CN108398575A - A kind of electrostatic resonance type accelerometer and acceleration measurement method - Google Patents
A kind of electrostatic resonance type accelerometer and acceleration measurement method Download PDFInfo
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- CN108398575A CN108398575A CN201810224198.XA CN201810224198A CN108398575A CN 108398575 A CN108398575 A CN 108398575A CN 201810224198 A CN201810224198 A CN 201810224198A CN 108398575 A CN108398575 A CN 108398575A
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- 230000001133 acceleration Effects 0.000 title claims abstract description 16
- 238000000691 measurement method Methods 0.000 title claims description 6
- 239000004020 conductor Substances 0.000 claims abstract description 4
- 239000010453 quartz Substances 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 238000013461 design Methods 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 abstract description 6
- 230000006698 induction Effects 0.000 abstract description 3
- 238000000926 separation method Methods 0.000 abstract description 3
- 230000004044 response Effects 0.000 abstract description 2
- 230000008859 change Effects 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000004075 alteration Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Pressure Sensors (AREA)
Abstract
The present invention provides a kind of electrostatic resonance type accelerometer, the accelerometer includes mass block and at least one resonator, it is provided with electrode on the resonator, the mass block is conductor, certain DC voltage is applied between the mass block and the resonator, make resonator by certain electrostatic force, resonant condition is under a certain frequency.The present invention uses resonator and mass block separate design, and the active force between resonator and mass block is non-contact long-range electrostatic force, it is ensured that the autonomous working of resonator improves quality factor and the sensitivity of resonator.In the present invention, for the electrostatic force of induction acceleration variable quantity in the transverse direction of resonator beam (or tuning fork beam), the influence to resonant frequency is big, and accelerometer response is high.In terms of manufacturing process, the present invention is by resonator and mass block separation manufacture, and simple in structure, manufacturing cost is low.
Description
Technical field
The present invention relates to accelerometer fields, and in particular to a kind of linear acceleration value detection for fields such as inertial navigations
Accelerometer.
Background technology
Inertial navigation system measures the angular speed and linear acceleration of carrier movement using gyroscope and accelerometer simultaneously, and
Go out the navigation informations such as 3 d pose, speed, the position of carrier by computer real-time resolving.Accelerometer is the core of inertia system
Admire table, technical indicator directly affects inertial navigation system overall performance, therefore accelerometer technology is always inertial technology
Important symbol and especially paid attention to.
There are many operation principles for accelerometer, include from Fundamentals of Sensors：Capacitance, electromagnetism, optics, pressure drag, pressure
Electricity, resonance (frequency) etc..Acceleration directly can be converted into rate-adaptive pacemaker by resonance type accelerometer, avoid the mistake of amplitude measurement
Difference is not easily susceptible to the interference of ambient noise, and quasi- numeral output can simplify interface circuit, in transmission and processing procedure also not
Easily there is error, operation principle just establishes its advantage.But the structure of resonance type accelerometer is typically designed as at present
Inertia force acts on the axial direction of resonator beam (or tuning fork beam), is detected and encourages using comb-tooth-type structure.The design causes
Accelerometer response is not high, and structure is extremely complex, and manufacture difficulty is big.In order to improve sensitivity, part design uses micro-
Lever mechanism amplifies inertia force, and which results in its structure is more complicated, mass block displacement increases, and inertia force amplification effect is unknown
It is aobvious.In addition, the accelerometer mass block inertia force of current design acts directly on resonator, mass block is necessary with resonator
It using being integrated, contacts with each other, influences each other, reduce the quality factor of resonator.
Invention content
It is an object of the invention to overcome the deficiencies in the prior art, and provide a kind of electrostatic resonance type accelerometer and acceleration
Spend measurement method.
In order to achieve the above objects and other related objects, the present invention provides a kind of electrostatic resonance type accelerometer, the acceleration
Degree meter includes mass block and at least one resonator, and electrode is provided on the resonator, and the mass block is conductor, the matter
It is applied in certain DC voltage between gauge block and the resonator, makes resonator by certain electrostatic force, in a certain frequency
It is in resonant condition down.
Preferably, at least one resonator is a resonator, is set to the side of mass block.
Preferably, at least one resonator is two resonators, and described two resonators are located at mass block
Both sides.
Preferably, at least one resonator is two resonators, and two resonators are located at the same side of mass block.
Preferably, at least one resonator is four resonators, and each two resonator forms a resonant element,
Two resonators are arranged side by side, and a resonant element is respectively arranged in the opposite sides of mass block.
Preferably, the resonator is quartz tuning-fork resonator.
In order to achieve the above objects and other related objects, a kind of acceleration measurement method, this method are specially：Setting one can
Conductive mass block and at least one resonator with electrode makes humorous to a DC voltage is applied between mass block and resonator
Device shake by certain electrostatic force, resonant condition is under a certain frequency.
