CN106556803B - A kind of mode of resonance Magnetic Sensor - Google Patents
A kind of mode of resonance Magnetic Sensor Download PDFInfo
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- CN106556803B CN106556803B CN201510615695.9A CN201510615695A CN106556803B CN 106556803 B CN106556803 B CN 106556803B CN 201510615695 A CN201510615695 A CN 201510615695A CN 106556803 B CN106556803 B CN 106556803B
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Abstract
The present invention proposes a kind of mode of resonance Magnetic Sensor, including triple-beam structure resonant tuning fork, piezo-electric drive units, piezoelectric detection unit and phase-locked oscillation circuit；The triple-beam structure resonant tuning fork is made by magnetostriction materials, the tool walking beam fixed there are three both-end；Piezo-electric drive units and piezoelectric detection unit are compounded in the both ends of the intermediate beam of the triple-beam structure resonant tuning fork；Piezo-electric drive units and piezoelectric detection unit pass through the input terminal and output end connection of its electrode and phase-locked oscillation circuit respectively；Phase-locked oscillation circuit exports the electric signal for representing three beam tuning fork resonance frequencies for motivating and maintaining triple-beam structure resonant tuning fork to vibrate in the case where optimizing mode of oscillation.Since the elasticity modulus of magnetostriction materials changes with static magnetic field, the resonance frequency of triple-beam structure resonant tuning fork is also with changes of magnetic field, therefore the present invention can be used for static and quasi-static magnetic field high sensitivity detection, and small in size, at low cost.
Description
Technical field
The present invention relates to a kind of mode of resonance Magnetic Sensors, constitute three beam tuning fork resonators especially with magnetostriction materials
Coil Magnetic Sensor.
Background technique
Traditional Magnetic Sensor type mainly has superconductive quantum interference magnetometer (SQUID), Hall sensor, magnetic flux door sensor
Sensor, magnetodiode Magnetic Sensor, magnetic sensitive transistor Magnetic Sensor, nuclear magnetic resonance Magnetic Sensor, optical pumping formula Magnetic Sensor,
Giant magnetic impedance sensor, induction Magnetic Sensor etc..SQUID is the low frequency Magnetic Sensor of full accuracy, but it is needed
Low operating temperatures, and volume is big, expensive；Fluxgate magnetic sensor, nuclear magnetic resonance Magnetic Sensor and optical pumping formula Magnetic Sensor
Structure is complicated, and it is heavy, expensive, power consumption is high；The sensitivity of giant magnetic impedance sensor is very high, but needs accurate electricity
Bridge circuit and active excitation work；The precision of induction Magnetic Sensor is high, but volume is big, is not suitable for detecting slowly varying
Magnetic field.
Magnetostriction materials and piezoelectric material have the physic field couplings effects such as magnetic, electricity, power, can realize magnetic-machine respectively
With Electricity and machine conversion and reverse transformation.Both material laminates are compound, it can also be generated due to composite material " product effect " new
Characteristic --- magnetoelectric effect.Currently, insider is by magnetostriction materials and the compound composition compound magnetoelectric transducing list of piezoelectric material
Member designs the reports such as highly sensitive Magnetic Sensor, such as document Dong using the magnetoelectric effect that its " product effect " generates
Based on the Magnetic Sensor of compound magnetoelectric transducing unit, sensitivity is up to 10-11T(Shuxiang Dong,Jie-Fang Li,
and D.Viehland,Ultrahigh magnetic field sensitivity in laminates of TERFENOL-
D and Pb(Mg1/3Nb2/3O3–bUltO3crystals,Appl.Phys.Lett.,vol.83,no.11,2003).But due to
The capacitance characteristic of piezoelectric material layer, the magnetoelectric effect that " product effect " generates have apparent high pass characteristic, cause sensor low
Frequency magneto-electric response performance is poor and is unable to direct detection static magnetic field (Shuxiang Dong, Junyi Zhai, Zhengping
Xing, Jie-Fang Li, and D.Viehland, Extremely low frequency response of
magnetoelectric multilayer composites,Appl.Phys.Lett.86,102901,2005).Some scholars
Coiling generates magnetic pumping magnetic field outside the compound magnetoelectric transducing unit, under excitation field effect, utilizes compound magnetoelectric
