CN102353370B - Piezoelectric driven capacitance detection of micro-solid modal gyroscope - Google Patents
Piezoelectric driven capacitance detection of micro-solid modal gyroscope Download PDFInfo
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- 239000007787 solid Substances 0.000 title claims abstract description 42
- 238000001514 detection method Methods 0.000 title claims abstract description 26
- 230000006698 induction Effects 0.000 claims abstract description 66
- 238000005516 engineering process Methods 0.000 claims abstract description 17
- 230000010355 oscillation Effects 0.000 claims description 29
- 239000003990 capacitor Substances 0.000 claims description 13
- 239000000463 material Substances 0.000 claims description 11
- 238000012545 processing Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 230000006835 compression Effects 0.000 claims description 4
- 238000007906 compression Methods 0.000 claims description 4
- 238000000708 deep reactive-ion etching Methods 0.000 claims description 4
- 239000012528 membrane Substances 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 238000012544 monitoring process Methods 0.000 claims description 2
- 238000001259 photo etching Methods 0.000 claims description 2
- 239000002210 silicon-based material Substances 0.000 claims description 2
- 239000002002 slurry Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000005284 excitation Effects 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract 2
- 238000010923 batch production Methods 0.000 abstract 1
- 230000003071 parasitic effect Effects 0.000 abstract 1
- 230000035945 sensitivity Effects 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 239000012858 resilient material Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000013016 damping Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 230000035939 shock Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 239000012811 non-conductive material Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000013332 literature search Methods 0.000 description 1
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Abstract
The invention discloses a piezoelectric driven capacitance detection micro-solid modal gyroscope in the field of micro-electromechanical technology. According to the invention, an elastic micro oscillator, a reference vibration induction electrode and a coriolis force induction electrode are fixed through lower surfaces; a piezoelectric actuation electrode is positioned on the upper surface of the elastic micro oscillator and forms a fixed connection with the elastic micro oscillator; and a tiny gap between the side wall of the reference vibration induction electrode and the coriolis force induction electrode and the side wall of the adjacent square elastic micro oscillator forms an interpole gap variable capacitance. Two merged special vibration modes of the elastic micro oscillator are utilized for operation with high ability of impact resistance and shake resistance; high working frequency is beneficial to increasing the measuring bandwidth of micro gyroscope and reduce noise; it is easy to package with high reliability and low production cost; the adoption of piezoelectric excitation and capacitance detection is beneficial to raising the driving force of reference vibration and simultaneously the invention is convenient to integrate, is easy for batch production and is used to reduce the influence of parasitic resistance or capacitance.
Description
Technical field
What the present invention relates to is a kind of little gyro of field of micro electromechanical technology, specifically is a kind of Piezoelectric Driving capacitance detecting micro-solid mode gyroscope.
Background technology
In the century in the past, the gyro technology has experienced a series of revolutionary development course.20 beginnings of the century, Elmer Sperry has invented gyrocompass, and it is applied in the marine navigation.The 1950's, realized adopting restrained gyroscope and accelerometer system to respond to the six-freedom motion of aircraft.These early stage gyrosystems only are used for direction reference, therefore they are not had higher accuracy requirement.Because high complexity and the high cost of frame gyroscope system begin to rise development Strapdown Inertial Units frame of reference the seventies in 20th century.Want to obtain sufficiently high performance, strapped-down system requires to have higher precision, and its Gyro Precision drift will be lower than 0.01deg/h.In order to satisfy such accuracy requirement, people have developed the optical gyroscope based on the Sagnac effect with superhigh precision and high reliability.The optical gyroscope volume is big, expensive, therefore is mainly used in space flight, navigation and the aviation field.In in the past more than 30 year, along with the appearance of MEMS technology and progressively development, both at home and abroad the scientific research personnel is being devoted to the exploitation of micro-inertia sensor always, makes every effort to produce that volume is little, low price, the little gyro of high-performance MEMS low in energy consumption.