As described above, a kind of electrostatic resonance type accelerometer of the present invention, has the advantages that：
The present invention uses resonator and mass block separate design, and the active force between resonator and mass block is non-contact long
Journey electrostatic force, it is ensured that the autonomous working of resonator improves quality factor and the sensitivity of resonator.In the present invention, induction adds
The electrostatic force of velocity variable is in the transverse direction of resonator beam (or tuning fork beam), and the influence to resonant frequency is big, accelerometer
High sensitivity.In terms of manufacturing process, the present invention is by resonator and mass block separation manufacture, and simple in structure, manufacturing cost is low.
Description of the drawings
Fig. 1 is the schematic diagram of an electrostatic resonance type accelerometer of the present invention wherein embodiment, the arrow side in figure
To the direction of vibration for mass block；
Fig. 2 is the schematic diagram of wherein another embodiment of electrostatic resonance type accelerometer of the present invention, the arrow in figure
Direction is the direction of vibration of mass block；
Fig. 3 is the schematic diagram of wherein another embodiment of electrostatic resonance type accelerometer of the present invention；
Fig. 4 is the schematic diagram of wherein another embodiment of electrostatic resonance type accelerometer of the present invention.
Specific implementation mode
Illustrate that embodiments of the present invention, those skilled in the art can be by this specification below by way of specific specific example
Disclosed content understands other advantages and effect of the present invention easily.The present invention can also pass through in addition different specific realities
The mode of applying is embodied or practiced, the various details in this specification can also be based on different viewpoints with application, without departing from
Various modifications or alterations are carried out under the spirit of the present invention.It should be noted that in the absence of conflict, following embodiment and implementation
Feature in example can be combined with each other.
It should be noted that the diagram provided in following embodiment only illustrates the basic structure of the present invention in a schematic way
Think, component count, shape and size when only display is with related component in the present invention rather than according to actual implementation in schema then
Draw, when actual implementation kenel, quantity and the ratio of each component can be a kind of random change, and its assembly layout kenel
It is likely more complexity.
The present invention provides a kind of electrostatic resonance type accelerometer, which includes mass block 1 and at least one resonance
Device is provided with electrode 2,4 on the resonator, and the mass block is conductor, is applied between the mass block and the resonator
Add certain DC voltage, make resonator by certain electrostatic force, resonant condition is under a certain frequency.
In this present embodiment, the resonator is quartz tuning-fork resonator.
The resonant frequency of quartz tuning-fork resonator can change according to the variation of the power size acted on tuning fork beam.Yu Ben
In embodiment, apply certain bias voltage (direct current) between tuning fork resonator and mass block, while making at tuning fork resonator
In resonant condition.When having in extraneous acceleration effect to mass block, the mass block supported by flexible beam can be in inertia force effect
Lower that certain displacement occurs, which will cause the distance between resonator tuning fork beam and mass block to change, so as to cause
Electrostatic force size suffered by resonator changes, then the resonant frequency of resonator can also change therewith, pass through phase-locked loop circuit
The variable quantity for detecting resonant frequency, to detect the size of acceleration.Then resonant frequency is detected by phase-locked loop circuit
Variable quantity does not just make excessive explanation herein to detect that the size of acceleration is the prior art.
The present invention is not further qualified the number of resonator with position, is enabled in resonator and matter as long as meeting
Requirement, that is, item of electric field is formed between gauge block.
For example, in the present embodiment, as shown in Fig. 2, a resonator can be set, i.e. 3 position mass block of the first resonator
Side.
In another embodiment, as shown in Figure 1, two resonators can be arranged, opposite both sides of mass block respectively, i.e., the
One resonator 3 and the second resonator.
In another embodiment, as shown in figure 3, at least one resonator is two resonators, two resonators
Positioned at the same side of mass block.
In another embodiment, as shown in figure 4, at least one resonator is four resonators, each two resonance
Device forms a resonant element, and two resonators are arranged side by side, and a resonant element is respectively arranged in the opposite sides of mass block.
The present invention uses resonator and mass block separate design, and the active force between resonator and mass block is non-contact long
Journey electrostatic force, it is ensured that the autonomous working of resonator improves quality factor and the sensitivity of resonator.In the present invention, induction adds
The electrostatic force of velocity variable is in the transverse direction of resonator beam (or tuning fork beam), and the influence to resonant frequency is big, accelerometer
High sensitivity.In terms of manufacturing process, the present invention is by resonator and mass block separation manufacture, and simple in structure, manufacturing cost is low.
In another embodiment of the invention, a kind of acceleration measurement method is also provided, this method is specially：Setting one can
Conductive mass block and at least one resonator with electrode makes humorous to a DC voltage is applied between mass block and resonator
Device shake by certain electrostatic force, resonant condition is under a certain frequency.
