CN109521377A - The resonant mode Magnetic Sensor that magnetostriction/resonator is connected compound - Google Patents
The resonant mode Magnetic Sensor that magnetostriction/resonator is connected compound Download PDFInfo
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- CN109521377A CN109521377A CN201710853324.3A CN201710853324A CN109521377A CN 109521377 A CN109521377 A CN 109521377A CN 201710853324 A CN201710853324 A CN 201710853324A CN 109521377 A CN109521377 A CN 109521377A
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- magnetostriction
- resonator
- tuning fork
- fork resonator
- magnetic sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/10—Plotting field distribution ; Measuring field distribution
Abstract
The invention discloses a kind of resonant mode Magnetic Sensors that magnetostriction/resonator is connected compound, belong to Magnetic Sensor field, including two magnetostriction pieces, tuning fork resonator, fixed support structure, oscillating circuit and frequency detecting unit, wherein, the both ends of tuning fork resonator are connected with one end of corresponding magnetostriction piece respectively；Tuning fork resonator and magnetostriction piece are fixed in fixed support structure；Tuning fork resonator and oscillating circuit connect and compose oscillating circuit loop, oscillating circuit self-oscillation, and according to tuning fork resonator resonance frequency self-oscillation outputting oscillation signal, according to oscillator signal resonance occurs for tuning fork resonator；Frequency detecting unit is for detecting tuning fork resonator resonance frequency.The resonant mode Magnetic Sensor that magnetostriction/resonator proposed by the present invention is connected compound can generate biggish dilatation by increasing the length of magnetostriction piece, to improve sensitivity.
Description
Technical field
The invention belongs to Magnetic Sensor field more particularly to a kind of resonant mode magnetic that magnetostriction/resonator is connected compound
Sensor.
Background technique
Common high-precision Magnetic Sensor type mainly has superconductive quantum interference magnetometer (SQUID), induction magnetic
Sensor, fluxgate magnetic sensor, nuclear magnetic resonance Magnetic Sensor, optical pumping formula Magnetic Sensor, giant magnetic impedance sensor etc..However,
Existing Magnetic Sensor it is always more or less there are some places not as good as people's will, in order to develop high-precision, high performance-price ratio it is new
Type Magnetic Sensor, people did not always stop the research to Magnetic Sensor new principle and new method.It is defeated using numerical frequency
Resonant mode Magnetic Sensor out, is widely closed at low in energy consumption due to its strong antijamming capability, the features such as sensor circuit is simple
Note.Patent of invention (a kind of high q-factor resonance Magnetic Sensor of frequency conversion output, application number: 201510924509.X) and document
(Bian L,Wen Y,Li P,et al.Magnetostrictive stress induced frequency shift in
resonator for magnetic field sensor[J].Sensors&Actuators A Physical,2016,247:
A kind of magnetostriction materials and the compound numerical frequency export resonance formula Magnetic Sensor of resonator 453-458) are proposed, magnetic is utilized
Contractility is caused to cause the variation of resonator resonance frequency to detect magnetic field.However, the sensor structure is will to cause stretchable sheet and tuning fork
Resonator is combined with each other in a manner of " parallel connection ", and what tuning fork resonator generated under the frame mode deforms less than equal to magnetostriction
Elongation, frequency variation are limited to magnetostriction coefficient.
Summary of the invention
It is an object of the invention to propose a kind of resonant mode Magnetic Sensor that magnetostriction/resonator is connected compound.
The resonant mode magnetic sensing that a kind of magnetostriction/resonator of numerical frequency output proposed by the present invention is connected compound
Device, including two magnetostriction pieces, tuning fork resonator, fixed support structure, oscillating circuit and frequency detecting unit, wherein described
The both ends of tuning fork resonator connect (complex method of " connecting ") with one end of corresponding magnetostriction piece respectively；The tuning fork is humorous
Vibration device and magnetostriction piece are fixed in fixed support structure；
The tuning fork resonator and oscillating circuit connect and compose oscillating circuit loop, oscillating circuit self-oscillation, and according to
According to oscillator signal resonance occurs for tuning fork resonator resonance frequency outputting oscillation signal, the tuning fork resonator；
The frequency detecting unit is for detecting tuning fork resonator resonance frequency.
