CN110118946B - Resonant magnetic sensor - Google Patents
Resonant magnetic sensor Download PDFInfo
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- CN110118946B CN110118946B CN201910318965.8A CN201910318965A CN110118946B CN 110118946 B CN110118946 B CN 110118946B CN 201910318965 A CN201910318965 A CN 201910318965A CN 110118946 B CN110118946 B CN 110118946B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/032—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect
- G01R33/0327—Measuring direction or magnitude of magnetic fields or magnetic flux using magneto-optic devices, e.g. Faraday or Cotton-Mouton effect with application of magnetostriction
Abstract
The invention discloses a resonant magnetic sensor, which comprises a resonant unit, a magnetostrictive material and an excitation frequency measuring device, wherein the resonant unit is provided with a magnetic resonance sensor; the resonance unit comprises two resonators which are equal in structure and symmetrically connected, each resonator is provided with an anode and a cathode, and the anodes and the cathodes share the same, and are connected with the excitation frequency measuring device through the anodes and the cathodes, so that resonance vibration can be generated, and the signal-to-noise ratio of the resonance type magnetic sensor can be improved by improving the Q value of the resonance type magnetic sensor; under the action of an external magnetic field, the magnetostrictive material generates stress and elastic modulus changes, so that the working state of the resonance unit is changed, and the frequency measurement device is excited to measure the amplitude and the frequency of an external magnetic field signal by measuring the change of the resonance frequency of the resonator. The invention solves the problem that the output signal resolution is low due to the fact that the existing resonant sensor cannot inhibit the low-frequency intrinsic noise of the system.
Description
Technical Field
The invention belongs to the field of magnetic sensors, and particularly relates to a resonant magnetic sensor.
Background
The magnetic sensor has wide application, plays an important role in the fields of industry, national defense, science and technology, medical treatment and the like, and is a main branch of the modern sensor industry. Especially vector magnetic sensors, such as hall sensors, anisotropic magnetoresistive sensors (AMR), giant magnetoresistive sensors (GMR), tunneling magnetoresistive sensors (TMR), giant magnetoresistive sensors GMI, magnetoelectric sensors and other microminiature sensors, are widely used in low-cost current measurement, position detection, speed detection, hard disk magnetic heads, non-destructive detection and other aspects due to their characteristics of low price, small size, low power consumption and the like. However, with the further wide application in handheld devices such as mobile phones, the problems of large power consumption and 1/f noise of various current-driven magnetoresistive sensors are gradually highlighted; particularly, when the direct-current magnetic field is aligned to the measurement, higher-precision measurement is difficult to realize, such as geomagnetic detection, magnetic anomaly detection and positioning and other applications; although various frequency modulation technologies such as MEMS mechanical modulation and frequency modulation (frequency modulation) have appeared in recent years, so that the frequency modulation technologies operate at higher frequency and the influence of 1/f noise is reduced, the power consumption of the device is further increased; and its modulation effect is limited.
The resonance sensor measures a change in the natural frequency of a resonator according to the principle that the natural frequency changes with the change of an object to be measured, vibrates the resonator by applying a driving voltage from the outside, and detects a change in an output signal as a load in a circuit. Sensors using the resonance principle, such as resonance pressure sensors, stress/strain sensors, acceleration sensors, temperature sensors, gas sensors, etc., have the characteristics of digital output, small quantization error, high linearity and high precision, and are commonly used in the field of high-precision measurement. However, the resonant sensor is susceptible to low-frequency intrinsic noise, and vibration energy leaks to the resonator substrate and the support structure, so that the Q value of the device is reduced, and the signal-to-noise ratio is high.
The magnetoelectric type magnetic sensor is also used for coupling a magnetostrictive material and a piezoelectric material, and the principle is that strain generated by the magnetostrictive material due to the change of a measured magnetic field is transmitted to the piezoelectric material, so that the change of an output voltage is caused on the piezoelectric material, therefore, the change of an input end signal is detected, and the input signal is usually an analog signal.
Disclosure of Invention
The invention aims to provide a resonant magnetic sensor, aiming at solving the problem that the resolution of an output signal is low because the low-frequency intrinsic noise of a system cannot be suppressed in the conventional resonant sensor.
In order to achieve the above object, the present invention provides a resonant magnetic sensor, comprising a resonant unit, a magnetostrictive material, and an excitation frequency measuring device;
the magnetostrictive material is coupled with the resonator under the resonant unit;
the resonance unit comprises two resonators which are equal in structure and symmetrically connected;
the resonance unit is connected with the excitation frequency measuring device through an electrode;
the resonance unit is used for providing resonance vibration and inhibiting the loss of vibration energy;
the magnetostrictive material feeds back the generated magnetostrictive effect and the change of the elastic modulus to the resonance unit by receiving the change of the external magnetic field;
the excitation frequency measurement device is used for driving the resonance unit to vibrate and obtaining an external magnetic field signal by measuring the change of the working state of the resonance unit.
