CN101515026A - Resonance micro electromechanical system magnetic field sensor and measuring method thereof - Google Patents
Resonance micro electromechanical system magnetic field sensor and measuring method thereof Download PDFInfo
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- CN101515026A CN101515026A CNA2009100299031A CN200910029903A CN101515026A CN 101515026 A CN101515026 A CN 101515026A CN A2009100299031 A CNA2009100299031 A CN A2009100299031A CN 200910029903 A CN200910029903 A CN 200910029903A CN 101515026 A CN101515026 A CN 101515026A
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Abstract
The invention relates to a resonance micro electromechanical system magnetic field sensor and a measuring method thereof, having the advantages of low power consumption, simple structure, rapid respondency and good reliability. The magnetic field sensor comprises an anchorage (1), a metal wire (2), a contilever plate (3) and a substrate (4). The metal wire (2) plated on the contilever plate (3) drives the contilever plate (3) under the action of lorentz force to generate vibration; excitation is respectively used for producing resonance having the same excitation frequency as first order and second order of the contilever plate; when the first order and the second order are in resonance, the structure has the directions with the difference of 90 degrees; the different displacements of a p point are measured by measuring the displacement of the p point on the contilever plate after the magnetic field directions of the first order and the second order are changed, thus the measurement of the magnetic field directions can be realized. The invention aims at providing a micro electromechanical system magnetic field sensor which has low power consumption, high sensitivity and precision and simple structure, and is seldom influenced by temperature.
Description
Technical field
The present invention relates to a kind of resonance micro electromechanical system magnetic field sensor and measuring method thereof, its principle is the difference of structure forms of motion when different modalities moves, thereby measure the displacement that produces when different modalities moves, and realize the measurement of magnetic direction, belong to the sensor design technical field.Specifically, the magnetic field sensor of platy structure, at different modalities different forms of motion is arranged, the magnetic field force excitation relevant with magnetic direction produces the different motion form, this structure adopts the technology compatible mutually with CMOS (ComplementaryMetal-oxide Semiconductor), can realize that the monolithic of excitation and testing circuit is integrated.
The purpose of this invention is to provide a kind of low in energy consumption, highly sensitive, precision is high, temperature influence is little micro electro-mechanical system magnetic field sensor, this apparatus structure is simple.
Background technology
Magnetic field sensor has long history, and as far back as the Spring and Autumn and the Warring States Periods, our ancestors have just invented compass in ancient China; Magnetic field sensor also has wide application, as compass, navigation, data storage, position sensing, foreign matter detection, motion detection, current sense, medical biotechnology electro-detection and disease detection or the like.
From the invention of compass till now, human exploration and utilization to magnetic field had the history in more than 2000 year.People utilize between magnetic field and the magnetic field same sex to repel each other the earliest, and the principle that there is a natural attraction between the sexes has invented that compass is taken one's bearings or be ship navigation.From 18th century to earlier 1800s, found a series of magnetic effects apart, as Faraday effect, magnetoresistance, Hall effect etc., for solid foundation has been established in the development of magnetic field sensor.At present, most of static magnetic field sensor (MFS) uses magnetostatic power (static magnetic force), Hall effect (Hall-effect), magnetic flux (fluxgate), magnetoresistance (magnetoresistive) or other semi-conductive magnetic effects to detect.
