CN108332733B - Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope - Google Patents
Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope Download PDFInfo
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- CN108332733B CN108332733B CN201810077617.1A CN201810077617A CN108332733B CN 108332733 B CN108332733 B CN 108332733B CN 201810077617 A CN201810077617 A CN 201810077617A CN 108332733 B CN108332733 B CN 108332733B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
Abstract
The invention discloses a driving and detecting device of a micro-mechanical single-vibrator three-axis gyroscope, which comprises a single-vibrator three-axis gyroscope, a driving module and a detecting module, wherein the driving module, the detecting module and the gyroscope are electrically connected, the gyroscope comprises a vibrator (1) and driving electrodes (4-7), the vibrator (1) can perform elastic vibration on an x axis and/or a y axis, the driving electrodes (4-7) and the vibrator (1) form an x-axis angular vibration resonator and a y-axis angular vibration resonator, the driving module is connected with the driving electrodes (4-7) and the vibrator (1) of the gyroscope, the driving module drives the vibration resonators to perform same-frequency vibration with constant amplitude, and the detecting module is used for detecting the angular speed output quantity of the gyroscope. The invention adopts a single-vibrator three-axis structure, can realize the compact structure of the gyroscope, has small volume and high detection precision and reduces the manufacturing cost of the gyroscope.
Description
Technical Field
The invention relates to a driving and detecting device of a micro-mechanical gyroscope, in particular to a driving and detecting device of a micro-mechanical single-vibrator three-axis gyroscope, and belongs to the field of micro-electro-mechanical systems (MEMS).
Background
The gyroscope is an important inertial sensor and has wide application in various fields. The gyroscope is divided into a single-axis gyroscope, a double-axis gyroscope and a three-axis gyroscope according to the number of detection axes, and the three-axis gyroscope is required in many application occasions. In low-precision occasions such as consumer electronics and the like, multi-vibrator single-chip integration is generally adopted to realize small volume and low power consumption; in the application occasions of medium and high precision, the three-axis gyroscope is generally realized by adopting a method of mechanically assembling three independent single-axis gyroscopes, but the gyroscope in the mode has larger volume and limits the application occasions. The existing micromechanical triaxial gyroscope generally adopts multi-vibrator monolithic integration, the gyroscope has small volume and low precision, or three uniaxial gyroscopes are adopted for assembly, and the gyroscope has large volume and high cost.
Disclosure of Invention
The invention aims to provide a driving and detecting device of a micro-mechanical single-vibrator three-axis gyroscope, which has small volume, high precision and low cost.
The invention relates to a driving and detecting device of a micro-mechanical single-vibrator three-axis gyroscope, which comprises a single-vibrator three-axis gyroscope, a driving module and a detecting module, wherein the driving module, the detecting module and the gyroscope are electrically connected, the gyroscope comprises a vibrator (1) and driving electrodes (4-7), the vibrator (1) can perform elastic vibration on an x axis and/or a y axis, the driving electrodes (4-7) and the vibrator (1) form an x axis angular vibration resonator (xResonator) and a y axis angular vibration resonator (yResonator), the driving module is connected with the driving electrodes (4-7) and the vibrator (1) of the gyroscope, the driving module comprises three loops, wherein the x axis angular vibration resonator, a transimpedance amplifier (TIA) and a phase-locked loop (PLL) form a first loop, and an automatic gain control module (AGC), the transimpedance amplifier and a second loop formed by the x axis angular vibration resonator, the gyroscope comprises a third loop formed by an Automatic Gain Control (AGC) module, a transimpedance amplifier (TIA) and a y-axis angular vibration resonator, wherein the first loop is used for driving the x-axis angular vibration resonator and the y-axis angular vibration resonator to vibrate at the same frequency, the second loop is used for keeping the amplitudes of the x-axis angular vibration resonator and the y-axis angular vibration resonator constant, the first loop, the second loop and the third loop form a closed loop, and the detection module is used for detecting the angular speed output quantity of the gyroscope.
