CN108398575B - Electrostatic resonance accelerometer and acceleration measurement method - Google Patents
Electrostatic resonance accelerometer and acceleration measurement method Download PDFInfo
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- CN108398575B CN108398575B CN201810224198.XA CN201810224198A CN108398575B CN 108398575 B CN108398575 B CN 108398575B CN 201810224198 A CN201810224198 A CN 201810224198A CN 108398575 B CN108398575 B CN 108398575B
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- 230000001133 acceleration Effects 0.000 title claims abstract description 17
- 238000000691 measurement method Methods 0.000 title description 4
- 239000004020 conductor Substances 0.000 claims abstract description 4
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 238000013461 design Methods 0.000 abstract description 6
- 230000001939 inductive effect Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 244000126211 Hericium coralloides Species 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
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Abstract
The invention provides an electrostatic resonance type accelerometer, which comprises a mass block and at least one resonator, wherein an electrode is arranged on the resonator, the mass block is a conductor, and a certain direct current voltage is applied between the mass block and the resonator, so that the resonator is subjected to a certain electrostatic force and is in a resonance state at a certain frequency. The invention adopts the design of separating the resonator from the mass block, the acting force between the resonator and the mass block is non-contact long-range electrostatic force, the independent work of the resonator is ensured, and the quality factor and the sensitivity of the resonator are improved. In the invention, the electrostatic force inducing the acceleration variation acts on the transverse direction of the resonator beam (or tuning fork beam), the influence on the resonance frequency is large, and the sensitivity of the accelerometer is high. In the aspect of manufacturing process, the resonator and the mass block are manufactured separately, the structure is simple, and the manufacturing cost is low.
Description
Technical Field
The invention relates to the field of accelerometers, in particular to an accelerometer for detecting linear acceleration values in the fields of inertial navigation and the like.
Background
The inertial navigation system utilizes a gyroscope and an accelerometer to measure the angular velocity and the linear acceleration of the carrier motion at the same time, and calculates navigation information such as the three-dimensional attitude, the speed, the position and the like of the carrier in real time through a computer. The accelerometer is a core instrument of the inertial system, and the technical index directly influences the overall performance of the inertial navigation system, so that the accelerometer technology is an important mark of the inertial technology and is paid great attention to.
Accelerometers have a variety of operating principles including, in principle, from sensors: capacitance, electromagnetic, optical, piezoresistive, piezoelectric, resonant (frequency), etc. The resonant accelerometer can directly convert acceleration into frequency output, avoids error of amplitude measurement, is not easy to be interfered by environmental noise, and the quasi-digital output can simplify an interface circuit, is not easy to generate error in the transmission and processing processes, and the working principle of the resonant accelerometer establishes the advantages of the resonant accelerometer. However, the structure of the resonant accelerometer is generally designed such that inertial force acts on the axial direction of the resonator beam (or tuning fork beam), and detection and excitation are performed by using a comb-tooth structure. This design results in accelerometers that are not highly sensitive, and are very complex in structure and difficult to manufacture. In order to improve the sensitivity, part of the design adopts a micro-lever mechanism to amplify the inertia force, which leads to more complex structure, increased displacement of the mass block and insignificant amplification effect of the inertia force. In addition, the inertial force of the mass block of the accelerometer of the current design directly acts on the resonator, the mass block and the resonator are required to be integrally manufactured and mutually contacted, the mutual influence is achieved, and the quality factor of the resonator is reduced.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides an electrostatic resonance accelerometer and an acceleration measuring method.
To achieve the above and other related objects, the present invention provides an electrostatic resonance type accelerometer, which comprises a mass block and at least one resonator, wherein electrodes are arranged on the resonator, the mass block is a conductor, and a certain direct current voltage is applied between the mass block and the resonator, so that the resonator is subjected to a certain electrostatic force and is in a resonance state at a certain frequency.
Preferably, the at least one resonator is a resonator, and is disposed on one side of the mass.
Preferably, the at least one resonator is two resonators, and the two resonators are respectively located at two sides of the mass block.
