JP2011059097A

JP2011059097A - Tuning fork vibrating reed, vibration sensor element, and vibration sensor

Info

Publication number: JP2011059097A
Application number: JP2010015614A
Authority: JP
Inventors: So Ichikawa; 想市川
Original assignee: Seiko Epson Corp
Current assignee: Seiko Epson Corp
Priority date: 2009-08-10
Filing date: 2010-01-27
Publication date: 2011-03-24

Abstract

<P>PROBLEM TO BE SOLVED: To provide a tuning fork vibrating reed, capable of preventing breakage of an extraction electrode, which has high reliability. <P>SOLUTION: The tuning fork vibrating reed 100 keeps extraction electrodes 112 and 122 extended from excitation electrodes 110 and 120 formed on the front or backside of one of adjacent regions and each branched into at least two electrodes, one of which is connected to the excitation electrodes 110 and 120 formed on one side surface of the other region, and the other one of which is connected to the excitation electrodes 110 and 120 formed on the other side surface of the other region. The widths of those parts of the extraction electrodes 112 and 122 which extend from the excitation electrodes 110 and 120 are greater than or equal to the widths of the excitation electrodes 110 and 120 formed on the front or backside of the region, respectively. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、双音叉型振動片、振動型センサー素子および振動型センサーに関する。 The present invention relates to a double tuning fork resonator element, a vibration sensor element, and a vibration sensor.

振動型センサーは、従来から自動車、航空機、ロケットから各種プラントの異常振動環視装置等まで、広く使用されている。中でも双音叉型圧電振動片を用いた振動型センサーは、印加された応力の大きさに比例して双音叉型振動片の周波数が変化し、データ処理が容易であると共に測定精度、測定感度、再現性、温度特性等が優れている。 Conventionally, vibration sensors have been widely used from automobiles, airplanes, rockets to abnormal vibration inspection devices for various plants. In particular, the vibration type sensor using a double tuning fork type piezoelectric vibrating piece changes the frequency of the double tuning fork type vibrating piece in proportion to the magnitude of applied stress. Excellent reproducibility and temperature characteristics.

例えば、特許文献１に記載された双音叉型振動片は、２本の振動腕部に対し、３つの領域に区分けされた振動領域のそれぞれに励振電極が形成されている。これらの励振電極は、振動腕部の表裏面および両側面に形成されており、表裏面に形成された励振電極と、両側面に形成された励振電極とは、引出電極によって接続されている。引出電極は、励振電極を一筆書きで接続するような形態を有している。 For example, in the double tuning fork type resonator element described in Patent Document 1, excitation electrodes are formed in each of the vibration regions divided into three regions with respect to two vibration arm portions. These excitation electrodes are formed on the front and back surfaces and both side surfaces of the vibrating arm portion, and the excitation electrodes formed on the front and back surfaces are connected to the excitation electrodes formed on both side surfaces by extraction electrodes. The extraction electrode has a form in which the excitation electrode is connected with a single stroke.

特開２００７−１８７４６３号公報JP 2007-187463 A

しかしながら、特許文献１に記載された双音叉型振動片では、引出電極の幅は励振電極の幅より十分に小さいため、双音叉型振動片の小型化に伴って振動腕部の幅が小さくなった場合、引出電極形成時のマスクのアライメントずれ等の影響を受けて断線する場合がある。引出電極に断線が生じた場合、励振電極が電気的に浮いた状態となってしまい、振動損失が高くなり、ＣＩ（クリスタルインピーダンス）値の劣化、さらには発振不良の原因にもなり、信頼性が低下する。 However, in the double tuning fork type vibrating piece described in Patent Document 1, the width of the extraction electrode is sufficiently smaller than the width of the excitation electrode, so that the width of the vibrating arm portion becomes smaller as the size of the double tuning fork type vibrating piece is reduced. In such a case, disconnection may occur due to the influence of misalignment of the mask when the extraction electrode is formed. When disconnection occurs in the extraction electrode, the excitation electrode is in an electrically floating state, resulting in high vibration loss, deterioration of CI (Crystal Impedance) value, and further causing oscillation failure. Decreases.

本発明のいくつかの態様に係る目的の１つは、引出電極の断線を防止することができ、高い信頼性を有する双音叉型振動片を提供することにある。また、本発明のいくつかの態様に係る目的の１つは、上記双音叉型振動片を有する振動型センサー素子および振動型センサーを提供することにある。 One of the objects according to some embodiments of the present invention is to provide a double tuning fork type resonator element that can prevent disconnection of an extraction electrode and has high reliability. Another object of some aspects of the present invention is to provide a vibration type sensor element and a vibration type sensor having the above-mentioned double tuning fork type vibration piece.

本発明は上述の課題の少なくとも一部を解決するためになされたものであり、以下の態様または適用例として実現することができる。 SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following aspects or application examples.

［適用例１］
表裏関係にある表面と裏面と、前記表面と裏面とに連結した２つの側面とを有する双音叉型振動片であって、
並列して延在された第１振動腕部および第２振動腕部と、
前記第１振動腕部および前記第２振動腕部の一方側の端部に接続された第１基端部と、
前記第１振動腕部および前記第２振動腕部の他方側の端部に接続された第２基端部と、
を含み、
前記第１振動腕部は、前記第１基端部から前記第２基端部に向かう方向に沿って順に並ぶ、第１領域、第２領域および第３領域を有し、
前記第２振動腕部は、前記第１基端部から前記第２基端部に向かう方向に沿って順に並ぶ、第４領域、第５領域および第６領域を有し、
前記第１領域の表裏面、前記第２領域の両側面、前記第３領域の表裏面、前記第４領域の両側面、前記第５領域の表裏面、および前記第６領域の両側面には、互いに電気的に接続された第１励振電極が形成され、
前記第１領域の両側面、前記第２領域の表裏面、前記第３領域の両側面、前記第４領域の表裏面、前記第５領域の両側面、および前記第６領域の表裏面には、互いに電気的に接続された第２励振電極が形成され、
前記第１振動腕部および前記第２振動腕部において、前記第１領域から前記第６領域のうちの隣り合う２つの前記領域に挟まれた中間領域には、第１引出電極および第２引出電極が形成され、
前記第１引出電極は、
隣り合う前記領域のうちの、一方の前記領域の表面または裏面に形成された前記第１励振電極から延出し、少なくとも二又に分岐して、分岐した一方の電極が他方の前記領域の一方の側面に形成された前記第１励振電極と接続し、分岐した他方の電極が他方の前記領域の他方の側面に形成された前記第１励振電極と接続し、
前記第２引出電極は、
隣り合う前記領域のうちの、一方の前記領域の表面または裏面に形成された前記第２励振電極から延出し、少なくとも二又に分岐して、分岐した一方の電極が他方の前記領域の一方の側面に形成された前記第２励振電極と接続し、分岐した他方の電極が他方の前記領域の他方の側面に形成された前記第２励振電極と接続し、
前記第１引出電極の前記第１励振電極から延出している部分の幅の大きさは、前記領域の表面または裏面に形成された前記第１励振電極の幅の大きさ以上であり、
前記第２引出電極の前記第２励振電極から延出している部分の幅の大きさは、前記領域の表面または裏面に形成された前記第２励振電極の幅の大きさ以上である、双音叉型振動片。 [Application Example 1]
A double tuning fork type resonator element having a front surface and a back surface in a front / back relationship, and two side surfaces connected to the front surface and the back surface,
A first vibrating arm portion and a second vibrating arm portion extending in parallel;
A first base end connected to one end of the first vibrating arm and the second vibrating arm;
A second base end connected to the other end of the first vibrating arm and the second vibrating arm;
Including
The first vibrating arm portion includes a first region, a second region, and a third region, which are sequentially arranged along a direction from the first base end portion to the second base end portion,
The second vibrating arm portion includes a fourth region, a fifth region, and a sixth region, which are sequentially arranged along a direction from the first base end portion to the second base end portion.
Front and back surfaces of the first region, both side surfaces of the second region, front and back surfaces of the third region, both side surfaces of the fourth region, front and back surfaces of the fifth region, and both side surfaces of the sixth region A first excitation electrode electrically connected to each other is formed;
On both side surfaces of the first region, front and back surfaces of the second region, both side surfaces of the third region, front and back surfaces of the fourth region, both side surfaces of the fifth region, and front and back surfaces of the sixth region A second excitation electrode electrically connected to each other is formed,
In the first vibrating arm portion and the second vibrating arm portion, a first lead electrode and a second lead are provided in an intermediate region sandwiched between two adjacent regions of the first region to the sixth region. Electrodes are formed,
The first extraction electrode is
One of the adjacent regions is extended from the first excitation electrode formed on the front surface or the back surface of one of the regions, branched at least bifurcated, and one of the branched electrodes is one of the other regions. Connected to the first excitation electrode formed on the side surface, the other branched electrode is connected to the first excitation electrode formed on the other side surface of the other region,
The second extraction electrode is
One of the adjacent regions is extended from the second excitation electrode formed on the front or back surface of one of the regions, branched at least bifurcated, and one branched electrode is one of the other regions. Connected to the second excitation electrode formed on the side surface, the other branched electrode is connected to the second excitation electrode formed on the other side surface of the other region,
The width of the portion of the first extraction electrode extending from the first excitation electrode is equal to or greater than the width of the first excitation electrode formed on the front surface or the back surface of the region,
A width of a portion of the second extraction electrode extending from the second excitation electrode is equal to or greater than a width of the second excitation electrode formed on the front surface or the back surface of the region. Type vibrating piece.

このような双音叉型振動片によれば、前記第１引出電極および前記第２引出電極の断線を防止することができ、高い信頼性を有することができる。 According to such a double tuning fork type resonator element, disconnection of the first extraction electrode and the second extraction electrode can be prevented, and high reliability can be achieved.

