CN206178120U - Reduce magnetism electric sensor sensing element of vibration noise - Google Patents
Reduce magnetism electric sensor sensing element of vibration noise Download PDFInfo
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- CN206178120U CN206178120U CN201620984593.4U CN201620984593U CN206178120U CN 206178120 U CN206178120 U CN 206178120U CN 201620984593 U CN201620984593 U CN 201620984593U CN 206178120 U CN206178120 U CN 206178120U
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Abstract
The utility model relates to a reduce magnetism electric sensor sensing element of vibration noise, including magnetostrictive material layer, piezoelectric material layer, wherein the piezoelectric material layer includes flexible interdigital electrode, the piezoelectricity fibre, and the piezoelectricity fibre circular telegram polarization and the output signal of telecommunication are given for the positive negative pole that is used for connecting interdigital electrode to the wire. The piezoelectric material layer respectively has one deck magnetostrictive material layer from top to bottom, with the epoxy forming space sandwich structure that bonds between the three -layer. Sensing element's bending structure uses at the bonding in -process through epoxy to have certain radial cylindrical mould among the magnetism electric sensor, and the pressure that utilizes vacuum bag compression makes this structure be the solidification of curved curved attitude, under the circumstances of output same size's magnetoelectric signal, has reduced the influence of extraneous vibration to the sensor, has improved the magnetic field detection sensitivity in the practical application environment.
Description
Technical field
The utility model belongs to multiferroic magnetoelectric material technical field, and in particular to a kind of magnetoelectricity of reduction vibration noise is passed
Sensor sensing element.
Background technology
Magnetoelectricity type Magnetic Sensor is the important devices for detecting magnetic field, detectable for hypersensitive with the development of sensor
The demand of the sensor of weak magnetic signal is increasing, and optimum sensitivity is reachable at 1 hz for the Magnetic Sensor of multiple push-pull mode
5pT/√Hz.Suppress ambient vibration be weak magnetic signal detection key, as make hypersensitive Magnetic Sensor technical barrier it
One, it is especially prominent in actual applications, because the applied environment of ultralow frequency weak magnetic detection is usually associated with the vibration of close frequencies
Noise signal, true low frequency magnetic field response signal is flooded by the vibration signal of low frequency, it is difficult to realize the detection to weak magnetic signal.
It is to make at present using differential compensation structure to reduce influence of the ambient vibration to magnetoelectric transducer detectivity
Technical way.Exported using four ends, believed using vibration signal same-phase, magnetoelectricity signal antiphase or using vibration
Number antiphase, magnetoelectricity signal same-phase, then using the principle of difference, eliminate vibration signal and improve magnetoelectricity useful signal.From
The principle Analysis of above technological means understand that this differential principle is to vibration signal and the phase requirements of magneto-electric response signal
Very strict, the repeatability of element manufacturing is not high, can realize that the device success rate of differential principle is not high, therefore cost of manufacture
Higher, practical application effect is not obvious.
Utility model content
The purpose of this utility model is directed to the Magnetic Sensor of classic flat-plate sandwich structure easily by ambient vibration noise shadow
The problem of sound, there is provided one kind is not while magnetoelectricity signal is reduced, and simple and effective reduction ambient vibration noise is sensitive to sensor
Spend the sensor construction of influence.
It is as follows in order to realize the solution that the purpose of this utility model is provided：
The magnetic electric compound material structure sensitive element is provided for reducing external vibration, specially：By what is set gradually
First magneto strictive material, piezoelectric material layer, the second magneto strictive material are bent into the curved surface knot of sandwich space stratiform
Structure.
The magnetoelectric transducer sensing element also includes：The piezoelectric material layer upper and lower surface of piezoelectric fabric composition is stained with interdigital
Electrode flexible PCB, draws to be used to be powered to piezoelectric material layer on upper and lower surface interdigital electrode flexible PCB and polarizes and defeated
Go out two wires of signal.First magneto strictive material, piezoelectric material layer passes through between each layer of the second magneto strictive material
Epoxy bond constitutes magnetic electric compound material structure.Interdigital electrode flexible PCB is by adhering with epoxy resin to piezoelectric fabric
On.
Preferably, the material of the magneto strictive material is amorphous alloy Metglas.
Preferably, the piezoelectric fabric material of the piezoelectric material layer is the piezoelectricity such as PMN-PT, PZT, LiNbO3, BaTiO3
Material.
Preferably, epoxy resin is the two component adhesive of cold curing.
Preferably, the mould during epoxy bond by cylinder is fixed, and is evacuated by vacuum compressor and encapsulated
Solidification.
The utility model is as follows with remarkable advantage compared with prior art：
(1) the sensitive original paper simple structure, low manufacture cost, can be mass and success rate is high；
(2) the sensitive original paper by change planform be used in magnetoelectric transducer reduce external environmental noise in terms of
There is significant effect；
(3) the sensitive original paper in the utility model can keep conventional planar structure magnetic electric compound material structure sensitive element
Magnetic-electric coefficient.
