JP2000206141A - Momentum sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain an oscillating-body sensor to detect acceleration by changes in natural frequencies and a substantially single-body momentum sensor which applies the oscillating-body sensor and is capable of simultaneously measuring a plurality of motion elements such as acceleration in other directions, angular velocity, and the like. SOLUTION: The momentum sensor is provided with at least one acceleration sensor to detect changes in the oscillation frequency of a rod-shaped, plate- shaped, or frame-shaped oscillating body 1 with one end fixed and the other end connected to an additional mass 9 and to detect impressed acceleration. In addition, the oscillating bodies 1 of the above-mentioned constitution or tuning fork-type oscillating bodies are integrally arranged in the periphery of the common additional mass 9 to measure accelerations in different directions by changes in natural frequencies and to detect voltage generated by the Coriolis force to measure angular velocity.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a momentum sensor capable of measuring acceleration or rotational angular velocity.

[0002]

2. Description of the Related Art In measurement control of a movement state of a moving body,
The technology of mounting a small electromechanical sensor on an object to be measured and knowing a change in the vibration state thereof is being developed.
For example, an accelerometer is a device that detects the inertial force of mass in a piezoelectric or electromagnetic manner, and an gyro is based on the Coriolis force generated when a vibrating body such as a free bar or tuning fork is rotated in a specific axial direction. 2. Description of the Related Art There is known an apparatus which detects a change in vibration by piezoelectrically detecting an angular velocity.

First, as an angular velocity sensor, an L-shaped tuning fork type vibrator shown in FIG. 9 is known. This principle will be briefly described. The vibrating body is made of a metal or a piezoelectric crystal plate, has two L-shaped vibrating legs 100 and 200 connected by a base 500 fixed to a pedestal or the like, and has an eccentric mass 102 projecting sideways. 202 is provided at each free end. G1 and G2 indicate the position of the center of gravity. The eccentric structure of the mass makes it possible to measure the angular velocity Ω in the rotational movement in the plane of the tuning fork plate.

When the illustrated Ω acts, when both oscillating legs are opening and the eccentric masses 102 and 202 have velocities of U1 and U2, respectively (the illustrated state is in a phase where both legs are opening), it is proportional to Ω. Coriolis forces FC1 and FC2 are generated. Since each Coriolis force is eccentric with respect to the spring axis of the leg, a moment is generated in the cross section of the leg, and its rotation direction is the same.

[0005] 103, 203 is a spring portion 101 of the vibrating leg,
A piezoelectric element (a group of electrode films in the case where the tuning fork is made of a piezoelectric material) adhered to 201 is an electro-mechanical converter. A driving (excitation) voltage, a voltage generated piezoelectrically in proportion to the vibration displacement of the leg, and a voltage generated in proportion to the moment of the Coriolis force are superimposed on this electrode. Therefore, by amplifying the voltage presented by both piezoelectric elements differentially,
Are canceled and only the voltage proportional to the Coriolis force is taken out, and the vibrating gyroscope is established.

Further, the conventional acceleration sensor uses a piezoelectric element for converting an applied acting force into a voltage as a mechanical-electrical converter, and has one end fixed to the device to be measured and the additional mass fixed to the other end. Thus, the inertial force acting on the additional mass was directly measured in an analog manner. Since this acceleration sensor is not an application of a vibrating body, the measurement principle has no commonality with the measurement of Coriolis force.

[0007]

The sensitivity or accuracy of the conventional acceleration sensor depends on the piezoelectric characteristics of the piezoelectric material. This causes changes and variations in relation to the production of the piezoelectric material, the processing steps, the state of the electrodes, and their dependence on temperature and time. If the change in acceleration can be measured as a digital amount if it is converted into a change in frequency, for example, instead of relying on such an analog amount,
Variation factors for measurement results are reduced. Further, since the piezoelectric constant has no direct relation to the sensitivity of acceleration, a single crystal material such as quartz, which has a small piezoelectric constant but is extremely stable in material, can be used for the sensor. These can be expected to improve measurement accuracy.

Since acceleration and angular velocity are vector quantities, there are a total of six types in consideration of three-dimensional directions. In the measurement control of the movement, it is rarely necessary to measure all of them, and most of the moving bodies reach their purpose by knowing two or three of the six types of vector amounts depending on the type. For example, in camera shake control, two-axis angular velocity detection is usually performed. However, most of the exercise amount sensors which have reached the practical range conventionally can measure only a single item.