Since the integrated circuit technology invention, the particularly appearance of CMOS technology, the manufacturing in enormous quantities of silicon technology makes expensive design and manufacture cost obtain great reduction, MEMS (MEMS (micro electro mechanical system)) technology of new development simultaneously can utilize the IC aftertreatment technology to make various physical constructions on silicon substrate, open up new approach for the design of magnetic field sensor, promoted the development of MEMS magnetic field sensor greatly.In recent years, the structure of some miniature magnetic field sensors has been proposed, as the MEMS magnetic field sensor that Vincent Beroulle, the Laurent Latorre of France propose, this structure is by doing pressure drag, by measuring the output detection magnetic field of pressure drag near semi-girder and anchor district.Rock formula MEMS magnetic field sensor and propose by people such as BeverleyEyre the earliest, measure the amplitude that structure is rocked behind the action of a magnetic field lower stress, measure the size in magnetic field.The resonant mode magnetic field sensor that R.Sunier proposes obtains the purpose of magnetic-field measurement by change of resonance frequency.Another kind of resonant mode magnetic field sensor comprises a gapped magnetic amplitude transformer in two ends, and the material require of making uses soft magnetic material.These magnetic field sensors can only be measured the size in magnetic field, a kind of in addition broach magnetic field sensor, interaction by permanent magnet and magnetic field deflects broach, be used for measuring the direction in magnetic field, but the CMOS technology that this structure processing technology is not a standard, complex structure, manufacture craft requires high, and it is bigger to make the broach resonator move needed power consumption.The present invention proposes to utilize mode of vibration difference under the structure multiple modalities, measures the purpose that the next in-migration of different modalities reaches magnetic-field measurement.
Summary of the invention
Technical matters: the purpose of this invention is to provide a kind of low in energy consumption, highly sensitive, precision is high, temperature influence is little micro electro-mechanical system magnetic field sensor, this apparatus structure is simple, and cost is low.
Another purpose of the present invention provides a kind of measuring method of resonance micro electromechanical system magnetic field sensor, and this measuring method is low in energy consumption, and temperature influence is little.
Technical scheme: resonance micro electromechanical system magnetic field sensor of the present invention comprises substrate, first back up pad, second back up pad, cantilever slab and metal wire, cantilever slab is by first back up pad, second back up pad is connected on the boss of both sides of substrate (4), the parallel unsettled top of being located at substrate, metal wire is located at the cantilever slab upper surface, enter cantilever slab from second back up pad, and around it, lay out from the homonymy of second back up pad, in order to allow structural symmetry, on first back up pad of opposite side, be coated with first metal wire and second metal wire, metal wire, first metal wire and second metal wire and cantilever slab are synchronized with the movement.
Described metal wire is located at around the edge of cantilever slab (3) and on solid second back up pad, metal wire is connected on the substrate by measuring the anchor district.
The measuring method of resonance micro electromechanical system magnetic field sensor, at first applying extrinsic motivated makes cantilever slab produce vibration, excitation is used for producing the resonance identical with the second order excitation frequency with the cantilever slab single order respectively, structure is when single order and second order frequency resonance, direction differs 90 degree, measure the displacement that p is ordered on any magnetic direction lower cantalever plate, be used for measuring the angle of externally-applied magnetic field.The measuring method of Mechatronic Systems magnetic field sensor of declining of shaking, described cantilever slab and insulated substrate, be coated with metal wire around the cantilever slab upper surface, the method for described extrinsic motivated is: add that on metal wire ac current signal makes its vibration, power frequency is respectively structure single order and second order resonance frequency.
Beneficial effect:
1. resonance micro electromechanical system magnetic field sensor structure of the present invention is very simple, and this structure has that power consumption is little, highly sensitive, precision is high, temperature influence is little and advantage such as dependable performance.The present invention utilizes the displacement of measuring under the different vibration modes to measure the direction in magnetic field, and electric current is very little in the whole process, and is low in energy consumption, and as long as this structure moves, just can obtain displacement, and not adopt the thermal excitation element in the structure, so temperature variation is not very big to the influence of measuring.The present invention utilizes metal wire to add that AC signal induces Lorentz force and drives the cantilever slab structure, the advantage of this method is to change easily the size of drive signal, thereby can control the movement velocity and the amplitude of cantilever slab, thereby can adapt to the measurement of relative broad range magnetic field intensity.
2. the present invention is located at described metal wire around the cantilever slab, under so same magnetic field condition, and the stressed maximum of cantilever slab and Oscillation Amplitude is also maximum, so power consumption is little, its sensitivity and precision are higher.
3. the present invention is connected with at described metal wire two ends and connects the anchor district, and this anchor district has the size bigger than metal wire, at lead-out modes such as the bondings that goes between, will have excellent contact, and make electrically contact more reliable.
