CN106918351A - A kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal - Google Patents
A kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal Download PDFInfo
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Abstract
The invention discloses a kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal.Due to there is inevitable mismachining tolerance, on the useful signal of the sensitive detection circuit output of micro mechanical gyroscope there is quadrature error signal in superposition all the time, detect the amplitude Characteristics and frequecy characteristic of quadrature error signal.If the amplitude or frequency departure of quadrature error signal setting range, judge that gyro work is abnormal, break down.The method of the present invention is not driven by gyroscope structure material, structure type, gyro and sensitive detection circuit operation principle is limited, and can be applicable；Before gyro work and in work real-time detection gyro whether normal work, it is to avoid can only before gyro work detection limitation.
Description
Technical field
The present invention relates to a kind of micro mechanical gyroscope, more particularly to a kind of micro mechanical gyroscope automatic fault selftesting side
Method.
Background technology
Micro mechanical gyroscope be a kind of sensitive structure characteristic size in micron to millimeter magnitude, using micro fabrication
The microsensor for detecting angular velocity of rotation or angle of manufacture.General manufacture is using quartz or silicon materials.Micro computer
Tool gyroscope includes movable mass, its pass through Coriolis effect (Coriolis effect) measurement detection axial direction angular speed or
Person's angle signal.When detection axially has input angular velocity or angle signal, Coriolis effect arrives the energy coupling of drive shaft
In sensitive axes, by detecting movable mass in the upward motion conditions of sensitive axes, you can it is anti-speculate calculate input angular velocity or
Angle signal.
Micro mechanical gyroscope have small volume, light weight, it is cheap the characteristics of, the military and people can be widely used in
Use field.In industrial automation, it is mainly used in advanced automatic safety system, high performance navigation system, navigation
Stability, the detection of rolling and prevention and air bag and brakes.In consumer electronics sector, it is mainly used in
Image stabilization, virtual reality products and computer game in the digital products such as mobile phone, panel computer, photographic goods.In army
Thing application aspect, mainly applies to the inertial guidance of ammunition, the navigation of aircraft and gesture stability, platform stable, portable mono
Soldier's navigation etc..
Industrial application and military applications in part, application background requirement gyroscope possess reliability higher.
To meet the gyroscope application requirement of high reliability, the robustness of gyroscope, the opposing party are on the one hand improved by reliability design
Can be realized by fault detect self pre-detection before gyro work and (or) health monitoring of working condition.
Small volume, light weight, cheap, can in high volume to manufacture be micro mechanical gyroscope compared with other types gyroscope
The advantage of (tradition machinery rotor gyro, fibre optic gyroscope, lasergyro).Therefore the general integrated envelope of micro mechanical gyroscope
Loaded on using internal system, using preceding and be difficult in carry out the test of function and performance again.
Application for a patent for invention《Method is surveyed in a kind of fibre optic gyroscope luminous power startup self-detection》(CN105758423A) propose
It is a kind of by source phase set be operated in it is non-On position, the amplitude difference of detection signal adjacent half period judges light
Fine gyro whether the method for normal work.The advantage of the method can be applied to without other devices, self-inspection cycle is short is increased
All digital closed-loop optic fiber gyroscope instrument.Light source phase duty exists during due to optical fibre gyro normal workOn position, therefore should
Method be only capable of fibre optic gyroscope work before detection gyroscope whether normal work.Micro mechanical gyroscope does not need light source, because
This method is not suitable for micro mechanical gyroscope.
Application for a patent for invention《Gyro working condition self-check system and method》(CN105973267A) a kind of top is proposed
Spiral shell self-checking system, including it is arranged on X, Y, Z road self-inspection coil inside gyroscope, the self-test signal being arranged on inside tester electricity
Road, on-off switch, selecting switch, control computer.Self-test signal circuit produces self-test signal, and interference is produced on self-inspection coil
Torque, control computer is received and processes the signal of gyroscope output realizes the Autonomous test of gyro under inactive state.The method
The precondition of work is that gyroscope need to remain static down, therefore is that cannot be carried out using the method under gyro working condition
Detection.
