CN103278148A - Two-axis microgyroscope of magnetostrictive solid oscillator - Google Patents
Two-axis microgyroscope of magnetostrictive solid oscillator Download PDFInfo
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- CN103278148A CN103278148A CN2013101650905A CN201310165090A CN103278148A CN 103278148 A CN103278148 A CN 103278148A CN 2013101650905 A CN2013101650905 A CN 2013101650905A CN 201310165090 A CN201310165090 A CN 201310165090A CN 103278148 A CN103278148 A CN 103278148A
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Abstract
The invention discloses a two-axis microgyroscope of a magnetostrictive solid oscillator, belonging to the field of micro electromechanical technique. The two-axis microgyroscope of the magnetostrictive solid oscillator comprises a solid oscillator, a lower stator, an upper stator and three magneto-dependent sensors, wherein the lower stator and the upper stator are used for driving the solid oscillator to vibrate; the lower stator and the upper stator are symmetrically arranged at the upper end face and the lower end face of the solid oscillator; and the three magneto-dependent sensors are respectively arranged at three sides of the solid oscillator, respectively sense an X-axial magnetic field change, a Y-axial magnetic field change, and a Z-axial magnetic field change of the solid oscillator, and output corresponding electric signals to correspondingly achieve measurement of the Y-axial input angular rate of the microgyroscope, measurement of the X-axial input angular rate and monitoring of Z-axial reference vibration. The microgyroscope disclosed by the invention simultaneously achieves coupling of drive vibration and detection vibration of the microgyroscope by the effect of coriolis acceleration by utilizing the solid oscillator of an overall magnetostriction material, can simultaneously measure the angular rate of double input shafts, is high in sensitivity and small in volume, and is manufactured by an MEMS (micro-electromechanical system) technique.
Description
Technical field
What the present invention relates to is a kind of device of field of micro electromechanical technology, specifically is the little gyro of a kind of magnetostriction solid oscillator twin shaft.
Background technology
The MEMS(MEMS (micro electro mechanical system) of present report) gyroscope is most for vibrating the gyro that declines, it all is to utilize elastic beam to prop up the outstanding quality that detects basically, and transfer that the structure that causes based on Coriolis acceleration (Coriolis acceleration) drives mode of oscillation and detects energy between the mode of oscillation detects angular velocity.This detection quality is propped up the outstanding vibration gyro that declines by being attached to flexible brace summer on the substrate, owing to exist movable mass, its serviceability precision to be subject to the influence that little manufacturing defect and working environment change.The new all solid state little gyro of one class has appearred in recent years, as the little gyro of optics, miniature surface wave gyro, the little gyro of piezoelectric solid mode etc.; Because there be not parts and the elastic support structure of doing mass motion in its gyro structure, so shock resistance, the anti-vibration ability is strong.
Be alloy Terfenol-D(Tb-Dy-Fe alloy with rare-earth-iron) be that the giant magnetostrictive material (being called for short GMM) of representative is the new function material that can realize the efficient conversion of electromagnetic energy-mechanical energy that development in recent years is got up.GMM except at room temperature strain up to 1500～2000ppm, also have characteristics such as output power is big, energy density is high, response speed is fast, show fabulous application prospect in national defence, Aero-Space and high-tech sector.The especially big retractility of excellent specific property by means of magnetostriction materials increases the amplitude that drives mode of oscillation, can improve the detection sensitivity of vibrating micro-gyroscope.