In this present embodiment, the resonator is quartz tuning-fork resonator.
The resonant frequency of quartz tuning-fork resonator can change according to the variation of the power size acted on tuning fork beam.Yu Ben
In embodiment, apply certain bias voltage (direct current) between tuning fork resonator and mass block, while making at tuning fork resonator
In resonant condition.When having in extraneous acceleration effect to mass block, the mass block supported by flexible beam can be in inertia force effect
Lower that certain displacement occurs, which will cause the distance between resonator tuning fork beam and mass block to change, so as to cause
Electrostatic force size suffered by resonator changes, then the resonant frequency of resonator can also change therewith, pass through phase-locked loop circuit
The variable quantity for detecting resonant frequency, to detect the size of acceleration.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology can all carry out modifications and changes to above-described embodiment without violating the spirit and scope of the present invention.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should by the present invention claim be covered.
Claims (7)
1. a kind of electrostatic resonance type accelerometer, which is characterized in that the accelerometer includes mass block and at least one resonator,
Electrode is provided on the resonator, the mass block is conductor, is applied between the mass block and the resonator certain
DC voltage, make resonator by certain electrostatic force, under a certain frequency be in resonant condition.
2. a kind of electrostatic resonance type accelerometer according to claim 1, which is characterized in that at least one resonance
Device is a resonator, is set to the side of mass block.
3. a kind of electrostatic resonance type accelerometer according to claim 1, which is characterized in that at least one resonance
Device is two resonators, and described two resonators are located at the both sides of mass block.
4. a kind of electrostatic resonance type accelerometer according to claim 1, which is characterized in that at least one resonance
Device is two resonators, and two resonators are located at the same side of mass block.
5. a kind of electrostatic resonance type accelerometer according to claim 1, which is characterized in that at least one resonance
Device is four resonators, and each two resonator forms a resonant element, and two resonators are arranged side by side, opposite the two of mass block
A resonant element is respectively arranged in side.
6. a kind of electrostatic resonance type accelerometer according to Claims 1 to 5 any one, which is characterized in that described humorous
The device that shakes is quartz tuning-fork resonator.
7. a kind of acceleration measurement method, which is characterized in that this method is specially：One conductive mass block and at least one are set
Resonator with electrode makes resonator by certain electrostatic force to a DC voltage is applied between mass block and resonator,
Resonant condition is under a certain frequency.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810224198.XA CN108398575B (en) | 2018-03-19 | 2018-03-19 | Electrostatic resonance accelerometer and acceleration measurement method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810224198.XA CN108398575B (en) | 2018-03-19 | 2018-03-19 | Electrostatic resonance accelerometer and acceleration measurement method |
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| CN108398575A true CN108398575A (en) | 2018-08-14 |
| CN108398575B CN108398575B (en) | 2024-02-27 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109614661A (en) * | 2018-11-19 | 2019-04-12 | 北京联合大学 | A kind of resonance type accelerometer power-frequency relation establishing equation method |
| CN113702663A (en) * | 2021-08-31 | 2021-11-26 | 中国科学院空天信息创新研究院 | MEMS resonant acceleration sensor |
Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69000479D1 (en) * | 1989-08-08 | 1992-12-24 | Onera (Off Nat Aerospatiale) | ACCELEROMETER WITH BENDING ROCKER AS A CARRIER. |
| JP2003294786A (en) * | 2002-03-29 | 2003-10-15 | National Institute Of Advanced Industrial & Technology | Method and device for measuring frequency characteristic for acceleration sensor |
| US20040089069A1 (en) * | 2002-11-12 | 2004-05-13 | Honeywell International Inc. | High-G acceleration protection by caging |
| CN101089624A (en) * | 2007-07-12 | 2007-12-19 | 中北大学 | Electric tuning resonance differential frequency accelerator |
| CN101266259A (en) * | 2008-05-08 | 2008-09-17 | 南京理工大学 | Silicon micro-resonance type accelerometer |
