CN205562088U - Quartzy resonance power of integral type is sensing element and dynamometry module frequently - Google Patents
Quartzy resonance power of integral type is sensing element and dynamometry module frequently Download PDFInfo
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- CN205562088U CN205562088U CN201620387854.4U CN201620387854U CN205562088U CN 205562088 U CN205562088 U CN 205562088U CN 201620387854 U CN201620387854 U CN 201620387854U CN 205562088 U CN205562088 U CN 205562088U
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Abstract
The utility model discloses a quartzy resonance power of integral type is sensing element and dynamometry module frequently, wherein resonance sensing element includes the base, and the base surface is equipped with logical groove and two roof beam tuning forks, and two roof beam tuning forks are leading to including connecting that first interdigital and the second that are parallel to each other are interdigital, first interdigital, the interdigital surface of second has all coated electrode area between the inslot wall, and the work of two roof beam tuning fork is in in -plane bending vibration mode, and resonant frequency is sensitive to axial and horizontal tensile stress, compressive stress, be equipped with the flexible strut groove on perpendicular two roof beam tuning fork electrode area's logical groove both sides base surface, it runs through the base and divide into installation department and sensitive pendulum piece with the base, two roof beam tuning forks, base and flexible strut groove are the quartzy structure of integrated into one piece. This resonance sensing element can change the power of vertical direction into along two roof beam tuning fork axials or horizontal tensile stress, compressive stress, and accessible frequency detection circuitry converts the output of the resonant frequency of two roof beam tuning forks into the signal of telecommunication with external force, accomplish to the digital response of power with measure.
Description
Technical field
This utility model relates to a kind of sensor detection field, particularly to a kind of integral type quartz resonance power frequency
Sensing element and force-measuring module.
Background technology
Quartz double-ended tuning fork, is a kind of power based on in-plane bending vibration mode frequency resonator, its structure
It is to connect between two fixing ends to have two tuning forks interdigital, constitutes twin beams tuning fork structure.Due to resonator two
Root beam is with the phase contrast reversal of vibrations of 180 degree so that power that the fixed end part in the beam junction that shakes produces and
Moment is cancelled out each other, to reduce the loss of vibrational energy, it is thus achieved that the highest quality factor, it is not necessary to special
Vibrating isolation system, utilizes the piezoelectric effect of quartz crystal itself, it is possible to encourage and detect the frequency of vibration of twin beams.
This quartz double-ended tuning fork, have direct output digit signals, temperature characterisitic is stable, dynamic range is wide,
The advantage such as highly sensitive, can to produce in batches, is widely used in the conversion unit of acceleration transducer and gyroscope
In part.
When quartz double-ended tuning fork is used as force transducer, during as the conversion element of acceleration transducer,
Its principle is by quality structure, tested acceleration to be converted into inertia force to be applied on walking beam, causes and shakes
The change of beam resonant frequency, detects that this frequency just can calculate corresponding acceleration.Applied in reality
Cheng Zhong, easily problem appear to is that, in the field such as strategy navigation, seismic monitoring etc. of requirements for high precision, due to
The measurement error that temperature drift can bring, the performance of quartz vibration beam accelerometer can't reach requirement.
To this end, existing method typically use temperature-compensating mode to the measurement error overcoming temperature drift to bring,
Will carry out being reversibly mounted on middle force application structure by two identical quartz twin beams resonators, two ends are again
It is respectively adopted two end seat to fix, to constitute the biquartz tuning fork resonant element of difference structure, by inspection
Survey the difference on the frequency of two bent beams to reduce the variations in temperature impact on output frequency.It there is problems of, existing
Have technology to be usually to use interdigital for each tuning fork of two quartzy twin beams resonators with middle force drive mechanism
Bonding mode connects, as used the material such as adhesive or glass dust to carry out bonding, due to the double stones after bonding
Between each material of English tuning fork resonant element, linear expansion coefficient is different, and the hot property of the most each storeroom is not mated,
There is creep and inefficacy in adhesive, structure is complex and structural stress to add assembling when variations in temperature
Collect medium factor, all directly the precision of this biquartz tuning fork resonant element sensor is brought significant impact.
Utility model content
The purpose of this utility model is to overcome the existing biquartz tuning fork resonant element in the presence of prior art
Tuning fork interdigital and middle force drive mechanism uses bonding mode to connect, the top-stitching of each material brought is swollen
Swollen coefficient is different, hot property is not mated, adhesive occurs creep when variations in temperature and loses efficacy to this resonant element
The precision of part brings the above-mentioned deficiency of appreciable impact, it is provided that a kind of integral type quartz resonance power frequency sensing element,
Additionally provide a kind of force-measuring module simultaneously.
