CN107515336A - A kind of low-power consumption mode of resonance electric-field sensor - Google Patents
A kind of low-power consumption mode of resonance electric-field sensor Download PDFInfo
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- CN107515336A CN107515336A CN201610440745.9A CN201610440745A CN107515336A CN 107515336 A CN107515336 A CN 107515336A CN 201610440745 A CN201610440745 A CN 201610440745A CN 107515336 A CN107515336 A CN 107515336A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/12—Measuring electrostatic fields or voltage-potential
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
- G01R29/24—Arrangements for measuring quantities of charge
Abstract
The present invention proposes a kind of low-power consumption mode of resonance electric-field sensor, including resonant tuning fork, tuning fork vibration drive circuit and charge inducing detection circuit；One end of the resonant tuning fork walking beam is provided with driving electrodes, and the other end is provided with detecting electrode, is provided with electric field induction electrode in the side of walking beam, and capacitor is formed between the electric field induction electrode on different walking beams；The tuning fork vibration drive circuit excitation resonant tuning fork vibration beam vibration, causes the different interelectrode overlapping area mechanical periodicities of electric field induction；The voltage that the charge inducing detection circuit is used between sensing capacitor.The present invention can be used for the detection of static, quasistatic and low frequency electric field, and small volume, cost are low, are easy to volume production.
Description
Technical field
The present invention relates to a kind of mode of resonance electric-field sensor of low-power consumption, especially with high q-factor resonator vibrational excitation
Low-power consumption electric-field sensor.
Background technology
Electric field detecting is significant for human being's production life and scientific research.It is (quiet for different types of electric field
Electric field, alternating electric field, transient electric field), the structure of sensor is different with principle.
The conductive surface put in the electric field can induce electric charge, prepare electrode using conductor and electric capacity is inserted between electrode
Device, electric-field intensity to be measured and induced-current or voltage caused by charge inducing on battery lead plate are proportional, and the principle can be used to
Design low frequency and high-frequency electric field sensor.But in the alternating electric field of electrostatic field or extremely low frequency, charge inducing reaches in conductor
To after balance, it there will be no change or change very slow, so general when electrostatic field sensor designs use to enter conductor
The row cycle shields and the method for exposure, makes conductor charge migration, so as to form alternating current or voltage.Generally utilize motor
Metallic rotator is driven to rotate, to form the periodicity shielding to conductor.The method rotated using motor driven rotor will necessarily carry
The power consumption of high sensor.Although the application of MEMS technology makes the power consumption of such sensor have larger reduction, vibration hair
The power consumption of first portion still can not be ignored.In recent years, the optical electric-field based on principles such as crystal Pockels effects, Kerr effects
Sensor makes some progress, but still has many practical problems to restrict its practical application, such as the multiple physical field of crystal
The problems such as stability of cross-couplings, material property and light path.
The content of the invention
It is an object of the invention to propose a kind of low-power consumption mode of resonance electric-field sensor, available for static, quasistatic and low
The detection of frequency electric field, and small volume, cost are low, are easy to volume production.
In order to solve the above-mentioned technical problem, the present invention provides a kind of low-power consumption mode of resonance electric-field sensor, including resonance sound
Fork, tuning fork vibration drive circuit and charge inducing detection circuit；Driving electrodes and inspection are provided with the resonant tuning fork walking beam
Electrode is surveyed, is provided with electric field induction electrode in the side of walking beam, electricity is formed between the electric field induction electrode on different walking beams
Container；The tuning fork vibration drive circuit excitation resonant tuning fork vibration beam vibration, drives the different interelectrode interactions of electric field induction
Overlapping area mechanical periodicity；The charge inducing detection circuit is used for the voltage that sensing capacitor is formed.
