CN103529242A - Resonance micro-accelerometer - Google Patents
Resonance micro-accelerometer Download PDFInfo
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- CN103529242A CN103529242A CN201310488197.3A CN201310488197A CN103529242A CN 103529242 A CN103529242 A CN 103529242A CN 201310488197 A CN201310488197 A CN 201310488197A CN 103529242 A CN103529242 A CN 103529242A
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Abstract
The invention discloses a resonance micro-accelerometer, comprising a substrate layer and a structure layer; the structure layer comprises a tuning fork resonance unit, a connection block, a driving electrode, a detection electrode, an inertia unit and a coupling capacitor; the tuning fork resonance unit comprises a tuning fork vibrating beam and a vibrating beam electrode; the tuning fork vibrating beam is suspended in air; one end of the tuning fork vibrating beam is fixedly connected with the substrate via an anchor point; the other end of the tuning fork vibrating beam is a free end; the vibrating beam electrode is fixedly connected with the tuning fork vibrating beam; the inertia unit is suspended in air and is coupled with the connection block by the coupling capacitor; the coupling capacitor is used for coupling the inertia force borne by an inertia block to the connection block. The resonance micro-accelerometer has the beneficial effects of releasing the residual stress on the vibrating beam and avoiding the turning up and twisting deformation; in the work process of the vibrating beam, the vibrating beam is always subjected to the axial pull force under the electrostatic force without the converting between the pull force and the press stress, so the influence of the residual stress is avoided; meanwhile, the inertia force is transmitted to be loaded onto the tuning fork vibrating beam by the coupling capacitor, and no other mechanical structure deformation exists in the transmission process, so the energy transmission precision is ensured.
Description
Technical field
The invention belongs to the technical field of micromechanics (MEMS) sensor, relate to MEMS micro-acceleration detection means, particularly a kind of resonance type micro accelerometer.
Background technology
Micro-acceleration gauge is one of sensor being most widely used in MEMS device, in military-civil fields such as navigation, medical treatment, electronics, monitoring, automobiles, there is huge prospect, be the emphasis research and development product of current scientific research institutions, colleges and universities and enterprise, especially high-precision accelerometer development becomes the first choice of seizing MEMS commanding elevation.Resonance type micro accelerometer, as a member in first choice, has advantages of that many its type accelerometers are incomparable.The micro-acceleration gauge of this type reacts extraneous acceleration by the vibration frequency of shock structure, and the output signal of device is frequency.Because it has digital signal feature, be easy to be combined with digital circuit, therefore more easily realize high stability and the high precision performance of micro-inertia device.
As abovely by frequency, come the mode of Sensitive Apparatus acceleration can be divided into axial stress formula, cross sectional moment of inertia formula and electrostatic stiffness formula three types.The acceleration sensitive mode of this three types is at " current situation of resonance type micro accelerometer " (Zhou Wu of inventor, He Xiaoping, Su Wei, Li Bailin. Sichuan Province institute of electronics Annual Conference paper compilation in 2007, Mianyang, Sichuan, 2007.6.28) has detailed discussion in document; In addition, also have the identical and Yang Bo of Southeast China University of southern Qiu An Ping Deng, Liu of Nanjing Information engineering Univ of Polytechnics etc. to carry out improving or having developed novel detection architecture to existing resonance type accelerometer; These achievements in research have played huge impetus to the development of micro-acceleration gauge.Yet unrelieved stress and mismachining tolerance are still the principal element that hinders current resonance type micro accelerometer development, because the micro-torsion structure of the resonance beam that both-end is fixing and double-strand chain all relates to stress sensitive mechanism, when positive and negative inertial force replaces, it is larger that device output is affected by unrelieved stress, therefore the senser element of this type is high to technological requirement, is unfavorable for increasing substantially of precision.
