CN111579818B - High-sensitivity low-noise acceleration detection device and method - Google Patents
High-sensitivity low-noise acceleration detection device and method Download PDFInfo
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- CN111579818B CN111579818B CN202010640391.9A CN202010640391A CN111579818B CN 111579818 B CN111579818 B CN 111579818B CN 202010640391 A CN202010640391 A CN 202010640391A CN 111579818 B CN111579818 B CN 111579818B
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
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Abstract
The invention belongs to the technical field of acceleration measurement, and particularly relates to a high-sensitivity low-noise acceleration detection device and method; the acceleration detection device comprises a bottom plate, a protective shell, a magnetic shield, a parallel beam oscillator, a main permanent magnet, a tunnel magneto-resistor sensing element, a magnetic field modulation part, a parallel beam oscillator, a negative feedback permanent magnet, a negative feedback coil, a support body and a negative feedback coil support; the acceleration detection device and the method realize high sensitivity through beam parallel connection, realize low 1/f noise by utilizing a magnetic field high-frequency modulation method and introduce electromagnetic force negative feedback to widen the detection range, and can realize high sensitivity and low noise detection of acceleration.
Description
Technical Field
The invention belongs to the technical field of acceleration measurement, and particularly relates to a high-sensitivity low-noise acceleration detection device and method.
Background
With the rapid development of mechanical manufacturing technology, electronic circuit technology and sensor technology, acceleration detection plays an increasingly important role in the production and life of people. Currently, accelerometers have been put to practical use and commercialized in many fields, such as information technology, bioengineering, inertial guidance, automotive electronics, consumer electronics, aerospace, seismic surveying, motion control, and medical care. The development of the high-performance acceleration detection device has a very high development prospect and market application.
The tunneling magneto-resistance technology is more and more emphasized as a fourth-generation magnetic sensing technology in recent years, and compared with other magneto-resistance effects, the tunneling magneto-resistance effect has the advantages of larger resistance change rate, better temperature stability, higher sensitivity, better linearity and lower power consumption. The magnetic sensor based on the tunnel magnetoresistance effect has more excellent performance than the current mainstream magnetic sensor, namely a Hall sensor, and is beneficial to the development of a high-performance acceleration detection device based on the tunnel magnetoresistance effect.
The acceleration detection mainly uses an accelerometer to detect the acceleration of the movement of an object. According to different detection modes, the existing accelerometers can be classified into various types such as capacitance type, piezoelectric type, piezoresistive type, resonant type, tunneling current type and optical fiber type, but still cannot achieve high sensitivity in a large detection range, and meanwhile, the 1/f noise level is high, so that the actual requirements cannot be met, for example, although the tunneling current type accelerometer can achieve high sensitivity, the detection range is very narrow, and the actual application of the tunneling current type accelerometer is severely limited, so that the development of an acceleration detection device with high sensitivity, low 1/f noise level and large detection range becomes particularly important.
Disclosure of Invention
In order to overcome the problems, the invention provides a high-sensitivity low-noise acceleration detection device and method, which realize high sensitivity by connecting beams in parallel, realize low 1/f noise by using a magnetic field high-frequency modulation method and introduce electromagnetic force negative feedback to widen the detection range, and can realize high-sensitivity and low-noise detection of acceleration.
A high-sensitivity low-noise acceleration detection device comprises a bottom plate 1, a protective shell 2, a magnetic shield 3, a parallel beam oscillator 4, a main permanent magnet 5, a tunnel magneto-resistance sensing element 6, a magnetic field modulation part 7, a parallel beam oscillator 4, a negative feedback permanent magnet, a negative feedback coil, a support body and a negative feedback coil support;
the protective shell 2 is buckled and bolted on the bottom plate 1, the supporting body is fixed on the bottom plate 1 in the protective shell 2, a magnetic shielding cover 3 is arranged between the supporting body and the protective shell 2, and the parallel beam vibrator 4 is positioned in the middle of the supporting body;
the parallel beam vibrator 4 comprises a frame 41 and two parallel beam units which are arranged in a bilateral symmetry mode, the two parallel beam units are spliced together and then fixed in the frame 41, each parallel beam unit comprises a transverse parallel beam 42, a longitudinal parallel beam 43 and a negative feedback magnet support 44, the transverse parallel beam 42 is fixed to the upper end and the lower end of the negative feedback magnet support 44 respectively, and one longitudinal parallel beam 43 is fixed to one side of the negative feedback magnet support 44;
an upper negative feedback permanent magnet 9 and a lower negative feedback permanent magnet 8 are respectively fixed on the upper surface and the lower surface of the negative feedback magnet support 44, an upper negative feedback coil 11 and a lower negative feedback coil 10 are respectively arranged on the peripheries of the upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8, and the upper negative feedback coil 11 and the lower negative feedback coil 10 are respectively connected to the support body through an upper negative feedback coil support 14 and a lower negative feedback coil support 15 in a bolt mode;
a main permanent magnet 5 is fixed at the joint of negative feedback magnet supports 44 in two parallel beam units in the parallel beam vibrator 4, a magnetic field modulation part 7 and a circuit part support 17 are sequentially fixed on a support body at the rear side of the main permanent magnet 5, a tunnel magneto-resistance sensing element 6 and a circuit part 16 are respectively fixed at the front end and the rear end of the circuit part support 17 between the magnetic field modulation part 7 and the circuit part support 17, and the tunnel magneto-resistance sensing element 6 is connected with the circuit part 16 through a lead;
the magnetic field modulation part 7 comprises a cantilever beam 704, a high-permeability soft magnetic film 708 is attached to the lower portion of the front end of the cantilever beam 704, the high-permeability soft magnetic film 708 faces the tunneling magneto-resistance sensing element 6, a metal electrode layer I703, a piezoelectric layer I702 and a metal electrode layer II 701 are sequentially attached to the upper portion of the rear end of the cantilever beam 704, and a metal electrode layer III 705, a piezoelectric layer II 706 and a metal electrode layer IV 707 are sequentially attached to the lower portion of the rear end of the cantilever beam 704;
the first metal electrode layer 703, the second metal electrode layer 701, the third metal electrode layer 705 and the fourth metal electrode layer 707 are all connected with the modulation circuit in the circuit part 16 through wires;
a negative feedback drive circuit in the circuit section 16 is connected to the upper negative feedback coil 11 and the lower negative feedback coil 10, respectively;
the protective shell 2 is provided with a first power signal hole 201, the magnetic shield 3 is provided with a second power signal hole 301, and the support body is provided with a third power signal hole 1201.