Find through the literature search to prior art, the people such as K.Maenaka of Japan Kobe university have delivered one piece of paper in the 19th the IEEE MEMS meeting in 2006 Istanbul, be entitled as " novel solid-state micro gyroscope ", this paper is incorporated in the 634th page to the 637th page.They have proposed a kind of all solid state little gyro based on the special mode of oscillation of piezoelectrics.They discover rectangle piezoelectrics mode of oscillation, under certain high frequent vibration mode, each particle on the piezoelectrics is substantially along same axial vibration (as the x axle), and the particle vibration direction around adjacent two seamed edges is opposite, be that some seamed edges are when being extensional motion, then adjacent seamed edge is compression movement, they vibrate (resonant frequency is about hundreds of KHz) with the vibration of piezoelectrics under this special mode of oscillation as driving, when the angular speed input was arranged on along certain specific axis to (as the y axle), going up induction vibration in piezoelectrics polarised direction (as the z axle) can detect by the induced voltage on piezoelectrics surface.Through preliminary research, they have verified the feasibility of this little gyro scheme.Owing to do not adopt traditional spring-mass vibrational system, do not have the flexible structure of resiliency supported in this special all solid state little gyro, so can bear higher foreign impacts, shock resistance anti-vibration ability is strong, and it does not have specific (special) requirements to Vacuum Package, under the normal pressure of can working.Owing to be operated under the higher frequency of operation, be conducive to improve the measurement bandwidth of little gyro.
The vibrating mass of all solid state little gyro of piezo-electric type is piezoelectrics, and the available stronger piezoelectrics material of piezoelectric effect is the PZT piezoelectric ceramics usually.But the elasticity of piezoelectric ceramics and microfabrication performance are limited, and the material of piezoelectric ceramics and electrology characteristic are responsive to temperature, this has limited the raising of the manufacturing accuracy of this little gyro, and its material selectivity is limited, and the feasibility that the microfabrication mass is made is not high.
Summary of the invention
The objective of the invention is to overcome deficiency of the prior art, a kind of micro-solid mode gyroscope based on elastic matrix is provided.Micro-solid mode gyroscope is a kind of novel MEMS angular rate sensor, this micro-solid mode gyroscope utilizes the special mode of oscillation of elastic matrix to carry out work, this novel little gyro utilizes electrostatic force to carry out elastomeric operational vibration mode exciting, utilizes electric capacity to detect the induction vibration that is encouraged by coriolis force.It is driving and the detection method of widespread use in MEMS (micro electro mechanical system) that electrostatic force drives capacitance detecting, especially be the technology of development comparative maturity in little gyro, it can obtain bigger driving force and higher detection precision, and carried out integrated in cmos circuit, be convenient to mass production, reduce the manufacturing cost of the little gyro of this type.The oscillator of micro-solid mode gyroscope can adopt the structural damping materials with smaller to make, and is conducive to improve the quality factor of oscillator, thereby further improves the accuracy of detection of micro-solid mode gyroscope.
The present invention is achieved by the following technical solutions, the present invention includes: the elasticity micro-oscillator, the Piezoelectric Driving electrode, with reference to the vibration induction electrode, the coriolis force induction electrode, elasticity micro-oscillator wherein, with reference to the vibration induction electrode, the coriolis force induction electrode all is to fix by lower surface, the Piezoelectric Driving electrode is positioned at elasticity micro-oscillator upper surface, form fixed connection with the elasticity micro-oscillator, with reference to the vibration induction electrode, the coriolis force induction electrode is positioned at square elasticity micro-oscillator side, and between their sidewall and the adjacent square elasticity micro-oscillator sidewall small gap is arranged, form the die opening variable capacitance with reference to vibration detection and induction vibration detection.
Described elasticity micro-oscillator is a square structure, and it is the vibrating mass of whole micro-solid mode gyroscope.The lower surface of elasticity oscillator is fixed, and four sides and reference vibration induction electrode on every side, coriolis force induction electrode form and detect electric capacity, and these electric capacity are finished detection that reference of micro-solid mode gyroscope vibrate and the detection of induction vibration.Elasticity micro-oscillator employing elastic property material preferably is made, and the structural damping of this resilient material is less, and it has the high quality of vibration factor, and this specific character is conducive to improve the detection sensitivity of micro-solid mode gyroscope.