In order to realize above-mentioned utility model purpose, this utility model provides techniques below scheme:
A kind of integral type quartz resonance power frequency sensing element, including pedestal, described base-plates surface is provided with groove,
Being provided with twin beams tuning fork in described groove, it is mutual that described twin beams tuning fork includes being connected between described groove inwall
Parallel first interdigital and second interdigital, described first interdigital, the second interdigital surface is coated with electrode district,
Described twin beams tuning fork is operated in in-plane bending vibration mode, and resonant frequency is to axial tension stress, compressive stress and horizontal stroke
To tension, compressive stress sensitivity；Pedestal table in the described groove both sides in vertical described twin beams tuning fork electrode district
Face is provided with flexible support groove, and described flexible support groove runs through described pedestal and pedestal is divided into installation portion and can
The sensitive pendulum that the most described installation portion swings；Described twin beams tuning fork, installation portion, sensitive pendulum and flexible
Support groove is all formed in one quartz construction body.
A kind of integral type quartz resonance power frequency sensing element described in the utility model, employing arranges logical on pedestal
Groove, connects twin beams tuning fork in groove, pedestal is provided with the flexible support groove being perpendicular to twin beams tuning fork, flexibility
Pedestal is divided into installation portion and sensitive pendulum by support groove, and sensitive pendulum can bear the force of vertical direction, make quick
The deformation that sense pendulum forms, by flexible support groove, the portion that is mounted opposite swings, and then causes the deformation of twin beams tuning fork,
The power of vertical direction can be changed into twin beams tuning fork vertically by this sensitive pendulum of integral type quartz resonance power frequency
Or horizontal tension, compressive stress, by frequency detection circuit, the resonant frequency of twin beams tuning fork can be exported,
External force is converted to the signal of telecommunication, senses with the digitized of complete paired forces and measure；Due to this pedestal, groove,
Twin beams tuning fork, that flexible support groove is microcomputer technique is one-body molded, and is quartz construction body, it is possible to efficient solution
Certainly existing biquartz tuning fork resonant element because of resolution element installation process cannot avoid installation accuracy and structure with
The stress problem of storeroom, it is possible to the thermal coefficient of expansion avoiding different materials to cause after assembling is different, hot property
Do not mate, there are creep and the existing problems of internal stress in adhesive, decrease this humorous when variations in temperature
The precision of element of shaking brings impact, and can effectively reduce because variations in temperature affects resonant frequency output valve,
And then affect the accuracy of detection to power and resolution, it is possible to increase the stability of detection, this resonant sensitive element
Have rate-adaptive pacemaker, volume is little, sensitivity is high and quality factor advantages of higher.
Needing further exist for explanation, the action principle of flexible support groove is, the first of its corresponding twin beams tuning fork
Tuning fork and the position in the second tuning fork electrode district, the flexural deformation of flexible support groove directly affects twin beams tuning fork electrode
The deformation in region, and electrode zone is the position that twin beams tuning fork energy is concentrated most, the direct shadow of result of its deformation
Ringing the vibrational energy of twin beams tuning fork, constitute more significantly damping, therefore it can result in sensitive pendulum
By, under less External Force Acting, by the amplification of flexible support groove, causing twin beams tuning fork resonance frequency relatively
Big change, by measuring the variable quantity of twin beams tuning fork resonance frequency, it is possible to counter pushing away obtains suffered by sensitive pendulum
The size of the power arrived.
Preferably, described pedestal is circular or elliptical shape, and described groove is symmetrically set on described base axis,
Described first interdigital and the second interdigital both sides being located at described base axis symmetrically.
Pedestal is designed as toroidal or elliptical shape, and diameter or the oval base major axis of toroidal pedestal are
The axis of pedestal, groove is symmetricly set on base axis, and first is interdigital and second interdigital with base axis phase
The most parallel, and it is symmetrically set in base axis both sides, it is not only convenient for pedestal is processed, also allows at pedestal
During by vertical, symmetrically arranged first interdigital and second interdigital when deforming upon, pedestal can be protected
Keep steady fixed, improve sensing and the measuring accuracy of this integral type quartz resonance power frequency sensing element.
Preferably, described first is interdigital and the second interdigital two ends all by floor installation at described groove inwall
Between, described first interdigital and second interdigital between interdigital slot length be shorter than described first interdigital and second fork
Refer to length, to obtain the first of this sensing element interdigital and the second interdigital bending stiffness meeting performance requirement.
Preferably, described first interdigital and second interdigital one end is connected by conductive connecting, described first
Interdigital and the second interdigital other end is respectively provided with anode interface and negative pole interface.
Connected by conductive connecting in first interdigital one end and second interdigital one end, and first interdigital separately
One end and the second interdigital other end connect anode interface and negative pole interface respectively, first interdigital and second interdigital on
It is coated with electrode district, thus first is interdigital and the second interdigital realization is serially connected, interdigital and to first
When y-bend fingering row resonant frequency detects and exports, it is only necessary to and born anode interface by frequency detection circuit
Pole orifice, easy to connect reliably, improve detection efficiency.