Application for a patent for invention《A kind of capacitance pressure transducer, with self-test device and preparation method thereof》
(CN105043603A)、《A kind of piezoresistive pressure sensor with self-test device and preparation method thereof》
(CN104697681A)、《A kind of piezoresistive pressure sensor with self-test device and preparation method thereof》(CN105716753A)
It is directed to a kind of self-sensing method of pressure sensor, each patent is directed to the pressure sensor of different designs, with reference to it not
With process in pressure sensor structure integrated Autonomous test electrode, using electrostatic force simulated pressure, realize pressure sensor
Autonomous test.
Patent of invention《A kind of accelerometer of the static electrification Autonomous test that single silicon-chip body micromechanical process is realized》
(CN1570651A) Integrated Accelerometer and self-inspection on same unit are proposed and drives actuator, driven by self-inspection
Applied voltage signal on moving electrode, realizes static-electronic driving mass, detects the displacement of mass and can realize accelerometer
Autonomous test.Patent of invention《Capacitance acceleration transducer and its manufacture method in a kind of face containing self-checking function》
(CN106018880A) capacitance acceleration transducer in a kind of face containing self-checking function is proposed.The method is utilized certainly
The motion of the acceleration transducer mass that the input of applied voltage analog acceleration causes between detecting electrode and movable electrode, so that
Detection capacitance variations are caused to realize the wafer scale scale and Autonomous test of acceleration transducer.Its advantage is based on prefabricated hollow SOI
Wafer is manufactured, it is to avoid make acceleration sensor structure using bonding technology or sacrificial layer technology.Above-mentioned two patent is both needed to
Autonomous test electrode is designed in accelerometer, it is necessary to circuit is produced from detectable voltage signals, self-inspection is formed in Autonomous test electrode
Survey electrostatic drive power, drive mass motion, according to mass move displacement judge accelerometer whether normal work.
United States Patent (USP)《Rotation rate sensor with built in test circuit》(US5426970)
Propose a kind of tuning fork gyroscope self-sensing method.The method is that detection driving electrodes are designed on gyroscope tuning fork structure,
Self-detection circuit is produced from detection signal, and Autonomous test driving force is produced in Autonomous test driving electrodes, fictionalizes turning rate input
In the case of tuning fork moving situation.The original detection circuit of gyro is constant.Letter is moved according to the tuning fork structure that detection circuit measuring is arrived
Number with Autonomous test signal contrast judge, can detect whether gyro working properly.When there is extraneous input true angular velocity,
The virtual fortune that the tuning fork structure motor message that detection circuit measuring is arrived is produced for the motion of Coriolis effect generation and Autonomous test signal
Dynamic superposition, the true input angular velocity of gyro is drawn by the output signal that known self-test signal is produced is subtracted from gyro output
Signal.The method can with real-time monitoring gyro whether normal work, but its need on gyro tuning fork structure design Autonomous test electricity
Pole, increased design complexity.
The content of the invention
The technical problems to be solved by the invention are to overcome defect of the prior art, there is provided a kind of based on quadrature error letter
Number micro mechanical gyroscope automatic fault selftesting method, it is not necessary to increase Autonomous test driving electrodes in gyroscope structure, and can
With real-time detection gyro before gyro work and in work whether normal work, it is to avoid other method can only be before gyro works
The limitation of detection.
In order to solve the above technical problems, the present invention provides a kind of micro mechanical gyroscope failure based on quadrature error signal
Self-sensing method, it is characterized in that, based on existing micro mechanical gyroscope sensitivity detection loop, the letter of sensitivity detection circuit output
Not only include in number with angular velocity signal also comprising quadrature error signal, by detect quadrature error signal amplitude Characteristics or
Whether frequecy characteristic, judges quadrature error signal in normal range (NR), thus infer micromechanical gyro whether normal work.
The gyro drive signal that the signal of sensitivity detection circuit output is drawn all the way with same phase is demodulated, after demodulation
Signal include high fdrequency component；By calculating the frequency values of high fdrequency component, judge the frequency values whether in setting range；
Judge whether the frequency characteristic of quadrature error signal is normal according to the frequency values, if quadrature error signal frequency characteristic deviate from setting
Determine scope, then judge that gyro work is abnormal, break down.
