CN102353370A - Piezoelectric driven capacitance detection micro-solid modal gyroscope - Google Patents
Piezoelectric driven capacitance detection micro-solid modal gyroscope Download PDFInfo
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- CN102353370A CN102353370A CN2011102069370A CN201110206937A CN102353370A CN 102353370 A CN102353370 A CN 102353370A CN 2011102069370 A CN2011102069370 A CN 2011102069370A CN 201110206937 A CN201110206937 A CN 201110206937A CN 102353370 A CN102353370 A CN 102353370A
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Abstract
The invention discloses a piezoelectric driven capacitance detection micro-solid modal gyroscope in the field of micro-electromechanical technology. According to the invention, an elastic micro oscillator, a reference vibration induction electrode and a coriolis force induction electrode are fixed through lower surfaces; a piezoelectric actuation electrode is positioned on the upper surface of the elastic micro oscillator and forms a fixed connection with the elastic micro oscillator; and a tiny gap between the side wall of the reference vibration induction electrode and the coriolis force induction electrode and the side wall of the adjacent square elastic micro oscillator forms an interpole gap variable capacitance. Two merged special vibration modes of the elastic micro oscillator are utilized for operation with high ability of impact resistance and shake resistance; high working frequency is beneficial to increasing the measuring bandwidth of micro gyroscope and reduce noise; it is easy to package with high reliability and low production cost; the adoption of piezoelectric excitation and capacitance detection is beneficial to raising the driving force of reference vibration and simultaneously the invention is convenient to integrate, is easy for batch production and is used to reduce the influence of parasitic resistance or capacitance.
Description
Technical field
What
the present invention relates to is a kind of little gyro of field of micro electromechanical technology, specifically is a kind of Piezoelectric Driving capacitance detecting micro-solid mode gyroscope.
Background technology
In
century in the past, the gyro technology has experienced a series of revolutionary development course.20 beginnings of the century, Elmer Sperry has invented gyrocompass, and it is applied in the marine navigation.The 1950's, realized adopting restrained gyroscope and accelerometer system to respond to the six-freedom motion of aircraft.These early stage gyrosystems only are used for direction reference, therefore they are not had higher accuracy requirement.Because the high complexity and the high cost of frame gyroscope system begin to rise development Strapdown Inertial Units frame of reference the seventies in 20th century.Seek out sufficiently high performance, strapped-down system requires to have higher precision, and its Gyro Precision drift will be lower than 0.01deg/h.In order to satisfy such accuracy requirement, people have developed the optical gyroscope based on the Sagnac effect with superhigh precision and high reliability.The optical gyroscope volume is big, cost an arm and a leg, and therefore is mainly used in space flight, navigation and the aviation field.In in the past more than 30 year, along with the appearance of MEMS technology and progressively development, domestic and international scientific research personnel is being devoted to the exploitation of micro-inertia sensor always, makes every effort to produce that volume is little, low price, the little gyro of high-performance MEMS low in energy consumption.
are found through the literature search to prior art; The people such as K.Maenaka of Japan Kobe university have delivered one piece of paper in the 19th the IEEE MEMS meeting in 2006 Istanbul; Be entitled as " novel solid-state micro gyroscope ", this paper is incorporated in the 634th page to the 637th page.They have proposed a kind of all solid state little gyro based on the special mode of oscillation of piezoelectrics.They discover rectangle piezoelectrics mode of oscillation; Under certain high frequent vibration mode; Each particle on the piezoelectrics is basically along same axial vibration (like the x axle), and the particle vibration around adjacent two seamed edges is in the opposite direction, when promptly some seamed edges are extensional motion; Then adjacent seamed edge is a compression movement; As driving vibration (resonant frequency is about hundreds of KHz), when the angular speed input was arranged on (like the y axle) along certain specific axis, going up induction vibration in piezoelectrics polarised direction (like the z axle) can detect through the induced voltage on piezoelectrics surface with the vibration of piezoelectrics under this special mode of oscillation for they.Through preliminary research, they have verified the feasibility of this little gyro scheme.Owing to do not adopt traditional spring-mass vibrational system; Do not have the flexible structure of resiliency supported in this special all solid state little gyro, so can bear higher foreign impacts, shock resistance anti-vibration ability is strong; And it does not have specific (special) requirements to Vacuum Package, under the normal pressure of can working.Owing to be operated under the higher frequency of operation, help improving the measurement bandwidth of little gyro.