At present to the research great majority of resonance type micro accelerometer based on axial force sensitive mechanism, reason be tuning fork beam that resonator uses have simple in structure, be easy to drive and mode is easy to the advantages such as control, and when the static that adopts widespread use drives with capacitance detecting, the design of electrode has higher dirigibility with processing, and driving force and Detection capacitance can regulate by adjusting electrode logarithm; When the form of inertial force by axial stress is loaded on walking beam, the variable quantity of frequency has good linear relationship with input stress, and its sensitivity can improve with increase power amplification lever by reducing beam section size.But, to improve one's methods and also there is certain weak point for above-mentioned two kinds: after the sectional dimension of beam reduces, the natural frequency of beam will reduce, range declines, and the fabrication error dependence of thin beam is large, and the vibration shape is wayward; When utilizing lever to carry out power amplification, the Structure and technological design of lever has sizable difficulty, has greatly improved manufacturing cost, has increased the complicacy of system simultaneously.
Summary of the invention
The present invention, in order to solve that the resonance type micro accelerometer of existing axial force sensitive mechanism is large to process dependency, the vibration shape is wayward and the series of problems such as manufacturing cost is high, has proposed a kind of resonance type micro accelerometer.
Technical scheme of the present invention is, a kind of resonance type micro accelerometer, comprise basalis and structural sheet, it is characterized in that, structural sheet comprises tuning fork resonant element, contiguous block, drive electrode, detecting electrode, inertance element and coupling capacitance, and described tuning fork resonant element comprises tuning fork shake beam and the beam electrode that shakes, the tuning fork beam that shakes is unsettled, one end is fixedly connected with substrate by anchor point, and the other end is free end, and shake beam electrode and the tuning fork beam that shakes is fixedly connected with; Contiguous block comprises contiguous block electrode, and described contiguous block is unsettled and be fixedly connected with the shake free end of beam of tuning fork; Drive electrode is connected with the beam electrode coupling that shakes with detecting electrode, the two position shaking in beam vibrations according to tuning fork respectively with the beam electrode coupling that shakes; Inertance element unsettled and and contiguous block between by coupling capacitance, be coupled, coupling capacitance is for being coupled to contiguous block by the suffered inertial force of inertial mass.
Further, contiguous block supports unsettled by two brace summers, and brace summer anchors in substrate by anchor point.
Further, described coupling capacitance is plane-parallel capacitor.
Further, in order to make the transmission of power between inertance element and contiguous block more even, described coupling capacitance is many group comb teeth-shaped plane-parallel capacitors, and is preferably four groups.
Further, described inertance element comprises inertial mass and folded beam, and described inertial mass is supported unsettled by a plurality of folded beams, and folded beam is fixedly attached in substrate by anchor point.
Further, described folded beam is many folded beams, is preferably three folded beams.
Further, in order to guarantee the reliability of electrode, the battery lead plate of described drive electrode, detecting electrode and the beam electrode that shakes is comb-like electrode plate.
Further, described drive electrode is connected with static power supply respectively with the beam electrode that shakes.
Beneficial effect of the present invention: the tuning fork that 1, the present invention the adopts beam one end that shakes is fixed, and one end is supported by flexible brace summer, and the unrelieved stress of shaking on beam is discharged, and has avoided warpage and torsional deformation; 2, in the beam course of work of shaking, be subject to all the time the axial tension under electrostatic forcing, do not exist draw, compressive stress transforms, and avoided the impact of unrelieved stress; 3, input inertial force is loaded into tuning fork by coupling capacitance and shakes on beam, in transmittance process, without other physical construction distortion, has reduced energy loss, has improved power conversion efficiency, has guaranteed energy transmitting accuracy; 4, the power of local oscillator vibration of beam frequency and changeover condenser is transmitted multiple and is subject to the voltage influence that inertial mass and tuning fork shake between beam, so can realize by regulation voltage the adjusting of frequency, sensitivity and range, the dirigibility that has improved structural design; 5, the unrelieved stress of described accelerometer and fabrication error dependence are little, and sensitivity is adjustable, and manufacture difficulty is low.
