CN105043422B - The MEMS resonant formula charge sensor and detection method of high-resolution and wide dynamic range - Google Patents
The MEMS resonant formula charge sensor and detection method of high-resolution and wide dynamic range Download PDFInfo
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- CN105043422B CN105043422B CN201510565524.XA CN201510565524A CN105043422B CN 105043422 B CN105043422 B CN 105043422B CN 201510565524 A CN201510565524 A CN 201510565524A CN 105043422 B CN105043422 B CN 105043422B
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Abstract
The invention discloses the MEMS resonant formula charge sensor and detection method of a kind of high-resolution and wide dynamic range.It includes micro-resonator unit, flexible steel microtube, electric charge input four modules of pole plate and microdrive, micro-resonator unit one end is fixed, the other end is connected with flexible steel microtube, the fixed capacity of small capacitances value is formed between flexible steel microtube and electric charge input pole plate, regulation electric capacity is formed between microdrive and electric charge input pole plate, described regulation mobile realization of the electric capacity by microdrive, the movable part and micro-resonator unit of microdrive are altogether.In the case where input charge amount is of different sizes, change the size of capacitance value by feedback control, so that remaining the electrical potential difference of size reasonable between electric charge input pole plate and flexible steel microtube, while ensureing micro-resonator element output signal intensity, damage of the overtension to device is avoided, the charge measurement of high-resolution and wide dynamic range is realized.
Description
Technical field
The invention belongs to MEMS（MEMS）Sensor and actuator field in technical field, more particularly to one
Plant the MEMS resonant formula charge sensor and detection method of high-resolution and wide dynamic range.
Background technology
Charge sensor plays huge effect in scientific research, industrial production and daily life, such as in life
Charge sensor is frequently utilized for the speed for examining biochemical reaction to occur in thing medical domain, and in aerospace field then usually
It is used to detect transmitted intensity, or even also has in the mobile phone that we use daily and use charge sensor to obtain the electricity of battery
Measure information etc..MEMS resonant formula charge sensor is with its small volume, precision height, CMOS in the charge sensor of numerous types
The advantages of compatibility is waited by force occupies a very important part in market.
The study hotspot of current resonant transducer is mainly concentrated in improving the accuracy of detection of device and expands device
This two pieces of fields of detection range.The resolution ratio that the sensor of the type is can be found that according to theoretical research for the former is mainly
Determined by two factors of width of material property in itself and input electrode.It is contemplated that processing and the reality of application aspect
Border problem, often higher resolution is obtained in Realism Design and production process using the method for the width for reducing input electrode
Rate.
But problems are also brought while resolution ratio raising, such as range ability reduction, voltage across poles rise etc..
For this problem, product on the market does not have preferable solution to this at present, and needing badly a kind of has high-resolution and width
The MEMS resonant formula charge sensor of dynamic range.
The content of the invention
In order to obtain higher resolution ratio and wider measurement range simultaneously, the invention provides a kind of high-resolution and width
The MEMS resonant formula charge sensor and detection method of dynamic range.
The technical solution adopted for the present invention to solve the technical problems is：
A kind of MEMS resonant formula charge sensor with high-resolution and wide dynamic range, double-ended tuning fork resonator
One end is connected with resonator fixing end, and is coupled with driving electrodes, induction electrode, and the other end passes through flexible steel microtube output end
It is connected with flexible lever arm, flexible lever arm end both-side ends are all provided with flexible steel microtube input, flexible steel microtube fulcrum
It is arranged on flexible lever arm；Electric charge inputs pole plate side and couples to form fixed capacity with flexible steel microtube input；Micro-move device
Device moving part side couples to form regulation electric capacity with electric charge input pole plate, and opposite side is provided with fixed electrode, and middle part both sides are all provided with
There is comb teeth-shaped structure, and coupled with driving comb, driving comb is connected with fixed broach electrode, the comb of microdrive moving part
Tooth both sides are equipped with support beam, and the support beam for inputting pole plate side close to electric charge is provided with support beam fixing end.
