CN203376085U - High precision double-end fixing resonant tuning fork type pressure sensor - Google Patents
High precision double-end fixing resonant tuning fork type pressure sensor Download PDFInfo
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- CN203376085U CN203376085U CN201320319044.1U CN201320319044U CN203376085U CN 203376085 U CN203376085 U CN 203376085U CN 201320319044 U CN201320319044 U CN 201320319044U CN 203376085 U CN203376085 U CN 203376085U
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Abstract
The utility model discloses a high precision double-end fixing resonant tuning fork type pressure sensor which comprises a pressure bearing unit, a micro lever mechanism, a flexible contact point, a pressure tuning fork, a reference tuning fork, an excitation piezoelectric element, a frequency measurement piezoelectric element, a main body and an embedded type processing module. The pressure tuning fork and the reference tuning fork are arranged on a same constant elasticity alloy base material main body and are identical in size and adjacent in position. Tuning fork arms of the two tuning forks are parallel to each other, and the two tuning fork arms of each tuning fork are both provided with one excitation piezoelectric element and one frequency measurement piezoelectric element. The input of the excitation piezoelectric element and the output of the frequency measurement piezoelectric element are both connected into the embedded type processing module. Two ends of the reference tuning fork are fixed on the main body. One end of the pressure tuning fork is fixed on the main body, and the other end is connected with the micro lever mechanism. One end of the micro lever mechanism is connected with the constant elasticity alloy base material via the flexible contact point, and the upper part of the other end of the micro lever mechanism is connected with the pressure bearing unit. A combination mode of two resonant tuning forks is adopted by the pressure sensor so that the pressure sensor is simple in structure and convenient to realize temperature drift compensation, and thus precision of the pressure sensor in long-term use is enhanced.
Description
Technical field
The utility model relates to a kind of high-precision pressure survey sensor, relates in particular to a kind of by solving fixedly resonant tuning fork formula pressure transducer of both-end that the temperature problem of floating improves measuring accuracy.
Background technology
Pressure transducer is the most widely used a kind of sensor, and it is that a kind of various mechanisms and measuring principle utilized is converted to pressure the measuring sensor of measurable voltage, current mode simulating signal or frequency type digital signal.Both-end fixedly resonant tuning fork formula pressure transducer is a kind of high-precision frequency output type pressure transducer.Both-end fixedly resonant tuning fork (DETF) is a kind of New Resonance structure, it utilizes the methods such as line cutting, photoetching, corrosion to process on a kind of material of low temperature drift characteristic, it is comprised of two parallel beams, the end of beam merges, and be connected with other structure, shape picture two ends merge, fixing tuning fork.When the energisation mode by suitable makes two prongs in its plane during vibrate in opposite phase, two stress and moment opposite directions that prong produces in their merging zone, cancel each other, make like this total can ignore with extraneous Energy Coupling by being fixedly connected with end, the energy loss of vibrational system is little.When extraneous responsive to axial force is arranged, the linear change with it of the natural vibration frequency variable quantity of prong, according to this principle, both-end fixedly resonant tuning fork with other structure, be connected just can be made into take frequency signal as output pressure transducer, that this pressure transducer has is simple in structure, the linearity good, produce highly sensitive, easily in a large number, easily and the characteristics such as computer interface, be widely used in the precision digital balance.
In real work, due to the impact of temperature on material, can make both-end fixedly the natural frequency of resonant tuning fork change, thereby the accuracy that impact is measured.For correcting temperature is measured drift, except the material that adopts the Low Drift Temperature coefficient, general way is at a temperature sensing element of the other installation of sensor, and measures the drift data under different temperatures, and the way of correcting by software carries out temperature drift compensation, thereby improve the stability of measuring under different temperatures.Way owing to adopting the thermometric software compensation, exist the otherness of tuning fork self material, size and the impact of machining precision, thereby it is different to make the temperature of each tuning fork float situation, therefore need, by the compensation of platform multi-point temperature measurement, to waste time and energy; Because of the problem of aging after materials'use, its temperature that can make is floated characteristic and is changed simultaneously, and then the long-time stability of impact measurement.
Summary of the invention
In order to overcome the deficiencies in the prior art, the purpose of this utility model is to provide fixedly resonant tuning fork formula pressure transducer of a kind of high precision both-end.
