CN204848255U - Little inertial sensor based on electromagnetic induction - Google Patents
Little inertial sensor based on electromagnetic induction Download PDFInfo
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- CN204848255U CN204848255U CN201520339516.9U CN201520339516U CN204848255U CN 204848255 U CN204848255 U CN 204848255U CN 201520339516 U CN201520339516 U CN 201520339516U CN 204848255 U CN204848255 U CN 204848255U
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Abstract
The utility model relates to a little inertial sensor based on electromagnetic induction. Big, the poor stability of noise of current sensor, range and bandwidth are little. The utility model discloses a detection of first base plate and upper surface with broach form alternately fixed to the electrode, be fixed in the sensor anchor point on the first base plate, fixed quality piece anchor point, the outside extraction electrode of comb shape fixed electrode, sensor, electric insulation layer, drive wire and drive wire extraction electrode on the U -shaped sensor supporting beam who links to each other sensor anchor point and sensor quality piece, single bars shape oscillator that the comb shape movable electrode is connected in the outside, fixed quality piece. The utility model discloses a little inertial sensor novel structure, resolution ratio and sensitivity are high.
Description
Technical field
The utility model belongs to micro-electronic mechanical skill field, relates to a kind of micro-inertia sensor, is specifically related to a kind ofly oscillator embedded in the high-resolution micro-inertia sensor based on electromagnetic induction of transversely movable electrodes containing single grid shape oscillator.
Background technology
Recently for over ten years, obtain develop rapidly with the accelerometer that micro mechanical technology makes.Its main acceleration detection technology has piezoresistive detection, piezoelectric detection, heat detection, resonance detection, electromagnetic detection, light detection, tunnel current detection and capacitance detecting etc.In addition, some accelerometers based on these detection techniques are also had, as acceleration by light degree meter, electromagnetic accelerometer, capacitance accelerometer etc.The development of acceleration by light degree meter, mainly in order to the advantage in conjunction with light and micromechanics, makes the sensor of high electromagnetic shielding or the good linearity.In these sensors, capacitance acceleration transducer, little owing to having temperature coefficient, highly sensitive, the advantages such as good stability are maximum class acceleration transducers of development at present.The preparation method of micromechanic al capacitive sensor has surface micromachined method and bulk silicon micro mechanic processing method.Adopt surface micromachined technique can and ic process compatibility, thus the peripheral circuit of integrated sensor, cost is low, but the noise of sensor is large, poor stability, range and bandwidth little.Adopt bulk micromachining can improve the quality of sensor chip, thus reduce noise, improve stability, improve sensitivity.Shortcoming is that volume is slightly large, but can produce the micromachined process of superhigh precision.In order to obtain the complexity of higher measurement sensistivity and reduction peripheral circuit, the method for the quality can passing through increase sensor vibration generator and the static test electric capacity increasing sensor, thus reduction mechanical noise and circuit noise.And for etching the capacitance type sensor of the comb teeth-shaped that (DeepRIE) processes with bulk silicon technological such as dark reaction particle, the depth-to-width ratio of its plates capacitance is generally less than 27:1, the quality which limits sensor vibration generator increases and the reduction of capacitor plate spacing.And for Small Distance plates capacitance, its squeeze film air damping is comparatively large, increase the mechanical noise of sensor.Reduce this mechanical noise and by etching amortisseur bar on pole plate, or electric capacity can be changed into the mode of variable area, make damping show as slide-film damping, and one of method reducing circuit noise passes through increasing detection capacitance.
Summary of the invention
The purpose of this utility model is to provide a kind of and oscillator embedded in the high-resolution micro-inertia sensor based on electromagnetic induction of transversely movable electrodes containing single grid shape oscillator.
The detection that the utility model comprises first substrate and upper surface thereof is fixed with intersection comb teeth-shaped and is connected comb shape fixed electrode, the outside extraction electrode of sensor, electric insulation layer, the driving wire on single grid shape oscillator of comb-shaped movable electrode, fixed mass block to electrode, the sensor anchor point be fixed on first substrate, fixed mass block anchor point, the U-shaped sensor brace summer be connected with sensor mass by sensor anchor point, outside and drives wire extraction electrode.
Described single grid shape oscillator comprises a responsive grid mass, responsive grid mass is positioned at the middle part of sensor, and this responsive grid mass is made up of longitudinally equidistant, laterally parallel grid electrode, the frame connecting grid electrode and responsive grid mass rectangular preiection.The longitudinal length of responsive grid mass is identical with the longitudinal length of bar shaped sensor mass.Be connected by two U-shaped sensor tie-beams between responsive grid mass and anchor point, these two U-shaped sensor tie-beams are symmetrical arranged along the cross central line of sensor mass.
