CN104698222B - Three axle single-chip integration resonant capacitance formula silicon micro accerometers and its processing method - Google Patents
Three axle single-chip integration resonant capacitance formula silicon micro accerometers and its processing method Download PDFInfo
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- CN104698222B CN104698222B CN201510083131.5A CN201510083131A CN104698222B CN 104698222 B CN104698222 B CN 104698222B CN 201510083131 A CN201510083131 A CN 201510083131A CN 104698222 B CN104698222 B CN 104698222B
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Abstract
The present invention discloses a kind of three axles single-chip integration resonant capacitance formula silicon micro accerometer, including substrate of glass and bonding anchor point suspend and be arranged at the main structure of glass basic surface center；Two torsional pendulum type masses, electric capacity comb group and four resonators that main structure includes sensitive-mass block frame, is installed on sensitive-mass block frame center；Two torsional pendulum type mass longitudinal arrangements are placed, and each torsional pendulum type mass is put lateral connection and constituted by two quality, and the left and right sides of each torsional pendulum type mass is respectively arranged with electric capacity comb group；Four resonators are installed on four outsides of drift angle of sensitive-mass block frame by leverage respectively；Substrate of glass is provided with the signal lead being connected with main structure electrode.The present invention has carried out difference output in the acceleration analysis in tri- directions of X, Y, Z, improves accuracy of detection, and X, Y-axis use resonant mode, and Z axis use condenser type low cost, the processing method in the present invention simply to can be mass-produced.
Description
Technical field
The present invention relates to micro electronmechanical and inertial sensor field, and in particular to a kind of three axles single-chip integration resonant capacitance formula silicon
Micro-acceleration gauge and its processing method.
Background technology
Micro-mechanical accelerometer is a kind of important micro-inertial navigation sensor, with microelectromechanical systems (MEMS)
Continue to develop, the silicon micro accerometer being fabricated by using MEMS has small volume, lightweight, and low cost, reliability is high, power consumption
It is small, the advantages of can be mass.In inertial navigation field, silicon micromechanical accelerometer research has been subject to increasing section now
Grind the attention of institutes and colleges and universities.
The size of capacitance microaccelerator is smaller, sensitivity and high resolution, and stability and temperature linearity degree are good.Silicon is micro-
Resonance type accelerometer is a kind of high-precision micro-acceleration gauge, the change of resonant frequency will be converted into by acceleration signals,
Direct output digit signals, with sensitivity very high and resolution ratio, and also with wide dynamic range, strong antijamming capability,
The advantages of good stability.The micro-acceleration gauge of condenser type and resonant mode is because the characteristics of its is intrinsic and advantage, it has also become research
Main way.
2005, Hyeon Cheol Kim of Seoul, South Korea national university et al. have devised a kind of three axis accelerometer,
The accelerometer is to be integrated in the Z axis Micromachined Accelerometer Based on Resonant Principle of two coplanar X, Y-axis Micromachined Accelerometer Based on Resonant Principle and vertical plane
On same silicon chip.Thus volume is larger, and processing technology is complicated, and alignment error is big.
2008, University of Auckland reported the single chip integrated capacitance detecting formula three axis accelerometer of single mass.
2010, Taiwan National Tsing Hua University reported a kind of single mass three-shaft mems accelerometer of use array structure.2011
Year, University of Texas reported a kind of three axles for using surface to be made on polyimide flex substrate for mechanical manufacturing technology
Capacitor MEMS acceleration meter.The mass of the accelerometer is processed using ultraviolet photolithographic technique and nickel electroplating technology.On
Three three axis accelerometers stated are not carried out the full decoupled of each detection direction, therefore are extremely difficult to performance higher.
