CN103344227A - Electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof - Google Patents
Electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and manufacturing method thereof Download PDFInfo
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Abstract
The invention relates to an electrostatically driving piezoelectric detection bulk acoustic wave resonance three-axis microgyroscope and a manufacturing method thereof. The gyroscope comprises a disk vibrator with no release hole, a cylindrical supporting pillar, driving electrodes, equilibrium electrodes and isolation electrodes which are disposed on a substrate, and detection electrodes disposed on the disk vibrator, wherein the detection electrodes are disposed on the disk vibrator; and the driving electrodes, the equilibrium electrodes and the isolation electrodes are disposed on the substrate in a circumference manner and below the disk vibrator, and at the same time, have a gap with the disk vibrator. A piezoelectric effect is used as a detection principle by the gyroscope for extracting deformation signals; and at the same time, non-contact equilibrium electrodes are employed to apply electric potentials to lower electrodes, thereby optimizing the structure of the gyroscope. The gyroscope is manufactured by adopting an MEMS processing technology which is simple in manufacturing process, high in reliability and can guarantee relatively low cost and relatively high yield. Besides, the gyroscope is small in size and simple in structure, and is suitable for large-scale production.
Description
Technical field
What the present invention relates to is little gyro of a kind of field of micro electromechanical technology and preparation method thereof, specifically, relate to be a kind of utilize bulk acoustic wave saddle type resonance mode have three gyroscopes of dish type harmonic oscillator and preparation method thereof.
Background technology
Gyroscope be a kind of can the sensitive carrier angle or the inertia device of angular velocity, in fields such as attitude control and navigator fixs important effect is arranged.Along with science and techniques of defence and Aeronautics and Astronautics industrial expansion, inertial navigation system also develops to low cost, small size, high precision, high reliability, the direction that can adapt to various rugged surroundings for gyrostatic requirement.
Find through the literature search to prior art, Chinese patent " biaxial MEMS gyroscope " (number of patent application: 201020033300.7) utilize MEMS body silicon and bonding technology, process cantilever beam structure and the cavity structure with spring and mass at silicon chip.By up and down and side electrode and mass apply the voltage signal of single characteristic frequency, mass is applied electrostatic force makes mass vibrate.When the input of extraneous angular velocity, under the coriolis force effect, vibration can be transferred to the another one axle and gets on, and can detect the variation of angular velocity by detecting electrode electric capacity.
There is following deficiency in this technology: this gyroscope adopts the structural model of traditional spring-mass, and resulting signal sensitivity is not high, and the Q value is lower, and drift is excessive, and impact resistance is poor, is difficult to reach high precision.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art, provide a kind of static to drive three little gyros of piezoelectric detection bulk acoustic wave resonance and preparation method thereof, this gyro utilizes the detection principle of piezoelectric effect, extracts deformation signal.Utilize contactless counter electrode to apply electromotive force to bottom electrode simultaneously, make the gyro structure obtain optimization.Simultaneously, this gyro volume is little, simple in structure, and quality factor are big, and processing technology is easy to realization, can be with the CMOS process compatible, and shock resistance does not need Vacuum Package, is applicable to mass production.
According to an aspect of the present invention, provide a kind of static to drive three little gyros of piezoelectric detection bulk acoustic wave resonance, it comprises the piezoelectricity disk oscillator of not being with release aperture, columniform support column, substrate, drive electrode, counter electrode, isolated electrode and detecting electrode, described disk oscillator is fixed on the substrate by described columniform support column, and described disk oscillator is perpendicular to the z axle of described substrate; Described detecting electrode is distributed on the described disk oscillator; Described drive electrode, described counter electrode and described isolated electrode are circle distribution on described substrate and are positioned at described disk oscillator below, and be parallel with described disk oscillator and a gap arranged simultaneously; Described drive electrode, described counter electrode and described isolated electrode are according to the intersection loop distribution that puts in order of two counter electrodes, an isolated electrode, two drive electrodes, an isolated electrode, two counter electrodes.
Preferably, described piezoelectricity disk oscillator upper surface is distributed with described detecting electrode, and described disk oscillator lower surface is electric conductor, and is fixed on the substrate by support column.
Preferably, the gap between described drive electrode, described counter electrode and described isolated electrode and the described disk oscillator is the 2-3 micron.