Preferably, the resonance unit comprises two resonators which are equal in structure and symmetrically connected, and are symmetrically arranged in a double dumbbell shape and provided with two positive electrodes and one negative electrode; the resonance unit is I-shaped, the middle part of the I-shaped part is two independent beams of the resonator, two side arms of the I-shaped part are connected to form two common beams, two positive electrodes are arranged above the two independent beams, a negative electrode is arranged on the common beam, and the negative electrode is arranged between the positive electrodes;
preferably, the exciting of the frequency measuring device to measure the operating state of the resonant unit comprises: a resonant frequency of the resonant unit; the external magnetic field signal includes: magnetic field amplitude variation and frequency;
the mode of driving the resonance unit by the excitation frequency measuring device comprises the following steps: piezoelectric excitation, electric field excitation, electromagnetic excitation, thermal excitation and laser excitation;
the mode that excitation frequency measurement device and resonance unit pass through electrode connection includes: lead or flip-chip solder ball packaging.
The mode of coupling the resonant unit and the magnetostrictive material comprises the following steps: coating, sticking, welding or chemically synthesizing;
the mode that the change of the resonance unit operating condition is measured to the excitation frequency measurement device adopts includes: swept frequency mode and resonant mode.
Through the technical scheme, compared with the prior art, the invention has the following beneficial effects:
(1) the invention adopts a symmetrical resonance unit structure, counteracts the force and moment of the device at the joint, reduces the leakage of vibration energy to the substrate, can further improve the Q value of the resonator, further improves the working stability of the device, improves the signal-to-noise ratio of the resonance type magnetic sensor, and finally realizes the purpose of improving the resolution of the sensor.
(2) By adopting the resonance enhancement effect of mechanical vibration, the device always works in a state of responding to resonance amplification, the aim of high-sensitivity detection from a direct current DC magnetic field to a low-frequency AC magnetic field is fulfilled, the working frequency of the device is high, and the problem of low signal-to-noise ratio of an output signal caused by 1/f noise faced by a traditional magnetic sensor and low-frequency intrinsic noise of a system is solved.
(3) The invention effectively converts the stress of the magnetostrictive material caused by receiving the external magnetic field signal and the change of the elastic modulus into the change of the vibration frequency of the resonator, can realize direct digital signal output, avoids the error introduced by A/D conversion, and improves the processing precision and the noise immunity.
Drawings
FIG. 1 is a schematic view of the basic constitution of the present invention;
FIG. 2 is a schematic diagram of the overall configuration of an embodiment of the present invention having basic functions;
fig. 3 is a schematic diagram of the resonator operating state of the embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
As shown in fig. 1, the present invention provides a resonant magnetic sensor including: a resonance unit 101, a magnetostrictive material 102 and an excitation frequency measuring device 103;
the magnetostrictive material 102 is positioned right below the resonant unit and is connected with the resonator in a direct coupling mode;
the resonance unit 101 comprises two resonators which are equal in structure and symmetrically connected;
the resonance unit 101 is connected with the excitation frequency measuring device 103 through electrodes;
the resonance unit 101 generates resonance vibration by receiving a voltage signal of the excitation frequency measuring device 103 and the change of stress and elastic modulus generated by the magnetostrictive material 102; and inhibit the loss of vibration energy;
preferably, the resonance unit 101 is in a double dumbbell shape, and is provided with two positive electrodes and one negative electrode; the resonance unit is an I-shaped resonator, the middle part of the I-shaped resonator is two independent beams of the resonator, two side arms of the I-shaped resonator are connected to form two common beams, two positive electrodes are arranged above the two independent beams, a negative electrode is arranged on the common beam, and the negative electrode is arranged between the positive electrodes;
specifically, compared with a single resonator, the symmetrical resonance unit 101 is adopted, so that the force and the moment at the joint can be effectively eliminated, the leakage of vibration energy to the substrate is reduced, the Q value of the resonator can be further improved, the working stability of the device is further improved, and the signal-to-noise ratio of the resonance type sensor is improved. The magnetostrictive material 102 is used for receiving the change of an external magnetic field and feeding back the generated magnetostrictive effect and the change of the elastic modulus to the resonance unit 101;
the excitation frequency measuring device 103 is used for driving the resonance unit 101 to vibrate, and acquiring an external magnetic field signal by tracking and measuring the change of the working state of the resonance unit 101.
