CN107817365A - A kind of self-powered 3-axis acceleration sensor and detection method - Google Patents

A kind of self-powered 3-axis acceleration sensor and detection method Download PDF

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Publication number
CN107817365A
CN107817365A CN201711231653.0A CN201711231653A CN107817365A CN 107817365 A CN107817365 A CN 107817365A CN 201711231653 A CN201711231653 A CN 201711231653A CN 107817365 A CN107817365 A CN 107817365A
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mrow
munderover
msup
mfrac
powered
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Inventor
王东方
朱逸凡
杨旭
傅宇鹏
宋杰
洪婧
储泽轩
吕诚
苑文楼
曹曦
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Jilin University
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Jilin University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01PMEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K35/00Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit
    • H02K35/02Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit with moving magnets and stationary coil systems
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186Vibration harvesters

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Geophysics And Detection Of Objects (AREA)

Abstract

The present invention provides a kind of self-powered 3-axis acceleration sensor and detection method, belongs to energy and material and device arts.Cantilever beam totally four, two-by-two vertically, in crossing distribution, cantilever beam end is equipped with piezoelectric layer, is detected for 3-axis acceleration;Free end is connected with matrix gauge block, and end is connected with supporting construction;Being fixedly connected sequentially immediately below matrix gauge block has quality of assistance block, permanent magnet, and three constitutes whole mass;Electromagnetic induction coil is placed in immediately below permanent magnet, on the inner bottom surface of supporting construction, is powered for gathering vibrational energy for acceleration transducer.Acceleration transducer proposed by the present invention can detect to any direction acceleration, and can realize self-powered, reduce cost, expand application.