Preferably, connect that described first is interdigital and the second interdigital conductive connecting is located at and is positioned at described sensitive pendulum
On the base of sheet, described first interdigital, second interdigital on described anode interface and negative pole interface be located at and be positioned at
On the base of described installation portion, and described anode interface and negative pole interface are metallic film material interface.
Preferably, described first interdigital, second four interdigital surfaces are coated with electrode district, and each table
The electrode district that face is coated with is positive electrode region spaced apart and negative electrode region, each interdigital two relative tables
Face relative to the position Relative distribution of positive electrode region and negative electrode region, the positive electricity on each interdigital two adjacent surfaces
Polar region and negative electrode region are interspersed, it is to avoid each interdigital electrode district forms short circuit.
Preferably, the cross sectional shape of described flexible support groove is circular shape or trapezoidal shape, it is simple to processing.
Preferably, the installation portion of described pedestal is provided with for fixing installing hole, puts by filling out in installing hole
Quartz sand, i.e. with pedestal with the filler of material, quartz sand at high temperature can by pedestal with mounting structure even
It is connected together, it is possible to be prevented effectively from because installation brings creep effect to cause thermal coefficient of expansion not with because material is different
Same impact.
This utility model additionally provides a kind of force-measuring module, and including carrier, described carrier is provided with above-mentioned one
Plant integral type quartz resonance power frequency sensing element, and fit with described integral type quartz resonance power frequency sensing element
The force lever joined, the action direction of described force lever is perpendicular to sensitive pendulum, described first interdigital, the
Two interdigital between be electrically connected with the first electronic loop and first frequency acquisition module.
This force-measuring module, including the carrier for installing integral type quartz resonance power frequency sensing element, on carrier
Being provided with force lever, the action direction of force lever is perpendicular to sensitive pendulum, and carrier is provided with electrical connection simultaneously
First interdigital, the second interdigital electronic loop and frequency acquisition module, for interdigital and second by first
The interdigital resonant frequency conducting and exporting twin beams tuning fork；This force-measuring module can conveniently install with any can
On device with measurement, it is possible to by acting on the force of sensitive pendulum vertical direction, this integral type quartz is humorous
The power of vertical direction can be changed into twin beams tuning fork that vertically or horizontal drawing should by the sensitive pendulum of power of shaking frequency
Power, compressive stress, can be exported the resonant frequency of twin beams tuning fork by frequency detection circuit, external force be converted to
The signal of telecommunication, senses with the digitized of complete paired forces and measures, and this force-measuring module can effectively reduce variations in temperature
Affect resonant frequency output valve, and then impact is to the accuracy of detection of power and resolution, it is possible to increase detection steady
Qualitative, that this force-measuring module has rate-adaptive pacemaker, volume is little, sensitivity is high and quality factor are high advantage.
Preferably, described carrier is provided with quartz plate mounting groove, the sensitive unit of described integral type quartz resonance power frequency
Part is sintered together with described quartz plate mounting groove by quartz sand.
By quartz sand, integral type quartz resonance power frequency sensing element is sintered together in carrier, it is possible to make one
More firm being connected on carrier of frequency sensing element of body formula quartz resonance power, makes the material of whole force-measuring module
Hot property is more mated, it is to avoid connected by existing adhesive and cause there is creep when variations in temperature
And the existing problems of internal stress, it is possible to increase the accuracy of detection of force-measuring module.
Preferably, described pedestal is circular or elliptical shape, and described groove is symmetrically set on described base axis,
Described first interdigital and the second interdigital both sides being located at described base axis symmetrically, described force lever
Active position is positioned on the sensitive pendulum axis of described pedestal.
