CN101266259A - Silicon micro-resonance type accelerometer - Google Patents
Silicon micro-resonance type accelerometer Download PDFInfo
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- CN101266259A CN101266259A CNA2008100255749A CN200810025574A CN101266259A CN 101266259 A CN101266259 A CN 101266259A CN A2008100255749 A CNA2008100255749 A CN A2008100255749A CN 200810025574 A CN200810025574 A CN 200810025574A CN 101266259 A CN101266259 A CN 101266259A
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Abstract
The invention discloses a silicon micro-resonant type accelerometer, comprising an upper layer part of the accelerometer formed on the single crystal silicon and a lower layer part of the signal line formed on the glass substrate. The upper layer mechanical structure of the accelerometer is composed of a mass block, a pair of identical resonators and bars. The resonators are vertically and symmetrically disposed in the middle of the mass block. One end of the resonator is connected with the fixed baseplate and another end of the resonator is connected with the mass block by the bar and the mass block is connected with the fixed baseplates by four folded beams. The fixed baseplate is mounted on the fixed basedplate bonding points on the glass substrate, therefore the mechanical structure of the upper layer is hang in the air above the glass substrate of the lower layer. The silicon micro-resonant type accelerometer has features: high sensitivity, good stability and strong resistance to shock.
Description
Technical field
The invention belongs to the micro-inertia sensor technology among the microelectromechanical systems MEMS, particularly a kind of silicon micro-resonance type accelerometer.
Background technology
MEMS (micro electro mechanical system) (Micro-electro-mechanical Systems, be called for short MEMS) is the frontier nature high-tech sector of the development in recent years multidisciplinary intersection of getting up.MEMS utilizes the silicon micro-machining technology that grows up from semiconductor technology, it mainly is material with silicon, on silicon chip, produce size in micron dimension, the movable three-dimensional structure of suspension, realize information perception and control to external world, and can be integrated with signal Processing and control circuit, constitute a multi-functional microsystem.MEMS (micro electro mechanical system) has that volume is little, cost is low, reliability is high, be easy to characteristics such as batch process, can be widely used in all many-sides such as Aero-Space, military affairs, communication, biomedicine, is considered to one of emerging technology geared to the 21st century even dominant technology.
Silicon micro accerometer is the typical MEMS inertial sensor, and its research starts from early 1970s, various ways such as existing condenser type, piezoelectric type, pressure resistance type, thermal convection, tunnel current formula and resonant mode.The unique features of silicon micro-resonance type accelerometer is that its output signal is a frequency signal, its accurate digital quantity output can be directly used in complicated digital circuit, has very high antijamming capability and stability, and removed the inconvenience of other type accelerometer aspect the signal transmission from, directly link to each other with digital processing unit.
At present, silicon micro-resonance type accelerometer generally is made up of resonance beam and responsive mass, and acceleration is converted to inertial force through responsive mass, and inertial force acts on the axial of resonance beam, the frequency of resonance beam is changed, extrapolate by measuring acceleration by the test resonance frequency.
1999, U.S. Trey Roessing detects principle based on resonance frequency and has invented silicon micro-resonance type accelerometer, and adopted lever enlarger (Tery Roessing, Roger T.Howe, et al.Resonant accelerometer withflexural lever leverage system.US 5969249).This structure places the both sides up and down of mass with resonator, so material is inhomogeneous and environment temperature is bigger to the device influence, and the mass utilization factor is not high, and volume is relatively large, and sensitivity is lower, and stability and impact resistance are relatively poor.
2006, the Fan Shang of the BJ University of Aeronautics ﹠ Astronautics spring etc. in the past resonance type accelerometer propose a kind of new resonance type accelerometer (Fan Shangchun, benevolence outstanding person. a kind of resonance type micromechanical accelerometer, BJ University of Aeronautics ﹠ Astronautics, CN1844931A).This structure is made up of mass, brace summer, tuning fork and mechanics amplification system, and tuning fork is positioned at the centre of mass, and adjacent up and down symmetric arrangement, overcome the inhomogeneous and environment temperature of material to the device influence the big and not high shortcoming of mass utilization factor.But the mass of this structure supports by being positioned at its two middle brace summers, and then the stability of accelerometer and impact resistance are relatively poor.In addition, the support beam structure form of this structure is a semi-girder, and its ability that discharges unrelieved stress is relatively poor.