The magnetoelectricity output of transducing unit carries out static and quasi-static detection of magnetic field with the characteristic of changes of magnetic field, to overcome compound magnetoelectric
The poor disadvantage of transducing unit low-frequency magnetic electrical response performance energy.But the mode of this coil stimulating brings new problem again, such as
Coil stimulating can generate the problems such as electromagnetic interference, Joule heat, big so as to cause biosensor power consumption, stability is poor, it is also possible to right
Other electronic equipments cause electromagnetic interference.Germany scientist (S.Marauska, R.Jahns, C.Kirchhof, M.Claus,
E.Quandt,R.B.Wagner,Highly sensitive wafer-level packaged MEMS
magnetic field sensor based on magnetoelectric composites,Sensors and
Actuators A 189,2013,321–327；R.Jahns,S.Zabel,S.Marauska,B.Gojdka,B.Wagner,R.R.Adelung,and F.Faupel,Microelectromechanical magnetic field sensor
Based on Δ E effect, Applied Physics Letters 105,052414,2014) devise magnetostriction/pressure
The MEMS resonant Magnetic Sensor for replying conjunction by cable utilizes magnetostriction materials elastic modulus change under magnetic fields (i.e. Δ E effect)
Characteristic causes the variation of magnetostriction/Piezoelectric anisotropy MEMS resonator output frequency to detect static or quasi-static magnetic field.It is this
Method need not use coil, and circuit building is simple, but its sensor resonant unit uses cantilever beam structure, and magnetostriction with
The compound mode of laminated piezoelectric reduces observable sensitivity.The reason of detectable sensitivity decrease, is as follows: managing in interlayer
Think under coupling condition, the average elastic modulus of laminated composite structure are as follows: E=nmEm+(1-nm)Ep, wherein nmIt is magnetostrictive layer institute
Account for the volume ratio of composite construction, EmAnd EpIt is the elasticity modulus of magnetostrictive layer combined pressure electric layer respectively, is thus folded under magnetic fields
The average elastic modulus variable quantity of layer structure is Δ E=nmΔEm, therefore say that the sensitivity of frequency response is lowered by；Another party
Face, since there are vibration coupling losses for cantilever beam structure fixing end, the quality factor (Q value) of cantilever beam resonator are not high enough, this
Limit the detected with high accuracy of field frequency variable quantity.
Summary of the invention
It is an object of the invention to propose a kind of mode of resonance Magnetic Sensor, can be used for static and quasi-static magnetic field highly sensitive
Degree detection, and it is small in size, at low cost.
In order to solve the above technical problem, the present invention provides a kind of mode of resonance Magnetic Sensors, including triple-beam structure resonance sound
Fork, piezo-electric drive units, piezoelectric detection unit and phase-locked oscillation circuit；The triple-beam structure resonant tuning fork is integrated sheet
The resonator of structure, is made by magnetostriction materials, the tool walking beam fixed there are three both-end；Piezo-electric drive units and pressure
Electro-detection unit is the piezoelectric material film with top electrode and lower electrode, piezo-electric drive units and piezoelectric detection unit difference
The both ends of the intermediate beam of the triple-beam structure resonant tuning fork are compounded in, and lower electrode is grounded；Piezo-electric drive units and piezoelectricity inspection
Survey input terminal and output end connection that unit passes through its top electrode and phase-locked oscillation circuit respectively；Phase-locked oscillation circuit is for motivating
It is vibrated with maintenance triple-beam structure resonant tuning fork in the case where optimizing mode of oscillation, and exports the telecommunications for representing three beam tuning fork resonance frequencies
Number；Triple-beam structure resonant tuning fork under optimizing mode of oscillation when vibrating, in-between vibration of beam direction and two side vibration of beams
It is contrary.Since the elasticity modulus of magnetostriction materials changes with static magnetic field, the resonance frequency of triple-beam structure resonant tuning fork
Also with changes of magnetic field, therefore the present invention can be used for static and quasi-static magnetic field high sensitivity detection.
The lower electrode of the piezo-electric drive units and piezoelectric detection unit is respectively connected with lower electrode extraction electrode, and top electrode is equal
It is connected with top electrode extraction electrode.
