CN103278148B - Two-axis microgyroscope of magnetostrictive solid oscillator - Google Patents
Two-axis microgyroscope of magnetostrictive solid oscillator Download PDFInfo
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- CN103278148B CN103278148B CN201310165090.5A CN201310165090A CN103278148B CN 103278148 B CN103278148 B CN 103278148B CN 201310165090 A CN201310165090 A CN 201310165090A CN 103278148 B CN103278148 B CN 103278148B
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Abstract
The invention discloses a two-axis microgyroscope of a magnetostrictive solid oscillator, belonging to the field of micro electromechanical technique. The two-axis microgyroscope of the magnetostrictive solid oscillator comprises a solid oscillator, a lower stator, an upper stator and three magneto-dependent sensors, wherein the lower stator and the upper stator are used for driving the solid oscillator to vibrate; the lower stator and the upper stator are symmetrically arranged at the upper end face and the lower end face of the solid oscillator; and the three magneto-dependent sensors are respectively arranged at three sides of the solid oscillator, respectively sense an X-axial magnetic field change, a Y-axial magnetic field change, and a Z-axial magnetic field change of the solid oscillator, and output corresponding electric signals to correspondingly achieve measurement of the Y-axial input angular rate of the microgyroscope, measurement of the X-axial input angular rate and monitoring of Z-axial reference vibration. The microgyroscope disclosed by the invention simultaneously achieves coupling of drive vibration and detection vibration of the microgyroscope by the effect of coriolis acceleration by utilizing the solid oscillator of an overall magnetostriction material, can simultaneously measure the angular rate of double input shafts, is high in sensitivity and small in volume, and is manufactured by an MEMS (micro-electromechanical system) technique.
Description
Technical field
What the present invention relates to is a kind of device of field of micro electromechanical technology, specifically a kind of magnetostrictive solid oscillator twin shaft microthrust test.
Background technology
The MEMS(MEMS (micro electro mechanical system) of current report) the gyroscope overwhelming majority is oscillating micro gyroscope, it is all utilize elastic beam to prop up outstanding Detection job substantially, and transfer that the structure caused based on Coriolis acceleration (Coriolis acceleration) drives mode of oscillation and detects energy between mode of oscillation carrys out detection angle speed.This Detection job props up outstanding oscillating micro gyroscope by the flexible support beam be attached on substrate, and owing to there is movable mass, its serviceability precision is subject to the impact of micro-manufacturing defect and working environment change.There is all solid state microthrust test that a class is new in recent years, as optics microthrust test, microscopic surfaces ripple gyro, piezoelectric solid mode microthrust test etc.; Owing to there are not the parts and elastic support structure, therefore shock resistance of doing mass motion in its gyroscope structure, anti-vibration ability is strong.
With rare-earth-iron system alloy Terfenol-D(Tb-Dy-Fe alloy) for the giant magnetostrictive material (be called for short GMM) of representative be development in recent years get up can realize the new function material that electromagnetic energy-mechanical energy efficiently changes.GMM, except strain is at room temperature up to except 1500 ~ 2000ppm, also has the features such as output power is large, energy density is high, fast response time, shows fabulous application prospect in national defence, Aero-Space and high-tech sector.The especially large retractility of excellent specific property by means of magnetostriction materials increases the amplitude driving mode of oscillation, can improve the detection sensitivity of vibrating micro-gyroscope.
