CN101430369B - Self-generation wide-band laminated magnetic induced piezoelectric effect AC magnetic field sensor and production method thereof - Google Patents
Self-generation wide-band laminated magnetic induced piezoelectric effect AC magnetic field sensor and production method thereof Download PDFInfo
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- CN101430369B CN101430369B CN2008101550395A CN200810155039A CN101430369B CN 101430369 B CN101430369 B CN 101430369B CN 2008101550395 A CN2008101550395 A CN 2008101550395A CN 200810155039 A CN200810155039 A CN 200810155039A CN 101430369 B CN101430369 B CN 101430369B
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Abstract
A power generation type AC magnetic field sensor based on magneto piezoelectric effect is a laminated structure consisting of magnetostrictive rod, a piezoelectric material, the magnetostrictive rod and a permanent magnetic material; the upper surface and the lower surface of the piezoelectric material are provided with silver membrane electrode respectively, and the magnetostrictive rods is equipped with a signal output lead. The sensor can detect the alternating current without power supply, so the sensor is an energy-saving device with zero power consumption. The sensor has the advantages of small volume and low weight, can detect the AC magnetic field bandwidth ranging from 500Hz to 70kHz, and keeps a good linear relation between the output voltage and the magnetic field amplitude. The sensor adopts a thin rod structure, thus greatly reducing the volume of the sensor, enhancing the sensitivity and the bandwidth of the sensor. A bias magnetic field provided for the thin rod is greatly reduced for using small size of the magnetostrictive material, and can be integrated with a sensitive body. The sensor can be applicable to passive detection of the alternating magnetic fields.
Description
Technical field
The present invention relates to a kind of novel AC magnetic field sensor, specifically is a kind of power generation type wide-band laminated magnetic piezoelectric effect AC magnetic field sensor.
Background technology
Development along with infotech, requirement to sensor is more and more higher, and is more and more stronger to novel, miniature, passive, high sensitivity, linearity, broadband, fast-response, little quality, low-cost demand sensor in fields such as automotive electronics, Aero-Space, communications and transportation, control automatically, Roboticses.
Need monitor the physical quantity relevant in fields such as electromagnetic compatibility, power engineering, electrical engineering, as the magnetic field of the spuious alternating magnetic field in space, motor generation, the magnetic field that electric current produces etc. with magnetic signal.In the market the dynamic magnetic field measured sensor is mainly contained: ear (Hall) effect sensor, anisotropic magnetoresistive (AMR) sensor, giant magnetoresistance (GMR) effect sensor, giant magnetic impedance (GMI) effect sensor suddenly, these sensors can be measured alternating magnetic field, but these sensors all need have the power supply power supply just can work, the Hall sensors temperature stability is relatively poor, and Hall sensor and AMR transducer sensitivity are all less.The sensor that need not to power and can survey magnetic mainly contains the solenoid according to the Faradic electricity magnetic induction principle, but this coil output signal is with the measured signal frequency shift, and under the small size low frequency, output signal is very faint.
The sensor of made of the present invention has the power supply of need not power supply and gets final product work, and characteristics with high sensitivity, linearity, broadband, fast-response, little quality, can be widely used in industries such as communications and transportation, machining industry, Aero-Space, earth environment, power engineering, automatic control, have broad application prospects.
Literature search is found early to propose to be published in Applied Physics letters in 2002 about the research paper of this type of laminated composite material piezomagnetic effect notion, Vol.81, P100-101 is by the Kiyotaka Mori andManfred Wuttig proposition " Magnetoelectric coupling in Terfenol-D/polyvinylidenedifluoridecomposites " of Univ Maryland-Coll Park USA.After this people such as the Dong of U.S. Fei Jiniya Shuxiang in 2003 at the AppliedPhysics of U.S. letters, Vol.83, p4812-4814 has delivered the research paper about sheet magnetostriction materials/piezoelectric/sheet magnetostriction materials structure devices magnetoelectric effect, bias magnetic field in its experiment is produced by large-scale electromagnet, their research is paid attention to this effect experimentized and is inquired into and the theory of this effect is carried out comparatively deep research, does not constitute sensor proposed by the invention.The electromagnetic transducer that the Wen Yumei of domestic University Of Chongqing goes up Terfenol-D and PZT ultrasonic amplitude transformer structure at " sensing technology journal " carried out research (sensing technology journal, Vol.20, No.8,2007, P1742-1746), they also carried out research (Acta Physica Sinica to " the longitudinal vibration magneto-electric response of GMM/ elastic plate/PZT layered composite structure ", Vol.57, No.7,2008, but the sensor construction of the device architecture that they propose and the present invention's proposition has very big difference P4545-4551).
