CN106932609A - A kind of axle inertial sensors of four mass MEMS of single anchor point six - Google Patents
A kind of axle inertial sensors of four mass MEMS of single anchor point six Download PDFInfo
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- CN106932609A CN106932609A CN201710119983.4A CN201710119983A CN106932609A CN 106932609 A CN106932609 A CN 106932609A CN 201710119983 A CN201710119983 A CN 201710119983A CN 106932609 A CN106932609 A CN 106932609A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
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Abstract
The present invention relates to a kind of axle inertial sensors of four mass MEMS of single anchor point six, the sensor includes the structure sheaf with centrosymmetric structure support frame, anchoring support post and mass, and the substrate layer being fixedly connected with structure sheaf by anchoring support post and attachment are on the substrate layer near the electrode layer of structure sheaf side；Anchoring support post is fixedly installed on the symmetrical centre of support frame, four identical masses are symmetrically and evenly distributed along the circumference with anchoring support post as the center of circle, and be fixedly connected with support frame by cantilever beam respectively, each mass can be in support frame plane relative to support movements, also can be in the move in plane perpendicular to support frame；Electrode layer keeps a determining deviation with structure sheaf, and electrode layer position on the substrate layer is corresponding with the position of mass, forms detection electric capacity, drives electric capacity and/or dynamic balance electric capacity；By detecting that the differential signal between electric capacity extracts the angular velocity signal of the acceleration signal and every axle that obtain the corresponding free degree.
Description
Technical field
The present invention relates to a kind of sensor, more particularly to a kind of axle inertial sensors of four mass MEMS of single anchor point six.
Background technology
Six axle inertial sensors mainly include x-axis, y-axis, the z-axis accelerometer of 3-axis acceleration measurement, and three shaft angles speed
Spend x-axis, y-axis, the z-axis gyroscope of measurement.The multi-axial sensor reported in usual document is used to by multiple single shafts or multiaxis
Property sensor (including arrangements of accelerometers and gyroscope arrangement) composition six axle inertial sensor groups.Come for some applications
Say, this sensor group being made up of discrete device is difficult to while taking into account overall dimensions, manufacturing cost and combination property.Meanwhile,
The single shaft or multi-axial accelerometer and gyroscope being assemblied on single chip microcomputer electric system chip need each sensor to have each
Driving with detection electronic device, further increase monolithic MEMS (Micro Electromechanical System, microcomputer
Electric system) chip cost and complexity.Additionally, traditional MEMS inertial sensor is propped up resonance structure using many bonding points
Support, silicon-sensitive structure is fixed on the glass substrate, and lower sensitive structure vibrates in working order can be subject to mechanical structure, gas
Damping and the influence of variation of ambient temperature, thus while detection electric capacity is larger, signal to noise ratio reliability, but because vibrational energy dissipates,
Quality factor are low, it is difficult to further improve gyro performance.
The content of the invention
Regarding to the issue above, it is an object of the invention to provide a kind of axle inertia sensings of four mass MEMS of single anchor point six
Device, by using a kind of mass resonator of single-point support four as sensitive original paper, while realize the acceleration and X of the axle of X, Y, Z tri-,
The angular velocity detection of the axle of Y, Z tri-, so as to realize six axle inertia measurements.
To achieve the above object, the present invention takes following technical scheme：A kind of axles of four mass MEMS of single anchor point six are used to
Property sensor, it is characterised in that the sensor includes：Structure sheaf with support frame, anchoring support post and mass, by institute
The substrate layer that anchoring support post is fixedly connected with the structure sheaf is stated, and is attached on the substrate layer near the structure sheaf one
The electrode layer of side；Wherein, symmetrical structure centered on support frame as described above, the anchoring support post is fixedly installed on support frame as described above
Symmetrical centre, four masses are symmetrically and evenly distributed in support frame as described above along the circumference with the anchoring support post as the center of circle
Surrounding, and be fixedly connected with support frame as described above by cantilever beam respectively, and four masses are identical, described in each
Mass can be moved in support frame as described above plane relative to support frame as described above, also can be in the plane perpendicular to support frame as described above
Interior motion；The electrode layer and the structure sheaf keep a determining deviation, and position of the electrode layer on the substrate layer with
The position of the mass is corresponding, so as to form detection electric capacity, drive electric capacity and/or dynamic balance electric capacity；By the detection
Differential signal between electric capacity extracts the acceleration signal for obtaining the corresponding free degree；By poor to the detection capacitance signal
Office is managed, and can independently obtain the angular velocity signal of every axle.
