CN109556590B - Resonance ring/multi-resonance ring six-axis inertial sensor - Google Patents
Resonance ring/multi-resonance ring six-axis inertial sensor Download PDFInfo
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- CN109556590B CN109556590B CN201811301113.XA CN201811301113A CN109556590B CN 109556590 B CN109556590 B CN 109556590B CN 201811301113 A CN201811301113 A CN 201811301113A CN 109556590 B CN109556590 B CN 109556590B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
Abstract
The invention discloses a resonant ring/multi-resonant ring six-axis inertial sensor which comprises a resonant ring and an electrode unit arranged close to the resonant ring, wherein the electrode unit comprises an XY-axis acceleration measuring unit, a Z-axis acceleration measuring unit, an XY-axis angular rate measuring unit and a Z-axis angular rate measuring unit, and electrodes and the resonant ring are arranged in a clearance mode, wherein the XY axis is the plane where the resonant ring is located, and the Z axis is the plane where the axis of the resonant ring is located. The multi-resonant ring six-axis inertial sensor includes more than two resonant ring six-axis inertial sensors in a nested arrangement. The invention can realize the detection of the three-axis angular rate and the three-axis acceleration by using the single resonant ring and has the advantages of high detection precision, simple and compact structure and small volume.
Description
Technical Field
The invention relates to the field of inertial sensors, in particular to a resonance ring/multi-resonance ring six-axis inertial sensor which can detect three-axis angular rate and three-axis acceleration by using a single resonance ring.
Background
Most of the existing inertial sensors only can detect one-axis or two-axis inertial vectors. To achieve the three-axis acceleration and three-axis angular rate detection required for inertial combination, multiple sensors need to be mounted orthogonally to each other. The most common method is by using three gyros and three accelerometers. The civil MEMS has products with six axes or even nine axes (three-axis magnetic sensors), but the internal part is still realized by the spatial combination of a plurality of sensors, and the precision is low.
Disclosure of Invention
The technical problems to be solved by the invention are as follows: aiming at the problems in the prior art, the invention provides the resonant ring/multi-resonant ring six-axis inertial sensor which can detect the three-axis angular rate and the three-axis acceleration by using a single resonant ring, and has the advantages of high detection precision, simple and compact structure and small volume.
In order to solve the technical problems, the invention adopts the technical scheme that:
a six-axis inertial sensor of a resonant ring comprises the resonant ring and an electrode unit arranged close to the resonant ring, wherein the electrode unit comprises an XY-axis acceleration measuring unit, a Z-axis acceleration measuring unit, an XY-axis angular rate measuring unit and a Z-axis angular rate measuring unit, and the XY-axis acceleration measuring unit comprises four electrodes uniformly distributed on the outer side or the inner side of the resonant ring; the Z-axis acceleration measuring unit comprises two pairs of electrodes arranged along the diameter of the resonant ring, and each pair of electrodes comprises two electrodes which are arranged up and down symmetrically relative to the resonant ring; the XY axis angular rate measuring unit comprises two pairs of electrodes arranged along the diameter of the resonant ring, and each pair of electrodes comprises two electrodes which are arranged up and down symmetrically relative to the resonant ring; the Z-axis angular rate measuring unit comprises four electrodes which are uniformly distributed on the outer side or the inner side of the resonant ring, the electrodes and the resonant ring are arranged in a clearance mode, the XY axis is the plane where the resonant ring is located, and the Z axis is the plane where the axis of the resonant ring is located.