The gyro drive signal that the signal of sensitivity detection circuit output is drawn all the way with same phase is demodulated, after demodulation
Signal include DC component；The amplitude characteristic that whether quadrature error signal is judged in setting range according to the DC component is
It is no normal, if quadrature error signal amplitude characteristic deviate from setting range, judge that gyro work is abnormal, break down.
The high fdrequency component is two harmonics of the frequency of the drive voltage signal that gyro drive circuit is produced.
The DC component by demodulating after signal it is low-pass filtered after obtain.
The equation of motion of the micro mechanical gyroscope mass in drive shaft and sensitive axial direction is expressed as：
Wherein, x and y is displacement of the mass in drive shaft and sensitive axes, mxAnd myIt is mass in drive shaft and sensitive axes
Equivalent mass, bxAnd byRespectively drive shaft and sensitive axes damped coefficient, byxIt is the coupling of sensitive axes damping couple to drive shaft
Close damped coefficient, bxyIt is the Coupling Damping coefficient of drive shaft damping couple to sensitive axes, kxAnd ky, be respectively drive shaft and sensitivity
The stiffness coefficient of axle, kyxIt is the coupling stiffness coefficient on sensitive axes stiffness coupling to drive shaft, kxyFor drive shaft stiffness coupling is arrived
Coupling stiffness coefficient in sensitive axes, ΩzFor Z axis to input angular velocity, FxAnd FyOutside in drive shaft and sensitive direction of principal axis
Power；
Above-mentioned equation group is reduced to：
By the simplified formula of equation group second, obtain：
Wherein B is by my、by、ky,FyThe constant for together deciding on, C is by my、by、ky, kxyThe constant that x is together decided on,
ωdFor the driving force F that gyro drive circuit is producedxAngular frequency,It is by my、by、kyThe phase constant of decision；Constant B is free of
Orthogonal coupling stiffness kxyInformation, and constant C contains orthogonal coupling stiffness kxyInformation.
Using the demodulated signal D with gyro drive signal same frequency and same-phasei(t)=Aisin(ωdt+θi) to gyro
Signal y (t) of sensitivity detection circuit output carries out in-phase solution tune, wherein AiIt is the amplitude of the quadrature demodulated signal, θiIt is phase
Value, obtains
WhenWhen, above formula is reduced to
Signal after in-phase solution is adjusted includes one on quadrature error signal amplitudeDC component and one on
The ω of driving frequency doubled frequency 2dHigh-frequency signal.
Using the demodulated signal with gyro drive signal same frequency but quadrature in phaseIt is right
Signal y (t) of the sensitive detection circuit output of gyro is demodulated, wherein AqIt is the amplitude of the quadrature demodulated signal, θqIt is phase
Value；LPF, obtains DC terms
When the phase of demodulated signalWhen, comprising quadrature error informationItem can be with complete
Totally disappeared and remove, only remainCalculate input angular velocity signal Ωz。
The beneficial effect that the present invention is reached：
There is quadrature error in micromechanical gyro, automatic fault selftesting method of the invention is not by gyroscope structure material, knot
Configuration formula, gyro drive and detect the limitation of circuit operation principle, can be applicable.The advantage of the detection method also resides in it can
With real-time detection gyro before gyro work and in work whether normal work, it is to avoid some methods can only be before gyro works
The limitation of detection.Because the method need not increase Autonomous test driving electrodes in gyroscope structure, it is to avoid to increase failure
Detection function and increase the difficulty of Gyroscope Design.
Brief description of the drawings
Fig. 1 is micro mechanical gyroscope lumped parameter model schematic diagram.
Fig. 2 is the operation principle schematic diagram of the micro mechanical gyroscope of sense mode open loop detection.
Fig. 3 is a kind of fault self-checking based on quadrature error signal of the micro mechanical gyroscope of sense mode open loop detection
Survey principle schematic.
Fig. 4 is a kind of quadrature error signal fault detect principle schematic.
Fig. 5 is a kind of fault self-checking based on quadrature error signal of the micro mechanical gyroscope of sense mode closed loop detection
Survey principle schematic.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.Following examples are only used for clearly illustrating the present invention
Technical scheme, and can not be limited the scope of the invention with this.