Compared with prior art, the present invention its remarkable advantage is:
1) tuning fork resonator both ends connect (composite square of " connecting " with one end of a magnetostriction piece respectively in the present invention
Formula), biggish dilatation can be generated by increasing the length of magnetostriction piece, to improve sensitivity；2) magnetic of the present invention passes
Sensor structure is simple, and stability is good and power consumption is lower, convenient for the various integration of equipments for needing magnetic measurement, as other equipment
Built-in element；3) Magnetic Sensor of the present invention uses rate-adaptive pacemaker, different from the analog output of existing most of Magnetic Sensor,
Have the characteristics that anti-noise jamming ability is strong, it is strong especially suitable for certain noise jammings, while output signal is needed compared with Gao Zhun again
The measurement occasion of exactness；4) present invention eliminates at A/D conversion and complicated cumbersome signal while ensure that measurement accuracy
Manage circuit, it is only necessary to which the measurement of signal can be completed in simple frequency counter and oscillating circuit, to reduce cost, reduces
Production difficulty.
Further detailed description is done to the present invention with reference to the accompanying drawing.
Detailed description of the invention
Fig. 1 is a kind of structure for the resonant mode Magnetic Sensor embodiment 1 that magnetostriction/resonator is connected compound point of the present invention
Dress figure.
Fig. 2 is that a kind of structure for the resonant mode Magnetic Sensor embodiment 1 that magnetostriction/resonator is connected compound of the present invention is whole
Dress figure.
Fig. 3 is vibration used in a kind of resonant mode Magnetic Sensor embodiment 1 that magnetostriction/resonator is connected compound of the present invention
Swing circuit circuit diagram.
Fig. 4 is a kind of structure for the resonant mode Magnetic Sensor embodiment 2 that magnetostriction/resonator is connected compound point of the present invention
Dress figure.
Fig. 5 is that a kind of structure for the resonant mode Magnetic Sensor embodiment 2 that magnetostriction/resonator is connected compound of the present invention is whole
Dress figure.
Fig. 6 is vibration used in a kind of resonant mode Magnetic Sensor embodiment 2 that magnetostriction/resonator is connected compound of the present invention
Swing circuit circuit diagram.
Specific embodiment
The walking beam work of tuning fork resonator is in complete vibration mode, for the single-beam to work in beam mode,
Resonance frequency frIt is related with its power F suffered along its length, physical relationship are as follows:
Wherein, f0For the one class resonant frequency of no length direction masterpiece used time, can be expressed asA
For the cross-sectional area of single-beam, l, h, b is respectively the length of single-beam, wide, high；EbFor the Young's modulus of single-beam；αn, γnFor constant,
Corresponding first-order modal, value is respectively 4.730 and 0.295.
As can be seen from the above formula that magnetostriction piece can be generated magnetostrictive stress by magnetic fields to be measured and answer
Become, is subjected to compressive forces resonator length direction, so that the resonance frequency of resonator reduces.By measuring resonance frequency
Variable quantity, magnetic field value to be measured can be calculated.
The resonant mode Magnetic Sensor that a kind of magnetostriction/resonator of numerical frequency output of the invention is connected compound, packet
Include two magnetostriction pieces 2, tuning fork resonator, fixed support structure, oscillating circuit and frequency detecting unit, wherein tuning fork resonance
The both ends of device are connected with one end of corresponding magnetostriction piece 2 respectively；Tuning fork resonator and magnetostriction piece 2 are fixed on clamped knot
In structure；Tuning fork resonator and oscillating circuit connect and compose oscillating circuit loop, oscillating circuit self-oscillation, and according to tuning fork resonance
According to oscillator signal resonance occurs for device resonance frequency outputting oscillation signal, tuning fork resonator；Frequency detecting unit is for detecting sound
Pitch resonator resonance frequency.Under this connection type, self-oscillation is generated after oscillating circuit power supply, frequency of oscillation is by tuning fork resonance
The resonance frequency of device determines.
In further embodiment, tuning fork resonator is metallic tuning fork resonator 1, on 1 walking beam of metallic tuning fork resonator
Equipped with piezo-electric drive units 3, piezoelectric detection unit 4, oscillating circuit input terminal is connect with the electrode of piezoelectric detection unit 4, output
End is connect with the electrode of piezo-electric drive units 3；Piezo-electric drive units 3 are used for the resonance frequency for generating metallic tuning fork resonator 1
Mechanical signal is converted to resonant frequency electric signals；Piezo-electric drive units 3 are for being converted to the oscillator signal that oscillating circuit generates
Vibrate mechanical signal.
In further embodiment, walking beam is two beam resonance structures, the piezo-electric drive units (3), piezoelectric detection list
First (4) are pasted onto the lateral surface of two beam resonance structures.