Described Piezoelectric Driving electrode has two, and upper surface and elasticity micro-oscillator that they are positioned at the elasticity micro-oscillator form fixed connection.The Piezoelectric Driving electrode adopts piezoelectric to make, and is generally PZT.When applying the alternating signal of elasticity micro-oscillator operation mode frequency at the Piezoelectric Driving electrode, produce the elasticity micro-oscillator with reference to the exciting force of vibration, the elasticity micro-oscillator is vibrated under the reference mode of oscillation.
Describedly have four with reference to the vibration induction electrode, they are fixed by lower surface, are distributed in relative both sides around the elasticity micro-oscillator in twos, they respectively a side adjacent with the elasticity micro-oscillator form two pairs of differential reference vibration detection electric capacity.Be used for detecting the state of the reference vibration of elasticity micro-oscillator with reference to the vibration induction electrode.Be used for driving the closed-loop control of vibrating with reference to the vibration induction electrode, make elasticity micro-oscillator steady operation at reference vibration modal frequency point, and keep constant vibration frequency.
Described coriolis force induction electrode has four, they are fixed by lower surface, be distributed in the both sides adjacent with reference vibration induction electrode in twos, the side that they are adjacent with the elasticity micro-oscillator and elasticity micro-oscillator form the coriolis force induction vibration and detect electric capacity, detect by rotation excitation and go out the De Geshi acceleration, and then obtain the extraneous angular velocity of rotation of importing at sensitive direction.Four coriolis force induction electrodes form two pairs of differential capacitors, and they carry out difference processing, are conducive to eliminate the interference of extraneous common mode vibration, also are conducive to improve simultaneously the detection sensitivity of micro-solid mode gyroscope.
The present invention finds by the vibration-mode analysis to above-mentioned elasticity micro-oscillator, under the special mode of oscillation in certain rank, when limit of elasticity micro-oscillator upper surface is extensional motion, that then relative with it limit is compression movement, and under this special mode of oscillation, each particle is substantially all along identical axially-movable on the elasticity micro-oscillator.For square elasticity micro-oscillator, this special mode of oscillation also has the identical degeneracy mode of resonant frequency.A pair of degeneracy mode like this can be used as reference mode of oscillation and the induction vibration mode of micro-solid mode gyroscope.
The present invention adopts piezoelectric forces to encourage with reference to mode of oscillation, utilizes change gap variable electric capacity to detect induction vibration mode.Piezoelectric membrane drives and capacitance detecting is driving and the detection method of widespread use in the MEMS (micro electro mechanical system), and this driving detection technique is easy to adopt little processing structure to realize, and suitable and cmos circuit carries out integrated.
The Piezoelectric Driving capacitance detecting micro-solid mode gyroscope that the present invention proposes, owing to adopt the special mode of oscillation of resilient material oscillator to carry out work, and be not piezoelectrics, this has increased the selection degree of freedom that little gyro is made material on the one hand, allow matrix to utilize the bigger material of elasticity to make, and can obtain the great quality of vibration factor, utilize piezoelectric forces to drive on the other hand and can obtain bigger driving force.Simultaneously, adopt micro fabrication can realize extremely small electric capacity spacing, this is conducive to improve the detection sensitivity that detects electric capacity.Form between the core component of micro-solid mode gyroscope and the carrier affixed, the be more convenient for installation of GYROCHIP of this structure.The proposition of micro-solid mode gyroscope has overcome the deficiency of all solid state little gyro of piezo-electric type in the background technology, is conducive to obtain shock resistance, the anti-vibration ability is strong, Vacuum Package is not had the full-solid-state minisize MEMS gyro of specific (special) requirements.