Micro mechanical gyroscope can be divided into miniature quartz mechanical gyroscope and miniature silicon mechanical gyroscope by material, by structure
Torsional pendulum type, tuning-fork type, frame-type, spherical shell type, column type etc. can be divided into.By driving and detection method, electrostatic, electricity can be divided into
Magnetic-type, piezoelectric type, pressure resistance type etc..Although the material of micro mechanical gyroscope, structure, detection mode are varied, micro computer
The basic functional principle all same of tool gyroscope.As shown in figure 1, micro mechanical gyroscope is driven when working firstly the need of by circuit
Kinoplaszm gauge block m stable vibrations on driving axial, when gyro angular velocity detection axially has input angular velocity, Coriolis effect is produced
Raw taxi driver brother's formula power causes that sensitive-mass block produces vibration in sensitive axes, by detecting vibration feelings of the mass in sensitive axes
Condition, can extrapolate input angular velocity.
The mass of micro mechanical gyroscope is typically connected by girder construction with anchoring base, and mass can be in drive shaft
Moved on (X-axis) and sensitive axes (Y-axis) direction.
With reference to Fig. 2, because the sensitive structure of micro mechanical gyroscope is manufactured using micro fabrication, inevitably processing
Error causes the presence of stiffness coupling between gyro drive shaft and sensitive axes, and the vibration signal of gyro driving axial can be by rigidity coupling
Close in sensitive axes.The equation of motion of the general micromechanical gyro mass in drive shaft and sensitive axial direction is represented by
Wherein x and y is displacement of the mass in drive shaft (X-axis) and sensitive axes (Y-axis), mxAnd myFor mass is driving
The equivalent mass of axle and sensitive axes, bxAnd byRespectively drive shaft and sensitive axes damped coefficient, byxFor sensitive axes damping couple is arrived
The Coupling Damping coefficient of drive shaft, bxyIt is the Coupling Damping coefficient of drive shaft damping couple to sensitive axes, kxAnd ky, be respectively drive
The stiffness coefficient of moving axis and sensitive axes, kyxIt is the coupling stiffness coefficient on sensitive axes stiffness coupling to drive shaft, kxyIt is drive shaft
Coupling stiffness coefficient on stiffness coupling to sensitive axes, ΩzFor Z axis to input angular velocity, FxAnd FyIt is drive shaft and sensitive axes
External force on direction.
After Vacuum Package, the damping of micro mechanical gyroscope is small, therefore Coupling Damping coefficient b in above-mentioned equationyx、
bxyCan ignore.Because sensitive axes vibration displacement y is much smaller than drive shaft vibration displacement x, therefore k can be ignoredyxY and
.Above-mentioned equation group can be reduced to
From the formula of equation group second of above-mentioned simplification, nonzero coefficient kxyThe vibration coupling of drive shaft sensitive axes have been arrived into.
Therefore the vibration displacement y of gyro mass sensitive axes is on drive shaft vibration displacement x, speedY-axis driving force FyAnd input
Angular velocity vector ΩzFunction.Due to drive shaft vibration displacement x, speedWith Y-axis driving force FyIt is to be controlled by circuit, is known
Amount, so can according to detection electric circuit inspection to gyro mass sensitive axes vibration displacement signal y calculate input angular velocity
Signal Ωz。
Because gyro electric circuit inspection to sensitive axes vibration displacement signal y include driving coupled signal kxyX is produced just
Hand over error sensitive signal and Coriolis effectThe sensitive signal of generation.Quadrature error signal is useless error interference letter
Number, it is necessary to eliminate quadrature error signal as far as possible.It is well known that driving coupled signal kxyThe sensitive signal that x is produced and input
The Coriolis effect that angular speed is producedAll the time there are 90 degree of phases in motor message of the mass for causing in sensitive axes
Difference, can be separated quadrature error signal and angular speed sensitive signal by quadrature demodulation mode.