In further embodiment, walking beam is three beam resonance structures, the piezo-electric drive units (3), piezoelectric detection list
First (4) are pasted onto the upper surface of the three beams resonance structure intermediate beam or the both ends of lower surface.
In further embodiment, piezo-electric drive units 3, piezoelectric detection unit 4 are the piezoelectric patches with piezoelectric effect.
In further embodiment, tuning fork resonator is quartz tuning-fork resonator 10, the plating of 10 surface of quartz tuning-fork resonator
There is electrode, quartz tuning-fork resonator 10 connects and composes oscillating circuit loop by two electrodes and oscillating circuit, because quartz is humorous
The amplification and frequency-selecting function of vibration device, are amplified with the consistent signal of resonator intrinsic frequency, remaining signal is suppressed, therefore vibrate
Circuit output signal frequency is consistent with quartz resonator frequency.
In further embodiment, fixed support structure includes package casing 8 and one piece of cushion block 5, tuning fork resonator and mangneto
Stretchable sheet 2 is fixed in 8 groove of package casing by cushion block 5.
In further embodiment, cushion block 5 is equipped with a groove, and the other end of any one magnetostriction piece 2 is caught in pad
In the groove of block 5,8 side of package casing is provided with threaded hole, and cushion block 5 is fastened by fastening screw 6 and disc spring 7 and threaded hole.
In further embodiment, fixed support structure is a pedestal 11, and 11 both ends of pedestal are equipped with groove, two magnetostriction pieces
2 other end is separately fixed in groove, and fixes a tabletting on the port that two magnetostriction pieces are located in groove respectively
9。
In further embodiment, frequency detecting unit is connect with output end of oscillating circuit.
More detailed description is done to the present invention below with reference to embodiment.
Embodiment 1
Combined with Figure 1 and Figure 2, in the present embodiment, a kind of magnetostriction/resonator of numerical frequency output is connected compound humorous
Vibration formula Magnetic Sensor, including two magnetostriction pieces 2, metallic tuning fork resonator 1, fixed support structure, oscillating circuit and frequency inspection
Survey unit, wherein the both ends of metallic tuning fork resonator 1 are connected with one end of corresponding magnetostriction piece 2 respectively；Fixed support structure packet
Package casing 8 and one piece of cushion block 5 are included, cushion block 5 is equipped with a groove, and the other end of any one magnetostriction piece is caught in cushion block
In 5 groove；8 side of package casing is provided with threaded hole, and cushion block 5 is fastened by fastening screw 6 and disc spring 7 and threaded hole, thus
Metallic tuning fork resonator 1 and magnetostriction piece 2 are fixed in fixed support structure groove by cushion block 5；Metallic tuning fork resonator 1
The root of walking beam is bonded with piezo-electric drive units 3, piezoelectric detection unit 4.Piezo-electric drive units 3, piezoelectric detection unit 4 are
The piezoelectric materials such as the piezoelectric patches with piezoelectric effect, such as PZT5H, PZT8, AlN.The output end of amplifying circuit in oscillating circuit
It is connected with two electrodes of piezo-electric drive units 3, for motivating metallic tuning fork resonator 1 to generate resonance；It is put in oscillating circuit
The input terminal of big circuit is connected with the electrode of piezoelectric detection unit 4, the resonance frequency for being generated according to metallic tuning fork resonator 1
Rate outputting oscillation signal.Amplifier circuit in oscillating circuit has high-gain, and adjusting oscillating circuit phase shifter makes oscillating circuit
Starting of oscillation obtains oscillation output signal.The oscillator signal of oscillating circuit is connect with frequency detecting unit, according to the oscillation electricity detected
The frequency of the oscillator signal on road changes, and can calculate magnetic field value.
In the present embodiment, the walking beam of metallic tuning fork resonator 1 is two beam resonance structures, piezo-electric drive units 3, piezoelectricity inspection
Survey the lateral surface that unit 4 is pasted onto two beam resonance structures.Two beam resonance structures are integrated laminated structure, high-elastic by high q-factor
Property alloy 3J21 by wire cutting, burn into be cut by laser the methods of processing and fabricating form.Two beam resonance structures include two both-ends
Fixed walking beam, in the case where optimizing mode of oscillation, the direction of vibration of two walking beams on the contrary, to two walking beams moment of flexure and
Shearing force is offset, and the oscillation for greatly reducing 1 two walking beams of metallic tuning fork resonator in fixing end is lost, and reduces resonator
Power consumption.