なお、本発明に係る記載では、「電気的に接続」という文言を、例えば、「特定の部材（以下「Ａ部材」という）に「電気的に接続」された他の特定の部材（以下「Ｂ部材」という）」などと用いている。本発明に係る記載では、この例のような場合に、Ａ部材とＢ部材とが、直接接して電気的に接続されているような場合と、Ａ部材とＢ部材とが、他の部材を介して電気的に接続されているような場合とが含まれるものとして、「電気的に接続」という文言を用いている。 In the description according to the present invention, the term “electrically connected” is used, for example, as another specific member (hereinafter “electrically connected” to “specific member (hereinafter referred to as“ A member ”)”. B member "))" and the like. In the description according to the present invention, in the case of this example, the case where the A member and the B member are in direct contact and electrically connected, and the A member and the B member are the other members. The term “electrically connected” is used as a case where the case where the terminals are electrically connected to each other is included.

［適用例２］
適用例１において、
前記第１領域の裏面、前記第３領域の表面、および前記第５領域の表裏面に形成された前記第１励振電極は、前記第１引出電極に近づくにつれて幅が大きくなる第１テーパー部を有し、
前記第１テーパー部は、前記第１引出電極に接続し、
前記第２領域の表裏面、前記第４領域の裏面、および前記第６領域の表面に形成された前記第２励振電極は、前記第２引出電極に近づくにつれて幅が大きくなる第２テーパー部を有し、
前記第２テーパー部は、前記第２引出電極に接続している、双音叉型振動片。 [Application Example 2]
In application example 1,
The first excitation electrode formed on the back surface of the first region, the front surface of the third region, and the front and back surfaces of the fifth region has a first taper portion whose width increases as it approaches the first extraction electrode. Have
The first tapered portion is connected to the first extraction electrode,
The second excitation electrode formed on the front and back surfaces of the second region, the back surface of the fourth region, and the surface of the sixth region has a second taper portion that increases in width as it approaches the second extraction electrode. Have
The second tapered portion is a double tuning fork type vibrating piece connected to the second extraction electrode.

このような双音叉型振動片によれば、前記第１テーパー部および前記第２テーパー部によって、電界集中を緩和することができる。例えば、テーパー部を有さず、励振電極と引出電極との境界の形状が角部（例えば直角となる部分）を有する場合は、該角部に電界が集中し、信頼性が低下する場合がある。 According to such a double tuning fork type resonator element, electric field concentration can be relaxed by the first tapered portion and the second tapered portion. For example, when there is no tapered portion and the shape of the boundary between the excitation electrode and the extraction electrode has a corner portion (for example, a right-angle portion), the electric field concentrates on the corner portion, and the reliability may decrease. is there.

［適用例３］
適用例２において、
前記第２領域、前記第４領域および前記第６領域の両側面に形成された前記第１励振電極は、それぞれ、前記第２領域、前記第４領域および前記第６領域の表裏面まで延在しており、
表面または裏面側から平面的にみて、前記第２領域、前記第４領域および前記第６領域の両側面から表裏面まで延在した前記第１励振電極と、前記第２領域、前記第４領域および前記第６領域の表裏面に形成された前記第２励振電極と、の間の距離は、それぞれ一定であり、
前記第１領域、前記第３領域および前記第５領域の両側面に形成された前記第２励振電極は、それぞれ、前記第１領域、前記第３領域および前記第５領域の表裏面まで延在しており、
表面または裏面側から平面的にみて、前記第１領域、前記第３領域および前記第５領域の両側面から表裏面まで延在した前記第２励振電極と、前記第１領域、前記第３領域および前記第５領域の表裏面に形成された前記第１励振電極と、の間の距離は、それぞれ一定である、双音叉型振動片。 [Application Example 3]
In application example 2,
The first excitation electrodes formed on both side surfaces of the second region, the fourth region, and the sixth region extend to the front and back surfaces of the second region, the fourth region, and the sixth region, respectively. And
The first excitation electrode extending from both side surfaces of the second region, the fourth region, and the sixth region to the front and back surfaces in plan view from the front surface or the back surface side, the second region, the fourth region And the distance between the second excitation electrode formed on the front and back surfaces of the sixth region is constant,
The second excitation electrodes formed on both side surfaces of the first region, the third region, and the fifth region extend to the front and back surfaces of the first region, the third region, and the fifth region, respectively. And
The second excitation electrode extending from both side surfaces of the first region, the third region, and the fifth region to the front and back surfaces in a plan view from the front surface or the back surface side; the first region, the third region; And the distance between the first excitation electrode formed on the front and back surfaces of the fifth region is constant, respectively.

このような双音叉型振動片によれば、前記第１励振電極と前記第２励振電極との間の電界の強さを一定に保つことができ、第１振動腕部および第２振動腕部の屈曲振動の安定化を図ることができる。 According to such a double tuning fork type resonator element, the strength of the electric field between the first excitation electrode and the second excitation electrode can be kept constant, and the first vibrating arm portion and the second vibrating arm portion It is possible to stabilize the bending vibration.

［適用例４］
適用例１ないし３のいずれか１つにおいて、
前記第１振動腕部および前記第２振動腕部は、前記領域の表裏面に形成された溝を有し、
前記溝の内壁には、前記第１励振電極または前記第２励振電極が設けられている、双音叉型振動片。 [Application Example 4]
In any one of Application Examples 1 to 3,
The first vibrating arm portion and the second vibrating arm portion have grooves formed on the front and back surfaces of the region,
A double tuning fork type resonator element in which the first excitation electrode or the second excitation electrode is provided on an inner wall of the groove.

このような双音叉型振動片によれば、電圧印加時に発生する電界を効率よく振動に変換できるため、ＣＩ値の増加を抑制することができる。 According to such a double tuning fork type resonator element, an electric field generated when a voltage is applied can be efficiently converted into vibration, so that an increase in CI value can be suppressed.

［適用例５］
基部と、
前記基部に連続する弾性部と、
前記弾性部に連続し前記弾性部によって支持された他の基部と、
前記基部および前記他の基部に固定された適用例１ないし４のいずれか１つに記載の双音叉型振動片と、
を含む、振動型センサー素子。 [Application Example 5]
The base,
An elastic part continuous to the base part;
Another base that is continuous with the elastic portion and supported by the elastic portion;
The double tuning fork type resonator element according to any one of Application Examples 1 to 4 fixed to the base and the other base;
Including a vibration type sensor element.

このような振動型センサー素子によれば、本発明に係る双音叉型振動片を有するので、高い信頼性を有することができる。 According to such a vibration type sensor element, since it has the double tuning fork type vibration piece according to the present invention, it can have high reliability.

［適用例６］
適用例５に記載の振動型センサー素子と、
前記振動型センサー素子が収容されたパッケージと、
を含む、振動型センサー。 [Application Example 6]
The vibration-type sensor element according to Application Example 5,
A package containing the vibration-type sensor element;
Including vibration sensor.

このような振動型センサーによれば、本発明に係る振動型センサー素子を有するので、高い信頼性を有することができる。 According to such a vibration-type sensor, since it has the vibration-type sensor element according to the present invention, it can have high reliability.

本実施形態に係る双音叉型振動片の構成を説明するための図。The figure for demonstrating the structure of the double tuning fork type vibration piece which concerns on this embodiment. 本実施形態に係る双音叉型振動片を模式的に示す断面図。Sectional drawing which shows typically the double tuning fork type vibration piece which concerns on this embodiment. 本実施形態に係る双音叉型振動片の構成を説明するための図。The figure for demonstrating the structure of the double tuning fork type vibration piece which concerns on this embodiment. 本実施形態に係る振動型センサー素子を模式的に示す斜視図。The perspective view which shows typically the vibration type sensor element which concerns on this embodiment. 本実施形態に係る振動型センサーを模式的に示す断面図。Sectional drawing which shows typically the vibration type sensor which concerns on this embodiment.

以下、本発明の好適な実施形態について、図面を参照しながら説明する。 Preferred embodiments of the present invention will be described below with reference to the drawings.

１．双音叉型振動片
まず、本実施形態に係る双音叉型振動片１００について、図面を参照しながら説明する。双音叉型振動片１００は、表裏関係にある第１の主面（一方の主面）および第２の主面（他方の主面）と、第１の主面および第２の主面に連結した２つの側面と、を有する構成である。図１（Ａ）は、双音叉型振動片１００を一方の主面（以下、「表面」ともいう。）側から見た平面図であって、双音叉型振動片１００の一方の主面（表面）側の構成を説明するための図である。図１（Ｂ）は、双音叉型振動片１００を一方の主面（表面）側から見た透視図であって、双音叉型振動片１００の他方の主面（以下、「裏面」ともいう。）側の構成を説明するための図である。以下、まず双音叉型振動片１００の形状等について説明し、次に双音叉型振動片１００に形成された励振電極、引出電極、端子の配置等について説明する。 1. First, a double tuning fork type vibrating piece 100 according to this embodiment will be described with reference to the drawings. The double tuning fork type resonator element 100 is connected to the first main surface (one main surface) and the second main surface (the other main surface), and the first main surface and the second main surface which are in a front-back relationship. And the two side surfaces. FIG. 1A is a plan view of the double tuning fork vibrating piece 100 as viewed from one main surface (hereinafter also referred to as “surface”), and one main surface ( It is a figure for demonstrating the structure of the surface side. FIG. 1B is a perspective view of the double tuning fork vibrating piece 100 as viewed from one main surface (front surface) side, and the other main surface of the double tuning fork vibrating piece 100 (hereinafter also referred to as “back surface”). .) Is a diagram for explaining the configuration on the side. Hereinafter, the shape and the like of the double tuning fork type vibrating piece 100 will be described first, and then the arrangement of excitation electrodes, extraction electrodes, terminals, etc. formed on the double tuning fork type vibrating piece 100 will be described.