The vibrating mass of
all solid state little gyro of piezo-electric type is piezoelectrics, and the available stronger piezoelectrics material of piezoelectric effect is the PZT piezoelectric ceramics usually.But the elasticity of piezoelectric ceramics is limited with the microfabrication performance; And the material of piezoelectric ceramics and electrology characteristic are responsive to temperature; This has limited the raising of the manufacturing accuracy of this little gyro, and its material selectivity is limited, and the feasibility that the microfabrication mass is made is not high.
Summary of the invention
the objective of the invention is to overcome deficiency of the prior art, and a kind of micro-solid mode gyroscope based on elastic matrix is provided.Micro-solid mode gyroscope is a kind of novel MEMS angular rate sensor; This micro-solid mode gyroscope utilizes the special mode of oscillation of elastic matrix to carry out work; This novel little gyro utilizes electrostatic force to carry out elastomeric operational vibration mode exciting, utilizes electric capacity to detect the induction vibration by the coriolis force excitation.It is the driving and the detection method of widespread use in MEMS that the electrostatic force drive capacitor detects; Especially in little gyro the technology of development comparative maturity; It can obtain bigger driving force and higher detection precision; And carried out integratedly in cmos circuit, and be convenient to mass production, reduce the manufacturing cost of the little gyro of this type.The oscillator of micro-solid mode gyroscope can adopt the structural damping materials with smaller to make, and helps improving the quality factor of oscillator, thereby further improves the accuracy of detection of micro-solid mode gyroscope.
the present invention realize through following technical scheme; The present invention includes: elasticity micro-oscillator, Piezoelectric Driving electrode, with reference to vibration induction electrode, coriolis force induction electrode; Wherein the elasticity micro-oscillator, all be to fix with reference to vibration induction electrode, coriolis force induction electrode through lower surface; The Piezoelectric Driving electrode is positioned at elasticity micro-oscillator upper surface and the elasticity micro-oscillator forms fixed connection, is positioned at square elasticity micro-oscillator side with reference to vibration induction electrode, coriolis force induction electrode; And between their sidewall and the adjacent square elasticity micro-oscillator sidewall small gap is arranged, form die opening variable capacitance with reference to vibration detection and induction vibration detection.
said elasticity micro-oscillator is a square structure, and it is the vibrating mass of whole micro-solid mode gyroscope.The lower surface of elasticity oscillator is fixed, and four sides and reference vibration induction electrode on every side, coriolis force induction electrode form and detect electric capacity, and these electric capacity are accomplished the detection that reference of micro-solid mode gyroscopes vibrate and the detection of induction vibration.Elasticity micro-oscillator employing elastic property material preferably forms, and the structural damping of this resilient material is less, and it has the high quality of vibration factor, and this specific character helps improving the detection sensitivity of micro-solid mode gyroscope.
described Piezoelectric Driving electrode has two, and upper surface and elasticity micro-oscillator that they are positioned at the elasticity micro-oscillator form fixed connection.Piezoelectric Driving electrodes use piezoelectric is made, and is generally PZT.When on the Piezoelectric Driving electrode, applying the alternating signal of elasticity micro-oscillator operation mode frequency, produce the exciting force of elasticity micro-oscillator with reference to vibration, make the elasticity micro-oscillator with reference to vibrating mode of oscillation under.
are described to have four with reference to the vibration induction electrode; They are fixed through lower surface; Be distributed in elasticity micro-oscillator relative both sides on every side in twos, their adjacent with the elasticity micro-oscillator respectively sides form two pairs of differential reference vibration detection electric capacity.Be used for detecting the state of the reference vibration of elasticity micro-oscillator with reference to the vibration induction electrode.Be used to drive the closed-loop control of vibration with reference to the vibration induction electrode, make elasticity micro-oscillator steady operation with reference to the vibration modal frequency point, and keep constant vibration frequency.