By literature search, " the dynamo-electric network modelling for the design of magnetoelasticity gyrosensor " (Proc.of SPIE that the people such as Jin-Hyeong Yoo deliver on SPIE international conference collection of thesis, Vol.7647:76472s-1 ~ 9, Electromechanical NetworkModeling Applied to Magnetoelastic Gyro Sensor Design) in a literary composition, set forth a kind of by sheet strip Galfenol(iron gallium alloy) the vibration tuning fork gyroscope of magnetostriction materials for driving and detect.Two interdigital (namely drive interdigital and detect interdigital) of this gyroscope tuning fork and pedestal thereof are each made of aluminum, and interdigital lower placement permanent magnet provides bias magnetic field.Driving Galfenol magnetostriction bar is affixed on and drives interdigital medial surface, by around drive coil encourage tuning fork planar vibrate with driven-mode, when along tuning fork major axes orientation input angular velocity, tuning fork is caused to vibrate with sensed-mode by Coriolis acceleration, and make to be affixed on the Galfenol magnetostriction bar generation strain deformation detecting interdigital side, thus being proportional to the change of magnetic field strength of input angular velocity because piezomagnetic effect produces, this variable signal is responsive by magnetic test coil.This gyroscope is single input shaft angle rate sensor; Be affixed on two aluminium tuning forks respectively owing to adopting two panels strip magnetostriction materials to refer to, and drive and magnetic test coil employing winding structure, its overall dimensions is comparatively large, and not easily micro Process Integrated manufacture, shock resistance shock resistance during work is limited.
Summary of the invention
The present invention is directed to prior art above shortcomings, a kind of magnetostrictive solid oscillator twin shaft microthrust test is provided, utilize magnetostriction materials overall as solid oscillator, drive by magnetostrictive effect (Joule effect) and produce with reference to vibration, and utilize counter magnetostriction effect (Villari effect) to detect dual input shaft angular speed by giant magnetoresistance (GMR) magneto-dependent sensor.
The present invention is achieved by the following technical solutions, the present invention includes: on, lower surface is the solid oscillator of foursquare rectangular shape, the lower stator vibrated for driving solid oscillator, upper stator and three magneto-dependent sensors, wherein: lower stator and upper stator are symmetricly set in upper surface and the lower surface of solid oscillator, if the center of solid oscillator is the initial point O of inertial coordinates system OXYZ, OZ direction is perpendicular to the plane at upper stator or lower stator place, three sides that three magneto-dependent sensors are arranged at solid oscillator respectively respond to the X axis changes of magnetic field of solid oscillator respectively, Y-axis changes of magnetic field and Z-axis direction changes of magnetic field, export corresponding electric signal realizes the Y-axis input angle speed of microthrust test measurement with correspondence, the measurement of X axis input angle speed and Z-axis direction are with reference to the monitoring vibrated,
Described lower stator is identical with the structure of upper stator, comprising: produce the permanent magnet of biased static magnetic field to solid oscillator and solid oscillator produced to the driving planar coil of the variation magnetic field superposed.
Described lower stator is identical with the end surface shape of solid oscillator with the end surface shape of upper stator, coordinates solid oscillator to make it play maximum function.
Described solid oscillator is processed by monocrystalline or polycrystalline magnetostriction materials Tb-Dy-Fe alloy Terfenol-D or iron gallium alloy Galfenol, or is made up through powder metallurgical technique sintering of magnetostriction materials.Solid oscillator has under excitation field dilatation simultaneously and produces the characteristic of magnetic permeability change by external stress distortion, and its maximum magnitude of magnetostriction direction is short transverse along solid oscillator and OZ direction.
As preferred scheme, described driving planar coil is arranged on square substrate, and permanent magnet is arranged at the outside driving planar coil.
Alternatively, described driving planar coil is integrated on the upper and lower end face of solid oscillator, and permanent magnet is arranged at the outside driving planar coil.
Permanent magnet is distributed in the outermost of microthrust test Z-axis direction, and the biased static magnetic field that the permanent magnet that bilateral is arranged produces ensures that solid oscillator is operated in linear oscillator scope, and the magnetic attraction force produced between two permanent magnets can produce certain pretightning force to solid oscillator again.
Drive planar coil to be encouraged by high frequency sinusoidal signal, solid oscillator is produced to the variation magnetic field of superposition.Like this, solid oscillator is done flexible with reference to vibration under the acting in conjunction of permanent magnet bias magnetic field and coil AC magnetic field with the frequency of ac-excited signal.
