CN111442771B - Flat resonance gyro - Google Patents
Flat resonance gyro Download PDFInfo
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- CN111442771B CN111442771B CN202010202485.8A CN202010202485A CN111442771B CN 111442771 B CN111442771 B CN 111442771B CN 202010202485 A CN202010202485 A CN 202010202485A CN 111442771 B CN111442771 B CN 111442771B
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- 238000001514 detection method Methods 0.000 claims abstract description 49
- 230000005284 excitation Effects 0.000 claims abstract description 36
- 230000008859 change Effects 0.000 claims abstract description 15
- 230000009471 action Effects 0.000 claims abstract description 11
- 238000009434 installation Methods 0.000 claims abstract description 9
- 238000005259 measurement Methods 0.000 claims abstract description 4
- 230000006698 induction Effects 0.000 claims description 14
- 230000005291 magnetic effect Effects 0.000 claims description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 8
- 230000005294 ferromagnetic effect Effects 0.000 claims description 5
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims description 4
- 229910052742 iron Inorganic materials 0.000 claims description 4
- 229910000889 permalloy Inorganic materials 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 2
- 238000012545 processing Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 description 19
- 239000002131 composite material Substances 0.000 description 7
- 239000003822 epoxy resin Substances 0.000 description 5
- 229920000647 polyepoxide Polymers 0.000 description 5
- 239000002305 electric material Substances 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000005690 magnetoelectric effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
The application provides a flat-plate resonance gyroscope, which comprises a harmonic oscillator, an excitation component, a detection component and a mounting shell, wherein the harmonic oscillator is arranged on the detection component; an accommodating space is formed in the mounting shell; the excitation component, the harmonic oscillator and the detection component are arranged in the accommodating space; the vibrator is arranged on the excitation component or the installation shell through the supporting component, the vibrator adopts a flat plate structure, the excitation component excites the vibrator to vibrate, the detection component senses the vibration output electric signal of the vibrator, the vibrator is vibrated by the excitation force of the excitation component and works in a specific vibration mode, when the resonance gyro is acted by the rotation angular velocity, the vibration state of the vibrator changes due to the action of the coriolis force, and the detection component senses the change of the vibration state of the vibrator to generate the electric signal related to the measured angular velocity so as to realize the detection of the angular velocity. Compared with the prior art, the harmonic oscillator has the advantages of low processing difficulty, flexible structure, high measurement precision and strong practicability.
Description
Technical Field
The application relates to the technical field of detection sensors, in particular to a flat-plate resonance gyroscope.
Background
Solid resonance gyroscopes, such as high-precision and ultra-high-reliability gyroscopes, have been developed rapidly in recent years and have been widely used in various fields such as aerospace and consumer electronics. The main working principle of the solid resonance gyro is that the harmonic oscillator 3 generates vibration waves through external excitation, the vibration waves of the harmonic oscillator 3 are deflected and the like to change under the action of the coriolis force, and the rotation angular velocity can be measured through detecting the change by a corresponding detection means. The prior patent, for example, publication number CN109238308A, publication date is 1 month 18 of 2019, and Chinese patent with the name of "high-precision modal test System and test method of Metal cylindrical resonant Gyro" provides a Metal cylindrical resonant Gyro, which comprises an electric control turntable, a harmonic oscillator 3 support, an excitation unit, a capacitor head, a differential head and a support plate, wherein the harmonic oscillator 3 is cylindrical. The application provides a Chinese patent with the authority of CN105371832B, which is named as a disc multi-ring inner double-beam isolated ring resonator gyro and a preparation method thereof, and provides a disc multi-ring inner double-beam isolated ring resonator gyro, wherein the structure is a miniature ring resonator gyro.
However, the harmonic oscillator 3 designed in the prior art is hemispherical, cylindrical or micromechanical ring-shaped, has high requirements on processing precision, is difficult to ensure structural symmetry, and in order to overcome the defects in the prior art, the structure of the harmonic oscillator 3 is innovatively simplified into a flat plate structure, so that the processing difficulty is reduced, and the flat plate resonant gyroscope is realized.
Disclosure of Invention
Aiming at the defects in the prior art, the application aims to provide a flat-plate resonance gyroscope.