Brief description of the drawings
Fig. 1 (a) is that magnetoelectric transducer sensing element in the utility model, Fig. 1 (b) are magnetoelectric transducer and piezoelectric material layer
Structural representation.
Fig. 2 is the spectrogram of the utility model vibration of element noise voltage signal.
Fig. 3 is spectrogram the putting in 100Hz or so frequency ranges of the utility model vibration of element noise voltage signal
Big figure.
Fig. 4 is the noise audiogram under the utility model element 100Hz.
Fig. 5 be the utility model element under quasistatic magnetic-electric coefficient with bias magnetic field change curve.
Specific embodiment
To make the purpose of this utility model, technical scheme and advantage clearer, spy combines the accompanying drawing in the present embodiment, right
The technical scheme that vibration noise magnetoelectric transducer sensing element structure is reduced in the utility model carries out clearly complete description：
Magnetoelectricity compound warp architecture such as Fig. 1 (a) of reduction external vibration influence is shown and its piezoelectric material layer such as Fig. 1
Shown in (b),
Concrete structure is as follows：
The first magneto strictive material 1 that to set gradually, piezoelectric material layer 2, the second magneto strictive material 3 are bent into
The curved-surface structure of sandwich space stratiform；
The magnetoelectric transducer sensing element also includes：The upper and lower surface of piezoelectric fabric 5 is stained with interdigital electrode flexible PCB 4,
6, piezoelectric material layer 2 is constituted, draw to be used to be powered to piezoelectric material layer 2 from electrode flexible PCB 4, on 6 and polarize and output letter
Number two wires 7,8；
Embodiment 1
Based on above-mentioned magnetoelectric transducer sensing element structure fabrication radius of curvature for the magnetic electric compound material structure of 5cm is quick
Sensing unit, the magnetic electric compound material structure preparation method is as follows：
From PbZrO3-(1-x)PbTiO3Ceramic making piezoelectric fabric material 5, using three layers of Metglas banding alloy systems
Make magneto strictive material 1 and 3.The every size of piezoelectric fabric is 40 × 2 × 0.2mm3, what is chosen in the present embodiment is 5
Root PZT piezoelectric fabrics, 1 and 3 size is every layer of 80 × 10 × 0.025mm3.5 PZT piezoelectric fabric upper and lower surfaces have one layer
Flexible interdigital electrode 4 and 6, between use epoxy bond.During curable epoxide, the pressure provided using vacuum bag makes piezoelectricity
Composite is fixed in the cylinder template that bottom surface radius is 5cm, and vacuum sealing is taken out after 24 hours, has just obtained curvature half
Footpath is the piezo-electricity composite material of 5cm, and positive and negative polarity wire 7 and 8 is drawn from interdigital electrode, gives piezoelectric polarization, is made it have
Piezoelectricity.After polarization, Metglas banding alloys are bonded in core piezoelectric material layer upper and lower surface with epoxy resin, with piezoresistive material
The bed of material is similar with interdigital electrode bonding mode, using vacuum bag provide pressure make Metglas bend in the same way and
Solidification, realizes the magnetic electric compound material of the multiple push-pull mode of bending.
Embodiment 2
With preparation method in the same manner as in Example 1 radius of curvature is prepared using the cylinder template that bottom surface radius is 3cm
It is the magnetic electric compound material sensing element of 3cm.
Comparative example
With preparation method in the same manner as in Example 1 traditional plane magnetic electric compound material sensitivity is prepared using plane template
Element.
Comparative example mean curvature radius is 3cm, the made magnetic of the magnetic electric compound material sensing element of 5cm and planar structure respectively
Electric transducer, three kinds of sensors is placed on actuating vibration table, influence of the vibration under test 100Hz to them, and sensor is connected to
The spectrogram of vibration noise voltage signal is drawn on dynamic signal analyzer, as shown in Figure 2, it can be seen that under 100Hz, three kinds
The size contrast of the noise voltage that sensor is produced due to vibration is VPlane＞ VCurved surface- 1 ＞ VCurved surface -2, draw magnetic electric compound material structure
Radius of curvature is smaller, and it is smaller due to the noise that vibration is produced.In order to more obviously see the reduction multiple of noise, by 100Hz
The signal partial enlargement of left and right, as shown in Figure 3, it can be seen that what the sensor that the magnetic electric compound material of curved-surface structure is made was received
Jam-to-signal it is traditional at least reduce 600 times.
The sensor vibrated under 100Hz is connected on oscillograph, it can be deduced that in 100Hz lower sensors because vibration is produced
Raw noise voltage signal changes with time oscillogram, as shown in figure 4, the biography being made up of the magnetic electric compound material of curved-surface structure
The noise signal waveforms amplitude that sensor is produced is much smaller than the sensor that planar structure magnetic electric compound material is made, it is seen that sensor resists
The performance of vibration interference is greatly improved.