By taking the micro mechanical gyroscope of sense mode open loop detection as an example, as Y-axis driving force FyWhen being zero, the sensitive inspection of gyro
The signal of slowdown monitoring circuit output is the solution of the formula of equation group second, can be expressed as
Wherein B is by my、by、ky,FyThe constant for together deciding on, C is by my、by、ky, kxyThe constant that x is together decided on,
ωdFor the driving force F that gyro drive circuit is producedxAngular frequency,It is by my、by、kyThe phase constant of decision.Understand constant B
Without orthogonal coupling stiffness kxyInformation, and constant C contains orthogonal coupling stiffness kxyInformation.
To eliminate quadrature error signal, signal y (t) to the sensitive detection circuit output of gyro is used and gyro drive signal
The demodulated signal of same frequency but quadrature in phaseIt is demodulated, wherein AqIt is the quadrature demodulation
The amplitude of signal, θqIt is phase value.After LPF, DC terms are obtained
When the phase of demodulated signalWhen, quadrature error signal can be completely eliminated, and only remainCan count
Calculation draws angular velocity signal Ωz。
The present invention proposes to realize micro mechanical gyroscope event by detecting the quadrature error signal of micro mechanical gyroscope
The detection of barrier judges.Because quadrature error signal is that driving axial vibration coupling is axially produced to sensitive, therefore quadrature error
Signal reflects the Vibration Condition of gyro drive shaft and sensitive axes simultaneously.Quadrature error signal is by the sensitive detection circuit of gyro simultaneously
Detect, share same front-end detection circuit with the detection signal of the sensitive output of gyro, only demodulated signal phase has 90 degree
Phase difference, therefore quadrature error signal also reflects that gyro sensitivity axial forward end detects the working condition of circuit.
Using the demodulated signal D with gyro drive signal same frequency and same-phasei(t)=Aisin(ωdt+θi) to gyro
Signal y (t) of sensitivity detection circuit output carries out in-phase solution tune, wherein AiIt is the amplitude of the quadrature demodulated signal, θiIt is phase
Value.Can obtain
WhenWhen, above formula can be reduced to
From above formula, in-phase solution adjust after signal comprising a direct current signal on quadrature error signal amplitude information and
Two is all the signal on the frequency multiplication of driving frequency two, furtherWith
A frequency can be merged into for 2 ωdHigh-frequency signal.Signal is adjusted to the in-phase solution carries out frequency spectrum calculating, it can be deduced that
The frequency values (in-phase solution is adjusted known to the frequency of signal) of quadrature error signal；Signal is adjusted to the in-phase solution carries out LPF, can
To draw the amplitude information of quadrature error signal.Quadrature error signal exists all the time during due to gyro normal work, and orthogonal
Error signal does not change with input angular velocity, therefore according to quadrature error signal whether in the frequency and amplitude range of setting,
May determine that gyro whether normal work.
If micro mechanical gyroscope is sense mode closed loop detects mode of operation, that is, there is Y-axis close-loop driven power FyWhen, Fy
It is the signal with input angular velocity signal same frequency and same-phase, it act as offsetting in equation group the Coriolis effect in the second formula.FyTo orthogonal coupling terms kxyThe quadrature error that x is produced does not produce influence, thus using orthogonal modulation method come
The quadrature error signal for obtaining gyro is still applicable the micro mechanical gyroscope of closed loop detection mode of operation.Micromechanical gyro
Instrument realizes the measurement to input angular velocity or angle using Coriolis effect.
As shown in figure 3, by taking the capacitance silicon micromechanical gyroscope of sense mode open loop detection as an example.Gyro drive circuit is produced
Raw drive voltage signal is applied in gyro drive shaft driving electrodes, and gyro mass is in the presence of electrostatic drive power along X-axis
Oscillating movement, the detecting electrode of driving axial detects motion conditions of the mass in driving axial, feeds back to drive control electricity
Road, realizes stable vibration of the gyro mass on driving axial.If now in the presence of extraneous input angular velocity, then coriolis force will
Make mass simultaneously along sensitive axes oscillating movement, be distributed in the upward detecting electrode of sensitive axes and detect mass in sensitive axial direction
Motor message, then through sensitivity detection circuit and demodulation filter circuit carry out signal transacting after export gyro signal.