The application provides a flat-plate resonance gyro, which comprises a harmonic oscillator 3, an excitation component 1, a detection component and a mounting shell 8;
an accommodating space is formed in the mounting shell 8;
the exciting part 1 is arranged on one side of the accommodating space, the detecting part is arranged on the other side of the accommodating space, and the harmonic oscillator 3 is arranged between the exciting part 1 and the detecting part;
the harmonic oscillator 3 is mounted on the excitation member 1 or on the mounting housing 8 via the support member 2.
Preferably, the harmonic oscillator 3 adopts a flat plate structure.
Preferably, the harmonic oscillator 3 is made of any one material of electric pure iron, permalloy, amorphous alloy, copper and silver.
Preferably, the exciting member 1 employs an electromagnetic coil or an electrostatic plate.
Preferably, the exciting means 1 applies force to the harmonic oscillator 3 by electromagnetic excitation or electrostatic excitation.
Preferably, the detecting component adopts a ferromagnetic detecting structure to detect the change of the air gap of the magnetic circuit caused by the vibration of the sensitive harmonic oscillator 3.
Preferably, the detection means takes any one of the following forms:
-a hall sensor;
-a magneto-resistive sensor: a giant magneto-resistance sensor or a tunnel magneto-resistance sensor is adopted;
-a magneto-electric sensor.
Preferably, the detection component adopts static detection structure to detect the change of the gap between the capacitor plates caused by the vibration of the sensitive harmonic oscillator 3.
Preferably, when the number of the plate resonator gyroscopes is plural, a multi-dimensional sensing device arranged in an array structure can be realized, thereby realizing measurement of rotational angular velocity when the mounting case 8 rotates about different rotational axes.
Preferably, the structure of the detecting member includes any one of the following forms:
the detection means comprise an induction plate 4, a detection means yoke 5, a magnetostrictive means 6 and a piezoelectric means 7;
the detection means comprise a sensing plate 4.
Compared with the prior art, the application has the following beneficial effects:
1. compared with the existing hemispherical or cylindrical shell harmonic oscillator, the harmonic oscillator provided by the application has the advantages that the processing difficulty is low, and the precision is easier to guarantee.
2. The driving and sensing modes can be realized by selecting electrostatic or magnetic field modes according to actual application scenes, and the application has flexible structure and strong practicability.
3. The magnetic field detection mode based on the magneto-electric effect provided by the application is convenient to install and use and high in precision.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:
FIG. 1 is a schematic view of the structure and operation principle of embodiment 1 of the present application;
FIG. 2 is a schematic view of the structure and operation principle of embodiment 2 of the present application;
FIG. 3 is a schematic view of the structure and operation principle of embodiment 3 of the present application;
fig. 4 is a schematic diagram of the structure and operation principle of embodiment 4 of the present application.
The figure shows:
1-excitation part 2-support part
3-harmonic oscillator 4-induction plate
5-detecting part yoke 6-magnetostriction material detecting part
7-piezoelectric material detecting part 8-mounting case
Omega-rotation angular velocity to be detected of 9-epoxy resin plate
d-Harmonic oscillator and detection part plate clearance F e Excitation force provided by electromagnetic coil
F c -the resonator is subjected to coriolis force B e -an excitation magnetic field provided by an electromagnetic coil
B m -detection electric signal acting on the magnetic field V-output of the composite magneto-electric material
Detailed Description
The present application will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the present application, but are not intended to limit the application in any way. It should be noted that variations and modifications could be made by those skilled in the art without departing from the inventive concept. These are all within the scope of the present application.
The application provides a flat-plate resonance gyro, as shown in fig. 1 and 2, which comprises a harmonic oscillator 3, an excitation component 1, a detection component and a mounting shell 8; an accommodating space is formed in the mounting shell 8; the exciting part 1 is arranged on one side of the accommodating space, the detecting part is arranged on the other side of the accommodating space, and the harmonic oscillator 3 is arranged between the exciting part 1 and the detecting part; the harmonic oscillator 3 is mounted on the excitation member 1 or on the mounting housing 8 via the support member 2.
Further, as shown in fig. 1 and 2, in the present application, the resonator 3 adopts a flat plate structure, for example, the resonator 3 adopts a cylindrical, prismatic or cuboid flat plate structure, the exciting member 1 excites the resonator 3 to vibrate, the detecting member senses the vibration output electric signal of the resonator 3, the resonator 3 is vibrated by the exciting force of the exciting member 1 and works in a specific vibration mode, when the resonant gyroscope is acted by the rotation angular velocity, the vibration state of the resonator 3 changes due to the coriolis force, and the detecting member 1 can sense the change of the vibration state of the resonator 3, thereby generating the electric signal related to the measured angular velocity. According to the application, the flat plate is innovatively used as the harmonic oscillator 3 of the solid resonance gyro, and angular velocity detection is carried out by detecting the vibration state change of the harmonic oscillator 3 of the flat plate structure under the action of Coriolis force.