The purpose of measurement can be achieved by collecting a plurality of sensors capable of measuring only a single item, but the measuring apparatus itself requires a separate sensor. Each sensor has a delicate structure, requires a stable support structure and a means such as enclosing in an airtight container to maintain performance, and must be separately adjusted. Therefore, mounting a plurality of sensors hinders a sufficient reduction in the size of the target moving object, and inevitably limits the cost reduction. If a single sensor capable of measuring a plurality of items is realized, it is clear that these restrictions are eliminated and that there is a possibility of significant technical improvement.

[0010] A first object of the present invention is to provide an acceleration sensor capable of detecting acceleration as a frequency change. A second object is to provide a single sensor that can detect a plurality of exercise items and is highly practical.

[0011]

In order to solve the above-mentioned problems, a momentum sensor according to the present invention has at least one of the following features.

(1) At least one acceleration sensor for detecting a change in vibration frequency of a vibrating body having one end fixed and the other end connected to an additional mass, and detecting an applied acceleration.

(2) An acceleration for detecting an applied acceleration by detecting a change in the vibration frequency of two vibrating bodies having one end fixed to both sides of a common additional mass and the other end fixed to a fixed member. Having a sensor.

(3) The vibrating body is a frame-shaped vibrating body that bends and vibrates.

(4) The vibrating body is a bar-shaped, plate-shaped, or frame-shaped vibrating body that vibrates vertically.

(5) A plurality of frame-shaped vibrating bodies that flexurally vibrate or a plurality of bar-shaped, plate-shaped, or frame-shaped vibrating bodies that vibrate longitudinally are arranged radially around a common additional mass, and these are added to the additional mass. One end is fixed and the other end is connected to a fixing member, and a change in the natural frequency of the plurality of vibrators is detected to detect acceleration in at least two directions.

(6) A frame-shaped vibrating body that vibrates flexibly on both sides or around the common additional mass or a rod that vibrates longitudinally,
A plurality of plate-shaped or frame-shaped vibrators are radially arranged, one end of each of which is fixed to the additional mass, and the other end thereof is connected to a fixing member. To detect the acceleration in at least one direction and the angular velocity with respect to at least one axis of rotation by detecting a change in the rotational speed or detecting a voltage generated based on a Coriolis force acting on the frame-shaped vibrating body.

(7) At least one set of tuning fork-type vibrating bodies has a common additional mass, and a frame-shaped vibrating body that bends and vibrates on both sides or around it, or a bar, plate, or frame-shaped vibrating longitudinally. At least two ends of the vibrator are connected to each other, and the other end is fixed to a fixed member. At least one rotation shaft is detected by detecting a voltage generated based on a Coriolis force acting on the tuning-fork type vibrator. Detecting an angular velocity of the other vibrating body and detecting a change in a natural frequency of the other vibrating body to detect an acceleration in at least one direction.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS First, an example of an embodiment of the present invention relating to an acceleration sensor for detecting one-dimensional (one direction) acceleration is shown in plan views of FIGS. These are to detect the applied acceleration as a change in the natural frequency of the vibrating body.

FIG. 5A is a plan view of the first embodiment of the present invention, and the whole is formed by punching a plate material such as a metal or a piezoelectric material into an illustrated shape. The left end of the frame-shaped vibrating body 1 is integral with the fixing member 10, and the leftmost end thereof is fixed to a base or a sensor container. The right end is fixed to the additional mass 9 (the mass is increased by thickly plating a metal having a higher specific gravity on the enlarged portion of the plate material or the portion thereof or attaching a weight member thereto) via the connecting portion 13. The acceleration component in the direction indicated by arrow G is detected.

In the present embodiment, the core of the sensor is a frame-shaped vibrating body 1 composed of vibrating legs 11 and 12 connected at both ends. Although both spring axes are parallel to each other, as shown by a thin solid line in the figure, free vibration of bending in a mode of opening and closing symmetrically on both sides of a central axis (not shown) in the longitudinal direction of the frame is excited. I have. When a tensile force or a compressive force is applied to both ends in the longitudinal direction of the frame in the free vibration state, the frequency changes in accordance with the force, and if the change is known (for example, by comparing with another reference frequency or the like) ), The magnitude of the load is known. This principle has already been put to practical use in electronic balances. The inertial force generated in the additional mass 9 when the entire sensor is accelerated in the G direction is detected as a frequency change of the frame type vibrator.