Described driving planar coil is single or multiple lift multiturn spiral winding, comprise: coil layer, pin and insulating medium that bottom lead-in wire, connection post, individual layer or some layers be arranged in parallel, wherein: connection post goes between with bottom respectively, each layer line ring layer is connected with pin, insulating medium riddles bottom lead-in wire, is communicated with in post and coil layer; This driving planar coil adopts the manufacture of MEMS processing technology, and described MEMS processing technology comprises the basic working procedure such as sputtering sedimentation, photoetching, etching, plating, section.
Described bottom lead-in wire, the main material of connection post, coil and pin are metallic copper.
Described magneto-dependent sensor is the giant magneto-resistance sensor only to an axial magnetic field sensitivity, comprise: two for responding to the magnetic field sensing resistance of the external magnetic field of the same area, two reference resistances and being covered in two flux concentrator of reference resistance outside respectively, wherein: the resistance value of two magnetic field sensing resistance, two reference resistances is all identical, two kinds of resistance alternative arrangement and formation Wheatstone bridge that joins end to end respectively, four links are respectively electric bridge supply voltage end, two induced voltage output and grounds.
Described magnetic field sensing resistance is positioned at the centre position of whole magneto-dependent sensor, and two pairs of reference resistances and flux concentrator lay respectively at the both sides of magnetic field sensing resistance.
Described magnetic field sensing resistance and reference resistance are the preparation of multilayer film giant magnetic resistance.
Described flux concentrator is soft magnetic material thin film preparation, makes the resistance of reference resistance not by external magnetic fields, also to the effect that the magnetic field sensing resistance placed therebetween has magnetic flux to converge, strengthens the detection sensitivity of magneto-dependent sensor external magnetic field.By adjusting the relative position of two flux concentrator and two magnetic field sensing resistance, the magnetic field detection sensitivity of magneto-dependent sensor can be made to improve, such as, sensitivity is directly proportional to the ratio L/d of length L and two flux concentrator gap d of flux concentrator, namely can be designed the magneto-dependent sensor of different sensitivity by different L/d.
The electric signal that described magneto-dependent sensor exports is: V
o2-V
o1=V
bδ/(2+ δ), δ=△ R/R, wherein: V
o2, V
o1be respectively the magnitude of voltage of induced voltage output terminal, V
bfor the magnitude of voltage of electric bridge supply voltage end, δ is change rate of magnetic reluctance, and △ R is the resistance decrease of magnetic field sensing resistance, and R is magnetic field sensing resistance and the initial value of reference resistance under zero magnetic field.
Described magnetic field sensing resistance and the shape of reference resistance are: the list structure of several times bending, and this structure increases initial resistivity value under zero magnetic field to improve the resolution of magnetic field detection, and electric resistance structure is arranged compacter.
Described GMR magneto-dependent sensor adopts the manufacture of MEMS micro fabrication, and described MEMS micro fabrication comprises the basic working procedure such as sputtering sedimentation, photoetching, etching, plating, section.
Technique effect
Compared with prior art, the invention has the advantages that: utilize the solid oscillator of monoblock type magnetostriction materials realize the driving vibration of Coriolis influence coupling microthrust test simultaneously and detect vibration, and the measurement of dual input shaft angular speed can be carried out simultaneously; Adopt and drive planar coil excitation structure and giant magnetoresistance magneto-dependent sensor, and utilize the manufacture of MEMS micro-processing technology; The overall volume of microthrust test of the present invention is little, and detection sensitivity is high, and anti shock and vibration ability is stronger.
Accompanying drawing explanation
Fig. 1 is the exploded perspective structural representation of microthrust test embodiment 1;
Fig. 2 is the XZ side schematic view of Fig. 1 microthrust test package assembly;
Fig. 3 is the micro-manufacturing structure schematic diagram driving planar coil;
Fig. 4 is the planar structure of magneto-dependent sensor;
Fig. 5 is the wheatstone bridge circuits schematic diagram of magneto-dependent sensor;
Fig. 6 is the exploded perspective structural representation of microthrust test embodiment 2.