Further, the resonant tuning fork is three beam resonant tuning forks or twin beams resonant tuning fork；Driven in the tuning fork vibration
Under the driving of circuit, the intermediate beam of three beam resonant tuning forks and the direction of vibration of two curb girders are on the contrary, two of twin beams resonant tuning fork
The direction of vibration of walking beam is opposite.
Further, the tuning fork vibration drive circuit is phase-locked oscillation circuit, and it is by charge amplifier, phase shifter and second
Level amplifier composition；The input connection of the detecting electrode and charge amplifier, the amplification output signal warp of charge amplifier
Secondary amplification is carried out by second level amplifier again after phase shifter phase shift, the output signal after second of amplification is connected to driving electricity
Pole, signal all the way is drawn in phase shifter output end, as the resonant tuning fork output signal and deliver to the charge inducing inspection
Slowdown monitoring circuit is as reference signal.
Further, the low-power consumption mode of resonance electric-field sensor has two kinds of working methods, i.e. static electric field detection mode
With dynamic electric field detection mode, the charge inducing detection circuit correspondingly corresponds to lock phase measurement by magnification circuit and broadband respectively
Tension measuring circuit.Under static electric field detection mode, tuning fork vibration drive circuit excitation resonant tuning fork vibration beam vibration, now
The charge inducing detection circuit is lock phase measurement by magnification circuit；Under dynamic electric field detection mode, tuning fork vibration drive circuit
Do not work, now resonant tuning fork walking beam does not produce vibration, is still induced between the electric field induction electrode on different walking beams
Electric charge, capacitor output dynamic electric voltage, now the charge inducing detection circuit is powered for the wideband of low noise high input impedance
Press measuring circuit；
Further, the resonant tuning fork is the triple-beam structure resonant tuning fork prepared with silicon, and it includes the centre that both-end is fixed
Beam and two curb girders；The driving electrodes are piezo-electric drive units, and the detecting electrode is piezoelectric detection unit；The piezoelectricity drives
Moving cell and piezoelectric detection unit are the piezoelectric membrane with Top electrode and bottom electrode；The Top electrode of piezoelectric detection unit and institute
State the input connection of phase-locked oscillation circuit, its bottom electrode ground connection；The Top electrode of piezo-electric drive units and pll oscillation electricity
The output end connection on road, its bottom electrode ground connection；The electromagnetic induction electrode is the first field coupling electrode and the second electric field signal
Coupling electrode；The both sides of the intermediate beam are respectively arranged with a first field coupling electrode, and the first field coupling electrode connects
Ground；The side of described two curb girders is respectively arranged with a second electric field signal coupling electrode, the first field coupling electrode and
The position of two electric field signal coupling electrodes is corresponding, so as to the first field coupling electrode and the second electric field signal coupling electrode it
Between form capacitor.
Further, the piezo-electric drive units and piezoelectric detection unit use piezoelectric ceramics PZT, AlN or piezoelectric monocrystal
A kind of material in PMN-PT makes.
Further, the resonant tuning fork is the triple-beam structure resonant tuning fork prepared with quartz, during it is fixed comprising both-end
Between beam and two curb girders；Two arrays of electrodes is respectively provided with intermediate beam both ends, wherein the electrode of intermediate beam one end distribution is as drive
Moving electrode, the electrode of intermediate beam other end distribution is as detecting electrode；The electrode for being arranged on middle beam end contains grounding electrode
And it is connected respectively to the electrode for connecing phase-locked oscillation circuit input and output end；In fact, the driving electrodes of quartz can have
A variety of methods to set up, if can drive produce described mode of oscillation can, be not necessarily positioned to end；The electric field sense
It is the first field coupling electrode and the second electric field signal coupling electrode to answer electrode；The both sides of the intermediate beam are respectively arranged with one
First field coupling electrode, the first field coupling electrode are grounded；The side of described two curb girders is respectively arranged with one second
The position of electric field signal coupling electrode, the first field coupling electrode and the second electric field signal coupling electrode is corresponding, so as to the
Capacitor is formed between one field coupling electrode and the second electric field signal coupling electrode.