Magnetostriction piece is generated magnetostrictive stress by magnetic fields to be measured and strain, the stress and strain pass through glue-line
It is transmitted on the metallic tuning fork resonator to link together with magnetostriction piece along resonator length direction；According to resonance frequency
frRelationship of power F suffered along its length, metallic tuning fork resonator can be generated resonance by the length direction masterpiece used time with it
The variation of frequency.It is pasted with two panels piezoelectric patches on metallic tuning fork resonator, be respectively intended to excitation resonator vibration and picks up resonance
The electric signal that device vibration generates, two panels piezoelectric patches is placed in oscillating circuit circuit and obtains oscillation output signal.
Fig. 3 is a kind of implementation method of oscillating circuit, mainly by charge amplifier, phase shifter and second level amplifier group
At oscillating circuit and two beam resonance structure metallic tuning fork resonators 1 collectively form self-oscillation, generate rate-adaptive pacemaker.This implementation
There are 90 ° of phase differences with output for input in example when resonance, it is therefore desirable to which a phase shifter adjusts matched-phase official post oscillation
Circuit starting of oscillation, the vibration signal that piezoelectric detection unit 3 will test metallic tuning fork resonator 1 are transferred to the input of charge amplifier
End carries out secondary amplification by second level amplifier again after the shifted device phase shift of the amplification output signal of charge amplifier, after amplification
The driving signal of output is transferred to piezo-electric drive units 3, and piezo-electric drive units 3 drive metallic tuning fork resonator 1 to vibrate.Oscillation electricity
Road output signal is connected to frequency detecting unit input terminal, and the frequency of resonator output signal is measured by frequency detecting unit,
Magnetic field value can be calculated by detection field frequency variation.
Embodiment 2
In conjunction with shown in Fig. 4 and Fig. 5, the tuning fork resonator in the present embodiment is quartz tuning-fork resonator 10, and fixed support structure is
One pedestal 11,11 both ends of pedestal are equipped with groove, and the other end of magnetostriction piece 2 is separately fixed in groove, and respectively at two
A tabletting 9 is fixed on the port that magnetostriction piece 2 is located in groove.Using the methods of bonding, welding, make tabletting 9 and pedestal 11
The groove at both ends is combined closely, and one end in magnetostriction piece insertion groove is fixed.
Quartz tuning-fork resonator 11 is the fixed twin beams quartz tuning-fork of both-end, and tuning fork both ends have electrode pad outer for connecting
Portion's oscillating circuit.For the work of quartz tuning-fork resonator 11 in flexural vibration mode, two vibration of beam directions are symmetrical on the contrary, its electrode
Configuration and preparation method can be referring to document (Kenji Sato, Atsushi Ono, et al.Experimental Study of
Gyro Sensor Using Double-Ended Tuning Fork Quartz Resonator,2004 IEEE
International Ultrasonics,Ferroelectrics,and Frequency Control Joint 50th
Anniversary Conference,pp.575-578；Rongjun Cheng,Cun Li,Yulong Zhao,Bo Li and
Bian Tian, A high performance micro-pressure sensor based on a double-ended
Quartz tuning fork and silicon diaphragm in atmospheric packaging,
Meas.Sci.Technol.26 (2015) 065101) in typical method or other can generate symmetrical opposite curvature mode of oscillation
Electrode configuration.
As shown in fig. 6, the electrode pad at 10 both ends of quartz tuning-fork resonator is connected in an oscillating circuit, door oscillating circuit
Working principle determine the oscillator output oscillator signal frequency depend primarily on quartz tuning-fork resonator resonance frequency
Rate.The oscillator signal of output is connected to frequency detecting unit, detects the resonance frequency by frequency detecting unit.It is humorous by measuring
The variation of vibration frequency can complete magnetic-field measurement.Frequency detecting unit uses high-precision frequency counter circuit, obtains high-precision
Frequency measurement, to improve the detection accuracy in magnetic field.
Claims (10)
1. a kind of resonant mode Magnetic Sensor that magnetostriction/resonator is connected compound, which is characterized in that including two magnetostriction
Piece (2), tuning fork resonator, fixed support structure, oscillating circuit and frequency detecting unit, wherein the both ends of the tuning fork resonator
It is connected respectively with one end of corresponding magnetostriction piece (2)；The tuning fork resonator and magnetostriction piece (2) are fixed on clamped knot
In structure；
The tuning fork resonator and oscillating circuit connect and compose oscillating circuit loop, oscillating circuit self-oscillation, and according to tuning fork
According to oscillator signal resonance occurs for resonator resonance frequency outputting oscillation signal, the tuning fork resonator；
The frequency detecting unit is for detecting tuning fork resonator resonance frequency.
