the glass pedestal as signal lead, described physical construction layer comprises two unit of parallel placement, described two unit be structure identical from symmetrical structure; Each unit comprises first tuning fork structure, two mass system, wherein, described two mass system horizontal distribution are in the first tuning fork structure both sides, each mass system comprises: mass, two vertical beams, described two vertical beam levels are connected the mass both sides, described two mass system respectively have a vertical beam to be connected with first tuning fork structure, two vertical beams that are connected with first tuning fork structure constitute second tuning fork structure, described first tuning fork structure in the rigidity of X-direction less than the rigidity of second tuning fork structure in X-direction.
In described a kind of difference resonance type micro accelerometer, the hollow out zone that mass has three linear array and spacing to equate, be embedded with successively in described three hollow out zones driving comb to, fixed fingers flat board, to drive detection comb right.
The driving method of described a kind of difference resonance type micro accelerometer comprises the steps:
Step 1, apply driving voltage for a unit: driving comb on meet voltage V
d+ V
A112Sin (ω
112T), V
d-V
A112Sin (ω
112T), V
d+ V
A134Sin (ω
134T), V
d-V
A134Sin (ω
134T), meet voltage V on the fixed fingers flat board
t, drive detection comb on meet voltage V
s
Step 3 is regulated and is applied to driving comb to last voltage, makes that two mass system in the unit are operated in homophase mode, and two mass system in another unit are operated in anti-phase mode;
Wherein, V
dBe driving DC voltage, V
A112, V
A134, V
A212, V
A234Be the amplitude of AC drive voltage, ω
112, ω
134, ω
212, ω
234Be the angular frequency of AC drive voltage, V
tBe direct current tuning voltage, V
sBe direct current detection voltage back.
The driving method of described a kind of difference resonance type micro accelerometer is realized the method for the difference frequency output of micro-acceleration gauge, and two identical mass system resonance frequencies of direction of motion are carried out difference output, and described two mass system are under the jurisdiction of different units.
The present invention adopts technique scheme, has following beneficial effect:
(1) two unit resonance frequencies of difference output have been taken into account the measurement response time and have been measured bandwidth;
(2) bilateral static broach drives and Differential Detection, has increased the structure stability of vibration;
(3) regulate sensitivity by loading DC voltage, reduced the dependency degree of sensitivity to foozle;
(4) detect by the difference broach, suppress symmetry error.
Description of drawings
Fig. 1 is the synoptic diagram of difference resonance type micro accelerometer.
Fig. 2 is the synoptic diagram of the physical construction layer of difference resonance type micro accelerometer.
Fig. 3 is the structural drawing of first module U1 movable structure.
Fig. 4 is the structural drawing of the motionless structure of first module U1.
Fig. 5 is the first tuning fork structure figure.
The synoptic diagram that Fig. 6 provides signal to connect for gold electrode layer in the first module for the physical construction layer.
The number in the figure explanation: U1, U2 are first, second unit; M11, m12 are first, second mass; K112, k134, k156, k178 are vertical beam; A11, a12, a13, a14, a15, a16 are anchor point; De1 is first tuning fork structure; Dek11, dek12 are vertical beam; Dek13, dek14 are crossbeam; D11, d12, d21, d22 are the driving comb flat board; Dr11, dr12, dr13, dr14 are that driving comb is right, and s11, s12, s21, s22 are for driving the detection comb flat board, and se11, se12, se13, se14 are that the driving detection comb is right; T11, t12 are tuning flat board; Tn11, tn12 are fixing harmony broach flat board; Dek15, dek16 are tie-beam; D11, D12, D13, D14, D21, D22, D23, D24 are drive electrode; T11, T12, T21, T22 are tuning electrode; S11, S12, S13, S14, S21, S22, S23, S24 are detecting electrode; G11, G12, G21, G22 are ground-electrode.
Embodiment
Below in conjunction with accompanying drawing technical scheme of the present invention is elaborated:
The difference resonance type micro accelerometer comprises glass pedestal as shown in Figure 1, is bonded in the physical construction layer on the glass pedestal, with the gold electrode layer that sputters on the glass pedestal as signal lead.
The physical construction layer comprises first module U1, the second unit U2 of parallel placement as shown in Figure 2.First module U1, the second unit U2 are that structure is identical and symmetrical, symmetrical from symmetrical structure up and down.Each unit horizontal symmetry axis be parallel to X-axis, the axis of symmetry of vertical direction is parallel to Y-axis.Two cell layout's unanimities can be placed on the diverse location of physical construction layer, but the horizontal symmetry axis of two unit is parallel to each other, and the vertical direction axis of symmetry also is parallel to each other.