１．１．双音叉型振動片の形状等
双音叉型振動片１００は、表面（図１（Ａ）参照）と、裏面（図１（Ｂ）参照）と、表面および裏面と接続する２つの側面と、を有する外形形状である。双音叉型振動片１００の材質としては、例えば、水晶、タンタル酸リチウム、ニオブ酸リチウムなどの圧電材料が挙げられる。 1.1. The shape of the double tuning fork type vibrating piece, etc. The double tuning fork type vibrating piece 100 has a front surface (see FIG. 1A), a back surface (see FIG. 1B), and two side surfaces connected to the front and back surfaces. It is an external shape. Examples of the material of the double tuning fork type resonator element 100 include piezoelectric materials such as quartz, lithium tantalate, and lithium niobate.

双音叉型振動片１００は、図１に示すように、第１振動腕部１０と、第２振動腕部２０と、第１基端部３０と、第２基端部４０と、を含む。 As shown in FIG. 1, the double tuning fork type vibrating piece 100 includes a first vibrating arm portion 10, a second vibrating arm portion 20, a first base end portion 30, and a second base end portion 40.

（１）第１振動腕部および第２振動腕部
第１振動腕部１０および第２振動腕部２０は、例えば四角柱形状であって、並列して第１基端部３０から第２基端部４０まで延在している。振動腕部１０，２０は、互いに対向する側面である内側面（内側の側面）と、内側面とは反対側の側面である外側面（外側の側面）と、を有する。振動腕部１０，２０は、互いに離間しており、双音叉型振動片１００の中心軸（第１基端部３０から第２基端部４０に向かう方向（Ｙ軸方向）に延びる中心軸、図示せず）に関して対称に配置されていることができる。 (1) First vibrating arm portion and second vibrating arm portion The first vibrating arm portion 10 and the second vibrating arm portion 20 have, for example, a quadrangular prism shape, and are arranged in parallel from the first base end 30 to the second base. It extends to the end 40. The vibrating arms 10 and 20 have an inner surface (inner side surface) that is a side surface facing each other and an outer surface (outer side surface) that is a side surface opposite to the inner surface. The vibrating arm portions 10 and 20 are spaced apart from each other, and a central axis extending in a direction from the first base end portion 30 to the second base end portion 40 (Y-axis direction) of the double tuning fork vibrating piece 100, (Not shown).

第１振動腕部１０は、第１基端部３０から第２基端部４０に向かう方向に沿って順に並ぶ、第１領域１２、第２領域１４および第３領域１６を有する。第２振動腕部２０は、第１基端部３０から第２基端部４０に向かう方向に沿って順に並ぶ、第４領域２２、第５領域２４および第６領域２６を有する。図示の例では、第１領域１２および第４領域２２は、第１基端部３０に隣接している。また、第３領域１６および第６領域２６は、第２基端部４０に隣接している。第１領域１２、第３領域１６、第４領域２２および第６領域２６は、振動腕部１０，２０の端部に設けられた領域ともいる。第２領域１４および第５領域２４は、振動腕部１０，２０の中央部に設けられた領域ともいえる。図示の例では、第２領域１４および第５領域２４の長さ（Ｙ軸方向の長さ）は、第１領域１２、第３領域１６、第４領域２２および第６領域２６の長さより大きい。各領域１２，１４，１６，２２，２４，２６には、励振電極１１０,１２０が形成されている。振動腕部１０，２０は、励振電極１１０，１２０に印加された電圧によって、屈曲振動することができる。 The first vibrating arm unit 10 includes a first region 12, a second region 14, and a third region 16 that are arranged in order along the direction from the first base end 30 toward the second base end 40. The second vibrating arm portion 20 has a fourth region 22, a fifth region 24, and a sixth region 26 that are arranged in order along the direction from the first base end portion 30 toward the second base end portion 40. In the illustrated example, the first region 12 and the fourth region 22 are adjacent to the first base end 30. Further, the third region 16 and the sixth region 26 are adjacent to the second base end portion 40. The first region 12, the third region 16, the fourth region 22, and the sixth region 26 are also regions provided at the ends of the vibrating arm portions 10 and 20. It can be said that the second region 14 and the fifth region 24 are regions provided in the central portion of the vibrating arm portions 10 and 20. In the illustrated example, the lengths of the second region 14 and the fifth region 24 (the length in the Y-axis direction) are larger than the lengths of the first region 12, the third region 16, the fourth region 22, and the sixth region 26. . Excitation electrodes 110 and 120 are formed in the respective regions 12, 14, 16, 22, 24 and 26. The vibrating arm portions 10 and 20 can be flexibly vibrated by the voltage applied to the excitation electrodes 110 and 120.

振動部１０，２０は、さらに、中間領域３を有する。中間領域３は、第１領域１２から第６領域２６のうちの隣り合う２つの領域に挟まれている。より具体的には、中間領域３は、第１領域１２と第２領域１４との間と、第２領域１４と第３領域１６との間と、第４領域２２と第５領域２４との間と、第５領域２４と第６領域２６との間と、に設けられている。中間領域３には、引出電極１１２，１２２が形成されている。 The vibration units 10 and 20 further have an intermediate region 3. The intermediate region 3 is sandwiched between two adjacent regions of the first region 12 to the sixth region 26. More specifically, the intermediate region 3 is between the first region 12 and the second region 14, between the second region 14 and the third region 16, and between the fourth region 22 and the fifth region 24. And between the fifth region 24 and the sixth region 26. In the intermediate region 3, extraction electrodes 112 and 122 are formed.

ここで、図２は、振動腕部１０，２０を模式的に示す図１のＩＩ−ＩＩ線断面図である。振動腕部１０，２０は、図２に示すように、溝１５を有していてもよい。溝１５は、例えば、各領域１２，１４，１６，２２，２４，２６の表裏面に形成されている。溝１５の断面形状は、図示の例では矩形であるが、特にこれに限定されるものではない。溝１５によって、振動腕部１０，２０は、Ｈ型の断面形状を有することができる。溝１５の内壁には、第１励振電極１１０または第２励振電極１２０が形成されている。これにより、電圧印加時の振動損失が低減されるため、双音叉型振動片１００は、ＣＩ値の増加を抑制することができる。なお、図１では、便宜上、溝１５の図示を省略している。 Here, FIG. 2 is a cross-sectional view taken along the line II-II of FIG. 1 schematically showing the vibrating arm portions 10 and 20. As shown in FIG. 2, the vibrating arm portions 10 and 20 may have a groove 15. The groove 15 is formed, for example, on the front and back surfaces of each region 12, 14, 16, 22, 24, 26. The cross-sectional shape of the groove 15 is rectangular in the illustrated example, but is not particularly limited thereto. By the groove 15, the vibrating arm portions 10 and 20 can have an H-shaped cross-sectional shape. A first excitation electrode 110 or a second excitation electrode 120 is formed on the inner wall of the groove 15. Thereby, since the vibration loss at the time of a voltage application is reduced, the double tuning fork type vibrating piece 100 can suppress the increase in CI value. In FIG. 1, the grooves 15 are not shown for convenience.

（２）第１基端部および第２基端部
第１基端部３０は、図１に示すように、第１振動腕部１０および第２振動腕部２０の一方側の端部に接続されている。第２基端部４０は、第１振動腕部１０および第２振動腕部２０の他方側の端部に接続されている。すなわち、基端部３０，４０は、振動腕部１０，２０を挟持しているともいえる。 (2) 1st base end part and 2nd base end part The 1st base end part 30 is connected to the edge part of the one side of the 1st vibration arm part 10 and the 2nd vibration arm part 20, as shown in FIG. Has been. The second base end portion 40 is connected to the other ends of the first vibrating arm portion 10 and the second vibrating arm portion 20. That is, it can be said that the base end portions 30 and 40 sandwich the vibrating arm portions 10 and 20.

基端部３０，４０は、支持部３２，４２と、接続部３４，４４と、くびれ部３６，４６と、を有することができる。支持部３２，４２は、双音叉型振動片１００を、例えば基部２０２および質量部２０６（図４参照）に支持（固定）するための部位である。接続部３４，４４は、支持部３２，４２と振動腕部１０，２０との間に位置し、振動腕部１０，２０と基端部３０，４０とが一体になるように振動腕部１０，２０と接続する部位である。くびれ部３６，４６は、支持部３２，４２と接続部３４，４４との間に位置する部位である。くびれ部３６，４６の幅（Ｘ軸方向の長さ）は、支持部３２，４２の幅および接続部３４，４４の幅より小さい。くびれ部３６，４６によって、振動腕部１０，２０により励起された振動の漏れや、支持部３２，４２から伝搬される外部応力の影響を抑制することができる。 The proximal end portions 30 and 40 can have support portions 32 and 42, connection portions 34 and 44, and constricted portions 36 and 46. The support parts 32 and 42 are parts for supporting (fixing) the double tuning fork type vibrating piece 100 on, for example, the base part 202 and the mass part 206 (see FIG. 4). The connecting portions 34 and 44 are located between the support portions 32 and 42 and the vibrating arm portions 10 and 20, and the vibrating arm portion 10 and the proximal end portions 30 and 40 are integrated so that the vibrating arm portions 10 and 20 and the base end portions 30 and 40 are integrated. , 20 are connected to each other. The constricted portions 36 and 46 are portions located between the support portions 32 and 42 and the connection portions 34 and 44. The width (length in the X-axis direction) of the constricted portions 36 and 46 is smaller than the width of the support portions 32 and 42 and the width of the connection portions 34 and 44. By the constricted portions 36 and 46, it is possible to suppress the leakage of vibration excited by the vibrating arm portions 10 and 20 and the influence of external stress propagated from the support portions 32 and 42.