2. the resonant mode Magnetic Sensor that magnetostriction/resonator according to claim 1 is connected compound, which is characterized in that
The tuning fork resonator is metallic tuning fork resonator (1), and metallic tuning fork resonator (1) walking beam is equipped with Piezoelectric Driving list
First (3), piezoelectric detection unit (4), oscillating circuit input terminal are connect with the electrode of piezoelectric detection unit (4), output end and piezoelectricity
The electrode of driving unit (3) connects；The resonance frequency that the piezo-electric drive units (3) are used to generate metallic tuning fork resonator (1)
Rate mechanical signal is converted to resonant frequency electric signals；The oscillation that the piezo-electric drive units (3) are used to generate oscillating circuit is believed
Number be converted to oscillation mechanical signal.
3. the resonant mode Magnetic Sensor that magnetostriction/resonator according to claim 2 is connected compound, which is characterized in that
The walking beam is two beam resonance structures, and the piezo-electric drive units (3), piezoelectric detection unit (4) are pasted onto two beam resonance
The lateral surface of structure.
4. the tuning fork resonant mode Magnetic Sensor according to claim 2 based on numerical frequency output, which is characterized in that described
Walking beam is three beam resonance structures, and the piezo-electric drive units (3), piezoelectric detection unit (4) are pasted onto the three beams resonance
The upper surface of structure intermediate beam or the both ends of lower surface.
5. the resonant mode Magnetic Sensor that magnetostriction/resonator according to claim 2 is connected compound, which is characterized in that
The piezo-electric drive units (3), piezoelectric detection unit (4) are the piezoelectric patches with piezoelectric effect.
6. the resonant mode Magnetic Sensor that magnetostriction/resonator according to claim 1 is connected compound, which is characterized in that
The tuning fork resonator is quartz tuning-fork resonator (10), and quartz tuning-fork resonator (10) surface is coated with electrode, quartzy sound
Fork resonator (10) connects and composes oscillating circuit loop by two electrodes and oscillating circuit.
7. the resonant mode Magnetic Sensor that magnetostriction/resonator according to claim 1 is connected compound, which is characterized in that
The fixed support structure includes that package casing (8) and one piece of cushion block (5), the tuning fork resonator pass through with magnetostriction piece (2)
Cushion block (5) is fixed in package casing (8) groove.
8. the resonant mode Magnetic Sensor that magnetostriction/resonator according to claim 7 is connected compound, which is characterized in that
The cushion block (5) is equipped with a groove, and the other end of any one magnetostriction piece is caught in the groove of cushion block (5), institute
It states package casing (8) side and is provided with threaded hole, cushion block (5) is fastened by fastening screw (6) and disc spring (7) and threaded hole.
9. the resonant mode Magnetic Sensor that magnetostriction/resonator according to claim 1 is connected compound, which is characterized in that
The fixed support structure be a pedestal (11), pedestal (11) both ends be equipped with groove, described two magnetostriction pieces (2) it is another
End is separately fixed in groove, and a tabletting (9) are fixed on the port that two magnetostriction pieces (2) are located in groove respectively.
10. the resonant mode Magnetic Sensor that magnetostriction/resonator according to claim 1 is connected compound, which is characterized in that
The frequency detecting unit is connect with output end of oscillating circuit.
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Cited By (5)
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| CN110118947A (en) * | 2019-04-19 | 2019-08-13 | 华中科技大学 | A kind of magnetic sensing device |
| CN110118946A (en) * | 2019-04-19 | 2019-08-13 | 华中科技大学 | A kind of resonant mode Magnetic Sensor |
| CN111896896A (en) * | 2019-05-06 | 2020-11-06 | 上海交通大学 | Giant magneto-impedance magnetic sensor based on magneto-electric double-resonance mode |
| CN112542674A (en) * | 2020-12-17 | 2021-03-23 | 大连交通大学 | Magnetic-electromechanical coupling type miniaturized very low frequency mechanical antenna |
| CN114152541A (en) * | 2020-09-07 | 2022-03-08 | 中石化石油工程技术服务有限公司 | Tuning fork type self-oscillation sensor system |
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