By literature search, " the dynamo-electric network modelling that is used for the design of magnetoelasticity gyrosensor " (Proc.of SPIE that people such as Jin-Hyeong Yoo deliver at SPIE international conference collection of thesis, Vol.7647:76472s-1～9, Electromechanical Network Modeling Applied to Magnetoelastic Gyro Sensor Design) in the literary composition, set forth a kind of with sheet strip Galfenol(iron gallium alloy) the magnetostriction materials vebrato V shape gyroscope that be used for to drive and detect.Two interdigital (namely driving interdigital interdigital with detection) and the pedestal thereof of this gyroscope tuning fork are each made of aluminum, and the interdigital permanent magnet of placing down provides bias magnetic field.Drive with Galfenol magnetostriction bar and be affixed on the interdigital medial surface of driving, by around drive coil excitation tuning fork planar to drive modal vibration, when along tuning fork major axes orientation input angular velocity, cause that by Coriolis acceleration tuning fork is to detect modal vibration, and make and be affixed on the Galfenol magnetostriction bar generation strain deformation that detects interdigital side, thereby because piezomagnetic effect produces the change of magnetic field strength that is proportional to input angular velocity, this variable signal is by the magnetic test coil sensitivity.This gyroscope is single input shaft angular rate sensor; Refer to owing to adopt two strip magnetostriction materials to be affixed on two aluminium tuning forks respectively, and driving and magnetic test coil employing winding structure, its overall dimensions is bigger, is difficult for the integrated manufacturing of little processing, and the shock resistance shock resistance during work is limited.
Summary of the invention
The present invention is directed to the prior art above shortcomings, provide a kind of magnetostriction solid oscillator twin shaft little gyro, utilize magnetostriction materials integral body as the solid oscillator, drive generation with reference to vibration by magnetostrictive effect (Joule effect), and utilize counter magnetostriction effect (Villari effect) to detect the dual input shaft angular speed by giant magnetoresistance (GMR) magneto-dependent sensor.
The present invention is achieved by the following technical solutions, the present invention includes: on, the lower surface is the solid oscillator of foursquare rectangular shape, be used for driving the following stator of solid oscillator vibration, last stator and three magneto-dependent sensors, wherein: following stator and last stator are symmetricly set in upper surface and the lower surface of solid oscillator, if the center of solid oscillator is the initial point O of inertial coordinates system OXYZ, the OZ direction is perpendicular to the plane at last stator or following stator place, three magneto-dependent sensors are arranged on three sides of solid oscillator respectively and respond to the X axis changes of magnetic field of solid oscillator respectively, Y-axis changes to changes of magnetic field and Z axial magnetic field, exports corresponding electric signal and realizes that with correspondence the Y-axis of little gyro is to the measurement of input angle speed, the measurement of X axis input angle speed and Z are axially with reference to the monitoring of vibrating;
The structure of described stator down and last stator is identical, comprising: the solid oscillator is produced the permanent magnet of biasing static magnetic field and the solid oscillator produced the driving planar coil of the variation magnetic field of stack.
The end surface shape of described stator down and last stator is identical with the end surface shape of solid oscillator, cooperates the solid oscillator to make its performance maximum function.
Described solid oscillator is processed by monocrystalline or polycrystalline magnetostriction materials Tb-Dy-Fe alloy Terfenol-D or iron gallium alloy Galfenol, or is made through the powder metallurgical technique sintering by magnetostriction materials.The solid oscillator has under excitation field dilatation simultaneously and is subjected to the external stress distortion to produce the characteristic that magnetic permeability changes, and its maximum mangneto stroke direction is that the short transverse along the solid oscillator is the OZ direction.
As preferred scheme, described driving planar coil is arranged on the square substrate, and permanent magnet is arranged at the outside that drives planar coil.
As another kind of scheme, described driving planar coil is integrated on the upper and lower end face of solid oscillator, and permanent magnet is arranged at the outside that drives planar coil.
Permanent magnet is distributed in the axial outermost of little gyro Z, and the biasing static magnetic field that the permanent magnet that bilateral is arranged produces guarantees that the solid oscillator is operated in the linear oscillator scope, and the magnetic field suction that produces between two permanent magnets can produce certain pretightning force to the solid oscillator again.
Drive planar coil by the high frequency sinusoidal signal excitation, the solid oscillator is produced the variation magnetic field of stack.Like this, the solid oscillator is done flexible with reference to vibration under the acting in conjunction of permanent magnet bias magnetic field and coil AC magnetic field with the frequency of ac-excited signal.