Preferably, the electrode unit comprises four electrode groups uniformly distributed along the circumference of the resonance ring, one electrode is arranged between any two electrode groups, and the electrodes between any two electrode groups form four electrodes of the Z-axis angular rate measuring unit; the four electrode groups include electrode group # 1 to electrode group # 4, and electrode group # 1 includes { Paz1wy2、Pax1wz2、Paz2wy1、Pax2wz1Four electrodes, electrode set # 2 includes { Paz }1wx2、Pay1wz1、Paz2wx1、Pay2wz2Four electrodes, electrode set # 3 includes { Paz }1wy1、Pax2wz2、Paz2wy2、Pax1wz1Four electrodes, electrode set # 4 includes { Paz }1wx1、Pay2wz1、Paz2wx2、Pay1wz2Four electrodes, and electrode set # 1 &The four electrodes of the electrode group # 4 are arranged with the gap between the resonance ring in the order of upper side, inner side, lower side, and outer side, wherein Pax1wz1、Pax2wz2、Pax2wz1、Pax1wz2The four electrodes are simultaneously used as an X-axis acceleration detection electrode of an XY-axis acceleration measurement unit, a Z-axis angular rate detection electrode of a Z-axis angular rate measurement unit, Pay1wz1、Pay2wz2、Pay2wz1、Pay1wz2The four electrodes are simultaneously used as a Y-axis acceleration detection electrode of the XY-axis acceleration measurement unit, a Z-axis angular rate detection electrode of the Z-axis angular rate measurement unit, Paz1wy1、Paz2wy2、Paz2wy1、Paz1wy2The four electrodes are simultaneously used as a Z-axis acceleration detection electrode of a Z-axis acceleration measurement unit, a Y-axis angular rate detection electrode of an XY-axis angular rate measurement unit, Paz1wx1、Paz2wx2、Paz2wx1、Paz1wx2The four electrodes are simultaneously used as a Z-axis acceleration detection electrode of the Z-axis acceleration measuring unit and an X-axis angular rate detection electrode of the XY-axis angular rate measuring unit.
Preferably, the distance between the electrode and the gap of the resonant ring is 1-2 μm.
The invention also provides a multi-resonant-ring six-axis inertial sensor which comprises more than two resonant-ring six-axis inertial sensors which are arranged in a nested manner.
Compared with the prior art, the invention has the following advantages:
1. the invention comprises a resonance ring and an electrode unit arranged close to the resonance ring, wherein the electrode unit comprises an XY axis acceleration measuring unit, a Z axis acceleration measuring unit, an XY axis angular rate measuring unit and a Z axis angular rate measuring unit, and the electrodes are arranged in a clearance with the resonance ring.
2. The invention comprises a resonance ring and an electrode unit arranged close to the resonance ring, wherein the electrode unit comprises an XY axis acceleration measuring unit, a Z axis acceleration measuring unit, an XY axis angular rate measuring unit and a Z axis angular rate measuring unit, and the electrodes are arranged in a clearance with the resonance ring, wherein the acceleration measuring unit can be not used and can be used as a scheme for only detecting the triaxial angular rate, the precision is slightly low, and the cost is slightly low.
3. The electrode unit comprises an XY axis acceleration measuring unit, a Z axis acceleration measuring unit, an XY axis angular rate measuring unit and a Z axis angular rate measuring unit, and can adopt multiplexing electrodes according to needs.
4. In the electrode unit, a plurality of electrodes are symmetrically arranged, part of the electrodes can be deleted in practical situations, most functions of the scheme can be completed even if the electrodes are deleted, and the precision is slightly low.
Drawings
Fig. 1 is a schematic structural diagram of an embodiment of the present invention.
Fig. 2 is a schematic diagram of a spatial coordinate system according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of a circuit principle of oscillation starting of the resonant ring in the embodiment of the invention.
Fig. 4 is a schematic diagram of the vibration of the resonant ring in the embodiment of the present invention.
Fig. 5 is a schematic diagram of the angular rate measurement in the embodiment of the present invention.
Fig. 6 is a schematic diagram illustrating the principle of Z-axis angular rate measurement in an embodiment of the present invention.
Fig. 7 is a schematic diagram illustrating the principle of measuring the XY-axis angular velocity rate in the embodiment of the present invention.
Fig. 8 is a schematic structural diagram of an XY axis angular rate measurement unit in an embodiment of the present invention.
Fig. 9 is a schematic structural diagram of a Z-axis acceleration measurement unit in an embodiment of the present invention.
Fig. 10 is a schematic structural diagram of an XY axis acceleration measuring unit in the embodiment of the present invention.
