CN101963624B - Silicon micro-resonant accelerometer - Google Patents
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Abstract
The invention discloses a silicon micro-resonant accelerometer which comprises an upper layer and a lower layer, wherein the upper layer is an accelerometer mechanical structure manufactured on a single-crystal silicon wafer, the lower layer is a signal lead manufactured on a glass substrate, the accelerometer mechanical structure comprises a mass block, an outer frame, two resonators, four primary leverage amplification mechanisms, two rigid rods and two guide mechanisms, a first resonator and a second resonator are symmetrically arranged at the upper side and the lower side of the mass block, one end of either resonator is connected with the outer frame, and the other end is connected with the guide mechanism; and the mass block is connected with the outer frame by four multi-folded beams, and the outer frame enables the mechanical structure part at the upper layer to suspend above the glass substrate part at the lower part by means of four fixed bases which are symmetrical with the center of the mass block. The invention greatly reduces the influence of residual machining stress and heat stress produced by the temperature change of the working environment on the vibration frequency of the structure, improves the stability of the resonant frequency of the resonator and reduces the temperature coefficient of frequency.
Description
Technical field
The invention belongs to the micro-inertia sensor technology in the micro-electromechanical system (MEMS), particularly a kind of silicon micro-resonance type accelerometer.
Background technology
Silicon micro accerometer is the typical MEMS inertial sensor, and its research starts from early 1970s, various ways such as existing condenser type, piezoelectric type, pressure resistance type, thermal convection, tunnel current formula resonant formula.The unique features of silicon micro-resonance type accelerometer is that its output signal is a frequency signal; Its accurate digital quantity output can directly be used for complicated digital circuit; Has very high antijamming capability and stability; And removed the inconvenience of other type accelerometer aspect the signal transmission from, directly link to each other with digital processing unit.U.S. Draper laboratory is in the first place in the world to the research of resonance type accelerometer at present, and the micro-mechanical accelerometer of research and development is mainly used in strategic missile, and zero stability partially and constant multiplier stability reach 5 μ g and 3ppm respectively.Therefore silicon micro-resonance type accelerometer has bright development prospect.
The silicon micro-resonance type accelerometer structure generally is made up of resonance beam and responsive mass; Responsive mass degree of will speed up converts inertial force into; Inertial force acts on the axial of resonance beam, and the frequency of resonance beam is changed, and extrapolates by measuring acceleration through the test resonance frequency.As 2006, the Fan Shang of the BJ University of Aeronautics & Astronautics spring etc. in the past resonance type accelerometer propose a kind of new resonance type accelerometer (Fan Shangchun, benevolence is outstanding. a kind of resonance type micromechanical accelerometer, BJ University of Aeronautics & Astronautics, CN 1844931A).This structure is made up of mass, brace summer, tuning fork and mechanics amplification system; Tuning fork is positioned at the centre of mass; And adjacent symmetric arrangement has up and down overcome the not high shortcoming of mass utilization factor, and discontinuity of materials is consistent to the influence of double-tone fork with environment temperature simultaneously; Can eliminate the influence of environment temperature through Differential Detection to device performance; But in fact mismachining tolerance makes the resonance frequency of two resonators and not exclusively equating, it is also inequality to act on two thermal stress on the resonator, then can't eliminate the influence of thermal stress through the mode of Differential Detection.Simultaneously, two tuning fork arranged adjacent, electric coupling is bigger.In addition, the mass of this structure is supported by two brace summers between being positioned at wherein, and then the stability of accelerometer and impact resistance are relatively poor.The support beam structure form of this structure is a semi-girder, and its ability that discharges unrelieved stress is relatively poor.