For achieving the above object, the technical solution of the utility model is: it comprises the pressure load bearing unit, microleverage, the flexible contact point, the pressure tuning fork, with reference to tuning fork, the excitation piezoelectric element, the frequency measurement piezoelectric element, main body and embedded processing module, described pressure tuning fork and being positioned on same main body base material with reference to tuning fork, size is identical, position is adjacent, the prong of two tuning forks is parallel to each other, and all there are an excitation piezoelectric element and a frequency measurement piezoelectric element to be arranged on two prongs of each tuning fork, the input of excitation piezoelectric element all is connected in the embedded processing module with the output of frequency measurement piezoelectric element.
The both-end of employing said structure is resonant tuning fork formula pressure transducer fixedly, the pressure tuning fork is connected with external pressure by microleverage, pressure load bearing unit, for exporting the frequency signal corresponding with external pressure, with reference to tuning fork both-end fix, and with any pressure in outside, directly be not connected, for exporting a fixing frequency signal.Because the position at two tuning fork places is adjacent, and material is identical, therefore, when ambient temperature changes, it is identical that two suffered temperature of tuning fork are floated impact, at this moment can be used as by the frequency variation of measuring the reference tuning fork that not be connected with external pressure the temperature drift compensation of pressure tuning fork.
After adopting said structure, the beneficial effects of the utility model are: temperature drift compensation is simple and easy to use, original frequency and a linear factor that system only need be preserved two tuning forks while dispatching from the factory get final product, temperature drift compensation to the pressure tuning fork can be realized by the variable quantity measurement to the reference fork frequency simultaneously, thereby not needing to waste time and energy carries out that the pointwise temperature is measured in advance and multipoint data is preserved compensation, thereby and avoid causing compensating the problems such as inaccurate when the equipment long-time running because ageing of performance causes temperature to float data variation.This sensor construction is simple, and manual intervention is few, has reduced labour intensity, has improved work efficiency, has improved the long-term service precision of pressure transducer.
The accompanying drawing explanation
Below in conjunction with accompanying drawing, the utility model is described in further detail:
Fig. 1 is front view of the present utility model;
Embodiment
For making that architectural feature of the present utility model and the functional effect that reaches thereof are had a better understanding and awareness, coordinate detailed explanation in order to preferred embodiment and accompanying drawing, be described as follows:
As shown in Figure 1, the utility model comprises pressure load bearing unit 1, microleverage 2, flexible contact point 3, pressure tuning fork 4, with reference to tuning fork 5, excitation piezoelectric element 6, frequency measurement piezoelectric element 7, main body 8 and embedded processing module 9, described pressure tuning fork 4 and being positioned on same main body 8 base materials with reference to tuning fork 5, size is identical, position is adjacent, the prong of two tuning forks is parallel to each other, and all there are an excitation piezoelectric element 6 and a frequency measurement piezoelectric element 7 to be arranged on two prongs of each tuning fork, the input 6 of excitation piezoelectric element all is connected in embedded processing module 9 with 7 outputs of frequency measurement piezoelectric element.
The material of described main body 8 is constant modulus alloy.
Described pressure load bearing unit 1, microleverage 2, flexible contact point 3, pressure tuning fork 4, with reference to tuning fork 5 all on a monoblock constant modulus alloy base material through line cutting, photoetching, corrosion processing moulding, each several part is connected, and is a complete organic whole.
Describedly with reference to tuning fork 5 two ends, be fixed on main body 8.
Described pressure tuning fork 4 one ends are fixed on main body 8, and the other end is connected with microleverage 2.
Described microleverage 2 one ends are connected by a flexible contact point 3 with main body 8, and using flexible contact point 3 as balance pivot, and microleverage 2 other end tops are connected with pressure load bearing unit 1.
Implementation process of the present utility model is as follows:
During actual the use (temperature is T), when on cell pressure load bearing unit 1, bearing pressure, due to the variation of axial force, can record the output valve X0 (T) of pressure tuning fork 4, detect the output valve X1 (T) with reference to tuning fork 5 simultaneously.X0 (T) and X1 (T) can measure simultaneously.
The resonance initial value X0 (T0) of (temperature is T0) pressure tuning fork 4 and resonance initial value X1 (T0) with reference to tuning fork 5 when system is preserved and to be dispatched from the factory.
During temperature drift compensation, by calculating frequency exporting change amount Δ 1 (T)=X1 (T) with reference to tuning fork 5-X1 (T0), compensation reference by this variable quantity as pressure tuning fork 4, real frequency output valve of repaying rear pressure tuning fork 4 is adjusted into X0 (T) '=X0 (T)-K Δ 1(T), wherein K is according to two set linear factors of difference such as tuning fork size, and it can arrange in the calibration of dispatching from the factory.The frequency shift value of resulting pressure tuning fork 4 is Δ (T)=X0 (T) '-X0 (T0).