described coriolis force induction electrode has four; They are fixed through lower surface; Be distributed in twos with reference to the adjacent both sides of vibration induction electrode; Side that they are adjacent with the elasticity micro-oscillator and elasticity micro-oscillator form the coriolis force induction vibration and detect electric capacity, detect by rotation excitation to go out the De Geshi acceleration, and then obtain the extraneous angular velocity of rotation of on sensitive direction, importing.Four coriolis force induction electrodes form two pairs of differential capacitors, and they carry out difference processing, help eliminating the interference of extraneous common mode vibration, also help improving simultaneously the detection sensitivity of micro-solid mode gyroscope.
the present invention finds through the vibration-mode analysis to above-mentioned elasticity micro-oscillator; Under the special mode of oscillation in certain rank; When limit of elasticity micro-oscillator upper surface is extensional motion; That then relative with it limit is a compression movement, and under this special mode of oscillation, each particle is basically all along identical axially-movable on the elasticity micro-oscillator.For square elasticity micro-oscillator, this special mode of oscillation also has the identical degeneracy mode of resonant frequency.A pair of degeneracy mode like this can be used as the reference mode of oscillation and the induction vibration mode of micro-solid mode gyroscope.
the present invention adopts piezoelectric forces to encourage with reference to mode of oscillation, utilizes change gap variable electric capacity to detect induction vibration mode.Piezoelectric membrane drive with capacitance detecting be the driving and the detection method of widespread use in the MEMS, this driving detection technique is easy to adopt little processing structure to realize, and suitable and cmos circuit carries out integrated.
The Piezoelectric Driving capacitance detecting micro-solid mode gyroscope that
the present invention proposes; Owing to adopt the special mode of oscillation of resilient material oscillator to carry out work; And be not piezoelectrics, this has increased the selection degree of freedom of little gyro manufacturing materials on the one hand, allows matrix to utilize the bigger material of elasticity to make; And can obtain the great quality of vibration factor, utilize piezoelectric forces to drive on the other hand and can obtain bigger driving force.Simultaneously, adopt micro fabrication can realize extremely small electric capacity spacing, this helps improving the detection sensitivity that detects electric capacity.Form between the core component of micro-solid mode gyroscope and the carrier affixed, the be more convenient for installation of GYROCHIP of this structure.The proposition of micro-solid mode gyroscope has overcome the deficiency of all solid state little gyro of piezo-electric type in the background technology, helps obtaining shock resistance, the anti-vibration ability is strong, Vacuum Package is not had the full-solid-state minisize MEMS gyro of specific (special) requirements.
Description of drawings
Fig. 1 is for general structure of the present invention and drive the detection signal synoptic diagram;
Fig. 2 is the structure three-dimensional view of micro-solid mode gyroscope of the present invention;
Fig. 3 is the 3-D view of micro-solid mode gyroscope elasticity micro-oscillator of the present invention;
Fig. 4 is the 3-D view of micro-solid mode gyroscope driving of the present invention and detecting electrode;
Fig. 5 is the driving mode of oscillation of micro-solid mode gyroscope elasticity micro-oscillator of the present invention and the 3-D view of induction vibration mode.
Embodiment
elaborate to embodiments of the invention below in conjunction with accompanying drawing: present embodiment is being to implement under the prerequisite with technical scheme of the present invention; Provided detailed embodiment and process, but protection scope of the present invention is not limited to following embodiment.
are as depicted in figs. 1 and 2, and present embodiment comprises: elasticity micro-oscillator 1, Piezoelectric Driving electrode 2 and 7, with reference to vibration induction electrode 5,6,10 and 11, coriolis force induction electrode 3,4,8 and 9; Wherein elasticity micro-oscillator 1, with reference to vibration induction electrode 5,6,10 and 11; Coriolis force induction electrode 3,4,8 and 9 all is to fix through lower surface, and they all are separate, and Piezoelectric Driving electrode 2 and 7 is distributed in the upper surface of elasticity micro-oscillator 1; Form fixed connection with elasticity micro-oscillator 1; With reference to vibration induction electrode 5,6,10 and 11, coriolis force induction electrode 3,4,8 and 9 is positioned at square elasticity micro-oscillator 1 side, and between the side of their sidewall and elasticity micro-oscillator 1 small gap is arranged; In order to improve the sensitivity that detects electric capacity, these small gaps are all less than 1 micron.