Accompanying drawing explanation
Fig. 1 is the resonance type micro accelerometer cut-open view of the embodiment of the present invention;
Fig. 2 is the structural sheet schematic diagram of this resonance type micro accelerometer;
Fig. 3 is tuning fork resonant element and connecting block structure schematic diagram in the structural sheet shown in Fig. 2;
Fig. 4 is inertance element structural representation in the structural sheet shown in Fig. 2;
Fig. 5 is coupling capacitance coupled relation schematic diagram;
Fig. 6, Fig. 7 are respectively left and right folded beam structural representation.
Number in the figure explanation: basalis 1, anchor point 2, structural sheet 3, tuning fork resonator 31, the tuning fork beam 311 that shakes, anchor point 312, the beam electrode 313 that shakes, contiguous block 32, contiguous block electrode 321, brace summer 322, anchor point 323, drive electrode 33, detecting electrode 34, inertance element 35, inertial mass 351, folded beam 352, anchor point 353, electrode 4, coupling capacitance 5, capacitor plate 51, capacitor plate 52.
Embodiment
Embodiment and accompanying drawing thereof below in conjunction with resonance type micro accelerometer of the present invention are further described the present invention.
As shown in Figure 1, Figure 2 and Figure 3, a kind of resonance type micro accelerometer of the embodiment of the present invention, comprises basalis 1 and structural sheet 3, basalis can adopt substrate of glass, structural sheet arranges functional unit, and structural sheet is connected by anchor point 2 with basalis, is also provided with electrode 4 on basalis.In order to realize acceleration sensing function, on structural sheet 3, be provided with tuning fork resonant element 31, contiguous block 32, drive electrode 33, detecting electrode 34, inertance element 35 and coupling capacitance 5.Tuning fork resonant element 31 specifically comprises tuning fork shake beam 311 and the beam electrode 313 that shakes, and the tuning fork beam that shakes is unsettled, and one end is fixedly connected with substrate 1 by anchor point 312, and the other end is free end, and shake beam electrode and the tuning fork beam that shakes is fixedly connected with.The effect of tuning fork resonant element is by certain driving force with certain frequency resonance, and in the time of in the environment of device in acceleration non-zero, resonator is with size and then the reaction acceleration magnitude of the suffered inertial force of frequency response.Its principle of work is as follows: the tuning fork beam that shakes is comprised of two parallel rectangular cross section beams, and the middle part of the beam that shakes has along the comb-like electrode outwards stretching perpendicular to axis direction, is called the beam electrode that shakes.Also there is one group of drive electrode with the beam electrode coupling that shakes simultaneously.When the beam electrode that shakes is connected static power supply with drive electrode simultaneously, drive electrode with shake beam electrode because electrostatic force produces mutually, order about the tuning fork being fixedly connected with the beam electrode that the shakes beam axial vibrations of shaking.For tuning fork is shaken, vibration of beam is stable continues, and the detailed structure of above-mentioned contiguous block 32 is as contiguous block electrode 321, and described contiguous block electrode 321 is unsettled and be fixedly connected with the shake free end of beam of tuning fork; Above-mentioned detecting electrode 34 is connected with the beam electrode coupling that shakes, and wherein detecting electrode 34 is exported corresponding frequency signal according to the shake vibration frequency of beam of tuning fork, and its principle is on tuning fork shakes vibration of beam path a certain position and shakes beam electrode coupling; Inertance element 35 unsettled and and contiguous block electrode 321 between by coupling capacitance 5, be coupled, coupling capacitance is for being coupled to contiguous block electrode by the suffered inertial force of inertial mass.