2008, the Qiu An of Institutes Of Technology Of Nanjing duckweed etc. disclosed a kind of silicon micro-resonance type accelerometer (Qiu Anping, Shi Qin; Su Yan. silicon micro-resonance type accelerometer; Institutes Of Technology Of Nanjing, application number: 2008100255749), this structure is by silicon and glass is two-layer constitutes; Physical construction is produced on the monocrystalline silicon piece, and glass is as substrate.Physical construction is made up of mass, resonator and lever enlarger etc., and two resonators are positioned in the middle of the mass, and adjacent symmetric arranges that mass supports by being positioned at its folded beam of four jiaos, has improved stability of structure and impact resistance.Through the appropriate design of structure, the range of this accelerometer is greater than ± 50g, and zero under zero start condition stability partially is 1.2mg, and zero to lay particular stress on renaturation be 0.88mg, and constant multiplier stability is 380.6ppm.Temperature experiment in full temperature scope finds that the temperature coefficient of accelerometer frequency reaches 160Hz/ ℃, the temperature coefficient of constant multiplier is 0.67%/℃, the mode of Differential Detection is not eliminated the influence of environment temperature to device performance fully.This is because mismachining tolerance makes the resonance frequency of two resonators and not exclusively equating, it is also inequality to act on two thermal stress on the resonator, then can't eliminate the influence of thermal stress through the mode of Differential Detection.Two resonators of this structure directly link to each other with fixed pedestal, and forming residual stress and thermal stress are very big to the influence of resonance frequency, thereby make that the frequency-temperature coefficient of velograph is bigger.In addition, find that in test process there is bigger electric coupling in this accelerometer, when the resonance frequency of two resonators is close, can produces and adjacently disturb frequently, thereby can't discern the acceleration signal that is acted on.
Summary of the invention
The object of the present invention is to provide that a kind of low-temperature coefficient, coupling coefficient are little, highly sensitive, strong shock resistance, be easy to realize the silicon micro-resonance type accelerometer of high-acruracy survey.
The technical solution that realizes the object of the invention is: a kind of silicon micro-resonance type accelerometer; Constitute by two-layer up and down; The upper strata is the accelerometer physical construction that is produced on the monocrystalline silicon piece, and lower floor is the signal lead that is produced on the glass substrate, and accelerometer physical construction is made up of mass, outside framework, two resonators, four one-level lever enlargers, two rigid rods and two guiding mechanisms; Wherein mass, two resonators, four one-level lever enlargers, two rigid rods and two guiding mechanisms are positioned at outside framework; Mass is positioned at integrally-built centre, and first and second resonator is arranged symmetrically in the both sides up and down of mass, and an end of these two resonators links to each other with outside framework; The other end of first resonator is connected with first guiding mechanism; The other end of second resonator is connected with second guiding mechanism, and first guiding mechanism is connected with first rigid rod, and second guiding mechanism is connected with second rigid rod; The right ends of first and second rigid rod links to each other with the output terminal of one-level lever enlarger, and the support end of these four one-level lever enlargers links to each other with outside framework, and input end links to each other with mass; Described mass links to each other with outside framework through the beam of folding more than four, and outside framework is unsettled on the glass substrate part of lower floor through the physical construction part that four centrosymmetric fixed pedestals with mass make the upper strata.
The present invention compared with prior art; Its remarkable advantage: resonator, lever and the mass of (1) this accelerometer all passes through outside framework and links to each other with fixed pedestal; Reduced forming residual stress and operating ambient temperature greatly and changed of the influence of the thermal stress of generation the structural vibration frequency; Improve the stability of resonator resonance frequency, reduced the temperature coefficient of frequency; (2) resonance beam of each resonator is made up of two beams, and the centre of beam is continuous, has realized bilateral driving, has reduced the interference of high order mode; (3) two resonators are positioned at the two ends up and down of mass, have increased the space length between the electric signal, reduce electric coupling greatly; (4) support end of one-level lever enlarger and output terminal have all adopted thin beam structure; The input beam has adopted many foldings girder construction; Thereby the axial tension rigidity of support end and output terminal is very big and bending stiffness is very little; And the thin beam of support end is axially vertical to each other with lever shaft, has realized the theoretical value of enlargement factor near traditional lever enlarger; (5) output terminal of one-level lever enlarger is connected with resonator through rigid rod, and the y direction rigidity of rigid rod is bigger, and the inertial force that can effectively lever be exported passes to resonance beam; (6) guiding mechanism has very big rigidity at the x axle, has reduced the intersecting axle sensitivity of x axle greatly; (7) mass is rolled over beam through four rotational symmetry more and is linked to each other with outside framework, has improved the stability and the impact resistance of arrangements of accelerometers; (8) the many foldings beam that links to each other between mass and the outside framework has very big rigidity at the x axle; Then isolated the motion of x direction well to the accelerometer Effect on Performance; And y axle rigidity is less, can realize that the y oriented energy passes to the lever enlarger significantly, thereby improves accelerometer response.
Below in conjunction with accompanying drawing the present invention is described in further detail.
Description of drawings
Fig. 1 is the structural representation of silicon micro-resonance type accelerometer of the present invention.