Described driving planar coil is single or multiple lift multiturn spiral winding, comprise: coil layer, pin and insulating mediums that bottom lead-in wire, connection post, individual layer or some layers be arranged in parallel, wherein: be communicated with post and link to each other with pin with bottom lead-in wire, each layer line ring layer respectively, insulating medium riddles the bottom lead-in wire, is communicated with in post and the coil layer; This drives planar coil and adopts the manufacturing of MEMS processing technology, and described MEMS processing technology comprises basic working procedure such as sputtering sedimentation, photoetching, etching, plating, section.
The main material of described bottom lead-in wire, connection post, coil and pin is metallic copper.
Described magneto-dependent sensor is a giant magneto-resistance sensor to an axial magnetic field sensitivity, comprise: two for magnetic field sensing resistance, two reference resistances of the external magnetic field of induction the same area and two magnetic flux aggregators that are covered in the reference resistance outside respectively, wherein: the resistance value of two magnetic field sensing resistance, two reference resistances is all identical, two kinds of resistance is alternative arrangement and the formation Wheatstone bridge that joins end to end respectively, and four links are respectively electric bridge supply voltage end, two induced voltage output and grounds.
Described magnetic field sensing resistance is positioned at the centre position of whole magneto-dependent sensor, and the two pairs of reference resistances and magnetic flux aggregator lay respectively at the both sides of magnetic field sensing resistance.
Described magnetic field sensing resistance and reference resistance are the preparation of multilayer film giant magnetic resistance.
Described magnetic flux aggregator is the soft magnetic material thin film preparation, makes the resistance of reference resistance not influenced by the external magnetic field, and the also effect that has magnetic flux to converge to the magnetic field sensing resistance of placing therebetween strengthens magneto-dependent sensor to the detection sensitivity of external magnetic field.By adjusting the relative position of two magnetic flux aggregators and two magnetic field sensing resistance, the magnetic field detection sensitivity of magneto-dependent sensor is improved, for example, sensitivity is directly proportional with the length L of magnetic flux aggregator and the ratio L/d of two magnetic flux aggregator gap d, namely can design the magneto-dependent sensor of different sensitivity by different L/d.
The electric signal of described magneto-dependent sensor output is: V
O2-V
O1=V
bδ/(2+ δ), δ=△ R/R, wherein: V
O2, V
O1Be respectively the magnitude of voltage of induced voltage output terminal, V
bBe the magnitude of voltage of electric bridge supply voltage end, δ is change rate of magnetic reluctance, and △ R is the resistance decrease of magnetic field sensing resistance, and R is magnetic field sensing resistance and the initial value of reference resistance under zero magnetic field.
Being shaped as of described magnetic field sensing resistance and reference resistance: the list structure of several times bendings, this structure increase initial resistivity value under zero magnetic field improving the resolution of magnetic field detection, and make electric resistance structure arrange compactlyer.
Described GMR magneto-dependent sensor adopts the manufacturing of MEMS micro fabrication, and described MEMS micro fabrication comprises basic working procedure such as sputtering sedimentation, photoetching, etching, plating, section.
Technique effect
Compared with prior art, the invention has the advantages that: utilize the solid oscillator of monoblock type magnetostriction materials realize simultaneously Coriolis influence be coupled little gyro the driving vibration and detect vibration, and can carry out the measurement of dual input shaft angular speed simultaneously; Adopt to drive planar coil excitation structure and giant magnetoresistance magneto-dependent sensor, and utilize the manufacturing of MEMS micro-processing technology; The overall volume of the little gyro of the present invention is little, the detection sensitivity height, and the anti shock and vibration ability is stronger.
Description of drawings
Fig. 1 is the exploded perspective structural representation of little gyro embodiment 1;
Fig. 2 is the XZ side schematic view of the little gyro package assembly of Fig. 1;
Fig. 3 is for driving little manufacturing structure synoptic diagram of planar coil;
Fig. 4 is the planar structure of magneto-dependent sensor;
Fig. 5 is the wheatstone bridge circuits synoptic diagram of magneto-dependent sensor;
Fig. 6 is the exploded perspective structural representation of little gyro embodiment 2.