As a preferred embodiment, phase-locked oscillation circuit includes charge amplifier, phase shifter and second level amplifier, piezoelectricity
The vibration signal for the triple-beam structure resonant tuning fork that detection unit will test is transferred to the input terminal of charge amplifier, charge amplification
Secondary amplification, the signal conduct exported after amplification are carried out by second level amplifier after the shifted device phase shift of the amplification output signal of device
Driving signal is transferred to piezo-electric drive units, driving piezoelectric unit vibration, and the vibration of piezoelectric unit further drives triple-beam structure
Resonant tuning fork vibrates under the optimization mode of oscillation；Phase shifter output end draws signal all the way, the magnetic field as Magnetic Sensor
The output signal of measurement detects magnetic field by detecting the value of resonance frequency.
Compared with prior art, the present invention its remarkable advantage is, Magnetic Sensor of the present invention utilizes magnetostriction
The Δ E effect (i.e. magnetostriction materials elasticity modulus is with changes of magnetic field characteristic) of material causes magnetostriction triple-beam structure tuning fork humorous
The Characteristics Detection magnetic field of vibration frequency variation, when carrying out static and quasi-static detection of magnetic field using Magnetic Sensor of the present invention without
Coil stimulating and induction, overcome that conventionally employed coil method power consumption is big, generates the disadvantages of Joule heat and electromagnetic interference；Three beam knots
Structure resonant tuning fork is higher than the quality factor of cantilever beam structure, is conducive to improve detectivity；Triple-beam structure resonant tuning fork can
It is realized with cutting existing magnetostriction materials film using the method for Laser Micro-Machining, the method that physical sputtering can also be used
Preparation, can be realized in a manner of MEMS (MEMS), so that magnetic sensing probe is at low cost, small in size.
Detailed description of the invention
Fig. 1 is a kind of embodiment schematic diagram of mode of resonance Magnetic Sensor of the present invention；
Fig. 2 is the optimization mode of oscillation schematic diagram of triple-beam structure resonant tuning fork in the present invention；
Fig. 3 is a kind of embodiment schematic diagram of phase-locked oscillation circuit in the present invention.
Specific embodiment
It is readily appreciated that, technical solution according to the present invention, in the case where not changing connotation of the invention, this field
Those skilled in the art can imagine the numerous embodiments of mode of resonance Magnetic Sensor of the present invention.Therefore, implement in detail below
Mode and attached drawing are only the exemplary illustrations to technical solution of the present invention, and are not to be construed as whole of the invention or are considered as
Limitation or restriction to technical solution of the present invention.
In conjunction with Fig. 1, mode of resonance Magnetic Sensor shown in the present embodiment, including triple-beam structure resonant tuning fork 1, piezo-electric drive units
2-1, piezoelectric detection unit 2-2 and phase-locked oscillation circuit 6 are constituted；
Triple-beam structure resonant tuning fork 1 is the resonator of integrated laminated structure, is made by magnetostriction materials.Three beams
The tool of structure resonance tuning fork 1 walking beam fixed there are three both-end, intermediate beam 1-1 and two curb girder 1-2 as shown in figure 1 are intermediate
The width of beam 1-1 is approximately twice of curb girder 1-2 width.According to analysis of finite element method, mould is vibrated in optimization as shown in Figure 2
Under state, the direction of vibration of the direction of vibration of intermediate beam 1-1 and two curb girder 1-2 are on the contrary, to intermediate beam 1-1 and two curb girder 1-
2 moment of flexure and shearing force is offset, and the coupled oscillations for greatly reducing the fixed walking beam of this three both-ends in fixing end are lost,
Improve the quality factor of resonator.
Piezo-electric drive units 2-1 and piezoelectric detection unit 2-2 is the piezoelectric material film with top electrode and lower electrode,
Piezo-electric drive units 2-1 and piezoelectric detection unit 2-2 passes through its lower electrode fitting respectively and is compounded in triple-beam structure resonant tuning fork 1
Two fixing ends of intermediate beam 1-1, and lower electrode is grounded；Piezo-electric drive units 2-1 and piezoelectric detection unit 2-2 pass through respectively
The connection of the input terminal and output end of its electrode and phase-locked oscillation circuit.