Due to inevitable mismachining tolerance, cause there are cross-couplings between gyro drive shaft and sensitive axes.Through gyro
Not only include needing Ge Shi signals in the signal of sensitivity detection circuit output, also containing differing 90 degree with Ge Shi signal phases
The quadrature error signal that drive signal coupling is produced.Therefore by the signal of the sensitive detection circuit output of gyro and the top of 90 degree of phase shift
Spiral shell drive signal is demodulated, after LPF, can eliminate quadrature error signal, obtains reacting the voltage letter of input angular velocity
Number.
The present invention is proposed to keep gyro sensitivity detection loop design constant, and the signal of the sensitive detection circuit output of gyro is drawn
Go out the gyro drive signal all the way with same phase to be demodulated.Signal after the demodulation is high comprising a DC component and one
Frequency component (harmonic of driving frequency two).High fdrequency component can be drawn for example, by the method such as frequency spectrum calculating or square wave counting
Frequency values, according to the frequency values whether in setting range, it can be determined that whether the frequency of quadrature error signal normal, such as scheme
Shown in 4.DC component can be obtained after the demodulated signal is low-pass filtered, the DC component reacts the width of quadrature error signal
Value, according to the DC component whether in setting range, it can be determined that whether the amplitude of quadrature error signal is normal.Collective frequency
Detection and amplitude detection, you can judge orthogonal signalling whether in normal range of operation.If orthogonal signalling deviate from normal work
Scope, then may determine that gyro work is abnormal, break down, circuit output Reflector signal.
As shown in figure 5, the automatic fault selftesting method of the micro mechanical gyroscope of sense mode closed loop detection is similar to, no longer weigh
Multiple narration.
The above is only the preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, on the premise of the technology of the present invention principle is not departed from, some improvement and deformation can also be made, these improve and deform
Also should be regarded as protection scope of the present invention.
Claims (8)
1. a kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal, it is characterized in that, based on existing
Micro mechanical gyroscope sensitivity detection loop, not only includes in the signal of sensitivity detection circuit output and is also wrapped with angular velocity signal
Containing quadrature error signal, whether by detecting the amplitude Characteristics or frequecy characteristic of quadrature error signal, quadrature error signal is judged
In normal range (NR), thus infer micromechanical gyro whether normal work.
2. a kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal according to claim 1,
It is characterized in that, the gyro drive signal that the signal of sensitivity detection circuit output is drawn all the way with same phase is demodulated, and demodulates
Signal afterwards includes high fdrequency component；By calculating the frequency values of high fdrequency component, judge the frequency values whether in setting range
It is interior；Judge whether the frequency characteristic of quadrature error signal is normal according to the frequency values, if quadrature error signal frequency characteristic deviates
Setting range, then judge that gyro work is abnormal, breaks down.
3. a kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal according to claim 1,
It is characterized in that, the gyro drive signal that the signal of sensitivity detection circuit output is drawn all the way with same phase is demodulated, and demodulates
Signal afterwards includes DC component；Whether the amplitude characteristic of quadrature error signal is judged in setting range according to the DC component
It is whether normal, if quadrature error signal amplitude characteristic deviate from setting range, judge that gyro work is abnormal, break down.
4. a kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal according to claim 2,
It is characterized in that, the high fdrequency component is two harmonics of the frequency of the drive voltage signal that gyro drive circuit is produced.
5. a kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal according to claim 3,
It is characterized in that, the DC component by demodulating after signal it is low-pass filtered after obtain.
6. a kind of micro mechanical gyroscope automatic fault selftesting based on quadrature error signal according to claim 1,2 or 3
Method, it is characterized in that, the equation of motion of the micro mechanical gyroscope mass in drive shaft and sensitive axial direction is expressed as：
Wherein, x and y is displacement of the mass in drive shaft and sensitive axes, mxAnd myFor mass drive shaft and sensitive axes etc.