The supporter include last supporter 12 and lower supporter 13, wherein lower supporter 13, parallel beam oscillator 4 and last supporter 12 fix in proper order on the inside bottom plate 1 of protecting sheathing 2 from bottom to top.
The parallel beam vibrator 4 is positioned between the upper support body 12 and the lower support body 13, and the bolt sequentially penetrates through the upper support body 12, the parallel beam vibrator 4 and the lower support body 13 and then is screwed into the bottom plate 1 for fastening.
The transverse parallel beams 42 include n beam units, the n beam units are horizontally arranged and fixed together, the longitudinal parallel beams 43 include n beam units, the n beam units are vertically arranged and fixed together, wherein n is an integer different from 0, and the number of the beam units of the transverse parallel beams 42 is the same as that of the longitudinal parallel beams 43.
The beam unit is formed by arranging two beams side by side and fixing the two beams together.
The two negative feedback magnet supports 44 of the two parallel beam units are fixed together, the transverse beam 42 at the top end of each parallel beam unit is fixed above the frame 41, the transverse beam 42 at the bottom end of each parallel beam unit is fixed below the frame 41, and the longitudinal beams 43 at the side surfaces of the two parallel beam units are respectively fixed at the left side and the right side of the frame 41.
The upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8 are negative feedback permanent magnets with the same shape, mass and magnetization intensity.
The four corners of the upper negative feedback coil support 14 and the four corners of the lower negative feedback coil support 15 are respectively fixed on the upper support body 12 and the lower support body 13 through a positioning screw 18 and a positioning nut 19.
A method for detecting acceleration by using the high-sensitivity low-noise acceleration detection device comprises the following steps:
the method comprises the following steps of firstly, mounting the acceleration detection device on a measured object;
step two, calibrating the acceleration detection device:
externally connecting a voltmeter to the circuit part 16, then enabling the measured object to perform accelerated motion at different positions and poses, and selecting the position and pose of the measured object corresponding to the maximum final output voltage value of the tunnel magnetoresistive sensing element 6 after passing through the circuit part 16 as the position and pose for the experiment;
step three, determining the initial output voltage value of the tunnel magnetoresistance sensing element 6:
when the object to be measured is in place, the voltage value displayed by the voltmeter externally connected with the circuit part 16 is the initial output voltage value of the tunnel magneto-resistance sensing element 6 and is marked as UFirst stage；
Step four, enabling the object to be measured to carry out acceleration motion according to the position and the pose for the experiment determined in the step two, and when the object to be measured generates acceleration acWhen in use, the upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8 which are used as mass blocks sense acceleration and generate the action of inertia force to drive the parallel beam vibrator 4 to vibrate together, the relative position of the main permanent magnet 5 and the fixed tunnel magneto-resistance sensing element 6 in vibration changes, that is, the magnetic field at the spatial position of the tunneling magneto-resistive sensing element 6 changes, the changed magnetic field is detected by the tunneling magneto-resistive sensing element 6, and a voltage signal proportional to the magnitude of the magnetic field is output, after the voltage signal passes through the circuit part 16, one path of the voltage signal is used as a feedback signal and flows to the upper negative feedback coil 11 and the lower negative feedback coil 10 to generate electromagnetic force so as to keep the parallel beam oscillator 4 at a balance position, the other path of the voltage signal is output as a final voltage signal, the voltage value is detected by an external voltmeter, and the initial output voltage value U of the tunnel magneto-resistance sensing element 6 is subtracted from the voltage value.First stageNamely the final output voltage U of the acceleration detection device;
step five, the final output voltage U of the tunneling magneto-resistance sensing element 6 is equal toAcceleration a of the object to be measuredcIn linear relation, acceleration a of the object to be measuredcThe final output voltage U of the tunnel magnetoresistive sensing element 6 and the parameter K of the acceleration detection apparatus can be obtained, and the formula is as follows:
ac＝KU
wherein:
wherein: m is equivalent sensitive mass, namely the mass sum of the parallel beam vibrator 4, the main permanent magnet 5 and all negative feedback permanent magnets, KMEquivalent spring rate, K, for the mechanically vibrating partHThe magnetic field change rate of a certain component of the magnetic field of the main permanent magnet 5 in an approximately linear change region, G is the magnetic field modulation efficiency coefficient of the magnetic field modulation part 7, KTMRFor the field-voltage conversion coefficient, K, of the tunnel magnetoresistive element 6AIs the voltage amplification factor, G, of the amplifying circuit block in the circuit part 16MDMIs the modulation-demodulation coefficient, K, of the demodulation circuit in circuit part 16NFIs the overall electromagnetic force negative feedback coefficient.
The invention has the beneficial effects that:
1. the sensitivity is high: the parallel beam vibrator adopts a multi-beam parallel structure form by only superposing a linear system on the structural layer surface, and the detection sensitivity can be effectively improved compared with the traditional beam structure. Whether the influence of the connecting part between the parallel beams on the sensitivity is considered is determined according to the actual situation, and if the coupling strength between the parallel beams is extremely strong, namely the deformation of the connecting part between the parallel beams can be ignored, the influence of the connecting part between the parallel beams on the sensitivity does not need to be considered; otherwise, it needs to be considered. And secondly, the negative feedback permanent magnet is used as a mass block, so that the sensitive quality can be increased to improve the sensitivity.
2. Low 1/f noise level: the 1/f noise level is reduced by using a magnetic field modulation method, the cantilever beam is driven at high frequency by a piezoelectric technology, a high-permeability film attached to the tail end of the cantilever beam vibrates at high frequency at the same frequency, a low-frequency vibration magnetic field detected by the tunnel magneto-resistance sensing element is modulated at high frequency, and the generated modulation signal is demodulated at the later stage to obtain acceleration information, so that the 1/f noise level can be effectively reduced, and the acceleration sensing precision is improved.