なお、図示はしないが、支持部３２，４２およびくびれ部３６，４６は、第１振動腕部１０と第２振動腕部２０との間に設けられていてもよい。すなわち、図示の例では、支持部３２およびくびれ部３６は、接続部３４から＋Ｙ軸方向に延出しているが、接続部３４から−Ｙ軸方向に延出していてもよい。同様に、支持部４２およびくびれ部４６は、接続部４４から＋Ｙ軸方向に延出していてもよい。このような形状により、双音叉型振動片１００のＹ軸方向の長さを小さくすることができ、双音叉型振動片１００の小型化を図ることができる。 Although not shown, the support portions 32 and 42 and the constricted portions 36 and 46 may be provided between the first vibrating arm portion 10 and the second vibrating arm portion 20. That is, in the illustrated example, the support portion 32 and the constricted portion 36 extend from the connection portion 34 in the + Y axis direction, but may extend from the connection portion 34 in the −Y axis direction. Similarly, the support portion 42 and the constricted portion 46 may extend from the connecting portion 44 in the + Y axis direction. With such a shape, the length of the double tuning fork type vibrating piece 100 in the Y-axis direction can be reduced, and the size of the double tuning fork type vibrating piece 100 can be reduced.

１．２．励振電極、引出電極、端子の配置等
双音叉型振動片１００には、図１に示すように、第１励振電極１１０と、第２励振電極１２０と、第１引出電極１１２と、第２引出電極１２２と、第１端子１１４と、第２端子１２４と、が形成されている。なお、便宜上、図１において、第１励振電極１１０、第１引出電極１１２および第１端子１１４をクロス斜線で示し、第２励振電極１２０、第２引出電極１２２および第２端子１２４を左下斜線で示している。 1.2. Excitation Electrode, Extraction Electrode, Terminal Arrangement, etc. As shown in FIG. 1, the double tuning fork resonator element 100 includes a first excitation electrode 110, a second excitation electrode 120, a first extraction electrode 112, and a second extraction electrode. An electrode 122, a first terminal 114, and a second terminal 124 are formed. For convenience, in FIG. 1, the first excitation electrode 110, the first extraction electrode 112, and the first terminal 114 are indicated by cross diagonal lines, and the second excitation electrode 120, the second extraction electrode 122, and the second terminal 124 are indicated by lower left diagonal lines. Show.

（１）第１励振電極および第２励振電極
第１励振電極１１０および第２例振電極１２０は、第１振動腕部１０および第２振動腕部２０に形成されている。より具体的には、第１励振電極１１０は、第１領域１２の表面および裏面（以下、「表裏面」ともいう。）、第２領域１４の内側面および外側面（以下、「両側面」ともいう。）、第３領域１６の表裏面、第４領域２２の両側面、第５領域２４の表裏面、および第６領域２６の両側面に形成されている。領域１２，１４，１６，２２，２４，２６に形成された第１励振電極１１０は、第１引出電極１１２によって互いに電気的に接続されている。また、第２励振電極１２０は、第１領域１２の両側面、第２領域１４の表裏面、第３領域１６の両側面、第４領域２２の表裏面、第５領域２４の両側面、および第６領域２６の表裏面に形成されている。領域１２，１４，１６，２２，２４，２６に形成された第２励振電極１２０は、第２引出電極１２２によって電気的に接続されている。 (1) First Excitation Electrode and Second Excitation Electrode The first excitation electrode 110 and the second example excitation electrode 120 are formed on the first vibrating arm portion 10 and the second vibrating arm portion 20. More specifically, the first excitation electrode 110 includes a front surface and a back surface (hereinafter, also referred to as “front and back surfaces”) of the first region 12, an inner surface and an outer surface (hereinafter, “both side surfaces”) of the second region 14. It is also formed on the front and back surfaces of the third region 16, both side surfaces of the fourth region 22, front and back surfaces of the fifth region 24, and both side surfaces of the sixth region 26. The first excitation electrodes 110 formed in the regions 12, 14, 16, 22, 24 and 26 are electrically connected to each other by the first extraction electrode 112. The second excitation electrode 120 includes both side surfaces of the first region 12, front and back surfaces of the second region 14, both side surfaces of the third region 16, front and back surfaces of the fourth region 22, both side surfaces of the fifth region 24, and It is formed on the front and back surfaces of the sixth region 26. The second excitation electrodes 120 formed in the regions 12, 14, 16, 22, 24, and 26 are electrically connected by the second extraction electrode 122.

第１励振電極１１０および第２励振電極１２０は、互いに異なる電位を有することができる。すなわち、領域１２，１４，１６，２２，２４，２６の各々において、表裏面と両側面とには、互いに異なる電位の励振電極が形成されている。そして、振動腕部１０，２０の表裏面には、互いに異なる電位の励振電極１１０，１２０が交互に形成されている。また、振動腕部の両側面には、互いに異なる電位の励振電極１１０，１２０が交互に形成されている。図示の例では、励振電極１１０，１２０は、双音叉型振動片１００のＹ軸方向に沿う中心線（図示せず）に関して、対称となるように配置されている。このような励振電極１１０，１２０の配置によって、振動腕部１０，２０は、双音叉型振動片１００のＹ軸方向に沿う中心線に関して対称となるように、効率よく屈曲振動することができる。 The first excitation electrode 110 and the second excitation electrode 120 may have different potentials. That is, in each of the regions 12, 14, 16, 22, 24, and 26, excitation electrodes having different potentials are formed on the front and back surfaces and both side surfaces. Excitation electrodes 110 and 120 having different potentials are alternately formed on the front and back surfaces of the vibrating arm portions 10 and 20. In addition, excitation electrodes 110 and 120 having different potentials are alternately formed on both side surfaces of the vibrating arm portion. In the illustrated example, the excitation electrodes 110 and 120 are disposed so as to be symmetric with respect to a center line (not shown) along the Y-axis direction of the double tuning fork resonator element 100. With such an arrangement of the excitation electrodes 110 and 120, the vibrating arm portions 10 and 20 can efficiently bend and vibrate so as to be symmetric with respect to the center line along the Y-axis direction of the double tuning fork vibrating piece 100.

図２に示すように、振動腕部１０，２０が溝１５を有する場合は、領域１２，１４，１６，２２，２４，２６の表裏面に形成された励振電極１１０，１２０は、溝１５の内壁に形成されている。また、領域１２，１４，１６，２２，２４，２６の両側面に形成された励振電極１１０，１２０は、図２に示すように、その一部が表裏面にまで延出していてもよい。 As shown in FIG. 2, when the vibrating arm portions 10 and 20 have the grooves 15, the excitation electrodes 110 and 120 formed on the front and back surfaces of the regions 12, 14, 16, 22, 24, and 26 It is formed on the inner wall. Moreover, as shown in FIG. 2, the excitation electrodes 110 and 120 formed on both side surfaces of the regions 12, 14, 16, 22, 24 and 26 may partially extend to the front and back surfaces.

励振電極１１０，１２０の材質としては、例えば、双音叉型振動片１００側からクロム、金の順序で積層したものなどを用いることができる。励振電極１１０，１２０は、例えば、スパッタ法、真空蒸着法などにより形成されることができる。 As the material for the excitation electrodes 110 and 120, for example, a material in which chromium and gold are laminated in this order from the double tuning fork type vibrating piece 100 side can be used. The excitation electrodes 110 and 120 can be formed by, for example, a sputtering method or a vacuum deposition method.

（２）第１引出電極および第２引出電極
第１引出電極１１２および第２引出電極１２２は、図１に示すように、第１振動腕部１０および第２振動腕部２０における、第１領域１２から第６領域２６のうちの隣り合う２つの領域に挟まれた中間領域３に形成されている。より具体的には、第１引出電極１１２は、隣り合う領域のうちの、一方の領域の表面または裏面に形成された第１励振電極１１０から延出し、二又に分岐して、他方の領域の両側面に形成された第１励振電極１１０に接続している。また、第２引出電極１２２は、隣り合う領域のうちの、一方の領域の表面または裏面に形成された第２励振電極１２０から延出し、二又に分岐して、他方の領域の両側面に形成された第２励振電極１２０に接続している。以下、引出電極１１２,１２２の配置について、より詳細に説明する。 (2) First Extraction Electrode and Second Extraction Electrode As shown in FIG. 1, the first extraction electrode 112 and the second extraction electrode 122 are the first region in the first vibrating arm portion 10 and the second vibrating arm portion 20. It is formed in an intermediate region 3 sandwiched between two adjacent regions of the 12th to sixth regions 26. More specifically, the first extraction electrode 112 extends from the first excitation electrode 110 formed on the front surface or the back surface of one of the adjacent regions, branches into two, and the other region Are connected to first excitation electrodes 110 formed on both side surfaces of the first excitation electrode 110. The second extraction electrode 122 extends from the second excitation electrode 120 formed on the front surface or the back surface of one of the adjacent regions, branches into two, and is formed on both side surfaces of the other region. It is connected to the formed second excitation electrode 120. Hereinafter, the arrangement of the extraction electrodes 112 and 122 will be described in more detail.