Further, a plurality of oscillator electrodes V are arranged on the surface of the oscillator (1)dc(12) At the plurality of oscillator electrodes Vdc(12) A plurality of fixed electrodes (4-11) are arranged above the vibrator, and a plurality of vibrator electrodes Vdc(12) Corresponding to the fixed electrodes (4-11) one by one, the fixed electrodes (4-11) comprise four driving electrodes Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7) And four detection electrodesPolar Vzx+(8)、 Vzx-(9)、Vzy+(10)、Vzy-(11) Said drive electrode Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7) And the detection electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) Are alternately distributed, the driving electrodes Vx+(4)、Vx-(5) And the vibrator (1) forms the x-axis angular vibration resonator, is used for driving the x axis of the vibrator (1), drives the vibration of the vibrator (1) on the x axis and drives the electrode Vy+(6)、Vy-(7) And the vibrator forms a y-axis angular vibration resonator which is used for driving the y axis of the vibrator (1) and driving the vibration of the vibrator (1) on the y axis.
Further, the driving module generates a control variable V, a driving resonant frequency and a phase when driving the x-axis angular vibration resonator and the y-axis angular vibration resonator to perform co-frequency vibration, and the detection electrodes Vzx +, Vzx-, Vzy +, Vzy-and the plurality of vibrator electrodes V when an angular velocity is inputdc(12) The capacitance between produces corresponding capacitance changes Δ Czx +, Δ Czx-, Δ Czy +, Δ Czy-.
Further, the capacitance variation amount Δ Czx +, Δ Czx-, Δ Czy +, Δ Czy-, the control variable V, the driving resonant frequency and the phase are input to the detection module, and the angular velocity output amount is obtained after the processing of the detection module.
Further, the phase-locked loop (PLL) module is composed of a Phase Detector (PD), a Low Pass Filter (LPF), and a Voltage Controlled Oscillator (VCO).
Further, an output signal V of the Low Pass Filter (LPF) in the Phase Locked Loop (PLL) module is related to the angular velocity of the gyroscope in the z-axis for measuring the z-axis angular velocity.
Further, the Automatic Gain Control (AGC) module is composed of a Rectifier (Rectifier), a Low Pass Filter (LPF), and a proportional integral Controller (PI Controller), and the x-axis angular vibration resonator locks the amplitude through the automatic gain control module (AGC).
Further, an output signal V of the phase-locked loop (PLL) is subjected to phase shift, a Y-axis angular vibration resonator is input as a reference driving signal, the frequency of the Y-axis angular vibration resonator is the same as that of the x-axis angular vibration resonator, and the amplitude is locked.
The invention adopts a single-vibrator structure, the vibrator is driven on two vertical axes (xy axes) to do angular vibration, the vibrator can be sensitive to the angular velocity of three axes, the vibration amplitude of the two driving shafts (xy axes) is locked, the fixed frequency is driven, the frequencies are different, the detection quantity generated on the z axis can obtain the xy axis angular velocity through in-phase demodulation of two frequency signals, the z axis angular velocity can generate response on the two driving shafts, the z axis angular velocity can be obtained by demodulating and filtering the output signals of the driving shaft resonator, and finally the measurement of the three axis angular velocity of the single vibrator is realized.
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
Drawings
Fig. 1 is a schematic diagram of a dynamic structure of a single-vibrator three-axis gyroscope.
Fig. 2 is a schematic structural diagram of a single-vibrator three-axis gyroscope.
Fig. 3 is a schematic structural diagram of a single-vibrator orthogonal driving three-axis gyroscope system.
Fig. 4 is a system block diagram of a drive module.
FIG. 5 is a system block diagram of a detection module.
