CN114910714B - High-sensitivity charge sensor based on singular point and use method thereof - Google Patents
High-sensitivity charge sensor based on singular point and use method thereof Download PDFInfo
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- CN114910714B CN114910714B CN202210517815.1A CN202210517815A CN114910714B CN 114910714 B CN114910714 B CN 114910714B CN 202210517815 A CN202210517815 A CN 202210517815A CN 114910714 B CN114910714 B CN 114910714B
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- 239000000758 substrate Substances 0.000 claims abstract description 18
- 238000013016 damping Methods 0.000 claims abstract description 7
- 230000035945 sensitivity Effects 0.000 claims description 18
- 230000006698 induction Effects 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 13
- 238000005086 pumping Methods 0.000 claims description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/24—Arrangements for measuring quantities of charge
Abstract
The invention discloses a high-sensitivity charge sensor based on singular points and a use method thereof, comprising the following steps: a coupled resonator disposed on the substrate and comprising two resonators disposed side by side, one of which is a gain resonator and the other of which is a loss resonator, the two resonators being connected in series by a coupling beam and having the same mass, the same stiffness, the same size but opposite damping; and an external feedback control circuit for adjusting damping to make the damping of the gain resonator and the damping of the loss resonator equal in magnitude and opposite in direction. The disturbance introduced by the electric charge causes the coupled resonator based on the singular point to split into two resonant frequencies from one resonant frequency, and the electric charge can be detected by detecting the splitting quantity of the two resonant frequencies.
Description
Technical Field
The invention relates to the technical field of charge sensors, in particular to a high-sensitivity charge sensor based on singular points and a use method thereof.
Background
The charge sensor has wide application in the fields of electric power, chemical industry, medicine, national defense construction, aerospace and the like, and the charge sensor based on the MEMS (Micro Electro Mechanical System) resonator has more attention because of the characteristics of small volume, low power consumption, easy mass production and the like. In conventional MEMS charge sensors, the charge is measured by monitoring the resonant frequency shift caused by changes in parameters such as the stiffness, mass, etc. of the resonator due to the charge. However, the accuracy of the conventional charge sensor is difficult to meet the application requirements in the current scientific research production, and the lower detection accuracy has become one of the main factors restricting the development of the charge sensor.
The singular point is the point in the non-hermitian system where the eigenvalues and corresponding eigenstates merge at the same time. In recent years, the abnormal phenomenon near the singular point gradually attracts attention of scientific researchers, and particularly, the sensitivity characteristic of the singular point near the singular point to extremely small sensitivity is an important application in ultra-high precision sensors.
Disclosure of Invention
In view of the above, an object of the present invention is to provide a high-sensitivity charge sensor based on singular points and a method of using the same. When the charge sensor works near the singular point, the intrinsic frequency splitting quantity has ultrahigh sensitivity to the change of tiny charges, so that the problem of low detection precision of the current charge sensor is solved.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
a high sensitivity charge sensor based on singular points, the sensor comprising:
a substrate;
a coupled resonator disposed on the substrate and comprising two resonators disposed side by side, one of which is a gain resonator and the other of which is a loss resonator, the two resonators being connected in series by a coupling beam and having the same mass, the same stiffness, the same size but opposite damping;
an external feedback control circuit for converting a motion signal of the resonator into an electrical signal, comprising a first external feedback control circuit and a second external feedback control circuit, wherein the first external feedback control circuit is connected with the gain resonator and is used for pumping energy with the same phase as the motion speed of the gain resonator into the gain resonator and promoting the motion of the gain resonator; the second external feedback control circuit is connected with the loss resonator and is used for pumping energy which is opposite to the movement speed of the gain resonator into the loss resonator and preventing the movement of the loss resonator;
the two resonators are connected with a charge input electrode, a charge induction electrode, a detection electrode and a driving electrode; by adjusting the charge sensor parameters, the charge sensor is initially biased at a singular point where the charge sensor has only one resonant frequency.
Further, the coupling beam is a mechanical beam and is arranged at the top ends of the two resonators;
one side of the coupling beam is also opposite to an adjusting electrode, and the coupling coefficient is adjusted by adjusting the voltage between the coupling beam and the adjusting electrode and the electrostatic force generated by the voltage.