At present, micro-acceleration gauge research is main is also directed to single shaft micro-acceleration gauge and also comparative maturity, but three
The research of axle micro-acceleration gauge is less.Existing three axles micro-mechanical accelerometer major part is by multiple uniaxially or biaxially acceleration
Meter is integrated, and their sensitive axes are mutually perpendicular on a single die, so as to realize measuring three acceleration in direction.This acceleration
Degree meter, simple structure, processing is simple, technology maturation, but overall dimension is larger, intersecting axle interference all than more serious, there is also compared with
Big alignment error and line-hit, influence the development of silicon micro accerometer and use.With continuing to develop and market for science and technology
Further demand, in order to more fully understand object movable information, it is necessary to simultaneously measure three acceleration informations in direction,
The research and development of 3-axis acceleration have turned into inexorable trend.
The content of the invention
Goal of the invention：It is an object of the invention to solve the deficiencies in the prior art, there is provided a kind of three axles monolithic collection
Into resonant capacitance formula silicon micro accerometer and its processing method.
Technical scheme：A kind of three axles single-chip integration resonant capacitance formula silicon micro accerometer of the invention, including substrate of glass
And bonding anchor point suspends and is arranged at the main structure of glass basic surface center；The main structure includes sensitive-mass block
Frame, two torsional pendulum type masses for being installed on sensitive-mass block frame center, electric capacity comb group and four resonators；Described two
Individual torsional pendulum type mass longitudinal arrangement is placed, and each torsional pendulum type mass is put lateral connection and constituted by two quality, and often
The left and right sides of individual torsional pendulum type mass is respectively arranged with electric capacity comb group；Four resonators are pacified by leverage respectively
Loaded on four outsides of drift angle of sensitive-mass block frame；The substrate of glass is provided with the signal lead being connected with main structure electrode.
Wherein, resonator can measure the acceleration in X-axis and Y direction, the acceleration in the measurable Z-direction of electric capacity comb group.
Electric capacity comb group includes being connected to the movable electric capacity comb of torsional pendulum type mass and is bonded to by supporting anchor point
The fixed capacity comb of substrate of glass, the fixed capacity comb is different with the height of movable electric capacity comb and collectively forms change face
Product formula capacitance detecting, the substrate of glass below fixed capacity comb is provided with signal lead.Same torsional pendulum type mass both sides
Movable electric capacity comb is symmetrical on Y-axis, and the movable electric capacity comb of different torsional pendulum type mass both sides is symmetrical on X-axis；Two torsions
The mutual difference of electric capacity of the electric capacity comb group on swinging type mass block on diagonal, it is possible to increase accuracy of detection；And same torsional pendulum type
Connected by torsion bar between two quality pendulum of mass, the torsion bar is fixed on substrate of glass, two quality pendulum by anchor point
Torque between torsion bar.Shoulder and comb frame that resonator includes support beam, is installed on support beam both ends, institute
State support beam to be made up of the resonance beam of two horizontally sets, the lower end of the upper end of upper resonance beam and lower resonance beam is symmetrically arranged with horizontal stroke
To the movable comb placed, being respectively arranged at two ends with for movable comb is bonded to the outer fixed comb in substrate of glass by supporting anchor point
Tooth and side fixed fingers.Leverage includes lever and the U-shaped beam being arranged at by fixed anchor point in substrate of glass；The X
Lever on direction of principal axis is placed longitudinally, and one end of lever in this direction is connected to the outer of sensitive-mass block frame by beam column
Side, the other end is connected to placed longitudinally U-shaped beam, and then lever in X-direction can be moved in the X direction；The Y direction
Lever cross place, and one end of lever in this direction is connected to the outside of sensitive-mass block frame, the other end by beam column
It is connected to laterally disposed U-shaped beam, and then lever in Y direction can be moved in the Y direction.
Wherein, because beam column is very narrow, the rigidity along its width and short transverse is small, under with the collective effect of U-shaped beam, energy
Three decouplings certainly of orthogonal direction are enough realized, sensitivity and the resolution ratio of acceleration is improved.
Wherein, the spacing between two resonance beams is smaller, and outer fixed fingers are drive end, and interior fixed fingers are detection
End.