Described comb-shaped movable electrode is made up of with the comb-shaped movable electrode rectangular strip being connected comb-shaped movable electrode comb n equally spaced comb-shaped movable electrode comb, n >=1, comb-shaped movable electrode comb is vertical with comb-shaped movable electrode rectangular strip to be arranged, and comb-shaped movable electrode rectangular strip is vertical with responsive grid mass side to be arranged.M bar comb-shaped movable electrode be arranged in parallel composition one group of silicon strip group, m >=2.Outside responsive grid mass frame, correspondence arranges one group of silicon strip group respectively.
Comb-shaped movable electrode outside responsive grid mass frame is symmetrical arranged along the longitudinal centre line of bar shaped sensor mass.
Described sensor anchor point is separately positioned on the two ends of grid shape sensor mass along the longitudinal centre line of grid shape sensor mass, and be connected with grid shape sensor mass by U-shaped sensor brace summer, the outside extraction electrode of sensor is arranged on sensor anchor point.
Described fixed mass block comprises fixed mass block anchor point and m bar comb shape fixed electrode, and fixed mass block is fixed on first substrate by described fixed mass block anchor point, and each fixed mass block is corresponding with often organizing silicon strip group to be arranged.Described comb shape fixed electrode is made up of with the comb shape fixed electrode rectangular strip being connected n comb shape fixed electrode comb n equally spaced comb shape fixed electrode comb.Comb shape fixed electrode is relative with the comb-shaped movable electrode position in silicon strip group, and comb shape fixed electrode comb is corresponding with comb-shaped movable electrode comb arranged in a crossed manner.
Described driving wire has two, longitudinally be arranged on the outside frame of corresponding responsive grid mass respectively, every root drives one end of wire by being connected with corresponding driving wire extraction electrode along corresponding U-shaped sensor tie-beam, rectangular block corner end with the plain conductor that U-shaped sensor brace summer is laid.Electric insulation layer is provided with between the metal level driving the metal contact wires on wire, plain conductor, rectangular block corner end and responsive grid mass, driving wire extraction electrode composition and responsive grid mass corresponding part.
Described electric capacity adjusting play is less than the horizontal spacing between the corresponding comb on corresponding comb-shaped movable electrode and comb shape fixed electrode more than one micron.
Described detection intersects that comb teeth-shaped is fixing has two groups to electrode, and each group is made up of the comb electrodes of confront crosswise and extraction electrode respectively, and the interelectrode gap of each adjacent fingers is not less than one micron, the comb electrodes correspondence composition comb electrodes pair of intersection.
Described grid electrode be positioned at corresponding comb electrodes right directly over.
The micro-inertia sensor that the utility model relates to includes transversely movable single grid shape oscillator, the initial separation that can design sensor Detection capacitance is larger, thus solve dark reaction particle etching depth-to-width ratio and be less than 27:1 and can not do thick restriction to the quality of sensor vibration generator, then by the responsive grid mass of field drives, reduce Detection capacitance spacing, thus the initial detecting electric capacity of increase sensor is to reduce testing circuit noise, and sensor does the thick oscillator quality that increases, thus also reduce the mechanical noise of sensor, and add Detection capacitance containing responsive grid mass.In addition, the size by changing sensor brace summer and mass can also change range and the response characteristic of sensor.
Meanwhile, the high accuracy micro-inertia sensor novel structure that the utility model relates to, resolution ratio and highly sensitive, manufacture craft is simple, is conducive to reducing costs and improving yield rate, be a kind of can the micro-inertia sensor of practical application.
Accompanying drawing explanation
Fig. 1 (a) for first substrate of the present utility model and on detection to intersect comb teeth-shaped fixing to electrode schematic diagram;
Fig. 1 (b) in Fig. 1 (a) along A-A
'to the decomposition profile diagram of device architecture;
Fig. 2 (a) is the structural representation on second substrate of the present utility model;
Fig. 2 (b) in Fig. 2 (a) along B-B
'to the decomposition profile diagram of device architecture;
Fig. 3 is that Fig. 1 (b) combines with the sectional drawing of Fig. 2 (b);
Fig. 4 is the enlarged drawing of a pair comb-shaped movable electrode of the present utility model and comb shape fixed electrode.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the utility model is further illustrated, but the utility model is only limitted to by no means introduced embodiment.