Description

A kind of self-powered 3-axis acceleration sensor and detection method
Technical field
The invention belongs to energy and material and device arts, though special be related to a kind of self-powered based on electromagnetic induction principle 3-axis acceleration sensor and detection method.
Background technology
Acceleration transducer is a kind of electronic equipment that can measure acceleration, has been widely used in auto industry, boat The fields such as empty space flight, military equipment.Although piezoelectric acceleration transducer does not need power supply in detection, its output signal is not Directly it can be obtained by AD Acquisition Circuit, it is necessary to through constant-current source it is its power supply, and by its signal condition into standard signal.And wireless In sensing network application, because more than number of nodes and distribution is big, battery altering problem is difficult to solve;Meanwhile for many Power supply can not be provided, need long term monitoring, battery is not easy to change or the inflammable and explosive application for waiting dangerous situation, it is necessary to which use is passive Sensor measures to realize;Acceleration transducer passive can also be substantially reduced the power consumption and volume of system, improve system collection Cheng Du.Therefore, the self-powered of acceleration transducer is realized, it is significant.
Vibrational energy is a kind of energy of generally existing in natural environment, the operation of production equipment, the traveling of the vehicles, people The motion of body, it can all produce vibrational energy.For acceleration transducer, application scenarios are mostly dynamic environment, and collection vibrational energy is it Power supply is a tempting idea.According to the difference of operation principle, vibrational energy collection be based primarily upon piezo-electric effect, electromagnetic induction, Four kinds of methods such as electrostatic induction and triboelectricity.Wherein electromagnetic vibration energy collection is based on Faraday's electromagnetic induction law, leads to Cross extraneous vibration and change magnetic flux, gather caused induced-current in coil.Therefore, electromagnetic vibration energy collection can typically adopt With coil, the design of spring and magnet.Electromagnetic vibration energy collecting efficiency is high, but volume is larger, for device miniaturization increase Difficulty.
The content of the invention
The present invention provides a kind of self-powered 3-axis acceleration sensor and detection method, is accelerated with solving traditional piezoelectric type The problem of degree sensor needs power supply to provide electric current for its signal output, realizes passive transmission on the basis of passive detection.
The present invention adopts the technical scheme that:Four cantilever beams are vertical two-by-two, in crossing distribution, in every cantilever beam End is fixedly connected with piezoelectric layer, free end has same matrix gauge block, and cantilever beam end is connected with supporting construction, matrix gauge block Underface be fixedly connected with quality of assistance block, permanent magnet is fixedly connected with below quality of assistance block, in the underface of permanent magnet, support Electromagnetic induction coil is fixedly connected with above structure inner bottom surface, magnetic masking layer is with outside electromagnetic induction coil.
Magnetic masking layer leaves groove below four cantilever beams, and the width of groove should be slightly bigger than the width of cantilever beam, the depth of groove It should be slightly bigger than when by the acceleration of Z-direction, maximum displacement of the cantilever beam in Z-direction.
The distance of the matrix gauge block and magnetic masking layer, it should be greater than by X, during the acceleration of Y direction, matrix amount Block, quality of assistance block and permanent magnet are in X, the maximum displacement of Y direction;In the case where meeting above-mentioned requirements, it should try one's best and reduce matrix amount The distance of block and magnetic masking layer.
Described magnetic masking layer is circular cylindrical cavity.
A kind of acceleration detection method using self-powered 3-axis acceleration sensor, tried to achieve by following formula:
A in formula0For actual acceleration, m is the quality of vibrational structure, and a is the acceleration measured, and i, R, L is respectively electromagnetism Caused induced-current, internal resistance and inductance in induction coil, t are the time.
It is an advantage of the invention that:Magnet design required for during electromagnetic vibration energy is gathered is piezoelectricity 3-axis acceleration A part for the matrix gauge block of cantilever beam in sensor, the shortcomings that volume is larger can be gathered by having evaded electromagnetic vibration, realized It is self-powered simultaneously, whole device volume has no too big change.Self-powered 3-axis acceleration sensor proposed by the invention, it is The passive detection of ICP (Integrated circuits piezoelectric) sensor and transmission provide solution.Together When, processing technology is simple, and device overall structure easily realizes that cost is low, can be mass.
Brief description of the drawings
Fig. 1 is the structural representation of the present invention;
Fig. 2 is the sectional view of the present invention;
Fig. 3 is the sectional view of the present invention;
Fig. 4 is the detection method schematic diagram based on magnetic disturbance numerical compensation of the present invention.
Embodiment
As shown in Figure 1, 2, including:Cantilever beam 1, piezoelectric layer 2, matrix gauge block 3, quality of assistance block 4, permanent magnet 5, electromagnetism sense Answer coil 6, magnetic masking layer 7 and supporting construction 8.
Four cantilever beams 1 are vertical two-by-two, in crossing distribution, connect as shown in figure 1, being fixed in the end of every cantilever beam 1 Be connected to piezoelectric layer 2, free end has same matrix gauge block 3, cantilever beam 1 is integrated with matrix gauge block 3 and is process, cantilever beam 1 End is connected with supporting construction 8, and cantilever beam 1 can be formed with supporting construction 8 by being integrally machined;When cantilever beam 1 and supporting construction 8 select During with different materials, the end of cantilever beam 1, which can be bolted, to be fixed in supporting construction, and bolt material therefor is nonmagnetic Insulating materials such as nylon (Polyamide, PA) etc.;