Effect quality, bxAnd byRespectively drive shaft and sensitive axes damped coefficient, byxFor the coupling of sensitive axes damping couple to drive shaft hinders
Buddhist nun's coefficient, bxyIt is the Coupling Damping coefficient of drive shaft damping couple to sensitive axes, kxAnd ky, be respectively drive shaft and sensitive axes
Stiffness coefficient, kyxIt is the coupling stiffness coefficient on sensitive axes stiffness coupling to drive shaft, kxyIt is drive shaft stiffness coupling to sensitivity
Coupling stiffness coefficient on axle, ΩzFor Z axis to input angular velocity, FxAnd FyIt is the external force in drive shaft and sensitive direction of principal axis；
Above-mentioned equation group is reduced to：
By the simplified formula of equation group second, obtain：
Wherein B is by my、by、ky,FyThe constant for together deciding on, C is by my、by、ky, kxyThe constant that x is together decided on, ωdIt is top
The driving force F that spiral shell drive circuit is producedxAngular frequency,It is by my、by、kyThe phase constant of decision；Constant B is free of corss coupling
Close rigidity kxyInformation, and constant C contains orthogonal coupling stiffness kxyInformation.
7. a kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal according to claim 6,
It is characterized in that, using the demodulated signal D with gyro drive signal same frequency and same-phasei(t)=Aisin(ωdt+θi) to gyro
Signal y (t) of sensitivity detection circuit output carries out in-phase solution tune, wherein AiIt is the amplitude of the quadrature demodulated signal, θiIt is phase
Value, obtains
WhenWhen, above formula is reduced to
Signal after in-phase solution is adjusted includes one on quadrature error signal amplitudeDC component and one on drive frequency
The ω of rate doubled frequency 2dHigh-frequency signal.
8. a kind of micro mechanical gyroscope automatic fault selftesting method based on quadrature error signal according to claim 7,
It is characterized in that, using the demodulated signal with gyro drive signal same frequency but quadrature in phase
Signal y (t) to the sensitive detection circuit output of gyro is demodulated, wherein AqIt is the amplitude of the quadrature demodulated signal, θqIt is phase
Value；LPF, obtains DC terms
When the phase of demodulated signalWhen, comprising quadrature error informationItem can disappear completely
Remove, only remainCalculate input angular velocity signal Ωz。
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| CN107817432A (en) * | 2017-10-23 | 2018-03-20 | 北京晨晶电子有限公司 | A kind of MEMS gyroscope circuit board detecting method and device |
| CN107957272A (en) * | 2018-01-10 | 2018-04-24 | 中国航空工业集团公司北京长城航空测控技术研究所 | A kind of method that gyroscope correction zero bias are put using Orthogonal Double |
| CN109211275A (en) * | 2018-10-22 | 2019-01-15 | 中国兵器工业集团第二四研究所苏州研发中心 | A kind of zero bias temperature compensation method of gyroscope |
| CN110702141A (en) * | 2018-07-09 | 2020-01-17 | 美国亚德诺半导体公司 | Method and system for self-testing MEMS inertial sensors |
| US10746550B2 (en) | 2018-08-01 | 2020-08-18 | Honeywell International Inc. | Resonator fiber-optic gyro with quadrature error reducer |
| CN114370886A (en) * | 2021-11-23 | 2022-04-19 | 上海航天控制技术研究所 | Full-angle mode vibration gyro measurement error self-calibration method based on virtual rotation |
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| CN107957272A (en) * | 2018-01-10 | 2018-04-24 | 中国航空工业集团公司北京长城航空测控技术研究所 | A kind of method that gyroscope correction zero bias are put using Orthogonal Double |
| CN107957272B (en) * | 2018-01-10 | 2021-04-06 | 中国航空工业集团公司北京长城航空测控技术研究所 | Method for correcting zero offset by using orthogonal double-position gyroscope |
| CN110702141A (en) * | 2018-07-09 | 2020-01-17 | 美国亚德诺半导体公司 | Method and system for self-testing MEMS inertial sensors |
| US10746550B2 (en) | 2018-08-01 | 2020-08-18 | Honeywell International Inc. | Resonator fiber-optic gyro with quadrature error reducer |
| CN109211275A (en) * | 2018-10-22 | 2019-01-15 | 中国兵器工业集团第二四研究所苏州研发中心 | A kind of zero bias temperature compensation method of gyroscope |
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| CN114370886B (en) * | 2021-11-23 | 2024-01-02 | 上海航天控制技术研究所 | Full-angle mode vibration gyro measurement error self-calibration method based on virtual rotation |
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