Specifically, the harmonic oscillator 3 is made of any one material of electric pure iron, permalloy, amorphous alloy, copper and silver; the exciting part 1 adopts an electromagnetic coil or an electrostatic polar plate, and adopts electromagnetic excitation or electrostatic excitation in a mode of applying force to the harmonic oscillator 3 through the exciting part 1, wherein the harmonic oscillator 3 can work in any first-order vibration mode under the excitation of the exciting part 1. Under the action of external excitation, the plate harmonic oscillator 3 can generate vibration mode shapes with different orders, the mode shapes of the harmonic oscillator 3 represent initial vibration states, when the installation shell 8 drives the harmonic oscillator 3, the excitation component 1 and the detection component to rotate around a rotation shaft in a certain direction, under the action of coriolis force caused by angular velocity to be detected, the vibration states of the harmonic oscillator 3 are changed, and as the vibration states of different mode shapes under the action of coriolis force are different, in practical application, the mode shapes of the vibration of the harmonic oscillator 3 with the most obvious vibration can be changed according to the structural form, preferably the vibration state, of the plate harmonic oscillator gyroscope, so that the optimal gyro performance is realized, and the sensitivity and accuracy of detection are improved.
Specifically, the detecting component can not only adopt the magnetic circuit air gap change caused by the vibration of the ferromagnetic detection structure sensitive harmonic oscillator 3, but also adopt the capacitance polar plate gap change caused by the vibration of the electrostatic detection structure sensitive harmonic oscillator 3.
Further, the detection component adopts magnetic circuit air gap change caused by the vibration of the ferromagnetic flat plate sensitive harmonic oscillator 3 for ferromagnetic detection, and the magnetic field detection component can take various forms, such as a Hall sensor; as another example, a magneto-resistive sensor, including a giant magneto-resistive sensor or a tunnel magneto-resistive sensor; as another example, a magneto sensor.
Specifically, a plurality of flat-plate resonance gyroscopes can be combined and connected in an array structure to form the multidimensional sensing device. When the number of the plate resonance gyroscopes is a plurality, the multidimensional sensing devices which are arranged in an array structure can be realized, so that the measurement of the rotation angular velocity of the installation housing 8 is realized when the installation housing 8 rotates around different rotation axes. The flat resonator gyroscopes are unidirectional angular velocity detection devices, and are arranged in three directions of an x axis, a y axis and a z axis respectively through orthogonal arrangement as shown in fig. 1 and 2, for example, when the number of the resonator gyroscopes is 3, the three flat resonator gyroscopes can realize the detection of the angular velocities in the three directions of x, y and z.
Example 1
As shown in fig. 1, the exciting member 1 employs an electromagnetic coil; the harmonic oscillator 3 is made of an electrical pure iron, permalloy or amorphous alloy paper sheet, wherein the detection part comprises an induction plate 4, a detection part magnetic yoke 5 and a composite magneto-electric material component, the distance between the harmonic oscillator 3 and the induction plate 4 is d, and an electromagnetic coil generates exciting force F to the harmonic oscillator 3 e The harmonic oscillator 3 generates vibration; when the mounting housing 8 drives the excitation part 1, the detection part and the harmonic oscillator 3 to rotate at an angular velocity omega around the y-axis direction in fig. 1, the harmonic oscillator 3 is subjected to the coriolis force F when the angular velocity omega to be detected is not zero c To change the vibration state; the gap d between the harmonic oscillator 3 and the detecting part changes, so that the magnetic field B applied to the composite magnetoelectric material m The change occurs, and a detection electric signal is generated through a composite magnetoelectric effect, so that the detection of the angular velocity omega is realized. The composite magneto-electric material component comprises a magnetostrictive member 6 and a piezoelectric member 7, wherein the magnetostrictive member 6 is made of a magnetostrictive material, and the piezoelectric member 7 is made of a piezoelectric material.