When sensor is subject to X-axis acceleration, four masses will be produced relative to the support due to inertia
The motion of frame -X direction；
When sensor is subject to Y-axis acceleration, four masses will be produced relative to the support due to inertia
The motion of frame -Y direction；
When sensor is subject to Z axis acceleration, four masses will be produced relative to the support due to inertia
The motion of frame -Z direction；
Four masses are artificially actively made along the circle with the anchoring support post as the center of circle by the driving electric capacity
Radial vibration, and adjacent two mass synchronization the direction of motion conversely, be referred to as " driven-mode "；
Under " driven-mode ", when there is turning rate input in X-direction, two masses of Y-direction will be received
To the corioliseffect of Z-direction, produce along the vibration of Z-direction, referred to as " X-axis angular velocity detection mode "；
Under " driven-mode ", when there is turning rate input in the Y direction, X will be received to two masses
To the corioliseffect of Z-direction, produce along the vibration of Z-direction, referred to as " Y-axis angular velocity detection mode "；
Under " driven-mode ", when there is turning rate input in Z-direction, four masses will be in X/Y plane
The interior coriolis force by perpendicular to " driven-mode " direction of vibration, produces the vibration in X/Y plane, referred to as " Z axis angular speed
Sensed-mode ".
The electrode layer is the fixed capacity pole plate that bonding is fixed on the substrate layer upper comb dent shape arrangement, each described matter
One or more movable capacitor plate of comb teeth-shaped arrangement is provided with inside gauge block, the fixed capacity pole plate is movable with described
The corresponding combination of capacitor plate, the formation tangential driving electric capacity corresponding with mass each described, tangentially driving detection electric capacity,
Tangential detection electric capacity and/or tangential force balancing capacitance, and radial drive electric capacity, radial drive detection electric capacity, radial direction detect electricity
Hold and/or balanced radial force electric capacity.
The corner of the mass is respectively tuning capacitance, and left and right is that the radial drive electric capacity and/or radial drive are examined
Electric capacity is surveyed, is up and down tangential detection electric capacity and/or the tangential force balancing capacitance.
The substrate layer and electrode layer include two pieces, are respectively arranged on the both sides of the structure sheaf；The anchoring support
The two ends of post are bonded on the substrate layer of both sides, so as to the structure sheaf is fixed in the middle of the substrate layer of both sides；
Or, substrate layer is mutually permanently connected described in two, and the anchoring support post is only bonded on one of substrate layer, so that
The structure sheaf is fixed on the substrate layer and is located in the middle of the substrate layer of both sides.
The substrate layer and electrode layer only include one piece, and are distributed in the one side of the structure sheaf, the anchoring support post
It is bonded on the substrate layer, the structure sheaf is fixed on the substrate layer.
Each described mass is centrosymmetric structure, there are two mutually perpendicular symmetry axis.
The cantilever beam is " several " character form structure, and the two ends of one end of cantilever beam described in two respectively with the mass are fixed
Connection, the other end of the cantilever beam connected with mass end described in adjacent two is first connected, then by one section of small short beam with
One jiao of support frame as described above is fixedly connected, so as to form " Y " font coupling part；The rigidity of the cantilever beam is adjusted, can be realized
The regulation of sensor resonant frequency.
Support frame as described above middle part offers Central Symmetry in the sphere of movements for the elephants shape lightening hole of the anchoring support post；The support
Four outsides of frame are circular arc, the equal chamfering in corner.
Due to taking above technical scheme, it has advantages below to the present invention：1st, a kind of matter of single anchor point four of the invention
The axle inertial sensors of gauge block MEMS six, due to using single mass MEMS structure of anchor point four, inertia measurement principle can be used
The acceleration of the axle of X, Y, Z tri- is detected, the angular speed of the axle of X, Y, Z tri-, various motor messages are detected using resonant mode gyroscope principle
Eliminated by differential mode and interfered, so as to realize six axle inertia measurements, structure type is simple, and certainty of measurement is higher.2、
A kind of axle inertial sensors of four mass MEMS of single anchor point six of the invention, due to using single anchoring support post and substrate
Layer is connected, and energy dissipation is transmitted by anchoring support post and encapsulation atmosphere, and modal frequency characteristic is varied with temperature
Unanimously, sensor energy dissipate that small, quality factor are high, strong interference immunity, environmental suitability it is strong.3rd, a kind of single grappling of the invention
The point axle inertial sensors of four mass MEMS six, due to the electrode structure using comb teeth-shaped arrangement, with detection electric capacity is big, noise
Than advantage high.4th, a kind of axle inertial sensors of four mass MEMS of single anchor point six of the invention, due to using closed-loop work
Suppress the BURNING RATE ACCELERATION SENSITIVITY of three axis accelerometer as mode, further lift environmental suitability.5th, a kind of single anchor point of the invention
The axle inertial sensors of four mass MEMS six, have application value very high in inertial sensor field.