図１（Ａ）に示すように、第１領域１２と第２領域１４との間に位置する中間領域３の表面には、第２引出電極１２２が形成されている。該第２引出電極１２２は、第２領域１４の表面に形成された第２励振電極１２０から、第１領域１２に向けて（＋Ｙ方向に）延出している。＋Ｙ方向に延出した第２引出電極１２２は、二又に分岐して、例えば±Ｘ方向にそれぞれ延出し、第１振動腕部１０の両側面（中間領域３の両側面）に至っている。そして、分岐した一方の第２引出電極１２２は、第１領域１２の一方の側面（例えば内側面）に形成された第２励振電極１２０と接続し、分岐した他方の第２引出電極１２２は、第１領域１２の他方の側面（例えば外側面）に形成された第２励振電極１２０と接続している。 As shown in FIG. 1A, a second extraction electrode 122 is formed on the surface of the intermediate region 3 located between the first region 12 and the second region 14. The second extraction electrode 122 extends from the second excitation electrode 120 formed on the surface of the second region 14 toward the first region 12 (in the + Y direction). The second extraction electrode 122 extending in the + Y direction is bifurcated, extends in the ± X direction, for example, and reaches both side surfaces of the first vibrating arm portion 10 (both side surfaces of the intermediate region 3). One branched second extraction electrode 122 is connected to the second excitation electrode 120 formed on one side surface (for example, the inner surface) of the first region 12, and the other branched second extraction electrode 122 is This is connected to the second excitation electrode 120 formed on the other side surface (for example, the outer surface) of the first region 12.

同様に、第２領域１４と第３領域１６との間の中間領域３の表面には第１引出電極１１２が形成され、第３領域１６の表面に形成された第１励振電極１１０と、第２領域１４の両側面に形成された第１励振電極１１０と、を接続している。また、第４領域２２と第５領域２４との間の中間領域３の表面には第１引出電極１１２が形成され、第５領域２４の表面に形成された第１励振電極１１０と、第４領域２２の両側面に形成された第１励振電極１１０と、を接続している。また、第５領域２４と第６領域２６との間の中間領域３には第２引出電極１２２が形成され、第６領域２６の表面に形成された第２励振電極１２０と、第５領域２４の両側面に形成された第２励振電極１２０と、を接続している。 Similarly, a first extraction electrode 112 is formed on the surface of the intermediate region 3 between the second region 14 and the third region 16, and the first excitation electrode 110 formed on the surface of the third region 16, The first excitation electrodes 110 formed on both side surfaces of the two regions 14 are connected. Further, a first extraction electrode 112 is formed on the surface of the intermediate region 3 between the fourth region 22 and the fifth region 24, and the first excitation electrode 110 formed on the surface of the fifth region 24, The first excitation electrodes 110 formed on both side surfaces of the region 22 are connected. In addition, a second extraction electrode 122 is formed in the intermediate region 3 between the fifth region 24 and the sixth region 26, and the second excitation electrode 120 formed on the surface of the sixth region 26 and the fifth region 24. Are connected to the second excitation electrodes 120 formed on both side surfaces.

図１（Ｂ）に示すように、第１領域１２と第２領域１４との間に位置する中間領域３の裏面には、第１引出電極１１２が形成されている。該第１引出電極１１２は、第１領域１２の裏面に形成された第１励振電極１１０から、第２領域１４に向けて（−Ｙ方向に）延出している。−Ｙ方向に延出した第１引出電極１１２は、二又に分岐して、例えば±Ｘ方向にそれぞれ延出し、第１振動腕部１０の両側面（中間領域３の両側面）に至っている。そして、分岐した一方の第１引出電極１１２は、第２領域１４の一方の側面（例えば内側面）に形成された第１励振電極１１０と接続し、分岐した他方の第１引出電極１１２は、第２領域１４の他方の側面（例えば外側面）に形成された第１励振電極１１０と接続している。 As shown in FIG. 1B, a first extraction electrode 112 is formed on the back surface of the intermediate region 3 located between the first region 12 and the second region 14. The first extraction electrode 112 extends from the first excitation electrode 110 formed on the back surface of the first region 12 toward the second region 14 (in the −Y direction). The first extraction electrode 112 extending in the −Y direction branches bifurcated, for example, extends in the ± X direction, and reaches both side surfaces (both side surfaces of the intermediate region 3) of the first vibrating arm portion 10. . One branched first extraction electrode 112 is connected to the first excitation electrode 110 formed on one side surface (for example, the inner surface) of the second region 14, and the other branched first extraction electrode 112 is: It is connected to the first excitation electrode 110 formed on the other side surface (for example, the outer surface) of the second region 14.

同様に、第２領域１４と第３領域１６との間の中間領域３の裏面には第２引出電極１２２が形成され、第２領域１４の裏面に形成された第２励振電極１２０と、第３領域１６の両側面に形成された第２励振電極１２０と、を接続している。また、第４領域２２と第５領域２４との間の中間領域３の裏面には第２引出電極１２２が形成され、第４領域２２の裏面に形成された第２励振電極１２０と、第５領域２４の両側面に形成された第２励振電極１２０と、を接続している。また、第５領域２４と第６領域２６との間の中間領域３には第１引出電極１１２が形成され、第５領域２４の裏面に形成された第１励振電極１１０と、第６領域２６の両側面に形成された第１励振電極１１０と、を接続している。 Similarly, a second extraction electrode 122 is formed on the back surface of the intermediate region 3 between the second region 14 and the third region 16, the second excitation electrode 120 formed on the back surface of the second region 14, The second excitation electrodes 120 formed on both side surfaces of the three regions 16 are connected. Further, a second extraction electrode 122 is formed on the back surface of the intermediate region 3 between the fourth region 22 and the fifth region 24, and the second excitation electrode 120 formed on the back surface of the fourth region 22, The second excitation electrodes 120 formed on both side surfaces of the region 24 are connected. The first extraction electrode 112 is formed in the intermediate region 3 between the fifth region 24 and the sixth region 26, and the first excitation electrode 110 formed on the back surface of the fifth region 24 and the sixth region 26. Are connected to the first excitation electrodes 110 formed on both side surfaces.

以上のとおり、振動腕部１０，２０の中間領域３の表面には、第１引出電極１１２または第２引出電極１２２のいずれか一方のみが形成されている。同様に、振動腕部１０，２０の中間領域３の裏面には、第１引出電極１１２または第２引出電極１２２のいずれか一方のみが形成されている。 As described above, only one of the first extraction electrode 112 and the second extraction electrode 122 is formed on the surface of the intermediate region 3 of the vibrating arm portions 10 and 20. Similarly, only one of the first extraction electrode 112 and the second extraction electrode 122 is formed on the back surface of the intermediate region 3 of the vibrating arm portions 10 and 20.

ここで、図３は、第２領域１４の表面に形成された第２励振電極１２０と、第１領域１２と第２領域１４との間の中間領域３の表面に形成された引出電極１２２と、の接続部付近を模式的に示す平面図である。図３は、図１（Ａ）の点線円近傍の拡大図ともいえる。なお、図３では、便宜上、溝１５の図示を省略している。 Here, FIG. 3 shows a second excitation electrode 120 formed on the surface of the second region 14, and an extraction electrode 122 formed on the surface of the intermediate region 3 between the first region 12 and the second region 14. It is a top view which shows typically the connection part vicinity of these. FIG. 3 can also be said to be an enlarged view of the vicinity of the dotted circle in FIG. In FIG. 3, the grooves 15 are not shown for convenience.

図３に示すように平面視において、第２引出電極１２２のうちの、第２励振電極１２０から＋Ｙ方向に延出している部分（分岐する前の部分ともいえる）の幅の大きさ（Ｘ軸方向の長さ）Ｗ_１２２は、第２領域１４の表面に形成された第２励振電極１２０の幅の大きさＷ_１２０以上である。第２領域１４の表面に形成された第２励振電極１２０は、テーパー部１２０ａを有することができる。テーパー部１２０ａは、図３に示すように平面視において、第２引出電極１２２に近づくにつれて（＋Ｙ方向に向かうにつれて）幅が大きくなるテーパー形状を有する。テーパー部１２０ａは、引出電極１２２と接続している。図示の例では、テーパー部１２０ａの輪郭は、直線であるが、曲線であってもよい。図３に示すように平面視において、第２領域１４の表面に形成された第２励振電極１２０と、第２領域１４の両側面から表面にまで延在している第１励振電極１１０と、の間の距離Ｌは、一定であってもよい。すなわち、両側面から表面にまで延在している第１励振電極１１０の一部は、テーパー形状を有していてもよい。 As shown in FIG. 3, the width (X-axis) of a portion (also referred to as a portion before branching) of the second extraction electrode 122 extending in the + Y direction from the second excitation electrode 120 in the plan view. The length in the direction (W ₁₂₂ ) is equal to or greater than the width W _{120 of} the second excitation electrode 120 formed on the surface of the second region 14. The second excitation electrode 120 formed on the surface of the second region 14 may have a tapered portion 120a. As shown in FIG. 3, the tapered portion 120 a has a tapered shape whose width increases as it approaches the second extraction electrode 122 (in the + Y direction) in plan view. The tapered portion 120a is connected to the extraction electrode 122. In the illustrated example, the outline of the tapered portion 120a is a straight line, but may be a curved line. As shown in FIG. 3, in plan view, the second excitation electrode 120 formed on the surface of the second region 14, the first excitation electrode 110 extending from both side surfaces of the second region 14 to the surface, The distance L between may be constant. That is, a part of the first excitation electrode 110 extending from both side surfaces to the surface may have a tapered shape.