Further, in four resonators, two resonator centrals on same diagonal are symmetrical and then formed
Differential Detection, improves accuracy of detection；The shoulder of side is installed on substrate of glass by supporting anchor point to be bonded, and the shoulder of opposite side connects
It is connected to leverage.
Further, the substrate of glass is made up of borosilicate glass, and the main structure is made by single crystal silicon material.
The invention also discloses a kind of processing method of three axles single-chip integration resonant capacitance formula silicon micro accerometer, including with
Lower step：
(1) first piece of mask plate photoetching on the glass substrate is used, the place that there will be signal lead is exposed；
(2) then splash-proofing sputtering metal aluminium remove photoresist as signal lead using lift-off technology；
(3) photoetching is carried out using second piece of mask plate at one piece of back side of monocrystalline silicon piece, and is etched using Bosch techniques
Anchor point, then removes photoresist；
(4) photoetching is carried out using the 3rd piece of mask plate at the back side of the silicon structural layer etched by step (3), and is utilized
Bosch techniques etch the groove of certain depth, then remove photoresist；
(5) the anchor point Direct Bonding in the silicon structural layer and substrate of glass that will be etched by step (4)；
(6) photoetching is carried out using the 4th piece of mask plate part shading in silicon structural layer, and is carved using Bosch techniques etching
Erosion deep trouth, the depth of deep trouth is identical with the anchor point thickness of etching in step (3)；
(7) the 5th piece of mask plate is carried out into photoetching, and using Bosch techniques until the deep trouth in silicon structural layer carves logical completely
Stop, discharging structure, finally remove photoresist.
Beneficial effect：Compared with prior art, the present invention has advantages below：
(1) present invention has carried out difference output in the acceleration analysis in tri- directions of X, Y, Z, improves precision, and
And X, Y-axis use resonant mode, Z axis use condenser type so that the advantage of the direct output digit signals of the existing resonant mode of accelerometer
(in X, Y-axis), has condenser type to detect easy benefit in Z axis again；
(2) main structure of the invention is made of silicon materials, and silicon has realizes electric property and mechanical performance well
Advantage, is processed, low cost by MEMS (MEMS) technique, and manufacturing process is simple, can produce in enormous quantities；In the absence of installation
Error, it is ensured that certainty of measurement.
(3) present invention is larger in the absence of monolithic integrated tri-axial mechanical accelerometer overall dimension, and intersecting axle interference is all compared
Seriously, also in the absence of the shortcoming of larger alignment error and line-hit, small volume, easily contained and transport.
Brief description of the drawings
Fig. 1 is structure top view of the invention；
Fig. 2 is the structure top view of resonator in the present invention；
Fig. 3 is the flow chart of processing method in the present invention；
Fig. 4 is measuring principle figure of the invention.
Specific embodiment
Technical solution of the present invention is described in detail below, but protection scope of the present invention is not limited to the implementation
Example.
As depicted in figs. 1 and 2, a kind of three axles single-chip integration resonant capacitance formula silicon micro accerometer of the invention, including glass
Glass substrate 1 and bonding anchor point suspend and are arranged at the main structure of the centre of surface position of substrate of glass 1；Main structure includes sensitive-mass
Block frame 2, two torsional pendulum type masses 3 for being installed on the center of sensitive-mass block frame 2, electric capacity comb group 4 and four resonators
5；Two longitudinal arrangements of torsional pendulum type mass 3 are placed, and each torsional pendulum type mass 3 puts 31 lateral connection structures by two quality
Into, and the left and right sides of each torsional pendulum type mass 3 is respectively arranged with electric capacity comb group 4；Four resonators 5 pass through lever respectively
Mechanism 6 is installed on 2 four outsides of drift angle of sensitive-mass block frame；Substrate of glass 1 is provided with the signal being connected with main structure electrode
Lead.
Wherein, resonator 5 can measure the acceleration in X-axis and Y direction, in the measurable Z-direction of electric capacity comb group 4
Acceleration.