Embodiment
Elaborate to embodiments of the invention below, the present embodiment is implemented under premised on technical solution of the present invention, give detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
Embodiment 1
As Fig. 1, shown in Fig. 2, the magnetostrictive solid oscillator twin shaft microthrust test of the present embodiment comprises: the solid oscillator 1 of rectangular shape, the lower stator 2 vibrated for driving solid oscillator 1, upper stator 3 and three magneto-dependent sensors, wherein: lower stator 2 and upper stator 3 are symmetricly set in upper surface and the lower surface of solid oscillator 1, if the center of solid oscillator 1 is the initial point O of inertial coordinates system OXYZ, OZ direction is perpendicular to the plane at upper stator 3 or lower stator 2 place, three sides that three magneto-dependent sensors are arranged at solid oscillator 1 respectively respond to the X axis changes of magnetic field of solid oscillator 1 respectively, Y-axis changes of magnetic field and Z-axis direction changes of magnetic field, export corresponding electric signal realizes the Y-axis input angle speed of microthrust test measurement with correspondence, the measurement of X axis input angle speed and Z-axis direction are with reference to the monitoring vibrated,
Described lower stator 2 is identical with the structure of upper stator 3, comprising: produce the permanent magnet 7 of biased static magnetic field to solid oscillator 1 and solid oscillator 1 produced to the driving planar coil 8 of the variation magnetic field superposed.
Solid oscillator 1 is processed by monocrystalline or polycrystalline magnetostriction alloy material such as Tb-Dy-Fe alloy Terfenol-D, iron gallium alloy Galfenol etc., or is made up through powder metallurgical technique sintering of magnetostriction materials.This solid oscillator 1 has under excitation field dilatation simultaneously and produces the characteristic of magnetic permeability change by external stress distortion, and its maximum magnitude of magnetostriction direction is short transverse along square body oscillator and OZ direction.
The length of two end faces of described solid oscillator 1 is equal with width, or the height of solid oscillator 1, the length of two end face and width are all equal.
Permanent magnet 7 is square bulk, is distributed in the outermost of microthrust test Z-axis direction.The biased static magnetic field that the permanent magnet 7 that bilateral is arranged produces ensures that solid oscillator 1 is operated in linear oscillator scope, and the magnetic attraction force produced between two permanent magnets 7 can produce certain pretightning force to solid oscillator 1 again.
In the present embodiment, described driving planar coil 8 is arranged on substrate 9, and the shape of this substrate 9 is square, and material is glass, silicon or pottery, between driving planar coil 8 and permanent magnet 7.
Drive planar coil 8 to be encouraged by high frequency sinusoidal signal, solid oscillator 1 is produced to the variation magnetic field of superposition.Like this, solid oscillator 1 is done flexible with reference to vibration under the acting in conjunction of permanent magnet 7 bias magnetic field and coil AC magnetic field with the frequency of ac-excited signal.
As shown in Figure 3, described driving planar coil 8 is single or multiple lift multiturn spiral winding, use MEMS processing technology, its structure comprises: the essential structure elements such as coil layer, pin and insulating medium that bottom lead-in wire, connection post, individual layer or some layers be arranged in parallel, wherein said bottom lead-in wire, the main material of connection post, coil and pin are metallic copper, and insulating medium is filled in wherein.Described MEMS processing technology comprises the basic working procedure such as sputtering sedimentation, photoetching, etching, plating, section.For two layers of micro-manufacturing structure of square spiral coil, its structural profile schematic diagram as shown in Figure 3, comprise: bottom lead-in wire 81, be communicated with post 82, ground floor coil 83, be communicated with post 84, second layer coil 85, pin 86 and insulating medium 87, wherein: the two ends being communicated with post 82 connect bottom lead-in wire 81 and ground floor coil 83 respectively, be communicated with post 84 two ends and connect ground floor coil 83 and second layer coil 85 respectively, some connected spiral windings are respectively equipped with in each layer line ring layer, insulating medium 87 riddles bottom lead-in wire 81, be communicated with post 82, 84 and coil around, the superiors of pin 86 are plated metal gold or nickel material that weldability is good, arrange with insulating medium 87 outside, or polish, or carve dew.