In the figure: 1. a mechanical vibrator; 2. a universal joint; 3. a support beam; 4. positive electrode of x drive shaft Vx+(ii) a 5. x drive shaft negative electrode Vx-(ii) a 6. y positive electrode of driving shaft Vy+(ii) a 7. y negative electrode of driving shaft Vy-(ii) a 8. Z-axis grid type detection electrode Vzx+(ii) a 9. Z-axis grid type detection electrode Vzy+(ii) a 10. Z-axis grid type detection electrode Vzx-(ii) a 11. Z-axis grid type detection electrode Vzy-(ii) a 12. Vibrator electrode Vdc。
Detailed Description
The invention relates to a micro-mechanical single-vibrator three-axis gyroscope, which utilizes the action of Coriolis effect on a vibration rigid body to detect the three-axis angular velocity. As shown in FIG. 1, the moments of inertia of a circularly symmetric rotational rigid body around the xyz axis are Ix,Iy,IzAngular velocity in the carrier coordinate system is ωx,ωy,ωzAngular velocity relative to inertial coordinate system is omegax,Ωy,ΩzAnd the Coriolis effect generates a torque Mx,My,Mz. When the angle of the xy-axis varies at different frequencies and the angle of the z-axis is small, i.e. thetax＝θ0xsinω1t，θy＝θ0ysinω2t，θz≈0 (θ0x、θ0yIs the angular vibration amplitude, omega1、ω2Vibration is angular frequency), the torque generated by the coriolis effect can be obtained under a small angle linear approximation as:
the amplitude of the xy axis can be locked by an automatic control method (AGC), the signal output by the resonator contains two frequency components, and the loop band-pass filter (BPF) only allows the frequency signal of the driving shaft to pass through, so that other frequency interference can be suppressed. And another path of signal led out from the resonator is subjected to band-pass filtering and in-phase demodulation to obtain the z-axis angular velocity omegaz. In addition, z-axis torque MzWill produce an angular response thetazThis angle is defined by the torque MzAnd the nature of the resonator structure itself, i.e.
Wherein: i iszThe moment of inertia of the vibrator to the z axis; dzThe damping coefficient of the z axis of the vibrator; kzIs the axial elastic coefficient of the vibrator z.
When the vibration frequency omega1、ω2When the angular speed bandwidth to be measured is far larger than the bandwidth of the angular speed to be measured, the angle theta can be obtainedzCan be approximated as a steady state solution:
wherein: k is the gain of the response;
is the phase shift of the response.
Angle thetaz(or other physical quantities resulting therefrom, e.g. checking capacitance), by
And
the angular velocity omega of the xy axis can be obtained by demodulationx,Ωy。
As shown in figure 2, the micro-mechanical single-vibrator three-axis gyroscope is characterized in that a vibrator (1) is fixed on a universal joint (2) by four supporting beams (3), the vibrator (1) can elastically vibrate on an x axis or a y axis, the universal joint (2) is an anchor point, the vibrator (1) is in a circular shape or a polygonal ring shape with xy axial symmetry, a plurality of fixed electrodes are arranged above the vibrator (1), and an electrode V is arranged on the fixed electrodesx+(4)、Vx-(5)、Vy+(6)、Vy-(7) For driving the electrodes, grid-type electrodes Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) For the detection electrode, a vibrator electrode Vdc(12) Fixed on a disk with an insulated surface and having the same DC potential. Electrode Vx+(4)、Vx-(5) And the vibrator (1) form an x-axis angular vibration resonator, an electrode Vy+(6)、Vy-(7) And a vibrator (1) to form a y-axis angular vibration resonator, a grid electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) And a vibrator electrode Vdc(12) Four detection capacitors are formed, and the z-axis angular displacement of the vibrator (1) can be detected.
The micromechanical single-vibrator three-axis gyroscope adopts electrostatic driving and capacitance detection, as shown in fig. 3-5, a detection system consists of a driving module and a detection module, the gyroscope performs self-excited oscillation along two axes xy under the closed-loop control of the driving module, the amplitude is fixed, the frequency is the same, the phase is orthogonal, and a variable V related to the angular velocity of the z axis is generated at the same time. Four fixed electrode pairs in the z-axis directionThe four detection capacitors are respectively Czx+、 Czx-、Czy+、Czy-Value of capacitance (C)zx++Czx-)-(Czx++Czx-) Proportional to the z-axis angle. A variable V and four capacitors Czx+、Czx-、Czy+、Czy-Inputting to a detection module, performing C-V conversion to obtain a voltage signal, and further using
And
the two orthogonal signals are respectively demodulated, filtered, compensated and the like to obtain the angular velocity omega to be measuredx,Ωy,ΩzOrthogonal signals are adopted for driving and demodulating, coupling between detected accelerations is small, and signal processing is simpler and more convenient.