Preferably, double-ended tuning fork resonator is in two I-shaped combining structures, described driving electrodes (2) up and down
Double-ended tuning fork resonator both sides are respectively arranged at, induction electrode is respectively arranged at four cavitys of two I-shaped structures
In.
Preferably, electric charge inputs the C-shaped structure of pole plate, its both-side ends is relative with flexible steel microtube input, electric charge
Input electrode is connected on input pole plate.
Preferably, microdrive moving part side is coupled with electric charge input pole plate in comb teeth-shaped.
Preferably, MEMS resonant formula charge sensor material is monocrystalline silicon or polysilicon.
It is a further object of the present invention to provide a kind of charge detection method using the MEMS resonant formula charge sensor,
Comprise the following steps：
Resonator fixing end, flexible steel microtube fulcrum, electric charge input pole plate, fixed broach electrode, support beam fixing end and
Fixed electrode is fixed on substrate；Resonator fixing end is grounded with fixed electrode；DC offset voltage is with alternating current drive signal with driving
Moving electrode is connected, to drive double-ended tuning fork resonator to vibrate at the resonant frequency fx；It is defeated that electric charge to be measured inputs pole plate by electric charge
Enter；Induced signal is exported by induction electrode；Control voltage is inputted by fixed broach electrode, for controlling microdrive moving part
Position；
During measurement, maximum voltage is inputted first at fixed broach electrode, regulation electric capacity is in maximum state of value, will
The voltage that electric charge input charge to be measured is inputted produced by pole plate, device is minimum, then by adjusting the control at fixed broach electrode
Voltage processed, makes the electrical potential difference that flexible steel microtube input and electric charge are inputted between pole plate be in preset value, so as to obtain sufficiently strong
The induced signal of degree.
The beneficial effects of the invention are as follows the sensor by reducing the method for the width of input electrode, obtain microsensor
Higher resolution ratio, while coupled capacitor between micro-displacement executing agency and input electrode, by the size for adjusting the electric capacity
Adjust the size of voltage across poles and improve the too high influence of brought voltage across poles to make up resolution ratio.Also there is structure letter simultaneously
It is single, it is easy to control, easily the characteristics of detection output signal.
Brief description of the drawings
Fig. 1 is the dimensional structure diagram of the MEMS resonant formula charge sensor of high-resolution and wide dynamic range；
Fig. 2 is the planar structure schematic diagram of the MEMS resonant formula charge sensor of high-resolution and wide dynamic range；
Fig. 3 is the support beam alternative construction schematic diagram of the present invention；
Fig. 4 is the electric charge input equivalent circuit theory of the present invention；
Fig. 5 is the circuit connection diagram of the present invention；
Fig. 6 is the control block diagram of the present invention；
Fig. 7 is the measurement procedure figure of the present invention.
In figure：Resonator fixing end 1, driving electrodes 2, induction electrode 3, double-ended tuning fork resonator 4, flexible steel microtube
Output end 5, flexible steel microtube fulcrum 6, flexible steel microtube input 7, fixed capacity 8, electric charge input pole plate 9, regulation electric capacity 10,
Support beam 11, fixed broach electrode 12, microdrive moving part 13, driving comb 14, fixed electrode 15, flexible lever arm 16
With support beam fixing end 17.
Embodiment
To become apparent from the object, technical solutions and advantages of the present invention, below in conjunction with accompanying drawing, to of the invention further detailed
Describe in detail bright.If not done by limiting or existing outside conflict in following preferred embodiments, it can be combined.