Compared with prior art, the beneficial effects of the utility model:
1, a kind of integral type quartz resonance power frequency sensing element described in the utility model, uses and arranges on pedestal
Groove, connects twin beams tuning fork in groove, pedestal is provided with the flexible support groove being perpendicular to twin beams tuning fork, flexible
Pedestal is divided into installation portion and sensitive pendulum by support slot, and sensitive pendulum can bear the force of vertical direction, make
The deformation that sensitive pendulum forms, by flexible support groove, the portion that is mounted opposite swings, and then causes the shape of twin beams tuning fork
Becoming, the power of vertical direction can be changed into twin beams tuning fork edge by this sensitive pendulum of integral type quartz resonance power frequency
Tension axially or transversally, compressive stress, can be by frequency detection circuit defeated for the resonant frequency of twin beams tuning fork
Go out, external force is converted to the signal of telecommunication, sense with the digitized of complete paired forces and measure；Due to this pedestal, lead to
Groove, twin beams tuning fork, that flexible support groove is microcomputer technique is one-body molded, and is quartz construction body, it is possible to have
The effect existing biquartz tuning fork resonant element of solution cannot avoid installation accuracy and knot because of resolution element installation process
Structure and the stress problem of storeroom, it is possible to the thermal coefficient of expansion avoiding different materials to cause after assembling is different, hot
Performance is not mated, adhesive occurs creep and the existing problems of internal stress when variations in temperature, and it is right to decrease
The precision of this resonant element brings impact, and can effectively reduce because variations in temperature affects resonant frequency output
Value, and then affect the accuracy of detection to power and resolution, it is possible to increase the stability of detection；
2, a kind of integral type quartz resonance power frequency sensing element described in the utility model, is designed as circle by pedestal
Shape or elliptical shape, the diameter of toroidal pedestal or oval base major axis are the axis of pedestal, and groove is symmetrical
Being arranged on base axis, first is interdigital and second interdigital be parallel to each other with base axis, and is symmetrically set in base
Seat axis both sides, are not only convenient for being processed pedestal, also allow for when pedestal is by vertical, right
Claiming arrange first interdigital and second interdigital when deforming upon, pedestal can keep stably, improving this integral type
The sensing of quartz resonance power frequency sensing element and measuring accuracy；
2, a kind of integral type quartz resonance power frequency sensing element described in the utility model, in first interdigital one end and
Second interdigital one end is connected by conductive connecting, and the first interdigital other end and the second interdigital other end
Connect anode interface and negative pole interface respectively, first interdigital and second interdigital on be coated with electrode district, thus
First is interdigital and the second interdigital realization is serially connected, interdigital and second interdigital carry out resonant frequency inspection to first
When surveying and export, it is only necessary to by frequency detection circuit by anode interface and negative pole orifice, connect
Convenient and reliable, improve detection efficiency；
3, a kind of integral type quartz resonance power frequency sensing element described in the utility model, on the installation portion of pedestal
It is provided with for fixing installing hole, puts quartz sand by filling out in installing hole, i.e. with pedestal with the filler of material,
Pedestal at high temperature can be linked together by quartz sand with mounting structure, it is possible to is prevented effectively from because installation brings
The impact that creep effect is different with causing thermal coefficient of expansion because material is different；
4, a kind of force-measuring module described in the utility model, including sensitive for installing integral type quartz resonance power frequency
The carrier of element, carrier is provided with force lever, and the action direction of force lever is perpendicular to sensitive pendulum, with
Shi Zaiti is provided with electrical connection first interdigital, the second interdigital electronic loop and frequency acquisition module, uses
In by first interdigital and the second interdigital resonant frequency conducting and exporting twin beams tuning fork；This force-measuring module energy
In enough convenient installations and any device that can measure, it is possible to by acting on executing of sensitive pendulum vertical direction
Power, the power of vertical direction can be changed into twin beams tuning fork edge by this sensitive pendulum of integral type quartz resonance power frequency
Tension axially or transversally, compressive stress, can be by frequency detection circuit defeated for the resonant frequency of twin beams tuning fork
Going out, external force is converted to the signal of telecommunication, sense with the digitized of complete paired forces and measure, this force-measuring module can
Effectively reduce variations in temperature and affect resonant frequency output valve, and then affect the accuracy of detection to power and resolution,
Can improve the stability of detection, this force-measuring module has rate-adaptive pacemaker, volume is little, sensitivity is high and product
The advantage that prime factor is high.
Accompanying drawing illustrates:
Fig. 1 is the structural representation of a kind of integral type quartz resonance power described in the utility model frequency sensing element；
Fig. 2 is the structure for amplifying schematic diagram of twin beams tuning fork in Fig. 1；
Fig. 3 is the schematic diagram in twin beams tuning fork electrode district in Fig. 2；
Fig. 4 is left view in Fig. 3；
Fig. 5 is the structural representation of flexible support groove in Fig. 1；
Fig. 6 is the structural representation of a kind of force-measuring module described in the utility model.
Labelling in figure:
1, twin beams tuning fork, 11, first is interdigital, and 12, second is interdigital, 13, interdigital groove, 2, pedestal, 21,
Groove, 22, sensitive pendulum, 23, installation portion, 24, installing hole, 3, base, 4, flexible support groove,
41, groove width, 42, groove thick, 43, flute length, 51, positive electrode region, 52, negative electrode region, 61, connecting line,
62, anode interface, 63, negative pole interface, 7, force lever, 8, carrier, 9, mounting groove.
Detailed description of the invention
Below in conjunction with test example and detailed description of the invention, this utility model is described in further detail.But no
This should being interpreted as, the scope of the above-mentioned theme of this utility model is only limitted to below example, all based on this practicality
The technology that novel content is realized belongs to scope of the present utility model.