Brief description of the drawings
Fig. 1 is cross section structure diagram of the invention；
Fig. 2 is the structural representation of structure sheaf of the present invention；
Fig. 3 is the structural representation of mass of the present invention；
Fig. 4 is differential capacitance extracting mode schematic diagram of the invention；
Fig. 5 is present invention schematic diagram under static state；
Fig. 6 is present invention mass direction of motion schematic diagram when by X-direction acceleration；
Fig. 7 is present invention mass direction of motion schematic diagram when by Y-direction acceleration；
Fig. 8 is present invention mass direction of motion schematic diagram when by Z-direction acceleration；
Fig. 9 is present invention schematic diagram in the drive mode；
Figure 10 be the present invention in the drive mode, mass direction of motion schematic diagram during by X-direction angular speed；
Figure 11 be the present invention in the drive mode, mass direction of motion schematic diagram during by Y-direction angular speed；
Figure 12 be the present invention in the drive mode, mass direction of motion schematic diagram during by Z-direction angular speed.
Specific embodiment
The present invention is described in detail with reference to the accompanying drawings and examples.
In Fig. 5~Figure 12, black circle represents static, and arrow represents the direction of motion.
As shown in Figure 1 and Figure 2, the axle inertial sensors of four mass MEMS of a kind of single anchor point six that the present invention is provided, its bag
Include structure sheaf 1, substrate layer 2 and electrode layer 3.Wherein, structure sheaf 1 includes support frame 11, anchoring support post 12 and mass 13, branch
Symmetrical structure centered on support 11, anchoring support post 12 is fixedly installed on the symmetrical centre of support frame 11；Four edges of mass 13
Circumference with anchoring support post 12 as the center of circle is symmetrically and evenly distributed in the surrounding of support frame 11, and respectively by cantilever beam 14 and branch
Support 11 is fixedly connected, and four masses 13 are identical, each mass 13 can in the plane of support frame 11 relative to
Support frame 11 is moved, also can be in the move in plane perpendicular to support frame 11.Substrate layer 2 passes through anchoring support post 12 and structure sheaf
1 is fixedly connected.Electrode layer 3 is attached on substrate layer 2 near the side of structure sheaf 1, and keeps a determining deviation with structure sheaf 1, and
Position with mass 13 is corresponding, so as to form vertical detection electric capacity and/or vertical force balancing capacitance, exists for mass 13
Motion detection and suppression perpendicular to support frame in-plane.
As shown in figure 3, comb teeth-shaped arrangement (only as example, however it is not limited to this) fixed capacity pole plate bonding be fixed on base
On flaggy 2 (bonding point is indicated in figure with grid lines), one kind of comb teeth-shaped arrangement is provided with inside each mass 13
Or various movable capacitor plates, the combination corresponding with movable capacitor plate of fixed capacity pole plate, formed and each phase of mass 13
Corresponding tangential driving electric capacity, tangential driving detect electric capacity, tangential detection electric capacity and/or tangential force balancing capacitance, and radially
Electric capacity, radially radial drive detection electric capacity, detection electric capacity and/or balanced radial force electric capacity are driven, for mass 13 in support
Harmonic moving in frame plane drives, and support frame move in plane detection with suppress.
In above-described embodiment, the corner of mass 13 is respectively tuning capacitance 15, and left and right is radial drive electric capacity and/or footpath
It is up and down tangential detection electric capacity and/or tangential force balancing capacitance 17 to detection electric capacity 16 is driven.
In above-described embodiment, substrate layer 2 and electrode layer 3 include two pieces, and substrate layer 2 and electrode layer 3 are respectively arranged on knot
The both sides of structure layer 1, the two ends of anchoring support post 12 are bonded on the substrate layer 2 of both sides, so as to structure sheaf 1 is fixed on into both sides
In the middle of substrate layer 2；Or, two pieces of substrate layers 2 are mutually permanently connected, and anchoring support post 12 is only fixed with one of substrate layer 2
Connection, so as to structure sheaf 1 to be fixed on the substrate layer 2 and be located in the middle of the substrate layer 2 of both sides.