First module U1 on macroscopic view, comprises the not movable structure that dots and the movable structure of representing with solid line as shown in Figure 3, specifically comprises the first tuning fork structure de1, first mass system, second mass system.First mass system, the second mass system horizontal distribution are in the first tuning fork structure de1 both sides.First mass system comprises: the first mass m11, and two vertical beam k112, k156, two vertical beam k112, k156 levels are connected the first mass m11 both sides.Second mass system is identical with the first mass system structure, comprises the second mass m12, two vertical beam k134, k178.Vertical beam k156, k178 are connected with the first tuning fork structure de1, and vertical beam k156, k178 constitute second tuning fork structure.Anchor point a11, a12 support vertical beam k112 unsettled, and anchor point a15, a16 support vertical beam k156, k178 unsettled, and anchor point a13, a14 support vertical beam k134 unsettled.The vertical beam dimensional parameters is in full accord, and the line of symmetry of horizontal direction overlaps with mass line of symmetry in the horizontal direction.
In conjunction with Fig. 3, Fig. 4 as can be known, the hollow out zone that the first mass m11 has three linear array spacings to equate is embedded with driving comb successively to dr11, dr12, fixedly the dull and stereotyped tn11 of harmony broach, driving detection comb be to se11, se12 in three hollow out zones.Be attached to the driving comb d11 on the first mass m11, right to dr11, dr12 formation driving comb electric capacity with driving comb; Be attached to the tuning dull and stereotyped t11 on the first mass m11, with fixedly the fixing tuning capacity plate antenna of the dull and stereotyped tn11 formation of harmony broach is right; Be attached to the dull and stereotyped s11 of driving detection comb on the first mass m11, right to se11, se12 formation differential driving detection electric capacity with the driving detection comb.The second mass m12 is identical with the first mass m11, and the hollow out zone that has three linear array spacings to equate is embedded with driving comb successively to dr13, dr14, fixedly the dull and stereotyped tn12 of harmony broach, driving detection comb be to se13, se14 in three hollow out zones.Be attached to the driving comb d12 on the second mass m12, right to dr13, dr14 formation driving comb electric capacity with driving comb; Be attached to the tuning dull and stereotyped t12 on the second mass m12, with fixedly the fixing tuning capacity plate antenna of the dull and stereotyped tn12 formation of harmony broach is right; Be attached to the dull and stereotyped s12 of driving detection comb on the second mass m12, right to se13, se14 formation driving detection electric capacity with the driving detection comb.Driving comb flat board, driving detection comb flat board are made of to broach the level dull and stereotyped and that be attached on the flat board of vertical direction, the length of the broach correspondence on the horizontal direction and width and quantity can be adjusted as required, and the spacing between the broach also can be adjusted as required.The fixed fingers flat board is made of the flat board of two parts up and down of vertical direction, and distance also can be adjusted as required between the dull and stereotyped corresponding length on the vertical direction and width and quantity, flat board.
First tuning fork structure is by crossbeam dek13, dek14 as shown in Figure 5, and vertical beam dek11, dek12 form rectangular frame structure, and the same area of vertical beam dek11, dek12 has tie-beam dek15, dek16.Vertical beam dek11, dek12 in the rigidity of X-direction much smaller than the rigidity of vertical beam k112 in X-direction.Under identical static driving force, the central point displacement of vertical beam dek11, dek12 is much larger than the displacement at equidirectional of vertical beam k112, k134, k156, k178 central point.
As shown in Figure 6, drive electrode D11, D12 provide signal to connect for driving comb to dr11, dr12, tuning electrode T11 provides signal to connect for the dull and stereotyped tn11 of fixing harmony broach, and detecting electrode S11, S12 provide signal to connect for driving the detection comb flat board to se11, se12; Drive electrode D13, D14 provide signal to connect for driving comb to dr13, dr14, and tuning electrode T12 provides signal to connect for the fixing dull and stereotyped tn12 of harmony broach, and detecting electrode S13, S14 provide the signal connection for driving detection comb to se13, se14; Ground-electrode G11, G12 ground connection.Among the second unit U2, drive electrode D21, D22 in the metal electrode layer, D13, D14 connect signal is provided for driving comb, tuning electrode T21, T22 connect for the fixed fingers flat board provides signal, detecting electrode S21, S22, S23, S24 connect ground-electrode G21, G22 ground connection for driving detection comb to signal is provided.
The present invention utilizes following method to drive the difference resonance type micro accelerometer:
Step 1 applies driving voltage to first module: drive electrode D11 meets voltage V
d+ V
A112Sin (ω
112T), drive electrode D12 meets voltage V
d-V
A112Sin (ω
112T), drive electrode D13 meets voltage V
d+ V
A134Sin (ω
134T), drive electrode D14 meets voltage V
d-V
A134Sin (ω
134T), tuning electrode T11, T12 meet voltage V
t, detecting electrode S11, S12 meet voltage V
s, ground-electrode G11 ground connection;
Step 3, in the mass bilateral electric capacity to (namely drive electric capacity to, drive to detect electric capacity to) motion under electrostatic force drives, its direction of motion depends on that electrostatic force with joint efforts: regulate and be applied to driving comb to last voltage, make two mass system in the unit be operated in homophase mode, two mass system in another unit are operated in anti-phase mode;
Wherein, V
dBe driving DC voltage, V
A112, V
A134, V
A212, V
A234Be the amplitude of AC drive voltage, ω
112, ω
134, ω
212, ω
234Be the angular frequency of AC drive voltage, V
tBe direct current tuning voltage, V
sBe direct current detection voltage back.