Preferably, per two adjacent described drive electrodes are one group, apply one group of driving DC voltage signal and one group of opposite ac-excited signal of equal and opposite in direction phase place of equal and opposite in direction opposite in sign respectively.Each is organized described drive electrode and forms an electric capacity, is used for applying electrostatic force and drives described disk oscillator generation driving mode.
Preferably, per two adjacent described counter electrodes are one group, apply one group of driving DC voltage signal of equal and opposite in direction opposite in sign respectively.Each is organized described counter electrode and forms an electric capacity, is used for the described disk oscillator of balance lower surface and keeps zero potential.
Preferably, described isolated electrode is distributed between described drive electrode and the described counter electrode, is used for isolating described drive electrode signal and described counter electrode signal.
Preferably, described detecting electrode is distributed on the described disk oscillator, is circle distribution, utilizes piezoelectric effect to extract detection signal.
According to a further aspect in the invention, provide a kind of static to drive the preparation method of three little gyros of piezoelectric detection bulk acoustic wave resonance, its step is as follows:
(a) substrate is cleaned up, oven dry, by photoetching process, sputter forms metal electrode in the front;
(b) deposit spathic silicon layer on substrate, thickness is the 2-3 micron;
(c) by mask, the etch polysilicon layer keeps support column and restraining barrier;
(d) another piezoelectric substrate is cleaned up, oven dry, by mask technology, sputter forms metal electrode in the front;
(e) at piezoelectric substrate back spatter depositing metal layers;
(f) cut utilizes the method for bonding with two substrate bondings, forms integrated structure.
The saddle type resonance mode that the present invention utilizes the disk oscillator is as with reference to vibration, and described disk oscillator simultaneously also can be along disk diameter to X-axis and the Y direction vibration along the Z-direction vibration perpendicular to its disc surfaces under this mode.When move perpendicular to the Z axle positive dirction of disc surfaces in the described disk oscillator edge of X-direction, the described disk oscillator of Y direction is along moving perpendicular to the Z axle negative direction of disc surfaces.This motion produces the effect that is similar to saddle type, is referred to as " bulk acoustic wave saddle type mode ".Apply driving voltage by the drive electrode on the substrate parallel with described disk oscillator, described disk oscillator is applied electrostatic drive signal encourage described disk oscillator to produce driving mode.Be mainly used in the angular velocity of responsive X, Y-axis along the vibration of Z axle.When the angular velocity of the X-axis that is parallel to described disk oscillator surface or Y-axis was imported, under the coriolis force effect, described disk oscillator was subjected to the effect of a turning moment, and described disk oscillator can be along rotating around described columniform support column perpendicular to Z-direction.Wherein, the angular dimension of rotation is directly proportional with the size of input angle.Radially the vibration of X, Y-axis is mainly used in the angular velocity of responsive Z axle.As perpendicular to the angular velocity input of the Z axle on described disk oscillator surface the time, under the coriolis force effect, described disk oscillator is subjected to a turning moment effect, described disk oscillator can along perpendicular to Z-direction around described columniform support column rotation.This moment, deformation can take place near the structure described detecting electrode.This piezoelectric signal can be extracted the size variation that obtains near the deformation described detecting electrode by piezoelectric effect, namely can detect the anglec of rotation perpendicular to described disk oscillator, and then try to achieve three angular velocity input size.
Compared with prior art, the present invention has following beneficial effect:
The present invention utilizes bulk acoustic wave saddle type resonance mode to adopt the disk oscillator with the release aperture be not with, and simple in structure, symmetry is good.Drive electrode, counter electrode and isolated electrode are micron order with the gap of disk oscillator, utilize bonding technology to finish, and processes is easy to realize.Disk oscillator lower surface is without contact electrode, but utilizes one group of opposite counter electrode signal of size same-sign to keep its zero potential, reduced the complicacy of processing technology.The present invention adopts the MEMS processing technology, and manufacture craft is simple, and the reliability height can guarantee lower cost and high rate of finished products.
Description of drawings
By reading the detailed description of non-limiting example being done with reference to the following drawings, it is more obvious that other features, objects and advantages of the present invention will become:
Fig. 1 is the synoptic diagram of structure of the present invention.