Specifically, the device is enabled to work in a state of responding to resonance amplification all the time by adopting the resonance enhancement effect of mechanical vibration, the purpose of high-sensitivity detection from a direct current DC magnetic field to a low-frequency AC magnetic field is achieved, the working frequency of the resonant sensor is high, and the problem that the signal-to-noise ratio of an output signal is low due to 1/f noise faced by a traditional magnetic sensor and low-frequency intrinsic noise of a system is solved.
Preferably, the coupling connection of the magnetostrictive material 102 and the resonant unit 101 includes: coating, sticking and the like.
Specifically, the magnetostrictive material 102 will generate a magnetostrictive effect and a change in elastic modulus under the action of an external magnetic field; the stress generated by the magnetostrictive material 102 due to the magnetostrictive effect and the change effect of the young's modulus are transmitted to the resonator, and tensile stress or compressive stress is correspondingly generated, so that the resonant frequency of the resonator can be changed; at the same time, the magnetostrictive material 102 and the resonant unit are coupled together to vibrate, so the stress/strain generated by the magnetostrictive material 102 and the change of the elastic modulus can change the resonant frequency of the resonator 101.
Preferably, the exciting frequency measuring device 103 measures the operating state of the resonance unit 101 including: the resonant frequency of the resonant unit 101;
the external magnetic field signal includes: magnetic field amplitude variation and frequency;
the way of driving the resonance unit 101 by the excitation frequency measuring device 103 includes: piezoelectric excitation, electric field excitation, electromagnetic excitation, thermal excitation and laser excitation;
the mode that the resonator excitation frequency measuring device 103 is connected with the resonance unit 101 through the electrodes comprises the following steps: lead or flip-chip solder ball packaging.
The mode adopted by the excitation frequency measurement device 103 for measuring the change of the working state of the resonance unit 101 comprises the following steps: a frequency sweep mode and a resonance mode;
the frequency sweeping mode is specifically that the excitation frequency measuring device 103 can track and measure the change of the highest state of the resonance amplitude of the resonance unit 101, and the amplitude and the frequency of an external measured magnetic field signal are obtained by measuring the resonance frequency of the resonance unit 101 and the changes of the I-V characteristic and the impedance characteristic at the resonance frequency;
the resonant mode is embodied in that the excitation frequency measurement device 103 and the resonator form an oscillation circuit, and the amplitude and the frequency of the external measured magnetic field signal are obtained by tracking and measuring the oscillation frequency change of the resonance unit 101 under the oscillation circuit.
As shown in fig. 2, it can be seen from fig. 2 that the magnetostrictive material 102 is located under the resonance of the resonant unit 101, the magnetostrictive material 102 is coupled with a resonant beam 116 made of a single crystal quartz wafer and fixed above the double-dumbbell-shaped base 104 by a eutectic soldering process or an adhesive process, and a necessary gap 105 exists between the base and the resonant beam 116 to ensure free vibration of the resonant beam 116, a first positive electrode 112, a second positive electrode 114 and a piezoelectric-excited negative electrode 113 are disposed above the resonant beam 116, i.e., the resonant unit shares a negative electrode 113, the resonant beam 116, the first positive electrode 112, the second positive electrode 114 and the piezoelectric-excited negative electrode 113 constitute a resonant unit, and a lead is typically prepared on the upper resonator by a gold wire ball bonding process or other lead process; the resonance unit is connected with the excitation frequency measuring device 103 through a lead 106. An excitation voltage signal generated by the resonator vibration excitation and frequency measurement device is applied to the first positive electrode 112, the second positive electrode 114 and the piezoelectric excitation negative electrode 113 through the lead 106; the piezoelectric material resonance beam 116 generates deformation under the action of an electrode electric field, and generates in-plane symmetrical bending vibration under a certain driving frequency;
the process of measuring the external magnetic field signal is as follows: an alternating current excitation voltage is applied to the electrodes of the resonant unit 101 by the excitation frequency measurement device 103, the resonant unit vibrates in the direction shown by the arrow in fig. 3 under the action of an electric field, meanwhile, under the action of an external magnetic field, the stress generated by the magnetostrictive material due to the magnetostrictive effect is transmitted to the resonant unit to generate tensile stress or compressive stress correspondingly, the resonant frequency of the resonator changes in combination with the change of the elastic modulus of the magnetostrictive material, and the working state of the resonant unit 101 is measured by the excitation frequency measurement device 103 to obtain the amplitude and the frequency of an external measured magnetic field signal.
In summary, on one hand, the resonance type magnetic sensor is enabled to work in a state of responding to resonance amplification all the time by adopting the resonance enhancement effect of mechanical vibration, the purpose of high-sensitivity detection from a Direct Current (DC) magnetic field to a low-frequency (AC) magnetic field is achieved, the working frequency of the device is high, and the problem that the signal-to-noise ratio of an output signal is low due to 1/f noise faced by the traditional magnetic sensor and low-frequency intrinsic noise of a system is solved; on the other hand, compared with a single resonant beam structure, the symmetrical resonant unit structure is adopted, the force and the moment of the device at the joint are offset, the leakage of vibration energy to the substrate is reduced, the Q value of the resonator can be further improved, the working stability of the device is further improved, the signal-to-noise ratio of the resonant magnetic sensor is improved, and the aim of improving the resolution ratio of the sensor is finally achieved.