The underface of matrix gauge block 3 is fixedly connected with quality of assistance block 4, and the lower section of quality of assistance block 4 is fixedly connected with permanent magnet 5; Electromagnetic induction coil 6 is fixedly connected with above the underface of permanent magnet 5, the inner bottom surface of supporting construction 8, in electromagnetic induction coil 6 It is with magnetic masking layer 7 outside.
Magnetic masking layer 7 leaves groove below four cantilever beams 1, and the width of groove should be slightly bigger than the width of cantilever beam 1, the depth of groove Degree should be slightly bigger than when by the acceleration of Z-direction, maximum displacement of the cantilever beam 1 in Z-direction.
The distance of the matrix gauge block 3 and magnetic masking layer 7, it should be greater than by X, during the acceleration of Y direction, matrix amount Block 3, quality of assistance block 4 and permanent magnet 5 are in X, the maximum displacement of Y direction;In the case where meeting above-mentioned requirements, it should try one's best and reduce matrix The distance of gauge block and magnetic masking layer.
The permanent magnet 5 is neodymium iron boron (Nd2Fe14B) etc.;
Described quality of assistance block 4 is the material that density is less than permanent magnet 5, such as lucite (Polymethyl Methacrylate, PMMA) etc.;Or it is the structure containing voided layer design;Its act on be reduce barycenter so that when sensor by To X, during the acceleration of Y direction, including matrix gauge block, the vibrational structure torsional amplitude including permanent magnet and quality of assistance block increases Greatly.Its advantage is the torsional amplitude increase of permanent magnet when by X or Y direction acceleration, is produced in electromagnetic induction coil Raw induced-current increase, so that sensor is by X, during Y-axis acceleration, considerable electric energy can also be gathered.
The material therefor of electromagnetic induction coil 6 is copper, aluminium etc.;When by the acceleration of Z-direction, permanent magnet can be Z-direction is moved, and makes to produce induced-current in electromagnetic induction coil.
The particular location of the electromagnetic induction coil 6, the surrounding of permanent magnet 5 can be looped around;Or apply at micro manufacturing field, The lower section of permanent magnet 5 is fixedly connected in the form of planar coil.
Described magnetic masking layer 7 is the higher material of magnetic conductivity, such as soft iron, silicon steel, permalloy etc.;
Described magnetic masking layer 7 is circular cylindrical cavity.
Operation principle is:When by extraneous acceleration, the free end matrix gauge block of cantilever beam 1 can produce vibration, correspondingly, Cantilever beam 1 can be by the pulling force or pressure of matrix gauge block, and the piezoelectric layer 2 on cantilever beam 1 can produce electric signal by piezo-electric effect, when By Z-direction acceleration when, the stressing conditions of four cantilever beams 1 are identical, therefore the piezoelectric layer 2 on four cantilever beams 1 is defeated The electric signal gone out is identical;When by X or Y direction acceleration, two cantilever beams 1 on direction axle are by along axle The size in direction is identical, power in opposite direction, while the generation of piezoelectric layer 2 size on two cantilever beams 1 is identical, in opposite direction Electric signal, and another two cantilever beams 1 on the axle vertical with acceleration direction are reversed by identical, its piezoelectric layer 2 has Identical electric signal output, to the acceleration of any direction, pass through the piezoelectric signal u for exporting four cantilever beams 11(t),u2 (t),u3(t),u4(t) decoupled, so as to decomposite X, acceleration corresponding to the axle of Y, Z tri-;
Self-powered cell operation principle is:When by the acceleration of Z-direction, permanent magnet 5 can vibrate in Z-direction, Magnetic flux changes in the electromagnetic induction coil 6 of the lower section of permanent magnet 5, induced-current is produced, when by X, the acceleration of Y direction When spending, because quality of assistance block 4 reduces the barycenter of mass, permanent magnet 5 can produce larger torsion, permanent magnetism in X, Y direction Magnetic flux changes in the electromagnetic induction coil 6 of the lower section of body 5, produces induced-current, and the induced-current of collection is stored into storage In electric capacity, when needing to transmit the signal of detection, storage capacitor electric discharge, stabling current is exported, powers, will export for sensor Signal condition is standard signal, and is transmitted to receiving terminal.
Influenceed because electromagnetic induction coil exists on acceleration transducer accuracy of detection, the present invention proposes a kind of based on number The detection method that value complement is repaid.According to principle of conservation of energy, the electric energy of electromagnetic induction coil collection, ignore the factors such as air damping, Damaged equal to acceleration transducer vibrational structure (four cantilever beams 1, piezoelectric layer 2, matrix gauge block 3, quality of assistance block 4, permanent magnet 5) The kinetic energy of mistake.The electric energy expression formula of the collection of the kinetic energy and electromagnetic induction coil of vibrational structure is as follows:
M is the quality of vibrational structure in formula, and V is the speed of vibrational structure, and a is the acceleration measured, and i, R, L is respectively electricity Caused induced-current, internal resistance and inductance in magnetic induction coil 6, t are the time.
To actual acceleration a0, by EDynamic 0=EIt is dynamic+ECoil, have:
I.e.:
From (3) formula, actual acceleration a is solved0(t) need to obtain a (t) and i (t), a (t) is decoupled by receiving terminal The u received1(t),u2(t),u3(t),u4(t) four piezoelectric signals obtain;Induced-current i (t) is then needed in self-powered power supply Transmitted before management circuit part rectification, finally a (t) signals with decoupling out further calculate, and obtain actual acceleration a0(t)。