3. The detection range is wide: the negative feedback permanent magnet and the negative feedback coil interact to generate negative feedback electromagnetic force to keep the parallel beam vibrator at a balance position so as to increase the detection range.
4. The precision is high: the parallel beam vibrator is fixedly connected around, so that the rigidity in a non-detection direction is increased, and the influence of the parallel beam vibrator on the acceleration detection in a sensitive direction is reduced. And negative feedback permanent magnets with the same shape, quality and magnetization are fixed on the upper surface and the lower surface of the supporting parts at the left side and the right side of the parallel beam vibrator, so that the gravity center of a structure formed by combining the parallel beam vibrator and the negative feedback permanent magnets is positioned at the geometric center of the parallel beam vibrator, and the influence of cross axis sensitivity and torsion sensitivity on the main shaft detection sensitivity is effectively reduced. The polarization direction of the negative feedback permanent magnet is perpendicular to the detection direction of the tunnel magneto-resistance sensing element so as to reduce the influence of the negative feedback permanent magnet on the acceleration detection precision, the polarization directions of the two negative feedback permanent magnets on the upper surface and the lower surface of the same side of the parallel beam oscillator are opposite, and the polarization directions of the two negative feedback permanent magnets on the same surface of the parallel beam oscillator are opposite so as to weaken the influence of the magnetic field of the negative feedback permanent magnet on the tunnel magneto-resistance sensing element.
5. The anti-interference capability is strong: the whole structure is arranged in the magnetic shielding cover, so that the external electromagnetic interference can be effectively reduced. Secondly, the TMR chip adopted adopts a Wheatstone bridge structure, so that the common-mode signal interference can be effectively inhibited.
6. The response speed is high: a PID control module is designed in the circuit part, so that the response speed can be effectively improved, and meanwhile, the quick response speed is one of the requirements of the designed acceleration detection device.
In conclusion, the invention improves the sensitivity and the detection range of the acceleration detection device, reduces the 1/f noise level, has high precision, strong anti-interference capability, high response speed and good practicability, and is suitable for high-precision inertial sensing systems and related applications thereof.
Drawings
FIG. 1 is an isometric view of a high sensitivity, low noise acceleration detection apparatus of the present invention;
FIG. 2 is a bottom view of the general structure of the device of the present invention;
FIG. 3 is a front view of the general structure of the apparatus of the present invention;
FIG. 4 is a cross-sectional view of the general structure of the apparatus of the present invention taken along plane A-A;
FIG. 5 is a schematic diagram of the structure of the magnetic field modulation part of the device of the present invention;
FIG. 6 is a cross-sectional view of the general structure of the device of the present invention taken along the plane B-B;
FIG. 7 is a cross-sectional view of the general structure of the device of the present invention taken along plane C-C;
FIG. 8 is an isometric view of the main internal structure of example 1 of the present invention;
FIG. 9 is an isometric view of the main internal structure of example 2 of the present invention;
FIG. 10 is a schematic diagram of the present invention for detecting acceleration.
Fig. 11 is a schematic structural view of a parallel beam transducer according to embodiment 1 of the present invention.
Fig. 12 is a schematic structural view of a parallel beam transducer according to embodiment 2 of the present invention.
Wherein: 1 bottom plate, 2 protective shell, 201 power signal hole I, 202 bottom plate screw, 3 magnetic shield, 301 power signal hole II, 4 parallel beam vibrator, 40 connecting screw, 41 frame, 42 horizontal parallel beam, 43 longitudinal parallel beam, 44 negative feedback magnet support, 5 main permanent magnet, 6 tunnel magneto resistance sensing element, 7 magnetic field modulation part, 701 metal electrode layer II, 702 piezoelectric layer I, 703 metal electrode layer I, 704 cantilever beam, 705 metal electrode layer three, 706 piezoelectric layer two, 707 metal electrode layer four, 708 high magnetic permeability soft magnetic film, 8 lower negative feedback permanent magnet, 9 upper negative feedback permanent magnet, 10 lower negative feedback coil, 11 upper negative feedback coil, 12 upper supporter, 1201 power signal hole three, 13 lower supporter, 14 upper negative feedback coil supporter, 15 lower negative feedback coil supporter, 16 circuit part, 17 circuit part supporter, 18 positioning screw, 19 positioning nut.
