CN102297690A - Piezoelectricity driven capacitance detecting two-axis gyroscope - Google Patents
Piezoelectricity driven capacitance detecting two-axis gyroscope Download PDFInfo
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Abstract
The invention belongs to the technical field of micro-electro mechanic systems (MEMS), and relates to a piezoelectricity driven capacitance detecting two-axis gyroscope. According to the invention, a lower surface of a gyroscope oscillator with a shape of a round disc, a wheel spoke or a honeycomb is connected to a supporting cylinder. The other end of the supporting cylinder is fixed on a lower pole plate. The lower pole plate is fixed on a carrier. An upper pole plate signal detecting electrode is positioned on a lower end surface of the upper pole plate. A lower pole plate signal detecting electrode is positioned on an upper end surface of the lower pole plate. The upper pole plate, the lower pole plate and the gyroscope oscillator are assembled, and differential capacitance is formed for detecting output signals. According to the invention, a special modality of a round disc, a wheel spoke or a honeycomb shape is adopted in the gyroscope oscillator, the detection is driven by piezoelectricity effect, and the detection is carried out by using capacitance. Therefore, angular velocities parallel to the upper and the lower surfaces of the gyroscope oscillator can be sensitively detected. According to the invention, with an MEMS micromachining technology, two-axis detection can be realized, the machining technology is easy to realize, the reliability is high, the energy consumption is low, the impact resistance is high, and the gyroscope can operate well in severe environments.
Description
Technical field
What the present invention relates to is a kind of little gyro of micro-electromechanical system field, and specifically, what relate to is a kind of Piezoelectric Driving capacitance detecting dual spindle gyroscopes.
Background technology
Gyroscope is a kind ofly can accurately measure the angle that moving object rotates or the instrument of angular velocity, is the core component of control of space object attitude and inertial guidance.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system is also little to volume for gyrostatic requirement, multiaxis detects, low in energy consumption, reliability is high, the life-span is long, the direction that can adapt to various rugged surroundings develops.
Find through literature search prior art, in January, 2006, in IEEE MEMS 2006 meetings that Turkey Istanbul holds, the people such as K.Maenaka of Japan Kobe university have delivered one piece and have been entitled as the paper of " novel little solid-state gyro ", this paper is incorporated in the 634th page to the 637th page, a kind of piezoelectric type full-solid-state minisize gyro has been proposed first, utilize square piezoelectrics mass under certain vibration frequency, to have a kind of special mode of oscillation, under this mode of oscillation, each particle makes the seamed edge of piezoelectrics axially do to stretch or compression movement along certain all along same axially-movable on the piezoelectrics mass.Vibrate as reference with the vibration under this special mode, the polarised direction of supposing piezoelectrics is the Z direction, with reference to direction of vibration is directions X, when the angular velocity on external world's input Y direction, because the effect of coriolis force, the piezoelectric quality piece can produce (being on the Z direction of principal axis) on its polarised direction and stretch or compression movement.Because the piezoelectric effect of piezoelectrics, the vibration meeting of Z direction is at surface generation induced charge or the voltage of piezoelectrics perpendicular to the Z direction, the value of induced charge or voltage and extraneous input angular velocity are directly proportional, the size that electric charge after amplifying by the detection peripheral circuit or voltage are measured extraneous input angular velocity.
Chinese patent " all solid state gyroscope " (number of patent application: 200810041675.5) with square surface cuboid piezoelectric vibrator, be on the basis of the little solid-state gyro of Japan, to utilize new high order mode, novel structure, the twin shaft based on the square piezoelectric blocks of invention detects solid-state gyroscope, its ultimate principle is an a kind of special high frequent vibration mode of utilizing the piezoelectrics mass to exist under certain vibration frequency, under this mode of oscillation, the specific position of piezoelectrics mass upper and lower surface in X axis and Y-axis to producing the opposite motion of direction respectively.As with reference to vibration, when extraneous angular velocity was imported, the position that direction of motion is opposite produced opposite coriolis force, causes the vibration of piezoelectrics Z direction with the vibration under this special mode.Because piezoelectric effect, the vibration meeting of Z direction is at surface generation induced charge or the voltage of piezoelectrics perpendicular to the Z direction, the value of induced charge or voltage and extraneous input angular velocity are directly proportional, the size that electric charge after amplifying by the detection peripheral circuit or voltage are measured extraneous input angular velocity.