Fig. 2 is the 3 dimensional drawing of structure of the present invention.
Fig. 3 is the left view of structure of the present invention.
Fig. 4 is the bulk acoustic wave saddle type resonance mode synoptic diagram of disk oscillator among the present invention.
Fig. 5 is the driving mode synoptic diagram of disk oscillator among the present invention.
Fig. 6 is the detection mode synoptic diagram of disk oscillator among the present invention.
Among the figure: 1 disk oscillator, 2 support columns, 3 substrates, 4 detecting electrodes, 5 drive electrodes, 6 counter electrodes, 7 isolated electrodes.
Embodiment
The present invention is described in detail below in conjunction with specific embodiment.Following examples will help those skilled in the art further to understand the present invention, but not limit the present invention in any form.Should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, can also make some distortion and improvement.These all belong to protection scope of the present invention.
As Fig. 1, Fig. 2, shown in Figure 3, present embodiment comprises:
One with the disk oscillator 1 of release aperture;
Be positioned at the RC support column 2 in described disk oscillator 1 below;
Be positioned at the detecting electrode 4 on the described disk oscillator 1;
Be positioned at drive electrode 5, counter electrode 6 and isolated electrode 7 on the described substrate 3.Described drive electrode 5, described counter electrode 6 and described isolated electrode 7 are circle distribution on described substrate 3 and are positioned at described disk oscillator 1 below, and be parallel with described disk oscillator 1 and a gap arranged simultaneously.
In the present embodiment, described disk oscillator 1 is to be made by piezoelectric to form, its lower surface plated metal conductive layer, and be fixed on the described substrate 3 by described support column 2.
In the present embodiment, described drive electrode 5, described counter electrode 6 and described isolated electrode 7 are distributed in piezoelectricity disk oscillator 1 below perpendicular to the z axle of described substrate 3, are positioned on the described substrate 3, are circle distribution.Gap between described drive electrode 5, described counter electrode 6 and described isolated electrode 7 and the described disk oscillator 1 is the 2-3 micron, and according to counter electrode, counter electrode 6, public electrode 7, drive electrode, drive electrode 5, public electrode 7, counter electrode, counter electrode 6, public electrode 7, drive electrode, drive electrode 5, public electrode 7 ... the intersection loop distribution.
In the present embodiment, described drive electrode 5 has four pairs, and laying respectively at described counter electrode 6 has the 45 degree poor.The every pair of described drive electrode 5 applies one group of driving DC voltage signal and one group of opposite ac voltage signal of equal and opposite in direction phase place of equal and opposite in direction opposite in sign respectively.Each is organized described drive electrode and forms an electric capacity, is used for applying electrostatic force and drives described disk oscillator generation driving mode.
In the present embodiment, described counter electrode 6 has four pairs, lays respectively at the positive negative direction of X-axis and the positive negative direction of Y-axis.Apply one group of driving DC voltage signal of equal and opposite in direction opposite in sign on the every pair of described counter electrode 6 respectively.Each forms an electric capacity to described counter electrode, and the lower surface that is used for the described disk oscillator 1 of balance keeps zero potential.
In the present embodiment, described isolated electrode 7 has eight, lays respectively between every pair of described drive electrode 5 and the counter electrode 6, and all links together between the described isolated electrode 7.Described isolated electrode 7 is used for isolating described drive electrode 5 signals and described counter electrode 6 signals.
In the present embodiment, totally eight of described detecting electrodes 4 are distributed in the upper surface of described disk oscillator 1, are circle distribution.Described detecting electrode utilizes piezoelectric effect to extract detection signal.
As shown in Figure 4, obtain the bulk acoustic wave saddle type resonance mode of described disk oscillator 1 by the method for finite element analysis, described disk oscillator 1 is along the Z-direction vibration perpendicular to its disc surfaces under this mode.When move perpendicular to the Z axle positive dirction of its disc surfaces in described disk oscillator 1 edge of X-direction, the described disk oscillator 1 of Y direction is along moving perpendicular to the Z axle negative direction of its disc surfaces.