Further, the top end of the gain resonator is fixed on the substrate through an anchor region electrode, and the tail end of the gain resonator is provided with a charge induction electrode which is fixed on the substrate through the anchor region;
the charge input electrode of the gain resonator and the charge induction electrode are arranged close to each other;
the driving electrode of the gain resonator is arranged on one side of the gain resonator, which is far away from the coupling beam, and is arranged close to the gain resonator.
Further, the input end of the first external feedback control circuit is connected to the detection electrode of the gain resonator, and the output end of the first external feedback control circuit is connected to the driving electrode of the gain resonator.
Further, the top end of the loss resonator is fixed on the substrate through an anchor region electrode, and the tail end of the loss resonator is provided with a charge induction electrode which is fixed on the substrate through the anchor region;
the charge input electrode of the loss resonator and the charge induction electrode are arranged close to each other;
the driving electrode of the loss resonator is arranged on one side of the loss resonator, which is far away from the coupling beam, and is arranged close to the loss resonator.
Further, the input end of the second external feedback control circuit is connected to the detection electrode of the loss resonator, and the output end of the second external feedback control circuit is connected to the driving electrode of the loss resonator.
Further, the first external feedback control circuit and the second external feedback control circuit each include: the input end, the transimpedance amplifier, the band-pass filter, the automatic gain control circuit, the phase shifter and the output end are connected in sequence.
A method of using a high sensitivity charge sensor based on singular points, the method comprising: and placing the high-sensitivity charge sensor in an environment to be detected, when external charges are input, the charge sensor is disturbed to deviate from an initial resonance frequency and split into two resonance frequencies, and the magnitude of the induced charges is deduced by detecting the split quantity of the resonance frequencies.
Further, when only the loss resonator receives external charges, the rigidity of the loss resonator is disturbed, the resonance frequency of the charge sensor is split, and the splitting quantity delta omega is
Wherein k is c To couple the stiffness of the beams, ω 0 For the natural frequencies of the gain resonator and the loss resonator, δ is the disturbance of the stiffness k of the loss resonator by an axial force generated by an external charge resulting in a potential difference between the input electrode and the charge sensing electrode.
Further, when both resonators receive external charges, the rigidity of both resonators is disturbed, and the resonance frequency splitting quantity Δω is:
the beneficial effects of the invention are as follows:
compared with the traditional charge sensor, the charge sensor provided by the invention has higher test precision and higher sensitivity in the aspect of tiny charge measurement, and is more suitable for precise measurement.
Drawings
FIG. 1 is a schematic diagram of a high sensitivity charge sensor based on singular points according to the present invention;
FIG. 2 is a schematic diagram of an external feedback control circuit according to the present invention;
in the accompanying drawings:
the device comprises an A-gain resonator, an A1-first detection electrode, an A2-first fixed anchor area electrode, an A3-first driving electrode, an A4-first charge input electrode, an A5-first fixed anchor area and an A6-first charge induction electrode;
the B-loss resonator, B1-second detection electrode, B2-second fixed anchor area electrode, B3-second driving electrode, B4-second charge input electrode, B5-second fixed anchor area and B6-second charge induction electrode;
c-external feedback control circuit, 1-coupling beam, 2-coupling adjusting electrode, 201-input terminal, 202-transimpedance amplifier, 203-filter, 204-automatic gain control circuit, 205-phase shifter, 206-output terminal.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1 and 2, the high-sensitivity charge sensor based on singular point provided by the present invention specifically includes:
the gain resonator a and the loss resonator B are placed side by side in series connection by the coupling beam 1.
The gain resonator A and the loss resonator B have the same mass m, the same rigidity k and the damping c which are equal in magnitude but opposite in direction.
The top end of the gain resonator A is fixed on the substrate through a first fixed anchor area electrode A2, a first charge induction electrode A6 is arranged at the tail end of the resonator and is fixed on the substrate through a first fixed anchor area A5, and a first charge input electrode A4 and a first charge induction electrode A6 are oppositely arranged close to each other.
The first driving electrode A3 is disposed on the left side of the gain resonator a and is placed in close proximity to the gain resonator a, and the first detecting electrode A1 is disposed on the left side of the gain resonator a and on top of the first driving electrode A3 and is placed in close proximity to the gain resonator a.
The gain resonator A is realized by connecting the input end of the forward external feedback control circuit C to the first detection electrode A1, and connecting the output end of the forward external feedback control circuit to the first driving electrode A3, and the key point is that energy with the same phase as the movement speed of the resonator is pumped into the resonator to promote the movement of the resonator.