Concrete, above-mentioned contiguous block supports and unsettled by two brace summers, and brace summer anchors on basalis by anchor point.Described coupling capacitance is plane-parallel capacitor.As shown in Fig. 3, Fig. 4 and Fig. 5, its capacitor plate 51 and 52 is fixedly attached to respectively in contiguous block 321 and inertial mass 351.The battery lead plate of described coupling capacitance has in the course of the work static and is coupled by electrostatic force.Above-mentioned inertance element is acceleration (inertial force) sensing unit of this device, and by arranging, in the time of in the environment of device in inertial force non-zero, the inertial mass of inertance element is because inertial force can be subjected to displacement.The displacement meeting of described inertial mass to tuning fork resonant element, and then has influence on the frequency of tuning fork resonant element by the electrostatic forcing between coupling capacitance.In order to make the transmission of power between inertance element and contiguous block more even, described coupling capacitance is many group comb teeth-shaped plane-parallel capacitors, and is preferably four groups.
Inertance element can be unsettled with responsive inertial force in several ways, but as the simple technology mode of a kind of maturation, the preferred hanging structure of the inertance element that the present embodiment provides is: inertance element 35 comprises inertial mass 351 and folded beam 352, described inertial mass is supported unsettled by a plurality of folded beams, folded beam is fixedly attached in substrate by anchor point.Wherein, described folded beam is many folded beams, is preferably three folded beams, i.e. three grades of cantilever beam structures, as shown in Figure 6 and Figure 7.Further, in order to guarantee the reliability of electrode, the battery lead plate of described drive electrode, detecting electrode and the beam electrode that shakes is comb-like electrode plate.The preferred type of drive of drive electrode, shake beam electrode and coupling capacitance is electrostatic force and drives, by the realization that is connected with static power supply.
The concrete layout of drive electrode, shake beam electrode and detecting electrode as shown in Figure 2, shake beam electrode both sides respectively layout three groups of comb electrodes form drive electrode and detecting electrode, by anchor point and substrate, be fixedly connected, wherein two groups of drive electrodes.Concrete, the arrangement mode of described drive electrode, shake beam electrode and detecting electrode can also be the up-down structure in space.And the configuration of electrodes of up-down structure is more conducive to, and electrode is arranged and reduction of device volume.
Device principle of work of the present invention is as follows: by electrode, shaken on beam and inertance element and add V respectively to tuning fork
bwith V
mdC voltage, make to produce electrostatic force between two pole plates of coupling capacitance and make the tuning fork beam that shakes be subject to axial tension, now the tuning fork beam that shakes has vibration frequency f
0.When sensitive direction has acceleration input, inertance element produces displacement, and the gap of coupling capacitance changes, and electrostatic force changes, and the axial force on tuning fork beam also changes, and frequency size becomes f
1, frequency variation directly reflects the size of input acceleration.Concrete, when having acceleration input, inertial mass 351 is subject to inertial force, folded beam 352 deforms, and gap length between coupling capacitance pole plate 51 and 52 changes, in coupling capacitance in on-load voltage situation, electrostatic force between two-plate changes under the situation of change of gap, and being loaded into the shake axis direction of beam of tuning fork, the resonance frequency of the beam that shakes changes, and just realizes the detection of acceleration by detecting the variation of resonance frequency.
The course of work of the resonance type micro accelerometer of the present embodiment is as follows:
1, load driver voltage V on drive electrode
d, the tuning fork beam that shakes vibrates under electrostatic forcing, and the electric charge changing on detecting electrode can detect vibration of beam frequency by detecting the variation of electric charge; Meanwhile, add V to respectively the pole plate of coupling capacitance
bwith V
mdC voltage, between two pole plates, produce electrostatic force F
e, cause inertial mass axially to produce minute movement at the tuning fork beam that shakes, the tuning fork beam that shakes is subject to axial tension F
e, natural frequency increases, then combined with circuit control is operated under the resonance mode of antiphase the tuning fork beam that shakes, and now the frequency of tuning fork beam size is f
0.2,, when sensitive direction input acceleration (generation inertial force), in inertial mass, form inertial force F
a, at F
ewith F
aunder acting in conjunction, folded beam will produce deformation, and inertial mass is subjected to displacement on sensitive direction, thereby change the gap length between coupling capacitance electrode 51 and 52, thereby cause the variation of electrostatic force between two electrodes, and now electrostatic force becomes F
ea.Because tuning fork axial tension rigidity on contiguous block is much larger than the lateral stiffness of brace summer, nearly all electrostatic force is all loaded into tuning fork and shakes on beam, and the tuning fork beam that shakes is subject to axial tension F
eaeffect, resonance frequency becomes f
0a.Inertial force by coupling capacitance be delivered to tuning fork shake beam axially on, capacitor has played the effect of lever, inertial force has been carried out being loaded into resonance beam after suitable zooming in or out, the enlargement factor of power can regulate by the voltage between capacitor plate, meanwhile, the vibration frequency of resonance beam also can regulate by this on-load voltage.3, when inertial force is added to the tuning fork Liang Shanghou that shakes after conversion, testing circuit passes through signal controlling, export new frequency values, by subsequent experimental scale, just draw the relation of input acceleration and frequency outlet chamber, thereby complete the acceleration analysis function of resonance type micro accelerometer.It should be noted that, although relate to the participation of control circuit in the course of work of said apparatus is described, this control circuit is not essential feature of the present invention, the signal conversion of just carrying out in order to adapt to the identifiability of output quantity.