Summary of the invention
The object of the present invention is to provide that a kind of sensitivity is higher, the silicon micro-resonance type accelerometer of good stability and strong shock resistance.
The technical solution that realizes the object of the invention is: a kind of silicon micro-resonance type accelerometer, by last, following two-layer formation, the upper strata is the accelerometer physical construction that is produced on the monocrystalline silicon piece, lower floor is the signal lead that is produced on the glass substrate, accelerometer upper strata physical construction is made up of mass and two resonators, these two resonators are symmetricly set on the centre of mass up and down, one end of these two resonators respectively with these two resonators between fixed pedestal link to each other, the other end that wherein is positioned at the top resonator is connected with the output terminal of two regulations and parameters enlargers that are positioned at its top respectively, the support end of these two top regulations and parameters enlargers links to each other with the fixed pedestal that is positioned at its top respectively, the other end that is positioned at the below resonator is connected with the output terminal of two other regulations and parameters enlarger that is positioned at its below respectively, the support end of these two below regulations and parameters enlargers links to each other with the fixed pedestal that is positioned at its below respectively, the input end of four regulations and parameters enlargers is connected with described mass respectively, this mass links to each other with four fixed pedestals that are positioned at four jiaos of this masses respectively by four folded beams, all fixed pedestals are installed on the fixed pedestal bonding point on the glass substrate, make the physical construction part on upper strata unsettled on the glass substrate part of lower floor.
The present invention compared with prior art, its remarkable advantage is: (1) a pair of resonator is arranged adjacent each other at the centre of mass, it is inhomogeneous and that processing produces is asymmetric to have reduced material, has reduced the influence of temperature to accelerometer; (2) resonator is made up of tuning fork and wire broach, and the wire broach is arranged symmetrically in the both sides of beam respectively, adopts bilateral type of drive to drive, and the operation mode of having guaranteed tuning fork is a vibrate in opposite phase mode; (3) the lever enlarger amplifies inertial force effectively, improves accelerometer response; (4) resonator is positioned at the centre of mass, can make full use of the space, increases the area of mass, improves the sensitivity of accelerometer; (5) mass links to each other by fixed pedestal of four jiaos of folded beam and its, discharges unrelieved stress effectively, has improved the stability and the impact resistance of arrangements of accelerometers.
Below in conjunction with accompanying drawing the present invention is described in further detail.
Description of drawings
Fig. 1 is the structural representation of silicon micro-resonance type accelerometer of the present invention.
Fig. 2 is the structural representation of resonator of the present invention, drive input signal lead-in wire and responsive output signal lead-in wire.
Embodiment
In conjunction with Fig. 1, the present invention is based on the silicon micro accerometer of resonant mode, be used to measure the surveying instrument that is parallel to base level, by last, following two-layer formation, the upper strata is the accelerometer physical construction that is produced on the monocrystalline silicon piece, lower floor is the signal lead that is produced on the glass substrate, accelerometer upper strata physical construction is by mass 1 and a pair of resonator 2a, 2b forms, resonator 2a, 2b is the adjacent centre that is positioned at mass of symmetry up and down, it is inhomogeneous and that processing produces is asymmetric to reduce material, resonator 2a, the structural parameters high conformity of 2b is realized the differential output of resonance frequency effectively.This resonator 2a, the end of 2b and this resonator 2a, fixed pedestal 4 between the 2b links to each other, the other end that wherein is positioned at top resonator 2a respectively with two regulations and parameters enlarger 3a that are positioned at its top, the output terminal of 3b connects, these two top regulations and parameters enlarger 3a, the support end of 3b links to each other with the fixed pedestal 5a that is positioned at its top respectively, the other end that is positioned at below resonator 2b respectively with two other regulations and parameters enlarger 3c that is positioned at its below, the output terminal of 3d connects, these two below regulations and parameters enlarger 3c, the support end of 3d links to each other four regulations and parameters enlarger 3a with the fixed pedestal 5b that is positioned at its below respectively, 3b, 3c, the input end of 3d is connected with described mass 1 respectively.Regulations and parameters enlarger 3a, 3b, 3c, 3d effectively amplify inertial force, have increased the sensitivity of silicon micro-resonance type accelerometer.This mass 1 links to each other with four fixed pedestal 7a, 7b, 7c, 7d that are positioned at 1 four jiaos of this masses respectively by four folded beam 6a, 6b, 6c, 6d, all fixed pedestal 4,5a, 5b, 7a, 7b, 7c, 7d are installed on the fixed pedestal bonding point on the glass substrate, make the physical construction part on upper strata unsettled on the glass substrate part of lower floor, increased the stability of accelerometer like this, and improve its impact resistance, and four folded beam 6a, 6b, 6c, 6d can discharge unrelieved stress effectively.