The periphery of the fixing member 10 has an outer frame shape, supports the additional mass 9, and also serves as a guide member for linear movement in the left-right direction. Constricted part 30 and flexible part 4
0 is provided to reduce the deformation resistance of the fixed member 10 due to the linear movement of the additional mass. FIG. 5B shows a modification of the linear guide mechanism, and shows another shape of the flexible portion.

FIG. 5C is a plan view showing a second embodiment of the present invention. In this example, a plate-shaped (also referred to as a bar-shaped) vibrator that performs longitudinal vibration in the longitudinal direction is used as the vibrator 1. The vibrating body 1 is fixed at one end via a fixing portion 10 having a section change so as to form a section with the vibrating body portion, and the other end is fixed to the additional mass 9 via a connecting portion 13. The additional mass 9 may be provided with a linear motion guide member such as the constricted portion 30 and the flexible portion 40 shown in FIGS. 5A and 5B, but is not shown in this example. It should be noted that the way of providing a large or small change in cross section between the vibrating body 1 and the fixed portion 10 or the connecting portion 13 may be reversed from that shown in the figure.

The direction of the acceleration detected by the sensor is the G direction shown in the drawing or the opposite direction. The amount of change in the natural frequency of the vibrating body 1 and the sign thereof are the magnitude and direction (direction) of the applied acceleration. And depends on. Further, the vibration mode of the longitudinal vibration of the vibrating body 1 can be of various orders, and an optimum order is experimentally selected. The degree of contribution of the additional mass 9 to the natural frequency differs depending on the order. When the vibrating body is excited piezoelectrically, the electrode structure can be generally simpler in longitudinal vibration than in bending vibration. Note that the frame-shaped vibrator is regarded as a combination of two rod-shaped (plate-shaped) vertical vibrators, and the sensor vibrator shown in FIGS. 5A and 5B is almost intact. The shape may be a composite longitudinal vibrator in which both longitudinal vibrators are excited in the same phase.

FIG. 6 is a plan view of an acceleration sensor according to a third embodiment of the present invention. Members corresponding to those in the above-described embodiment are denoted by the same reference numerals, and will not be described again. In this example, another frame-shaped vibrating body 2 (vibrating legs 21 and 22, connecting portion 2)
3 are symmetrically fixed to the additional mass 9. Further, both frame type vibrators are integrated with a common fixing member 10, and the fixing member 10 is fixed to a base (not shown) (shaded portion). The reverse inertial force mG generated in the additional mass 9 when the fixed member 10 accelerates in the G direction acts on one of the frame-shaped vibrators 1 and 2 as a tensile force and acts on the other as a compressive force. Since the frequency changes in the direction, if the difference between the two frequencies is calculated, the acceleration in the long axis direction can be measured in accordance with the inertia force with high sensitivity even without the reference vibration source.

Although not shown again, the frame-shaped vibrators 1 and 2 in the third embodiment are replaced with the second vibrators described above.
In this case, the vibration bodies of the longitudinal vibration type as shown in the embodiment are replaced, that is, the vibration bodies that perform longitudinal vibration are connected to both sides of one additional mass, and both outer sides of these vibration bodies are fixed. The fourth embodiment may be a new acceleration sensor.

FIG. 7 is a plan view of the acceleration sensor according to the fifth embodiment.
In this configuration, an inertial force is applied to the frame-shaped vibrating body by its own mass m. Further, the vibrating body in the present embodiment can be replaced by a vertical vibrating body such as a bar, a plate, or a frame.

Next, various embodiments relating to the sensor of the present invention which can be configured to be able to detect a plurality of exercise items, and which are configured as a single unit, will be described with reference to FIGS.

FIG. 1 shows a sixth embodiment of the present invention.
It is a top view which shows a dimensional (or two-axis) acceleration sensor. Members having substantially the same functions are denoted by the same reference numerals as those of the other examples without further explanation. In this example, there are four frame-shaped vibrators 1 to 4. They have substantially the same shape and are integrally formed from one plate-shaped material. 11,
12, 21, 22, 31, 32, 41, and 42 are vibrating legs, 13, 23, 33, and 43 are connecting parts, and 9 is an additional mass. It is connected to the mass and radially arranged around it at 90 ° intervals, the outer ends of which are integral with the fixing member 10.