Compared with prior art, its remarkable advantage is the present invention, and a kind of low-power consumption mode of resonance electric field of the present invention passes
Sensor produces vibration using high q-factor resonator, causes the overlapping area mechanical periodicity between induction electrode on beam, realizes static electric field
It is sensitive, it is only necessary to extremely low driving power consumption；The electric-field sensor can also work in dynamic electric field detection mode simultaneously, now not
Application vibratory stimulation can is needed to realize that dynamic electric field measures；The present invention can be real in a manner of MEMS (MEMS)
It is existing so that electric-field sensor pops one's head in low cost, small volume, preparation simply.
Brief description of the drawings
Fig. 1 is the three beam mode of resonance electric-field sensor embodiment schematic diagrams that the present invention is prepared using silicon materials.
Fig. 2 is the solid show figure of electrode and lead-out wire in this resonant transducer.
Fig. 3 is the phase-locked oscillation circuit schematic diagram of excitation resonator vibration.
Fig. 4 is the triple-beam structure resonant tuning fork front view that the present invention is prepared using quartz material.
Fig. 5 is the rearview of this triple-beam structure resonant tuning fork shown in Fig. 4.
Fig. 6 is the sectional view in the A-A' faces along Fig. 4.
Fig. 7 is the sectional view in the B-B' faces along Fig. 6.
Embodiment
It is readily appreciated that, according to technical scheme, in the case where not changing the connotation of the present invention, this area
Those skilled in the art can imagine the numerous embodiments of low-power consumption mode of resonance electric-field sensor of the present invention.Therefore, below
Embodiment and accompanying drawing are only the exemplary illustrations to technical scheme, and are not to be construed as the whole of the present invention
Or it is considered as limitation or restriction to technical solution of the present invention.
Low-power consumption mode of resonance electric-field sensor of the present invention, including resonant tuning fork, tuning fork vibration drive circuit and sensing
Charge detection circuit.
The resonant tuning fork can be made up of transductive materials such as piezoelectric quartz, piezoelectric ceramics, and resonant tuning fork has two or three
Walking beam；Resonant tuning fork walking beam is provided at both ends with driving electrodes, the side of walking beam is provided with electric field induction electrode, no
Capacitor is formed between the electric field induction electrode on walking beam；Under specifically optimization Oscillatory mode shape, three beam resonant tuning forks
The direction of vibration of intermediate beam and two curb girders on the contrary, the direction of vibration of two walking beams of twin beams resonant tuning fork conversely, because not
Direction of vibration with walking beam on the contrary, mutual moment of flexure and shearing force are offset, shake by the coupling for greatly reducing fixing end
Loss is swung, improves the quality factor of resonator；
The resonant tuning fork can also be used and is made of materials such as silicon, Elastic Steels, because silicon and Elastic Steel do not possess machine
Electric transducing characteristic brings it about the vibration of above-mentioned pattern, it is necessary to increase drive mechanism on resonant tuning fork walking beam, such as is shaking
The surface recombination piezoelectric ceramics of dynamic beam is as driver element.
The output end of tuning fork vibration drive circuit is connected with driving electrodes or driver element.Detected for dynamic electric field
When, tuning fork vibration drive circuit does not work, thus the walking beam of resonant tuning fork does not vibrate, on the walking beam of resonant tuning fork
The capacitance of the capacitor formed between induction electrode is constant, and electric-field intensity to be measured on the battery lead plate of electric field induction electrode with sensing
Voltage is proportional caused by electric charge, using induced voltage caused by the charge inducing detection circuit measuring charge inducing of routine
Low frequency and the detection of high-frequency electric field sensor can be achieved.When being detected for static electric field, tuning fork vibration drive circuit works, resonance
Periodic vibration in opposite direction occurs for the walking beam of tuning fork, so as to which the electric field induction interelectrode intermeshing area cycle becomes
Change, it is in cyclically-varying to cause condenser capacitance size, and charge inducing detection circuit measuring periodically senses between going out induction electrode
The amplitude of voltage, one-to-one linear relationship be present between the amplitude of the induced voltage and outside static electric field size to be measured,
So as to realize static electric field measurement to be measured by locking phase measurement by magnification circuit measuring inductive voltage value.