Above a kind of high precision both-end that the technical program is provided fixedly resonant tuning fork formula pressure transducer is described in detail; for one of ordinary skill in the art; the thought of implementing according to the technical program; all will change in specific embodiments and applications; in sum; this description should not be construed as the restriction to the technical program, and all any changes of making according to the technical program design philosophy are all within the protection domain of the utility model patent.
Claims (6)
1. the fixing resonant tuning fork formula pressure transducer of a high precision both-end, it is characterized in that: it comprises the pressure load bearing unit, microleverage, the flexible contact point, the pressure tuning fork, with reference to tuning fork, the excitation piezoelectric element, the frequency measurement piezoelectric element, main body and embedded processing module, described pressure tuning fork and being positioned on same main body base material with reference to tuning fork, size is identical, position is adjacent, the prong of two tuning forks is parallel to each other, and all there are an excitation piezoelectric element and a frequency measurement piezoelectric element to be arranged on two prongs of each tuning fork, the input of excitation piezoelectric element all is connected in the embedded processing module with the output of frequency measurement piezoelectric element.
2. the fixing resonant tuning fork formula pressure transducer of a kind of high precision both-end according to claim 1, it is characterized in that: the material of described main body is constant modulus alloy.
3. the fixing resonant tuning fork formula pressure transducer of a kind of high precision both-end according to claim 1, it is characterized in that: described pressure load bearing unit, microleverage, flexible contact point, pressure tuning fork, with reference to tuning fork all on a monoblock constant modulus alloy base material through line cutting, photoetching, corrosion processing moulding, each several part is connected, and is a complete organic whole.
4. the fixing resonant tuning fork formula pressure transducer of a kind of high precision both-end according to claim 1 is characterized in that: describedly with reference to the tuning fork two ends, be fixed on main body.
5. the fixing resonant tuning fork formula pressure transducer of a kind of high precision both-end according to claim 1, it is characterized in that: described pressure tuning fork one end is fixed on main body, and the other end is connected with microleverage.
6. the fixing resonant tuning fork formula pressure transducer of a kind of high precision both-end according to claim 1, it is characterized in that: described microleverage one end is connected by a flexible contact point with main body, and using flexible contact point as balance pivot, microleverage other end top is connected with the pressure load bearing unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320319044.1U CN203376085U (en) | 2013-06-05 | 2013-06-05 | High precision double-end fixing resonant tuning fork type pressure sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320319044.1U CN203376085U (en) | 2013-06-05 | 2013-06-05 | High precision double-end fixing resonant tuning fork type pressure sensor |
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| Publication Number | Publication Date |
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| CN203376085U true CN203376085U (en) | 2014-01-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201320319044.1U Expired - Fee Related CN203376085U (en) | 2013-06-05 | 2013-06-05 | High precision double-end fixing resonant tuning fork type pressure sensor |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954305A (en) * | 2014-05-09 | 2014-07-30 | 浙江大学 | MEMS resonant mode charge sensor with flexible levers and detection method thereof |
| CN109521377A (en) * | 2017-09-20 | 2019-03-26 | 南京理工大学 | The resonant mode Magnetic Sensor that magnetostriction/resonator is connected compound |
| CN109883580A (en) * | 2019-03-19 | 2019-06-14 | 西安交通大学 | A kind of complete quartzy differential type resonance pressure sensor chip |
| CN112729661A (en) * | 2020-12-29 | 2021-04-30 | 北京金迈捷科技有限公司 | Ultralow temperature pressure sensor with temperature signal output function |
-
2013
- 2013-06-05 CN CN201320319044.1U patent/CN203376085U/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103954305A (en) * | 2014-05-09 | 2014-07-30 | 浙江大学 | MEMS resonant mode charge sensor with flexible levers and detection method thereof |
| CN109521377A (en) * | 2017-09-20 | 2019-03-26 | 南京理工大学 | The resonant mode Magnetic Sensor that magnetostriction/resonator is connected compound |
| CN109883580A (en) * | 2019-03-19 | 2019-06-14 | 西安交通大学 | A kind of complete quartzy differential type resonance pressure sensor chip |
| CN109883580B (en) * | 2019-03-19 | 2020-11-17 | 西安交通大学 | Full quartz differential type resonance pressure sensor chip |
| CN112729661A (en) * | 2020-12-29 | 2021-04-30 | 北京金迈捷科技有限公司 | Ultralow temperature pressure sensor with temperature signal output function |
| CN112729661B (en) * | 2020-12-29 | 2024-03-19 | 北京金迈捷科技有限公司 | Ultralow-temperature pressure sensor with temperature signal output |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140101 Termination date: 20140605 |