There is following deficiency in this technology: the first, because its upper and lower surface all has a plurality of electrodes, and its processing technology complexity, double-face electrode positioning accuracy request height, the lead-in wire of a plurality of electrodes also can exert an influence to the gyro performance; The second, piezoelectric vibrator is square piezoelectric blocks, and its rigidity is bigger, and effective vibration amplitude of generation is less; The 3rd, because piezoelectric vibrator is square piezoelectric blocks, there is right-angle side in it, can produce the stress concentration phenomenon in loading process, under the high-frequency work state, influences the reliability and the life-span of gyro.
Summary of the invention
The objective of the invention is deficiency at prior art, a kind of dual spindle gyroscopes of Piezoelectric Driving capacitance detecting is provided, that this gyroscope has is discoid, spoke-like or cellular gyrotron, adopt the discoid gyrotron that has cylindrical body supports on the structure, adopt the mode of Piezoelectric Driving and capacitance detecting, utilize the special mode of vibration under discoid, spoke-like or the peculiar mode of cellular gyrotron, realize the function of gyroscope twin shaft sensitivity.The piezoelectric membrane drive electrode only is distributed in the upper surface of gyrotron, and processing technology is simple relatively, does not need double-sided alignment, and the gyro contact conductor is less.Gyrotron is discoid, spoke-like or cellular, and rigidity is less relatively, and vibration amplitude is bigger, and sensitivity is higher, and has reduced the stress concentration phenomenon in the loading process, has reliability and long life-span preferably.Signal detecting mode adopts capacitance detecting, measures highly sensitively, and temperature drift is little, and the response time lacks, and is easy to realize close-loop feedback control.
The present invention is achieved by the following technical solutions, the present invention includes gyrotron, support cylinder, piezoelectric membrane drive electrode, top crown, bottom crown, top crown signal detection electrode, bottom crown signal detection electrode.The gyrotron upper surface is provided with the piezoelectric membrane drive electrode, the gyrotron lower surface links to each other with support cylinder, the support cylinder other end is fixed on the bottom crown, bottom crown is fixed on the carrier, the top crown signal detection electrode is positioned at the inner face of top crown, the bottom crown signal detection electrode is positioned at the bottom crown inner face, and top crown, bottom crown and gyrotron assembling form differential capacitance and be used to detect output signal.
The material of described gyrotron is a metal material, shape can be discoid, spoke-like or cellular, the structure of preferred embodiment is discoid, one end of disk is a upper surface, the other end is a lower surface, wherein lower surface is fixed on the bottom crown by cylindrical support, and the gyrotron upper surface is parallel with lower surface.
Described support cylinder is a structural metallic materials, and support cylinder body upper end is vertical with the lower surface of disk, and support cylinder body lower end is fixed on the bottom crown.
Described piezoelectric membrane drive electrode is a piezoelectric, and polarised direction is perpendicular to the upper and lower surface of discoid gyrotron, and structure is circular-arc, have four, be positioned at the upper surface of discoid gyrotron, the certain angle of being separated by, be evenly distributed in the concentric circumference of circular surface on.
Described top crown is nonmetallic materials such as glass, and structure is discoid, and an end face that wherein is positioned at the disc structure lower end is the lower surface, and the another one end face that is positioned at the disc structure upper end is the upper surface, and the upper and lower end face is parallel.
Described bottom crown is nonmetallic materials such as glass, and structure is discoid, and an end face that wherein is positioned at the disc structure lower end is the lower surface, and the another one end face that is positioned at the disc structure upper end is the upper surface, and the upper and lower end face is parallel.
Described top crown signal detection electrode is a metal electrode, and structure is circular-arc, has four, is positioned on the lower surface of top crown, and the certain angle of being separated by is evenly distributed on the circumference of lower surface.
Described bottom crown signal detection electrode is a metal electrode, and structure is circular-arc, has four, is positioned on the upper surface of bottom crown, and the certain angle of being separated by is evenly distributed on the circumference of upper surface.
The present invention utilizes the vibration of discoid gyrotron under special mode as the reference vibration, utilize the piezoelectric effect driver plate shape gyrotron motion of piezoelectric simultaneously, when applying the alternating voltage excitation of mating with selected model frequency on the piezoelectric membrane drive electrode, the disc oscillator can produce a kind of vibration of special mode.The disc oscillator is done respectively along the direction of first, second center line of upper surface and is stretched or compression movement, when when upper surface first centerline direction stretches, compress along upper surface second centerline direction, when when upper surface first centerline direction compresses, stretch along upper and lower surface second centerline direction.Suppose that discoid gyrotron upper surface first centerline direction is an X-direction, discoid gyrotron upper surface first centerline direction is a Y direction, direction perpendicular to discoid gyrotron upper and lower surface is made as Z-direction, oscillator along X axis and Y-axis to stretching and compression, when external world's input and X axis or Y-axis to angular velocity the time, it is opposite to have the coriolis force direction that the oscillator quality of the piezoelectric membrane drive electrode correspondence of identical central line produces, produce a moment, the vibration on the Z direction changes.Oscillator the variation of Z direction vibration can cause corresponding on the bottom crown signal detection electrode with gyrotron between changes in capacitance, fixing funtcional relationship is arranged between changes in capacitance and input angular velocity, and when angular velocity output is arranged on different directions simultaneously, all can change in different signal detection electrode and the electric capacity between gyrotron, therefore can be by detecting bottom crown unlike signal detecting electrode detects angular velocity on two axles with the capacitance variations between gyrotron output.