Detailed Description
Example 1
As shown in fig. 1 to 9, a high-sensitivity low-noise acceleration detecting apparatus includes a bottom plate 1, a protective housing 2, a magnetic shield 3, a parallel beam vibrator 4, a main permanent magnet 5, a tunnel magnetoresistive sensing element 6, a magnetic field modulation part 7, a parallel beam vibrator 4, a negative feedback permanent magnet, a negative feedback coil, a supporting body and a negative feedback coil support;
as shown in fig. 1 and fig. 3, wherein the protective casing 2 is fastened and bolted to the bottom plate 1, the support body is fixed to the bottom plate 1 inside the protective casing 2, the magnetic shield 3 is arranged between the support body and the protective casing 2, and the parallel beam vibrator 4 is located in the middle of the support body;
as shown in fig. 11 and 12, the parallel beam oscillator 4 includes a frame 41 and two parallel beam units symmetrically arranged left and right, the two parallel beam units are spliced together and then fixed in the frame 41, the parallel beam unit includes a transverse parallel beam 42, a longitudinal parallel beam 43 and a negative feedback magnet support 44, wherein the upper and lower ends of the negative feedback magnet support 44 are respectively fixed with the transverse parallel beam 42, and one side of the negative feedback magnet support 44 is fixed with the longitudinal parallel beam 43;
as shown in fig. 6 to 9, an upper negative feedback permanent magnet 9 and a lower negative feedback permanent magnet 8 are respectively fixed on the upper and lower surfaces of the negative feedback magnet support 44, an upper negative feedback coil 11 and a lower negative feedback coil 10 are respectively arranged on the peripheries of the upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8, and the upper negative feedback coil 11 and the lower negative feedback coil 10 are respectively bolted to the support body through an upper negative feedback coil support 14 and a lower negative feedback coil support 15; upper support 12 and lower support 13;
the coil is directly wound on the coil support, the upper negative feedback coil support 14 and the lower negative feedback coil support 15 are both provided with grooves reserved for winding the coil, and the upper negative feedback coil 11 and the lower negative feedback coil 10 are directly wound in the grooves of the upper negative feedback coil support 14 and the lower negative feedback coil support 15;
a main permanent magnet 5 is fixed at the joint of negative feedback magnet supports 44 in two parallel beam units in the parallel beam vibrator 4, a magnetic field modulation part 7 and a circuit part support 17 are sequentially fixed on an upper support body 12 on the rear side of the main permanent magnet 5 from top to bottom, a tunnel magneto-resistance sensing element 6 and a circuit part 16 are respectively fixed at the front end and the rear end of the circuit part support 17 between the magnetic field modulation part 7 and the circuit part support 17, and the tunnel magneto-resistance sensing element 6 and the circuit part 16 are connected through a lead;
a negative feedback drive circuit in the circuit section 16 is connected to the upper negative feedback coil 11 and the lower negative feedback coil 10, respectively;
as shown in fig. 5, the magnetic field modulation part 7 includes a cantilever beam 704, a soft magnetic thin film 708 with high magnetic permeability is attached below the front end of the cantilever beam 704, the soft magnetic thin film 708 with high magnetic permeability faces the tunneling magnetoresistive sensing element 6, a first metal electrode layer 703, a first piezoelectric layer 702 and a second metal electrode layer 701 are sequentially attached above the rear end of the cantilever beam 704, and a third metal electrode layer 705, a second piezoelectric layer 706 and a fourth metal electrode layer 707 are sequentially attached below the rear end of the cantilever beam 704;
the first metal electrode layer 703, the second metal electrode layer 701, the third metal electrode layer 705 and the fourth metal electrode layer 707 are all connected with the modulation circuit in the circuit part 16 through wires;
the protective shell 2 is provided with a first power signal hole 201, the magnetic shield 3 is provided with a second power signal hole 301, and the support body is provided with a third power signal hole 1201.
Above the tunneling magnetoresistive sensing element 6, there is a soft magnetic thin film 708 with high magnetic permeability attached to the lower surface of the free end of the cantilever beam 704, as shown in fig. 7. (the tunneling magnetoresistive sensing element 6 and the soft magnetic thin film 708 are non-contact, as described above)
The supporter include supporter 12 and under bracing body 13, wherein under bracing body 13, parallel beam oscillator 4 and last supporter 12 are fixed on the inside bottom plate 1 of protecting sheathing 2 in proper order from bottom to top, and at under bracing body 13, be equipped with magnetic shield 3 between supporter 12 and protecting sheathing 2, the laminating of magnetic shield 3 is at the internal surface of protecting sheathing 2, and is fixed through protecting sheathing 2 and under bracing body 13, the extrusion of going up supporter 12.
The magnetic field modulation section 7 and the circuit section support 17 are fixed in sequence to the upper support 12 on the rear side of the main permanent magnet 5, or the magnetic field modulation section 7 and the circuit section support 17 are directly processed on the upper support 12, so that the magnetic field modulation section 7 and the circuit section support 17 are integrated with the upper support 12.
The parallel beam vibrator 4 is positioned between the upper support body 12 and the lower support body 13, and the bolt sequentially penetrates through the upper support body 12, the parallel beam vibrator 4 and the lower support body 13 and then is screwed into the bottom plate 1 for fastening.
The transverse parallel beams 42 comprise 1 beam unit, the 1 beam unit is horizontally arranged, the longitudinal parallel beams 43 comprise 1 beam unit, the 1 beam unit is vertically arranged, and the number of the beam units of the transverse parallel beams 42 is the same as that of the beam units of the longitudinal parallel beams 43.
The beam unit is formed by arranging two beams side by side and fixing the two beams together. The detection sensitivity can be effectively improved.
The parallel beam vibrators 4 are axisymmetric and fixed on the periphery, so that the rigidity in the non-sensing direction can be increased, and the influence of the parallel beam vibrators on the acceleration detection in the sensitive direction is reduced. As shown in fig. 11 and 12.
The two negative feedback magnet supports 44 of the two parallel beam units are fixed together, the transverse beam 42 at the top end of each parallel beam unit is fixed above the frame 41, the transverse beam 42 at the bottom end of each parallel beam unit is fixed below the frame 41, and the longitudinal beams 43 at the side surfaces of the two parallel beam units are respectively fixed at the left side and the right side of the frame 41.
The parallel beam vibrator 4 is not fixed like a single side of a cantilever beam or two ends of a simply supported beam, but four ends of the whole parallel beam vibrator 4 are fixed.
The upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8 are negative feedback permanent magnets with the same shape, mass and magnetization intensity.
The four corners of the upper negative feedback coil support 14 and the four corners of the lower negative feedback coil support 15 are respectively fixed on the upper support body 12 and the lower support body 13 through a positioning screw 18 and a positioning nut 19.
The circuit part 16 comprises an amplifying circuit, a PID control circuit, a filter circuit, a demodulation circuit, a negative feedback drive circuit and a modulation circuit, wherein a voltage signal output by the tunnel magneto-resistance sensing element 6 sequentially passes through the amplifying circuit, the PID control circuit, the filter circuit and the demodulation circuit, and then is output as a final voltage; the other part acts on an upper negative feedback coil 11 and a lower negative feedback coil 10 through a negative feedback driving circuit and acts on an upper negative feedback permanent magnet 9 and a lower negative feedback permanent magnet 8 through the upper negative feedback coil 11 and the lower negative feedback coil 10; the modulation circuit is a driving circuit of the magnetic field modulation part 7, and when the modulation circuit is used, power is supplied to the modulation circuit, so that the modulation circuit acts on the magnetic field modulation part 7.