Electric capacity comb group 4 includes being connected to the movable electric capacity comb 41 of torsional pendulum type mass 3 and by supporting anchor point key
Together in the fixed capacity comb 42 of substrate of glass 1, fixed capacity comb 42 is different and common with the height of movable electric capacity comb 41
Variable area formula capacitance detecting is constituted, the substrate of glass 1 of the lower section of fixed capacity comb 42 is provided with signal lead.
The movable electric capacity comb 41 of the same both sides of torsional pendulum type mass 3 is symmetrical on Y-axis, 3 liang of different torsional pendulum type masses
The movable electric capacity comb 41 of side is symmetrical on X-axis；The electric capacity of the electric capacity comb group 4 on two torsional pendulum type masses 3 on diagonal
Mutual difference, it is possible to increase accuracy of detection；And connected by torsion bar 32 between two quality pendulum 31 of same torsional pendulum type mass 3
Connect, the torsion bar 32 is fixed on substrate of glass 1 by anchor point.
Resonator 5 includes support beam, is installed on the shoulder 52 and comb frame 53 at support beam both ends, and support beam is by two
The resonance beam 51 of individual horizontally set is constituted, and the lower end of the upper end of upper resonance beam 51 and lower resonance beam 51 is symmetrically arranged with laterally disposed
Movable comb 53, the upper and lower ends of movable comb 53 are respectively equipped with outer solid in substrate of glass 1 by supporting anchor point to be bonded to
Determine comb 55 and interior fixed fingers 54.
Also, the spacing between two resonance beams 51 is smaller, outer fixed fingers 55 are drive end, and interior fixed fingers 54 are
Test side.
In four resonators 5, two Central Symmetries of resonator 5 and then formation Differential Detection on same diagonal are carried
High measurement accuracy；The shoulder 52 of side is installed on substrate of glass 1 by supporting anchor point to be bonded, and the shoulder 52 of opposite side is connected to thick stick
Bar 61, and lever 61 belongs to Integral lever mechanism 6.
Leverage 6 includes lever 61 and the U-shaped beam 62 being arranged at by fixed anchor point in substrate of glass 1；X-direction
On lever 61 it is placed longitudinally, and one end of lever 61 in this direction is connected to the outer of sensitive-mass block frame 2 by beam column 8
Side, the other end is connected to placed longitudinally U-shaped beam 62, and then lever 61 in X-direction can be moved in the X direction；Similarly, Y
The lever 61 of direction of principal axis is laterally disposed, and one end of lever 61 in this direction is connected to sensitive-mass block frame 2 by beam column 8
Outside, the other end is connected to laterally disposed U-shaped beam 62, and then lever 61 in Y direction can be moved in the Y direction.Lever
Pole 7 is additionally provided with 61.
Wherein, because beam column 8 is very narrow, the rigidity along its width and short transverse is small, in the collective effect with U-shaped beam 62
Under, three decouplings certainly of orthogonal direction can be realized, improve sensitivity and the resolution ratio of acceleration.
Substrate of glass 1 is made up of borosilicate glass, and main structure is made by single crystal silicon material.
As shown in figure 3, the processing method of above-mentioned three axles single-chip integration resonant capacitance formula silicon micro accerometer, including following step
Suddenly：
(1) first piece of mask plate photoetching in substrate of glass 1 is used, the place that there will be signal lead is exposed；
(2) then splash-proofing sputtering metal aluminium remove photoresist as signal lead using lift-off technology；
(3) photoetching is carried out using second piece of mask plate at one piece of back side of monocrystalline silicon piece, and is etched using Bosch techniques
Anchor point, then removes photoresist；
(4) photoetching is carried out using the 3rd piece of mask plate at the back side of the silicon structural layer etched by step (3), and is utilized
Bosch techniques etch the groove of certain depth, then remove photoresist；
(5) the anchor point Direct Bonding in the silicon structural layer and substrate of glass 1 that will be etched by step (4)；
(6) photoetching is carried out using the 4th piece of mask plate part shading in silicon structural layer, and is carved using Bosch techniques etching
Erosion deep trouth, the depth of deep trouth is identical with the anchor point thickness of etching in step (3)；
(7) the 5th piece of mask plate is carried out into photoetching, and using Bosch techniques until the deep trouth in silicon structural layer carves logical completely
Stop, discharging structure, finally remove photoresist.