More than be the preferred embodiment structure, in certain embodiment, the structure of gyrotron can also be spoke-like, and its radial direction at disk is distributed with radial spoke.In another embodiment, the structure of gyrotron can also reduce air-damped influence by adding damping hole on discoid gyrotron surface for cellular.
The present invention can realize that twin shaft detects, and processing technology is easy to realize, the reliability height, and low in energy consumption, impact resistance is strong, can be good at work under rugged environment.The present invention utilizes the special vibration under the special mode of round metal plate-like gyrotron to vibrate as reference, the piezoelectric membrane drive electrode drive vibrator motion of high tension electricity coefficient, the capacitor that metal electrode on the last bottom crown and gyrotron are formed detects output signal, can detect the angular velocity on the extraneous biaxially oriented of importing accurately.The present invention can be used for fields such as satellite, weapon, civil navigation.
Description of drawings
Fig. 1 is the structural representation of the discoid gyrotron of the present invention.
Fig. 2 for the discoid gyrotron of the present invention and up and down the plate signal detecting electrode assemble synoptic diagram.
Fig. 3 is the outside drawing after all elements assemblings of the present invention.
Fig. 4 changes cloud atlas for the selected operation mode total displacement of the discoid gyrotron of the present invention.
Fig. 5 is the discoid gyrotron of the present invention directions X change in displacement cloud atlas under driving condition.
Fig. 6 is the discoid gyrotron of the present invention Y direction change in displacement cloud atlas under driving condition.
Fig. 7 is the spoke-like gyrotron structural representation in another embodiment of the present invention.
Fig. 8 is the cellular gyrotron structural representation in another embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing a preferred embodiment of the present invention is elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention; provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As Fig. 1, Fig. 2, shown in Figure 3, present embodiment comprises gyrotron 1, support cylinder 2, piezoelectric membrane drive electrode 3, top crown signal detection electrode 4, bottom crown signal detection electrode 5, top crown 6, bottom crown 7.
Gyrotron 1 material is a metal material, and structure is a disc, and discoid gyrotron 1 a wherein end is a upper surface, and the parallel with it face of the other end is a lower surface.
The material of piezoelectric membrane drive electrode 3 is PZT, piezoelectrics such as ZnO, structure is a circular arc, totally four, a pair of arc piezoelectric membrane drive electrode that distributes along X-axis and a pair of arc piezoelectric membrane drive electrode that distributes along Y-axis, symmetry be distributed in the concentric circumference of discoid gyrotron 1 rounded upper surface on.
Top crown signal detection electrode 4 materials are metal material of copper, and structure is circular-arc, totally four, and the lower surface that is distributed in top crown of symmetry.
Bottom crown signal detection electrode 5 materials are metal material of copper, and structure is circular-arc, totally four, and the upper surface that is distributed in bottom crown of symmetry.
Top crown material 6 is nonmetallic materials such as glass, and structure is discoid, on the lower surface of top crown about four top crown signal detection electrode 4 of distribution of the center of circle symmetry of circular surface.
Bottom crown material 7 is nonmetallic materials such as glass, and structure is discoid, and about four bottom crown signal detection electrode 5 of distribution of the center of circle symmetry of circular surface, the lower surface of bottom crown is fixed on the carrier on the upper surface of bottom crown.