Example 2
As shown in fig. 2, the detection component includes an induction plate 4, the excitation component 1 adopts an electrostatic polar plate, the harmonic oscillator 3 adopts a conductive metal sheet, the excitation mode is electrostatic excitation, the induction plate 4 adopts a capacitive polar plate, and the sensing mode is to detect the capacitance variation between the harmonic oscillator 3 and the capacitive polar plate caused by d, and finally, angular velocity sensing is realized, so that detection of angular velocity ω is realized.
Example 3
As shown in fig. 3, the detection part comprises an induction plate 4, the excitation part 1 adopts an electromagnetic coil, the harmonic oscillator 3 and the induction plate 4 are installed together to form an assembly, the harmonic oscillator 3 is a magnetostrictive material plate, the induction plate 4 is a piezoelectric material plate, and the harmonic oscillator 3 and the induction plate 4 are bonded through an epoxy resin plate 9 to form a composite material plate.
Further, the magnetostrictive material plate vibrates under the action of the magnetic field of the electromagnetic coil, and the deformation transmission of the epoxy resin plate 9 causes the piezoelectric material plate to vibrate, so that the piezoelectric material plate generates an electric signal, when the angular velocity ω to be detected exists, the vibration state of the harmonic oscillator 3 changes, so that the electric signal generated by the piezoelectric material plate changes, and finally, the angular velocity sensing is realized, thereby realizing the detection of the angular velocity ω.
Example 4
As shown in fig. 4, this embodiment is a variation of embodiment 3, in which the resonator 3 is mounted on the mounting housing 8 through the supporting member 2, that is, the resonator 3 is fixed in the circumferential direction, the resonator 3 is a magnetostrictive material plate, the detecting member includes an induction plate 4, the exciting member 1 adopts an electromagnetic coil, the resonator 3 and the induction plate 4 are mounted together to form an assembly, the induction plate 4 is a piezoelectric material plate, and the resonator 3 and the induction plate 4 are bonded through the epoxy resin plate 9 to form a composite material plate.
Further, the magnetostrictive material plate vibrates under the action of the magnetic field of the electromagnetic coil, and the deformation transmission of the epoxy resin plate 9 causes the piezoelectric material plate to vibrate, so that the piezoelectric material plate generates an electric signal, when the angular velocity ω to be detected exists, the vibration state of the harmonic oscillator 3 changes, so that the electric signal generated by the piezoelectric material plate changes, and finally, the angular velocity sensing is realized, thereby realizing the detection of the angular velocity ω.
The support method in embodiment 4 is also applicable to the resonators 3 of embodiments 1 and 2.
The working principle of the application is as follows:
the resonator 3 is subjected to the action of the exciting means to generate a vibration response, and the resonator 3 can work in different mode shapes according to the frequency of excitation. Due to Coriolis force F c When the harmonic oscillator 3 rotates at the rotation angular velocity ω, the vibration state of the harmonic oscillator 3 changes. Since the average gap between the resonator 3 and the sensitive plate of the detecting member depends on the vibration state of the resonator 3, the rotation angular velocity ω can be detected by the gap.
In the description of the present application, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present application.
The foregoing describes specific embodiments of the present application. It is to be understood that the application is not limited to the particular embodiments described above, and that various changes or modifications may be made by those skilled in the art within the scope of the appended claims without affecting the spirit of the application. The embodiments of the application and the features of the embodiments may be combined with each other arbitrarily without conflict.
Claims (9)
1. The flat-plate resonance gyroscope is characterized by comprising a harmonic oscillator (3), an excitation component (1), a detection component and an installation shell (8);
an accommodating space is formed in the mounting shell (8);
the exciting component (1) is arranged on one side of the accommodating space, the detecting component is arranged on the other side of the accommodating space, and the harmonic oscillator (3) is arranged between the exciting component (1) and the detecting component;
the harmonic oscillator (3) is arranged on the excitation component (1) or the installation shell (8) through the supporting component (2);
the vibrator (3) can work in any first-order vibration mode shape under the excitation of the excitation component (1), when the installation shell (8) drives the vibrator (3), the excitation component (1) and the detection component to rotate around a rotating shaft in a certain direction, under the action of Coriolis force caused by angular velocity to be detected, the vibration state of the vibrator (3) is changed, and the vibration state change degree of different mode shapes under the action of Coriolis force is different, so that the mode shape of the vibrator (3) with the most obvious vibration state change is obtained, thereby realizing optimal gyroscopic performance and improving the sensitivity and accuracy of detection;
when the number of the plate resonance gyroscopes is a plurality, the multi-dimensional sensing devices which are arranged in an array structure can be realized, so that the measurement of the rotation angular velocity of the installation shell (8) when the installation shell rotates around different rotation axes is realized.