The structural parameters of a pair of resonator 2a of the present invention, 2b are identical, and adopt bilateral type of drive to drive, and the operation mode of guaranteeing tuning fork is a vibrate in opposite phase mode.As shown in Figure 2, structure with one of them resonator 2a is that example illustrates, be that resonator 2a is made up of with eight groups of linear comb broach 9a, 9b, 9c, 9d, 10a, 10b, 10c, 10d being positioned at tuning fork 8 both sides tuning fork 8, wherein four groups of broach 10a, 10b, 10c, the 10d near tuning fork 8 is detection comb, and other four groups of broach 9a, 9b, 9c, 9d are driving comb.One of them drive electrode 11a applies the alternating voltage of band direct current biasing for two groups of driving comb 9a, 9d of each resonator 2a, the anti-phase alternating voltage that another drive electrode 11b applies the band direct current biasing for other two groups of driving comb 9b, the 9c of this resonator 2a, two responsive output signal lead-in wire 12a, 12b export the signal of detection comb 10a, 10b on the resonator 2a, 10c, 10d respectively.
When silicon micro-resonance type accelerometer of the present invention is worked, two drive input signal lead-in wire 11a apply the alternating voltage of band direct current biasing on driving comb 9a, the 9d of resonator 2a, 2b, two drive input signal lead-in wire 11b apply the anti-phase alternating voltage of band direct current biasing on driving comb 9b, the 9c of each resonator 2a, 2b, make the tuning fork 8 of two resonator 2a, 2b do simple harmonic motion in opposite directions.When acceleration was imported, mass 1 degree of will speed up was converted into inertial force, and inertial force affacts on the tuning fork 8 of two resonator 2a, 2b after amplifying by lever enlarger 3a, 3b, 3c, 3d.When the tuning fork 8 of one of them resonator 2a was subjected to pulling force, its resonance frequency increased, and then the tuning fork 8 of another resonator 2b is stressed, and its resonance frequency reduces.Two couples four responsive output signal lead-in wire 12a, 12b export the signal of detection comb 10a, 10b on resonator 2a, the 2b, 10c, 10d respectively, pass through differential operational amplifier again, realize the difference output of resonance frequency, extrapolate by measuring acceleration by the resonance frequency that records.
Claims (4)
1, a kind of silicon micro-resonance type accelerometer, by last, following two-layer formation, the upper strata is the accelerometer physical construction that is produced on the monocrystalline silicon piece, lower floor is the signal lead that is produced on the glass substrate, it is characterized in that: accelerometer upper strata physical construction is by mass (1) and two resonator (2a, 2b) form, these two resonator (2a, 2b) be symmetricly set on the centre of mass (1) up and down, these two resonator (2a, end 2b) respectively with these two resonator (2a, fixed pedestal 2b) (4) links to each other, wherein be positioned at the top resonator (2a) the other end respectively be positioned at its top two regulations and parameters enlarger (3a, output terminal 3b) connects, these two top regulations and parameters enlarger (3a, support end 3b) links to each other with the fixed pedestal (5a) that is positioned at its top respectively, be positioned at the below resonator (2b) the other end respectively be positioned at its below two other regulations and parameters enlarger (3c, output terminal 3d) connects, these two below regulations and parameters enlarger (3c, support end 3d) links to each other with the fixed pedestal (5b) that is positioned at its below respectively, four regulations and parameters enlarger (3a, 3b, 3c, input end 3d) is connected with described mass (1) respectively, this mass (1) is by four folded beam (6a, 6b, 6c, 6d) respectively with four fixed pedestal (7a that are positioned at (1) four jiao of this mass, 7b, 7c, 7d) link to each other, all fixed pedestals (4,5a, 5b, 7a, 7b, 7c, 7d) be installed on the fixed pedestal bonding point on the glass substrate, make the physical construction part on upper strata unsettled on the glass substrate part of lower floor.