The resonance type micro accelerometer of the present embodiment has the following advantages: 1, the resiliency supported of tuning fork beam discharges the unrelieved stress in resonance beam, has avoided warpage and torsional deformation.2, the tension all the time under resonance beam electrostatic forcing, nothing is drawn, compressive stress transforms, and has reduced the impact of unrelieved stress.3, input inertial force is loaded in resonance beam by changeover condenser, has reduced energy loss, has improved power conversion efficiency.4, the vibration frequency of the resonance beam in the present invention and the power of changeover condenser are transmitted multiple and are subject to the voltage influence between contiguous block and tuning fork beam, therefore can realize by regulation voltage the adjusting of frequency, sensitivity and range, the dirigibility that has improved structural design.
The foregoing is only the specific embodiment of the present invention, one skilled in the art will appreciate that in the disclosed technical scope of the present invention, can carry out various modifications, replacement and change to the present invention.Therefore the present invention should not limited by above-mentioned example, and should limit with the protection domain of claims.
Claims (8)
1. a resonance type micro accelerometer, comprise basalis and structural sheet, it is characterized in that, structural sheet comprises tuning fork resonant element, contiguous block, drive electrode, detecting electrode, inertance element and coupling capacitance, described tuning fork resonant element comprises tuning fork shake beam and the beam electrode that shakes, and the tuning fork beam that shakes is unsettled, and one end is fixedly connected with substrate by anchor point, the other end is free end, and shake beam electrode and the tuning fork beam that shakes is fixedly connected with; Contiguous block comprises contiguous block electrode, and described contiguous block is unsettled and be fixedly connected with the shake free end of beam of tuning fork; Drive electrode is connected with the beam electrode coupling that shakes with detecting electrode, the two position shaking in beam vibrations according to tuning fork respectively with the beam electrode coupling that shakes; Inertance element unsettled and and contiguous block between by coupling capacitance, be coupled, coupling capacitance is for being coupled to contiguous block by the suffered inertial force of inertial mass.
2. a kind of resonance type micro accelerometer according to claim 1, is characterized in that, contiguous block supports unsettled by two brace summers, and brace summer anchors in substrate by anchor point.
3. a kind of resonance type micro accelerometer according to claim 1 and 2, is characterized in that, described coupling capacitance is plane-parallel capacitor.
4. according to a kind of resonance type micro accelerometer described in any one claim of claim 1-3, it is characterized in that, described coupling capacitance is many group comb teeth-shaped plane-parallel capacitors, and is preferably four groups.
5. a kind of resonance type micro accelerometer according to claim 1, is characterized in that, described inertance element comprises inertial mass and folded beam, and described inertial mass is supported unsettled by a plurality of folded beams, and folded beam is fixedly attached in substrate by anchor point.
6. a kind of resonance type micro accelerometer according to claim 5, is characterized in that, described folded beam is many folded beams, is preferably three folded beams.