As shown in Figure 4, Figure 5, three described magneto-dependent sensors, comprise X axis magneto-dependent sensor 5, Y-axis magneto-dependent sensor 4 and Z-axis direction magneto-dependent sensor 6.Wherein, the changes of magnetic field of X axis magneto-dependent sensor 5 sensitive solids oscillator 1X axis, for measuring the input angle speed of microthrust test Y-axis; The changes of magnetic field of Y-axis magneto-dependent sensor 4 sensitive solids oscillator 1Y axis, for measuring the input angle speed of microthrust test X axis; The magnetic field variation signal of Z-axis direction magneto-dependent sensor 6 sensitive solids oscillator 1Z axis, for the monitoring of microthrust test Z-axis direction with reference to vibration, to determine the reference resonance frequency of solid oscillator 1.
Described magneto-dependent sensor is the giant magneto-resistance sensor only to an axial magnetic field sensitivity, comprise: two for responding to magnetic field sensing resistance 41,42, two reference resistances 43,44 of the external magnetic field of the same area and being covered in two flux concentrator 45,46 of reference resistance outside respectively, wherein: the resistance value of two magnetic field sensing resistance, 41,42, two reference resistances 43,44 is all identical, two kinds of resistance alternative arrangement and joined end to end by interconnection line 47 and form Wheatstone bridge respectively, four links 48 are respectively electric bridge supply voltage end V
b, two induced voltage output terminal V
o1, V
o2with earth terminal GND.
Described magnetic field sensing resistance 41,42 is positioned at the centre position of whole magneto-dependent sensor, and two pairs of reference resistances 43,44 and flux concentrator 45,46 lay respectively at the both sides of magnetic field sensing resistance.
Two magnetic field sensing resistance, 41,42, two reference resistances 43,44 are the preparation of multilayer film giant magnetoresistance GMR material;
Flux concentrator 45,46 is magnetic shielding soft magnetic material thin film, makes the resistance of reference resistance 43,44 not by external magnetic fields.Flux concentrator 45,46 also has the effect of magnetic flux convergence to the magnetic field sensing resistance 41,42 placed therebetween, strengthen the detection sensitivity of magneto-dependent sensor external magnetic field.
By adjusting the relative position of two flux concentrator, 45,46 and two magnetic field sensing resistance 41,42, the magnetic field detection sensitivity of magneto-dependent sensor can be made to improve, such as, sensitivity is directly proportional to the ratio L/d of length L and two flux concentrator 45,46 gap d of flux concentrator 45,46, namely can be designed the magneto-dependent sensor of different sensitivity by different L/d.
The electric signal that described magneto-dependent sensor exports is: V
o2-V
o1=V
bδ/(2+ δ), δ=△ R/R, wherein: V
o2, V
o1be respectively the magnitude of voltage of induced voltage output terminal, V
bfor the magnitude of voltage of electric bridge supply voltage end, δ is change rate of magnetic reluctance, and △ R is the resistance decrease of magnetic field sensing resistance, and R is magnetic field sensing resistance and the initial value of reference resistance under zero magnetic field.
Described magnetic field sensing resistance 41,42 and the shape of reference resistance 43,44 are: the list structure of several times bending, and this structure increases initial resistivity value under zero magnetic field to improve the resolution of magnetic field detection, and resistance is arranged compacter.