Fig. 11 is a schematic cross-sectional structure diagram of an electrode assembly in an embodiment of the invention.
Fig. 12 is a schematic diagram of the principle of electrode multiplexing in the embodiment of the present invention.
Fig. 13 is a schematic circuit diagram of electrode multiplexing in the embodiment of the present invention.
Detailed Description
As shown in fig. 1, the six-axis inertial sensor of the resonant ring of the present embodiment includes a resonant ring and an electrode unit disposed close to the resonant ring, where the electrode unit includes an XY-axis acceleration measuring unit, a Z-axis acceleration measuring unit, an XY-axis angular rate measuring unit, and a Z-axis angular rate measuring unit, and the XY-axis acceleration measuring unit includes four electrodes uniformly distributed on the outer side or the inner side of the resonant ring; the Z-axis acceleration measuring unit comprises two pairs of electrodes arranged along the diameter of the resonant ring, and each pair of electrodes comprises two electrodes which are arranged in an up-down symmetrical mode relative to the resonant ring; the XY axis angular rate measuring unit comprises two pairs of electrodes arranged along the diameter of the resonant ring, and each pair of electrodes comprises two electrodes which are arranged up and down symmetrically relative to the resonant ring; the Z-axis angular rate measuring unit includes four electrodes uniformly distributed on the outer side or the inner side of the resonant ring, the electrodes are all arranged in a gap with the resonant ring, wherein the XY-axis is a plane where the resonant ring is located, and the Z-axis is a plane where the axis of the resonant ring is located, as shown in fig. 2, wherein ω x, ω y, ω Z: x, Y, Z, the rotation angle rate in the direction is DC-1 KHz; ax, ay, az: x, Y, Z linear acceleration with frequency of DC-1 KHz. Because the electrodes are arranged in a clearance with the resonance ring, the electrodes and the resonance ring interact with each other through electrostatic force, and position detection is carried out through capacitance between the electrodes and the resonance ring. In the embodiment, the distance between the electrode and the resonant ring is 1-2 μm, and the electrostatic force can be considerably increased under the condition of small distance.
Firstly, starting oscillation by the resonance ring.
By applying an AC signal having the same frequency as the natural frequency of the resonant ring to four electrodes on the outside or inside of the resonant ring (e.g. electrodes P x wz in FIG. 1)1And P x wz2Wild card character), applying an alternating electrostatic force to the resonant ring, the resonant ring will vibrate, the process and the hemispherical gyroscopeAs with a resonant ring gyro. At this time, the substance at and near point a vibrates in the horizontal direction as shown in fig. 3. The material at and near point B will generate linear vibrations in the up-down direction as shown in fig. 3, which are the basis of XYZ triaxial angular rate sensing. If the vibration of the point A is Asin omega0t, the vibration of point B is Asin (ω)0t + pi), A is the vibration amplitude, and the vibration condition of the resonant ring is shown in FIG. 4. Wherein ω is0The frequency is the natural vibration angular rate and is 12 KHz-100 KHz.
And secondly, measuring the angular rate.
The basic principle of angular rate measurement is shown in fig. 5, when a particle moves linearly at a velocity V and its velocity changes due to an external force, a direction-changing acceleration is provided, which is the common centripetal acceleration.
2.1, Z-axis angular rate measurement.
The Z-axis angular rate measuring unit comprises four electrodes uniformly distributed on the outer side or the inner side of the resonance ring, and any one of the four electrodes uniformly distributed on the outer side or the inner side of the resonance ring can realize Z-axis angular rate measurement.
The principle of Z-axis angular rate measurement is the same as that of hemispherical gyros. As shown in FIG. 6, the particle motion near point A is Asin ω0t, velocity A ω0cosω0t, the Coriolis acceleration at point A is: a isA=Aω0cosω0t·ωz. Similarly, the coriolis acceleration at point B is: a isB=Aωzω0cos(ω0t + pi). In the circumferential direction, the Coriolis accelerations of the point A and the point B are equal in magnitude and opposite in direction and extend along the circumferential tangent direction, and the point C which is originally not fixed can vibrate under the action of the two forces, and the vibration is generated through Pwsz1By detecting the vibration of point C, omega can be measuredzThe point C can be kept still by a force balance mode to measure omegaz. At other locations where the vibration ring is circumferentially symmetric, the same happens as at point A, B, C.