Description of drawings
Fig. 1 is for general structure of the present invention and drive the detection signal synoptic diagram;
Fig. 2 is the structure three-dimensional view of micro-solid mode gyroscope of the present invention;
Fig. 3 is the 3-D view of micro-solid mode gyroscope elasticity micro-oscillator of the present invention;
Fig. 4 is the 3-D view of micro-solid mode gyroscope driving of the present invention and detecting electrode;
Fig. 5 is the driving mode of oscillation of micro-solid mode gyroscope elasticity micro-oscillator of the present invention and the 3-D view of induction vibration mode.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment has provided detailed embodiment and process being to implement under the prerequisite with the technical solution of the present invention, but protection scope of the present invention is not limited to following embodiment.
As depicted in figs. 1 and 2, present embodiment comprises: elasticity micro-oscillator 1, Piezoelectric Driving electrode 2 and 7, with reference to vibration induction electrode 5,6,10 and 11, coriolis force induction electrode 3,4,8 and 9, wherein the elasticity micro-oscillator 1, with reference to vibration induction electrode 5,6,10 and 11, coriolis force induction electrode 3,4,8 and 9 all is to fix by lower surface, they all are separate, Piezoelectric Driving electrode 2 and 7 is distributed in the upper surface of elasticity micro-oscillator 1, form fixed connection with elasticity micro-oscillator 1, with reference to vibration induction electrode 5,6,10 and 11, coriolis force induction electrode 3,4,8 and 9 are positioned at square elasticity micro-oscillator 1 side, and small gap is arranged between the side of their sidewall and elasticity micro-oscillator 1, in order to improve the sensitivity that detects electric capacity, these small gaps are all less than 1 micron.
As shown in Figure 1, between the upper and lower surface of Piezoelectric Driving electrode 7, apply alternating voltage V
D1
, be applied with DC stacked alternating voltage V between Piezoelectric Driving electrode 2 upper and lower surfaces
D2
, alternating voltage V
D1
And V
D2
Between phase differential 180 degree, voltage V
D1
And V
D2
Alternative frequency and the reference vibration modal frequency of elasticity micro-oscillator identical, at voltage V
D1
And V
D2
Under the excitation, the elasticity micro-oscillator vibrates with the reference mode of oscillation.Piezoelectric Driving electrode 2 and Piezoelectric Driving electrode 7 adopt piezoelectric to make and form, in order to improve driving force, adopt the PZT piezoceramic material usually.
Shown in Fig. 1, with reference to forming with reference to the vibration detection capacitor C between vibration induction electrode 10 and the elasticity micro-oscillator 1
R1
, with reference to forming with reference to the vibration detection capacitor C between vibration induction electrode 11 and the elasticity micro-oscillator 1
R2
, with reference to forming with reference to the vibration detection capacitor C between vibration induction electrode 6 and the elasticity micro-oscillator 1
R3
, with reference to forming with reference to the vibration detection capacitor C between vibration induction electrode 5 and the elasticity micro-oscillator 1
R4
, according to the vibration performance of the reference mode of oscillation of elasticity micro-oscillator, with reference to the vibration detection capacitor C
R1
, C
R2
And C
R3
, C
R4
Form two pairs of differential capacitances in twos, be used for monitoring amplitude and frequency with reference to vibration, be used for elasticity oscillator 1 with reference to the fixed ampllitude of vibration and closed-loop control and the tracking of resonant frequency point.
As shown in Figure 1, coriolis force induction electrode 3,4,8 and 9 forms induction vibration respectively and between the elasticity micro-oscillator 1 and detects capacitor C
S3
, C
S4
, C
S2
, C
S1
, when micro-solid mode gyroscope has when input rotation in the sensitive axes direction, can detect capacitor C by induction vibration by the induction vibration of Coriolis influence induction
S3
, C
S4
, C
S2
, C
S1
Detect, according to the vibration performance of the induction vibration mode of elasticity micro-oscillator, under induction vibration mode, induction vibration detects capacitor C
S3
, C
S4
Form pair of differential electric capacity, induction vibration detects capacitor C
S1
, C
S2
Form other pair of differential electric capacity, these two pairs of differential capacitors sum up processing, to improve the detection sensitivity of micro-solid mode gyroscope.