Each of the four frame-shaped vibrators is self-excited by an electromechanical converter (not shown) and an oscillation circuit. The acceleration is detected by detecting the frequency change between the frame-shaped vibrators 1 and 3 due to the inertial force of the additional mass 9 for the vertical acceleration component in the drawing, and the frequency change between the frame-shaped vibrators 2 and 4 due to the horizontal acceleration component. The frequency change is measured and measured, for example, as described in the third embodiment (FIG. 6). Also, by comparing the magnitude and sign of both components, it is possible to know the unknown direction and absolute value of the acceleration Gθ in any direction that is actually acting in the sensor plane. The excitation frequency of each frame-type vibrator may be deliberately shifted when it is necessary to avoid the pull-in phenomenon between them. As described above, the vibrators 1 to 4 can be replaced with bar-, plate-, and frame-type vertical vibrators to provide a new embodiment.

Next, a seventh embodiment of the present invention will be described. Since the schematic shape of the sensor is the same as that of FIG. 1, illustration of this example is omitted. The difference between the two is detected by the frequency difference in the sixth embodiment. However, in the seventh embodiment, for example, the frame type vibrators 2 and 3 are not self-excited and the additional mass 9
-Mechanical converter by inertia force from the first embodiment (not necessarily the same structure as in the first embodiment in which self-excited vibration is applied)
This is intended to detect a voltage, a charge, a current, or a change in the voltage, a charge, or a current generated therein, and to easily determine Gθ in an arbitrary direction.

FIGS. 2A and 2B are plan views of other two-dimensional acceleration sensors, and FIG. 2A shows an eighth embodiment of the present invention.
(B) shows a ninth embodiment of the present invention. As described above, the configuration in which the number of vibrators is three, six (not shown), eight, and the like can be configured so that Gθ can be detected more directly or in detail. Becomes These vibrators can be replaced by those that perform longitudinal vibration, as has already been often described.

FIG. 3A is a plan view showing a tenth embodiment of the present invention. This sensor can also measure angular velocity. The principle of the angular velocity measurement is as follows. For example, when the frame-shaped vibrators 1 and 3 are excited at the same frequency and in opposite phases (when one is expanded, the other is reduced in width), the additional mass 9 vibrates in the vertical direction in the figure. Therefore, when a rotational motion in the sensor plane (the rotation axis is perpendicular to the drawing) is applied, a Coriolis force is generated in the horizontal direction, and horizontal vibration is induced in the additional mass 9. If this vibration is detected using the frame-shaped vibrators 2 and 4 as sensors, the angular velocity Ω can be known.

In this embodiment, since a frame-type vibrator (which can be regarded as a double-ended tuning fork) is used for both driving and detecting the Coriolis force sensor, the advantage of supporting the sensor can be reduced. There is. The two opposing frame-type vibrators serving as pickups, or the electro-mechanical converters provided on each vibrating leg thereof can be differentially connected as appropriate to reduce noise and increase sensitivity. In addition, the vertical vibration of the frame-shaped vibrators 1 and 3 and the lateral vibration of the frame-shaped vibrators 2 and 4 are made substantially equal to each other, so that the isomorphous mode can be used.

Further, the vertical acceleration can be simultaneously measured by using the frequency change of the frame-shaped vibrators 1 and 3 as the driving elements. That is, one-dimensional acceleration and one-dimensional angular velocity can be measured. Alternatively, two-dimensional acceleration measurement and one-dimensional angular velocity measurement can be performed by the same sensor by repeatedly performing the drive / detection operation in a short cycle in a time-division manner. That is, it is possible to realize a sensor capable of obtaining information on all translational and rotational movements in one plane.

FIG. 3B is a plan view showing an eleventh embodiment of the present invention, which is an example of a multifunctional sensor for measuring rotation and two-dimensional acceleration in the same plane. To detect the angular velocity, the frame-type vibrator 1 drives the additional mass 9 in the vertical direction, and detects horizontal vibration caused by Coriolis force using the frame-type vibrator 4 as a pickup. The two-dimensional acceleration is detected by using the amount of change in the self-excited oscillation frequency of the frame-shaped vibrators 2 and 3.