Described GMR magneto-dependent sensor adopts the manufacture of MEMS micro fabrication, and described MEMS micro fabrication comprises the basic working procedure such as sputtering sedimentation, photoetching, etching, plating, section.The MEMS micro fabrication manufacture method of GMR magneto-dependent sensor, specific as follows:
1) in substrate 49, magnetron sputtering deposition multilayer giant magnetic resistance film is passed through;
2) photoetching or dry etching go out the figure of magnetic field sensing resistance 41,42 and reference resistance 43,44;
3) photoetching or sputtering Cr/Au film, wet etching photoresist obtain connecting magnetic field sensing resistance 41,42, the interconnection line 47 of reference resistance 43,44 and the underlying metal figure of link 48;
4) depositing insulating layer, photoetching or wet etching insulation course expose pin metal;
5) splash-proofing sputtering metal Seed Layer, photoetching plating soft magnetic material forms flux concentrator 45,46 and link 48.
The material of described substrate 49 is silicon chip or glass sheet.
Described multilayer giant magnetic resistance film is: [NiFeCo/Cu] multilayer film or [Fe/Cr] multilayer film.
Described insulation course is monox or alumina insulating layer.
Described plating soft magnetic material is permalloy.
6) finally cut into slices, obtain giant magnetoresistance magneto-dependent sensor.
The principle of work of the present embodiment microthrust test is: provide the prerequisite of bias magnetic field working point at permanent magnet 7 under, drives in planar coil 8 alternating magnetic field applying sinusoidal ac signal and produce, and solid oscillator 1 is done in the Z-axis direction flexible with reference to vibration with resonance frequency.If solid oscillator 1 is extended along Z-direction, then shrink along X, Y direction; Equally, if Z axis shrinks along Z-direction, then extend along X, Y direction; Namely solid oscillator 1 does stretching vibration respectively repeatedly for X, Y, Z axis direction.The reference resonant vibration of microthrust test work is monitored by the change of bridge output voltage signal by the magneto-dependent sensor 6 in Z-direction.When perpendicular to this Z-axis direction with reference on the shaft direction of vibration as X-axis input angle speed time, due to the effect of the coriolis force that Coriolis acceleration causes, at the another shaft of solid oscillator 1, namely the vibration shape in Y direction changes, according to the counter magnetostriction effect of magnetostrictor, namely the change producing the magnetization is caused the change of magnetic permeability, the changes of magnetic field of this Y-axis is detected by the magneto-dependent sensor 5 on xz face and is converted into the output voltage of Wheatstone bridge.In like manner, when another body direction of principal axis and Y-axis input angle speed, Coriolis influence makes the X axis vibration shape of solid oscillator 1 change, and cause the change of magnetostrictive vibrator X axis magnetic permeability and the changes of magnetic field of X axis by counter magnetostriction effect, and detected by the output voltage that the magneto-dependent sensor 4 on yz face is converted into Wheatstone bridge.When X axis and Y-axis while during input angle speed, the bridge output voltage being proportional to input angle speed size can be exported respectively by the magneto-dependent sensor 5 on xz face and the magneto-dependent sensor 4 on yz face, thus realize two axle gyroscope functions of this microthrust test.
Embodiment 2
Magnetostrictive solid oscillator twin shaft microthrust test of the present invention is not limited to the structure involved by embodiment 1.
As shown in Figure 6, drive the direct Integrated manufacture of planar coil 8 in the present embodiment in the solid oscillator 1 of magnetostriction materials.Described driving planar coil 8, with embodiment 1, is similarly single or multiple lift multiturn spiral winding, uses MEMS processing technology.For two layers of micro-manufacturing structure of square spiral coil, its MEMS processing technology manufacture method is: the magnetostriction materials disk adopting solid oscillator 1 is substrate, in the one side of substrate, first cvd silicon oxide or alumina insulating layer on disk, then, as shown in Fig. 3 manufacturing structure diagrammatic cross-section, manufacture bottom lead-in wire 81, connection post 82, ground floor coil layer 83 by basic working procedure such as sputtering sedimentation, photoetching, plating, grinding and polishings, be communicated with post 84, second layer coil layer 85, pin 86 and insulating medium 87; Driving planar coil 8 homogeneous phase Tongfang legal system on solid oscillator 1 two end faces is standby, and can realize by double-sided alignment photoetching the exact position aligning that above and below drives planar coil 8.