2, silicon micro-resonance type accelerometer according to claim 1 is characterized in that: the structural parameters of a pair of resonator (2a, 2b) are identical, and adopt bilateral type of drive to drive.
3, silicon micro-resonance type accelerometer according to claim 2, it is characterized in that: a pair of resonator (2a, 2b) all is made up of tuning fork (8) and eight groups of linear comb broach (9a, 9b, 9c, 9d, 10a, 10b, 10c, 10d) of being positioned at tuning fork (8) both sides, wherein the four groups of broach (10a, 10b, 10c, 10d) near tuning fork (8) are detection comb, and other four groups of broach (9a, 9b, 9c, 9d) are driving comb.
4, silicon micro-resonance type accelerometer according to claim 2, it is characterized in that: a drive electrode (11a) applies the alternating voltage of band direct current biasing for two groups of driving combs (9a, 9d) of each resonator (2a), the anti-phase alternating voltage that another drive electrode (11b) applies the band direct current biasing for other two groups of driving combs (9b, 9c) of each resonator (2a), two responsive output signal lead-in wires (12a, 12b) are exported the signal of the detection comb on each resonator (2a) (10a, 10b, 10c, 10d) respectively.
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| CN101858931A (en) * | 2010-05-28 | 2010-10-13 | 南京理工大学 | Frame type capacitive silicon micromechanical accelerometer |
| CN101858927A (en) * | 2010-05-28 | 2010-10-13 | 南京理工大学 | Low-stress silicon micro resonance type accelerometer |
| CN101963624A (en) * | 2010-09-27 | 2011-02-02 | 南京理工大学 | Silicon micro-resonant accelerometer |
| CN102109534A (en) * | 2010-11-30 | 2011-06-29 | 南京理工大学 | Two-axis resonant silicon micro-accelerometer |
| CN102243251A (en) * | 2011-04-25 | 2011-11-16 | 东南大学 | Micromechanical silicon resonant accelerometer with different resonant frequencies |
| CN103278660A (en) * | 2013-05-22 | 2013-09-04 | 南京信息工程大学 | Difference resonant micro accelerometer and driving method thereof |
| CN103901227A (en) * | 2014-04-02 | 2014-07-02 | 清华大学 | Silicon micro-resonant type accelerometer |
| CN106597011A (en) * | 2016-12-23 | 2017-04-26 | 中北大学 | Double-shaft MEMS resonant acceleration transducer structure |
| CN107656094A (en) * | 2016-07-26 | 2018-02-02 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of highly doped silicon micro-resonance type accelerometer |
| CN107688103A (en) * | 2017-07-31 | 2018-02-13 | 北京航空航天大学 | A kind of single-axis accelerometer based on graphene resonance characteristic |
| CN108008149A (en) * | 2016-10-27 | 2018-05-08 | 南京理工大学 | The self calibration silicon micro-resonance type accelerometer insensitive to stress |
| CN108398575A (en) * | 2018-03-19 | 2018-08-14 | 重庆科技学院 | A kind of electrostatic resonance type accelerometer and acceleration measurement method |
| CN111175540A (en) * | 2020-01-02 | 2020-05-19 | 西安交通大学 | Super-harmonic synchronous resonant accelerometer based on unidirectional electrical synchronization |
| CN111812355A (en) * | 2019-04-10 | 2020-10-23 | 北京大学 | Low stress sensitivity silicon micro-resonant accelerometer structure |
| CN112858723A (en) * | 2021-01-14 | 2021-05-28 | 南京理工大学 | Interference mode suppression device and method for silicon micro-resonance type accelerometer |