In above-described embodiment, substrate layer 2 and electrode layer 3 only include one piece, and substrate layer 2 and electrode layer 3 are distributed in structure sheaf 1
One side, anchoring support post 12 is bonded on substrate layer 2, structure sheaf 1 is fixed on substrate layer 2.
In above-described embodiment, each mass 13 is centrosymmetric structure, there are two mutually perpendicular symmetry axis, with
Ensure that vibration frequency of the sensor under each working condition is identical.
In above-described embodiment, as shown in Fig. 2 cantilever beam 14 is " several " character form structure, two " several " font cantilever beams 14
Two ends of the one end respectively with mass 13 are fixedly connected, the other end elder generation of the cantilever beam 14 connected with the adjacent end of two mass 13
Connection, then be fixedly connected with one jiao of support frame 11 by one section of small short beam 18, so that " Y " font coupling part is formed, to protect
Demonstrate,prove the vibration coupling of adjacent mass 13.
In above-described embodiment, the middle part of support frame 11 offers Central Symmetry in the sphere of movements for the elephants shape lightening hole of anchoring support post 12
19, with the stress concentration under the total quality and working condition that reduce support frame 11；Four outsides of support frame 11 are circular arc
Shape, the equal chamfering in corner.
In above-described embodiment, the rigidity of cantilever beam 14 is adjusted, be capable of achieving the regulation of sensor resonant frequency.
A kind of axle inertial sensors of four mass MEMS of single anchor point six of the invention, are become using each group electric capacity under inertia force
The calculus of differences result of change, realizes six axle inertia measurements.Below substrate layer 2 and electrode layer 3 are provided with the both sides of structure sheaf 1
Technical scheme as specific embodiment, illustrate mode of operation of the invention.
Double sided electrode layer allocation plan is as shown in figure 4, electric capacity label represents that it is the similar electricity of detection/driving direction identical
Pole, but homogeneous electrode can collectively form by multi-group electrode.The electric capacity classification on different quality block is represented with Cij for convenience of description
Numbering, wherein i is lumped mass block sequence number, from 1 to 4 arranged clockwise, as shown in Figure 5；Wherein j is the electricity in single mass
Pole order label, center is claimed clockwise according to mass, vertical mass plane is outside, vertical mass plane inwards
(blocking not shown by mass), from 1 to 6 arrangement.According to single-sided electrode layer allocation plan, then four groups of no j=5 are electric
Pole.
Apply driving voltage on radial drive electric capacity and/or radial drive detection electric capacity 16, mass 13 can be driven
It is close to or away from motion relative to support frame 11 in the plane of support frame 11；When driving voltage is alternating voltage, then quality
Block 13 produces vibration, adjustment alternating voltage frequency and the mechanical resonant of mass 13 in the plane of support frame 11 relative to support frame 11
Frequency is consistent, can make the resonance of mass 13.
As shown in figure 5, for the present invention under static state when four masses position.
When sensor is subject to X-axis acceleration, four masses 13 will be produced relative to support frame due to inertia
The motion of 11 -X direction, as shown in Figure 6；
The capacitance variations that now X-direction acceleration causes are Δ C (1):
Δ C (1)=(- Δ C12+ Δ C14- Δ C21+ Δ C23+ Δ C32- Δ C34+ Δ C41- Δ C43)/8
When sensor is subject to Y-axis acceleration, four masses 13 will be produced relative to support frame due to inertia
11 -Y direction motion, as shown in Figure 7；
The capacitance variations that now Y-direction acceleration causes are Δ C (2)：
Δ C (2)=(- Δ C11+ Δ C13+ Δ C22- Δ C24+ Δ C31- Δ C33- Δ C42+ Δ C44)/8
When sensor is subject to Z axis acceleration, four masses 13 will be produced relative to support frame due to inertia
11 -Z direction motion, as shown in Figure 8；
The capacitance variations that now Z-direction acceleration causes are Δ C (3):
Δ C (3)=(- Δ C15+ Δ C16- Δ C25+ Δ C26- Δ C35+ Δ C36- Δ C45+ Δ C46)/8
By detecting that the differential signal between electric capacity extracts the acceleration signal that can obtain the corresponding free degree, and by difference
It is mutually noiseless between three kinds of motions signal after decomposition calculation.