| CN101303365A (en) * | 2008-06-23 | 2008-11-12 | 中北大学 | Resonance type micro accelerometer |
| CN102778583A (en) * | 2012-07-12 | 2012-11-14 | 西安交通大学 | Silicon substrate-based quartz resonance acceleration sensor chip with four-beam structure |
| CN103063875A (en) * | 2012-12-25 | 2013-04-24 | 西安交通大学 | Silicon substrate differential motion quartz acceleration sensor |
| CN103501166A (en) * | 2013-10-15 | 2014-01-08 | 中国电子科技集团公司第二十六研究所 | Quartz resonant element |
| CN103808961A (en) * | 2012-11-08 | 2014-05-21 | 中国科学院电子学研究所 | Cantilever part and resonant acceleration sensor using the same |
| US20150362522A1 (en) * | 2009-09-07 | 2015-12-17 | Politecnico Di Milano | Mems resonant accelerometer having improved electrical characteristics |
| CN106352862A (en) * | 2016-10-26 | 2017-01-25 | 西安交通大学 | Digital differential micro-accelerometer |
| CN106597011A (en) * | 2016-12-23 | 2017-04-26 | 中北大学 | Double-shaft MEMS resonant acceleration transducer structure |
| CN106629571A (en) * | 2016-09-20 | 2017-05-10 | 西北工业大学 | Weakly coupled MEMS resonance type accelerometer based on mode localization effect |
| CN106771358A (en) * | 2016-11-30 | 2017-05-31 | 西安交通大学 | A kind of full quartz resonance accelerometer of miniature differential formula |
| CN107643423A (en) * | 2017-10-26 | 2018-01-30 | 西北工业大学 | A kind of Three Degree Of Freedom weak coupling resonance type accelerometer based on mode localization effect |
| CN207882297U (en) * | 2018-03-19 | 2018-09-18 | 重庆科技学院 | A kind of electrostatic resonance type accelerometer |
-
2018
- 2018-03-19 CN CN201810224198.XA patent/CN108398575B/en active Active
Patent Citations (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69000479D1 (en) * | 1989-08-08 | 1992-12-24 | Onera (Off Nat Aerospatiale) | ACCELEROMETER WITH BENDING ROCKER AS A CARRIER. |
| JP2003294786A (en) * | 2002-03-29 | 2003-10-15 | National Institute Of Advanced Industrial & Technology | Method and device for measuring frequency characteristic for acceleration sensor |
| US20040089069A1 (en) * | 2002-11-12 | 2004-05-13 | Honeywell International Inc. | High-G acceleration protection by caging |
| CN101089624A (en) * | 2007-07-12 | 2007-12-19 | 中北大学 | Electric tuning resonance differential frequency accelerator |
| CN101266259A (en) * | 2008-05-08 | 2008-09-17 | 南京理工大学 | Silicon micro-resonance type accelerometer |
| CN101303365A (en) * | 2008-06-23 | 2008-11-12 | 中北大学 | Resonance type micro accelerometer |
| US20150362522A1 (en) * | 2009-09-07 | 2015-12-17 | Politecnico Di Milano | Mems resonant accelerometer having improved electrical characteristics |
| CN102778583A (en) * | 2012-07-12 | 2012-11-14 | 西安交通大学 | Silicon substrate-based quartz resonance acceleration sensor chip with four-beam structure |
| CN103808961A (en) * | 2012-11-08 | 2014-05-21 | 中国科学院电子学研究所 | Cantilever part and resonant acceleration sensor using the same |
| CN103063875A (en) * | 2012-12-25 | 2013-04-24 | 西安交通大学 | Silicon substrate differential motion quartz acceleration sensor |
| CN103501166A (en) * | 2013-10-15 | 2014-01-08 | 中国电子科技集团公司第二十六研究所 | Quartz resonant element |
| CN106629571A (en) * | 2016-09-20 | 2017-05-10 | 西北工业大学 | Weakly coupled MEMS resonance type accelerometer based on mode localization effect |
| CN106352862A (en) * | 2016-10-26 | 2017-01-25 | 西安交通大学 | Digital differential micro-accelerometer |
| CN106771358A (en) * | 2016-11-30 | 2017-05-31 | 西安交通大学 | A kind of full quartz resonance accelerometer of miniature differential formula |
| CN106597011A (en) * | 2016-12-23 | 2017-04-26 | 中北大学 | Double-shaft MEMS resonant acceleration transducer structure |
| CN107643423A (en) * | 2017-10-26 | 2018-01-30 | 西北工业大学 | A kind of Three Degree Of Freedom weak coupling resonance type accelerometer based on mode localization effect |
| CN207882297U (en) * | 2018-03-19 | 2018-09-18 | 重庆科技学院 | A kind of electrostatic resonance type accelerometer |
Non-Patent Citations (1)
| Title |
|---|
| 刘恒: "静电刚度谐振式微加速度计相关技术研究", 《中国博士电子期刊信息科技辑》, 15 December 2011 (2011-12-15) * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109614661A (en) * | 2018-11-19 | 2019-04-12 | 北京联合大学 | A kind of resonance type accelerometer power-frequency relation establishing equation method |
| CN109614661B (en) * | 2018-11-19 | 2023-04-07 | 北京联合大学 | Resonant accelerometer force-frequency relation equation establishing method |
| CN113702663A (en) * | 2021-08-31 | 2021-11-26 | 中国科学院空天信息创新研究院 | MEMS resonant acceleration sensor |
| CN113702663B (en) * | 2021-08-31 | 2023-02-21 | 中国科学院空天信息创新研究院 | MEMS resonant acceleration sensor |
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| CN108398575B (en) | 2024-02-27 |
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