Embodiment 1
As shown in Figure 1, 2, a kind of integral type quartz resonance power frequency sensing element, including pedestal 2, described base
Seat 2 surfaces are provided with groove 21, are provided with described twin beams tuning fork 1 in described groove 21, and described twin beams tuning fork 1 wraps
Include be parallel to each other first interdigital 11 and second interdigital 12 being connected between described groove 21 inwall, described
First interdigital 11, second interdigital 12 surfaces are coated with electrode district, and described twin beams tuning fork 1 is operated in face inflection
Bent mode of oscillation, resonant frequency is sensitive to axial tension stress, compressive stress and horizontal tensile stress, compressive stress；?
Pedestal 2 surface of described groove 21 both sides of vertical described twin beams tuning fork 1 electrode district is provided with flexible support groove 4,
Described flexible support groove 4 run through described pedestal 2 and pedestal is divided into installation portion 23 with can relative described installation
The sensitive pendulum 22 that portion 23 swings；Described twin beams tuning fork 1, installation portion 23, sensitive pendulum 22 and flexible
Support groove 4 is all formed in one quartz construction body.
Above-mentioned pedestal 2 is designed as toroidal or elliptical shape, the diameter of toroidal pedestal 2 or oval base
Seat major axis is the axis of pedestal 2, such as the Y direction in Fig. 1, is additionally perpendicular to Y-axis in pedestal 2 plane
Direction be X-direction, the direction being perpendicular to X-axis Y-axis is Z-direction, on Z-direction i.e. pedestal 2
Sensitive force direction suffered by pendulum 22；Groove 21 is for square shape and is symmetricly set on pedestal 2 axis,
Flexible support groove 4 is distributed in groove 21 both sides along X-direction, forms the two sections of grooves being located along the same line；
First interdigital 11 and second interdigital 12 is parallel to each other with pedestal 2 axis, and is symmetrically set in the pedestal 2 i.e. Y of axis
Axle both sides, are not only convenient for being processed pedestal 2, also allow for when pedestal 2 is by vertical, right
When claiming arrange first interdigital 11 and second interdigital 12 to deform upon, pedestal 2 can keep stable, improves
The sensing of this integral type quartz resonance power frequency sensing element and measuring accuracy.
It addition, as in figure 2 it is shown, the interdigital groove 13 between first interdigital 11 and second interdigital 12 is shorter in length than
First interdigital 11 and second interdigital 12 length, are sent out by active force first interdigital 11 and second interdigital 12
During raw deformation, the stress position of the first interdigital 11 and second interdigital 12 ends is not at the groove of interdigital groove 13
At Kou, and it is remote from the base position of interdigital groove 13 notch, it is to avoid first interdigital 11 and second interdigital 12
Gave birth to large deformation and ruptured from notch position, to obtain the first of this sensing element interdigital 11 and second interdigital 12
Meet the bending stiffness of performance requirement.
As shown in Figure 3,4, conductive connecting is passed through in the one end in first interdigital 11 one end and second interdigital 12
61 connect, and first interdigital 11 other ends and second interdigital 12 other ends connect anode interface 62 He respectively
Negative pole interface 63, is coated with electrode district on first interdigital 11 and second interdigital 12, thus first interdigital 11
Interdigital with second 12 realize being serially connected；The humorous of corresponding first interdigital 11 and second interdigital 12 can be gathered
Vibration frequency signal；At needs, first interdigital 11 and second interdigital 12 are being carried out resonant frequency detection and exporting
Time, it is only necessary to by frequency detection circuit, anode interface 62 is connected with negative pole interface 63, connection side
Just reliable, improve detection efficiency.Further, first interdigital 11 and second interdigital 12 will can be connected
Conductive connecting 61 is located on base 3, then is connected to by base 3 on sensitive pendulum 22, interdigital by first
11, the anode interface 62 on second interdigital 12 and negative pole interface 63 are located on installation portion 23；First is interdigital
11, described anode interface 62 and the negative pole interface 63 of second interdigital 12 is metallic film material interface.
It addition, in order to improve twin beams tuning fork 1 and the reliability of the second tuning fork 2 independent positive and negative electrode electric connection,
It is coated with electrode district on first interdigital four surfaces of 11, second interdigital 12, and each surface is coated with
Electrode district is positive electrode region 51 spaced apart and negative electrode region 52, and each interdigital two relative surfaces are relative
The position Relative distribution of positive electrode region 51 and negative electrode region 52, the positive electricity on each interdigital two adjacent surfaces
Polar region 51 and negative electrode region 52 are interspersed, it is to avoid each interdigital electrode district forms short circuit., simultaneously first
Interdigital 11 and the second positive and negative staggered difference of electrode district of interdigital 12 opposite positions, i.e. the first of same position
Interdigital 11 when being positive electrode region 51, and second interdigital 12 is negative electrode region 52, and the first of same position is interdigital
11 when being negative electrode region 52, and second interdigital 12 is positive electrode region 51；Each interdigital on positive electrode region 51
The mode being face electrode with negative electrode region 52 carries out sputter coating.