4. the measuring method of the resonance micro electromechanical system magnetic field sensor that adopts of the present invention, adopt mode of vibration difference under the different mode, measure the displacement of structure under the different mode of vibrations, obtain the information of magnetic direction, avoided Temperature Influence, thus this method have simple, low in energy consumption, temperature influence is less.
5. the frequency of institute of the present invention extrinsic motivated equals the resonance frequency of cantilever slab, can make cantilever slab obtain bigger amplitude at resonant frequency point, and desired power consumption is lower, helps improving measuring accuracy.
6. the present invention can adopt the manufacturing of MEMS process technology, and is compatible mutually with CMOS technology, so the cost of this device is lower; Its preparation method also is suitable for large-scale industrial production, and method is simple, and cost is lower.
The present invention is the resonance micro electromechanical system magnetic field sensor that is used to measure magnetic field, and this sensor is the plane with the substrate, is provided with the sensor construction of being made up of cantilever slab, back up pad, metal wire, anchor district on substrate.When this sensor was in the magnetic field, metal wire was subjected to the effect of Lorentz force to produce vibration on the cantilever slab, the displacement in the time can measuring cantilever slab at different frequency resonance under two kinds of resonant vibration patterns, thus reach the purpose of measuring magnetic direction.
Description of drawings
Fig. 1 is a perspective view of the present invention.
Fig. 2 is a planar structure synoptic diagram of the present invention.
Have among the above figure: anchor district 1, metal wire 2, first metal wire 21, second metal wire 22, cantilever slab 3, first back up pad 31, second back up pad 32, substrate 4.
Fig. 3 is a sectional view of the present invention.
Have among the figure: metal level 5, SiO
2Rete 6, Si rete 7, Si
3N
4Rete 8, SiO
2Film 9, Si film 10; Si wherein
3N
4Rete 8, SiO
2Film 9, Si film 10 constitute the substrate 4 of total.
Embodiment
This resonance micro electromechanical system magnetic field sensor utilizes the measuring method of platy structure to be: at first apply extrinsic motivated and make cantilever slab produce vibration, this excitation can be adopted metal wire stressed generation in magnetic field, structure is when single order and second order frequency resonance, direction differs 90 degree, measure the displacement that p is ordered under single order and the second order frequency, can be used for realizing measurement magnetic direction.The purpose of this invention is to provide a kind of low in energy consumption, highly sensitive, precision is high, temperature influence is little micro electro-mechanical system magnetic field sensor, this apparatus structure is simple.
The plane that magnetic field sensor is placed is that the z direction is vertical with the plane in the plane parallel with xoy.For the action of a magnetic field of any direction in the xoy plane, the metal wire l in the plane
j(j=1,2 ... 5) being subjected to the action of a magnetic field generation Lorentz force is F
j:
F
j＝Il
j×Bsin2πft(1)
Wherein, B is the size in magnetic field,
I is the amplitude of electric current,
F is the frequency of electric current.
When a-c cycle f equals the structure fundamental frequency, structure will be done antisymmetric from the face twisting vibration with the y axle, and the power that wherein plays a major role is by the metal wire l of the right and left in the plane
1And l
3Produce; On the other hand, when a-c cycle f just in time equals the second order frequency of structure, promptly during the crooked syntony frequency, structure will take place from face over against claiming crooked syntony, this moment metal wire l
2, l
4And l
5The Lorentz force that produces plays a major role.
The displacement function of p point position is among Fig. 1 under two frequencies:
Wherein, A
1pThe peak swing that p is ordered during the torsional resonances vibration, A
2pThe peak swing that p is ordered when vibrating for crooked syntony obtains formula (1) substitution formula (2) respectively:
Wherein, θ is the magnetic direction horizontal sextant angle,
l
1, l
2, l
3, l
4And l
5Be respectively the length and the width (as Fig. 2) of structure.