2.2, XY axial angular rate measurement.
As shown in fig. 7, when there is an angular velocity ωxWhen the information is input, the user can select the information,the direction of the motion speed of the point A, A' is changed when the angular speed omega along the Y axis extendsyWhen inputting, the speed direction of the motion at point B, B' is changed, and when the speed direction is changed, the coriolis acceleration is generated. By detecting these coriolis forces (accelerations) ω is measuredx、ωz。
As shown in fig. 8, the XY-axis angular rate measuring unit includes two pairs of electrodes arranged along the diameter of the resonance ring, and each pair of electrodes includes two electrodes arranged vertically symmetrically with respect to the resonance ring. FIG. 8 illustrates that when ω is presentyWhen the A, A 'point occurs at the input, since the B, B' point rotates along the Y axis along with the resonance ring, the speed direction of the point changes, and the generated acceleration is aBy=ωyω0cosω0the acceleration formed by the points t, A and A' is equal in magnitude and opposite in direction, is perpendicular to the plane of the resonant ring, and can pass through Paz1wy1、Paz1wy2The electrodes are used to detect A, A' point vibration perpendicular to the plane of the ring to measure angular rate omegayω can also be measured by keeping the point A, A' constant in the direction perpendicular to the plane of the ring by force balancingy. The same occurs with an angular velocity ω along the X-axisxWhen inputting, the points to be measured are points A and A', and the corresponding detection electrodes are Paz on the Y axis1wx1、Paz1wx2、Paz2wx1、Paz2wx2。
And thirdly, measuring the acceleration.
When the acceleration is measured, the whole resonant ring is taken as a mass block, the position of the ring relative to the base is subjected to closed-loop control in X, Y, Z three directions respectively, and the control force in the corresponding direction is the corresponding acceleration input.
3.1, measuring the Z-axis acceleration.
As shown in fig. 9, the Z-axis acceleration measuring unit includes two pairs of electrodes arranged along the diameter of the resonance ring, and each pair of electrodes includes two electrodes arranged vertically symmetrically with respect to the resonance ring. When there is an acceleration azWhen input is along the Z-axis direction, the resonant ringThe ring body (m) moves in the direction opposite to the acceleration input direction, resulting in a change in the gap between the electrodes, delta1ZBecome smaller, delta2ZBecomes larger at Paz by closed loop feedback1Applying a greater voltage, Paz, to the electrodes2Applying a smaller voltage to the electrodes to maintain delta1Z、δ2ZThe gap is not changed, and the voltage difference applied between the two electrodes reflects azThe size of (2).
3.2, measuring the acceleration of XY axes.
As shown in fig. 10, the XY-axis acceleration measuring unit includes four pieces of electrodes uniformly distributed on the outer or inner side of the resonance ring. The XY-axis acceleration is in a different direction than the Z-axis acceleration, the XY-axis acceleration input being parallel to the plane of the resonating ring, and the Z-axis acceleration being perpendicular to the plane of the resonating ring. The measurement principle of the acceleration of the X axis and the acceleration of the Y axis are similar to that of the Z axis, and due to the structural reason, the X, Y-axis acceleration measurement and control electrodes respectively have only 4 pieces at most, and the Z-axis measurement and control electrodes can have 8 pieces at most. Closed loop control of clearance delta1XNot change, now Pax1And Pax2Voltage difference between a and b reflects axThe size of (2). Also, the gap δ is closed-loop controlled1YInvariably, Pay1And Pay2The voltage difference between them also reflects ayThe size of (2).
It should be noted that the XY axis acceleration measuring unit, the Z axis acceleration measuring unit, the XY axis angular rate measuring unit, and the Z axis angular rate measuring unit are theoretically independent from each other, and can be actually multiplexed as needed. Many of the electrodes in this embodiment are used to detect both acceleration and angular rate, and possibly gap size.