As shown in Figure 1, between the upper and lower surfaces of Piezoelectric Driving electrode 7, apply alternating voltage V
D1
, be applied with DC stacked alternating voltage V between Piezoelectric Driving electrode 2 upper and lower surfaces
D2
, alternating voltage V
D1
And V
D2
Between phase differential 180 degree, voltage V
D1
And V
D2
The reference vibration modal frequency of alternative frequency and elasticity micro-oscillator identical, at voltage V
D1
And V
D2
Under the excitation, the elasticity micro-oscillator is to vibrate with reference to mode of oscillation.Piezoelectric Driving electrode 2 adopts piezoelectric to make with Piezoelectric Driving electrode 7 and forms, in order to improve driving force, adopt the PZT piezoceramic material usually.
Shown in Fig. 1, with reference to forming with reference to the vibration detection capacitor C between vibration induction electrode 10 and the elasticity micro-oscillator 1
R1
, with reference to forming with reference to the vibration detection capacitor C between vibration induction electrode 11 and the elasticity micro-oscillator 1
R2
, with reference to forming with reference to the vibration detection capacitor C between vibration induction electrode 6 and the elasticity micro-oscillator 1
R3
, with reference to forming with reference to the vibration detection capacitor C between vibration induction electrode 5 and the elasticity micro-oscillator 1
R4
, according to the vibration performance of the reference mode of oscillation of elasticity micro-oscillator, with reference to the vibration detection capacitor C
R1
, C
R2
And C
R3
, C
R4
Form two pairs of differential capacitances in twos, be used for monitoring amplitude and frequency, be used for elasticity oscillator 1 with reference to the fixed ampllitude of vibration and the closed-loop control and the tracking of resonant frequency point with reference to vibration.
As shown in Figure 1, coriolis force induction electrode 3,4,8 and 9 forms induction vibration respectively and between the elasticity micro-oscillator 1 and detects capacitor C
S3
, C
S4
, C
S2
, C
S1
, when micro-solid mode gyroscope has the rotation input on the sensitive axes direction, can be by the induction vibration of Coriolis influence induction through induction vibration detection capacitor C
S3
, C
S4
, C
S2
, C
S1
Detect, according to the vibration performance of the induction vibration mode of elasticity micro-oscillator, under induction vibration mode, induction vibration detects capacitor C
S3
, C
S4
Form pair of differential electric capacity, induction vibration detects capacitor C
S1
, C
S2
Form other pair of differential electric capacity, these two pairs of differential capacitors add and handle, to improve the detection sensitivity of micro-solid mode gyroscope.
are as shown in Figure 3, and elasticity micro-oscillator 1 is a long and wide measure-alike square block, and its length and wide size are between 400 microns to 1 millimeter; Highly be 400 microns to 800 millimeters, elasticity micro-oscillator 1 adopts the resilient material of conduction to be made, like nickel or copper; Also can use nonconducting resilient material; Like monocrystalline silicon or quartz, when elasticity micro-oscillator 1 body material was non-conductive, its surface need make the metallic film of skim conduction; The body material of elasticity micro-oscillator 1 has the little characteristic of structural damping, can obtain high modal vibration quality factor.
are as shown in Figure 4, and with reference to vibration induction electrode 5,6,10 and 11, coriolis force induction electrode 3,4,8 and 9 lower surface are fixed; Their height is identical with the height of elasticity micro-oscillator 1, and they adopt conductive material to be made, like nickel or copper; Also can adopt electrically non-conductive material; Like monocrystalline silicon or quartz, when adopting electrically non-conductive material to make, the surface of these electrodes all need make the metallic film of skim conduction.
are as shown in Figure 5; Elasticity micro-oscillator 1 has the operational vibration mode of two degeneracys; The resonant frequency of these two operational vibration mode is identical, and the modal vibration direction of a certain particle is vertical each other in two operational vibration mode on the elasticity micro-oscillator 1.In the present embodiment, the mode of oscillation on the left side is with reference to mode of oscillation, and the mode of oscillation on the right is an induction vibration mode, and except the particle vibration direction was perpendicular, their vibration shape was identical.To a certain mode of oscillation, sometime, when a seamed edge of elasticity micro-oscillator 1 was extensional motion, then relative with it seamed edge was a compression movement.