With reference to Fig. 1, the electric-field sensor of low-power consumption mode of resonance shown in the present embodiment, including the three beam knots prepared using silicon materials
Structure resonant tuning fork 1, piezo-electric drive units 2-1 and piezoelectric detection unit 2-2, phase-locked oscillation circuit 6, the first field coupling electrode 7,
Second electric field signal coupling electrode 8 and lock phase measurement by magnification circuit 10 are formed and formed.Wherein, the first field coupling electrode 7 connects
Ground, the second electric field signal coupling electrode 8 are earth-free.
With reference to Fig. 2, the integrated laminated structure of triple-beam structure resonant tuning fork 1, the vibration fixed altogether comprising three both-ends
Beam, i.e. intermediate beam 1-1, two curb girder 1-2, intermediate beam 1-1 width are approximately twice of curb girder 1-2 width.Finite element method
Analysis shows, in the case where optimizing Oscillatory mode shape, intermediate beam 1-1 and two curb girder 1-2 bend vibration, and direction of vibration on the contrary,
Intermediate beam 1-1 and two curb girder 1-2 moment of flexure and shearing force is offset, and is greatly reduced the coupled oscillations loss of fixing end, is carried
The high quality factor of resonator.
Piezo-electric drive units 2-1 and piezoelectric detection unit 2-2 is the piezoelectric membrane with Top electrode and bottom electrode, and
Top electrode is drawn by lead respectively from Top electrode and bottom electrode and draws pad 4 and bottom electrode extraction pad 3.Piezoelectric detection unit
2-2 Top electrode is drawn pad 4 by it and is connected with the input of phase-locked oscillation circuit 6, and its bottom electrode is drawn by bottom electrode
Pad 3 is grounded；Piezo-electric drive units 2-1 Top electrode is drawn pad 4 by it and is connected with the output end of phase-locked oscillation circuit 6,
Its bottom electrode is drawn pad 3 by bottom electrode and is grounded.Phase-locked oscillation circuit 6 encourages and maintained triple-beam structure resonant tuning fork 1 excellent
Change and vibrated under mode of oscillation, and export oscillation frequency signal.
Piezo-electric drive units 2-1 and piezoelectric detection unit 2-2 material can be piezoelectric ceramics PZT, AlN, piezoelectric monocrystal
PMN-PT etc. has the material of piezo-electric effect.Piezo-electric drive units 2-1 and piezoelectric detection unit 2-2 can by magnetron sputtering,
The methods of pulsed laser deposition, is deposited on triple-beam structure resonant tuning fork 1, can also sol-gal process or chemically grown method
It is worked on triple-beam structure resonant tuning fork 1.
A kind of implementation method of phase-locked oscillation circuit 6 is as shown in figure 3, mainly by charge amplifier 11, phase shifter 12 and
Two-stage amplifier 13 forms.Piezoelectric detection unit 2-2 Top electrode signal, which is inputted to the input of charge amplifier 11, electric charge, to be put
Secondary amplification is carried out by second level amplifier 13 again after the shifted phase shift of device 12 of amplification output signal of big device 11, second of amplification
Output signal is connected to piezo-electric drive units 2-1 Top electrode and drives piezo-electric drive units 2-1 to vibrate afterwards, piezo-electric drive units
2-1 vibration further drives triple-beam structure resonant tuning fork 1 to be vibrated in the case where optimizing mode of oscillation.The controlling party of this closed loop feedback
Formula, triple-beam structure tuning fork 1 can be made to maintain selected optimization mode of oscillation vibration.Draw in the output end of phase shifter 12 and believe all the way
Number, can be as oscillator triple-beam structure tuning fork 1 output signal, the output signal delivers to the conduct of lock phase measurement by magnification circuit 10
Reference signal.