Embodiment
Below embodiments of the invention are elaborated, present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1, shown in Figure 2, the little gyro of magnetostriction solid oscillator twin shaft of present embodiment comprises: the solid oscillator 1 of rectangular shape, be used for driving the following stator 2 of solid oscillator 1 vibration, last stator 3 and three magneto-dependent sensors, wherein: following stator 2 and last stator 3 are symmetricly set in upper surface and the lower surface of solid oscillator 1, if the center of solid oscillator 1 is the initial point O of inertial coordinates system OXYZ, the OZ direction is perpendicular to the plane at last stator 3 or following stator 2 places, three magneto-dependent sensors are arranged on three sides of solid oscillator 1 respectively and respond to the X axis changes of magnetic field of solid oscillator 1 respectively, Y-axis changes to changes of magnetic field and Z axial magnetic field, exports corresponding electric signal and realizes that with correspondence the Y-axis of little gyro is to the measurement of input angle speed, the measurement of X axis input angle speed and Z are axially with reference to the monitoring of vibrating;
Described stator 2 is identical with the structure of last stator 3 down, comprising: solid oscillator 1 is produced the permanent magnet 7 of biasing static magnetic field and solid oscillator 1 is produced the driving planar coil 8 of the variation magnetic field of stack.
The length of two end faces of described solid oscillator 1 and width equate that perhaps the length of the height of solid oscillator 1, two end face and width all equate.
In the present embodiment, described driving planar coil 8 is arranged on substrate 9, and being shaped as of this substrate 9 is square, and material is glass, silicon or pottery, is driving between planar coil 8 and the permanent magnet 7.
Drive planar coil 8 by the high frequency sinusoidal signal excitation, solid oscillator 1 is produced the variation magnetic field of stack.Like this, solid oscillator 1 is done flexible with reference to vibration under the acting in conjunction of permanent magnet 7 bias magnetic fields and coil AC magnetic field with the frequency of ac-excited signal.
As shown in Figure 3, described driving planar coil 8 is single or multiple lift multiturn spiral winding, use the MEMS processing technology, its structure comprises: the essential structure elements such as coil layer, pin and insulating medium that bottom lead-in wire, connection post, individual layer or some layers be arranged in parallel, the main material of wherein said bottom lead-in wire, connection post, coil and pin is metallic copper, and insulating medium is filled in wherein.Described MEMS processing technology comprises basic working procedure such as sputtering sedimentation, photoetching, etching, plating, section.Be example with two layers of little manufacturing structure of square spiral coil, its structural profile synoptic diagram as shown in Figure 3, comprise: bottom lead-in wire 81, be communicated with post 82, ground floor coil 83, be communicated with post 84, second layer coil 85, pin 86 and insulating medium 87, wherein: the two ends that are communicated with post 82 connect bottom lead-in wire 81 and ground floor coil 83 respectively, be communicated with post 84 two ends and connect ground floor coil 83 and second layer coil 85 respectively, be respectively equipped with some continuous spiral windings in each layer line ring layer, insulating medium 87 riddles bottom lead-in wire 81, be communicated with post 82,84 and coil around, the superiors of pin 86 are good plated metal gold or nickel material of weldability, arrange and insulating medium 87 outsides, perhaps polish, perhaps carve and reveal.
As Fig. 4, shown in Figure 5, described three magneto-dependent sensors comprise that X axis magneto-dependent sensor 5, Y-axis are to magneto-dependent sensor 4 and Z axial magnetic dependent sensor 6.Wherein, the axial changes of magnetic field of X axis magneto-dependent sensor 5 responsive solid oscillator 1X, be used for to measure little gyro Y-axis to input angle speed; Y-axis is used for measuring the input angle speed of little gyro X axis to the axial changes of magnetic field of magneto-dependent sensor 4 responsive solid oscillator 1Y; The axial magnetic field variation signal of Z axial magnetic dependent sensor 6 responsive solid oscillator 1Z is used for little gyro Z axially with reference to the monitoring of vibrating, to determine the reference resonance frequency of solid oscillator 1.