The modulation circuit inputs a modulation signal into the first metal electrode layer 703, the second metal electrode layer 701, the third metal electrode layer 705 and the fourth metal electrode layer 707, and the first metal electrode layer 703 and the second metal electrode layer 701 polarize and deform the first piezoelectric layer 702 so as to generate high-frequency vibration; the third metal electrode layer 705 and the fourth metal electrode layer 707 polarize and deform the second piezoelectric layer 706, so that high-frequency vibration is generated; and further realizing high-frequency excitation of the cantilever beam 704, modulating a low-frequency magnetic field into high-frequency vibration, and carrying out high-frequency modulation on the magnetic field detected by the tunnel magnetoresistance sensing element 6 together with the high-permeability soft magnetic film 708 to reduce 1/f noise.
The circuit part 16 is fixed on the circuit part support 17 at a position away from the main permanent magnet 5 and the upper and lower degeneration permanent magnets 9 and 8.
The support body and the parallel beam vibrator 4 are fixed on the bottom plate 1 through a connecting screw 40, as shown in fig. 2 and 4; the protective housing 2 is fixed to the base plate 1 by base plate screws 202, as shown in fig. 2 and 3.
The upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8 are not limited in shape, the magnetization directions of the negative feedback permanent magnets on the upper side and the lower side or the left side and the right side are opposite, and the negative feedback permanent magnets are symmetrically arranged, so that the center of gravity of the whole structure is coincided with the geometric center. The interference to the magnetic field detected by the tunnel magneto-resistance sensing element and the influence of the cross axis sensitivity and the torsion axis sensitivity can be reduced. As shown in fig. 4, 6 and 8.
The permanent magnet is divided into a main permanent magnet 5, an upper negative feedback permanent magnet 9 and a lower negative feedback permanent magnet 8, so that the influence of a negative feedback part on acceleration detection can be effectively avoided. As shown in fig. 8, 9 and 10.
An upper negative feedback coil 11 and a lower negative feedback coil 10 are respectively fixed on the peripheries of the upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8 to form an electromagnetic force negative feedback part, so that the parallel beam vibrator 4 is kept at a balance position, and the acceleration detection range can be enlarged. As shown in fig. 4 and 8.
The lower surface of the cantilever beam 704 is adhered with a soft magnetic thin film 708 with high magnetic conductivity, and the soft magnetic thin film is positioned right above the tunnel magneto-resistance sensing element 6 to perform high-frequency modulation on a magnetic field detected by the tunnel magneto-resistance sensing element 6, and the modulation method is not limited. As shown in fig. 7.
The upper and lower surfaces of the cantilever beam 704 are both adhered with metal electrode layers and piezoelectric layers, so that high-frequency excitation of the cantilever beam 704 is realized, and the excitation mode is not limited. As shown in fig. 5.
As shown in fig. 8, when the acceleration detecting device receives an external acceleration, the upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8, which are used as mass blocks, receive an inertial force to drive the parallel beam oscillator 4 and the main permanent magnet 5 to vibrate, the relative position between the main permanent magnet 5 and the tunnel magnetoresistive sensing element 6 changes to cause a magnetic field change at the tunnel magnetoresistive sensing element 6, and further to cause a voltage change at the tunnel magnetoresistive sensing element 6, and after the voltage change passes through the circuit portion 16, one path of the voltage change acts on the upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8 through the upper negative feedback coil 11 and the lower negative feedback coil 10, and the other path of the voltage change acts as a final voltage output. Through the final output voltage, the amplitude of the external acceleration can be reversely calculated, so that the acceleration detection effect is achieved.
A method for detecting acceleration by using the high-sensitivity low-noise acceleration detection device comprises the following steps:
when in use, the power supply supplies power to the tunnel magneto-resistance sensing element 6, and the same power supply also needs to supply power to the circuit part 16;
step one, the acceleration detection device is installed at a proper position on a measured object (the acceleration detection device is wide, and the installed position is only suitable for installation);
step two, calibrating the acceleration detection device:
the circuit part 16 is externally connected with a voltmeter (namely the circuit part 16 is connected with the voltmeter through a lead), meanwhile, a modulation circuit in the circuit part 16 is externally connected with a power supply, then the measured object is subjected to acceleration motion at different positions and poses, and the position and the pose of the corresponding measured object are selected as the positions and the poses for experiments when the final output voltage value of the tunnel magnetoresistive sensing element 6 passing through the circuit part 16 is maximum;
the acceleration detection device is a single-axis accelerometer, and only when the detection direction of the acceleration detection device is the same as the vector direction of the detected object input into the acceleration detection device, the acceleration detection device can output the maximum value, namely, the detected acceleration direction is ensured to be consistent with the sensitive detection direction of the acceleration detection device.
Step three, determining the initial output voltage value of the tunnel magnetoresistance sensing element 6:
when the object to be measured is in place, the voltage value displayed by the voltmeter externally connected with the circuit part 16 is the initial output voltage value of the tunnel magneto-resistance sensing element 6 and is marked as UFirst stage；
Step four, enabling the object to be measured to carry out acceleration motion according to the position and the pose for the experiment determined in the step two, and when the object to be measured generates acceleration acWhen in use, the upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8 which are used as mass blocks sense acceleration and generate the action of inertia force to drive the parallel beam vibrator 4 to vibrate together, the relative position of the main permanent magnet 5 and the fixed tunnel magneto-resistance sensing element 6 in vibration changes, that is, the magnetic field at the spatial position of the tunneling magneto-resistive sensing element 6 changes, the changed magnetic field is detected by the tunneling magneto-resistive sensing element 6, and a voltage signal proportional to the magnitude of the magnetic field is output, after the voltage signal passes through the circuit part 16, one path of the voltage signal is used as a feedback signal and flows to the upper negative feedback coil 11 and the lower negative feedback coil 10 to generate electromagnetic force so as to keep the parallel beam oscillator 4 at a balance position, the other path of the voltage signal is output as a final voltage signal, the voltage value is detected by an external voltmeter, and the initial output voltage value U of the tunnel magneto-resistance sensing element 6 is subtracted from the voltage value.First stageNamely the final output voltage U of the tunnel magneto-resistance sensing element 6;
fifthly, the final output voltage U of the tunnel magneto-resistance sensing element 6 and the measured objectAcceleration acIn linear relation, acceleration a of the object to be measuredcThe final output voltage U of the tunnel magnetoresistive sensing element 6 and the parameter K of the acceleration detection apparatus can be obtained, and the formula is as follows:
ac＝KU
wherein:
wherein: wherein: m is the equivalent sensitive mass, i.e. the sum of the masses of the parallel beam vibrator 4, the main permanent magnet 5 and all the negative feedback permanent magnets, KMIs the equivalent spring rate of the mechanical vibration part, i.e., the equivalent spring rate, K, of the parallel beam vibrator 4HThe magnetic field change rate of a component of the magnetic field of the main permanent magnet 5 in an approximately linear change region, G is the magnetic field modulation efficiency coefficient of the magnetic field modulation part 7, (here, a low-frequency magnetic field is modulated into a high-frequency magnetic field, the intensity of a signal changes), KTMRFor the field-voltage conversion coefficient, K, of the tunnel magnetoresistive element 6AIs the voltage amplification factor, G, of the amplifying circuit block in the circuit part 16MDMIs the modulation-demodulation coefficient, K, of the demodulation circuit in circuit part 16NFThe acceleration detection device is characterized in that the acceleration detection device is a total electromagnetic force negative feedback coefficient, four negative feedback permanent magnets and four negative feedback coils of the acceleration detection device interact to synthesize a total negative feedback force, and the electromagnetic force negative feedback coefficient is specific to the total negative feedback force.