上記の図３を参照して説明した内容は、第１領域１２の裏面、第３領域１６の表面、および第５領域２４の表裏面に形成された第１励振電極１１０と、該第１励振電極１１０と接続する第１引出電極１１２と、の関係について適用することができる。また、上記の図３を参照して説明した内容は、第２領域１４の表裏面、第４領域２２の裏面、および第６領域２６の表面に形成された第２励振電極１２０と、該第２励振電極１２０と接続する第２引出電極１２２と、の関係について適用することができる。 The contents described with reference to FIG. 3 described above include the first excitation electrode 110 formed on the back surface of the first region 12, the surface of the third region 16, and the front and back surfaces of the fifth region 24, and the first excitation. This can be applied to the relationship with the first extraction electrode 112 connected to the electrode 110. Also, the contents described with reference to FIG. 3 described above include the second excitation electrode 120 formed on the front and back surfaces of the second region 14, the back surface of the fourth region 22, and the surface of the sixth region 26, The present invention can be applied to the relationship with the second extraction electrode 122 connected to the two excitation electrodes 120.

なお、引出電極１１２,１２２の材質および製造方法としては、例えば、励振電極１１０,１２０の説明で列挙した材質および製造方法が適用できる。 In addition, as a material and manufacturing method of the extraction electrodes 112 and 122, the material and manufacturing method enumerated by description of the excitation electrodes 110 and 120 are applicable, for example.

（３）第１端子および第２端子
第１端子１１４および第２端子１２４は、図１に示すように、例えば、支持部３２の表面に形成されている。図示はしないが、端子１１４，１２４は、支持部３２の裏面に形成されていてもよいし、支持部４２に形成されていてもよい。端子１１４,１２４は、互いに離間して形成されており、その形状は特に限定されない。図示の例では、第１端子１１４と第２端子１２４とは、同じ（ほぼ同じ）面積を有している。 (3) 1st terminal and 2nd terminal As shown in FIG. 1, the 1st terminal 114 and the 2nd terminal 124 are formed in the surface of the support part 32, for example. Although not shown, the terminals 114 and 124 may be formed on the back surface of the support portion 32 or may be formed on the support portion 42. The terminals 114 and 124 are formed apart from each other, and the shape thereof is not particularly limited. In the illustrated example, the first terminal 114 and the second terminal 124 have the same (substantially the same) area.

第１端子１１４は、図１に示すように、接続部３４およびくびれ部３６に形成された第１配線１１６を介して、第１領域１２の表面に形成された第１励振電極１１０、および第４領域２２の外側面に形成された第１励振電極１１０と接続されていてもよい。また、第２端子１２４は、接続部３４およびくびれ部３６に形成された第２配線１２６を介して、第１領域１２の外側面に形成された第２励振電極１２０と接続されていてもよい。 As shown in FIG. 1, the first terminal 114 includes the first excitation electrode 110 formed on the surface of the first region 12 through the first wiring 116 formed in the connection portion 34 and the constricted portion 36, and the first terminal 114. The first excitation electrode 110 formed on the outer surface of the four regions 22 may be connected. Further, the second terminal 124 may be connected to the second excitation electrode 120 formed on the outer surface of the first region 12 via the second wiring 126 formed in the connection portion 34 and the constricted portion 36. .

双音叉型振動片１００では、第１端子１１４と第２端子１２４との間に駆動信号を印加することで、各領域１２，１４，１６，２２，２４，２６に形成された第１励振電極１１０と第２励振電極１２０との間に電界を生じさせ、第１振動腕部１０および第２振動腕部２０を屈曲振動させることができる。 In the double tuning fork resonator element 100, the first excitation electrode formed in each of the regions 12, 14, 16, 22, 24, and 26 by applying a drive signal between the first terminal 114 and the second terminal 124. An electric field is generated between 110 and the second excitation electrode 120, and the first vibrating arm 10 and the second vibrating arm 20 can be flexibly vibrated.

なお、端子１１４,１２４の材質および製造方法としては、例えば、励振電極１１０,１２０の説明で列挙した材質および製造方法が適用できる。 As materials and manufacturing methods of the terminals 114 and 124, for example, the materials and manufacturing methods listed in the description of the excitation electrodes 110 and 120 can be applied.

本実施形態に係る双音叉型振動片１００は、例えば、以下の特徴を有する。 The double tuning fork type vibrating piece 100 according to the present embodiment has, for example, the following characteristics.

双音叉型振動片１００によれば、第１引出電極１１２は、隣り合う領域のうちの、一方の領域の表面または裏面に形成された第１励振電極１１０から延出し、二又に分岐して、他方の領域の両側面に形成された第１励振電極１１０に接続している。第２引出電極１２２についても、第１引出電極１１２の説明と同様の内容が適用できる。すなわち、振動腕部１０，２０の隣り合う領域間の表裏面には、第１引出電極１１２または第２引出電極１２２のいずれか一方のみが形成されている。このような引出電極１１２，１２２の配置により、上述のとおり、引出電極１１２，１２２の励振電極１１０，１２０から延出している部分の幅の大きさを、励振電極１１０，１２０の幅の大きさ以上とすることができる。そのため、引出電極１１０，１２０の断線を抑制することができる。 According to the double tuning fork resonator element 100, the first extraction electrode 112 extends from the first excitation electrode 110 formed on the front surface or the back surface of one of the adjacent regions, and is bifurcated. The first excitation electrode 110 formed on both side surfaces of the other region is connected. The same contents as those described for the first extraction electrode 112 can be applied to the second extraction electrode 122. That is, only one of the first extraction electrode 112 and the second extraction electrode 122 is formed on the front and back surfaces between adjacent regions of the vibrating arm portions 10 and 20. With the arrangement of the extraction electrodes 112 and 122, as described above, the width of the portion of the extraction electrodes 112 and 122 extending from the excitation electrodes 110 and 120 is set to the width of the excitation electrodes 110 and 120. This can be done. Therefore, disconnection of the extraction electrodes 110 and 120 can be suppressed.

特に、引出電極１１０，１２０は、斜め露光技術によりパターニングされる場合があり、引出電極１１２，１２２の幅の大きさを制御し難く、引出電極１１２，１２２の幅が小さくなってしまう場合がある。斜め露光技術とは、双音叉型振動片１００の表裏面に対し、例えば紫外線を斜めに照射させる技術である。すなわち、双音叉型振動片１００の外形を形成した後に、全面に電極膜（図示せず）を形成し、さらに全面にレジスト（図示せず）を塗布するが、中間領域３の両側面のレジストを露光するために、中間領域３では斜め露光を行う。その際に、引出電極の幅が小さくなり断線してしまう場合があるが、本実施形態に係る双音叉型振動片１００では、引出電極１１０，１２０の幅を大きく設計することができるので、断線を防止することができる。また、引出電極１１２，１２２の電気抵抗の増加を抑制することができる。したがって、双音叉型振動片１００は、高い信頼性を有することができる。 In particular, the extraction electrodes 110 and 120 may be patterned by an oblique exposure technique, the width of the extraction electrodes 112 and 122 may be difficult to control, and the width of the extraction electrodes 112 and 122 may be reduced. . The oblique exposure technique is a technique in which, for example, ultraviolet rays are obliquely applied to the front and back surfaces of the double tuning fork type vibrating piece 100. That is, after forming the outer shape of the double tuning fork type vibrating piece 100, an electrode film (not shown) is formed on the entire surface, and a resist (not shown) is applied to the entire surface. Is exposed in the intermediate area 3 at an angle. At this time, the width of the extraction electrode may be reduced and disconnection may occur, but in the double tuning fork type resonator element 100 according to the present embodiment, the width of the extraction electrodes 110 and 120 can be designed to be large. Can be prevented. In addition, an increase in electrical resistance of the extraction electrodes 112 and 122 can be suppressed. Therefore, the double tuning fork type resonator element 100 can have high reliability.

双音叉型振動片１００によれば、上述のとおり、励振電極１１０，１２０は、引出電極１１２，１２２に近づくにつれて幅が大きくなるテーパー部１１０ａ，１２０ａを有することができる。テーパー部１１０ａ，１２０ａは、引出電極１１２，１２２と接続していることができる。そのため、励振電極１１０，１２０から引出電極１１２，１２２に向けて徐々に幅が大きくなるので、電界集中を緩和することができる。例えば、テーパー部を有さず、励振電極と引出電極との境界の形状が角部（例えば直角となる部分）を有する場合は、該角部に電界が集中し、信頼性が低下する場合がある。 According to the double tuning fork resonator element 100, as described above, the excitation electrodes 110 and 120 can have the tapered portions 110 a and 120 a that increase in width as they approach the extraction electrodes 112 and 122. The tapered portions 110 a and 120 a can be connected to the extraction electrodes 112 and 122. Therefore, since the width gradually increases from the excitation electrodes 110 and 120 toward the extraction electrodes 112 and 122, electric field concentration can be reduced. For example, when there is no tapered portion and the shape of the boundary between the excitation electrode and the extraction electrode has a corner portion (for example, a right-angle portion), the electric field concentrates on the corner portion, and the reliability may decrease. is there.

双音叉型振動片１００によれば、上述のとおり、例えば、第２領域１４の表面に形成された第２励振電極１２０と、第２領域１４の両側面から表面にまで延在している第１励振電極１１０と、の間の距離Ｌは、一定であることができる。このことは、他の領域についても同様とすることができる。これにより、励振電極１１０，１２０間の電界の強さを一定に保つことができ、振動腕部１０，２０の屈曲振動の安定化を図ることができる。 According to the double tuning fork type resonator element 100, as described above, for example, the second excitation electrode 120 formed on the surface of the second region 14 and the second extension electrode 120 extending from both side surfaces of the second region 14 to the surface. A distance L between one excitation electrode 110 and the first excitation electrode 110 may be constant. This can be the same for other regions. Thereby, the strength of the electric field between the excitation electrodes 110 and 120 can be kept constant, and the bending vibration of the vibrating arm portions 10 and 20 can be stabilized.