micro-solid mode gyroscope structure illustrated in figures 1 and 2 adopts micro-processing technology to make; If employing silicon material structure; Can adopt photoetching process and ICP-DRIE technology to combine sacrificial layer technology that microstructure is carried out graphically, utilize the high-aspect-ratio process technology of ICP-DRIE to realize the processing in small capacitance gap.If the employing metal structure can adopt UV-LiGA or LiGA technology to make.Piezoelectric membrane as drive electrode can utilize the piezoelectric of making to adopt paster technique to make, and it is also graphical also can to adopt sol-gel or slurry typography to make.
present embodiment has following characteristics: micro-solid mode gyroscope adopts structure of whole solid state; Different with general little oscillation gyro is; No Independent Quality spring structure in the micro-solid mode gyroscope, its quality and spring are to merge in the middle of elasticity micro-oscillator 1, and this structure has high shock resistance, anti-vibration ability; Can be applied in the certain adverse working environment, in the military weapon like high overload.The frequency of operation of micro-solid mode gyroscope is high, is generally hundreds of KHz to several MHz, and than high 2 to 3 one magnitude of frequency of operation of general little oscillation gyro, high frequency of operation helps increasing the measurement bandwidth and the noise reduction of little gyro.Because the Oscillation Amplitude of little oscillation gyro oscillator is minimum; Therefore air-damped influence is also very little; Can be operated under the atmospheric environment, this subtracts answers sensitivity, and this structure is convenient to micro-solid mode gyroscope and the CMOS telemetry circuit carries out integrated; Be easy to mass production, also reduced the influence of dead resistance or electric capacity simultaneously.
Claims (10)
1. Piezoelectric Driving capacitance detecting micro-solid mode gyroscope; Comprise: elasticity micro-oscillator, Piezoelectric Driving electrode, with reference to vibration induction electrode, coriolis force induction electrode; Wherein the elasticity micro-oscillator, with reference to the vibration induction electrode; The coriolis force induction electrode all is to fix through lower surface, and they all are separate; The Piezoelectric Driving distribution of electrodes forms fixed connection at elasticity micro-oscillator upper surface and elasticity micro-oscillator; Be positioned at square elasticity micro-oscillator side with reference to vibration induction electrode, coriolis force induction electrode, and gapped between the side of their sidewall and elasticity micro-oscillator.
2. Piezoelectric Driving capacitance detecting micro-solid mode gyroscope according to claim 1 is characterized in that, said with reference to the gap between the side of vibration induction electrode, coriolis force induction electrode and elasticity micro-oscillator all less than 1 micron.
3. Piezoelectric Driving capacitance detecting micro-solid mode gyroscope according to claim 1; It is characterized in that; Apply alternating voltage between the upper and lower surfaces of said Piezoelectric Driving electrode, be applied with DC stacked alternating voltage between another Piezoelectric Driving electrode upper and lower surfaces, phase differential 180 degree between the alternating voltage that applies on two Piezoelectric Driving electrodes; The reference vibration modal frequency of the alternative frequency of driving voltage and elasticity micro-oscillator is identical; Under voltage drive, the elasticity micro-oscillator is to vibrate with reference to mode of oscillation, and Piezoelectric Driving electrodes use piezoelectric is made and formed.
4. the micro-solid mode gyroscope of Piezoelectric Driving capacitance detecting according to claim 3 is characterized in that, piezoelectric adopts the PZT piezoceramic material.
5. according to claim 1 or 3 described Piezoelectric Driving capacitance detecting micro-solid mode gyroscopes; It is characterized in that; Said with reference to forming between vibration induction electrode and the elasticity micro-oscillator with reference to vibration detection electric capacity, according to the vibration performance of the reference mode of oscillation of elasticity micro-oscillator, four form two pairs of differential capacitances in twos with reference to vibration detection electric capacity; Be used for monitoring amplitude and frequency, be used for the elasticity oscillator with reference to the fixed ampllitude of vibration and the closed-loop control and the tracking of resonant frequency point with reference to vibration.