The Driving Module (Driving Module) is connected with the gyroscope electrodes Vx +, Vx-, Vy +, Vy-and the gyroscope oscillator, the xy axis is driven to perform same-Frequency vibration, the amplitudes of the two Driving shafts are constant, the Phase difference is constant, and a control variable V, a Driving resonance Frequency and a Phase Reference are generated at the same time. When an angular velocity is input, the capacitance between the detection electrode Vzx +, Vzx-, Vzy +, Vzy-and the vibrator structure generates corresponding variations Δ Czx +, Δ Czx-, Δ Czy +, Δ Czy-. The capacitance variation and the control variable V, the frequency and the phase generated by the driving loop are input into a detection module (sensoringModule), and the triaxial angular velocity output quantity is obtained after the processing of the detection module.
The x-axis drive locks the frequency by a Phase Locked Loop (PLL) and the amplitude by an Automatic Gain Control (AGC). The PLL module includes a Phase Detector (PD), a Low-pass Filter (LPF), and a Voltage Controlled Oscillator (VCO), and the AGC module includes a Rectifier (Rectifier), a Low-pass Filter (LPF), and a proportional-integral controller (picocontroller). The vibrator is equivalent to a resonator (xResonator) on the x axis, and the driving torque tauxPassing and external z-axis angular velocity (magnitude)Is omegaz) The resulting coriolis effect torque will cause an angle to be produced by xronotor. The x-axis resonator can lock the resonant frequency through a closed loop formed by a Trans Impedance Amplifier (TIA) and a PLL module, and can lock the amplitude through a closed loop formed by an AGC module, and the amplitude can be changed through a variable VxrefAnd (6) adjusting.
The output signal V of the LPF in the PLL is related to the z-axis angular velocity and can be used to measure the z-axis angular velocity.
The PLL output signal (VCO output) is phase shifted (e.g., -90 ° phase shift) and input to the y-axis resonator (yResonator) which forms a closed loop with the TIA and AGC as a reference drive signal. The stable frequency of the y-axis is the same as that of the x-axis, the amplitude is locked, and the magnitude of the stable frequency can be changed by a variable VyrefAnd (6) adjusting. In addition, the y-axis resonator is also affected by the z-axis angle.
When the three loops are stable, the xy-axis resonators have the same frequency omegadThe phase difference is constant (e.g., -90 °). At this time, the x-axis angle is θ0xcos(ωdt + Δ φ), y-axis angular velocity is θ0ysin(ωdt + Δ φ), the z-axis angular velocity Coriolis effect generates a torque of-I in the x-axisxωdθ0ycos(ωdt + Δ φ), the torque generated on the y-axis is-Iyωdθ0xcos(ωdt + Δ φ), where θox,θoyAngular vibration amplitude, I, of the xy-axes respectivelyx,IyRespectively the moment of inertia of the xy axis.
Detecting capacitance variation delta Czx + and delta Czx-and summing after CV conversion, delta Czy + and delta Czy-and summing after CV conversion, and obtaining the difference of the two quantities, and then obtaining the xy axis angular velocity omega after demodulation and Low Pass Filtering (LPF)xAnd Ωy. The delta demodulation reference signal has a phase difference of 90 DEG, i.e. cos (omega)dt + Δ φ) and sin (ω [ + ])dt+Δφ)。
The above is only a preferred embodiment of the present invention, and those skilled in the art should understand that the modifications or variations of the present invention can be made without departing from the principle of the present invention, and still fall within the protection scope of the present invention.