Described magneto-dependent sensor is a giant magneto-resistance sensor to an axial magnetic field sensitivity, comprise: two magnetic field sensing resistance 41 that is used for the external magnetic field of induction the same area, 42, two reference resistances 43,44 and two magnetic flux aggregators 45,46 of being covered in the reference resistance outside respectively, wherein: two magnetic field sensing resistance 41,42, two reference resistances 43,44 resistance value are all identical, two kinds of resistance is alternative arrangement and joined end to end by interconnection line 47 and to form Wheatstone bridge respectively, and four links 48 are respectively electric bridge supply voltage end V
b, two induced voltage output terminal V
O1, V
O2With earth terminal GND.
Described magnetic field sensing resistance 41,42 is positioned at the centre position of whole magneto-dependent sensor, the two pairs of reference resistances 43,44 and magnetic flux aggregator 45,46 lay respectively at the both sides of magnetic field sensing resistance.
Two magnetic field sensing resistance 41,42, two reference resistances 43,44 are the preparation of multilayer film giant magnetoresistance GMR material;
Magnetic flux aggregator 45,46 is for the magnetic shielding soft magnetic material thin film, makes reference resistance 43,44 resistance not influenced by the external magnetic field.Magnetic flux aggregator 45,46 also has the effect that magnetic flux converges to the magnetic field sensing resistance of placing therebetween 41,42, strengthens magneto-dependent sensor to the detection sensitivity of external magnetic field.
By adjusting two magnetic flux aggregators 45,46 and two magnetic field sensing resistance 41,42 relative position, the magnetic field detection sensitivity of magneto-dependent sensor is improved, for example, the ratio L/d of sensitivity and magnetic flux aggregator 45,46 length L and two magnetic flux aggregators 45,46 gap d is directly proportional, and namely can design the magneto-dependent sensor of different sensitivity by different L/d.
The electric signal of described magneto-dependent sensor output is: V
O2-V
O1=V
bδ/(2+ δ), δ=△ R/R, wherein: V
O2, V
O1Be respectively the magnitude of voltage of induced voltage output terminal, V
bBe the magnitude of voltage of electric bridge supply voltage end, δ is change rate of magnetic reluctance, and △ R is the resistance decrease of magnetic field sensing resistance, and R is magnetic field sensing resistance and the initial value of reference resistance under zero magnetic field.
Described magnetic field sensing resistance 41,42 and reference resistance 43,44 be shaped as: the list structure of several times bending, this structure increase initial resistivity value under zero magnetic field improving the resolution of magnetic field detection, and make resistance arrange compactlyer.
Described GMR magneto-dependent sensor adopts the manufacturing of MEMS micro fabrication, and described MEMS micro fabrication comprises basic working procedure such as sputtering sedimentation, photoetching, etching, plating, section.The MEMS micro fabrication manufacture method of GMR magneto-dependent sensor, specific as follows:
1) passes through magnetron sputtering deposition multilayer giant magnetic resistance film in substrate 49;
2) photoetching or dry etching go out magnetic field sensing resistance 41,42 and reference resistance 43,44 figure;
3) photoetching or sputter Cr/Au film, wet etching photoresist obtain connecting magnetic field sensing resistance 41,42, reference resistance 43,44 interconnection line 47 and the underlying metal figure of link 48;
4) depositing insulating layer, photoetching or wet etching insulation course expose the pin metal;
5) splash-proofing sputtering metal Seed Layer, photoetching is electroplated soft magnetic material and is formed magnetic flux aggregator 45,46 and link 48.
The material of described substrate 49 is silicon chip or glass sheet.
Described multilayer giant magnetic resistance film is: [NiFeCo/Cu] multilayer film or [Fe/Cr] multilayer film.
Described insulation course is monox or alumina insulating layer.
Described plating soft magnetic material is permalloy.
6) section at last obtains the giant magnetoresistance magneto-dependent sensor.