As shown in Figure 3, elasticity micro-oscillator 1 is a long and wide measure-alike square block, its length and wide size are between 400 microns to 1 millimeter, it highly is 400 microns to 800 millimeters, elasticity micro-oscillator 1 adopts the resilient material of conduction to be made, as nickel or copper, also can use nonconducting resilient material, as monocrystalline silicon or quartz, when elasticity micro-oscillator 1 body material is non-conductive, its surface need make the metallic film of skim conduction, and the body material of elasticity micro-oscillator 1 has the little characteristic of structural damping, can obtain high modal vibration quality factor.
As shown in Figure 4, with reference to vibration induction electrode 5,6,10 and 11, coriolis force induction electrode 3,4,8 and 9 lower surface are fixed, their height is identical with the height of elasticity micro-oscillator 1, and they adopt conductive material to be made, as nickel or copper, also can adopt electrically non-conductive material, as monocrystalline silicon or quartz, when adopting electrically non-conductive material to make, the surface of these electrodes all needs to make the metallic film of skim conduction.
As shown in Figure 5, elasticity micro-oscillator 1 has the operational vibration mode of two degeneracys, and the resonant frequency of these two operational vibration mode is identical, and the modal vibration direction of a certain particle is vertical mutually in two operational vibration mode on the elasticity micro-oscillator 1.In the present embodiment, the mode of oscillation on the left side is with reference to mode of oscillation, and the mode of oscillation on the right is induction vibration mode, and except the particle vibration direction was perpendicular, their vibration shape was identical.At a certain mode of oscillation, sometime, when a seamed edge of elasticity micro-oscillator 1 was extensional motion, then relative with it seamed edge was compression movement.
Micro-solid mode gyroscope structure illustrated in figures 1 and 2 adopts micro-processing technology to make, if employing silicon material structure, can adopt photoetching process and ICP-DRIE technology in conjunction with sacrificial layer technology microstructure to be carried out graphically, utilize the high-aspect-ratio process technology of ICP-DRIE to realize the processing in small capacitance gap.If the employing metal structure can adopt UV-LiGA or LiGA technology to make.Piezoelectric membrane as drive electrode can utilize the piezoelectric of making to adopt paster technique to make, and it is also graphical also can to adopt sol-gel or slurry typography to make.
Present embodiment has following characteristics: micro-solid mode gyroscope adopts structure of whole solid state, different with general little oscillation gyro is, there is not independently quality spring structure in the micro-solid mode gyroscope, its quality and spring are to merge in the middle of elasticity micro-oscillator 1, this structure has high shock resistance, anti-vibration ability, can be applied in some abominable working environments, in the military weapon as high overload.The frequency of operation height of micro-solid mode gyroscope is generally hundreds of KHz to several MHz, and than high 2 to 3 orders of magnitude of frequency of operation of general little oscillation gyro, high frequency of operation is conducive to increase measurement bandwidth and the noise reduction of little gyro.Because the Oscillation Amplitude of little oscillation gyro oscillator is minimum, therefore air-damped influence is also very little, can be operated under the atmospheric environment, this subtracts answers sensitivity, this structure is convenient to micro-solid mode gyroscope and the CMOS telemetry circuit carries out integrated, be easy to mass production, also reduced the influence of dead resistance or electric capacity simultaneously.