With reference to figure 1(a), Fig. 1 (b), Fig. 2 (a), Fig. 2 (b), Fig. 3 and Fig. 4, the detection intersection comb teeth-shaped forming two group switching centre symmetries is on first substrate 1 fixing to electrode, the butt coupling electrode 2 of corresponding fixed mass interblock, and the connecting line between butt coupling electrode 2 and extraction electrode 4, detection intersection comb teeth-shaped is fixed and is made up of the comb electrodes 3 of transversely confront crosswise and extraction electrode electrode; Second substrate is formed the electric insulation layer 22 under the comb shape fixed electrode be fixed on the sensor anchor point 13 on first substrate 1, the two U-shaped sensor brace summers 9 be connected with the sensitive-mass block 18 of single grid shape oscillator by sensor anchor point 13, fixed mass block 6, the outside extraction electrode 12 of sensor, metal level 23 and drives extraction electrode 14 on the right side of wire.As shown in Fig. 2 (a), 2 (b), Fig. 3 and Fig. 4, form the horizontal spacing G between corresponding comb-shaped movable electrode comb 15 and comb shape fixed electrode comb 7
4, the gap 26 between first substrate 1 and responsive grid mass 20, as the G in Fig. 3
1shown in; Formed responsive grid mass and the detection on first substrate intersect comb teeth-shaped to fix electrode between gap 24; Gap 25 between two comb electrodes that comb electrodes is internal, the internal gap of each comb electrodes is identical.A corresponding comb-shaped movable electrode and a comb shape fixed electrode partner comb electric capacity pair, and form the longitudinal pitch that adjacent fingers electric capacity is right, its value is not less than 30 microns.
Composition graphs 1(a), Fig. 1 (b), Fig. 2 (a), Fig. 2 (b), Fig. 3 and Fig. 4, structure of the present utility model is described.
With reference to figure 2 (a), 2 (b), single grid shape oscillator comprises a responsive grid mass 18, responsive grid mass is positioned at the middle part of sensor, this responsive grid mass is made up of the frame 19 of longitudinally equidistant, laterally parallel grid electrode 20, connection grid electrode, and the longitudinal length of responsive grid mass is identical with the longitudinal length of bar shaped sensor mass.
With reference to figure 2 (a), 2 (b), comb-shaped movable electrode is made up of with the comb-shaped movable electrode rectangular strip 16 being connected comb-shaped movable electrode comb six equally spaced comb-shaped movable electrode comb 15, comb-shaped movable electrode comb is vertical with comb-shaped movable electrode rectangular strip to be arranged, and comb-shaped movable electrode rectangular strip is vertical with responsive grid mass side to be arranged.Article three, comb-shaped movable electrode be arranged in parallel composition one group of silicon strip group.Outside this responsive grid mass frame, correspondence arranges one group of silicon strip group respectively.
With reference to figure 2 (a), 2 (b), the comb-shaped movable electrode in the silicon strip group of responsive grid mass frame both sides is symmetrical arranged along the longitudinal centre line of bar shaped sensor mass.
With reference to figure 2 (a), 2 (b), sensor anchor point is separately positioned on the two ends of bar shaped sensor mass along the longitudinal centre line of bar shaped sensor mass, and be connected with bar shaped sensor mass by U-shaped sensor brace summer, the outside extraction electrode 12 of sensor is arranged on a sensor anchor point.
With reference to figure 2 (a), 2 (b), fixed mass block 6 comprises fixed mass block anchor point and three comb shape fixed electrodes, fixed mass block is fixed on first substrate by fixed mass block anchor point, and each fixed mass block is corresponding with often organizing silicon strip group to be arranged.Comb shape fixed electrode is made up of with the comb shape fixed electrode rectangular strip 8 being connected six comb shape fixed electrode comb six equally spaced comb shape fixed electrode comb 7.Comb shape fixed electrode is relative with the comb-shaped movable electrode position in silicon strip group, and comb shape fixed electrode comb is corresponding with comb-shaped movable electrode comb arranged in a crossed manner, and comb shape fixed electrode comb and comb-shaped movable electrode comb form gap 17.
With reference to figure 2 (a), Fig. 2 (b), Fig. 3, wire 21 is driven to have two, longitudinally be arranged on the outside frame of corresponding responsive grid mass respectively, every root drives one end of wire to be connected with corresponding driving wire extraction electrode by the plain conductor 10 laid on corresponding rectangular block corner end and U-shaped sensor brace summer.Electric insulation layer is provided with between the metal level 23 driving the metal contact wires on wire, plain conductor, rectangular block corner end and responsive grid mass, driving wire extraction electrode composition and responsive grid mass corresponding part.