The principle of work of the little gyro of present embodiment is: provide at permanent magnet 7 under the prerequisite of bias magnetic field working point, drive and apply the alternating magnetic field that sinusoidal ac signal produces in the planar coil 8, it is flexible with reference to vibration that solid oscillator 1 is done with resonance frequency on Z-direction.If solid oscillator 1 along the Z-direction elongation, then shrinks along X, Y direction; Equally, if the Z axle shrinks along Z-direction, then along X, Y direction elongation; Be that solid oscillator 1 is done stretching vibration respectively repeatedly for X, Y, Z-direction.The reference resonant vibration of little gyro work is monitored by the variation of bridge output voltage signal by the magneto-dependent sensor 6 on the Z-direction.When perpendicular to this Z axially with reference to the one direction of principal axis of vibration on during as X-axis input angle speed, because the effect of the coriolis force that Coriolis acceleration causes, another axon at solid oscillator 1, be that vibration shape on the Y direction changes, the variation that will produce the magnetization according to the counter magnetostriction effect of magnetostrictor namely causes the variation of magnetic permeability, this Y-axis to changes of magnetic field detect and be converted into the output voltage of Wheatstone bridge by the magneto-dependent sensor 5 on the xz face.In like manner, when another axon direction is that Y-axis is during to input angle speed, Coriolis influence changes the X axis vibration shape of solid oscillator 1, and cause that by counter magnetostriction effect the variation of magnetostrictive vibrator X axis magnetic permeability is the changes of magnetic field of X axis, and detect by the output voltage that the magneto-dependent sensor 4 on the yz face is converted into Wheatstone bridge.When X axis and Y-axis to while during input angle speed, can export the bridge output voltage that is proportional to input angle speed size respectively by the magneto-dependent sensor 5 on the xz face and the magneto-dependent sensor 4 on the yz face, thereby realize two gyroscope functions of this little gyro.
The little gyro of magnetostriction solid oscillator twin shaft of the present invention is not limited to the related structure of embodiment 1.
As shown in Figure 6, drive planar coil 8 in the present embodiment directly on the integrated solid oscillator 1 that is manufactured on magnetostriction materials.Described driving planar coil 8 is similarly single or multiple lift multiturn spiral winding with embodiment 1, uses the MEMS processing technology.Be example with two layers of little manufacturing structure of square spiral coil, its MEMS processing technology manufacture method is: adopting the magnetostriction materials disk of solid oscillator 1 is substrate, one side in substrate, at first cvd silicon oxide or alumina insulating layer on disk, shown in Fig. 3 manufacturing structure diagrammatic cross-section, make bottom lead-in wire 81, connection post 82, ground floor coil layer 83, be communicated with post 84, second layer coil layer 85, pin 86 and insulating medium 87 by basic working procedure such as sputtering sedimentation, photoetching, plating, grinding and polishings then; Driving planar coil 8 on 1 two end faces of solid oscillator is identical method preparation all, and can realize that by the double-sided alignment photoetching above and below drives the exact position aligning of planar coil 8.
Other structures are identical with embodiment 1.
Claims (9)
1. little gyro of magnetostriction solid oscillator twin shaft, it is characterized in that, comprise: on, the lower surface is the solid oscillator of foursquare rectangular shape, be used for driving the following stator of solid oscillator vibration, last stator and three magneto-dependent sensors, wherein: following stator and last stator are symmetricly set in upper surface and the lower surface of solid oscillator, if the center of solid oscillator is the initial point O of inertial coordinates system OXYZ, the OZ direction is perpendicular to the plane at last stator or following stator place, three magneto-dependent sensors are arranged on three sides of solid oscillator respectively and respond to the X axis changes of magnetic field of solid oscillator respectively, Y-axis changes to changes of magnetic field and Z axial magnetic field, exports corresponding electric signal and realizes that with correspondence the Y-axis of little gyro is to the measurement of input angle speed, the measurement of X axis input angle speed and Z are axially with reference to the monitoring of vibrating;
The structure of described stator down and last stator is identical, comprising: the solid oscillator is produced the permanent magnet of biasing static magnetic field and the solid oscillator produced the driving planar coil of the variation magnetic field of stack.