As shown in fig. 1, the electrode unit of this embodiment includes four electrode groups uniformly distributed along the circumference of the resonant ring, one electrode is disposed between any two electrode groups, and the electrodes between any two electrode groups constitute four electrodes (two pieces of Pwsz) of the Z-axis angular rate measuring unit1Two sheets Pwsz2）。
As shown in FIG. 1, the four electrode groups include electrode group #1 to electrode group #4, and electrode group #1 includes { Paz1wy2、Pax1wz2、Paz2wy1、Pax2wz1Four electrodes, electrode set #2 includes { Paz }1wx2、Pay1wz1、Paz2wx1、Pay2wz2Four electrodes, electrode set #3 includes { Paz }1wy1、Pax2wz2、Paz2wy2、Pax1wz1Four electrodes, electrode set #4 includes { Paz }1wx1、Pay2wz1、Paz2wx2、Pay1wz2Four electrodes, and four electrodes of electrode group #1 to electrode group #4 are arranged with the resonance ring gap in the order of upper side, inner side, lower side, outer side (the cross-sectional structure of electrode group #3 is shown in fig. 11), wherein Pax1wz1、Pax2wz2、Pax2wz1、Pax1wz2The four electrodes are simultaneously used as an X-axis acceleration detection electrode of an XY-axis acceleration measurement unit, a Z-axis angular rate detection electrode of a Z-axis angular rate measurement unit, Pay1wz1、Pay2wz2、Pay2wz1、Pay1wz2The four electrodes are simultaneously used as a Y-axis acceleration detection electrode of the XY-axis acceleration measurement unit, a Z-axis angular rate detection electrode of the Z-axis angular rate measurement unit, Paz1wy1、Paz2wy2、Paz2wy1、Paz1wy2The four electrodes are simultaneously used as a Z-axis acceleration detection electrode of a Z-axis acceleration measurement unit, a Y-axis angular rate detection electrode of an XY-axis angular rate measurement unit, Paz1wx1、Paz2wx2、Paz2wx1、Paz1wx2The four electrodes are simultaneously used as a Z-axis acceleration detection electrode of the Z-axis acceleration measuring unit and an X-axis angular rate detection electrode of the XY-axis angular rate measuring unit. In this embodiment, a plurality of electrodes are symmetrically arranged, and some of the electrodes, such as Paz, may be omitted in practice1wy1、Paz1wy2、Paz1wx1、Paz1wx2Electrode for electrochemical cellMost functions of the scheme can still be completed by deleting the parts, and the precision is slightly low.
As shown in fig. 12, with multiplexed electrodes Paz1wy1And electrode Paz1wy2For example, the two electrodes should complete delta1YAnd delta2YThe functions of gap detection, Z-axis acceleration closed loop and Y-axis angular rate detection. In order to multiplex the two electrodes for the above functions, a frequency multiplexing method is adopted. Paz1wy1And Paz2wy2The circuit for electrode multiplexing is shown in FIG. 13, acceleration azAngular velocity omegayThe low-frequency input quantity of DC-1 KHz, the natural vibration frequency omega of the resonant ringoFor 12KHz ~100KHz, several different frequencies are designed in this embodiment, so that the following are satisfied: omegac>>ωo>>ω(az,ωy)。ωcCarrier frequency for gap detection, applied to the resonant ring body, ωoIs the natural frequency, omega, of the resonant ring(az,ωy)The frequency of the acceleration and angular rate to be detected. Finally, the detection signal is amplified by high pass to lead the carrier frequency omega to becAfter that, the detection signal delta is obtained by demodulating it1YAnd delta2YDetecting the signal delta1YAnd delta2YObtaining Z-axis acceleration closed-loop signal and detecting signal delta through a low-pass filter1YAnd delta2YEnabling the natural vibration frequency omega of the resonance loop through a band-pass filteroAnd obtaining a Y-axis angular rate detection signal. The same multiplexing method can be extended to other multiplexing electrodes, thereby providing circuit support for the implementation of the method of the embodiment.