Discoid gyrotron 1 distribution of upper surface piezoelectric membrane drive electrode 3 on disk is about oscillator upper surface center of circle symmetry.Through the discoid gyrotron 1 upper surface center of circle, be respectively upper surface first center line and upper surface second center line about the line of centres of two pairs of piezoelectric membrane drive electrodes 3 of center of circle symmetry, upper surface first center line is vertical with upper surface second center line.The upper end of support cylinder 2 connects with discoid gyrotron 1, and the lower end connects with bottom crown 7, and the outer face of bottom crown 7 is fixed on the carrier.Top crown 6 and bottom crown 7 cooperations are assembled into a hollow and sealed at both ends right cylinder.About the line of centres of two pairs of top crowns, 6 signal detection electrode 4 of center of circle symmetry through the top crown 6 inner face centers of circle, be respectively top crown 6 lower surfaces, first center line and top crown 6 lower surfaces second center line, top crown 6 lower surfaces first center line is vertical with top crown 6 lower surfaces second center line.About the line of centres of two pairs of bottom crowns, 7 signal detection electrode 5 of center of circle symmetry through the center of circle, bottom crown 7 upper surface, be respectively bottom crown 7 upper surfaces, first center line and bottom crown 7 upper surfaces second center line, bottom crown 7 upper surfaces first center line is vertical with bottom crown 7 upper surfaces second center line.Top crown 6 lower surfaces first center line, bottom crown 7 upper surfaces first center line is parallel with gyrotron 1 surperficial first center line and be positioned at same plane.Top crown 6 lower surfaces second center line, bottom crown 7 upper surface pole plates second center line is parallel with oscillator upper surface second center line and be positioned at same plane.Top crown 6 signal detection electrode 4 and discoid gyrotron, bottom crown 7 signal detection electrode 5 and discoid gyrotron constitute differential capacitance.
As shown in Figure 4, find that by analog simulation there is the special mode of oscillation in certain rank in discoid gyrotron, under this rank mode of oscillation, discoid gyrotron is done stretching or compression movement along X-axis or Y-axis respectively, and when oscillator when X-axis stretches, along Y direction compression, when oscillator when X-axis is compressed, stretch along Y direction.When applying frequency with selected special model frequency coupling and anti-phase voltage signal respectively, just can encourage discoid gyrotron to produce special modal vibration by a pair of piezoelectric membrane drive electrode 7,12 on discoid gyrotron upper surface X-axis and a pair of piezoelectric membrane drive electrode 5,10 on the Y-axis.
Show as Fig. 5 and Fig. 6, because discoid gyrotron 1 is along X-axis or opposite along the direction of motion of Y-axis, therefore when the angular velocity of the extraneous X axis of importing, oscillator quality along Y direction elongation or compression can be subjected to the opposite coriolis force of direction, produce a moment, under the effect of moment, round metal plate-like gyrotron 1 centre of oscillation can be departed from, cause that the metal detection electrode on corresponding last bottom crown inner face second center line changes with electric capacity between discoid gyrotron, can detect the size of input X axis angular velocity by the variation that detects capacitance.Equally, when the external world imports the angular velocity of Y direction, oscillator quality along X-direction elongation or compression can be subjected to the opposite coriolis force of direction, produce a moment, under the effect of moment, the discoid gyrotron of piezoelectricity 1 centre of oscillation can be departed from, and causes that the metal detection electrode on corresponding last bottom crown inner face first center line changes with electric capacity between discoid gyrotron, can detect the size of input Y-axis to angular velocity by the variation that detects capacitance.Because when not loading angular velocity, the plate signal detecting electrode 4 up and down, 5 and the electric capacity of 1 of discoid gyrotron just doing periodic variation, and top crown signal detection electrode 4 and discoid gyrotron 1, bottom crown signal detection electrode 5 and discoid gyrotron 1 constitute differential capacitance, two pairs of metal detection electrodes on last bottom crown inner face first center line constitute differential capacitance with 1 of discoid gyrotron, two pairs of metal detection electrodes on last bottom crown inner face second center line constitute differential capacitance with 1 of discoid gyrotron, variation of output signals is positive and negative opposite, therefore can remove the effect of signals that drives vibration by subtracting each other of signal.
All parts in the present embodiment can pass through the MEMS(MEMS (micro electro mechanical system)) the technology realization.Last lower-glass pole plate can be made by substrate of glass being carried out photoresist mask wet-etching technology afterwards.Electrode on the last bottom crown is by spin coating photoresist on the inner face of last bottom crown, and photoetching is developed, and the plated metal electrode is realized.Metallic support post and round metal plate-like gyrotron can pass through sacrifice layer process, utilize thick SU-8 glue as sacrifice layer, photoetching, and the splash-proofing sputtering metal material is made support column and oscillator.Piezoelectric membrane drive electrode on the oscillator can deposit by sol-gel process, and the plan direction is perpendicular to the upper surface of discoid gyrotron.
Because the inevitably influence of some errors in the defective that certainly exists of discoid gyrotron 1 material itself and the manufacture process, this actual frequency that just may cause gyro to produce special mode of oscillation does not match with exciting signal frequency, thereby the performance of gyro is affected.Find by simulation analysis, there is an extreme value in the output of plate signal detecting electrode capacitance up and down when this modal vibration, whether these characteristics can be used to detect gyro and are operated under the resonant frequency that mates with selected special mode, reduce the error between theory and the practical devices, to guarantee the performance of gyro.