The clearer positions for illustrating the first field coupling electrode 7 and the second electric field signal coupling electrode 8 of Fig. 2, it is middle
Beam 1-1 both sides are respectively arranged with a first field coupling electrode 7, and the first field coupling electrode 7 is and piezo-electric drive units
2-1 and piezoelectric detection unit 2-2 bottom electrode are connected, and reach the purpose of ground connection.1 two curb girder 1- of triple-beam structure resonant tuning fork
2 side is respectively arranged with a second electric field signal coupling electrode 8.Second electric field signal coupling electrode 8 can both be located at side
Beam 1-2 inner side, i.e., adjacent intermediate beam 1-1 side, curb girder 1-2 outside can also be located at, be the second electricity shown in Fig. 2
Field signal coupling electrode 8 is located at curb girder 1-2 medial surface.First field coupling electrode 7 and the second electric field signal coupling electrode 8
Position is corresponding, so as to form plate condenser between the first field coupling electrode 7 and the second electric field signal coupling electrode 8.
In the case where optimizing Oscillatory mode shape, intermediate beam 1-1 and two curb girder 1-2 produce flexural vibrations, and intermediate beam 1-1 and two
Curb girder 1-2 vibrates in opposite direction, therefore, week occurs between the first field coupling electrode 7 and the second electric field signal coupling electrode 8
The area of intermeshing between the masking of phase property, i.e. the first field coupling electrode 7 and the second electric field signal coupling electrode 8 is in week
Phase property changes, so as to which under static electric field or low frequency electric field effect, the first field coupling electrode 7 couples electricity with the second electric field signal
Coupled voltages output can be produced between pole 8, linear mapping relation be present between the output voltage and electric field to be measured.Output electricity
Pressure is input to lock phase measurement by magnification circuit 10 by coupling electrode lead-out wire 9 and measured.
The lock phase measurement by magnification circuit 10 is the conventional Weak absorption circuit based on phase-locking and amplification principle, will
Measured signal amplifies, and LPF is carried out after the signal after amplification is multiplied with reference signal using multiplier, to obtain phase demodulation
Output signal.It should be further stated that only under static electric field measurement pattern, just entered using lock phase measurement by magnification circuit 10
Row measurement inductively measures, reference letter of the oscillator signal that now phase-locked oscillation circuit 6 exports as lock phase measurement by magnification circuit 10
Number；Circuit is detected, it is necessary to which phase measurement by magnification circuit 10 will be locked and replace with conventional charge inducing under dynamic electric field measurement pattern,
Such as the broadband voltage measuring circuit of low noise high input impedance.