In addition, the embodiment also provides a multi-resonant-ring six-axis inertial sensor, which includes more than two resonant-ring six-axis inertial sensors arranged in a nested manner, the resonant-ring six-axis inertial sensors are nested layer by layer from inside to outside, and similarly, the detection of the three-axis angular rate and the three-axis acceleration based on a single resonant ring can be realized, and the detection precision can be further improved by the multi-resonant-ring six-axis inertial sensors, and the nested manner of the multi-resonant-ring six-axis inertial sensors is smaller in size and convenient to integrate.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.
Claims (3)
1. A six inertial sensor of resonant ring characterized in that: the electrode unit comprises an XY axis acceleration measuring unit, a Z axis acceleration measuring unit, an XY axis angular rate measuring unit and a Z axis angular rate measuring unit, wherein the XY axis acceleration measuring unit comprises four electrodes uniformly distributed on the outer side or the inner side of the resonance ring; the Z-axis acceleration measuring unit comprises two pairs of electrodes arranged along the diameter of the resonant ring, and each pair of electrodes comprises two electrodes which are arranged up and down symmetrically relative to the resonant ring; the XY axis angular rate measuring unit comprises two pairs of electrodes arranged along the diameter of the resonant ring, and each pair of electrodes comprises two electrodes which are arranged up and down symmetrically relative to the resonant ring; the Z-axis angular rate measuring unit comprises four electrodes which are uniformly distributed on the outer side or the inner side of the resonant ring, and the electrodes and the resonant ring are arranged in a clearance mode, wherein the XY axis is the plane where the resonant ring is located, and the Z axis is the plane where the axis of the resonant ring is located; the electrode unit comprises four electrode groups which are uniformly distributed along the circumference of the resonance ring, one electrode is arranged between any two electrode groups, and the electrodes between any two electrode groups form four electrodes of the Z-axis angular rate measuring unit; the four electrode groups include electrode group #1 to electrode group #4, and electrode group #1 includes { Paz1wy2、Pax1wz2、Paz2wy1、Pax2wz1Four electrodes, electrode set #2 includes { Paz }1wx2、Pay1wz1、Paz2wx1、Pay2wz2Four electrodes, electrode set #3 includes { Paz }1wy1、Pax2wz2、Paz2wy2、Pax1wz1Four electrodes, electrode set #4 includes { Paz }1wx1、Pay2wz1、Paz2wx2、Pay1wz2Four electrodes, and four electrodes of the electrode group #1 to the electrode group #4 are arranged with the resonant ring gap in the order of upper side, inner side, lower side and outer side, wherein Pax1wz1、Pax2wz2、Pax2wz1、Pax1wz2The four electrodes are simultaneously used as an X-axis acceleration detection electrode of an XY-axis acceleration measurement unit, a Z-axis angular rate detection electrode of a Z-axis angular rate measurement unit, Pay1wz1、Pay2wz2、Pay2wz1、Pay1wz2The four electrodes are simultaneously used as a Y-axis acceleration detection electrode of the XY-axis acceleration measurement unit, a Z-axis angular rate detection electrode of the Z-axis angular rate measurement unit, Paz1wy1、Paz2wy2、Paz2wy1、Paz1wy2The four electrodes are simultaneously used as a Z-axis acceleration detection electrode of a Z-axis acceleration measurement unit, a Y-axis angular rate detection electrode of an XY-axis angular rate measurement unit, Paz1wx1、Paz2wx2、Paz2wx1、Paz1wx2The four electrodes are simultaneously used as a Z-axis acceleration detection electrode of the Z-axis acceleration measuring unit and an X-axis angular rate detection electrode of the XY-axis angular rate measuring unit.
2. The resonant ring six-axis inertial sensor of claim 1, wherein: the distance between the electrodes and the gap of the resonant ring is 1-2 mu m.
3. A multi-resonant-ring six-axis inertial sensor is characterized in that: a resonant ring six-axis inertial sensor comprising two or more nested arrangements of any of claims 1-2.
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| GB2547415A (en) * | 2016-02-09 | 2017-08-23 | Atlantic Inertial Systems Ltd | Inertial sensors |
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