2. The flat-panel resonator gyroscope according to claim 1, characterized in that the resonator (3) adopts a flat-panel structure.
3. The flat-plate resonator gyroscope according to claim 1, characterized in that the harmonic oscillator (3) is made of any one of electrical pure iron, permalloy, amorphous alloy, copper and silver.
4. -flat-panel resonator gyroscope according to claim 1, characterized in that the excitation means (1) are electromagnetic coils or electrostatic plates.
5. The flat-panel resonator gyroscope according to claim 1, characterized in that the excitation means (1) apply an electromagnetic excitation or electrostatic excitation to the resonator (3).
6. The flat resonator gyroscope according to claim 1, characterized in that the detection means uses ferromagnetic detection of the change in air gap of the magnetic circuit caused by the vibration of the structure-sensitive resonator (3).
7. The flat-panel resonator gyroscope of claim 6, wherein the detection means takes the form of any one of:
-a hall sensor;
-a magneto-resistive sensor: a giant magneto-resistance sensor or a tunnel magneto-resistance sensor is adopted;
-a magneto-electric sensor.
8. The flat-panel resonator gyroscope according to claim 1, characterized in that the detection means employs electrostatic detection of capacitive plate gap variations caused by vibrations of the structurally sensitive resonator (3).
9. The flat-panel resonator gyroscope of claim 1, wherein the structure of the detection means comprises any one of the following forms:
-the detecting means comprises an induction plate (4), a detecting means yoke (5), a magnetostrictive means (6) and a piezoelectric means (7);
-the detection means comprise a sensing plate (4).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010202485.8A CN111442771B (en) | 2020-03-20 | 2020-03-20 | Flat resonance gyro |
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| CN202010202485.8A CN111442771B (en) | 2020-03-20 | 2020-03-20 | Flat resonance gyro |
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| CN111442771B true CN111442771B (en) | 2023-10-31 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1865851A (en) * | 2006-06-13 | 2006-11-22 | 北京航空航天大学 | Resonant-type micro-mechanical optic fiber gyroscope |
| JP2014212411A (en) * | 2013-04-18 | 2014-11-13 | セイコーエプソン株式会社 | Mems element, mems element manufacturing method, electronic device, electronic apparatus and mobile object |
| CN104457725A (en) * | 2014-11-14 | 2015-03-25 | 司红康 | High-sensitivity bulk acoustic wave silicon microgyroscope |
| CN104864031A (en) * | 2015-05-18 | 2015-08-26 | 上海交通大学 | Magnetostrictive drive active and passive integrated multi-degree-of-freedom precision vibration isolating device |
| CN105526927A (en) * | 2016-01-20 | 2016-04-27 | 上海交通大学 | Geostrophic force effect based translational velocity or acceleration sensing device and structure |
| CN205642391U (en) * | 2016-01-20 | 2016-10-12 | 上海交通大学 | Translational velocity or add speed sensing device and structure based on coriolis force effect |
-
2020
- 2020-03-20 CN CN202010202485.8A patent/CN111442771B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1865851A (en) * | 2006-06-13 | 2006-11-22 | 北京航空航天大学 | Resonant-type micro-mechanical optic fiber gyroscope |
| JP2014212411A (en) * | 2013-04-18 | 2014-11-13 | セイコーエプソン株式会社 | Mems element, mems element manufacturing method, electronic device, electronic apparatus and mobile object |
| CN104457725A (en) * | 2014-11-14 | 2015-03-25 | 司红康 | High-sensitivity bulk acoustic wave silicon microgyroscope |
| CN104864031A (en) * | 2015-05-18 | 2015-08-26 | 上海交通大学 | Magnetostrictive drive active and passive integrated multi-degree-of-freedom precision vibration isolating device |
| CN105526927A (en) * | 2016-01-20 | 2016-04-27 | 上海交通大学 | Geostrophic force effect based translational velocity or acceleration sensing device and structure |
| CN205642391U (en) * | 2016-01-20 | 2016-10-12 | 上海交通大学 | Translational velocity or add speed sensing device and structure based on coriolis force effect |
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| CN111442771A (en) | 2020-07-24 |
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