In addition, the resonant sensor provided by the invention has the advantages of low power consumption, miniaturization and simple preparation process.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (8)
1. A resonant magnetic sensor is characterized by comprising a resonant unit (101), a magnetostrictive material (102) and an excitation frequency measuring device (103);
the magnetostrictive material (102) is connected with the resonant unit (101) in a coupling mode; the coupling mode comprises the following steps: coating, sticking, welding or chemically synthesizing;
the resonance unit (101) comprises two resonators which are equal in structure and symmetrically connected;
the resonance unit (101) is connected with the excitation frequency measuring device (103) through electrodes;
the resonance unit (101) is used for providing resonance vibration and inhibiting the loss of vibration energy;
the magnetostrictive material (102) is used for receiving the change of an external magnetic field and feeding back the generated magnetostrictive effect and the change of the elastic modulus to the double-resonance unit (101); the magnetostrictive material (102) is coupled with the resonance unit (101) to vibrate, and tensile stress or compressive stress is generated on the resonance unit (101), so that the resonance frequency of the resonance unit (101) is changed;
the excitation frequency measurement device (103) is used for driving the resonance unit (101) to vibrate and obtaining an external magnetic field signal by measuring the change of the working state of the resonance unit;
the resonance unit is I-shaped, the middle part of the I-shaped part is two independent beams of the resonator, two side arms of the I-shaped part are connected to form two common beams, two positive electrodes are arranged above the two independent beams, a negative electrode is arranged on the common beam, and the negative electrode is arranged between the positive electrodes.
2. A resonant magnetic sensor according to claim 1, wherein the operating state of the resonator element (101) measured by the excitation frequency measuring means (103) comprises: the resonant frequency of the resonant cell.
3. A resonant magnetic sensor according to claim 1 or 2, wherein the external magnetic field signal comprises: magnetic field amplitude variations and frequency.
4. A resonant magnetic sensor according to claim 1, wherein the excitation frequency measuring means (103) drives the resonant cell (101) in a manner comprising: piezoelectric excitation, electric field excitation, electromagnetic excitation, thermal excitation, laser excitation.
5. A resonant magnetic sensor according to claim 1 or 4, wherein the excitation frequency measuring means (103) is connected to the resonant cell (101) by means of electrodes comprising: lead or flip-chip solder ball packaging.
6. A resonant magnetic sensor according to claim 1, wherein the excitation frequency measuring means (103) measures changes in the operating state of the resonant cell (101) by means comprising: a frequency sweep mode and a resonant mode.
7. A resonant magnetic sensor according to claim 6, wherein the frequency sweep mode is such that the excitation frequency measuring device (103) tracks and measures the variation of the highest state of the resonant amplitude of the resonant unit (101), and the amplitude and frequency of the external measured magnetic field signal are obtained by measuring the variation of the resonant frequency of the resonant unit (101).
8. A resonant magnetic sensor according to claim 6, wherein the resonant mode is such that the excitation frequency measuring means (103) and the resonant unit (101) form an oscillating circuit, and the amplitude and frequency of the external measured magnetic field signal are obtained by tracking and measuring the variation of the oscillating frequency of the resonant unit (101) in the oscillating circuit.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2021052340A1 (en) * | 2019-09-16 | 2021-03-25 | 电子科技大学 | Passive wireless magnetic field characteristic sensing tag and sensing system |
| CN110907681A (en) * | 2019-11-18 | 2020-03-24 | 南京理工大学 | Differential resonant voltage sensor compounded by quartz tuning fork and piezoelectric bimorph |
| CN111337865B (en) * | 2020-04-07 | 2020-11-10 | 上海交通大学 | Low-frequency induction type magnetic sensor based on nonvolatile tuning |
| CN113655300A (en) * | 2021-09-10 | 2021-11-16 | 中国科学院空天信息创新研究院 | Resonant electric field sensor and preparation method thereof |
| CN113917838A (en) * | 2021-09-29 | 2022-01-11 | 华中科技大学 | Resonant sensor based on sideband excitation |
| CN114706025B (en) * | 2022-04-15 | 2024-03-22 | 深圳技术大学 | Resonant DC magnetic sensor based on magneto-electric effect |
| CN115603698B (en) * | 2022-11-28 | 2023-05-05 | 电子科技大学 | Tunable film bulk acoustic resonator based on elastic softening effect |
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