2. little gyro according to claim 1 is characterized in that, described rectangular shape solid oscillator is processed by monocrystalline or polycrystalline magnetostriction materials Tb-Dy-Fe alloy or iron gallium alloy, or is made through the powder metallurgical technique sintering by magnetostriction materials.
3. little gyro according to claim 1 is characterized in that, described driving planar coil is arranged on the square substrate, and permanent magnet is arranged at the outside that drives planar coil.
4. little gyro according to claim 1 is characterized in that, described driving planar coil is integrated on the upper and lower end face of solid oscillator, and permanent magnet is arranged at the outside that drives planar coil.
5. according to the arbitrary described little gyro of claim 1-4 item, it is characterized in that, described driving planar coil is single or multiple lift multiturn spiral winding, comprise: coil layer, pin and insulating mediums that bottom lead-in wire, connection post, individual layer or some layers be arranged in parallel, wherein: be communicated with post and link to each other with pin with bottom lead-in wire, each layer line ring layer respectively, insulating medium riddles the bottom lead-in wire, is communicated with in post and the coil layer.
6. little gyro according to claim 1, it is characterized in that, described magneto-dependent sensor is a giant magneto-resistance sensor to an axial magnetic field sensitivity, comprise: two magnetic field sensing resistance that are used for the external magnetic field of induction the same area, two reference resistances and two magnetic flux aggregators that are covered in the reference resistance outside respectively, wherein: two magnetic field sensing resistance, the resistance value of two reference resistances is all identical, the shape of two kinds of resistance is the list structure of several times bending, alternative arrangement and the formation Wheatstone bridge that joins end to end respectively, four links are respectively electric bridge supply voltage end, two induced voltage output and grounds.
7. little gyro according to claim 6 is characterized in that, described magnetic field sensing resistance is positioned at the centre position of whole magneto-dependent sensor, and the two pairs of reference resistances and magnetic flux aggregator lay respectively at the both sides of magnetic field sensing resistance.
8. little gyro according to claim 6 is characterized in that, described magnetic field sensing resistance and reference resistance are the preparation of multilayer film giant magnetic resistance, and described magnetic flux aggregator is the soft magnetic material thin film preparation.
9. according to the arbitrary described little gyro of claim 3-8 item, it is characterized in that, described driving planar coil and described magneto-dependent sensor all adopt the manufacturing of MEMS processing technology, and described MEMS processing technology comprises sputtering sedimentation, photoetching, etching, plating, slicing process.
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| CN104358674A (en) * | 2014-10-24 | 2015-02-18 | 安徽理工大学 | Biplane oil driven micropump based on giant magnetostrictive film driver |
| CN106353702A (en) * | 2016-09-14 | 2017-01-25 | 广东顺德中山大学卡内基梅隆大学国际联合研究院 | MEMS (microelectromechanical system) magnetic field sensor based on contour-mode resonator and preparation method thereof |
| CN107292005A (en) * | 2017-06-08 | 2017-10-24 | 株洲中车时代电气股份有限公司 | A kind of track traffic current transformer vibration optimization method based on Modes Decoupling technology |
| CN110806529A (en) * | 2019-11-27 | 2020-02-18 | 云南电网有限责任公司电力科学研究院 | Capacitive type equipment insulation performance on-line monitoring system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104358674A (en) * | 2014-10-24 | 2015-02-18 | 安徽理工大学 | Biplane oil driven micropump based on giant magnetostrictive film driver |
| CN106353702A (en) * | 2016-09-14 | 2017-01-25 | 广东顺德中山大学卡内基梅隆大学国际联合研究院 | MEMS (microelectromechanical system) magnetic field sensor based on contour-mode resonator and preparation method thereof |
| CN106353702B (en) * | 2016-09-14 | 2018-11-13 | 广东顺德中山大学卡内基梅隆大学国际联合研究院 | A kind of MEMS magnetic field sensors and preparation method based on the modal resonance device that stretches in face |
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| CN110806529A (en) * | 2019-11-27 | 2020-02-18 | 云南电网有限责任公司电力科学研究院 | Capacitive type equipment insulation performance on-line monitoring system |
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