双音叉型振動片１００によれば、励振電極１１０，１２０は、溝１５の内壁に形成されていることができる。これにより、電圧印加時に発生する電界を効率よく振動に変換できるため、双音叉型振動片１００は、ＣＩ値の増加を抑制することができる。 According to the double tuning fork resonator element 100, the excitation electrodes 110 and 120 can be formed on the inner wall of the groove 15. Thereby, since the electric field generated at the time of voltage application can be efficiently converted into vibration, the double tuning fork vibrating piece 100 can suppress an increase in CI value.

２．振動型センサー素子
次に、本実施形態に係る振動型センサー素子２００について、図面を参照しながら説明する。図４は、振動型センサー素子２００を模式的に示す斜視図である。振動型センサー素子２００は、本発明に係る双音叉型振動片を含む。本実施形態では、本発明に係る双音叉型振動片として、双音叉型振動片１００を用いた例について説明する。以下、本実施形態に係る振動型センサー素子２００において、本実施形態に係る双音叉型振動片１００の構成部材と同様の機能を有する部材については同一の符号を付し、その詳細な説明を省略する。なお、便宜上、図４において、励振電極１１０,１２０、引出電極１１２,１２２、端子１１４,１２４および配線１１６,１２６の図示を省略している。 2. Next, the vibration type sensor element 200 according to the present embodiment will be described with reference to the drawings. FIG. 4 is a perspective view schematically showing the vibration type sensor element 200. The vibration type sensor element 200 includes a double tuning fork type vibration piece according to the present invention. In the present embodiment, an example in which a double tuning fork type vibrating piece 100 is used as a double tuning fork type vibrating piece according to the present invention will be described. Hereinafter, in the vibration type sensor element 200 according to the present embodiment, members having the same functions as those of the components of the double tuning fork type vibrating piece 100 according to the present embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. To do. For convenience, the excitation electrodes 110 and 120, the extraction electrodes 112 and 122, the terminals 114 and 124, and the wirings 116 and 126 are not shown in FIG.

振動型センサー素子２００は、図４に示すように、基部２０２と、基部２０２に連続する弾性部２０４と、弾性部２０４に連続し弾性部２０４によって支持された他の基部としての質量部２０６と、基部２０２および質量部２０６に固定された双音叉型振動片１００と、を含む。基部２０２、弾性部２０４および質量部２０６の材質としては、例えば、水晶、タンタル酸リチウム、ニオブ酸リチウムなどの圧電材料、真鍮、アルミニウム、燐青銅などの金属材料などが挙げられる。 As shown in FIG. 4, the vibration sensor element 200 includes a base portion 202, an elastic portion 204 that is continuous with the base portion 202, and a mass portion 206 that is continuous with the elastic portion 204 and is supported by the elastic portion 204. And the double tuning fork type vibrating piece 100 fixed to the base portion 202 and the mass portion 206. Examples of the material of the base portion 202, the elastic portion 204, and the mass portion 206 include piezoelectric materials such as crystal, lithium tantalate, and lithium niobate, and metal materials such as brass, aluminum, and phosphor bronze.

基部２０２は、振動型センサー素子２００を、例えば、自動車、航空機、ロケットなどの装置に搭載するときに、該装置に機械的に固定される部位である。基部２０２の形状は限定されない。基部２０２の機能としては、弾性部２０４を介して質量部２０６を支持すること、および、振動型センサー素子２００に加速度等の物理量が入力されたときに生じる弾性部２０４の変位に対する基準となること、などが挙げられる。 The base 202 is a part that is mechanically fixed to a vibration sensor element 200 when the vibration sensor element 200 is mounted on a device such as an automobile, an aircraft, or a rocket. The shape of the base 202 is not limited. The functions of the base portion 202 are to support the mass portion 206 via the elastic portion 204 and to be a reference for the displacement of the elastic portion 204 that occurs when a physical quantity such as acceleration is input to the vibration sensor element 200. , Etc.

弾性部２０４は、基部２０２および質量部２０６を連結し、基部２０２が質量部２０６を支持するようにさせる部位である。図示はしないが、弾性部２０４は、複数設けられてもよい。弾性部２０４の形状としては、例えば、板バネ状、弦巻バネ（コイル）状、屈曲形状などが挙げられる。図示の例では、弾性部２０４は、基部２０２および質量部２０６に比べて厚みの小さい部分（断面視における厚みのくびれている部分）が相当する。弾性部２０４は、弾性を有する。すなわち、弾性部２０４は、質量部２０６が受力部となり力を受けて基部２０２に対して変位したときに、質量部２０６を変位する前の位置に戻そうとする復元力を有する。 The elastic part 204 is a part that connects the base part 202 and the mass part 206 so that the base part 202 supports the mass part 206. Although not shown, a plurality of elastic portions 204 may be provided. Examples of the shape of the elastic portion 204 include a leaf spring shape, a coiled spring (coil) shape, and a bent shape. In the illustrated example, the elastic portion 204 corresponds to a portion having a smaller thickness than the base portion 202 and the mass portion 206 (a portion having a narrowed thickness in a sectional view). The elastic part 204 has elasticity. That is, the elastic portion 204 has a restoring force that attempts to return the mass portion 206 to a position before being displaced when the mass portion 206 becomes a force receiving portion and receives a force and is displaced with respect to the base portion 202.

質量部２０６は、弾性部２０４に連続し、弾性部２０４によって支持された部位である。質量部２０６の形状は特に限定されない。質量部２０６が支持される形態としては、例えば、片持ち梁状、両持ち梁状、弾性部２０４によって懸下される形態などが挙げられる。質量部２０６は、振動型センサー素子２００に加速度等が印加されたときに、慣性抵抗（質量）となる。そのため、バネ・錐振動系に慣性力が生じると、質量部２０６の作用によって弾性部２０４に歪みを生じさせることができる。また、振動型センサー素子２００に加速度等が印加されたとき、質量部２０６の慣性によって、質量部２０６の基部２０２に対する相対的な位置が変化する。したがって、振動型センサー素子２００は、質量部２０６の基部２０２に対する相対的な位置の変化を検知することにより、印加された加速度等を測定することができる。図示の例では、質量部２０６は、弾性部２０４に連続し、片持ち梁状の形状で保持されている。図示の例では、振動型センサー素子２００にＹ軸方向の加速度が印加されることによって、弾性部２０４に歪みが生じ、質量部２０６の基部２０２に対する位置が変化する。 The mass part 206 is a part that is continuous with the elastic part 204 and supported by the elastic part 204. The shape of the mass part 206 is not particularly limited. Examples of the form in which the mass part 206 is supported include a cantilever form, a doubly supported form, and a form suspended by the elastic part 204. The mass unit 206 becomes an inertial resistance (mass) when acceleration or the like is applied to the vibration sensor element 200. Therefore, when an inertial force is generated in the spring / cone vibration system, the elastic portion 204 can be distorted by the action of the mass portion 206. Further, when an acceleration or the like is applied to the vibration type sensor element 200, the relative position of the mass portion 206 with respect to the base portion 202 changes due to the inertia of the mass portion 206. Therefore, the vibration type sensor element 200 can measure applied acceleration or the like by detecting a change in the position of the mass portion 206 relative to the base portion 202. In the illustrated example, the mass portion 206 is continuous with the elastic portion 204 and is held in a cantilever shape. In the illustrated example, when the acceleration in the Y-axis direction is applied to the vibration sensor element 200, the elastic portion 204 is distorted, and the position of the mass portion 206 relative to the base portion 202 changes.

双音叉型振動片１００は、基部２０２および質量部２０６に固定されている。図示の例では、支持部３２が基部２０２に固定され、支持部４２が質量部２０６に固定されている。支持部３２，４２は、例えば導電性接着剤によって、基部２０２および質量部２０６に固定されることができる。例えば、双音叉型振動片１００の表裏面のうち端子１１４，１２４が形成されている面を、基部２０２と対向させて、双音叉型振動片１００を固定する。これにより、例えば、支持部３２に形成された端子１１４，１２４と、基部２０２に形成された配線（図示せず）と、を電気的に接続することができる。 The double tuning fork resonator element 100 is fixed to the base portion 202 and the mass portion 206. In the illustrated example, the support portion 32 is fixed to the base portion 202, and the support portion 42 is fixed to the mass portion 206. The support portions 32 and 42 can be fixed to the base portion 202 and the mass portion 206 by, for example, a conductive adhesive. For example, the surface on which the terminals 114 and 124 are formed on the front and back surfaces of the double tuning fork type vibrating piece 100 is opposed to the base portion 202 to fix the double tuning fork type vibrating piece 100. Thereby, for example, the terminals 114 and 124 formed on the support portion 32 and the wiring (not shown) formed on the base portion 202 can be electrically connected.

振動型センサー素子２００によれば、上述のとおり、基部２０２および質量部２０６に、信頼性の高い双音叉型振動片１００が固定されている。したがって、信頼性の高い振動型センサー素子２００を提供することができる。 According to the vibration type sensor element 200, as described above, the highly reliable double tuning fork type vibration piece 100 is fixed to the base portion 202 and the mass portion 206. Therefore, the vibration type sensor element 200 with high reliability can be provided.