More than, preferred embodiment of the present invention is had been described in detail, but the present invention can be by carrying out various distortion to the foregoing description or change is implemented.For example, as shown in Figure 7 and Figure 8, the structure of gyrotron can also be spoke-like and cellular, its structure relative complex.In addition, as tuning fork gyroscope, it can also add mass below four drive electrodes, increases the amplitude that the inertial force effect is produced, and improves the sensitivity and the detection efficiency of gyro.
The above only is a preferred implementation of the present invention, and protection scope of the present invention not only is confined to the foregoing description, and all technical schemes that belongs under the thinking of the present invention all belong to protection category of the present invention.Should be pointed out that for those skilled in the art in the some improvements and modifications that do not break away under the principle of the invention prerequisite, these improvements and modifications also all should be considered as protection scope of the present invention.
Claims (9)
1. a Piezoelectric Driving capacitance detecting dual spindle gyroscopes is characterized in that comprising: gyrotron, support cylinder, piezoelectric membrane drive electrode, top crown, bottom crown, top crown signal detection electrode and bottom crown signal detection electrode; Described gyrotron is discoid, spoke-like or cellular, the gyrotron upper surface is provided with the piezoelectric membrane drive electrode, the gyrotron lower surface links to each other with support cylinder, the support cylinder other end is fixed on the bottom crown, bottom crown is fixed on the carrier, the top crown signal detection electrode is positioned at the inner face of top crown, and the bottom crown signal detection electrode is positioned at the bottom crown inner face, and top crown, bottom crown and gyrotron assembling form differential capacitance and be used to detect output signal.
2. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 is characterized in that, the distribution of piezoelectric membrane drive electrode on disk of described gyrotron upper surface is about oscillator upper surface center of circle symmetry; Through the discoid gyrotron upper surface center of circle, be respectively upper surface first center line and upper surface second center line about the line of centres of two pairs of piezoelectric membrane drive electrodes of center of circle symmetry, upper surface first center line is vertical with upper surface second center line;
The line of centres process top crown inner face center of circle about the described top crown signal detection electrode of two couple of center of circle symmetry, be respectively top crown inner face first center line and top crown inner face second center line, top crown inner face first center line is vertical with top crown inner face second center line;
About the line of centres of two pairs of bottom crown signal detection electrode of center of circle symmetry through the bottom crown inner face center of circle, be respectively bottom crown inner face first center line and bottom crown inner face second center line, bottom crown inner face first center line is vertical with bottom crown inner face second center line;
Top crown inner face first center line, bottom crown inner face first center line is parallel with gyrotron upper surface first center line and be positioned at same plane; Top crown inner face second center line, bottom crown inner face second center line is parallel with gyrotron upper surface second center line and be positioned at same plane;
Top crown signal detection electrode and discoid gyrotron, bottom crown signal detection electrode and discoid gyrotron constitute differential capacitance.
3. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 and 2 is characterized in that the material of described gyrotron is a metal material, and the gyrotron upper surface is parallel with lower surface.
4. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 and 2, it is characterized in that, described top crown is nonmetallic materials, structure is discoid, an end face that wherein is positioned at the disc structure lower end is the lower surface, the another one end face that is positioned at the disc structure upper end is the upper surface, and the upper and lower end face is parallel.
5. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 and 2, it is characterized in that, described bottom crown is nonmetallic materials, structure is discoid, an end face that wherein is positioned at the disc structure lower end is the lower surface, the another one end face that is positioned at the disc structure upper end is the upper surface, and the upper and lower end face is parallel.
6. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 and 2 is characterized in that described top crown signal detection electrode is a metal electrode, structure is circular-arc, have four, be positioned on the lower surface of top crown, be evenly distributed on the circumference of lower surface.
7. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 and 2 is characterized in that described bottom crown signal detection electrode is a metal electrode, structure is circular-arc, have four, be positioned on the upper surface of bottom crown, be evenly distributed on the circumference of upper surface.
8. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1 is characterized in that described support cylinder is a structural metallic materials, and support cylinder body upper end is vertical with the lower surface of disk, and support cylinder body lower end is fixed on the bottom crown.
9. Piezoelectric Driving capacitance detecting dual spindle gyroscopes according to claim 1, it is characterized in that, described piezoelectric membrane drive electrode is a piezoelectric, polarised direction is perpendicular to the upper and lower surface of discoid gyrotron, structure is circular-arc, have four, be positioned at the upper surface of discoid gyrotron, be evenly distributed in the concentric circumference of circular surface on.
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