Fig. 4 is that the electrode of the triple-beam structure resonant tuning fork to be prepared using quartz material sets schematic diagram.Optional NT is cut
It is prepared by the quartz material of a variety of cut types such as type, X cut types and Z cut types.Because quartz material has piezoelectric property, and material in itself
In-fighting is extremely low.Triple-beam structure tuning fork 1 is prepared using quartz material and is used as electric field-sensitive unit, it may not be necessary to configures Piezoelectric Driving in addition
Unit 2-1 and piezoelectric detection unit 2-2.As shown in Figure 4, the surrounding at intermediate beam 1-1 both ends is respectively provided with two pairs of electrodes,
One pair of which is located at intermediate beam 1-1 ends top and bottom respectively, and another pair is located at intermediate beam 1-1 ends left and right side respectively.It is middle
The electrode pair of beam 1-1 one end distribution is as driving electrodes, and the electrode pair of intermediate beam 1-1 one end distribution is as detecting electrode.Set
Intermediate beam 1-1 end sides a pair of electrodes 3' as the negative terminal in driving electrodes or detecting electrode, connect by drawing pad 3
Ground, a pair of electrodes 4' of intermediate beam 1-1 ends upper and lower surface is arranged on as driving electrodes or the anode of detecting electrode, connects anode
Draw pad 4.Using the connection method in Fig. 1, i.e. negative terminal is drawn pad 3 and is grounded, and the anode at intermediate beam 1-1 both ends draws pad
4 are connected respectively to phase-locked oscillation circuit input and output side, and phase-locked oscillation circuit then can encourage and maintain triple-beam structure tuning fork 1
Vibrated in the case where optimizing mode of oscillation, and export oscillation frequency signal.It is similar to position in Fig. 2, in quartz resonator intermediate beam
Both sides are also equipped with the field coupling electrode 7 of ground connection, and are connected with the side electrode 3' at beam both ends, are set in the side of outer beams
There is the second ungrounded electric field signal coupling electrode 8.In the case where optimizing Oscillatory mode shape, the first field coupling electrode 7 and the second electric field
The masking of generating period between signal coupling electrode 8, so as to the first field coupling electrode 7 under the effect of static or low frequency electric field
Coupled voltages output can be produced between the second electric field signal coupling electrode 8, is existed between the output voltage and electric field to be measured
Linear mapping relation.The output voltage is input to lock phase measurement by magnification circuit and measured.
Claims (7)
1. a kind of low-power consumption mode of resonance electric-field sensor, it is characterised in that including resonant tuning fork, tuning fork vibration drive circuit and sense
Answer charge detection circuit；
Driving electrodes and detecting electrode are provided with the resonant tuning fork walking beam, the side of walking beam is provided with electric field induction
Electrode, capacitor is formed between the electric field induction electrode on different walking beams；
The tuning fork vibration drive circuit excitation resonant tuning fork vibration beam vibration, drives the different interelectrode faying surfaces of electric field induction
Product mechanical periodicity；
The charge inducing detection circuit is used for the voltage that sensing capacitor is formed.
2. low-power consumption mode of resonance electric-field sensor as claimed in claim 1, it is characterised in that the resonant tuning fork is triple-beam structure
Resonant tuning fork or twin-spar construction resonant tuning fork；Under the driving of the tuning fork vibration drive circuit, triple-beam structure resonant tuning fork
Intermediate beam with the direction of vibration of two curb girders on the contrary, the direction of vibration of two walking beams of twin-spar construction resonant tuning fork is opposite.
3. low-power consumption mode of resonance electric-field sensor as claimed in claim 1, it is characterised in that the tuning fork vibration drive circuit is
Phase-locked oscillation circuit (6), it is made up of charge amplifier (11), phase shifter (12) and second level amplifier (13)；The detection
Electrode is connected with the input of charge amplifier (11), the shifted device of amplification output signal (12) phase shift of charge amplifier (11)
Secondary amplification is carried out by second level amplifier (13) again afterwards, the output signal after second of amplification is connected to driving electrodes, moved
Phase device (12) output end draws signal all the way, and the oscillator signal exported as the resonant tuning fork simultaneously delivers to the charge inducing inspection
Slowdown monitoring circuit is as reference signal.
4. low-power consumption mode of resonance electric-field sensor as claimed in claim 1, it is characterised in that the charge inducing detects circuit and is
Phase measurement by magnification circuit (10) is locked, or is broadband voltage measuring circuit.