As Fig. 5, shown in Figure 6, apply driving voltage by the described drive electrode 5 on the substrate 3 parallel with described disk oscillator 1, described disk oscillator 1 is applied electrostatic drive signal encourage described disk oscillator 1 to produce to drive mode.Be mainly used in the angular velocity of responsive X, Y-axis along the vibration of Z axle.When the angular velocity of the X-axis that is parallel to described disk oscillator 1 surface or Y-axis was imported, under the coriolis force effect, described disk oscillator 1 was subjected to the effect of a turning moment, and described disk oscillator 1 can be along rotating around cylindrical support column 2 perpendicular to Z-direction.Wherein, the angular dimension of rotation is directly proportional with the size of input angle.Radially the vibration of X, Y-axis is mainly used in the angular velocity of responsive Z axle.As perpendicular to the angular velocity input of the Z axle on described disk oscillator 1 surface the time, under the coriolis force effect, described disk oscillator 1 is subjected to a turning moment effect, and described disk oscillator 1 can be along 2 rotations of cylindricality support column.This moment, deformation can take place near the structure described detecting electrode 4.This piezoelectric signal can be extracted the size variation that obtains near described detecting electrode 4 deformation by piezoelectric effect, namely can detect the anglec of rotation perpendicular to described disk oscillator 1, and then try to achieve three angular velocity input size.
Present embodiment relates to the manufacture craft of little gyro, mainly comprises following step:
(a) substrate is cleaned up, oven dry, by photoetching process, sputter forms metal electrode in the front;
(b) deposit spathic silicon layer on substrate, thickness is the 2-3 micron;
(c) by mask, the etch polysilicon layer keeps support column and restraining barrier;
(d) another piezoelectric substrate is cleaned up, oven dry, by mask technology, sputter forms metal electrode in the front;
(e) at piezoelectric substrate back spatter depositing metal layers;
(f) cut utilizes the method for bonding with two substrate bondings, forms integrated structure.
The present invention utilizes bulk acoustic wave saddle type resonance mode to adopt the disk oscillator with the release aperture be not with, and simple in structure, symmetry is good.Drive electrode, counter electrode and isolated electrode are micron order with the gap of disk oscillator, utilize bonding technology to finish, and processes is easy to realize.Disk oscillator lower surface is without receiving electrode, but utilizes one group of opposite counter electrode signal of size same-sign to keep its zero potential, reduced the complicacy of processing technology.The present invention adopts the MEMS processing technology, and manufacture craft is simple, and the reliability height can guarantee lower cost and high rate of finished products.
More than specific embodiments of the invention are described.It will be appreciated that the present invention is not limited to above-mentioned specific implementations, those skilled in the art can make various distortion or modification within the scope of the claims, and this does not influence flesh and blood of the present invention.
Claims (9)
1. a static drives three little gyros of piezoelectric detection bulk acoustic wave resonance, it is characterized in that: it comprises the piezoelectricity disk oscillator of not being with release aperture, columniform support column, substrate, drive electrode, counter electrode, isolated electrode and detecting electrode, wherein: described disk oscillator is fixed on the substrate by described columniform support column, and described disk oscillator is perpendicular to the z axle of described substrate; Described drive electrode, described counter electrode and described isolated electrode are circle distribution on described substrate and are positioned at described disk oscillator below, and be parallel with described disk oscillator and a gap arranged simultaneously; Described drive electrode, described counter electrode and described isolated electrode are according to the intersection loop distribution that puts in order of two counter electrodes, an isolated electrode, two drive electrodes, an isolated electrode, two counter electrodes; Described detecting electrode is distributed on the described disk oscillator.
2. static according to claim 1 drives three little gyros of piezoelectric detection bulk acoustic wave resonance, it is characterized in that: described disk oscillator is that the piezoelectric making forms, and its lower surface is electric conductor, and is fixed on the described substrate by described support column.
3. static according to claim 2 drives three little gyros of piezoelectric detection bulk acoustic wave resonance, and it is characterized in that: described detecting electrode is distributed on the piezoelectricity disk oscillator, is circle distribution, utilizes piezoelectric effect to extract detection signal.
4. static according to claim 1 drives three little gyros of piezoelectric detection bulk acoustic wave resonance, and it is characterized in that: the gap between described drive electrode, described counter electrode and described isolated electrode and the described disk oscillator is the 2-3 micron.
