CN102778583B - Silicon substrate-based quartz resonance acceleration sensor chip with four-beam structure - Google Patents
Silicon substrate-based quartz resonance acceleration sensor chip with four-beam structure Download PDFInfo
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- CN102778583B CN102778583B CN201210240759.8A CN201210240759A CN102778583B CN 102778583 B CN102778583 B CN 102778583B CN 201210240759 A CN201210240759 A CN 201210240759A CN 102778583 B CN102778583 B CN 102778583B
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- acceleration
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 89
- 239000010453 quartz Substances 0.000 title claims abstract description 41
- 230000001133 acceleration Effects 0.000 title claims abstract description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 26
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 26
- 239000010703 silicon Substances 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 title claims abstract description 21
- 239000011521 glass Substances 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 24
- 238000010276 construction Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 230000006698 induction Effects 0.000 abstract description 4
- 230000035945 sensitivity Effects 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 abstract description 3
- 230000000694 effects Effects 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000000892 gravimetry Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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Priority Applications (1)
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CN201210240759.8A CN102778583B (en) | 2012-07-12 | 2012-07-12 | Silicon substrate-based quartz resonance acceleration sensor chip with four-beam structure |
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CN201210240759.8A CN102778583B (en) | 2012-07-12 | 2012-07-12 | Silicon substrate-based quartz resonance acceleration sensor chip with four-beam structure |
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CN102778583A CN102778583A (en) | 2012-11-14 |
CN102778583B true CN102778583B (en) | 2014-07-23 |
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CN201210240759.8A Active CN102778583B (en) | 2012-07-12 | 2012-07-12 | Silicon substrate-based quartz resonance acceleration sensor chip with four-beam structure |
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Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103063875A (en) * | 2012-12-25 | 2013-04-24 | 西安交通大学 | Silicon substrate differential motion quartz acceleration sensor |
CN105865666B (en) * | 2016-05-03 | 2018-11-20 | 成都皆为科技有限公司 | A kind of integral type biquartz tuning fork resonant sensitive element and force-measuring module |
CN106443068B (en) * | 2016-10-26 | 2020-06-02 | 西安交通大学 | Torsional differential quartz resonance acceleration sensor chip |
CN108398575B (en) * | 2018-03-19 | 2024-02-27 | 重庆科技学院 | Electrostatic resonance accelerometer and acceleration measurement method |
CN109100535B (en) * | 2018-06-22 | 2020-04-10 | 西安交通大学 | Flexible lever amplification vibration beam accelerometer chip based on SOQ and processing technology thereof |
CN108732382A (en) * | 2018-06-22 | 2018-11-02 | 西安交通大学 | With flexible amplification mechanism based on SOQ quartz vibration beam accelerometer chips |
CN109765404B (en) * | 2018-12-28 | 2020-03-17 | 西安交通大学 | Accelerometer chip based on QoS technology, processing technology and accelerometer |
CN109764954B (en) * | 2019-01-04 | 2021-02-09 | 西安交通大学 | High-sensitivity, high-frequency-response and overload-resistant silicon carbide high-temperature vibration sensor |
CN111650401B (en) * | 2020-06-03 | 2021-05-07 | 西安交通大学 | Coplanar-mounted metal-based integrated resonant accelerometer |
CN111796119B (en) * | 2020-07-20 | 2022-05-17 | 合肥工业大学 | Resonant acceleration sensor based on nano piezoelectric beam and preparation method thereof |
CN112484900B (en) * | 2020-12-12 | 2021-12-28 | 西安交通大学 | Quartz resonant pressure sensor with integrated push-pull structure |
CN114280329A (en) * | 2021-12-27 | 2022-04-05 | 西安交通大学 | Quartz acceleration sensor with tuning fork fixedly supported at two ends |
CN116046220A (en) * | 2022-12-28 | 2023-05-02 | 厦门大学 | Quartz resonance type pressure sensor based on single pressure conversion element |
CN116387094B (en) * | 2023-06-02 | 2023-08-25 | 中国工程物理研究院电子工程研究所 | Integrated quartz micro-switch |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102243077A (en) * | 2010-04-21 | 2011-11-16 | 精工爱普生株式会社 | Vibration-type force detection sensor and vibration-type force detection device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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US7467553B2 (en) * | 2005-12-22 | 2008-12-23 | Honeywell International Inc. | Capacitively coupled resonator drive |
JP2008046009A (en) * | 2006-08-17 | 2008-02-28 | Epson Toyocom Corp | Acceleration sensor element |
JP2010181210A (en) * | 2009-02-03 | 2010-08-19 | Epson Toyocom Corp | Acceleration sensor |
JP2011059097A (en) * | 2009-08-10 | 2011-03-24 | Seiko Epson Corp | Tuning fork vibrating reed, vibration sensor element, and vibration sensor |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN102243077A (en) * | 2010-04-21 | 2011-11-16 | 精工爱普生株式会社 | Vibration-type force detection sensor and vibration-type force detection device |
Non-Patent Citations (3)
Title |
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JP特开2008-46009A 2008.02.28 |
JP特开2010-181210A 2010.08.19 |
JP特开2011-59097A 2011.03.24 |
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CN102778583A (en) | 2012-11-14 |
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Inventor after: Zhao Jianhua Inventor before: Zhao Yulong Inventor before: Li Cun Inventor before: Rao Hao |
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Effective date of registration: 20161123 Address after: 710075 Xi'an hi tech Zone, new industrial park, No. foreign exchange Road, No. 19 Patentee after: Shaanxi Lin Tak inertia Electric Co.,Ltd. Address before: 710048 Xianning Road, Shaanxi, Xi'an, No. 28 Patentee before: Xi'an Jiaotong University |
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