At this time, the frame-shaped vibrating body 1 is excited in the mode of the lowest frequency as a double-ended tuning fork.
And 3 are configured to be excited in a higher-order mode as shown by a thin solid line, and to be able to separate angular velocity information and acceleration information by a frequency filter. The method of setting different frequencies for information discrimination is to use such different modes, or to change the dimensions of the frame-shaped vibrator individually and to use the same vibration mode to change the natural frequency of the double-ended tuning fork. You may let it.

In the case of the measurement using the two-dimensional movement of the additional mass 9 as in the sensors of these embodiments, the connecting portions 13, 23, 33, 43, etc. of the frame-shaped vibrating body are as thin as possible and It is desirable to shorten it. Further, since it is desirable that the additional mass is sufficiently large, a member giving the additional mass may be bonded.

FIG. 4 is a plan view of a multifunctional sensor according to a twelfth embodiment of the present invention. This sensor has eight frame-shaped vibrators 1 to 8 at equal intervals around a common additional mass 9. Frame-shaped vibrators 1, 3, 5, arranged at 90 ° intervals
The group 7 has substantially the same natural frequency, has a driving function and a detecting function, and detects, for example, a rotational angular velocity as in the above embodiment. The other group of the frame-shaped vibrators 2, 4, 6, and 8 drives and detects a natural frequency different from that of the preceding group, and detects a two-dimensional acceleration while being separated from angular velocity information.

FIG. 8A is a plan view of a multifunctional sensor showing a thirteenth embodiment of the present invention, and FIG. 8B is a plan view of a modified example thereof. Detect acceleration. (A) In this figure, the present example is a multifunctional sensor in which frame-type vibrators 1 and 2 and two pairs of L-shaped tuning forks composed of L-shaped vibrating legs 100, 200, 300 and 400 are combined. The frame-shaped vibrating bodies 1 and 2 which oscillate self-oscillate have an inner end connected to a base 500 of an L-shaped tuning fork and an outer end fixed to a fixed member (not shown) as a frame-shaped member. Base 500 and L
The entire character-shaped tuning fork serves as a common additional mass of the two frame-shaped vibrators, and acceleration is detected. Angular velocity detection is performed using each pair of L-shaped tuning forks as in the conventional example (FIG. 9). It is also possible to replace the vibrators 1 and 2 with a longitudinal vibration type vibrator.

In the sensor of FIG. 8A, the spring portions 101, 201, 301, and 401 of the four L-shaped vibrating legs are shown by a thin solid line and a curve together with the spring axis with respect to the horizontal symmetry axis of the sensor. Vibrates in a mode that opens and closes in phase. Coriolis force FC generated by angular velocity Ω
1 and FC4 and FC2 and FC3 are in the same direction, and the moment created by the Coriolis force remains in the entire sensor.

The sensor shown in FIG. 8B is a modification of the thirteenth embodiment shown in the previous figure. Although the shape does not change, the phases of the bending vibrations of the left and right L-shaped tuning forks are reversed by changing the electrode connection or circuit connection (not shown). At this time, the Coriolis forces FC1 and FC4 and the FC2 and FC3 are opposite to each other, and the Coriolis force is canceled in the entire sensor, and a sensor in which the force and the moment are perfectly balanced can be realized.

Although various embodiments have been described above, the technical scope of the present invention is, of course, not limited to these.
For example, selection or combination of the features of the embodiments, adoption of straight leg tuning forks, change of the type and shape of the vibrating body when possible (in addition to frame type tuning forks and longitudinal vibrating bodies, thickness shear vibrating bodies and contour shear vibrations) Body, etc.), change of arrangement, change of partial shape (optimization of R shape of fixed member shape and detailed shape, etc.), selection of sensor material (constant elastic metal material, quartz and other various types) Use of single crystal material, porcelain material, polymer material, etc.), change of support structure, fixed structure, sensor container, etc., structure of electro-mechanical converter, selection of direction of acceleration and angular velocity to be detected, etc. Includes possibilities.

[0044]

The sensor according to the present invention (claims 1 to 4) measures the acceleration as a frequency change, so that accurate measurement is facilitated and the electrical properties of the material constituting the sensor vibrator affect the sensitivity. Since the influence can be reduced, the measurement accuracy and stability can be improved by increasing the degree of freedom in selecting the material itself or the material.

Further, in the present invention, a structure in which a plurality of vibrators are arranged around a common additional mass (claim 5 to claim 5).
7) A single sensor capable of detecting a plurality of exercise items can be obtained, and the range of application can be expanded, and the effect of achieving downsizing and cost reduction of the sensor itself and a target device on which the sensor is mounted can be achieved. is there.