The following detailscAcquisition of KU:
the acceleration detecting device is fixed on the object to be detected, and when the object to be detected generates acceleration acDuring the process, the upper negative feedback permanent magnet 9 and the lower negative feedback permanent magnet 8 which are used as mass blocks sense acceleration, the effect of inertia force is generated, and the inertia force interacts with the parallel beam vibrator 4 to enable the parallel beam vibrator to deform. At this time, the relative position of the main permanent magnet 5 and the fixed tunneling magnetoresistive sensing element 6 changes, that is, the magnetic field at the spatial position of the tunneling magnetoresistive sensing element 6 changes, and the changed magnetic field is detected by the tunneling magnetoresistive sensing element 6 and outputs a signalA voltage signal proportional to the magnitude of the magnetic field. After the voltage signal passes through the circuit part, one path of the voltage signal is used as a feedback signal and flows to an upper negative feedback coil 11 and a lower negative feedback coil 10 to generate electromagnetic force so that the parallel beam vibrator 4 is kept at a balance position; the other path is used as the final output voltage U to output, and the acceleration a of the object to be measured is measuredc。
The sensitive mass (i.e. the main permanent magnet 5) senses the acceleration to generate the inertia force as follows:
FI＝mac
where m is the equivalent sensitive mass of the acceleration sensing device, where the mass of the parallel beam vibrator 4, i.e. the sum of the masses of the main permanent magnet 5 and all the negative feedback permanent magnets, a, is ignoredcThe acceleration to which the present acceleration detection device is subjected.
The maximum displacement of the parallel beam oscillator 4 under the action of inertia force and negative feedback electromagnetic force of the up-down negative feedback electromagnet:
wherein, FNFThe single negative feedback electromagnetic force is the up and down negative feedback electromagnet (the formula is required to be F)NFMultiplying the above by 4, in concert with the following formula, there are four negative feedback permanent magnets, four negative feedback coils) which, during measurement, vary with the magnitude of the input acceleration, ideally in a fixed proportion to the input acceleration (inertial force), KMThe mechanical vibration part is equivalent to the spring stiffness coefficient, wherein the mechanical vibration part comprises a parallel beam vibrator 4, an upper main permanent magnet 5, an upper negative feedback permanent magnet, a lower negative feedback permanent magnet, a corresponding negative feedback coil and a corresponding negative feedback coil support (the main permanent magnet 5, the upper negative feedback permanent magnet, the lower negative feedback permanent magnet, the corresponding negative feedback coil and a corresponding negative feedback coil support pair K)MDo not have an influence, therefore KMThe equivalent spring rate of the parallel beam vibrator 4 is assumed on the premise that the parallel beam vibrator 4 works in the linear elastic range, and nonlinear interference such as air damping is ignored.
The magnetic field strength around the primary permanent magnet 5 can be obtained according to the following formula:
the magnetic field intensity formula around the cylindrical and rectangular permanent magnet is as follows:
wherein the content of the first and second substances,
m is the magnetization intensity of the permanent magnet along the z-axis, h is the height of the cylindrical and rectangular permanent magnet along the magnetization direction, x, y, z are the coordinates of any point outside the permanent magnet in a coordinate system established by taking the center of mass of the permanent magnet as the origin and taking the magnetization direction as the z-axis, and x0，y0，z0In the coordinate system, θ is a point (x) at any point on the intersection line of the outer surface of the permanent magnet and the plane where z is 00，y0，z0) The vector direction and point (x) of the current of the micro element0，y0，z0) The vector direction angle of the pointing point (x, y, z), the middle loop integration path is the intersection line path (i.e. the perimeter path of the permanent magnet cross section perpendicular to the magnetization direction), dl represents the infinitesimal length in the loop integration, if the whole loop integration is obtained, the perimeter of the bottom surface pattern, and for the cylindrical permanent magnet, the perimeter of the bottom surface circle.
The magnetic field strength component of the permanent magnet along the z-axis direction is:
when the permanent magnet is cylindrical, the magnetic flux is as follows:
wherein r is0Is the radius of the cylindrical permanent magnet, and h is the height of the cylindrical permanent magnet.
When the permanent magnet is cuboid, the following steps are carried out:
wherein a, b and h are respectively the length, width and height of the rectangular parallelepiped permanent magnet.
The magnetic field variation at the tunneling magnetoresistive sensing element 6 is:
ΔH＝KH×Δzmax
wherein, KHThe magnetic field change rate of a certain component of the magnetic field of the main permanent magnet 5 in an approximate linear change area can be represented by the formula H
To obtain mu0For the vacuum permeability, M is the medium magnetization, since the medium is air, this value is taken as 0, and B represents the magnetic induction at a certain point in space.