As shown in figure 9, by drive electric capacity artificially actively make four masses 13 along with anchoring support post 12 as the center of circle
Round radial vibration, i.e., away from or near anchoring support post 12, and adjacent two mass 13 is in the direction of motion of synchronization
Conversely, i.e. mass MASS2, MASS4 is done during near the motion of anchoring support post 12, mass MASS1, MASS3 are done away from grappling
The motion of support 12, referred to as " driven-mode ".
The capacitance variations for now causing under driven-mode are Δ C (4)：
Δ C (4)=(+Δ C11- Δ C13- Δ C21+ Δ C23+ Δ C31- Δ C33- Δ C41+ Δ C43)/8
Four masses 13 are made to be operated under " driven-mode ", now, when there is turning rate input in X-direction, according to
Coriolis force principle, Y-direction two masses MASS1 and MASS3 will be subject to the corioliseffect of Z-direction, produce shaking along Z-direction
It is dynamic, referred to as " X-axis angular velocity detection mode ", as shown in Figure 10,
The capacitance variations that now X-direction angular speed causes are Δ C (5)：
Δ C (5)=(+Δ C15- Δ C16- Δ C35+ Δ C36)/4
Four masses 13 are made to be operated under " driven-mode ", now, when there is turning rate input in the Y direction, according to
Coriolis force principle, X will be subject to the corioliseffect of Z-direction to two masses MASS2, MASS4, produce along the vibration of Z-direction,
Referred to as " Y-axis angular velocity detection mode ", as shown in figure 11,
The capacitance variations that now Y-direction angular speed causes are Δ C (6)：
Δ C (6)=(+Δ C25- Δ C26- Δ C45+ Δ C46)/4
When there is turning rate input in Z-direction, according to coriolis force principle, four masses will be subject to hang down in X/Y plane
Directly in the coriolis force of " driven-mode " direction of vibration, the vibration in X/Y plane is produced, referred to as " Z axis angular velocity detection mode ", such as
Shown in Figure 12,
The capacitance variations that now Z-direction angular speed causes are Δ C (7)：
Δ C (7)=(- Δ C12+ Δ C14+ Δ C22- Δ C24- Δ C32+ Δ C34+ Δ C42- Δ C44)/8
Difference processing is carried out by capacitance signal, you can independently obtain the angular velocity signal of every axle.
The various embodiments described above are merely to illustrate the present invention, wherein the structure of each part, set location and its connected mode etc.
All can be what is be varied from, every equivalents carried out on the basis of technical solution of the present invention and improvement should not be arranged
In addition in protection scope of the present invention.
Claims (10)
1. a kind of axle inertial sensors of four mass MEMS of single anchor point six, it is characterised in that the sensor includes：
Structure sheaf with support frame, anchoring support post and mass,
The substrate layer being fixedly connected with the structure sheaf by the anchoring support post, and
Electrode layer near the structure sheaf side is attached on the substrate layer；
Wherein, symmetrical structure centered on support frame as described above, the anchoring support post be fixedly installed on support frame as described above it is symmetrical in
The heart, four masses are symmetrically and evenly distributed in the four of support frame as described above along the circumference with the anchoring support post as the center of circle
Week, and be fixedly connected with support frame as described above by cantilever beam respectively, and four masses are identical, each described quality
Block can be moved in support frame as described above plane relative to support frame as described above, can also transported in the plane of support frame as described above
It is dynamic；The electrode layer and the structure sheaf keep a determining deviation, and position of the electrode layer on the substrate layer with it is described
The position of mass is corresponding, so as to form detection electric capacity, drive electric capacity and/or dynamic balance electric capacity；
The acceleration signal for obtaining the corresponding free degree is extracted by the differential signal between the detection electric capacity；By to the inspection
Surveying capacitance signal carries out difference processing, can independently obtain the angular velocity signal of every axle.