Claims (5)

1. a kind of self-powered 3-axis acceleration sensor, four cantilever beams are vertical two-by-two, in crossing distribution, in every cantilever beam End be fixedly connected with piezoelectric layer, free end has same matrix gauge block, cantilever beam end is connected with supporting construction, its feature It is:Quality of assistance block is fixedly connected with immediately below matrix gauge block, permanent magnet is fixedly connected with below quality of assistance block, in permanent magnet Underface, be fixedly connected with electromagnetic induction coil above supporting construction inner bottom surface, magnetic screen is with outside electromagnetic induction coil Layer.
A kind of 2. self-powered 3-axis acceleration sensor according to claim 1, it is characterised in that:The magnetic masking layer exists Groove is left below four cantilever beams, the width of groove should be slightly bigger than the width of cantilever beam, and the depth of groove should be slightly bigger than by Z axis side To acceleration when, maximum displacement of the cantilever beam in Z-direction.
A kind of 3. self-powered 3-axis acceleration sensor according to claim 1, it is characterised in that:The matrix gauge block with The distance of magnetic masking layer, it should be greater than by X, during the acceleration of Y direction, matrix gauge block, quality of assistance block and permanent magnet exist X, the maximum displacement of Y direction;In the case where meeting above-mentioned requirements, it should try one's best and reduce the distance of matrix gauge block and magnetic masking layer.
A kind of 4. self-powered 3-axis acceleration sensor according to claim 1, it is characterised in that:Described magnetic masking layer For circular cylindrical cavity.
5. a kind of acceleration detection method using self-powered 3-axis acceleration sensor as claimed in claim 1, its feature It is actual acceleration a0Tried to achieve by following formula:
<mrow> <mfrac> <msup> <mrow> <mo>&amp;lsqb;</mo> <munderover> <mo>&amp;Integral;</mo> <mn>0</mn> <mi>t</mi> </munderover> <mi>a</mi> <mrow> <mo>(</mo> <mi>t</mi> <mo>)</mo> </mrow> <mi>d</mi> <mi>t</mi> <mo>&amp;rsqb;</mo> </mrow> <mn>2</mn> </msup> <msup> <mrow> <mo>&amp;lsqb;</mo> <munderover> <mo>&amp;Integral;</mo> <mn>0</mn> <mi>t</mi> </munderover> <msub> <mi>a</mi> <mn>0</mn> </msub> <mrow> <mo>(</mo> <mi>t</mi> <mo>)</mo> </mrow> <mi>d</mi> <mi>t</mi> <mo>&amp;rsqb;</mo> </mrow> <mn>2</mn> </msup> </mfrac> <mo>=</mo> <mfrac> <mrow> <mfrac> <mn>1</mn> <mn>2</mn> </mfrac> <mi>m</mi> <msup> <mrow> <mo>&amp;lsqb;</mo> <munderover> <mo>&amp;Integral;</mo> <mn>0</mn> <mi>t</mi> </munderover> <mi>a</mi> <mrow> <mo>(</mo> <mi>t</mi> <mo>)</mo> </mrow> <mi>d</mi> <mi>t</mi> <mo>&amp;rsqb;</mo> </mrow> <mn>2</mn> </msup> </mrow> <mrow> <mfrac> <mn>1</mn> <mn>2</mn> </mfrac> <mi>m</mi> <msup> <mrow> <mo>&amp;lsqb;</mo> <munderover> <mo>&amp;Integral;</mo> <mn>0</mn> <mi>t</mi> </munderover> <mi>a</mi> <mrow> <mo>(</mo> <mi>t</mi> <mo>)</mo> </mrow> <mi>d</mi> <mi>t</mi> <mo>&amp;rsqb;</mo> </mrow> <mn>2</mn> </msup> <mo>+</mo> <mfrac> <mn>1</mn> <mn>2</mn> </mfrac> <munderover> <mo>&amp;Integral;</mo> <mn>0</mn> <mi>t</mi> </munderover> <msup> <mi>i</mi> <mn>2</mn> </msup> <mrow> <mo>(</mo> <mi>t</mi> <mo>)</mo> </mrow> <mi>R</mi> <mi>d</mi> <mi>t</mi> <mo>+</mo> <munderover> <mo>&amp;Integral;</mo> <mn>0</mn> <mi>t</mi> </munderover> <mi>i</mi> <mrow> <mo>(</mo> <mi>t</mi> <mo>)</mo> </mrow> <mi>L</mi> <mi>d</mi> <mi>t</mi> </mrow> </mfrac> </mrow>
A in formula0For actual acceleration, m is the quality of vibrational structure, and a is the acceleration measured, and i, R, L is respectively electromagnetic induction line Caused induced-current, internal resistance and inductance in circle, t are the time.
CN201711231653.0A 2017-11-28 2017-11-28 A kind of self-powered 3-axis acceleration sensor and detection method Pending CN107817365A (en)