The magnetic induction intensity change at the tunnel magnetoresistive sensing element 6 is modulated as follows:
Bm＝GBTMR×Acos(2πfmt)
wherein G is a magnetic field modulation efficiency coefficient of the magnetic field modulation section 7, and BTMRFor the magnetic induction intensity of the position of the tunnel magnetoresistive sensing element 6, A is the amplitude of the modulated carrier signal (the magnetic field modulation part 7 needs to be excited, where A is the amplitude of the excitation signal, i.e. the amplitude of the carrier signal), fmIs the frequency of the modulated carrier signal, i.e. the frequency of the excitation signal, i.e. the carrier signal frequency used.
The output voltage of the tunneling magnetoresistive sensing element 6 is:
UTMR＝KTMR×ΔH
wherein, KTMRIs the magnetic field-voltage conversion coefficient of the tunneling magnetoresistive sensing element 6.
The output voltage of the tunneling magnetoresistive sensing element 6 is amplified by an amplifying circuit in the circuit portion 16 to be:
UA＝KA×UTMR
wherein, KAThe amplification of the amplifying circuit in circuit part 16.
The final output voltage obtained by demodulating and filtering the output voltage of the amplifying circuit is as follows:
U＝KMDM×UA
wherein G isMDMThe demodulation loss and the filtering loss during demodulation and filtering are ignored for the modulation and demodulation coefficients of the demodulation circuit in the circuit portion 16.
The negative feedback electromagnetic force between the single negative feedback permanent magnet and the single negative feedback coil can be obtained according to the following formula:
wherein M is the magnetization intensity of the monolithic negative feedback permanent magnet along the z-axis,
the magnetic field gradient of the monolithic negative feedback permanent magnet along the z direction, V is the volume of the monolithic negative feedback permanent magnet, I is the current in the single negative feedback coil, and kBIs a current-magnetic induction conversion coefficient (here, after current flows through a negative feedback coil, a magnetic field k is generatedBRepresenting the transformation of the current through the coil with the magnetic induction of the magnetic field it generates).
After substituting the known parameters, the final output voltage of circuit part 16 is:
the above parameters are known quantities, and are simplified as follows: a isc＝KU
Wherein K is determined by parameters of a mechanical part and a circuit part, and is a known quantity.
The permanent magnet is divided into a main permanent magnet and a negative feedback permanent magnet, so that the influence of the negative feedback part on acceleration detection can be effectively avoided.
And a negative feedback coil is fixed on the periphery of the negative feedback permanent magnet to form an electromagnetic force negative feedback part, so that the parallel beam vibrator is kept at a balance position, and the acceleration detection range can be enlarged.
The lower surface of the tail end of the cantilever beam is adhered with a soft magnetic film with high magnetic conductivity and is positioned right above the tunnel magneto-resistance sensing element to perform high-frequency modulation on a magnetic field detected by the tunnel magneto-resistance sensing element, and the modulation method is not limited.
The upper surface and the lower surface of the cantilever beam are respectively pasted with the metal electrode layer and the piezoelectric layer, so that the high-frequency excitation of the cantilever beam is realized, and the excitation mode is not limited.
Example 2
The same as in embodiment 1, except that the transverse parallel beams 42 include 2 beam units, the 2 beam units are horizontally arranged and fixed together, the longitudinal parallel beams 43 include 2 beam units, the 2 beam units are vertically arranged and fixed together, and the number of the beam units of the transverse parallel beams 42 is the same as that of the beam units of the longitudinal parallel beams 43.
Claims (9)
1. A high-sensitivity low-noise acceleration detection device is characterized by comprising a bottom plate (1), a protective shell (2), a magnetic shielding cover (3), a parallel beam oscillator (4), a main permanent magnet (5), a tunnel magneto-resistance sensing element (6), a magnetic field modulation part (7), a negative feedback permanent magnet, a negative feedback coil, a support body and a negative feedback coil support;
the protective shell (2) is buckled and connected on the bottom plate (1) through bolts, the supporting body is fixed on the bottom plate (1) inside the protective shell (2), the magnetic shielding cover (3) is arranged between the supporting body and the protective shell (2), and the parallel beam vibrator (4) is positioned in the middle of the supporting body;
the parallel beam vibrator (4) comprises a frame (41) and two parallel beam units which are arranged in a bilateral symmetry mode, the two parallel beam units are spliced together and then fixed in the frame (41), each parallel beam unit comprises a transverse parallel beam (42), a longitudinal parallel beam (43) and a negative feedback magnet support (44), the transverse parallel beam (42) is fixed to the upper end and the lower end of the negative feedback magnet support (44) respectively, and one longitudinal parallel beam (43) is fixed to one side of the negative feedback magnet support (44);
an upper negative feedback permanent magnet (9) and a lower negative feedback permanent magnet (8) are respectively fixed on the upper surface and the lower surface of the negative feedback magnet support (44), an upper negative feedback coil (11) and a lower negative feedback coil (10) are respectively arranged on the peripheries of the upper negative feedback permanent magnet (9) and the lower negative feedback permanent magnet (8), and the upper negative feedback coil (11) and the lower negative feedback coil (10) are respectively connected to the support body through an upper negative feedback coil support (14) and a lower negative feedback coil support (15) through bolts;
a main permanent magnet (5) is fixed at the joint of negative feedback magnet supports (44) in two parallel beam units in a parallel beam vibrator (4), a magnetic field modulation part (7) and a circuit part support (17) are sequentially fixed on a support body at the rear side of the main permanent magnet (5), a tunnel magneto-resistance sensing element (6) and a circuit part (16) are respectively fixed at the front end and the rear end of the circuit part support (17) between the magnetic field modulation part (7) and the circuit part support (17), and the tunnel magneto-resistance sensing element (6) is connected with the circuit part (16) through a wire;
the magnetic field modulation part (7) comprises a cantilever beam (704), a high-permeability soft magnetic film (7)08 is pasted below the front end of the cantilever beam (704), the high-permeability soft magnetic film (7)08 faces the tunneling magneto-resistance sensing element (6), a metal electrode layer I (703), a piezoelectric layer I (702) and a metal electrode layer II (701) are sequentially pasted above the rear end of the cantilever beam (704), and a metal electrode layer III (705), a piezoelectric layer II (706) and a metal electrode layer IV (707) are sequentially pasted below the rear end of the cantilever beam (704);
the first metal electrode layer (703), the second metal electrode layer (701), the third metal electrode layer (705) and the fourth metal electrode layer (707) are all connected with a modulation circuit in the circuit part (16) through leads;
a negative feedback driving circuit in the circuit part (16) is respectively connected with the upper negative feedback coil (11) and the lower negative feedback coil (10);
a first power signal hole (201) is formed in the protective shell (2), a second power signal hole (301) is formed in the magnetic shield (3), and a third power signal hole (1201) is formed in the support body.