Fig. 2 is the structural representation of resonator of the present invention and one-level lever enlarger.
Embodiment
In conjunction with Fig. 1; The present invention is based on the silicon micro accerometer of resonant mode, be used to measure the surveying instrument that is parallel to base level, constitute by two-layer up and down; The upper strata is the accelerometer physical construction that is produced on the monocrystalline silicon piece, and lower floor is the signal lead that is produced on the glass substrate.The physical construction of accelerometer is made up of mass 1, outside framework 2, a pair of resonator 3a, 3b and four identical one-level lever structure for amplifying 4a, 4b, 4c, 4d, two rigid rod 7a, 7b and two guiding mechanism 8a, 8b, and wherein mass 1, two resonator 3a, 3b, four one-level lever enlarger 4a, 4b, 4c, 4d, two rigid rod 7a, 7b and two guiding mechanism 8a, 8b are positioned at outside framework 2.Mass 1 is arranged in the centre of arrangements of accelerometers; First and second resonator 3a, 3b are arranged symmetrically in the two ends up and down of mass 1 up and down; The end of these two resonator 3a, 3b links to each other with outside framework 2, and the other end of the first resonator 3a is connected with the first guiding mechanism 8a, and the other end of the second resonator 3b is connected with the second guiding mechanism 8b; The first guiding mechanism 8a is connected with the first rigid rod 7a, and the second guiding mechanism 8b is connected with the second rigid rod 7b; The right ends of first and second rigid rod 7a, 7b links to each other with the output terminal of one-level lever enlarger 4a, 4b, 4c, 4d, and the support end of these four one-level lever enlarger 4a, 4b, 4c, 4d links to each other with outside framework 2, and input end links to each other with mass 1.Described mass 1 links to each other with outside framework 2 through the beam of folding more than four 6a, 6b, 6c, 6d, and outside framework 2 is unsettled on the glass substrate part of lower floor through the physical construction part that four centrosymmetric fixed pedestal 5a, 5b, 5c, 5d with mass 1 make the upper strata.The end of such two resonator 3a, 3b links to each other with fixed pedestal 5a, 5b, 5c, 5d through outside framework 2, has reduced the influence to the resonator resonance frequency of unrelieved stress and thermal stress, reduces the temperature coefficient of frequency greatly.
Each one-level lever enlarger 4a, 4b, 4c, 4d are the same; Be its output terminal 13a, (each one-level lever enlarger is an output terminal all for 13b; In Fig. 2, only marked wherein two output terminal 13a, 13b) link to each other with resonator 3a, 3b with guiding mechanism 8a, 8b through rigid rod 7a, 7b successively; The two ends of guiding mechanism 8a, 8b link to each other with outside framework 2; Make guiding mechanism 8a, 8b have very big rigidity in the x direction, and less in y direction rigidity, isolated the influence of x direction motion preferably to resonator.The first rigid rod 7a right ends links to each other with the output terminal of two one-level lever enlarger 4a, 4b, and the second rigid rod 7b right ends links to each other with the output terminal of two one-level lever enlarger 4c, 4d.The y direction rigidity of two rigid rod 7a, 7b is bigger, can be effectively the inertial force of lever output be passed to resonance beam.The support end of four one-level lever enlarger 4a, 4b, 4c, 4d links to each other with four fixed pedestal 5a, 5b, 5c, 5d through outside framework 2; Four one-level lever enlarger 4a, 4b, 4c, the input end 11a of 4d, 11b link to each other with mass 1, and (each one-level lever enlarger is an input end all; In Fig. 2, only marked wherein two input end 11a, 11b), reduced the influence of unrelieved stress and thermal stress to the lever enlargement factor.Mass 1 links to each other with outside framework 2 through the beam of folding more than four 6a, 6b, 6c, 6d; Increased the stability of accelerometer; And improve its impact resistance, and axisymmetric many folding beam 6a, 6b, 6c, 6d not only discharge unrelieved stress effectively, reduces intersecting axle sensitivity.Outside framework 2 makes the physical construction part on upper strata unsettled on the glass substrate part of lower floor through fixed pedestal 5a, 5b, 5c, 5d; Two resonator 3a, 3b, four one-level lever enlarger 4a, 4b, 4c, 4d and the beam of folding more than four 6a, 6b, 6c, 6d link to each other with four pedestal 5a, 5b, 5c, 5d through outside framework 2, and the thermal stress that has reduced forming residual stress and environmental change generation greatly is to the accelerometer Effect on Performance.The beam of folding more than four 6a, 6b, 6c, 6d are axially symmetric structures; Each many folding beam 6a, 6b, 6c, 6d have bigger rigidity in the x direction; Isolated the influence of x direction motion preferably to resonator; And less in y direction rigidity, can realize that the y oriented energy passes to the lever enlarger significantly, thereby improve accelerometer response.