7. a kind of resonance type micro accelerometer according to claim 1 and 2, is characterized in that, the battery lead plate of described drive electrode, detecting electrode and the beam electrode that shakes is comb-like electrode plate.
8. according to a kind of resonance type micro accelerometer described in any one claim of claim 1-7, it is characterized in that, described drive electrode is connected with static power supply respectively with the beam electrode that shakes.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103954305A (en) * | 2014-05-09 | 2014-07-30 | 浙江大学 | MEMS resonant mode charge sensor with flexible levers and detection method thereof |
| CN105043422A (en) * | 2015-09-08 | 2015-11-11 | 浙江大学 | MEMS resonant charge sensor with high resolution and wide dynamic range and detection method |
| CN107515311A (en) * | 2017-08-18 | 2017-12-26 | 西安交通大学 | A kind of mems accelerometer based on synchronous resonant frequency detecting |
| CN107796996A (en) * | 2017-09-27 | 2018-03-13 | 浙江大学 | Bent beam micro-resonance type electrometer and charge detection method with single free end |
| CN108519498A (en) * | 2018-03-08 | 2018-09-11 | 北京航天控制仪器研究所 | A kind of self-adapting closed loop measuring system of Micromachined Accelerometer Based on Resonant Principle |
| CN114112184A (en) * | 2021-11-21 | 2022-03-01 | 常州奇军苑电子科技有限公司 | Surface bending mode double-coupling single-chip type high-sensitivity quartz tuning fork vacuum sensor |
| US11493531B2 (en) | 2019-11-07 | 2022-11-08 | Honeywell International Inc. | Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954305A (en) * | 2014-05-09 | 2014-07-30 | 浙江大学 | MEMS resonant mode charge sensor with flexible levers and detection method thereof |
| CN105043422A (en) * | 2015-09-08 | 2015-11-11 | 浙江大学 | MEMS resonant charge sensor with high resolution and wide dynamic range and detection method |
| CN105043422B (en) * | 2015-09-08 | 2017-10-27 | 浙江大学 | The MEMS resonant formula charge sensor and detection method of high-resolution and wide dynamic range |
| CN107515311B (en) * | 2017-08-18 | 2019-05-21 | 西安交通大学 | A kind of mems accelerometer based on synchronous resonant frequency detecting |
| CN107515311A (en) * | 2017-08-18 | 2017-12-26 | 西安交通大学 | A kind of mems accelerometer based on synchronous resonant frequency detecting |
| CN107796996A (en) * | 2017-09-27 | 2018-03-13 | 浙江大学 | Bent beam micro-resonance type electrometer and charge detection method with single free end |
| CN107796996B (en) * | 2017-09-27 | 2020-03-24 | 浙江大学 | Bending beam micro-resonance type electrostatic meter with single free end and charge detection method |
| CN108519498A (en) * | 2018-03-08 | 2018-09-11 | 北京航天控制仪器研究所 | A kind of self-adapting closed loop measuring system of Micromachined Accelerometer Based on Resonant Principle |
| CN108519498B (en) * | 2018-03-08 | 2020-09-18 | 北京航天控制仪器研究所 | Self-adaptive closed-loop measurement system of resonant accelerometer |
| US11493531B2 (en) | 2019-11-07 | 2022-11-08 | Honeywell International Inc. | Resonator electrode configuration to avoid capacitive feedthrough for vibrating beam accelerometers |
| US11567100B2 (en) | 2019-11-07 | 2023-01-31 | Honeywell International Inc. | Vibrating beam accelerometer with additional support flexures to avoid nonlinear mechanical coupling |
| US11754591B2 (en) | 2019-11-07 | 2023-09-12 | Honeywell International Inc. | Vibrating beam accelerometer with pressure damping |
| CN114112184A (en) * | 2021-11-21 | 2022-03-01 | 常州奇军苑电子科技有限公司 | Surface bending mode double-coupling single-chip type high-sensitivity quartz tuning fork vacuum sensor |
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Application publication date: 20140122 |