As illustrated in fig. 1 and 2, a kind of MEMS resonant formula charge sensor with high-resolution and wide dynamic range, including：
Resonator fixing end 1, driving electrodes 2, induction electrode 3, double-ended tuning fork resonator 4, flexible steel microtube output end 5, flexibility
Steel microtube fulcrum 6, flexible steel microtube input 7, fixed capacity 8, electric charge input pole plate 9, adjust electric capacity 10, support beam 11, consolidate
Determine comb electrodes 12, microdrive moving part 13, driving comb 14, fixed electrode 15, flexible lever arm 16 and support beam solid
Fixed end 17.Sensor of the invention makes double-ended tuning fork humorous by the driving voltage of the application certain frequency in driving electrodes 2
The device 4 that shakes produces the resonance of certain frequency, to detect electric charge.
The one end of double-ended tuning fork resonator 4 is connected with resonator fixing end 1, and with driving electrodes 2, the phase of induction electrode 3
Coupling, the other end is connected by flexible steel microtube output end 5 with flexible lever arm 16, and the end both-side ends of flexible lever arm 16 are equal
Provided with flexible steel microtube input 7, flexible steel microtube fulcrum 6 is arranged on flexible lever arm 16；Electric charge input the side of pole plate 9 with
The flexible coupling of steel microtube input 7 forms fixed capacity 8.Wherein flexible lever arm 16 is arranged symmetrically, and is cancelled out each other along flexible thick stick
The power that lever arm direction is produced, flexible lever is used to amplify inputs caused electrostatic force by electric charge.When input charge, due to by
A power is inputted at the effect of electrostatic force, flexible steel microtube input 7, micro-resonator is passed to after the amplification of lever.
The side of microdrive moving part 13 couples formation regulation electric capacity 10 with electric charge input pole plate 9, and opposite side is provided with solid
Fixed electrode 15, middle part both sides are equipped with comb teeth-shaped structure, and are coupled with driving comb 14, driving comb 14 and fixed broach electrode
12 are connected, and the broach both sides of microdrive moving part 13 are equipped with support beam 11, and the support of the side of pole plate 9 is inputted close to electric charge
Beam 11 is provided with support beam fixing end 17.It is movable in microdrive when fixed broach electrode 12 inputs a certain size voltage
Certain electrostatic force can be produced between part 13 and driving comb 14 and is balanced with the formation of support beam 11, certain displacement is produced, enters
And change the size of regulation electric capacity 10.The support beam 11 for inputting the side of pole plate 9 close to electric charge can have a variety of implementations, except Fig. 1
Outside the scheme shown in Fig. 2, A, B as shown in Figure 3 is other two mode.
As a kind of preferred embodiment of double-ended tuning fork resonator 4, double-ended tuning fork resonator 4 is in up and down two
Individual I-shaped combining structure, described driving electrodes 2 are respectively arranged at the both sides of double-ended tuning fork resonator 4,3 points of induction electrode
It is not arranged in four cavitys of two I-shaped structures.
A kind of preferred embodiment of pole plate 9, the electric charge input C-shaped structure of pole plate 9, its both-side ends are inputted as electric charge
It is relative with flexible steel microtube input 7, connect input electrode on electric charge input pole plate 9.
As a kind of preferred embodiment, the side of microdrive moving part 13 is in comb teeth-shaped coupling with electric charge input pole plate 9
Close.
As a kind of preferred embodiment, MEMS resonant formula charge sensor material is monocrystalline silicon or polysilicon.
The equivalent circuit theory of sensor：
As shown in figure 4, device electric charge input equivalent circuit port, wherein 8 be fixed capacity, 10 be regulation electric capacity.When
The timing of the quantity of electric charge one that device is received, it is believed that equivalent capacity 8 is now adjusted as being with the electric charge sum of institute's band on 10
Save the voltage difference on fixed broach electrode 12, you can change the size of regulation electric capacity 10, so as to change the voltage of device inside.By
One-to-one relation is shown in an experiment in control voltage and capacitance, so can now be obtained by certain calculating
The quantity of electric charge.
The control method of sensor：
1）Circuit is connected according to circuit connecting mode shown in Fig. 5.