Phase-locked oscillation circuit is for motivating and maintaining resonator to vibrate in the case where optimizing mode of oscillation, and export resonance frequency is believed
Number.
For the ease of lead connection, the lower electrode of piezo-electric drive units 2-1 and piezoelectric detection unit 2-2 are respectively connected with lower electricity
Pole extraction electrode 3, top electrode are respectively connected with top electrode extraction electrode 4, the wire ground or connect locking phase that extraction electrode is welded with it
Oscillating circuit.The electrode of piezoelectric detection unit 2-2 and piezo-electric drive units 2-1 pass through respectively lead be connected to be input to locking phase vibration
Swing circuit input end and output end.
Fig. 3 is a kind of implementation method of phase-locked oscillation circuit 6, is mainly put by charge amplifier 7, phase shifter 8 and the second level
Big device 9 forms, and phase-locked oscillation circuit 6 and triple-beam structure resonant tuning fork 1 collectively form self-oscillation, generates rate-adaptive pacemaker.Piezoelectricity
The vibration signal for the triple-beam structure resonant tuning fork 1 that detection unit 2-2 will test is transferred to charge amplifier 7 by top electrode
Input terminal carries out secondary amplification by second level amplifier 9 again after shifted 8 phase shift of device of the amplification output signal of charge amplifier 7,
The driving signal exported after amplification is transferred to piezo-electric drive units 2-1, driving piezoelectric unit 2-1 vibration, the vibration of piezoelectric unit 2-1
Dynamic further driving triple-beam structure resonant tuning fork 1 is vibrated in the case where optimizing mode of oscillation.The control mode of this closed loop feedback, can be with
Triple-beam structure tuning fork resonator is set to maintain selected mode of oscillation oscillation.Signal all the way is drawn in 8 output end of phase shifter simultaneously,
The frequency output signal that can be used as resonance Magnetic Sensor can be obtained the magnitude in magnetic field by detection field frequency variation, complete
At magnetic-field measurement.
The material for preparing triple-beam structure resonant tuning fork 1 is the magnetostriction materials with Δ E effect, such as rare earth
The various amorphous alloys such as TbDyFe, FeGa alloy and FeSiB and FeCoMo.Triple-beam structure resonant tuning fork 1 can be by market
Obtainable amorphous magnetostriction materials film, the methods of is cut by laser, corrodes and be process, can also be by
The magnetostriction target such as TbDyFe and FeGa is prepared by the method for the physics product such as magnetron sputtering, pulsed laser deposition.
The material of piezo-electric drive units and piezoelectric detection unit can be piezoelectric ceramics PZT, AlN, piezoelectric monocrystal PMN-PT
Deng the material with piezoelectric effect.Piezo-electric drive units and piezoelectric detection unit can pass through magnetron sputtering, pulsed laser deposition
The methods of deposit on triple-beam structure resonant tuning fork 1, three beam knots can also be worked into the method for sol-gal process or chemically grown
On structure resonant tuning fork 1.
Since triple-beam structure resonant tuning fork 1 is made of magnetostriction telescopic material, the elasticity modulus of magnetostriction materials with
Changes of magnetic field, therefore the intrinsic frequency of resonator walking beam changes with bias magnetic field, under specific mode of oscillation, in resonator
Between the moment of flexure and shearing force of beam and two curb girders offset, greatly reduce the coupled oscillations loss of intermediate beam fixing end, improve
The quality factor of resonator.
The Piezoelectric Driving and piezoelectric detection unit refer respectively to two side pressures for being placed in triple-beam structure resonant tuning fork intermediate beam
Electroceramics film unit, they are used separately as vibratory stimulation and oscillator signal detection.Apply alternation electricity in piezo-electric drive units
When pressing signal, since inverse piezoelectric effect generates vibration, vibration signal is coupled to excitation triple-beam structure resonant tuning fork vibration after resonance beam
It swings, when the oscillator signal is transmitted to piezoelectric detection unit, since piezoelectric effect is transformed into the output of alternating voltage signal again.Due to
The elasticity modulus of triple-beam structure resonant tuning fork is related with external static or quasi-static magnetic field, the variation of frequency of oscillation in whole process
It is all related with magnetic field.Under weak magnetic field action, there are good linear ratio relations between frequency variation and changes of magnetic field.