Summary of the invention
The objective of the invention is to make the principle achievement in research in the above laboratory to become a kind of attainable in practice sensor, the making concrete grammar of the miniature magnetic field sensor of a kind of power generation type wide-band laminated magnetic piezoelectric effect is provided, particularly adopt in the present invention the giant magnetostrictive driver coefficient thin rod and without thin plate, another main special feature is that the present invention is integrated fritter permanent magnetism and above stepped construction, thereby constitute the sensor that has truly, and can keep wide frequency band range.
Principle of the present invention is, giant magnetostriction material has bigger magnetostriction coefficient under the effect of bias magnetic field, alternating magnetic field will cause that magnetostriction materials are flexible, the flexible Stress Transfer that is produced is given piezoelectric, form alternating electric field in the piezoelectric, the corresponding voltage signal of this electric field, this has just provided principle explanation qualitatively to this sensor, and its quantitative interpretation is comparatively complicated.But notional result shows, relating to parameters such as the volume ratio of magnetoelectric effect and giant magnetostriction material and stepped construction, the piezoelectric modulus of piezoelectric, electromechanical coupling factor.
The present invention is achieved by the following technical solutions:
A kind of self-generation wide-band laminated magnetic induced piezoelectric effect AC magnetic field sensor is the stepped construction of magnetostrictive rod/piezoelectric/magnetostrictive rod/permanent magnetic material; The upper and lower surface of said piezoelectric has silver-colored membrane electrode, and magnetostrictive rod is provided with the signal output lead.
Above-mentioned said sensor, wherein magnetostrictive rod is the square-section, length breadth ratio 〉=5.
Above-mentioned said sensor, wherein piezoelectric has length identical with magnetostrictive rod and width.
Above-mentioned said sensor, the length of permanent magnetic material or wide or long and wide wherein all less than magnetostrictive rod, permanent magnetic material is asymmetric setting with respect to the center of magnetostrictive rod.
Above-mentioned said sensor, wherein magnetostrictive rod is Td-Dy-Fe (Terfenol-D) rod with Magnetostrictive Properties.
Above-mentioned said sensor, piezoelectric wherein are the PZT materials, also can be the PMN-PT material, or other have the piezoelectric of high piezoelectric modulus; Piezoelectric can be along thickness direction polarization also (length direction) polarization longitudinally; The silver-colored membrane electrode of the upper and lower surface of piezoelectric polarizes along thickness direction.
Above-mentioned said sensor, permanent magnetic material wherein are Nd-Fe-B permanent magnetism, and magnetization is along thickness direction.
Employing has the thin rod of giant magnetostrictive driver coefficient, can reduce sensor bulk on the one hand, on the other hand owing to adopted thin bar structure, demagnetizing field is reduced greatly, so the giant magnetostrictive driver rod can produce bigger magnetostriction under less bias magnetic field, therefore can realize that the bias magnetic field that provides with a small magnet can make working sensor, and can keep big magnetic field sensitivity; Adopting permanent magnetic material and stepped construction to be integrated, transducer sensitivity is improved, is because the bias magnetic field that single magnet produces in two rods has a difference, forms the structure of similar semi-girder, has increased the sensitivity of output voltage.
The step of the concrete method for making of the present invention is as follows:
(1) makes two identical magnetostrictive rods;
(2) make the piezoelectric that has same length and width with magnetostrictive rod, but this piezoelectric is silver-plated in the upper and lower surface of piezoelectric along thickness direction polarization or length direction polarization, forms silver-colored membrane electrode, polarizes along thickness direction;
(3) with silver conductive adhesive that the thin rod of magnetostriction is bonding with piezoelectric, the processing of exerting pressure at a certain temperature;
(4) on magnetostriction materials, draw the signal output lead, be included on the piezoelectric plating conductive layer and make the electric signal lead-in wire;
(5) paste a permanent magnetism on the one side of above magnetostrictive rod, magnetization is along thickness direction.