2）According to block diagram shown in Fig. 6, control system is built.Wherein resonance circuit m can catch and track the intrinsic of device
Frequency, the current signal of output becomes by trans-impedance amplifier e will letter after voltage signal filters high frequency spurs by wave filter
Number it is input in single-chip microcomputer i, single-chip microcomputer obtains the frequency of input, is contrasted with standard bands, and rightly control is exported
Binary system is converted to voltage signal by MEMS charge sensors c fixed broach electrode 12 to adjust electric charge sensing by DACk
Distribution of charges inside device, makes the resonant frequency of voltage produced by sensor and output in a suitable level.
3）Measurement procedure is as shown in Figure 7.The first step：System connection is completed according to above-mentioned requirements；Second step：Need release electricity
Lotus simultaneously will adjust the maximum of electric capacity 10；3rd step：Electric charge to be measured is added, the size that system adjusts electric capacity 10 by closed-loop control makes
The resonant frequency of voltage and output in system is in suitable scope；4th step：Frequency that charge sensor is exported and
The quantity of electric charge of measurement required for the capacitance of current regulation electric capacity 10 can be obtained by conversion.
A kind of charge detection method using the MEMS resonant formula charge sensor, comprises the following steps：
Resonator fixing end 1, flexible steel microtube fulcrum 6, electric charge input pole plate 9, fixed broach electrode 12, support beam are fixed
End 17 and fixed electrode 15 are fixed on substrate；Resonator fixing end 1 is grounded with fixed electrode 15；DC offset voltage is with exchanging drive
Dynamic signal is connected with driving electrodes 2, to drive double-ended tuning fork resonator 4 to vibrate at the resonant frequency fx；Electric charge to be measured is by electricity
Lotus input pole plate 9 is inputted；Induced signal is exported by induction electrode 3；Control voltage is inputted by fixed broach electrode 12, for controlling
The position of microdrive moving part 13；
When electric charge is input to electric charge input pole plate 9, electrical potential difference, root are formed between fixed capacity 8 and regulation electric capacity 10
According to formula V=Q/C, change the size of regulation electric capacity 10, can change between flexible steel microtube input 7 and electric charge input pole plate 9
Electrical potential difference.
Input the voltage of maximum the initial stage of measurement at fixed broach electrode 12, regulation electric capacity 10 is in maximum shape
State, the voltage produced by electric charge input charge to be measured is inputted in pole plate 9, device is minimum, then by adjusting fixed broach electrode
Control voltage at 12, makes the electrical potential difference that flexible steel microtube input 7 and electric charge are inputted between pole plate 9 be in preset value, so that
Obtain the induced signal of sufficient intensity.
Sensor innovative point of the present invention is to be capable of the range of dynamic measurement of adjusting device to obtain in equal conditions
Under higher measurement accuracy.The structural material of the charge sensor is monocrystalline silicon or polysilicon, can be based on a variety of processing works
Skill, such as utilizes SOI（Silicon on Insulator）Chip completes the knot of charge sensor as substrate in a wafer
Structure layer, reduces production cost, and Making programme is simple.
Claims (6)
1. a kind of MEMS resonant formula charge sensor of high-resolution and wide dynamic range, it is characterised in that double-ended tuning fork
Resonator（4）One end and resonator fixing end（1）It is connected, and is coupled with driving electrodes (2), induction electrode (3), the other end leads to
Cross flexible steel microtube output end（5）With flexible lever arm（16）It is connected, flexible lever arm（16）End both-side ends are equipped with soft
Property steel microtube input（7）, flexible steel microtube fulcrum（6）It is arranged at flexible lever arm（16）On；Electric charge inputs pole plate（9）Side
With flexible steel microtube input（7）Coupling forms fixed capacity（8）；Microdrive moving part（13）Side inputs pole with electric charge
Plate（9）Coupling forms regulation electric capacity（10）, opposite side is provided with fixed electrode（15）, middle part both sides are equipped with comb teeth-shaped structure, and
With driving comb（14）Coupling, driving comb（14）With fixed broach electrode（12）It is connected, microdrive moving part（13）'s
Broach both sides are equipped with support beam（11）, pole plate is inputted close to electric charge（9）The support beam of side（11）Fixed provided with support beam
End（17）.