| CN114740224A (en) * | 2022-05-18 | 2022-07-12 | 南京工程学院 | Force balance type silicon micro-resonance accelerometer |
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- 2008-05-08 CN CN2008100255749A patent/CN101266259B/en active Active
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| CN101858927A (en) * | 2010-05-28 | 2010-10-13 | 南京理工大学 | Low-stress silicon micro resonance type accelerometer |
| CN101858927B (en) * | 2010-05-28 | 2012-05-09 | 南京理工大学 | Low-stress silicon micro resonance type accelerometer |
| CN101858931A (en) * | 2010-05-28 | 2010-10-13 | 南京理工大学 | Frame type capacitive silicon micromechanical accelerometer |
| CN101963624A (en) * | 2010-09-27 | 2011-02-02 | 南京理工大学 | Silicon micro-resonant accelerometer |
| CN101963624B (en) * | 2010-09-27 | 2012-09-12 | 南京理工大学 | Silicon micro-resonant accelerometer |
| CN102109534A (en) * | 2010-11-30 | 2011-06-29 | 南京理工大学 | Two-axis resonant silicon micro-accelerometer |
| CN102109534B (en) * | 2010-11-30 | 2012-09-05 | 南京理工大学 | Two-axis resonant silicon micro-accelerometer |
| CN102243251A (en) * | 2011-04-25 | 2011-11-16 | 东南大学 | Micromechanical silicon resonant accelerometer with different resonant frequencies |
| CN103278660A (en) * | 2013-05-22 | 2013-09-04 | 南京信息工程大学 | Difference resonant micro accelerometer and driving method thereof |
| CN103901227A (en) * | 2014-04-02 | 2014-07-02 | 清华大学 | Silicon micro-resonant type accelerometer |
| CN107656094A (en) * | 2016-07-26 | 2018-02-02 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of highly doped silicon micro-resonance type accelerometer |
| CN108008149A (en) * | 2016-10-27 | 2018-05-08 | 南京理工大学 | The self calibration silicon micro-resonance type accelerometer insensitive to stress |
| CN106597011A (en) * | 2016-12-23 | 2017-04-26 | 中北大学 | Double-shaft MEMS resonant acceleration transducer structure |
| CN106597011B (en) * | 2016-12-23 | 2018-11-23 | 中北大学 | Biaxial MEMS resonant mode acceleration sensor structure |
| CN107688103A (en) * | 2017-07-31 | 2018-02-13 | 北京航空航天大学 | A kind of single-axis accelerometer based on graphene resonance characteristic |
| CN108398575A (en) * | 2018-03-19 | 2018-08-14 | 重庆科技学院 | A kind of electrostatic resonance type accelerometer and acceleration measurement method |
| CN108398575B (en) * | 2018-03-19 | 2024-02-27 | 重庆科技学院 | Electrostatic resonance accelerometer and acceleration measurement method |
| CN111812355A (en) * | 2019-04-10 | 2020-10-23 | 北京大学 | Low stress sensitivity silicon micro-resonant accelerometer structure |
| CN111812355B (en) * | 2019-04-10 | 2022-07-12 | 北京大学 | Low stress sensitivity silicon micro resonant accelerometer structure |
| CN111175540A (en) * | 2020-01-02 | 2020-05-19 | 西安交通大学 | Super-harmonic synchronous resonant accelerometer based on unidirectional electrical synchronization |
| CN112858723A (en) * | 2021-01-14 | 2021-05-28 | 南京理工大学 | Interference mode suppression device and method for silicon micro-resonance type accelerometer |
| CN112858723B (en) * | 2021-01-14 | 2023-06-09 | 南京理工大学 | Interference mode suppression device and method for silicon micro-resonant accelerometer |
| CN114740224A (en) * | 2022-05-18 | 2022-07-12 | 南京工程学院 | Force balance type silicon micro-resonance accelerometer |
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