As shown in figure 4, the operation principle of three axle single-chip integration resonant capacitance formula silicon micro accerometers in the present invention is：
Driven in the outside of the linear resonator 5 of X-direction and apply the AC drive voltage with direct current biasing on fixed electrode
Afterwards, alternation driving force is produced, in the presence of alternation driving force, resonance beam 51 will occur opposite simple harmonic oscillation along Y-axis, then
By the fixed electrode simple harmonic oscillation signal detection of inner side out, the signal is then fed back into driving voltage again, forms closed loop certainly
Swash control system, the frequency of the closed loop self-oscillating control system will lock into the intrinsic frequency f of resonance beam 510。
When sensitive-mass block frame 2 is subject to have acceleration effect along X-direction, move in the X-axis direction, sensitive-mass block frame
2 acceleration are converted into inertia force, are delivered to lever construction 6 by beam column 8 and then amplify input power, exaggerated input masterpiece
For resonance beam 51 so that the resonant frequency f of resonance beam 51xChange.
Because two structures of resonator 5 on diagonal are symmetrical, therefore when a under tension of resonator 5, resonance
Frequency fx+Increase, then another is under pressure certainly, resonant frequency fx-Reduce.By detecting the variable quantity of frequency, and by this
Two frequency signal f of the structure of resonator 5x+With fx-Difference obtains fx, and then can obtain needing being input into along X-direction for measurement
Acceleration axSize.This full symmetric structure design can improve constant multiplier, and can eliminate the common-mode errors such as temperature
Influence.
The present invention is identical to the measuring principle of the acceleration of the measuring principle and X-direction of the acceleration of Y direction.
By detecting the variable quantity of frequency, and by the frequency signal f of the two structures of resonator 5y+With fy-Difference obtains fy, and then can be with
Obtain need measurement along Y direction input acceleration aySize.
Wherein, because U-shaped beam 62 is connected by beam column 8 with lever 61, when Y direction has input acceleration, torsional pendulum type
Mass 3 will not produce influence to the structure of resonator 5 of X-direction.Equally, when X-direction has input acceleration, torsional pendulum type
Mass 3 will not produce influence to the structure of resonator 5 of Y direction, thus this full decoupling the integrated resonance of three axles, condenser type
Silicon micro accerometer can be well isolated from three cross coupling effects of axial direction so that measurement signal is more accurate.
When Z-direction has acceleration, two quality of symmetrical torsional pendulum type mass 3 put 31 around the torsion being connected between it
Bar 32 is rotated, and two quality pendulum 31 of asymmetrical torsional pendulum type mass 3 is rotated around torsion bar 32, so as to cause first and third quadrant
Two electric capacity comb variable quantity C3+C4 and second, the variable quantity C1+C2 size phases of two electric capacity comb groups 4 of four-quadrant
Deng in the opposite direction, being easy to difference, by the change V for detecting electric capacityzTo detect acceleration az。
Claims (4)
1. a kind of three axles single-chip integration resonant capacitance formula silicon micro accerometer, it is characterised in that：Including substrate of glass and bonding
Anchor point suspends and is arranged at the main structure of glass basic surface center；The main structure includes sensitive-mass block frame, is installed on
Two torsional pendulum type masses of sensitive-mass block frame center, electric capacity comb group and four resonators；Described two torsional pendulum types
Mass longitudinal arrangement is placed, and each torsional pendulum type mass is put lateral connection and constituted by two quality, and each torsional pendulum type
The left and right sides of mass is respectively arranged with electric capacity comb group；Four resonators are installed on sensitivity by leverage respectively
Four outsides of drift angle of mass frame；The substrate of glass is provided with the signal lead being connected with main structure electrode；
The electric capacity comb group includes being connected to the movable electric capacity comb of torsional pendulum type mass and is bonded to by supporting anchor point
The fixed capacity comb of substrate of glass, the fixed capacity comb is different with the height of movable electric capacity comb and collectively forms change face
Product formula capacitance detecting, the substrate of glass below fixed capacity comb is provided with signal lead.