Change of magnetic-electric coefficient of three sensors under quasistatic (1kHz) with bias magnetic field is tested respectively, such as Fig. 5 institutes
Show, it can be seen that under the bias magnetic field of 8Oe or so, their magnetic-electric coefficient is all in 16V/ (cm × Oe) left and right.Can draw
Conclusion, the sensing that the sensor being made up of curved-surface structure magnetic electric compound material is made with traditional planar structure magnetic electric compound material
Device is compared, and while external vibration influence of noise is reduced, its magnetic-electric coefficient is not reduced, so as to improve signal to noise ratio and sensitive
Degree.
Claims (8)
1. it is a kind of reduce vibration noise magnetoelectric transducer sensing element, it is characterised in that the sensing element be provided for drop
The structure of low external vibration, specially：The first magneto strictive material (1), piezoelectric material layer (2), second that will be set gradually
Magneto strictive material (3) is sandwich Layered-space curved-surface structure, and three layers compound with same radian.
2. sensing element according to claim 1, it is characterised in that the piezoelectric material layer (2) being made up of piezoelectric fabric (5)
Upper and lower surface is stained with interdigital electrode flexible PCB (4,6), is drawn from interdigital electrode flexible PCB (4,6) and is used to piezoelectricity
Fiber (5) energization polarization and two wires (7,8) of output signal.
3. sensing element according to claim 1, it is characterised in that the first magneto strictive material (1), piezoelectric material layer
(2), magnetic electric compound material structure is connected and composed with epoxy resin between the second magneto strictive material (3) three-decker.
4. sensing element according to claim 2, it is characterised in that described interdigital electrode flexible PCB (4,6) leads to
Adhering with epoxy resin is crossed to piezoelectric fabric (5).
5. sensing element according to claim 2, it is characterised in that the piezoelectric bag used by the piezoelectric fabric (5)
Include PZT, PMN-PT, LiNbO3, BaTiO3.
6. sensing element according to claim 1, it is characterised in that magneto strictive material uses amorphous alloy
Metglas。
7. sensing element according to claim 3, it is characterised in that described epoxy resin is the bi-component of cold curing
Adhesive.
8. sensing element according to claim 3, it is characterised in that pass through cylinder during described epoxy bond
The mould of body is fixed, and package curing is evacuated by vacuum compressor.
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| CN201620984593.4U CN206178120U (en) | 2016-08-29 | 2016-08-29 | Reduce magnetism electric sensor sensing element of vibration noise |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199462A (en) * | 2016-08-29 | 2016-12-07 | 南京理工大学 | A kind of magnetoelectric transducer sensing element reducing vibration noise |
| CN108656091A (en) * | 2018-07-20 | 2018-10-16 | 上海理工大学 | A kind of industrial robot that vibration control can be realized based on piezo-electricity composite material |
| CN108879071A (en) * | 2018-07-03 | 2018-11-23 | 西安电子科技大学 | Magnetoelectricity antenna and preparation method thereof based on magnetostriction piezoelectric material |
| CN109559731A (en) * | 2017-09-25 | 2019-04-02 | 佛山市顺德区美的电热电器制造有限公司 | Magnetostriction noise reduction components |
| CN109696260A (en) * | 2018-12-25 | 2019-04-30 | 电子科技大学 | A kind of novel pressure sensitivity meta structure |
| CN114251336A (en) * | 2021-11-05 | 2022-03-29 | 湖北塞思博科技有限公司 | Preparation method and detection method of cantilever beam structure magnetoelectric antenna and magnetoelectric antenna |
-
2016
- 2016-08-29 CN CN201620984593.4U patent/CN206178120U/en active Active
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106199462A (en) * | 2016-08-29 | 2016-12-07 | 南京理工大学 | A kind of magnetoelectric transducer sensing element reducing vibration noise |
| CN109559731A (en) * | 2017-09-25 | 2019-04-02 | 佛山市顺德区美的电热电器制造有限公司 | Magnetostriction noise reduction components |
| CN109559731B (en) * | 2017-09-25 | 2023-11-24 | 佛山市顺德区美的电热电器制造有限公司 | Magnetostriction noise reduction assembly |
| CN108879071A (en) * | 2018-07-03 | 2018-11-23 | 西安电子科技大学 | Magnetoelectricity antenna and preparation method thereof based on magnetostriction piezoelectric material |
| CN108656091A (en) * | 2018-07-20 | 2018-10-16 | 上海理工大学 | A kind of industrial robot that vibration control can be realized based on piezo-electricity composite material |
| CN108656091B (en) * | 2018-07-20 | 2024-05-03 | 上海理工大学 | Industrial robot capable of achieving vibration control based on piezoelectric composite material |
| CN109696260A (en) * | 2018-12-25 | 2019-04-30 | 电子科技大学 | A kind of novel pressure sensitivity meta structure |
| CN114251336A (en) * | 2021-11-05 | 2022-03-29 | 湖北塞思博科技有限公司 | Preparation method and detection method of cantilever beam structure magnetoelectric antenna and magnetoelectric antenna |
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