Operation more specifically is:
1, the giant magnetostrictive driver cylindrical material is carried out cutting processing, produce the long 10-15mm that is, the cross section is 1 * 1mm
2The Td-Dy-Fe with giant magnetostrictive driver characteristic (Terfenol-D) have the thin rod of square-section, the material that obtains like this has big length and width slenderness ratio when;
2, produce by PZT or other and have the piezoelectric of high piezoelectric modulus, piezoelectric can be the PZT material, it also can be the PMN-PT material, material can be along thickness direction polarization also (length direction) polarization longitudinally, it and above-mentioned giant magnetostriction material have same length and width, the upper and lower surface of piezoelectric is silver-plated, forms silver-colored membrane electrode, and piezoelectric is polarized along the thickness direction added electric field;
3, with silver conductive adhesive that the thin rod of giant magnetostrictive driver is bonding with piezoelectric, the processing of under 80 ℃ of temperature, exerting pressure;
4, on giant magnetostriction material, respectively draw a signal output lead;
5, on the one side of above giant magnetostriction material, paste one 5 * 1 * 0.5mm
3, the Nd-Fe-B permanent magnetism of the about 0.15g of quality, this magnet magnetizes along thickness direction;
6, above stepped construction is encapsulated, promptly make the sensor of a practicality.
The present invention has the following advantages:
The present invention adopts carefully rod of Terfenol-D, but not the Terfenol-D flaky material.Because the demagnetizing factor of thin rod is little, be easy to magnetization, therefore can realize adopting small magnet to constitute whole sensor;
(1) the miniature permanent magnetism of the present invention and Terfenol-D rod/piezoelectric/Terfenol-D rod is integrated, and makes magnetic field sensor become an integral body;
(2) the present invention adopts the Terfenol-D rod, and sensor bulk is reduced greatly, but can keep high sensitivity;
(3) sensor bulk of the present invention's making is little, and its resonant frequency height makes it have high frequency span;
(4) sensitivity of the unsymmetric structure of magnet of the present invention design can obviously enhancing sensor;
(5) the present invention increases resonant frequency owing to after adopting thin rod the permanent magnetic material quality is reduced.
Description of drawings
Fig. 1 is the structural representation of power generation type wide-band laminated magnetic piezoelectric effect AC magnetic field sensor example.1 is the NdFeB permanent magnetic material among the figure, and 2 and 8 is the electric signal output line, and 3 is upper strata Terfenol-D giant magnetostriction material, 4 is piezoelectricity PZT material upper surface silver coating, 5 is the PZT piezoelectric, and 6 is PZT material lower surface silver coating, and 7 is the Terfenol-D of lower floor giant magnetostriction material.
Embodiment
Do into one one description below in conjunction with accompanying drawing:
Embodiment 1:
Being prepared as follows of sensor shown in Figure 1:
(1) with the cutting of the cylindrical bar of large-sized Terfenol-D, obtains long 10mm, wide 1mm, thin rod 3 of the Terfenol-D of high 1mm and thin rod 7, thin rod 3 and carefully excellent 7 relative two sides are through polishing;
(2) make the Terfenol-D that describes with (1) thin excellent 3 with wide, and thick be the PZT-5H material 5 of 0.8mm, upper and lower surface difference silver coating 4 and 6 at piezoelectric 5, being warming up to 120 ℃ in 30 minutes with the baking under 80 ℃ of CLD-5 conducting resinl kept 3 hours, be cooled to room temperature again, PZT-5H material 5 is pasted between Terfenol-D material 3 and 7, form Terfenol-D/ piezoelectric/Terfenol-D stepped construction, this PZT material polarizes with highfield along thickness direction, on the thin rod of Terfenol-D through output line 2,8 output voltage signals;
(3) with wide be 1mm, thick is 0.5mm, long is 5mm, quality is that the NdFeB permanent magnetism 1 of 0.15g sticks with glue agent and sticks on the Terfenol-D rod 3, this magnet magnetizes along thickness direction, its Surface field is 320Oe;
Embodiment 2:
Produce sinusoidal signal with Agilent33220A type signal generator, exciting current is provided for last of the twelve Earthly Branches nurse hertz circle, thereby near last of the twelve Earthly Branches nurse hertz axis centre, produce the tested alternating magnetic field of simulation, the sensor that embodiment 1 makes is put into this magnetic field, then sensor can be exported and import output voltage signal or the charge signal that alternating magnetic field is directly proportional, to cross-polarized PZT material, piezoelectric voltage coefficient reaches 35mV/Oe;
In the frequency range of 0.5～70KHz, sensor output voltage remains unchanged under constant input magnetic field.It is the resonant frequency point that frequency increases to 80KHz, and this moment, output voltage had a peak value to occur, and this moment, dV/dH was very high, and magnetic sensitivity can reach 1.5V/Oe during resonance.