With reference to figure 2 (a) and Fig. 4, electric capacity adjusting play forms the horizontal spacing G in gap than corresponding comb shape fixed electrode comb and comb-shaped movable electrode comb
4little more than one micron, the initial detection spacing of sensor capacitance is electric capacity adjusting play and horizontal spacing G
4between difference.
With reference to figure 1 (a), Fig. 1 (b), detection intersects that comb teeth-shaped is fixing has one group to electrode, and this group is made up of the comb electrodes 3 of transversely confront crosswise and extraction electrode 4, and the comb electrodes correspondence composition comb electrodes of intersection is to 5.
With reference to figure 3, directly over two corresponding gaps 25 between two internal two comb electrodes of comb electrodes of grid electrode difference.
Composition graphs 1(a), Fig. 1 (b), Fig. 2 (a), Fig. 2 (b), Fig. 3 and Fig. 4, on the responsive grid mass of formation, the thickness of grid electrode is less than second substrate thickness.
In order to each spacing of clearer and more definite description Detection capacitance, composition graphs 3 and Fig. 4 further describe, and comb electrodes to the distance between both sides as indicated by the arrows in fig. 3, uses G
0represent, its value is greater than the width of grid electrode; Comb-shaped movable electrode comb 15 on responsive grid mass and the gap G between the comb shape fixed electrode comb 7 on fixed mass block 6
4represent, as shown in the corresponding arrow in Fig. 4, span is ten microns to 50 microns; Comb-shaped movable electrode comb on responsive grid mass and the longitudinal size superposed between the comb shape fixed electrode comb on fixed mass block, as shown in the corresponding arrow in Fig. 4, use G
2represent, its value is not less than one micron; Spacing between the comb-shaped movable electrode comb of often pair of comb electric capacity centering and corresponding comb shape fixed electrode rectangular strip, as shown in the corresponding arrow in Fig. 4, uses G
3represent, its value is not less than ten microns.The lower surface of each grid electrode and the detection intersection comb teeth-shaped of correspondence to fix electrode between gap 30 be greater than four microns, be not more than the width of grid electrode; The width of grid electrode is greater than gap 25.
The driving wire be positioned on the left of bar shaped sensor mass, by outside gold ball bonding technology, with gold thread, extraction electrode 11 on the left of driving wire is connected respectively on encapsulating package pin, and accesses constant-current source.The driving wire be positioned on the right side of bar shaped sensor mass, by outside gold ball bonding technology, with gold thread, extraction electrode 14 on the right side of driving wire is connected respectively on encapsulating package pin, and the constant-current source of the driving wire opposite phase in access and left side.The outside extraction electrode of sensor is connected to encapsulating package pin, and is connected to ground, and extraction electrode 4 is connected respectively to encapsulating package pin, and represents with V1 and V2 respectively, when with micromechanical process processed sensor, and G
4, d1 can arrange higher value, process thicker sensor mass block, thus mass quality is larger.The uniform magnetic field of proper orientation is set in the encapsulating package cap directly over sensor construction, make the Ampere force produced in two metal driving lead, again at V1, V2 end powers up carrier signal respectively, movable mass is connected to ground by anchor point, when therefore sensitive direction just having acceleration signal, due to the effect of inertia force, produce displacement, thus cause the grid electrode 20 on responsive grid mass 18 and detection intersection comb teeth-shaped to fix the comb electrodes of the electrode superposition area change to the differential capacitance of the superposition area change of the differential capacitances of 5 compositions and corresponding comb shape fixed electrode comb 7 and comb-shaped movable electrode comb 15 correspondence composition, and then the change causing electric capacity larger, the size of this change electric capacity and outside inertial signal is linear, and because of the relation that is in proportion of Lorentz force suffered in acceleration for this reason and magnetic field, the size of the magnetic field intensity that just can obtain added magnetic field is changed by Detection capacitance, and due to sensor construction design feature, Detection capacitance is differential variation, which increase the range of linearity and the range of sensor.
The high accuracy micro-inertia sensor that the utility model relates to, wire is driven to cause comb electric capacity spacing to reduce owing to utilizing Ampere force, thus increase oscillator quality and Detection capacitance when not increasing lateral dimension, and responsive grid mass adds Detection capacitance, these factors make the mechanical noise of sensor and circuit noise greatly reduce, thus make the precision that sensor can reach very high, the utility model adopts micro mechanical technology to make simultaneously, technique is simple, is conducive to improving yield rate and reducing manufacturing cost.