2. a kind of axle inertial sensors of four mass MEMS of single anchor point six as claimed in claim 1, it is characterised in that work as biography
When sensor is subject to X-axis acceleration, four masses will produce the fortune relative to support frame as described above -X direction due to inertia
It is dynamic；
When sensor is subject to Y-axis acceleration, four masses will be produced relative to support frame as described above-Y due to inertia
The motion in direction；
When sensor is subject to Z axis acceleration, four masses will be produced relative to support frame as described above-Z due to inertia
The motion in direction；
Four masses are artificially actively made along the footpath of the circle with the anchoring support post as the center of circle by the driving electric capacity
To vibration, and adjacent two mass synchronization the direction of motion conversely, being referred to as " driven-mode "；
Under " driven-mode ", when there is turning rate input in X-direction, two masses of Y-direction will be subject to Z side
To corioliseffect, produce along Z-direction vibration, referred to as " X-axis angular velocity detection mode "；
Under " driven-mode ", when there is turning rate input in the Y direction, X will be subject to Z side to two masses
To corioliseffect, produce along Z-direction vibration, referred to as " Y-axis angular velocity detection mode "；
Under " driven-mode ", when there is turning rate input in Z-direction, four masses will be received in X/Y plane
To the coriolis force perpendicular to " driven-mode " direction of vibration, the vibration in X/Y plane, referred to as " Z axis angular velocity detection are produced
Mode ".
3. a kind of axle inertial sensors of four mass MEMS of single anchor point six as claimed in claim 1 or 2, it is characterised in that
The electrode layer is the fixed capacity pole plate that bonding is fixed on the substrate layer upper comb dent shape arrangement, inside each described mass
It is provided with one or more movable capacitor plate of comb teeth-shaped arrangement, the fixed capacity pole plate and the movable capacitor plate
Corresponding combination, forms the tangential driving electric capacity corresponding with mass each described, tangential driving and detects electric capacity, tangential detection
Electric capacity and/or tangential force balancing capacitance, and radial drive electric capacity, radial drive detection electric capacity, radial direction detection electric capacity and/or footpath
To dynamic balance electric capacity.
4. a kind of axle inertial sensors of four mass MEMS of single anchor point six as claimed in claim 3, it is characterised in that described
The corner of mass is respectively tuning capacitance, and left and right is the radial drive electric capacity and/or radial drive detection electric capacity, up and down for
Tangential detection electric capacity and/or the tangential force balancing capacitance.
5. axle inertial sensors of four mass MEMS of a kind of single anchor point six as described in claim 1 or 2 or 4, its feature exists
In the substrate layer and electrode layer include two pieces, are respectively arranged on the both sides of the structure sheaf；The two of the anchoring support post
End is bonded on the substrate layer of both sides, so as to the structure sheaf is fixed in the middle of the substrate layer of both sides；Or, two
The substrate layer is mutually permanently connected, and the anchoring support post is only bonded on one of substrate layer, so that will be described
Structure sheaf is fixed on the substrate layer and is located in the middle of the substrate layer of both sides.
6. axle inertial sensors of four mass MEMS of a kind of single anchor point six as described in claim 1 or 2 or 4, its feature exists
One piece being only included in, the substrate layer and electrode layer, and being distributed in the one side of the structure sheaf, the anchoring support post is bonded to
On the substrate layer, the structure sheaf is fixed on the substrate layer.
7. axle inertial sensors of four mass MEMS of a kind of single anchor point six as described in claim 1 or 2 or 4, its feature exists
In each described mass is centrosymmetric structure, there are two mutually perpendicular symmetry axis.
8. a kind of axle inertial sensors of four mass MEMS of single anchor point six as claimed in claim 5, it is characterised in that each
The mass is centrosymmetric structure, there are two mutually perpendicular symmetry axis.
9. the axle inertial sensors of four mass MEMS of a kind of single anchor point six as described in claim 1 or 2 or 4 or 8, its feature
It is that the cantilever beam is " several " character form structure, one end of cantilever beam described in two is fixed with the two ends of the mass connect respectively
Connect, the other end of the cantilever beam connected with mass end described in adjacent two is first connected, then by one section of small short beam and institute
State support frame one jiao is fixedly connected, so as to form " Y " font coupling part；The rigidity of the cantilever beam is adjusted, can realize passing
The regulation of sensor resonant frequency.
10. axle inertial sensors of four mass MEMS of a kind of single anchor point six as described in claim 1 or 2 or 4 or 8, it is special
Levy and be, support frame as described above middle part offers Central Symmetry in the sphere of movements for the elephants shape lightening hole of the anchoring support post；The support
Four outsides of frame are circular arc, the equal chamfering in corner.
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| CN116295319A (en) * | 2023-05-25 | 2023-06-23 | 清华大学 | Angular velocity detection device and micromechanical gyroscope |
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