2. MEMS resonant formula charge sensor as claimed in claim 1, it is characterised in that double-ended tuning fork resonator（4）
In two I-shaped combining structures up and down, described driving electrodes (2) are respectively arranged at double-ended tuning fork resonator（4）Two
Side, induction electrode (3) is respectively arranged in four cavitys of two I-shaped structures.
3. MEMS resonant formula charge sensor as claimed in claim 1, it is characterised in that electric charge inputs pole plate（9）C-shaped knot
Structure, its both-side ends and flexible steel microtube input（7）Relatively, electric charge input pole plate（9）Upper connection input electrode.
4. MEMS resonant formula charge sensor as claimed in claim 1, it is characterised in that microdrive moving part（13）One
Side inputs pole plate with electric charge（9）Coupled in comb teeth-shaped.
5. MEMS resonant formula charge sensor as claimed in claim 1, it is characterised in that MEMS resonant formula charge sensor material
Expect for monocrystalline silicon or polysilicon.
6. a kind of charge detection method using MEMS resonant formula charge sensor as claimed in claim 1, it is characterised in that bag
Include following steps：
Resonator fixing end（1）, flexible steel microtube fulcrum（6）, electric charge input pole plate（9）, fixed broach electrode（12）, support beam
Fixing end（17）And fixed electrode（15）It is fixed on substrate；Resonator fixing end（1）With fixed electrode（15）Ground connection；Direct current biasing
Voltage and alternating current drive signal and driving electrodes（2）Connection, to drive double-ended tuning fork resonator（4）Shake at the resonant frequency fx
It is dynamic；Electric charge to be measured inputs pole plate by electric charge（9）Input；Induced signal is by induction electrode（3）Output；Control voltage is by fixed broach
Electrode（12）Input, for controlling microdrive moving part（13）Position；
During measurement, first in fixed broach electrode（12）The maximum voltage of place's input, makes regulation electric capacity（10）In maximum shape
State, is secondly input to electric charge input pole plate by electric charge to be measured（9）, then adjust fixed broach electrode（12）The control voltage at place,
Make flexible steel microtube input（7）Pole plate is inputted with electric charge（9）Between electrical potential difference be in preset range, finally read sensor
Resonant frequency and current control voltage now, the charge value of measurement needed for being obtained by converting.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105466466B (en) * | 2016-01-04 | 2017-09-12 | 中国兵器工业集团第二一四研究所苏州研发中心 | A kind of MEMS capacitive sensor of automatic range |
| CN107515336A (en) * | 2016-06-17 | 2017-12-26 | 南京理工大学 | A kind of low-power consumption mode of resonance electric-field sensor |
| CN106645999B (en) * | 2016-09-20 | 2023-01-24 | 西北工业大学 | Ultra-high sensitivity micromechanical resonant electrostatic meter |
| CN107064657A (en) * | 2017-04-01 | 2017-08-18 | 浙江大学 | Miniature resonance type charge sensor and its method based on electrostatic stiffness modulation mechanism |
| CN108195505A (en) * | 2017-11-24 | 2018-06-22 | 浙江大学 | Micro-resonance type differential pressure pickup and pressure differential detection method with three beam tuning forks |
| CN110361452A (en) * | 2019-08-05 | 2019-10-22 | 江苏科技大学 | A kind of miniature sound emission resonant mode capacitance sensor and its application method |
| CN114910714B (en) * | 2022-05-12 | 2024-02-02 | 东南大学 | High-sensitivity charge sensor based on singular point and use method thereof |
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