2. The acceleration detection device with high sensitivity and low noise according to claim 1, wherein the support comprises an upper support (12) and a lower support (13), wherein the lower support (13), the parallel beam vibrator (4) and the upper support (12) are sequentially fixed on the bottom plate (1) inside the protective housing (2) from bottom to top.
3. The acceleration detection device with high sensitivity and low noise according to claim 2, characterized in that the parallel beam vibrator (4) is located between the upper support (12) and the lower support (13), and the bolt is screwed into the bottom plate (1) to fasten after passing through the upper support (12), the parallel beam vibrator (4) and the lower support (13) in sequence.
4. A high sensitivity low noise acceleration sensing device according to claim 3, characterized in that said transversal parallel beams (42) comprise n beam elements horizontally arranged and fixed together, and said longitudinal parallel beams (43) comprise n beam elements vertically arranged and fixed together, where n is an integer other than (0), and the number of beam elements of the transversal parallel beams (42) is the same as the number of beam elements of the longitudinal parallel beams (43).
5. The acceleration detecting device of claim 4, wherein said beam unit is formed by two beams arranged side by side and fixed together.
6. The acceleration sensing device of claim 5, wherein said two negative feedback magnet supports (44) of two parallel beam units are fixed together, the transverse beam (42) at the top of each parallel beam unit is fixed above the frame (41), the transverse beam (42) at the bottom of each parallel beam unit is fixed below the frame (41), and the longitudinal beams (43) at the sides of the two parallel beam units are fixed at the left and right sides of the frame (41).
7. The acceleration detecting device with high sensitivity and low noise according to claim 6, wherein the upper negative feedback permanent magnet (9) and the lower negative feedback permanent magnet (8) are negative feedback permanent magnets with the same shape, mass and magnetization.
8. The acceleration detecting device with high sensitivity and low noise according to claim 7 is characterized in that the four corners of the upper negative feedback coil support (14) and the four corners of the lower negative feedback coil support (15) are respectively fixed on the upper support body (12) and the lower support body (13) through a positioning screw (18) and a positioning nut (19).
9. A method for detecting acceleration by using the high-sensitivity low-noise acceleration detecting device of claim 1, comprising the steps of:
the method comprises the following steps of firstly, mounting the acceleration detection device on a measured object;
step two, calibrating the acceleration detection device:
the circuit part (16) is externally connected with a voltmeter, meanwhile, a modulation circuit in the circuit part (16) is externally connected with a power supply, then the measured object is accelerated to move at different positions and poses, and the position and the pose of the measured object corresponding to the maximum final output voltage value of the tunnel magneto-resistance sensing element (6) passing through the circuit part (16) are selected as the position and the pose for the experiment;
step three, determining the initial output voltage value of the tunnel magnetoresistance sensing element (6):
when the object to be measured is in situ fixed, the voltage value displayed by the voltmeter externally connected with the circuit part (16) is the initial output voltage value of the tunnel magneto-resistance sensing element (6), and is marked as UFirst stage；
Step four, enabling the object to be measured to carry out acceleration motion according to the position and the pose for the experiment determined in the step two, and when the object to be measured generates acceleration acWhen the device is used, the upper negative feedback permanent magnet (9) and the lower negative feedback permanent magnet (8) which are simultaneously used as mass blocks sense acceleration to generate the action of inertia force to drive the parallel beam oscillator (4) to vibrate together, the relative position of the main permanent magnet (5) and the fixed tunnel magneto-resistance sensing element (6) in the vibration changes, namely the magnetic field of the space position where the tunnel magneto-resistance sensing element (6) is located changes, and the changed magnetic field is changed byThe tunnel magneto-resistance sensing element (6) detects and outputs a voltage signal proportional to the magnitude of a magnetic field, after the voltage signal passes through a circuit part (16), one path of the voltage signal is used as a feedback signal and flows to an upper negative feedback coil (11) and a lower negative feedback coil (10) to generate electromagnetic force to keep the parallel beam vibrator (4) at a balance position, the other path of the voltage signal is output as a final voltage signal, an external voltmeter detects the voltage value, and the initial output voltage value U of the tunnel magneto-resistance sensing element (6) is subtracted from the voltage valueFirst stageNamely the final output voltage U of the acceleration detection device;
fifthly, the tunnel magneto-resistance sensing element (6) finally outputs the voltage U and the acceleration a of the object to be measuredcIn linear relation, acceleration a of the object to be measuredcThe final output voltage U of the tunnel magneto-resistance sensing element (6) and the parameter K of the acceleration detection device can be obtained, and the formula is as follows:
ac＝KU
wherein:
wherein: m is equivalent sensitive mass, namely the mass sum of the parallel beam vibrator (4), the main permanent magnet (5) and all negative feedback permanent magnets, KMEquivalent spring rate, K, for the mechanically vibrating partHThe magnetic field change rate of a certain component of the magnetic field of the main permanent magnet (5) in an approximate linear change area, G is the magnetic field modulation efficiency coefficient of the magnetic field modulation part (7), and KTMRFor the field-voltage conversion coefficient, K, of the tunnel magnetoresistive element (6)AIs the voltage amplification factor, G, of the amplifying circuit module in the circuit part (16)MDMIs the modulation-demodulation coefficient, K, of the demodulation circuit in the circuit part (16)NFIs the overall electromagnetic force negative feedback coefficient.
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