[Brief description of the drawings]

FIG. 1 is a plan view of a two-dimensional acceleration sensor according to a sixth embodiment of the present invention.

FIG. 2A is a plan view of a two-dimensional acceleration sensor according to an eighth embodiment of the present invention, and FIG. 2B is a plan view of a two-dimensional acceleration sensor according to a ninth embodiment of the present invention. is there.

FIG. 3A is a plan view of a multifunctional sensor according to a tenth embodiment of the present invention, and FIG. 3B is a plan view of a multifunctional sensor according to an eleventh embodiment of the present invention.

FIG. 4 is a plan view of a multifunction sensor according to a twelfth embodiment of the present invention.

5A is a plan view showing an acceleration sensor according to a first embodiment of the present invention, FIG. 5B is a plan view of a main part of a modified example thereof, and FIG. 5C is a second embodiment of the present invention; It is a top view of the acceleration sensor which is a form.

FIG. 6 is a plan view showing an acceleration sensor according to a third embodiment of the present invention.

FIG. 7 is a plan view showing an acceleration sensor according to a fifth embodiment of the present invention.

FIG. 8A is an operation plan view of a multifunction sensor according to a thirteenth embodiment of the present invention, and FIG. 8B is an operation plan view of a modification thereof.

FIG. 9 is a plan view of an L-shaped tuning fork that is a known angular velocity sensor.

[Explanation of symbols]

1, 2, 3, 4, 5, 6, 7, 8 Vibrating body 9 Additional mass 10 Fixing member 20 Mounting hole 30 Constricted part 40 Flexible part 11, 12, 21, 22, 31, 32, 41, 42 Vibrating leg 13, 23, 33, 43 Connecting part 100, 200, 300, 400 L-shaped vibrating leg 101, 201, 301, 401 Spring part 102, 202 Eccentric mass 103, 203 Piezoelectric element 500 Base FC1, FC2, FC3, FC4 Coriolis Force G Acceleration m Additional mass Gθ Acceleration in any direction G1, G2 Center of gravity position of eccentric mass U1, U2 Speed Ω Angular speed

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G01P 15/00 G01P 15/00 K

Claims (7)

[Claims] 1. A momentum comprising at least one acceleration sensor for detecting a change in a vibration frequency of a vibrating body having one end fixed and the other end connected to an additional mass and detecting an applied acceleration. Sensor. 2. An acceleration sensor for detecting an applied acceleration by detecting a change in the vibration frequency of two vibrators having one end fixed to both sides of a common additional mass and the other end fixed to a fixing member. A momentum sensor comprising: 3. The momentum sensor according to claim 1, wherein the vibrating body is a frame-shaped vibrating body that bends and vibrates. 4. The momentum sensor according to claim 1, wherein the vibrating body is a bar-shaped, plate-shaped, or frame-shaped vibrating body that vibrates longitudinally. 5. A frame-shaped vibrating body that flexurally vibrates or a plurality of bar-shaped, plate-shaped, or frame-shaped vibrating bodies that vibrate around a common additional mass are radially arranged, and one end of the vibrator is arranged on the additional mass. A momentum sensor for detecting the change in the natural frequency of the plurality of vibrators and detecting acceleration in at least two directions. 6. A frame-shaped vibrating body that bends and vibrates on both sides or around a common additional mass or a plurality of bar-shaped, plate-like, or frame-shaped vibrating bodies that vibrate vertically are radially arranged on the additional mass. Are fixed to each other, and the other ends thereof are connected to a fixing member to detect a change in the natural frequency of the plurality of vibrators, or to occur based on Coriolis force acting on the frame-shaped vibrator. A momentum sensor for detecting a voltage to detect an acceleration in at least one direction and an angular velocity about at least one rotation axis. 7. A frame-shaped vibrator that bends and vibrates on both sides or around it, or a rod-shaped, plate-shaped, or frame-shaped vibrator that vibrates flexibly on both sides or around the base of at least one set of tuning-fork vibrators. It has a structure in which at least two ends of a body are connected and the other end is fixed to a fixing member, and a voltage generated based on a Coriolis force acting on the tuning-fork type vibrator is detected to detect at least one rotation axis. A momentum sensor for detecting an angular velocity and detecting a change in a natural frequency of the another vibrating body to detect acceleration in at least one direction.