Claims (3)
1. a kind of mode of resonance Magnetic Sensor, which is characterized in that including triple-beam structure resonant tuning fork, piezo-electric drive units, piezoelectricity inspection
Survey unit and phase-locked oscillation circuit；
The triple-beam structure resonant tuning fork is the resonator of integrated laminated structure, is made, is had by magnetostriction materials
The fixed walking beam of three both-ends；
Piezo-electric drive units and piezoelectric detection unit are the piezoelectric material film with top electrode and lower electrode, Piezoelectric Driving list
Member and piezoelectric detection unit are compounded in the both ends of the intermediate beam of the triple-beam structure resonant tuning fork respectively, and lower electrode is grounded；
Piezo-electric drive units and piezoelectric detection unit pass through the input terminal and output end connection of its electrode and phase-locked oscillation circuit respectively；
Phase-locked oscillation circuit is used to motivate and maintain triple-beam structure resonant tuning fork to vibrate under selected optimization mode of oscillation, and defeated
The electric signal of three beam tuning fork resonance frequencies is represented out；
When piezo-electric drive units vibrate under the optimization mode of oscillation from intermediate beam end driving triple-beam structure resonant tuning fork,
The direction of vibration of intermediate beam is opposite with the direction of vibration of two curb girders.
2. mode of resonance Magnetic Sensor as described in claim 1, which is characterized in that under piezo-electric drive units and piezoelectric detection unit
Electrode is respectively connected with lower electrode extraction electrode, and top electrode is respectively connected with top electrode extraction electrode.
3. mode of resonance Magnetic Sensor as described in claim 1, which is characterized in that phase-locked oscillation circuit includes charge amplifier, moves
The vibration signal of phase device and second level amplifier, the triple-beam structure resonant tuning fork that piezoelectric detection unit will test is transferred to charge
The input terminal of amplifier carries out secondary put by second level amplifier after the shifted device phase shift of the amplification output signal of charge amplifier
Greatly, the signal exported after amplification is transferred to piezo-electric drive units as driving signal, and driving piezoelectric unit vibrates, piezoelectric unit
Further driving triple-beam structure resonant tuning fork vibrates under the optimization mode of oscillation for vibration；The extraction of phase shifter output end is believed all the way
Number, the output signal as three beam tuning fork resonance frequencies.
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| CN110118947B (en) * | 2019-04-19 | 2021-01-05 | 华中科技大学 | Magnetic sensing device |
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| CN113224509B (en) * | 2021-04-12 | 2022-06-14 | 华南理工大学 | Acoustic wave resonance electrically small antenna and preparation method thereof |
| DE102021109408A1 (en) * | 2021-04-14 | 2022-10-20 | Endress+Hauser SE+Co. KG | Magnetic field sensor and sensor arrangement |
| CN114337370B (en) * | 2021-12-14 | 2023-06-09 | 华东师范大学 | Magneto-electric transduction device capable of dynamically adjusting frequency response characteristic |
| CN114609554B (en) * | 2022-05-11 | 2022-07-29 | 电子科技大学 | Length-telescopic resonant magnetic sensor |
| CN116341222A (en) * | 2023-03-09 | 2023-06-27 | 南京理工大学 | Method for designing acoustic black hole dynamic vibration absorber with tree-shaped structure |
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| JP4451577B2 (en) * | 2001-07-26 | 2010-04-14 | パナソニック株式会社 | Magnetic field sensor |
| CN101604007A (en) * | 2009-07-14 | 2009-12-16 | 重庆大学 | The Magnetic Sensor that high-permeability material and quartz tuning-fork are compound |
| US8878528B2 (en) * | 2011-06-30 | 2014-11-04 | Silicon Laboratories Inc. | MEMS-based magnetic sensor with a Lorentz force actuator used as force feedback |
| CN204495981U (en) * | 2014-11-28 | 2015-07-22 | 瑞声光电科技(常州)有限公司 | Based on the surface acoustic wave Magnetic Sensor of magnetoelectric effect |
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