6. according to claim 1 or 3 described Piezoelectric Driving capacitance detecting micro-solid mode gyroscopes; It is characterized in that; Said coriolis force induction electrode forms induction vibration respectively and between the elasticity micro-oscillator and detects electric capacity, when micro-solid mode gyroscope has the rotation input on the sensitive axes direction, detects capacitance detecting by the induction vibration of Coriolis influence induction through induction vibration and comes out; Vibration performance according to the induction vibration mode of elasticity micro-oscillator; Under induction vibration mode, induction vibration detects electric capacity and forms two pairs of differential capacitors, and these two pairs of differential capacitors add and handle.
7. according to claim 1 or 3 described Piezoelectric Driving capacitance detecting micro-solid mode gyroscopes, it is characterized in that said elasticity micro-oscillator has the operational vibration mode of two degeneracys; The resonant frequency of these two operational vibration mode is identical; The modal vibration direction of a certain particle is vertical each other in two operational vibration mode on the elasticity micro-oscillator, and one of them mode of oscillation is with reference to mode of oscillation, and the another one mode of oscillation is an induction vibration mode; Two mode of oscillations are except the particle vibration direction is perpendicular; Their vibration shape is identical, to a certain mode of oscillation, sometime; When a seamed edge of elasticity micro-oscillator was extensional motion, then relative with it seamed edge was a compression movement.
8. Piezoelectric Driving capacitance detecting micro-solid mode gyroscope according to claim 1 is characterized in that, said micro-solid mode gyroscope adopts micro-processing technology to make.
9. according to claim 1 or 8 described Piezoelectric Driving capacitance detecting micro-solid mode gyroscopes; It is characterized in that; When said micro-solid mode gyroscope is silicon material structure; Adopt photoetching process and ICP-DRIE technology to combine sacrificial layer technology that microstructure is carried out graphically, utilize the high-aspect-ratio process technology of ICP-DRIE to realize the processing in small capacitance gap.
10. according to claim 1 or 8 described Piezoelectric Driving capacitance detecting micro-solid mode gyroscopes; It is characterized in that; When said micro-solid mode gyroscope is metal structure; Adopt UV-LiGA or LiGA technology to make, the piezoelectric of making as the piezoelectric membrane utilization of drive electrode adopts paster technique to make, or adopts sol-gel or slurry typography making and graphical.
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| CN102980566A (en) * | 2012-11-30 | 2013-03-20 | 上海交通大学 | Conical ring fluctuation micromechanical gyroscope and preparation method thereof |
| CN102980565A (en) * | 2012-11-30 | 2013-03-20 | 上海交通大学 | Circular ring fluctuation micromechanical gyroscope and preparation method thereof |
| CN103697873A (en) * | 2013-12-13 | 2014-04-02 | 上海交通大学 | Prop drawing-shaped micro-mechanical solid fluctuating modal matching gyroscope |
| CN110879059A (en) * | 2019-12-30 | 2020-03-13 | 中北大学 | Tunnel magnetoresistance effect micro-gyroscope device and method based on piezoelectric ceramic out-of-plane driving |
| CN110940353A (en) * | 2019-11-13 | 2020-03-31 | 中国船舶重工集团公司第七一七研究所 | Piezoelectric excitation device of bare quartz vibrator and quality factor testing device and method |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102980566A (en) * | 2012-11-30 | 2013-03-20 | 上海交通大学 | Conical ring fluctuation micromechanical gyroscope and preparation method thereof |
| CN102980565A (en) * | 2012-11-30 | 2013-03-20 | 上海交通大学 | Circular ring fluctuation micromechanical gyroscope and preparation method thereof |
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| CN102980565B (en) * | 2012-11-30 | 2015-07-08 | 上海交通大学 | Circular ring fluctuation micromechanical gyroscope and preparation method thereof |
| CN103697873A (en) * | 2013-12-13 | 2014-04-02 | 上海交通大学 | Prop drawing-shaped micro-mechanical solid fluctuating modal matching gyroscope |
| CN110940353A (en) * | 2019-11-13 | 2020-03-31 | 中国船舶重工集团公司第七一七研究所 | Piezoelectric excitation device of bare quartz vibrator and quality factor testing device and method |
| CN110879059A (en) * | 2019-12-30 | 2020-03-13 | 中北大学 | Tunnel magnetoresistance effect micro-gyroscope device and method based on piezoelectric ceramic out-of-plane driving |
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