First and second resonator 3a, 3b structure are identical; Structure is as shown in Figure 2; Be that each resonator is made up of two resonance beam 14a, 14b, two fixed drive electrode 15a, 15b, four fixed test electrode 16a, 16b, 16c, 16d and movable broach 17; The center section of two resonance beam 14a, 14b links to each other,, reduced interference modal.Adopt bilateral driving; Promptly arranged movable broach 17 in the both sides of two resonance beam 14a, 14b; Arranged drive electrode 15a, 15b and disposed inboard in the outside of movable broach 17 four fixed test electrode 16a, 16b, 16c, 16d; Movable broach 17 forms drive capacitor and detects electric capacity inserting with drive electrode 15a, 15b and fixed test electrode 16a, 16b, 16c, the last fixed fingers of 16d; Specifically be that last fixed fingers of fixed drive electrode 15a, 15b and movable broach 17 form drive capacitor, at fixed drive electrode 15a, the last anti-phase alternating voltage that applies the band direct current biasing of 15b.Movable broach 17 is formed detection electric capacity with fixed test electrode 16a, 16b, 16c, 16d.
Four one-level lever enlarger 4a, 4b, 4c, 4d structure are identical, and structure is as shown in Figure 2, is made up of lever 10a, 10b, support end 12a, 12b, output terminal 13a, 13b and input end 11a, 11b like one-level regulations and parameters enlarger 4a, 4b.For little lever; When the axial tension rigidity of support end and output terminal big more; And the bending stiffness of fulcrum beam and output terminal more hour; The enlargement factor of lever just can be near ideal value, and support end 12a, 12b and output terminal 13a, 13b all adopt thin beam structure, and the beam of input end 11a, 11b is axisymmetric many folding beams.The thin beam 12a of support end, 12b's is axially axially mutual vertical with lever 10a, 10b, and this also makes the enlargement factor of lever near ideal value.
Silicon micro-resonance type accelerometer of the present invention is used to measure the input acceleration of y direction; When the acceleration a along the y direction imports; On mass, produce inertial force F=-ma; This inertial force acts on respectively on four one-level lever enlargers, and under the effect that lever amplifies, the acting force that acts on every resonance beam of resonator does
In the formula, A is the enlargement factor of one-level lever enlarger.Wherein going up the power that resonator receives is pressure, and resonance frequency reduces, and the power that receives of resonator is pulling force down, and resonance frequency increases, and the difference on the frequency of two resonators does
Δf＝2f
0κAma
In the formula, κ is the constant with the resonant beam structure parameter correlation.It is thus clear that the difference on the frequency of resonator is directly proportional with input acceleration up and down,, then measure input acceleration through detecting the difference on the frequency of resonator up and down.
Claims (5)
1. silicon micro-resonance type accelerometer; Constitute by two-layer up and down; The upper strata is the accelerometer physical construction that is produced on the monocrystalline silicon piece; Lower floor is the signal lead that is produced on the glass substrate; It is characterized in that: accelerometer physical construction is made up of mass (1), outside framework (2), two resonators (3a, 3b), four one-level lever enlargers (4a, 4b, 4c, 4d), two rigid rods (7a, 7b) and two guiding mechanisms (8a, 8b), and wherein mass (1), two resonators (3a, 3b), four one-level lever enlargers (4a, 4b, 4c, 4d), two rigid rods (7a, 7b) and two guiding mechanisms (8a, 8b) are positioned at outside framework (2), and mass (1) is positioned at integrally-built centre; First and second resonator (3a, 3b) is arranged symmetrically in the two ends up and down of mass (1); One end of these two resonators (3a, 3b) links to each other with outside framework (2), and the other end of first resonator (3a) is connected with first guiding mechanism (8a), and the other end of second resonator (3b) is connected with second guiding mechanism (8b); First guiding mechanism (8a) is connected with first rigid rod (7a), and second guiding mechanism (8b) is connected with second rigid rod (7b); The right ends of first and second rigid rod (7a, 7b) links to each other with the output terminal of one-level lever enlarger (4a, 4b, 4c, 4d); The support end of these four one-level lever enlargers (4a, 4b, 4c, 4d) links to each other with outside framework (2), and input end links to each other with mass (1); Described mass (1) links to each other with outside framework (2) through folding beam (6a, 6b, 6c, 6d) more than four, and outside framework (2) is unsettled on the glass substrate part of lower floor through the physical construction part that four centrosymmetric fixed pedestals (5a, 5b, 5c, 5d) with mass (1) make the upper strata.