Claims (5)
1. Piezoelectric Driving capacitance detecting micro-solid mode gyroscope, comprise: elasticity micro-oscillator, Piezoelectric Driving electrode, with reference to vibration induction electrode, coriolis force induction electrode, wherein the elasticity micro-oscillator, with reference to the vibration induction electrode, the coriolis force induction electrode all is to fix by lower surface, and they all are separate; The Piezoelectric Driving distribution of electrodes forms fixed connection at elasticity micro-oscillator upper surface and elasticity micro-oscillator; Be positioned at square elasticity micro-oscillator side with reference to vibration induction electrode, coriolis force induction electrode, and gapped between the side of their sidewall and elasticity micro-oscillator;
Described with reference to the gap between the side of vibration induction electrode, coriolis force induction electrode and elasticity micro-oscillator all less than 1 micron;
Apply alternating voltage between the upper and lower surface of described Piezoelectric Driving electrode, be applied with DC stacked alternating voltage between another Piezoelectric Driving electrode upper and lower surface, phase differential 180 degree between the alternating voltage that applies on two Piezoelectric Driving electrodes, the reference vibration modal frequency of the alternative frequency of driving voltage and elasticity micro-oscillator is identical, under voltage drive, the elasticity micro-oscillator is with the vibration of reference mode of oscillation, and the Piezoelectric Driving electrode adopts piezoelectric to make and forms; Described with reference to forming with reference to vibration detection electric capacity between vibration induction electrode and the elasticity micro-oscillator, vibration performance according to the reference mode of oscillation of elasticity micro-oscillator, four form two pairs of differential capacitances in twos with reference to vibration detection electric capacity, be used for monitoring amplitude and frequency with reference to vibration, be used for the elasticity oscillator with reference to the fixed ampllitude of vibration and closed-loop control and the tracking of resonant frequency point;
Described coriolis force induction electrode forms induction vibration respectively and between the elasticity micro-oscillator and detects electric capacity, when micro-solid mode gyroscope has when input rotation in the sensitive axes direction, induction vibration by the Coriolis influence induction comes out by induction vibration detection capacitance detecting, vibration performance according to the induction vibration mode of elasticity micro-oscillator, under induction vibration mode, induction vibration detects electric capacity and forms two pairs of differential capacitors, and these two pairs of differential capacitors sum up processing;
Described elasticity micro-oscillator has the operational vibration mode of two degeneracys, the resonant frequency of these two operational vibration mode is identical, the modal vibration direction of a certain particle is vertical mutually in two operational vibration mode on the elasticity micro-oscillator, one of them mode of oscillation is with reference to mode of oscillation, the another one mode of oscillation is induction vibration mode, two mode of oscillations are except the particle vibration direction is perpendicular, their vibration shape is identical, at a certain mode of oscillation, sometime, when a seamed edge of elasticity micro-oscillator was extensional motion, then relative with it seamed edge was compression movement.
2. the micro-solid mode gyroscope of Piezoelectric Driving capacitance detecting according to claim 1 is characterized in that, piezoelectric adopts the PZT piezoceramic material.
3. Piezoelectric Driving capacitance detecting micro-solid mode gyroscope according to claim 1 is characterized in that, described micro-solid mode gyroscope adopts micro-processing technology to make.
4. according to claim 1 or 3 described Piezoelectric Driving capacitance detecting micro-solid mode gyroscopes, it is characterized in that, when described micro-solid mode gyroscope is silicon material structure, adopt photoetching process and ICP-DRIE technology in conjunction with sacrificial layer technology microstructure to be carried out graphically, utilize the high-aspect-ratio process technology of ICP-DRIE to realize the processing in small capacitance gap.
5. according to claim 1 or 3 described Piezoelectric Driving capacitance detecting micro-solid mode gyroscopes, it is characterized in that, when described micro-solid mode gyroscope is metal structure, adopt UV-LiGA or LiGA technology to make, the piezoelectric of making as the piezoelectric membrane utilization of drive electrode adopts paster technique to make, or it is also graphical to adopt sol-gel or slurry typography to make.
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| CN102980566B (en) * | 2012-11-30 | 2015-05-20 | 上海交通大学 | Conical ring fluctuation micromechanical gyroscope and preparation method thereof |
| CN103697873B (en) * | 2013-12-13 | 2016-11-23 | 上海交通大学 | Prop drawing shape micromechanics solid fluctuation mode vectors correlation gyro |
| CN110940353B (en) * | 2019-11-13 | 2021-05-28 | 中国船舶重工集团公司第七一七研究所 | Piezoelectric excitation device of bare quartz vibrator and quality factor testing device and method |
| CN110879059B (en) * | 2019-12-30 | 2022-05-27 | 中北大学 | Tunnel magnetoresistance effect micro-gyroscope device and method based on piezoelectric ceramic out-of-plane driving |
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