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108365729A (en) * 2018-04-28 2018-08-03 忻州师范学院 A kind of self-adaptive electromagnetic-friction complex vibration energy collecting device
CN109026553A (en) * 2018-07-20 2018-12-18 许继集团有限公司 Vibration sensor, data screening and direction determination process, fan monitor system
CN110429863A (en) * 2019-08-12 2019-11-08 北京康拓红外技术股份有限公司 A kind of wideband high reliability piezoelectric beam coupling energy collecting device
CN110994936A (en) * 2019-12-20 2020-04-10 宁波大学 Multi-layer multi-degree-of-freedom piezoelectric-electromagnetic composite vibration energy harvesting device
CN111064340A (en) * 2020-01-15 2020-04-24 山东理工大学 Wind-induced vibration electromagnetic power generation device based on full wind direction environment excitation
CN111122903A (en) * 2020-01-09 2020-05-08 华中科技大学 Self-powered electromagnetic motion perception sensor
CN111579818A (en) * 2020-07-06 2020-08-25 吉林大学 High-sensitivity low-noise acceleration detection device and method
CN111795739A (en) * 2020-07-16 2020-10-20 中国科学院武汉岩土力学研究所 Microseismic sensor
CN112104262A (en) * 2020-10-19 2020-12-18 郑州铁路职业技术学院 Self-powered system of freight train platform
CN112104261A (en) * 2020-10-19 2020-12-18 郑州铁路职业技术学院 Train platform self-powered method based on multi-piezoelectric transistor
CN112284355A (en) * 2020-09-14 2021-01-29 北京致感致联科技有限公司 Passive piezoelectric sensor and monitoring system
CN114110290A (en) * 2021-11-27 2022-03-01 北京工业大学 Nonlinear self-tuning pipeline vibration noise semi-active control method and system
CN114337372A (en) * 2022-02-21 2022-04-12 上海声动微科技有限公司 MEMS energy collector and manufacturing method thereof
CN114665685A (en) * 2022-03-14 2022-06-24 东北电力大学 Planar two-dimensional random vibration energy recovery device
CN117031098A (en) * 2023-10-10 2023-11-10 江苏盛德电子仪表有限公司 Energy-saving ammeter

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CN103941041A (en) * 2014-03-28 2014-07-23 武汉瑞芯科微电子技术有限公司 Single-mass-block three-axis MEMS accelerometer with three frame structures
CN104764904A (en) * 2015-03-26 2015-07-08 厦门大学 Three-axis piezoelectric accelerometer
CN205748409U (en) * 2016-06-15 2016-11-30 浙江师范大学 A kind of self-powered vehicle positioning is followed the tracks of and alarm device