Other structures are identical with embodiment 1.
Claims (8)
1. a magnetostrictive solid oscillator twin shaft microthrust test, it is characterized in that, comprise: on, lower surface is the solid oscillator of foursquare rectangular shape, the lower stator vibrated for driving solid oscillator, upper stator and three magneto-dependent sensors, wherein: lower stator and upper stator are symmetricly set in upper surface and the lower surface of solid oscillator, if the center of solid oscillator is the initial point O of inertial coordinates system OXYZ, OZ direction is perpendicular to the plane at upper stator or lower stator place, three sides that three magneto-dependent sensors are arranged at solid oscillator respectively respond to the X axis changes of magnetic field of solid oscillator respectively, Y-axis changes of magnetic field and Z-axis direction changes of magnetic field, export corresponding electric signal realizes the Y-axis input angle speed of microthrust test measurement with correspondence, the measurement of X axis input angle speed and Z-axis direction are with reference to the monitoring vibrated,
Described lower stator is identical with the structure of upper stator, comprising: produce the permanent magnet of biased static magnetic field to solid oscillator and solid oscillator produced to the driving planar coil of the variation magnetic field superposed;
Described magneto-dependent sensor is the giant magneto-resistance sensor only to an axial magnetic field sensitivity, comprise: two for responding to the magnetic field sensing resistance of the external magnetic field of the same area, two reference resistances and be covered in two flux concentrator of reference resistance outside respectively, wherein: two magnetic field sensing resistance, the resistance value of two reference resistances is all identical, the shape of two kinds of resistance is the list structure of several times bending, alternative arrangement and the formation Wheatstone bridge that joins end to end respectively, four links are respectively electric bridge supply voltage end, two induced voltage output and grounds.
2. microthrust test according to claim 1, is characterized in that, described rectangular shape solid oscillator is processed by monocrystalline or polycrystalline magnetostriction materials Tb-Dy-Fe alloy or iron gallium alloy, or to be sintered through powder metallurgical technique by magnetostriction materials and make.
3. microthrust test according to claim 1, is characterized in that, described driving planar coil is arranged on a square substrate, and permanent magnet is arranged at the outside driving planar coil.
4. microthrust test according to claim 1, is characterized in that, described driving planar coil is integrated on the upper and lower end face of solid oscillator, and permanent magnet is arranged at the outside driving planar coil.
5. according to the arbitrary described microthrust test of claim 1-4 item, it is characterized in that, described driving planar coil is single or multiple lift multiturn spiral winding, comprise: coil layer, pin and insulating medium that bottom lead-in wire, connection post, single or multiple lift be arranged in parallel, wherein: connection post goes between with bottom respectively, each layer line ring layer is connected with pin, and insulating medium riddles bottom lead-in wire, is communicated with in post and coil layer.
6. microthrust test according to claim 1, is characterized in that, described magnetic field sensing resistance is positioned at the centre position of whole magneto-dependent sensor, and two pairs of reference resistances and flux concentrator lay respectively at the both sides of magnetic field sensing resistance.
7. microthrust test according to claim 1, is characterized in that, described magnetic field sensing resistance and reference resistance are the preparation of multilayer film giant magnetic resistance, and described flux concentrator is soft magnetic material thin film preparation.
8. according to the microthrust test in claim 3,4,6 or 7 described in arbitrary claim, it is characterized in that, described driving planar coil and described magneto-dependent sensor all adopt the manufacture of MEMS processing technology, and described MEMS processing technology comprises sputtering sedimentation, photoetching, etching, plating, slicing process.
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| CN101145426A (en) * | 2006-08-28 | 2008-03-19 | 富士通株式会社 | Inductor element and integrated electronic component |
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