The alternating signal frequency is at 0～500Hz, and under the input constant amplitude, output increases with frequency.
This sensor not only can detect alternating magnetic field, also can detect other physical quantity relevant with alternating magnetic field, also can be designed to the detection to other physical quantity.
Claims (9)
1. a self-generation wide-band laminated magnetic induced piezoelectric effect AC magnetic field sensor is characterized in that, is the stepped construction of magnetostrictive rod/piezoelectric/magnetostrictive rod/permanent magnetic material; The upper and lower surface of said piezoelectric has silver-colored membrane electrode, and magnetostrictive rod is provided with the signal output lead; Wherein magnetostrictive rod is the square-section, length breadth ratio 〉=5; The magnetization of permanent magnetic material is along thickness direction.
2. according to the said sensor of claim 1, it is characterized in that wherein piezoelectric has length identical with magnetostrictive rod and width.
3. according to the said sensor of claim 1, it is characterized in that wherein the length of permanent magnetic material is less than magnetostrictive rod, permanent magnetic material is asymmetric setting with respect to the center of magnetostrictive rod.
4. according to the said sensor of claim 1, it is characterized in that wherein magnetostrictive rod is the Td-Dy-Fe rod with Magnetostrictive Properties.
5. according to the said sensor of claim 1, it is characterized in that piezoelectric wherein is the PZT material, also can be the PMN-PT material, or other has the piezoelectric of high piezoelectric modulus; Piezoelectric can also can longitudinally polarize along the thickness direction polarization; The upper and lower surface of piezoelectric has silver-colored membrane electrode.
6. according to the said sensor of claim 1, it is characterized in that permanent magnetic material wherein is a Nd-Fe-B permanent magnetism.
7. a method of making the described self-generation wide-band laminated magnetic induced piezoelectric effect AC magnetic field sensor of claim 1 is characterized in that, may further comprise the steps:
(1) make two identical magnetostrictive rods, magnetostrictive rod is the square-section, length breadth ratio 〉=5;
(2) make the piezoelectric that has same length and width with magnetostrictive rod, but this piezoelectric is silver-plated in the upper and lower surface of piezoelectric along thickness direction polarization or length direction polarization, forms silver-colored membrane electrode;
(3) with silver conductive adhesive that the thin rod of magnetostriction is bonding with piezoelectric, the processing of exerting pressure at a certain temperature;
(4) on magnetostriction materials, draw the signal output lead;
(5) paste a permanent magnetism on the one side of above magnetostrictive rod, magnetization is along thickness direction.
8. method for making according to claim 7, it is characterized in that permanent magnetism is asymmetric about piezoelectric and every layer of center line, i.e. piezoelectric both sides giant magnetostriction material, one side outside magnetostriction materials directly adds permanent magnetic material, and permanent magnetism is not the center that is placed in magnetostriction materials.
9. method for making according to claim 7 is characterized in that, concrete operations are:
(1) making length is 10～15mm, and the cross section is 1 * 1mm
2The Td-Dy-Fe with giant magnetostrictive driver characteristic carefully the rod;
(2) produce by PZT or other and have the piezoelectric of high piezoelectric modulus, the thin rod of Td-Dy-Fe has same length and width in piezoelectric and the step (1), and the upper and lower surface of piezoelectric is silver-plated, forms silver-colored membrane electrode, polarizes along thickness direction;
(3) with silver conductive adhesive that the thin rod of giant magnetostrictive driver is bonding with piezoelectric, the processing of under 80 ℃ of temperature, exerting pressure;
(4) on giant magnetostriction material, respectively draw a signal output lead;
(5) above Terfenol-D/ piezoelectric/Terfenol-D stacking material one side paste one 5 * 1 * 0.5mm
3, the Nd-Fe-B permanent magnetism of the about 0.15g of weight, this magnet magnetizes along thickness direction.
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