Q
1Quality factor during for flexural vibrations, Q
2Quality factor during for flexural vibrations,
k
1Be the stiffness coefficient of twisting vibration, k
2Be the stiffness coefficient of flexural vibrations,
f
1Be frequencies of torsional vibration, f
2Frequency for flexural vibrations.
In small deformation linear oscillator scope, k
1, Q
1, k
2And Q
2All be constant, but because texture ratio is more irregular, and ambient vibration damping factor is complicated, so the k in the formula
1, Q
1, k
2And Q
2Be difficult to obtain respectively by analytic method.Can be under known magnetic field and direction, the result directly demarcates according to experimental observation.
Like this under the action of a magnetic field at any angle, the displacement A that p was ordered when measurement structure was vibrated under single order and second order frequency respectively
1pAnd A
2p, having only magnetic field size B and deflection θ in the formula is unknown quantity, and both are removed the tangent value tg θ that just can obtain the angle of magnetic field and x axle like this, thereby obtains the direction in magnetic field, and obtains the size in magnetic field.
The present invention adopts following technical scheme:
This sensor comprises substrate, cantilever slab, back up pad, metal wire.The parallel unsettled top of being located at substrate of cantilever slab with back up pad, and back up pad is connected with substrate; Metal wire is located at around the cantilever slab upper surface, enters from a side back up pad, and homonymy lays out, and can be synchronized with the movement with cantilever slab.
Described metal wire is located at around the cantilever slab and on the back up pad of both sides, metal wire is connected on the substrate by measuring the anchor district.
Be provided with insulation course between metal wire and cantilever slab, the described metal wire of inducting is plated in the upper surface away from substrate of cantilever slab.
The measuring method of resonance micro electromechanical system magnetic field sensor is, at first applying extrinsic motivated makes cantilever slab produce vibration, excitation is used for producing the resonance identical with the second order excitation frequency with the cantilever slab single order respectively, structure is when single order and second order frequency resonance, direction differs 90 degree, and the displacement of order by p on the Measurement of Cantilever Plates is measured magnetic direction under single order and the second order and changed the different displacements that back p is ordered, can be used for realizing measurement, and then just can obtain the intensity of externally-applied magnetic field magnetic direction.
Described cantilever slab and insulated substrate, the method for described extrinsic motivated is: with metal wire that the anchor district is connected on add that alternating voltage (or electric current) signal makes its vibration.
The frequency of described extrinsic motivated equals the resonance frequency of cantilever slab.
May further comprise the steps: utilize surface micromachined technology machined cantilever plate on substrate, form metal wire on its surface sputtering metal A l surface and photoetching again, form cantilever slab by corrosion sacrifice layer PSG releasing structure at last.
A kind of resonance micro electromechanical system magnetic field sensor comprises substrate 4, also comprises cantilever slab 3 and metal wire 2, cantilever slab 3 parallel being located on the substrate 4, and metal wire 2 is located on the cantilever slab 3.Metal wire 2 can be Al, Au etc., and metal wire 2, anchor district 1 obtain by etching.Metal wire 2 drives 3 vibrations of suspended wall plate, and the amplitude of vibration depends on the size of the electric current that applies on the metal wire 2 and the intensity in magnetic field.
In the present embodiment, metal wire 2 can be plated on the upper surface of cantilever slab 3 with evaporation or electric plating method, also can use the method for sputter at above-mentioned location arrangements metal wire.When adopting the magnetic field force energisation mode to make the cantilever slab vibration, need between metal wire 2 and cantilever slab 3, be provided with insulation course.The material of metal wire 2 can be conducting metals such as aluminium, silver, and when cantilever slab 3 vibrations, thereby the displacement that measurement suspended wall plate p is ordered obtains the direction and the size in magnetic field.
The magnetic direction test structure that this example proposes mainly adopts the surface micromachined technology to realize.At first oxidation forms one deck SiO on silicon substrate
2Film, and then growth one deck Si
3N
4Insulation course so just constitutes the total substrate of sensor construction 4, then at Si
3N
4Superficial growth one deck PSG sacrifice layer, the polysilicon structure layer of deposit growth one deck low stress.This polysilicon is mixed to reduce resistance, and oxidation forms one deck SiO then
2Film forms metal wire 2 to surperficial splash-proofing sputtering metal Al surface and photoetching again, by photoetching and etching technics, forms cantilever slab 3 structures and corrodes the PSG releasing structure.