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CN102934250A (en) * 2010-03-17 2013-02-13 原子能及能源替代委员会 Mechanical stress detector
CN101814860A (en) * 2010-04-09 2010-08-25 中北大学 Vibratory drive composite micro-power source based on piezoelectric effect and electromagnetic induction
CN103941041A (en) * 2014-03-28 2014-07-23 武汉瑞芯科微电子技术有限公司 Single-mass-block three-axis MEMS accelerometer with three frame structures
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Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108365729A (en) * 2018-04-28 2018-08-03 忻州师范学院 A kind of self-adaptive electromagnetic-friction complex vibration energy collecting device
CN109026553A (en) * 2018-07-20 2018-12-18 许继集团有限公司 Vibration sensor, data screening and direction determination process, fan monitor system
CN110429863A (en) * 2019-08-12 2019-11-08 北京康拓红外技术股份有限公司 A kind of wideband high reliability piezoelectric beam coupling energy collecting device
CN110994936A (en) * 2019-12-20 2020-04-10 宁波大学 Multi-layer multi-degree-of-freedom piezoelectric-electromagnetic composite vibration energy harvesting device
CN111122903A (en) * 2020-01-09 2020-05-08 华中科技大学 Self-powered electromagnetic motion perception sensor
CN111064340A (en) * 2020-01-15 2020-04-24 山东理工大学 Wind-induced vibration electromagnetic power generation device based on full wind direction environment excitation
CN111064340B (en) * 2020-01-15 2022-04-19 山东理工大学 Wind-induced vibration electromagnetic power generation device based on full wind direction environment excitation
CN111579818A (en) * 2020-07-06 2020-08-25 吉林大学 High-sensitivity low-noise acceleration detection device and method
CN111579818B (en) * 2020-07-06 2021-09-28 吉林大学 High-sensitivity low-noise acceleration detection device and method
CN111795739B (en) * 2020-07-16 2021-07-20 中国科学院武汉岩土力学研究所 Microseismic sensor
CN111795739A (en) * 2020-07-16 2020-10-20 中国科学院武汉岩土力学研究所 Microseismic sensor
CN112284355A (en) * 2020-09-14 2021-01-29 北京致感致联科技有限公司 Passive piezoelectric sensor and monitoring system
CN112284355B (en) * 2020-09-14 2022-07-26 北京致感致联科技有限公司 Passive piezoelectric sensor and monitoring system
CN112104262B (en) * 2020-10-19 2021-07-20 郑州铁路职业技术学院 Self-powered system of freight train platform
CN112104261A (en) * 2020-10-19 2020-12-18 郑州铁路职业技术学院 Train platform self-powered method based on multi-piezoelectric transistor
CN112104261B (en) * 2020-10-19 2021-11-05 合肥派霸电气科技有限公司 Train platform self-powered method based on multi-piezoelectric transistor
CN112104262A (en) * 2020-10-19 2020-12-18 郑州铁路职业技术学院 Self-powered system of freight train platform
CN114110290A (en) * 2021-11-27 2022-03-01 北京工业大学 Nonlinear self-tuning pipeline vibration noise semi-active control method and system
CN114337372A (en) * 2022-02-21 2022-04-12 上海声动微科技有限公司 MEMS energy collector and manufacturing method thereof
CN114665685A (en) * 2022-03-14 2022-06-24 东北电力大学 Planar two-dimensional random vibration energy recovery device
CN114665685B (en) * 2022-03-14 2023-11-14 东北电力大学 Plane two-dimensional random vibration energy recovery device
CN117031098A (en) * 2023-10-10 2023-11-10 江苏盛德电子仪表有限公司 Energy-saving ammeter
CN117031098B (en) * 2023-10-10 2023-12-08 江苏盛德电子仪表有限公司 Energy-saving ammeter

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Application publication date: 20180320