As it is shown in figure 1, the installation portion 23 of pedestal 2 is provided with for fixing installing hole 24, pass through installing hole
Filling out in 24 and put quartz sand, i.e. with pedestal 2 with the filler of material, quartz sand at high temperature can be by pedestal 2
Link together with mounting structure, it is possible to be prevented effectively from because installation brings creep effect to cause with because material is different
The impact that thermal coefficient of expansion is different.
As it is shown in figure 5, in above-mentioned quartz resonance power frequency sensing element the bending stiffness of flexible support groove 4 and its
The groove width 41 of rooved face is inversely proportional to, and is directly proportional to thick 42 cubes of trench bottom groove, is directly proportional to the flute length 43 of groove.
Become its structural parameters by adjusting, i.e. groove width 41, groove thick 42 and flute length 43 can obtain and meet performance requirement
Bending stiffness and peak response；Simultaneously by adjust rational thickness i.e. natural frequency, it is to avoid resonance and
The power video sensor precise decreasing caused by resonance.To this end, the cross sectional shape of this flexible support groove 4 is designed
For circular shape or trapezoidal shape, it is to avoid during flexible support groove 4 stress, stress is concentrated, also allow for processing, Fig. 5
The slot cross-section shape of middle flexible support groove 4 show for conventional rectangular-shaped.
The effect of this flexible support groove 4 is, the first tuning fork 11 and the second tuning fork of its corresponding twin beams tuning fork 1
The position of 12 electrode districts, the flexural deformation of flexible support groove 4 directly affects the change of twin beams tuning fork 1 electrode zone
Shape, and electrode zone is the position that twin beams tuning fork 1 energy is concentrated most, result of its deformation directly affects twin beams
The vibrational energy of tuning fork 1, constitutes more significantly damping, and therefore it can result in sensitive pendulum 22 and exists
By, under less External Force Acting, by the amplification of flexible support groove 4, causing twin beams tuning fork 1 resonant frequency
Bigger change, by measuring the variable quantity of twin beams tuning fork 1 resonant frequency, it is possible to counter pushing away obtains sensitive pendulum
The size of the power suffered by 22.
The operation principle of this integral type quartz resonance power frequency sensing element is, to sensitive pendulum 22 with Vertical Square
Under force effect, (the application is not limited to the force to sensitive pendulum 22 vertical direction, it is also possible to be with necessarily
Angle favours the direction force of sensitive pendulum 22), this integral type quartz resonance power frequency sensing element will be with one
Fixed frequency vibration, i.e. when external force is acted on sensitive pendulum 22 by force lever 7, if figure is along Z axis
During opposite direction force, sensitive pendulum 22 can produce downwards deformational displacement under power effect, traction flexibility simultaneously
Support groove 4 deforms, and has driven twin beams tuning fork 1 to be stretched, wherein the first tuning fork 11 and the second tuning fork 12
Being stretched, this deformation causes the resonant frequency of twin beams tuning fork 1 to change simultaneously, the first i.e. corresponding tuning fork
11 and second tuning fork 12 frequency increase, this change by frequency detection circuit be converted into frequency signal export,
Thus realize this integral type quartz resonance power frequency sensing element acceleration-frequency signal as sensor chip
Conversion, completes the measurement of the digitized measurement to acceleration, i.e. power.The frequency of the most each tuning fork resonator
Variable quantity, i.e. amounts of frequency offset refer to the actual frequency values of each tuning fork resonator relative to reference resonance in system
The frequency of device.
A kind of integral type quartz resonance power frequency sensing element described in the utility model, uses and arranges on the base 2
Groove 21, connects twin beams tuning fork 1 in groove 21, pedestal 2 is provided with and is perpendicular to the flexibility of twin beams tuning fork 1 and props up
Support groove 4, pedestal 2 is divided into installation portion 23 and sensitive pendulum 22, sensitive pendulum 22 energy by flexible support groove 4
Enough bear the force of vertical direction, make sensitive pendulum 22 be formed by flexible support groove 4 and be mounted opposite portion 23
Deformation swing, and then cause the deformation of twin beams tuning fork 1, this sensitive pendulum 22 of integral type quartz resonance power frequency
The power of vertical direction can be changed into twin beams tuning fork 1 vertically or horizontal tension, compressive stress, can
By frequency detection circuit, the resonant frequency of twin beams tuning fork 1 is exported, external force is converted to the signal of telecommunication, with complete
Digitized sensing and the measurement of paired forces；Due to this pedestal 2, groove 21, twin beams tuning fork 1, flexible support groove
4 to be microcomputer technique one-body molded, and is quartz construction body, it is possible to effectively solves existing biquartz tuning fork humorous
The element that shakes cannot avoid the stress problem of installation accuracy and structure and storeroom, energy because of resolution element installation process
After enough avoiding different materials to assemble, the thermal coefficient of expansion that causes is different, hot property is not mated, adhesive is in temperature
There are creep and the existing problems of internal stress during change, decrease the precision on this resonant element and bring impact,
And can effectively reduce because variations in temperature affects resonant frequency output valve, and then the accuracy of detection that impact is to power
And resolution, it is possible to increase the stability of detection, this resonant sensitive element have rate-adaptive pacemaker, volume little,
Sensitivity height and quality factor advantages of higher.