Utilize above-mentioned driving method to realize the difference frequency output of micro-acceleration gauge: to seek two identical mass system of direction of motion in two unit, two identical mass system resonance frequencies of direction of motion are carried out difference output, a mass system resonance frequency of namely getting respectively in two unit is done the difference frequency processing, and prerequisite is that two mass system direction of motion choosing are identical.Only compare with the inner difference of the resonance frequency of two mass system of homophase mode or anti-phase mode work in the unit with the conventional ADS driving mode, the present invention utilizes above-mentioned driving method to drive described difference resonance type micro accelerometer, has taken into account the measurement response time and has measured bandwidth.
Driving comb is right to the broach formation driving comb electric capacity on the dr11 among dr11, the dr12 and the dull and stereotyped d11 horizontal direction of the driving comb left side, and it is right that driving comb constitutes driving comb electric capacity to the dull and stereotyped d11 horizontal direction of dr12 and driving comb among dr11, dr12 the right broach.When the first mass m11 side-to-side vibrations in the horizontal direction, two driving comb electric capacity increase an electric capacity, and another reduces.Can adjust driving comb as required to the parameters such as spacing between the length of broach among dr11, the dr12 and width and quantity, the broach, also can adjust driving comb to the overlapping length of the dull and stereotyped d11 horizontal direction of broach and driving comb among dr11, dr12 broach.As seen, difference resonance type micro accelerometer of the present invention drives by bilateral static broach, and structural stability is good.
Vertical direction is dull and stereotyped unsettled by medial support structures among the dull and stereotyped tn11 of fixed fingers among the first module U1, up and down the capacity plate antenna of the fixing tuning dull and stereotyped t11 formation adjusting sensitivity among 2 groups of dull and stereotyped and first mass m11 is right among the tn11, can adjust the parameters such as spacing between the dull and stereotyped tn11 middle plateform of fixed fingers length, width and quantity, the flat board as required, also can change among the dull and stereotyped tn11 of fixed fingers and the overlapping length of fixing tuning dull and stereotyped t11.As seen, difference resonance type micro accelerometer of the present invention is regulated by loading different DC voltage, and sensitivity reduces the dependence of foozle.
Among the first module U1, it is right to the broach formation detection comb electric capacity on the se11 among se11, the se12 and the driving comb flat board s11 horizontal direction left side to drive detection comb, and it is right to the se12 among se11, the se12 and the dull and stereotyped s11 horizontal direction of driving comb the right broach formation driving comb electric capacity to drive detection comb.When the first mass m11 side-to-side vibrations in the horizontal direction, two detection comb electric capacity increase an electric capacity, and another reduces.Can adjust as required and drive detection comb to the parameters such as spacing between the length of broach among se11, the se12 and width and quantity, the broach, also can adjust and drive detection comb to the overlapping length of broach and driving comb flat board s11 horizontal direction broach among se11, the se12.As seen, difference resonance type micro accelerometer of the present invention detects by the difference broach, can suppress symmetry error preferably.
In sum, difference resonance type micro accelerometer of the present invention has following beneficial effect:
(1) two unit resonance frequencies of difference output have been taken into account the measurement response time and have been measured bandwidth;
(2) bilateral static broach drives and Differential Detection, has increased the structure stability of vibration;
(3) regulate sensitivity by loading DC voltage, reduced the dependency degree of sensitivity to foozle;
(4) detect by the difference broach, suppress symmetry error.
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Cited By (8)
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| CN104374953A (en) * | 2014-11-25 | 2015-02-25 | 东南大学 | Split type differential silicon micro resonant accelerometer |
| CN106629571A (en) * | 2016-09-20 | 2017-05-10 | 西北工业大学 | Weakly coupled MEMS resonance type accelerometer based on mode localization effect |
| CN110146725A (en) * | 2019-05-21 | 2019-08-20 | 深迪半导体(上海)有限公司 | Resonance micro electromechanical acceleration transducer and accelerometer |
| CN110907681A (en) * | 2019-11-18 | 2020-03-24 | 南京理工大学 | Differential resonant voltage sensor compounded by quartz tuning fork and piezoelectric bimorph |
| CN111487435A (en) * | 2020-05-14 | 2020-08-04 | 东南大学 | Air velocity measurement device based on three working modes of weakly coupled resonator group |
| CN111679095A (en) * | 2020-04-30 | 2020-09-18 | 东南大学 | A silicon microflow meter with adjustable mechanical sensitivity and measurement range |
| WO2020258176A1 (en) * | 2019-06-27 | 2020-12-30 | 瑞声声学科技(深圳)有限公司 | Differential resonator and mems sensor |
| CN113985068A (en) * | 2015-10-20 | 2022-01-28 | 美国亚德诺半导体公司 | Multi-axis resonance accelerometer |
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