Claims (6)
1. A driving and detecting device of a micro-mechanical single-vibrator three-axis gyroscope comprises a single-vibrator three-axis gyroscope, a driving module and a detecting module, wherein the driving module, the detecting module and the gyroscope are electrically connected, the gyroscope comprises a vibrator (1) and driving electrodes (4, 5, 6 and 7), the vibrator (1) is fixed on a universal joint (2) by four supporting beams (3), the vibrator (1) elastically vibrates on an x axis and a y axis, the universal joint (2) is an anchor point and is arranged at the center of the vibrator (1), and the vibrator (1) is in a ring shape or a polygonal ring shape with the x axis and the y axis symmetrical; the driving electrodes (4, 5, 6, 7) and the vibrator (1) form an x-axis angular vibration resonator and a y-axis angular vibration resonator, the driving module is connected with the driving electrodes (4, 5, 6, 7) and the vibrator (1) of the gyroscope, the driving module comprises three loops, wherein the x-axis angular vibration resonator, the y-axis angular vibration resonator, the transimpedance amplifier and the phase-locked loop module form a first loop, the automatic gain control module, the transimpedance amplifier and the x-axis angular vibration resonator form a second loop, the automatic gain control module, the transimpedance amplifier and the y-axis angular vibration resonator form a third loop, the first loop is used for driving the x-axis angular vibration resonator and the y-axis angular vibration resonator to vibrate in the same frequency, the second loop is used for enabling the amplitude of the x-axis angular vibration resonator to be constant, and the third loop is used for enabling the amplitude of the y-axis angular vibration resonator to be constant, the first loop, the second loop and the third loop are formed into a closed loop, the three loops are electrically connected, and the detection module is used for detecting the angular speed output quantity of the gyroscope;
the surface of the vibrator (1) is provided with a plurality of vibrator electrodes Vdc(12) At the plurality of oscillator electrodes Vdc(12) A plurality of fixed electrodes (4, 5, 6, 7, 8, 9, 10, 11) are arranged above the vibrator electrode Vdc(12) The plurality of fixed electrodes (4, 5, 6, 7, 8, 9, 10, 11) are in one-to-one correspondence, and the plurality of fixed electrodes (4, 5, 6, 7, 8, 9, 10, 11) include four driving electrodes Vx+（4）、Vx-（5）、Vy+（6）、Vy-(7) And IVA detection electrode Vzx+（8）、Vzx-（9）、Vzy+（10）、Vzy-(11) Said drive electrode Vx+（4）、Vx-（5）、Vy+（6）、Vy-(7) And the detection electrode Vzx+（8）、Vzx-（9）、Vzy+（10）、Vzy-(11) Are alternately distributed, the driving electrodes Vx+（4）、Vx-(5) And the vibrator (1) forms the x-axis angular vibration resonator, is used for driving the x axis of the vibrator (1), drives the vibration of the vibrator (1) on the x axis and drives the electrode Vy+（6）、Vy-(7) And the vibrator forms a y-axis angular vibration resonator which is used for driving the y axis of the vibrator (1) and driving the vibration of the vibrator (1) on the y axis.
2. The apparatus of claim 1, wherein: the driving module generates a control variable V, a driving resonant frequency and a phase when driving the x-axis angular vibration resonator and the y-axis angular vibration resonator to perform same-frequency vibration, and the detection electrodes Vzx +, Vzx-, Vzy +, Vzy-and the plurality of oscillator electrodes V when angular velocity is inputdc(12) The capacitance between the phase-locked loop modules generates corresponding capacitance variation delta Czx +, delta Czx-, delta Czy + and delta Czy-, wherein the phase-locked loop module consists of a phase detector, a low-pass filter and a voltage-controlled oscillator, and the control variable V is an output signal of the low-pass filter in the phase-locked loop module.
3. The apparatus of claim 2, wherein: and the capacitance variation delta Czx +, delta Czx-, delta Czy +, delta Czy-and the control variable V, the driving resonant frequency and the phase are input into the detection module, and the angular speed output quantity is obtained after the processing of the detection module.
4. The apparatus of claim 2, wherein: and the output signal V of the low-pass filter in the phase-locked loop module is related to the angular speed of the gyroscope on the z axis and is used for measuring the angular speed of the z axis.
5. The apparatus of claim 1, wherein: the automatic gain control module consists of a rectifier, a low-pass filter and a proportional-integral controller, and the x-axis angular vibration resonator realizes constant amplitude through the automatic gain control module.
6. The apparatus of claim 5, wherein: and phase shifting an output signal V of the phase-locked loop module, inputting a y-axis angular vibration resonator as a reference driving signal, wherein the frequency of the y-axis angular vibration resonator is the same as that of the x-axis angular vibration resonator, and the amplitude is constant.
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