The top end of the loss resonator B is fixed on the substrate through a second fixed anchor area electrode B2, a second charge induction electrode B6 is arranged at the tail end of the resonator and is fixed on the substrate through a second fixed anchor area B5, and a second charge input electrode B4 and a second charge induction electrode B6 are oppositely arranged close to each other.
The second driving electrode B3 is disposed on the right side of the loss resonator B and is disposed in close proximity to the loss resonator B, and the second detecting electrode B1 is disposed on the right side of the loss resonator B and is disposed on the upper side of the second driving electrode B3 and is disposed in close proximity to the loss resonator B.
The implementation method of the loss resonator is that the input end of the reverse external feedback control circuit C is connected to the second detection electrode B1, and the output end of the reverse external feedback control circuit C is connected to the second driving electrode B3, and the key point is that energy with opposite motion speed and phase of the resonator is pumped from the resonator to prevent the motion of the resonator.
The coupling beam 1 of adjustable coupling coefficient between gain resonator A and loss resonator B is connected near the top of resonator, and is placed opposite to the coupling adjusting electrode 2 fixed on the substrate, and the coupling coefficient is adjusted by electrostatic force generated by voltage between mechanical beam and trimming electrode.
The external feedback control circuit C includes an input terminal 201, a transimpedance amplifier 202, a band-pass filter 203, an automatic gain control circuit 204, a phase shifter 205, and an output terminal 206, which are sequentially connected.
The external feedback control circuit C converts the motion signal of the resonator into an electrical signal, and the resulting electrical signal can be phase-adjusted by the phase shifter 205. The electric signal generated by the forward external feedback control circuit is the same as the phase of the movement speed of the resonator, and the electric signal generated by the reverse external feedback control circuit is opposite to the phase of the movement speed of the resonator.
The working principle of the charge sensor based on the singular point is as follows:
adjusting parameters of the charge sensor to initially bias the charge sensor at a singular point at which the charge sensor has only one resonant frequency omega
Wherein k is c For the stiffness of the coupling beam 1 ω 0 Is the natural frequency of the gain resonator A and the loss resonator B, and
when external charges are input, the charge sensor is disturbed to deviate from the initial resonant frequency and split into two resonant frequencies, and the magnitude of the induced charges can be deduced by detecting the split quantity of the resonant frequencies.
Example 1:
when only the second charge input electrode B4 has the input charge q, the potential difference between the second charge input electrode B4 and the second charge sensing electrode B6 generates an axial force F on the lossy resonator B
Where ε is the dielectric constant of the working environment and A is the facing area between charge input electrode B4 and charge sensing electrode B6.
The applied axial force will produce a disturbance delta to the stiffness k of the lossy resonator
Where L is the effective length of the lossy resonator B.
After the rigidity of the loss resonator B is disturbed, the resonance frequency of the charge sensor is split, and the splitting quantity delta omega is
The sensitivity of the frequency splitting quantity to the charge-induced disturbance can be obtained as follows
From the expression of Re (Δω), it can be seen that the frequency splitting amount is proportional to the 1/2 th power of the charge-induced disturbance δ, whereas the conventional resonator frequency variation is linear with the charge-induced disturbance δ, which proves that a singularity-based charge sensor has great advantages when the disturbance is sufficiently small. Also, as can be seen in equation (5), the smaller the charge-induced disturbance δ, the higher the sensitivity of the sensor.
Example 2:
when the first charge input electrode A4 and the second charge input electrode B4 have an input charge q at the same time, the input charge generates an axial force F that simultaneously produces a disturbance δ to the stiffness k of the gain resonator and the loss resonator.
After the charge sensor is disturbed, the resonance frequency splitting quantity delta omega is
In this case the sensitivity of the frequency splitting quantity to charge-induced disturbances is obtained as
Also, the same conclusion as in example 1 can be drawn from formulas (6) and (7), and the singular point-based charge sensor has a larger frequency division amount and a higher sensitivity to a minute disturbance introduced by the charge than the conventional sensor.
The testing method of the charge sensor based on the singular point comprises the following steps:
the method comprises the steps of firstly adjusting an external feedback control circuit of a charge sensor to bias the initial state of the charge sensor at a singular point, then connecting the charge to be tested to a charge detection electrode, splitting the resonance frequency of the charge sensor into two parts from one part due to disturbance of the charge, and detecting the splitting quantity Re (delta omega) of the two parts, so that the size of disturbance charge can be deduced from a formula (4) or a formula (6).