Preferably, the at least one resonator is two resonators, and the two resonators are located on the same side of the mass block.
Preferably, the at least one resonator is four resonators, each two resonators form a resonant unit, the two resonators are arranged side by side, and two resonant units are respectively arranged on two opposite sides of the mass block.
Preferably, the resonator is a quartz tuning fork resonator.
To achieve the above and other related objects, an acceleration measurement method specifically includes: a conductive mass block and at least one resonator with electrodes are arranged, and a direct current voltage is applied between the mass block and the resonator to enable the resonator to be subjected to a certain electrostatic force and to be in a resonance state at a certain frequency.
As described above, the electrostatic resonance type accelerometer has the following beneficial effects:
the invention adopts the design of separating the resonator from the mass block, the acting force between the resonator and the mass block is non-contact long-range electrostatic force, the independent work of the resonator is ensured, and the quality factor and the sensitivity of the resonator are improved. In the invention, the electrostatic force inducing the acceleration variation acts on the transverse direction of the resonator beam (or tuning fork beam), the influence on the resonance frequency is large, and the sensitivity of the accelerometer is high. In the aspect of manufacturing process, the resonator and the mass block are manufactured separately, the structure is simple, and the manufacturing cost is low.
Drawings
FIG. 1 is a schematic diagram of one embodiment of an electrostatic resonant accelerometer according to the present invention, wherein the direction of the arrow in the diagram is the vibration direction of the mass;
FIG. 2 is a schematic diagram of another embodiment of an electrostatic resonant accelerometer according to the present invention, wherein the direction of the arrow in the diagram is the vibration direction of the mass;
FIG. 3 is a schematic diagram of another embodiment of an electrostatic resonant accelerometer according to the invention;
fig. 4 is a schematic diagram of another embodiment of an electrostatic resonant accelerometer according to the invention.
Detailed Description
Other advantages and effects of the present invention will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present invention with reference to specific examples. The invention may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present invention. It should be noted that the following embodiments and features in the embodiments may be combined with each other without conflict.
It should be noted that the illustrations provided in the following embodiments merely illustrate the basic concept of the present invention by way of illustration, and only the components related to the present invention are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complicated.
The invention provides an electrostatic resonance type accelerometer, which comprises a mass block 1 and at least one resonator, wherein electrodes 2 and 4 are arranged on the resonator, the mass block is a conductor, and a certain direct current voltage is applied between the mass block and the resonator, so that the resonator is subjected to a certain electrostatic force and is in a resonance state at a certain frequency.
In this embodiment, the resonator is a quartz tuning fork resonator.
The resonant frequency of a quartz tuning fork resonator will vary depending on the amount of force acting on the tuning fork. In this embodiment, a certain bias voltage (direct current) is applied between the tuning fork resonator and the mass while the tuning fork resonator is in a resonant state. When external acceleration acts on the mass block, the mass block supported by the flexible beam can generate certain displacement under the action of inertia force, the displacement can cause the distance between the tuning fork beam of the resonator and the mass block to change, so that the electrostatic force applied to the resonator changes, the resonant frequency of the resonator also changes, and the change of the resonant frequency is detected through the phase-locked loop circuit, so that the acceleration is detected. Then the change of the resonant frequency is detected by the phase-locked loop circuit, so that the acceleration is detected as in the prior art, and the detection will not be described too much.
The number and the positions of the resonators are not further limited, so long as the requirement that an electric field can be formed between the resonators and the mass block, namely the strip, is met.
For example, in this embodiment, as shown in fig. 2, one resonator, i.e., one side of the mass of the first resonator 3, may be provided.
In another embodiment, as shown in fig. 1, two resonators may be provided, one on each of opposite sides of the mass, namely a first resonator 3 and a second resonator.
In another embodiment, as shown in fig. 3, the at least one resonator is two resonators, and the two resonators are located on the same side of the mass.
In another embodiment, as shown in fig. 4, the at least one resonator is four resonators, each two resonators form a resonant unit, the two resonators are arranged side by side, and two opposite sides of the mass block are respectively provided with a resonant unit.