Embodiment 2
As shown in Figure 6, the present embodiment additionally provides a kind of force-measuring module, including carrier 8, wherein on carrier 8
A kind of integral type quartz resonance power frequency sensing element in being provided with such as embodiment 1, and quartzy with this integral type
The force lever 7 that resonance power frequency sensing element is adaptive, the action direction of force lever 7 is perpendicular to sensitive pendulum
22, this integral type quartz resonance power frequency sensing element includes pedestal 2, and wherein pedestal 2 surface is provided with groove 21,
Being provided with twin beams tuning fork 1 in groove 21, twin beams tuning fork 1 includes being connected to being parallel to each other between groove 21 inwall
First interdigital 11 and second interdigital 12, the first interdigital 11, second interdigital 12 surfaces are coated with electrode district,
Twin beams tuning fork 1 is operated in in-plane bending vibration mode, and resonant frequency is to axial tension stress, compressive stress and laterally
Tension, compressive stress are sensitive；Set on pedestal 2 surface of groove 21 both sides of vertical twin beams tuning fork 1 electrode district
Have flexible support groove 4, flexible support groove 4 run through pedestal 2 and pedestal is divided into installation portion 23 with can be relative
The sensitive pendulum 22 that installation portion 23 swings；Pedestal 2 is circular or elliptical shape, and groove 21 is symmetrically set in base
On seat 2 axis, first interdigital 11 and second interdigital 12 is located at the both sides of pedestal 2 axis symmetrically, executes
The active position of power lever 7 is positioned on sensitive pendulum 22 axis of pedestal 2.Wherein first interdigital 11, second
Electronic loop and frequency acquisition module it is electrically connected with between interdigital 12.
Wherein, above-mentioned carrier 8 is provided with quartz plate mounting groove 9, and integral type quartz resonance power frequency sensing element leads to
Cross quartz sand to be sintered together with quartz plate mounting groove 9.By quartz sand by quick for integral type quartz resonance power frequency
Sensing unit is sintered together in carrier 8, it is possible to make integral type quartz resonance power frequency sensing element more consolidate
It is connected on carrier 8, makes the material hot property of whole force-measuring module more mate, it is to avoid by existing glue
There are creep and the existing problems of internal stress in what stick connected and caused, it is possible to increase survey when variations in temperature
The accuracy of detection of power module.
This force-measuring module, including the carrier 8 for installing integral type quartz resonance power frequency sensing element, carrier 8
Being provided with force lever 7, the action direction of force lever 7 is perpendicular to sensitive pendulum 22, simultaneously on carrier 8
Being provided with electrical connection the first interdigital electronic loop of 11, second interdigital 11 and frequency acquisition module, being used for will
First interdigital 11 and second interdigital 12 resonant frequency conducting and exporting twin beams tuning fork 1；This dynamometry mould
Block can conveniently install with on any device that can measure, it is possible to by acting on sensitive pendulum 22 Vertical Square
To force, the power of vertical direction can be changed into twin beams by the sensitive pendulum of this integral type quartz resonance power frequency
Tuning fork 1 vertically or horizontal tension, compressive stress, can be by frequency detection circuit twin beams tuning fork 1
Resonant frequency exports, and external force is converted to the signal of telecommunication, senses with the digitized of complete paired forces and measures, this survey
Power module can effectively reduce variations in temperature affects resonant frequency output valve, and then the accuracy of detection that impact is to power
And resolution, it is possible to increase the stability of detection, it is little, sensitive that this force-measuring module has rate-adaptive pacemaker, volume
The advantage that degree is high and quality factor are high.
The foregoing is only preferred embodiment of the present utility model, not in order to limit this utility model,
All any amendment, equivalent and improvement etc. made within spirit of the present utility model and principle, all should
Within being included in protection domain of the present utility model.