Claims (1)
1. one kind embeds the micro-inertia sensor based on electromagnetic induction of transversely movable electrodes, the detection comprising first substrate and upper surface thereof is fixed with intersection comb teeth-shaped and is connected comb shape fixed electrode, the outside extraction electrode of sensor, electric insulation layer, the driving wire on single grid shape oscillator of comb-shaped movable electrode, fixed mass block to electrode, the sensor anchor point be fixed on first substrate, fixed mass block anchor point, the U-shaped sensor brace summer be connected with sensor mass by sensor anchor point, outside and drives wire extraction electrode, it is characterized in that:
Described single grid shape oscillator comprises a responsive grid mass, responsive grid mass is positioned at the middle part of sensor, and this responsive grid mass is made up of longitudinally equidistant, laterally parallel grid electrode, the frame connecting grid electrode and responsive grid mass rectangular preiection; The longitudinal length of responsive grid mass is identical with the longitudinal length of bar shaped sensor mass; Be connected by two U-shaped sensor tie-beams between responsive grid mass and anchor point, these two U-shaped sensor tie-beams are symmetrical arranged along the cross central line of sensor mass;
Described comb-shaped movable electrode is made up of with the comb-shaped movable electrode rectangular strip being connected comb-shaped movable electrode comb n equally spaced comb-shaped movable electrode comb, n >=1, comb-shaped movable electrode comb is vertical with comb-shaped movable electrode rectangular strip to be arranged, and comb-shaped movable electrode rectangular strip is vertical with responsive grid mass side to be arranged; M bar comb-shaped movable electrode be arranged in parallel composition one group of silicon strip group, m >=2; Outside responsive grid mass frame, correspondence arranges one group of silicon strip group respectively;
Comb-shaped movable electrode outside responsive grid mass frame is symmetrical arranged along the longitudinal centre line of bar shaped sensor mass;
Described sensor anchor point is separately positioned on the two ends of grid shape sensor mass along the longitudinal centre line of grid shape sensor mass, and be connected with grid shape sensor mass by U-shaped sensor brace summer, the outside extraction electrode of sensor is arranged on sensor anchor point;
Described fixed mass block comprises fixed mass block anchor point and m bar comb shape fixed electrode, and fixed mass block is fixed on first substrate by described fixed mass block anchor point, and each fixed mass block is corresponding with often organizing silicon strip group to be arranged; Described comb shape fixed electrode is made up of with the comb shape fixed electrode rectangular strip being connected n comb shape fixed electrode comb n equally spaced comb shape fixed electrode comb; Comb shape fixed electrode is relative with the comb-shaped movable electrode position in silicon strip group, and comb shape fixed electrode comb is corresponding with comb-shaped movable electrode comb arranged in a crossed manner;
Described driving wire has two, longitudinally be arranged on the outside frame of corresponding responsive grid mass respectively, every root drives one end of wire by being connected with corresponding driving wire extraction electrode along corresponding U-shaped sensor tie-beam, rectangular block corner end with the plain conductor that U-shaped sensor brace summer is laid; Electric insulation layer is provided with between the metal level driving the metal contact wires on wire, plain conductor, rectangular block corner end and responsive grid mass, driving wire extraction electrode composition and responsive grid mass corresponding part;
Wherein electric capacity adjusting play is less than the horizontal spacing between the corresponding comb on corresponding comb-shaped movable electrode and comb shape fixed electrode more than one micron;
Described detection intersects that comb teeth-shaped is fixing has two groups to electrode, and each group is made up of the comb electrodes of confront crosswise and extraction electrode respectively, and the interelectrode gap of each adjacent fingers is not less than one micron, the comb electrodes correspondence composition comb electrodes pair of intersection;
Described grid electrode be positioned at corresponding comb electrodes right directly over.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520339516.9U CN204848255U (en) | 2015-05-24 | 2015-05-24 | Little inertial sensor based on electromagnetic induction |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106344032A (en) * | 2016-09-12 | 2017-01-25 | 成都理工大学 | Wearable medical monitoring equipment |
| CN112444275A (en) * | 2019-08-28 | 2021-03-05 | 株式会社东芝 | Sensor with a sensor element |
-
2015
- 2015-05-24 CN CN201520339516.9U patent/CN204848255U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106344032A (en) * | 2016-09-12 | 2017-01-25 | 成都理工大学 | Wearable medical monitoring equipment |
| CN112444275A (en) * | 2019-08-28 | 2021-03-05 | 株式会社东芝 | Sensor with a sensor element |
| CN112444275B (en) * | 2019-08-28 | 2023-07-07 | 株式会社东芝 | Sensor for detecting a position of a body |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20151209 Termination date: 20160524 |
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| CF01 | Termination of patent right due to non-payment of annual fee |