The movable electric capacity comb of the same torsional pendulum type mass both sides is symmetrical on Y-axis, different torsional pendulum type mass both sides
Movable electric capacity comb is symmetrical on X-axis；The mutual difference of electric capacity of the electric capacity comb group on two torsional pendulum type masses on diagonal,
And connected by torsion bar between two quality pendulum of same torsional pendulum type mass, the torsion bar is fixed on glass base by anchor point
Bottom.
The resonator includes support beam, is installed on the shoulder at support beam both ends, and the support beam is by two horizontally sets
Resonance beam is constituted, and the lower end of the upper end of upper resonance beam and lower resonance beam is symmetrically arranged with laterally disposed movable comb, movable comb
Being respectively arranged at two ends with for tooth is bonded to the outer fixed fingers in substrate of glass and interior fixed fingers by supporting anchor point；
The leverage includes lever and the U-shaped beam being arranged at by fixed anchor point in substrate of glass；In the X-direction
Lever it is placed longitudinally, and one end of lever in this direction is connected to the outside of sensitive-mass block frame, the other end by beam column
It is connected to placed longitudinally U-shaped beam, and then lever in X-direction can be moved in the X direction；The lever of the Y direction is horizontal
To placement, and one end of lever in this direction is connected to the outside of sensitive-mass block frame by beam column, and the other end is connected to horizontal stroke
Can be moved in the Y direction to the U-shaped beam placed, and then lever in Y direction.
2. three axles single-chip integration resonant capacitance formula silicon micro accerometer according to claim 1, it is characterised in that：Described
In four resonators, two resonator centrals on same diagonal are symmetrical and then form Differential Detection, and the shoulder of side passes through
Support anchor point bonding is installed on substrate of glass, and the shoulder of opposite side is connected to leverage.
3. three axles single-chip integration resonant capacitance formula silicon micro accerometer according to claim 1, it is characterised in that：The glass
Glass substrate is made up of borosilicate glass, and the main structure is made by single crystal silicon material.
4. the processing of the three axle single-chip integration resonant capacitance formula silicon micro accerometers according to claims 1 to 3 any one
Method, it is characterised in that：Comprise the following steps：
(1) first piece of mask plate photoetching on the glass substrate is used, the place that there will be signal lead is exposed；
(2) then splash-proofing sputtering metal aluminium remove photoresist as signal lead；
(3) photoetching is carried out using second piece of mask plate at one piece of back side of monocrystalline silicon piece, and anchor is etched using Bosch techniques
Point, then removes photoresist；
(4) photoetching is carried out using the 3rd piece of mask plate at the back side of the silicon structural layer etched by step (3), and utilizes Bosch
Technique etches the groove of certain depth, then removes photoresist；
(5) the anchor point Direct Bonding in the silicon structural layer and substrate of glass that will be etched by step (4)；
(6) photoetching is carried out using the 4th piece of mask plate part shading in silicon structural layer, and it is deep using Bosch techniques etching etching
Groove, the depth of deep trouth is identical with the anchor point thickness of etching in step (3)；
(7) the 5th piece of mask plate is carried out into photoetching, and using Bosch techniques until the deep trouth in silicon structural layer carves logical stopping completely
Only, structure is discharged, photoresist is finally removed.
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| CN101303365A (en) * | 2008-06-23 | 2008-11-12 | 中北大学 | Resonance type micro accelerometer |
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| CN201984082U (en) * | 2010-11-30 | 2011-09-21 | 南京理工大学 | Biaxial resonant silicon micro- accelerometer |
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