Claims (10)
1. an integral type quartz resonance power frequency sensing element, including pedestal (2), it is characterised in that described pedestal
(2) surface is provided with groove (21), is provided with twin beams tuning fork (1), described twin beams tuning fork (1) in described groove (21)
Interdigital including be parallel to each other first be connected between described groove (21) inwall interdigital (11) and second
(12), described first interdigital (11), second interdigital (12) surface are coated with electrode district, described twin beams sound
Fork (1) is operated in in-plane bending vibration mode, and resonant frequency to axial tension stress, compressive stress and is laterally drawn
Stress, compressive stress are sensitive；In described groove (21) both sides of vertical described twin beams tuning fork (1) electrode district
Base-plates surface is provided with flexible support groove (4), and described flexible support groove (4) runs through described pedestal (2) and by base
Seat be divided into installation portion (23) with can the sensitive pendulum (22) that swings of relative described installation portion (23)；Described double
Beam tuning fork (1), installation portion (23), sensitive pendulum (22) and flexible support groove (4) are all formed in one quartz
Structure.
A kind of integral type quartz resonance power frequency sensing element the most according to claim 1, it is characterised in that
Described pedestal (2) is circular or elliptical shape, and described groove (21) is symmetrically set in described pedestal (2) axis
On, described first interdigital (11) and second interdigital (12) are located at the two of described pedestal (2) axis symmetrically
Side.
A kind of integral type quartz resonance power frequency sensing element the most according to claim 1, it is characterised in that
The two ends of described first interdigital (11) and second interdigital (12) are all arranged on described groove (21) by base (3)
Between inwall, the interdigital groove (13) between described first interdigital (11) and second interdigital (12) is shorter in length than institute
State first interdigital (11) and second interdigital (12) length.
A kind of integral type quartz resonance power frequency sensing element the most according to claim 3, it is characterised in that
Described first interdigital (11) and second interdigital (12) one end are connected by conductive connecting (61), and described first
The other end of interdigital (11) and second interdigital (12) is respectively provided with anode interface (62) and negative pole interface (63).
A kind of integral type quartz resonance power frequency sensing element the most according to claim 4, it is characterised in that
Connect the conductive connecting (61) of described first interdigital (11) and second interdigital (12) be located at be positioned at described quick
On the base (3) of sense pendulum (22), the described positive pole on described first interdigital (11), second interdigital (12) connects
Mouth (62) and negative pole interface (63) are located on the base (3) being positioned at described installation portion (23), and described positive pole connects
Mouth (62) and negative pole interface (63) are metallic film material interface.
A kind of integral type quartz resonance power frequency sensing element the most according to claim 1, it is characterised in that
Described first interdigital (11), four surfaces of second interdigital (12) are coated with electrode district, and each surface
The electrode district being coated with is positive electrode region (51) spaced apart and negative electrode region (52), each interdigital relatively
Two surfaces relative to positive electrode region (51) and the position Relative distribution of negative electrode region (52), each interdigital phase
Positive electrode region (51) and the negative electrode region (52) on two adjacent surfaces are interspersed.
A kind of integral type quartz resonance power frequency sensing element the most according to claim 1, it is characterised in that
The cross sectional shape of described flexible support groove (4) is circular shape or trapezoidal shape.
8. according to the arbitrary described a kind of integral type quartz resonance power frequency sensing element of claim 1-7, its feature
Being, the installation portion (23) of described pedestal (2) is provided with for fixing installing hole (24).
9. a force-measuring module, including carrier (8), it is characterised in that described carrier (8) is provided with such as claim
The arbitrary described a kind of integral type quartz resonance power frequency sensing element of 1-8, and with described integral type stone
The force lever (7) that English resonance power frequency sensing element is adaptive, the action direction of described force lever (7) is vertical
In sensitive pendulum, between described first interdigital (11), second interdigital (12), it is electrically connected with electronic loop
And frequency acquisition module.
A kind of force-measuring module the most according to claim 9, it is characterised in that described carrier (8) is provided with stone
English plate mounting groove (9), described integral type quartz resonance power frequency sensing element is by quartz sand and described quartz
Plate mounting groove (9) is sintered together.
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| CN201620387854.4U CN205562088U (en) | 2016-05-03 | 2016-05-03 | Quartzy resonance power of integral type is sensing element and dynamometry module frequently |
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|---|---|---|---|
| CN201620387854.4U CN205562088U (en) | 2016-05-03 | 2016-05-03 | Quartzy resonance power of integral type is sensing element and dynamometry module frequently |
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| CN110631672A (en) * | 2019-10-10 | 2019-12-31 | 成都奥森泰科技有限公司 | Resonant vehicle dynamic weighing system and method |
| CN114543777A (en) * | 2020-11-24 | 2022-05-27 | 北京晨晶电子有限公司 | Internal vibration damping quartz tuning fork gyroscope |
| CN114543777B (en) * | 2020-11-24 | 2023-04-25 | 北京晨晶电子有限公司 | Internal vibration damping quartz tuning fork gyroscope |
| CN112611484A (en) * | 2020-12-12 | 2021-04-06 | 西安交通大学 | Metal-based flexible frame quartz differential resonance type pressure sensor |
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