The present invention is not described in detail in the present application, and is well known to those skilled in the art.
The foregoing describes in detail preferred embodiments of the present invention. It should be understood that numerous modifications and variations can be made in accordance with the concepts of the invention by one of ordinary skill in the art without undue burden. Therefore, all technical solutions which can be obtained by logic analysis, reasoning or limited experiments based on the prior art by the person skilled in the art according to the inventive concept shall be within the scope of protection defined by the claims.
Claims (7)
1. A high sensitivity charge sensor based on singular points, the sensor comprising:
a substrate;
a coupled resonator disposed on the substrate and comprising two resonators disposed side by side, one of which is a gain resonator and the other of which is a loss resonator, the two resonators being connected in series by a coupling beam and having the same mass, the same stiffness, the same size but opposite damping;
an external feedback control circuit for converting a motion signal of the resonator into an electrical signal, comprising a first external feedback control circuit and a second external feedback control circuit, wherein the first external feedback control circuit is connected with the gain resonator and is used for pumping energy with the same phase as the motion speed of the gain resonator into the gain resonator and promoting the motion of the gain resonator; the second external feedback control circuit is connected with the loss resonator and is used for pumping energy which is opposite to the movement speed of the gain resonator into the loss resonator and preventing the movement of the loss resonator;
the two resonators are connected with a charge input electrode, a charge induction electrode, a detection electrode and a driving electrode; by adjusting the charge sensor parameters, the charge sensor is initially biased at a singular point, where the charge sensor has only one resonant frequency;
placing the high-sensitivity charge sensor in an environment to be detected, when external charges are input, the charge sensor is disturbed to deviate from an initial resonance frequency and split into two resonance frequencies, and the magnitude of the induced charges is deduced by detecting the split quantity of the resonance frequencies;
when only the loss resonator receives external charges, the rigidity of the loss resonator is disturbed, the resonance frequency of the charge sensor is split, and the splitting quantity delta omega is
Wherein k is c To couple the stiffness of the beams, ω 0 Inherent to gain and loss resonatorsFrequency, δ is the disturbance of the stiffness k of the lossy resonator by an axial force, wherein the axial force is generated by an external charge resulting in a potential difference between the input electrode and the charge-sensing electrode;
when both resonators receive external charges, the rigidity of both resonators is disturbed, and the resonance frequency splitting quantity delta omega is as follows:
2. a high sensitivity charge sensor based on singular points according to claim 1, characterized in that the coupling beam is a mechanical beam and is arranged at the top ends of two resonators;
one side of the coupling beam is also opposite to an adjusting electrode, and the coupling coefficient is adjusted by adjusting the voltage between the coupling beam and the adjusting electrode and the electrostatic force generated by the voltage.
3. A high sensitivity charge sensor according to claim 1, wherein the top end of the gain resonator is fixed to the substrate via an anchor electrode, and the end thereof is provided with a charge sensing electrode fixed to the substrate via an anchor;
the charge input electrode of the gain resonator and the charge induction electrode are arranged close to each other;
the driving electrode of the gain resonator is arranged on one side of the gain resonator, which is far away from the coupling beam, and is arranged close to the gain resonator.
4. A high sensitivity charge sensor according to claim 1, wherein the first external feedback control circuit has an input connected to the detection electrode of the gain resonator and an output connected to the drive electrode of the gain resonator.
5. A high sensitivity charge sensor according to claim 1, wherein the top end of the loss resonator is fixed to the substrate via an anchor electrode, and the end thereof is provided with a charge-inducing electrode fixed to the substrate via an anchor;
the charge input electrode of the loss resonator and the charge induction electrode are arranged close to each other;
the driving electrode of the loss resonator is arranged on one side of the loss resonator, which is far away from the coupling beam, and is arranged close to the loss resonator.
6. A high sensitivity charge sensor according to claim 1, wherein the second external feedback control circuit has an input connected to the detection electrode of the loss resonator and an output connected to the drive electrode of the loss resonator.
7. The high sensitivity charge sensor according to claim 1, wherein the first external feedback control circuit and the second external feedback control circuit each comprise: the input end, the transimpedance amplifier, the band-pass filter, the automatic gain control circuit, the phase shifter and the output end are connected in sequence.
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