5. low-power consumption mode of resonance electric-field sensor as claimed in claim 4, it is characterised in that the resonant tuning fork is to be prepared with silicon
Triple-beam structure resonant tuning fork (1), its include both-end fix intermediate beam (1-1) and two curb girders (1-2)；The driving electrodes
For piezo-electric drive units (2-1), the detecting electrode is piezoelectric detection unit (2-2)；The piezo-electric drive units (2-1) and pressure
Electro-detection unit (2-2) is the piezoelectric membrane with Top electrode and bottom electrode；The Top electrode of piezoelectric detection unit (2-2) and institute
State the input connection of phase-locked oscillation circuit (6), its bottom electrode ground connection；The Top electrode of piezo-electric drive units (2-1) and the lock
The output end connection of phase oscillations circuit (6), its bottom electrode ground connection；
The electric field induction electrode is the first field coupling electrode (7) and the second electric field signal coupling electrode (8)；The intermediate beam
The both sides of (1-1) are respectively arranged with a first field coupling electrode (7), and the first field coupling electrode (7) is grounded；Described two
The side of individual curb girder (1-2) is respectively arranged with the second electric field signal coupling electrode (8), the first field coupling electrode (7) and second
The position of electric field signal coupling electrode (8) is corresponding, so as to couple electricity with the second electric field signal in the first field coupling electrode (7)
Pole forms capacitor between (8).
6. low-power consumption mode of resonance electric-field sensor as claimed in claim 5, it is characterised in that the piezo-electric drive units (2-1)
Made with piezoelectric detection unit (2-2) using a kind of material in piezoelectric ceramics PZT, AlN, ZnO or piezoelectric monocrystal PMN-PT.
7. low-power consumption mode of resonance electric-field sensor as claimed in claim 4, it is characterised in that the resonant tuning fork is with quartz system
Standby triple-beam structure resonant tuning fork (1), it includes intermediate beam (1-1) and two curb girders (1-2) that both-end is fixed；In intermediate beam
(1-1) both ends set electrode respectively, and the electrode pair of intermediate beam (1-1) one end distribution is another as driving electrodes, intermediate beam (1-1)
The electrode pair of distribution is held as detecting electrode；
The electric field induction electrode is the first field coupling electrode (7) and the second electric field signal coupling electrode (8)；The intermediate beam
The both sides of (1-1) are respectively arranged with a first field coupling electrode (7), and the first field coupling electrode (7) is grounded；Described two
The side of individual curb girder (1-2) is respectively arranged with a second electric field signal coupling electrode (8), the first field coupling electrode (7) and
The position of second electric field signal coupling electrode (8) is corresponding, so as in the first field coupling electrode (7) and the second electric field signal coupling
Composite electrode forms capacitor between (8).
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| CN109239436A (en) * | 2018-09-21 | 2019-01-18 | 南京理工大学 | A kind of super low-power consumption resonant voltage sensor |
| CN109959826A (en) * | 2019-02-01 | 2019-07-02 | 上海交通大学 | A kind of electric-field sensor of planar structure and preparation method thereof |
| CN111229577A (en) * | 2020-02-14 | 2020-06-05 | 山东理工大学 | Micro-beam super-harmonic synchronous resonance signal frequency-doubling tuning amplification device |
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| CN107621316A (en) * | 2017-11-01 | 2018-01-23 | 成都皆为科技有限公司 | A kind of quick unit of beam quartz tuning-fork resonance power of integral type three |
| CN109239436A (en) * | 2018-09-21 | 2019-01-18 | 南京理工大学 | A kind of super low-power consumption resonant voltage sensor |
| CN109959826B (en) * | 2019-02-01 | 2021-03-26 | 上海交通大学 | Electric field sensor with planar structure and preparation method thereof |
| CN109959826A (en) * | 2019-02-01 | 2019-07-02 | 上海交通大学 | A kind of electric-field sensor of planar structure and preparation method thereof |
| CN112540239B (en) * | 2019-09-20 | 2022-03-18 | 中国科学院电子学研究所 | Multi-structure coupling-based miniature electric field sensor and preparation method thereof |
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| CN111229577A (en) * | 2020-02-14 | 2020-06-05 | 山东理工大学 | Micro-beam super-harmonic synchronous resonance signal frequency-doubling tuning amplification device |
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Application publication date: 20171226 |