The invention adopts the design of separating the resonator from the mass block, the acting force between the resonator and the mass block is non-contact long-range electrostatic force, the independent work of the resonator is ensured, and the quality factor and the sensitivity of the resonator are improved. In the invention, the electrostatic force inducing the acceleration variation acts on the transverse direction of the resonator beam (or tuning fork beam), the influence on the resonance frequency is large, and the sensitivity of the accelerometer is high. In the aspect of manufacturing process, the resonator and the mass block are manufactured separately, the structure is simple, and the manufacturing cost is low.
In another embodiment of the present invention, there is also provided an acceleration measurement method, which specifically includes: a conductive mass block and at least one resonator with electrodes are arranged, and a direct current voltage is applied between the mass block and the resonator to enable the resonator to be subjected to a certain electrostatic force and to be in a resonance state at a certain frequency.
In this embodiment, the resonator is a quartz tuning fork resonator.
The resonant frequency of a quartz tuning fork resonator will vary depending on the amount of force acting on the tuning fork. In this embodiment, a certain bias voltage (direct current) is applied between the tuning fork resonator and the mass while the tuning fork resonator is in a resonant state. When external acceleration acts on the mass block, the mass block supported by the flexible beam can generate certain displacement under the action of inertia force, the displacement can cause the distance between the tuning fork beam of the resonator and the mass block to change, so that the electrostatic force applied to the resonator changes, the resonant frequency of the resonator also changes, and the change of the resonant frequency is detected through the phase-locked loop circuit, so that the acceleration is detected.
The above embodiments are merely illustrative of the principles of the present invention and its effectiveness, and are not intended to limit the invention. Modifications and variations may be made to the above-described embodiments by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is intended that all equivalent modifications and variations of the invention be covered by the claims, which are within the ordinary skill of the art, be within the spirit and scope of the present disclosure.
Claims (6)
1. An electrostatic resonance type accelerometer is characterized by comprising a mass block and at least one resonator, wherein electrodes are arranged on the resonator, the mass block is a conductor, and a certain direct current voltage is applied between the mass block and the resonator, so that the resonator is subjected to a certain electrostatic force and is in a resonance state at a certain frequency;
the resonator is a quartz tuning fork resonator, a certain bias direct current is applied between the tuning fork resonator and the mass block, and the tuning fork resonator is in a resonance state.
2. An electrostatic resonator accelerometer according to claim 1, wherein the at least one resonator is a resonator disposed on one side of the mass.
3. An electrostatic resonator accelerometer according to claim 1, wherein the at least one resonator is two resonators, the two resonators being located on opposite sides of the mass.
4. An electrostatic resonator accelerometer according to claim 1, wherein the at least one resonator is two resonators, the two resonators being located on the same side of the mass.
5. An electrostatic resonator type accelerometer according to claim 1, wherein the at least one resonator is four resonators, each two resonators forming a resonant unit, the two resonators being arranged side by side, one resonant unit being arranged on each of opposite sides of the mass.
6. An acceleration measuring method is characterized in that the method specifically comprises the following steps: a conductive mass block and at least one resonator with electrodes are arranged, and a direct current voltage is applied between the mass block and the resonator to enable the resonator to be subjected to a certain electrostatic force and to be in a resonance state at a certain frequency.
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| CN201810224198.XA CN108398575B (en) | 2018-03-19 | 2018-03-19 | Electrostatic resonance accelerometer and acceleration measurement method |
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| CN201810224198.XA CN108398575B (en) | 2018-03-19 | 2018-03-19 | Electrostatic resonance accelerometer and acceleration measurement method |
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| CN108398575B true CN108398575B (en) | 2024-02-27 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109614661B (en) * | 2018-11-19 | 2023-04-07 | 北京联合大学 | Resonant accelerometer force-frequency relation equation establishing method |
| CN113702663B (en) * | 2021-08-31 | 2023-02-21 | 中国科学院空天信息创新研究院 | MEMS resonant acceleration sensor |
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