３．振動型センサー
次に、本実施形態に係る振動型センサー３００について、図面を参照しながら説明する。図５は、振動型センサー３００を模式的に示す断面図である。振動型センサー３００は、本発明に係る振動型センサー素子を含む。本実施形態では、本発明に係る振動型センサー素子として、振動型センサー素子２００を用いた例について説明する。以下、本実施形態に係る振動型センサー３００において、本実施形態に係る振動型センサー素子２００の構成部材と同様の機能を有する部材については同一の符号を付し、その詳細な説明を省略する。なお、便宜上、図５において、励振電極１１０,１２０、引出電極１１２,１２２、端子１１４,１２４および配線１１６,１２６の図示を省略している。 3. Next, the vibration type sensor 300 according to the present embodiment will be described with reference to the drawings. FIG. 5 is a cross-sectional view schematically showing the vibration type sensor 300. The vibration type sensor 300 includes the vibration type sensor element according to the present invention. In the present embodiment, an example in which a vibration sensor element 200 is used as a vibration sensor element according to the present invention will be described. Hereinafter, in the vibration type sensor 300 according to this embodiment, members having the same functions as those of the constituent members of the vibration type sensor element 200 according to this embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. For convenience, the excitation electrodes 110 and 120, the extraction electrodes 112 and 122, the terminals 114 and 124, and the wirings 116 and 126 are not shown in FIG.

振動型センサー３００は、図５に示すように、パッケージ３０２と、パッケージ３０２内に収容されたＩＣチップ３０４および振動型センサー素子２００と、を含む。 As shown in FIG. 5, the vibration type sensor 300 includes a package 302, an IC chip 304 and a vibration type sensor element 200 housed in the package 302.

パッケージ３０２としては、セラミックスのパッケージベース（容器）にリッド（蓋）が設けられたもの等が挙げられる。パッケージ３０２によって、振動型センサー素子２００を減圧空間内に封止することができる。これにより、双音叉型振動片１００のＱ値を高め、熱雑音や部材の劣化を抑えることができる。 Examples of the package 302 include a ceramic package base (container) provided with a lid (lid). The vibration type sensor element 200 can be sealed in the reduced pressure space by the package 302. Thereby, the Q value of the double tuning fork type resonator element 100 can be increased, and thermal noise and member deterioration can be suppressed.

ＩＣチップ３０４は、例えばろう材（図示せず）によって、パッケージ３０２の内側底面に接合されている。ＩＣチップ３０４は、双音叉型振動片１００の駆動腕部１０，２０を振動させるための駆動回路と、双音叉型振動片１００に生じた物理量を検出するための検出回路と、を有する。ＩＣチップ３０４は、例えばワイヤー（図示せず）により、センサー素子２００（双音叉型振動片１００）と電気的に接続されている。 The IC chip 304 is bonded to the inner bottom surface of the package 302 by, for example, a brazing material (not shown). The IC chip 304 includes a drive circuit for vibrating the drive arm portions 10 and 20 of the double tuning fork type vibrating piece 100 and a detection circuit for detecting a physical quantity generated in the double tuning fork type vibrating piece 100. The IC chip 304 is electrically connected to the sensor element 200 (double tuning fork type vibrating piece 100) by, for example, a wire (not shown).

振動型センサー素子２００は、例えばろう材によって、基部２０２がパッケージ３０２の内側底面に接合されている。質量部２０６は、パッケージ３０２の内側底面と離間している。すなわち、振動型センサー素子２００は、片持ち梁状の状態でパッケージ３０２内に収容されている。 The vibration type sensor element 200 has a base portion 202 joined to the inner bottom surface of the package 302 by, for example, a brazing material. The mass portion 206 is separated from the inner bottom surface of the package 302. That is, the vibration type sensor element 200 is accommodated in the package 302 in a cantilever state.

振動型センサー３００によれば、上述のとおり、パッケージ３０２内に、信頼性の高い振動型センサー素子２００が収容されている。したがって、信頼性の高い振動型センサー３００を提供することができる。 According to the vibration type sensor 300, as described above, the highly reliable vibration type sensor element 200 is accommodated in the package 302. Therefore, the vibration type sensor 300 with high reliability can be provided.

上記のように、本発明の実施形態について詳細に説明したが、本発明の新規事項および効果から実体的に逸脱しない多くの変形が可能であることは当業者には容易に理解できよう。従って、このような変形例はすべて本発明の範囲に含まれるものとする。 Although the embodiments of the present invention have been described in detail as described above, those skilled in the art will readily understand that many modifications are possible without substantially departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention.

３中間領域、１０第１振動腕部、１２第１領域、１４第２領域、
１６第３領域、１５溝、２０第２振動腕部、２２第４領域、２４第５領域、
２６第６領域、３０第１基端部、３２支持部、３４接続部、３６くびれ部、
４０第２基端部、４２支持部、４４接続部、４６くびれ部、
１００双音叉型振動片、１１０第１励振電極、１１２第１引出電極、
１１４第１端子、１１６第１配線、１２０第２励振電極、１２２第２引出電極、
１２４第２端子、１２６第２配線、２００振動型センサー素子、２０２基部、
２０４弾性部、２０６質量部、３００振動型センサー、３０２パッケージ、
３０４ＩＣチップ 3 middle region, 10 first vibrating arm, 12 first region, 14 second region,
16 3rd area | region, 15 groove | channel, 20 2nd vibration arm part, 22 4th area | region, 24 5th area | region,
26 6th area | region, 30 1st base end part, 32 support part, 34 connection part, 36 constriction part,
40 second base end portion, 42 support portion, 44 connection portion, 46 constricted portion,
100 double tuning fork type resonator element, 110 first excitation electrode, 112 first extraction electrode,
114 1st terminal, 116 1st wiring, 120 2nd excitation electrode, 122 2nd extraction electrode,
124 second terminal, 126 second wiring, 200 vibration type sensor element, 202 base,
204 elastic part, 206 mass part, 300 vibration type sensor, 302 package,
304 IC chip

Claims

A double tuning fork type resonator element having a front surface and a back surface in a front / back relationship, and two side surfaces connected to the front surface and the back surface,
A first vibrating arm portion and a second vibrating arm portion extending in parallel;
A first base end connected to one end of the first vibrating arm and the second vibrating arm;
A second base end connected to the other end of the first vibrating arm and the second vibrating arm;
Including
The first vibrating arm portion includes a first region, a second region, and a third region, which are sequentially arranged along a direction from the first base end portion to the second base end portion,
The second vibrating arm portion includes a fourth region, a fifth region, and a sixth region, which are sequentially arranged along a direction from the first base end portion to the second base end portion.
Front and back surfaces of the first region, both side surfaces of the second region, front and back surfaces of the third region, both side surfaces of the fourth region, front and back surfaces of the fifth region, and both side surfaces of the sixth region A first excitation electrode electrically connected to each other is formed;
On both side surfaces of the first region, front and back surfaces of the second region, both side surfaces of the third region, front and back surfaces of the fourth region, both side surfaces of the fifth region, and front and back surfaces of the sixth region A second excitation electrode electrically connected to each other is formed,
In the first vibrating arm portion and the second vibrating arm portion, a first lead electrode and a second lead are provided in an intermediate region sandwiched between two adjacent regions of the first region to the sixth region. Electrodes are formed,
The first extraction electrode is
One of the adjacent regions is extended from the first excitation electrode formed on the front surface or the back surface of one of the regions, branched at least bifurcated, and one of the branched electrodes is one of the other regions. Connected to the first excitation electrode formed on the side surface, the other branched electrode is connected to the first excitation electrode formed on the other side surface of the other region,
The second extraction electrode is
One of the adjacent regions is extended from the second excitation electrode formed on the front or back surface of one of the regions, branched at least bifurcated, and one branched electrode is one of the other regions. Connected to the second excitation electrode formed on the side surface, the other branched electrode is connected to the second excitation electrode formed on the other side surface of the other region,
The width of the portion of the first extraction electrode extending from the first excitation electrode is equal to or greater than the width of the first excitation electrode formed on the front surface or the back surface of the region,
A width of a portion of the second extraction electrode extending from the second excitation electrode is equal to or greater than a width of the second excitation electrode formed on the front surface or the back surface of the region. Type vibrating piece.

In claim 1,
The first excitation electrode formed on the back surface of the first region, the front surface of the third region, and the front and back surfaces of the fifth region has a first taper portion whose width increases as it approaches the first extraction electrode. Have
The first tapered portion is connected to the first extraction electrode,
The second excitation electrode formed on the front and back surfaces of the second region, the back surface of the fourth region, and the surface of the sixth region has a second taper portion that increases in width as it approaches the second extraction electrode. Have
The second tapered portion is a double tuning fork type vibrating piece connected to the second extraction electrode.

In claim 2,
The first excitation electrodes formed on both side surfaces of the second region, the fourth region, and the sixth region extend to the front and back surfaces of the second region, the fourth region, and the sixth region, respectively. And
The first excitation electrode extending from both side surfaces of the second region, the fourth region, and the sixth region to the front and back surfaces in plan view from the front surface or the back surface side, the second region, the fourth region And the distance between the second excitation electrode formed on the front and back surfaces of the sixth region is constant,
The second excitation electrodes formed on both side surfaces of the first region, the third region, and the fifth region extend to the front and back surfaces of the first region, the third region, and the fifth region, respectively. And
The second excitation electrode extending from both side surfaces of the first region, the third region, and the fifth region to the front and back surfaces in a plan view from the front surface or the back surface side; the first region, the third region; And the distance between the first excitation electrode formed on the front and back surfaces of the fifth region is constant, respectively.

In any one of Claims 1 thru | or 3,
The first vibrating arm portion and the second vibrating arm portion have grooves formed on the front and back surfaces of the region,
A double tuning fork type resonator element in which the first excitation electrode or the second excitation electrode is provided on an inner wall of the groove.

The base,
An elastic part continuous to the base part;
Another base that is continuous with the elastic portion and supported by the elastic portion;
The double tuning fork type vibrating piece according to any one of claims 1 to 4, which is fixed to the base and the other base,
Including a vibration type sensor element.

The vibration type sensor element according to claim 5;
A package containing the vibration-type sensor element;
Including vibration sensor.