5. static according to claim 1 drives three little gyros of piezoelectric detection bulk acoustic wave resonance, it is characterized in that: per two adjacent described drive electrodes are one group, apply one group of driving DC voltage signal and one group of opposite ac-excited signal of equal and opposite in direction phase place of equal and opposite in direction opposite in sign respectively, each is organized described drive electrode and forms an electric capacity, is used for applying electrostatic force and drives described disk oscillator generation driving mode.
6. static according to claim 1 drives three little gyros of piezoelectric detection bulk acoustic wave resonance, it is characterized in that: per two adjacent described counter electrodes are one group, apply one group of driving DC voltage signal of equal and opposite in direction opposite in sign respectively, each is organized described counter electrode and forms an electric capacity, is used for the described disk oscillator of balance lower surface and keeps zero potential.
7. static according to claim 1 drives three little gyros of piezoelectric detection bulk acoustic wave resonance, it is characterized in that: described isolated electrode is distributed between described drive electrode and the described counter electrode, is used for isolating described drive electrode signal and described counter electrode signal.
8. drive three little gyros of piezoelectric detection bulk acoustic wave resonance according to each described static of claim 1-7, it is characterized in that: described gyro utilizes the saddle type resonance mode of disk oscillator as the reference vibration, described disk oscillator is along the Z-direction vibration perpendicular to its disc surfaces under this mode, simultaneously also can be along disk diameter to X-axis and the Y direction vibration, when move perpendicular to the Z axle positive dirction of its disc surfaces in the described disk oscillator edge of X-direction, the described disk oscillator of Y direction is along moving perpendicular to the Z axle negative direction of its disc surfaces; Apply driving voltage by the described disk oscillator drive electrode on the substrate parallel with described disk oscillator, described disk oscillator is applied electrostatic drive signal encourage described disk oscillator to produce driving mode; When the angular velocity of the X-axis that is parallel to described disk oscillator surface or Y-axis is imported, under the coriolis force effect, described disk oscillator is subjected to the effect of a turning moment, described disk oscillator can be along rotating around described columniform support column perpendicular to Z-direction, wherein, the angular dimension of rotation is directly proportional with the size of input angle; As perpendicular to the angular velocity input of the Z axle on described disk oscillator surface the time, under the coriolis force effect, described disk oscillator is subjected to a turning moment effect, described disk oscillator can be along rotating around described columniform support column perpendicular to Z-direction, this moment, deformation can take place near the structure described detecting electrode, this piezoelectric signal is extracted the size variation that obtains near the deformation described detecting electrode by piezoelectric effect, namely detect the anglec of rotation perpendicular to described disk oscillator, and then try to achieve three angular velocity input size.
9. the preparation method as three little gyros of each described static driving piezoelectric detection bulk acoustic wave resonance of claim 1-8 is characterized in that comprising the steps:
(a) substrate is cleaned up, oven dry, by photoetching process, sputter forms metal electrode in the front;
(b) deposit spathic silicon layer on substrate, thickness is the 2-3 micron;
(c) by mask, the etch polysilicon layer keeps support column and restraining barrier;
(d) another piezoelectric substrate is cleaned up, oven dry, by mask technology, sputter forms metal electrode in the front;
(e) at piezoelectric substrate back spatter depositing metal layers;
(f) cut utilizes the method for bonding with two substrate bondings, forms integrated structure.
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| CN106017450B (en) * | 2016-07-18 | 2020-06-12 | 上海交通大学 | Digital signal processing system of piezoelectric hemispherical resonance micro gyroscope |
| CN108167167A (en) * | 2017-12-25 | 2018-06-15 | 上海交通大学 | A kind of miniature viberation membrane compressor of Combined Electrostatic and Piezoelectric Driving |
| CN108167167B (en) * | 2017-12-25 | 2019-06-07 | 上海交通大学 | A kind of miniature viberation membrane compressor of Combined Electrostatic and Piezoelectric Driving |
| CN108173451B (en) * | 2017-12-25 | 2019-08-06 | 上海交通大学 | A kind of composite piezoelectric containing liquid transmission and electrostatic drive vibrating diaphragm driver |
| CN108173451A (en) * | 2017-12-25 | 2018-06-15 | 上海交通大学 | A kind of composite piezoelectric containing liquid transmission and electrostatic drive vibrating diaphragm driver |
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