2. silicon micro-resonance type velograph according to claim 1; It is characterized in that: four one-level lever enlargers (4a, 4b, 4c, 4d) structure is identical; Its support end (12a) and output terminal (13a) have all adopted slender beam, and input end (11a) has adopted axisymmetric many folding girder constructions.
3. silicon micro-resonance type accelerometer according to claim 1; It is characterized in that: the output terminal (13a) of each one-level lever enlarger (4a, 4b, 4c, 4d) links to each other with resonator (3a) with guiding mechanism (8a) through rigid rod (7a) successively; The two ends of guiding mechanism (8a) link to each other with outside framework (2); Make guiding mechanism (8a) have very big rigidity in the x direction, and less in y direction rigidity.
4. silicon micro-resonance type accelerometer according to claim 1; It is characterized in that: first and second resonator (3a, 3b) structure is identical; Be that each resonator is made up of two resonance beam (14a, 14b), two fixed drive electrodes (15a, 15b), four fixed test electrodes (16a, 16b, 16c, 16d) and movable broach (17); The center section of two resonance beam (14a, 14b) links to each other; Adopt bilateral driving; Promptly arranged movable broach (17) in the both sides of two resonance beam (14a, 14b); Four the fixed test electrodes (16a, 16b, 16c, 16d) of having arranged drive electrode (15a, 15b) and disposed inboard in the outside of movable broach (17), movable broach (17) and drive electrode (15a, 15b) form drive capacitor and detection electric capacity with fixed fingers on the fixed test electrode (16a, 16b, 16c, 16d) to inserting.
5. silicon micro-resonance type accelerometer according to claim 1 is characterized in that: folding beam (6a, 6b, 6c, 6d) is an axially symmetric structure more than four.
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| CN102147424B (en) * | 2011-03-01 | 2012-11-28 | 东南大学 | Triaxial integration silicon micro-resonance type accelerometer |
| CN103439529B (en) * | 2013-09-04 | 2016-01-20 | 南京理工大学 | Based on the silicon vibrating beam accelerometer of the integrated high precision measuring temperature structure of chip |
| CN103529242A (en) * | 2013-10-17 | 2014-01-22 | 电子科技大学 | Resonance micro-accelerometer |
| CN103901225B (en) * | 2014-04-02 | 2016-04-27 | 清华大学 | Silicon micro-resonance type accelerometer |
| CN104698222B (en) * | 2015-02-15 | 2017-06-16 | 东南大学 | Three axle single-chip integration resonant capacitance formula silicon micro accerometers and its processing method |
| CN107064555B (en) * | 2017-03-10 | 2020-09-04 | 中国科学院地质与地球物理研究所 | MEMS accelerometer and manufacturing process thereof |
| CN110221098A (en) * | 2018-03-01 | 2019-09-10 | 中国科学院微电子研究所 | Silicon micro-resonance type accelerometer and its self-test method |
| CN109110724B (en) * | 2018-09-30 | 2024-08-02 | 南京理工大学 | Be applied to MEMS force sensitive device's second grade stress isolation structure |
| CN109164272B (en) * | 2018-10-25 | 2020-10-27 | 中北大学 | Push-pull full-differential uniaxial silicon micro-resonant accelerometer |
| CN111812355B (en) * | 2019-04-10 | 2022-07-12 | 北京大学 | Low stress sensitivity silicon micro resonant accelerometer structure |
| CN110068705B (en) * | 2019-05-16 | 2020-12-29 | 西华大学 | Silicon micro-resonance accelerometer with high-power inertial force amplification characteristic |
| CN112858723B (en) * | 2021-01-14 | 2023-06-09 | 南京理工大学 | Interference mode suppression device and method for silicon micro-resonant accelerometer |
| CN115236357A (en) * | 2022-07-04 | 2022-10-25 | 南京理工大学 | Silicon micro-resonance beam accelerometer structure with single anchor point fixed tuning fork resonator |
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