In the present embodiment, described metal wire 2 be located at cantilever slab 3 around.Be connected with anchor district 1 on the described metal wire 2, can be connected with the instrument in the external world by the mode of lead-in wire bonding.With metal wire cloth is because this part is stressed maximum in the whole cantilever slab structure around cantilever slab 3, to vibration role maximum, so displacement also can reach maximum.
The present invention is a kind of resonance micro electromechanical system magnetic field sensor that is used to measure magnetic direction, is made of anchor district 1, the metal wire 2 of inducting, cantilever slab 3, substrate 4.This sensor is the plane with substrate 4, is provided with, left-right symmetric 1 that form by metal wire 2, cantilever slab 3, anchor district in the sensor construction of center line on substrate 4, and metal wire 2 drives cantilever slabs 3 vibrations.
After structure is finished, at first under the known magnetic field size and Orientation, leading to alternating current on the metal wire 2 respectively, the frequency of alternating current equals the single order and the second order frequency of structure respectively, the displacement of p point under single order and second order frequency on the measurement structure is used for demarcating k respectively
1/ Q
1And k
2/ Q
2Value, as the fixing parameter of structure.
During measurement, at first this magnetic field sensor is placed and treat measuring magnetic field, logical respectively upper frequency equals the single order of structure and the alternating current of second order resonance frequency on metal wire 2 then, excitation cantilever arm plate 3 produces vibration, structure is when single order and second order frequency resonance, do respectively antisymmetric from the face twisting vibration and from face over against claiming flexural vibrations, both directions differ 90 degree.Measure the displacement that p is ordered under single order and the second order frequency respectively, both are divided by just can obtain the tangent value tg θ of the angle of magnetic field and x axle like this, thereby obtains the direction in magnetic field, and obtains the size in magnetic field.
Claims (4)
1. resonance micro electromechanical system magnetic field sensor, it is characterized in that this sensor comprises substrate (4), first back up pad (31), second back up pad (32), cantilever slab (3) and metal wire (2), cantilever slab (3) is by first back up pad (31), second back up pad (32) is connected on the boss of both sides of substrate (4), the parallel unsettled top of being located at substrate (4), metal wire (2) is located at cantilever slab (3) upper surface, enter cantilever slab (3) from second back up pad (32), and around it, lay out from the homonymy of second back up pad (32), in order to allow structural symmetry, on first back up pad (31) of opposite side, be coated with first metal wire (21) and second metal wire (22), metal wire (2), first metal wire (21) and second metal wire (22) are synchronized with the movement with cantilever slab (3).
2. resonance micro electromechanical system magnetic field sensor according to claim 1, it is characterized in that described metal wire (2) is located at around the edge of cantilever slab (3) and on solid second back up pad (32), metal wire (2) is connected on the substrate (4) by measuring anchor district (1).
3. the measuring method of a resonance micro electromechanical system magnetic field sensor as claimed in claim 1, it is characterized in that, at first applying extrinsic motivated makes cantilever slab (3) produce vibration, excitation is used for producing the resonance identical with the second order excitation frequency with cantilever slab (3) single order respectively, structure is when single order and second order frequency resonance, direction differs 90 degree, measures any magnetic direction lower cantalever plate (3) and goes up the displacement that p is ordered, and is used for measuring the angle of externally-applied magnetic field.
4. the measuring method of resonance micro electromechanical system magnetic field sensor according to claim 3, it is characterized in that, described cantilever slab (3) and substrate (4) insulation, be coated with metal wire (2) around cantilever slab (3) upper surface, the method of described extrinsic motivated is: add that on metal wire (2) ac current signal makes its vibration, power frequency is respectively structure single order and second order resonance frequency.
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